CN206278904U - A kind of single micro nano structure transfer device - Google Patents
A kind of single micro nano structure transfer device Download PDFInfo
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- CN206278904U CN206278904U CN201621241534.4U CN201621241534U CN206278904U CN 206278904 U CN206278904 U CN 206278904U CN 201621241534 U CN201621241534 U CN 201621241534U CN 206278904 U CN206278904 U CN 206278904U
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- micro
- nano
- executor
- transfer
- nano structure
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Abstract
The utility model discloses a kind of single micro nano structure transfer device.Transfer device of the present utility model includes：Microscope, micro-nano executor fixed mount, micro-nano executor, transfer probe and micro-nano structure transfer substrate；There is micro-nano structure transfer substrate periodicity raised platforms and coordinate to mark, by microscope Real Time Observation and the pinpoint transfer for manipulating micro-nano executor, realizing single micro nano structure in situ；The preliminary characterization analysis to micro nano structure can be completed on micro-nano structure transfer substrate；And under microscopical home position observation, lookup in situ single micro nano structure to be transferred is marked by coordinate, and the transfer probe by micro-nano executor extracts it from micro-nano structure transfer substrate, the specified location on target substrate substrate is accurately transferred to again, and transfer positioning precision can be better than 1 micron；Using the principle of Electrostatic Absorption, in the case where the tip probe for ensureing transfer probe is cleaned, not clear impurity will not be introduced in transfer process.
Description
Technical field
The utility model is related to the pinpoint transfer techniques of single micro nano structure, and in particular to a kind of single micro-nano
Structure transfer device.
Background technology
Material and structure under micro-nano-scale be widely used in because of its unique physical and chemical performance information, the energy,
The fields such as environment, life science and chemical industry, and increasingly show potential application value.Ground in micro Nano material and structure
In studying carefully, generally require to observe and measure the physicochemical characteristics of single structure, such as single-root carbon nano-tube or semiconductor nanowires
Electrons transport property, to explore its application in microelectronic component, the optical characteristics of single metal nano flake for another example, with
Explore its application in the environment or biology sensor based on optical characteristics, and the single nanostructured with special shape
Electron microscope phenetic analysis etc..Additionally, cannot be solved in the research and application of current material and device under macro-scale
The problem in science or technical barrier released are also required to find principle or solution under micro/nano-scale, it is therefore desirable to by macroscopic material
With device fabrication to micro-nano-scale, then it is conducted a research by microscopic sdIBM-2+2q.p.approach detection mode.
In the processing preparation process of micro Nano material and structure, often numerous structures are mixed, such as useization
Learn vapour deposition process and prepare nano wire or solution methods growth nano particle, gather generally in the substrate or solution of mm-scale
Ten hundreds of micro-nano materials and structure, and cannot be transferred out of single structure carries out microstructure and properties observation；In addition,
After material devices under macro-scale are machined into micro/nano-scale, also generally needing to transfer them to ground in observation instrument
Study carefully.The usual use of transfer currently for single micro nano structure is diluted dispersion in the solution, then by solution titration in institute
The method on substrate is needed, this disposable batch transfer method cannot be accomplished to be pinpointed for specific micro nano structure first
Transfer, the research that the fixed position needed for can only be selected from the micro nano structure being randomly dispersed on a large scale on substrate is right
As, secondly, it is impossible to accomplish to carry out secondary transferring for single micro nano structure interested, once micro nano structure is adsorbed to lining
On bottom, will be unable to take out again be transferred to carries out other phenetic analysis or processing on other substrate, and the 3rd, the method is easily turning
Not clear impurity is introduced during shifting.
Utility model content
In order to the pinpoint for realizing single micro nano structure is shifted, the utility model provides a kind of single micro nano structure
Transfer device, the pinpoint transfer of micro nano structure is realized by cleverly designing.
Single micro nano structure transfer device of the present utility model includes：Microscope, micro-nano executor fixed mount, micro-nano behaviour
Vertical device, transfer probe and micro-nano structure transfer substrate；Wherein, micro-nano executor fixed mount is rigidly fixed on microscope；
Micro-nano executor is rigidly attached on micro-nano executor fixed mount；Transfer probe is arranged on the top of micro-nano executor；Micro-nano knot
What structure transfer substrate position was fixed is placed on microscopical sample stage, vacantly carries to be transferred on micro-nano structure transfer substrate
Micro nano structure；Micro-nano structure transfer substrate includes substrate, periodic raised platforms and coordinate mark, in surfacing
Periodic raised platforms and coordinate mark are formed by micro-nano technology on substrate, coordinate is labeled as on the surface of substrate according to solid
The regular label of determining deviation periodic arrangement, forms groove, the point of the width more than transfer probe of groove between raised platforms
The width at end.
There is a size for dimension more than 5 μm in single micro nano structure requirement to be transferred, such as quasi- one-dimensional nano line
, more than 5 μm, certain length of side of quasi- two-dimensional nano thin slice is more than 5 μm for length；For the micro-nano with a dimension more than raised platforms
Rice structure a, part is located in raised platforms, and another part is suspended on the groove between raised platforms.
Microscope uses light microscope, or electron microscope；Microscope includes microscope body, sample stage, object lens
With imaging display system；Wherein, microscope body includes mechanical cover, imaging optical path and illuminator；Sample stage, object lens and into
As display system is connected to microscope body, sample stage is relative with object lens；Sample stage has horizontal two-dimension position adjustments, height
Regulation and rotation regulatory function；The enlargement ratio of object lens is adjustable, and microscope entirety enlargement ratio is up to or more than 2000
~10000 times, the operating distance of object lens is more than 10mm；Imaging display system is a computer, it is desirable to which it is high to be imaged the speed of response,
For example during 500,000 pixel of imaging resolution, frame per second is per second more than 60 frames.
Micro-nano executor includes coarse adjustment executor and fine tuning executor；Wherein, coarse adjustment executor passes through pinion and rack
Or Damping sliding rail mechanism carries out three-dimensional position regulation, inclination angle, pivot angle and rotation regulation are carried out by bearing locking mechanism；Coarse adjustment
Executor includes coarse adjustment fixing device for installing, coarse position governor motion and coarse adjustment drive link, and coarse adjustment fixing device for installing is fixed
On micro-nano executor fixed mount, coarse position governor motion is installed on coarse adjustment fixing device for installing, in coarse position
The top of governor motion is rigidly connected coarse adjustment drive link；Fine tuning executor realizes fine three by piezoelectric ceramics or hydraulic mechanism
Dimension position adjustments, can reach the position adjustments resolution ratio better than 0.1 micron；Fine tuning executor includes that fixed dress is installed in fine tuning
Put, fine tuning position adjusting mechanism, controller and fine tuning drive link, fine tuning is set on the top of coarse adjustment drive link fixed dress is installed
Put；Fine tuning position adjusting mechanism is set on fine tuning fixing device for installing, and fine tuning position adjusting mechanism passes through conductor cable or liquid
Pressure pipe is connected to controller, is rigidly connected fine tuning drive link on the top of fine tuning position adjusting mechanism.
Transfer probe includes three-dimensional locking mechanism of rotating shaft, probe fix bar and tip probe；Wherein, three-dimensional rotating shaft locking machine
Structure is rigidly attached at the top of the fine tuning drive link of the fine tuning executor of micro-nano executor；Installed on three-dimensional locking mechanism of rotating shaft
Probe fix bar；It is rigidly connected tip probe on the top of probe fix bar；Under the drive of micro-nano executor, probe energy is shifted
Enough carry out position adjustments；Probe fix bar is rigidly connected tip probe and micro-nano executor, and locks machine by three-dimensional rotating shaft
Structure can adjust probe fix bar with the angle between the drive link of the fine tuning executor of micro-nano executor；The tip of tip probe
Diameter is less than 0.5 micron, is bonded what is shifted in single micro nano structure transfer process by the Electrostatic Absorption effect at tip
Single micro nano structure.
Micro-nano structure transfer substrate includes substrate, periodic raised platforms and coordinate mark；Cutting is needed according to experiment
The size of substrate；The periodicity raised platforms of substrate surface are shaped as square or circle, size between 5~10 microns,
Between 1~3 micron, the spacing of adjacent protrusion platform is the width of groove between 1~3 micron to height；The table of raised platforms
Face is polished surface, and flatness is less than 1 nanometer；Coordinate marks the position to each raised platforms on micro-nano structure transfer substrate
It is accurately positioned.
Advantage of the present utility model：
The utility model dexterously devises the micro-nano structure transfer substrate marked with periodicity raised platforms and coordinate,
By microscope Real Time Observation and the pinpoint transfer for manipulating micro-nano executor, realizing single micro nano structure in situ；One
Aspect, micro-nano structure transfer substrate, can be complete on micro-nano structure transfer substrate used as the substrate base for carrying micro nano structure
The preliminary characterization analysis of paired micro nano structure；On the other hand, under microscopical home position observation, by micro-nano structure transfer base
Single micro nano structure to be transferred is searched in coordinate mark original position on piece, and can be incited somebody to action by the transfer probe of micro-nano executor
It is extracted from micro-nano structure transfer substrate, then is accurately transferred to the specified location on target substrate substrate, transfer positioning
Precision can be better than 1 micron；Additionally, transfer method of the present utility model employs the principle of Electrostatic Absorption, ensureing transfer spy
In the case that the tip probe of pin is cleaned, not clear impurity will not be introduced in micro nano structure transfer process.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of one embodiment of single micro nano structure transfer device of the present utility model；
Fig. 2 is the micro-nano structure transfer substrate of one embodiment of single micro nano structure transfer device of the present utility model
Schematic diagram；
Fig. 3 is the micro-nano structure transfer substrate of one embodiment of single micro nano structure transfer device of the present utility model
On coordinate mark schematic diagram；
The flow chart of the transfer method of Fig. 4 single micro nano structures of the present utility model, wherein, (A) and (B) is visited for transfer
Schematic diagram in the groove that the tip of the tip probe of pin enters below single micro nano structure overhanging portion, (C) is above to carry point
Head probe drives the schematic diagram of the raised platforms of the single upward out micro-nano structure transfer substrate of micro nano structure, and (D) is single
Micro nano structure adsorbs the sophisticated schematic diagram in tip probe by Electrostatic Absorption effect, and (E) is to reduce sample stage height extremely
The micro-nano structure transfer substrate fixed on sample stage will not contact the schematic diagram of the tip probe of transfer probe, and (F) is rising
Sample stage makes microscope imaging focus on the schematic diagram on the surface of the target substrate substrate of micro nano structure to be received, and (G) is drop
The height of low tip probe causes that single micro nano structure is contacted to the schematic diagram on the surface of target substrate substrate, and (H) is tip
Remove the schematic diagram of the single micro nano structure for being shifted in the tip of probe.
Specific embodiment
Below in conjunction with the accompanying drawings, the utility model is described further by embodiment.
As shown in figure 1, the single micro nano structure transfer device of the present embodiment includes：Microscope, micro-nano executor are fixed
Frame 5, micro-nano executor, transfer probe and micro-nano structure transfer substrate 4.
Microscope includes microscope body 11, sample stage 12, object lens 13 and imaging display system 14；Wherein, microscope master
Body 11 includes mechanical cover, imaging optical path and illuminator；Sample stage 12, object lens 13 and imaging display system are connected to micro-
Mirror main body, sample stage 12 is relative with object lens 13；Micro-nano executor fixed mount 5 is rigidly fixed and is attached on microscope body 11.
Micro-nano executor includes coarse adjustment executor 21 and fine tuning executor 22；Wherein, coarse adjustment executor 21 is pacified including coarse adjustment
Dress fixing device 211, coarse position governor motion 212 and coarse adjustment drive link 213, coarse adjustment fixing device for installing 211 are fixedly mounted
On micro-nano executor fixed mount 5, coarse position governor motion 212 is installed on coarse adjustment fixing device for installing 211, in coarse adjustment position
The top for putting governor motion 212 is rigidly connected coarse adjustment drive link 213；Fine tuning executor 22 include fine tuning fixing device for installing 221,
Fine tuning position adjusting mechanism 222, controller 223 and fine tuning drive link 224, fine tuning peace is set on the top of coarse adjustment drive link 213
Dress fixing device 221；Fine tuning position adjusting mechanism 222, fine tuning position adjusting mechanism are set on fine tuning fixing device for installing 221
222 are connected to controller 223 by conductor cable or hydraulic tube, are rigidly connected carefully on the top of fine tuning position adjusting mechanism 222
Adjust drive link 224.Fine tuning position adjusting mechanism 222 is manipulated in tri- movements in direction of X, Y and Z by controller 223.
Transfer probe includes three-dimensional locking mechanism of rotating shaft 31, probe fix bar 32 and tip probe 33；Wherein, three-dimensional rotating shaft
Retaining mechanism 31 is rigidly attached at the top of the fine tuning drive link 224 of the fine tuning executor of micro-nano executor；In three-dimensional spindle lock
Probe fix bar 32 is installed in tight mechanism 31；It is rigidly connected tip probe 33 on the top of probe fix bar 32.
As shown in Fig. 2 micro-nano structure transfer substrate 4 includes substrate 41, periodic raised platforms 42 and coordinate mark 44；
Periodic raised platforms 42 and coordinate mark 44, raised platforms 42 are formed by micro-nano technology on the substrate 41 of surfacing
Between formed groove 43.As shown in figure 3, coordinate mark 44 is have rule according to constant spacing periodic arrangement on the surface of substrate
Rule label, to mark the accurate location of periodic raised platforms 42.
The transfer method of the single micro nano structure of the present embodiment, comprises the following steps：
1) micro nano structure is transferred on micro-nano structure transfer substrate：
Volatile non-corrosiveness solution containing micro nano structure is titrated on micro-nano structure transfer substrate；
2) by microscope Real Time Observation and mobile example platform, according to the coordinate mark on micro-nano structure transfer substrate, seek
The position of micro nano structure to be transferred is found, micro nano structure to be transferred is moved to field of microscope center；
3) microscope Real Time Observation, is moved to microscopical by the coarse adjustment executor manipulation transfer probe of micro-nano executor
Between object lens and sample stage, then the tip of the tip probe of the fine tuning executor control transfer probe for passing through micro-nano executor enters
In groove below the overhanging portion of single micro nano structure 5, shown in such as Fig. 4 (A) and (B)；
4) tip probe is controlled to be lifted up by the fine tuning executor of micro-nano executor so that the tip of tip probe exists
Contacted in uphill process to single micro nano structure bottom, tip probe is carried in continuation, drive single micro nano structure to move upwards
It is dynamic, the raised platforms of micro-nano structure transfer substrate are then left, shown in such as Fig. 4 (C)；
5) when single micro nano structure completely disengages from raised platforms, single micro nano structure 5 passes through Electrostatic Absorption effect
Absorption is at the tip of tip probe, and such as Fig. 4 (D) is shown；
6) further after the height of lifting tip probe, keep the tip of tip probe single micro-nano with Electrostatic Absorption
Structure is maintained in the microscopical visual field in existing position, and now microscope imaging focuses on micro-nano structure transfer substrate table
The surface of the periodic raised platforms in face, the tip of tip probe and the single micro nano structure of Electrostatic Absorption are regarded in microscope
Yezhong is presented blurred picture；
7) microscopical sample stage is controlled, sample stage height is reduced first to safe altitude, safe altitude refers to work as sample
In two dimensional surface during mobile example platform, the micro-nano structure transfer substrate fixed on sample stage will not contact transfer probe to platform
Shown in tip probe, such as Fig. 4 (E), micro-nano structure transfer substrate is removed, then by the target substrate substrate of micro nano structure to be received
6 are moved in the middle of the microscopical visual field, slowly rise sample stage, microscope imaging is focused on the mesh of micro nano structure to be received
The surface of substrate base is marked, shown in such as Fig. 4 (F)；
8) according to absorption tip probe tip on single micro nano structure azimuth vernier adjusting sample stage position and
Direction, under microscope high power imaging, point is adjusted to by the particular location of micro nano structure to be received on target substrate substrate 6
The tip of head probe and the single micro nano structure of Electrostatic Absorption under the microscope at the position of blurred picture；
9) the slow height for reducing tip probe is controlled by the fine tuning executor of micro-nano executor so that single micro-nano
Form touch shown in such as Fig. 4 (G), and is adsorbed on the surface of target substrate substrate to the surface of target substrate substrate 6, then will
The single micro nano structure for being shifted is removed at the tip of tip probe, shown in such as Fig. 4 (H), completes turning for single micro nano structure 5
Move past journey.
It is finally noted that, the purpose for publicizing and implementing mode is that help further understands the utility model, but
It will be appreciated by those skilled in the art that：Do not departing from the utility model and appended spirit and scope by the claims, respectively
It is all possible to plant substitutions and modifications.Therefore, the utility model should not be limited to embodiment disclosure of that, the utility model
Claimed scope is defined by the scope that claims are defined.
Claims (8)
1. a kind of single micro nano structure transfer device, it is characterised in that the transfer device includes：Microscope, micro-nano are manipulated
Device fixed mount, micro-nano executor, transfer probe and micro-nano structure transfer substrate；Wherein, the micro-nano executor fixed mount rigidity
It is fixedly mounted on microscope；The micro-nano executor is rigidly attached on micro-nano executor fixed mount；The transfer probe peace
Mounted in the top of micro-nano executor；What the micro-nano structure transfer substrate position was fixed is placed on microscopical sample stage,
Micro nano structure to be transferred is vacantly carried on micro-nano structure transfer substrate；The micro-nano structure transfer substrate includes substrate, week
Phase property raised platforms and coordinate mark, on the substrate of surfacing by micro-nano technology formed periodic raised platforms and
Coordinate is marked, and the coordinate is labeled as the regular label according to constant spacing periodic arrangement on the surface of substrate, and projection is flat
Groove, the sophisticated width of the width more than transfer probe of the groove are formed between platform.
2. transfer device as claimed in claim 1, it is characterised in that the microscope uses light microscope, or electronics
Microscope；The microscope includes microscope body, sample stage, object lens and imaging display system；Wherein, microscope body includes
Mechanical cover, imaging optical path and illuminator；Sample stage, object lens and imaging display system are connected to microscope body, sample
Platform is relative with object lens；There are sample stage horizontal two-dimension position adjustments, height to adjust and rotation regulatory function；The times magnification of object lens
Rate is adjustable, and microscope entirety enlargement ratio is up to or more than 2000~10000 times, and the operating distance of object lens is more than 10mm；
Imaging display system is a computer.
3. transfer device as claimed in claim 1, it is characterised in that the micro-nano executor includes coarse adjustment executor and fine tuning
Executor；Wherein, coarse adjustment executor carries out three-dimensional position regulation by pinion and rack or Damping sliding rail mechanism, by axle
Holding retaining mechanism carries out inclination angle, pivot angle and rotation regulation；Coarse adjustment executor includes that coarse adjustment fixing device for installing, coarse position are adjusted
Mechanism and coarse adjustment drive link, coarse adjustment fixing device for installing are fixedly mounted on micro-nano executor fixed mount, are installed in coarse adjustment and fixed
Coarse position governor motion is installed on device, is rigidly connected coarse adjustment drive link on the top of coarse position governor motion；Fine tuning is grasped
Vertical device realizes that fine three-dimensional position is adjusted by piezoelectric ceramics or hydraulic mechanism, and position adjustments resolution ratio is more than 0.1 micron；Carefully
Adjusting executor includes fine tuning fixing device for installing, fine tuning position adjusting mechanism, controller and fine tuning drive link, in coarse adjustment drive link
Top set fine tuning fixing device for installing；Fine tuning position adjusting mechanism, fine tuning position are set on fine tuning fixing device for installing
Governor motion is connected to controller by conductor cable or hydraulic tube, is rigidly connected fine tuning on the top of fine tuning position adjusting mechanism
Drive link.
4. transfer device as claimed in claim 1, it is characterised in that the transfer probe include three-dimensional locking mechanism of rotating shaft,
Probe fix bar and tip probe；Wherein, three-dimensional locking mechanism of rotating shaft is rigidly attached at the top of micro-nano executor；Turn in three-dimensional
Probe fix bar is installed on shaft locking mechanism；It is rigidly connected tip probe on the top of probe fix bar；In micro-nano executor
Under drive, transfer probe can carry out position adjustments；Probe fix bar is rigidly connected tip probe and micro-nano executor, and leads to
Crossing three-dimensional locking mechanism of rotating shaft can adjust probe fix bar with the angle between the drive link of the fine tuning executor of micro-nano executor
Degree.
5. transfer device as claimed in claim 4, it is characterised in that the tip diameter of the tip probe is less than 0.5 micron,
The single micro nano structure for being shifted is bonded in single micro nano structure transfer process by the Electrostatic Absorption effect at tip.
6. transfer device as claimed in claim 1, it is characterised in that the shape of the periodicity raised platforms in the micro-nano structure
Shape is square or circle, and between 5~10 microns, highly between 1~3 micron, the spacing of adjacent protrusion platform is size
The width of groove is between 1~3 micron.
7. transfer device as claimed in claim 6, it is characterised in that the surface of the raised platforms is polished surface, smooth
Degree is less than 1 nanometer.
8. transfer device as claimed in claim 1, it is characterised in that the single micro nano structure to be transferred has
The size of dimension is more than 5 μm；For the micro nano structure with a dimension more than raised platforms, a part is located at raised platforms
On, another part is suspended on the groove between raised platforms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621241534.4U CN206278904U (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621241534.4U CN206278904U (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206278904U true CN206278904U (en) | 2017-06-27 |
Family
ID=59082670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621241534.4U Withdrawn - After Issue CN206278904U (en) | 2016-11-18 | 2016-11-18 | A kind of single micro nano structure transfer device |
Country Status (1)
| Country | Link |
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| CN (1) | CN206278904U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106430084A (en) * | 2016-11-18 | 2017-02-22 | 北京大学 | Single micro/nano structure transferring device and single micro/nano structure transferring method |
| CN111261473A (en) * | 2020-03-31 | 2020-06-09 | 中山大学 | Method for manufacturing single one-dimensional nano-structure field emission cold cathode |
-
2016
- 2016-11-18 CN CN201621241534.4U patent/CN206278904U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106430084A (en) * | 2016-11-18 | 2017-02-22 | 北京大学 | Single micro/nano structure transferring device and single micro/nano structure transferring method |
| CN106430084B (en) * | 2016-11-18 | 2017-12-01 | 北京大学 | A kind of single micro nano structure transfer device and its transfer method |
| CN111261473A (en) * | 2020-03-31 | 2020-06-09 | 中山大学 | Method for manufacturing single one-dimensional nano-structure field emission cold cathode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170627 Effective date of abandoning: 20171201 |
|
| AV01 | Patent right actively abandoned |