CN106426085B - High-throughput multi-mode based on micro-nano operation robot characterizes system and method - Google Patents
High-throughput multi-mode based on micro-nano operation robot characterizes system and method Download PDFInfo
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- CN106426085B CN106426085B CN201610962971.3A CN201610962971A CN106426085B CN 106426085 B CN106426085 B CN 106426085B CN 201610962971 A CN201610962971 A CN 201610962971A CN 106426085 B CN106426085 B CN 106426085B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
Abstract
The invention discloses a kind of high-throughput multi-modes based on micro-nano operation robot to characterize system and method.System application mainly includes that micro-nano operates robot, test cell switching device, multi-mode test cell under a scanning electron microscope.Method used by the system are as follows: utilize the big visual field search capability quick lock in target of scanning electron microscope, micro-nano operation robot is driven to carry out precisely micro- manipulation to characterization target, being quickly converted for multi-mode test cell is realized by control test cell switching device, achieve the purpose that end effector replace automatically with more performance characterization parallel practices, to realize high-throughput multi-mode characterization test.The present invention has high-throughput multi-mode characterization ability, and has the characteristics that manipulation speed is fast, characterization is high-efficient.
Description
Technical field
The invention discloses a kind of high-throughput multi-modes based on micro-nano operation robot to characterize system and method, belongs to micro-
Receive technology, micro-nano operating technology, the field of test technology.
Background technique
Laboratory facilities are the important methods of material science research, can be to new synthesis material using different laboratory apparatus and method
The performance of material or micro-structure is tested and is characterized, to realize the foundation of material large database concept, while being also " material gene
The target that group " concept is pursued.Currently, atomic force microscope (AFM) is the instrument of common material or micro-structure test characterization,
Its resolution ratio has excellent power or electric performance test ability and microcell three-dimensional appearance imaging capability up to atomic level.But
Due to the limitation of its image-forming principle and structure, the features such as scanning range is small, test speed is slow, test mode is single, is also constrained
Further develop.Scanning electron microscope is big with field range, fast moves the strong and good pattern imaging capability of ability,
There is apparent advantage in material morphology characterization and analysis field, but it is only limitted to morphology characterization and constituent analysis, it can not be to material
Material micro-property is characterized.Meanwhile single performance characterization mode must carry out multiple recanalization and setting to sample and equipment,
Increase testing time and difficulty.And the appearance of micro-nano operation robot, it has expanded under minute yardstick and research object has been operated
With the ability of characterization so that micro Nano material research become more diversification.Iron-enriched yeast technology pursues high speed, high efficiency
Target, it is desirable that realize the maximization of experimental data amount within a short period of time, therefore also require further to improve material characterization technology
Single-mode and method.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a kind of high throughputs based on micro-nano operation robot
Multi-mode characterizes system and method, solves the problems such as single existing test equipment representation pattern, characterization low efficiency, while will be micro-
Receive that operation robot is integrated to carry out high-throughput multi-mode test under a scanning electron microscope and be able to achieve fast search target, precisely
The function of microcell manipulation and multidimensional performance characterization has high-throughput multi-mode characterization ability, and, characterization effect fast with manipulation speed
The features such as rate is high.
In order to achieve the above object, insight of the invention is that micro-nano operation robot is mounted on scanning electron microscope
It is interior, test cell switching device is installed respectively, multi-mode test cell is respectively fixedly connected to be switched in test cell on motion platform
On the different station fixture of device, different end effectors is separately mounted on multi-mode test cell.Utilize scanning electron
The big visual field search capability quick lock in target of microscope, driving micro-nano operation robot carry out precisely micro- manipulation to characterization target,
Being quickly converted for multi-mode test cell is realized by automatically controlling test cell switching device, reaches end effector automatically more
The purpose with multi-mode performance test parallel practice is changed, to realize high-throughput multi-mode characterization.
Conceived according to foregoing invention, the present invention adopts the following technical solutions:
A kind of high-throughput multi-mode based on micro-nano operation robot characterizes system, using under a scanning electron microscope,
Micro-nano operation robot is mounted in scanning electron microscope, and installation is surveyed respectively on the motion platform of micro-nano operation robot
Unit switching device is tried, multi-mode test cell is respectively fixedly connected on the different station fixture of test cell switching device, different
End effector be separately mounted on multi-mode test cell.
A kind of high-throughput multi-mode characterizing method based on micro-nano operation robot operates machine based on micro-nano using above-mentioned
The high-throughput multi-mode of device people characterizes system, and operating procedure is as follows:
1) target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and it is numbered
A1, A2 ..., An；
2) motion platform of control micro-nano operation robot, moves it to characterization target area, operates machine using micro-nano
Device people carries out precisely micro- manipulation to characterization target, orientation and posture needed for obtaining characterization test；
3) the test cell switching device on driving micro-nano operation robot movement platform, fast automatic conversion testing unit
Different station fixture in switching device reaches aiming station, so that the multi-mode test replaced on different station fixture is single
Member；
4) the multi-mode test cell on different station fixture is controlled, is cooperated using more end effectors to different characterization mesh
It is marked on to carrying out concurrent testing under mould-fixed；
5) it repeats the above steps 2) to step 4), realizes and precisely micro- manipulation and multi-mode table are carried out to each characterization target simultaneously
Sign test；
6) real-time parallel handles the test data obtained under each mode, is transmitted to integrated terminal upper computer, establishes big number
According to library, multi-mode iron-enriched yeast is carried out to characterization target to realize.
Compared with prior art, the present invention having following obvious prominent substantive distinguishing features and remarkable advantage:
The present invention is single for existing test equipment characteristic manner, characterizes the problems such as low efficiency, and micro-nano is operated robot
It is integrated to carry out high-throughput multi-mode test under a scanning electron microscope, be able to achieve fast search target, the manipulation of accurate microcell and
The function of multidimensional performance characterization has high-throughput multi-mode characterization ability, and has the spies such as manipulation speed is fast, characterization is high-efficient
Point.
Detailed description of the invention
Fig. 1 is the high-throughput multi-mode characterizing method basic flow chart that robot is operated based on micro-nano.
Fig. 2 is the high-throughput multi-mode characterization system block diagram that robot is operated based on micro-nano.
Fig. 3 is the iron-enriched yeast platform schematic diagram that robot is operated based on micro-nano.
Fig. 4 be based on micro-nano operate robot high pass measure one's own ability electrical property characterize flow chart.
Specific embodiment
The preferred embodiment in the present invention is clearly and completely described with reference to the accompanying drawing, it is clear that described reality
Applying example is only a part of the embodiments of the present invention.
A kind of referring to fig. 2~Fig. 3, high-throughput multi-mode characterization system based on micro-nano operation robot, applies and is scanning
Under electron microscope, micro-nano operation robot is mounted in scanning electron microscope, and the movement of micro-nano operation robot is flat
Test cell switching device is installed respectively, the different works in test cell switching device are respectively fixedly connected in multi-mode test cell on platform
On position fixture, different end effectors is separately mounted on multi-mode test cell.
Referring to figs. 1 to 4, a kind of high pass based on micro-nano operation robot is measured one's own ability power mode characterizing method, and application is above-mentioned
The high-throughput multi-mode based on micro-nano operation robot characterize system, operating procedure is as follows:
1) target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and it is numbered
A1, A2, A3；
2) motion platform of control micro-nano operation robot, is moved it to characterization target area A1, is operated using micro-nano
Robot carries out precisely micro- manipulation to characterization target, orientation and posture needed for obtaining characterization test；
3) the test cell switching device on driving micro-nano operation robot movement platform, fast automatic switch fixture to power
Mode test station makees parallel power performance test to characterization target using the driving end effector cooperation of force mode test cell,
Obtain each Young's modulus of characterization target；
4) the test cell switching device on driving micro-nano operation robot movement platform, fast automatic switch fixture to electricity
Mode test station makees parallel electric performance test to characterization target using the driving end effector cooperation of power mode test cell,
Obtain each conductivity of characterization target；
5) it repeats the above steps 2) to step 4), realizes and precisely micro- manipulation and power power mode are carried out to each characterization target simultaneously
The purpose of characterization test；
6) real-time parallel handles the test data obtained under each mode, is transmitted to integrated terminal upper computer, establishes big number
According to library, power power mode iron-enriched yeast is carried out to characterization target to realize.
The embodiment of the present invention is integrated under a scanning electron microscope by micro-nano operation robot, carries out power to research object
Power mode iron-enriched yeast is able to achieve the function of fast search target, accurate microcell manipulation and multidimensional performance characterization, has manipulation
The features such as speed is fast, characterization is high-efficient.
Claims (2)
1. a kind of high-throughput multi-mode based on micro-nano operation robot characterizes system, using under a scanning electron microscope,
Be characterized in that: micro-nano operation robot is mounted in scanning electron microscope, on the motion platform of micro-nano operation robot
Test cell switching device is installed respectively, the different station folder in test cell switching device is respectively fixedly connected in multi-mode test cell
On tool, different end effectors is separately mounted on multi-mode test cell.
2. it is a kind of based on micro-nano operation robot high-throughput multi-mode characterizing method, using in claim 1 based on micro-nano
The high-throughput multi-mode for operating robot characterizes system, which is characterized in that operating procedure is as follows:
1) target is characterized using the big visual field search capability quick lock in of scanning electron microscope, and A1 is numbered to it,
A2 ..., An；
2) motion platform of control micro-nano operation robot, moves it to characterization target area, operates robot using micro-nano
Precisely micro- manipulation is carried out to characterization target, orientation and posture needed for obtaining characterization test；
3) the test cell switching device on driving micro-nano operation robot movement platform, fast automatic conversion testing unit switching
Different station fixture on device reaches aiming station, to replace the multi-mode test cell on different station fixture；
4) the multi-mode test cell on different station fixture is controlled, is existed using the cooperation of more end effectors to different characterization targets
To carrying out concurrent testing under mould-fixed；
5) it repeats the above steps 2) to step 4), realizes that precisely micro- manipulation and multi-mode characterization are surveyed to the progress of each characterization target simultaneously
The purpose of examination；
6) real-time parallel handles the test data obtained under each mode, is transmitted to integrated terminal upper computer, establishes large database concept,
Multi-mode iron-enriched yeast is carried out to characterization target to realize.
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| CN110270978B (en) * | 2019-07-15 | 2020-11-10 | 哈尔滨工业大学 | Micro-nano robot control platform system under coupling action of multiple physical energy fields |
| CN114571458B (en) * | 2022-03-21 | 2022-11-15 | 苏州大学 | Micro-nano robot assembly track learning method based on dynamic motion elements |
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| CN101982780A (en) * | 2010-09-03 | 2011-03-02 | 长春理工大学 | Technique and system for real-time detecting, controlling and diagnosing cells of robot micro nanometer mixed living body |
| CN102485640A (en) * | 2010-12-03 | 2012-06-06 | 中国科学院沈阳自动化研究所 | Task-oriented mixed mode nano operation method based on atomic force microscope |
| US8229080B2 (en) * | 2006-11-10 | 2012-07-24 | Verizon Patent And Licensing Inc. | Testing and quality assurance of multimodal applications |
| CN105500389A (en) * | 2016-02-03 | 2016-04-20 | 苏州大学 | Automatic replacement device of end effector of micro-nano robot |
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| CN2510248Y (en) * | 2001-11-18 | 2002-09-11 | 华中科技大学 | Micro-assembling robot suitable for operating submillimeter-level micro-object |
| CN1696652A (en) * | 2004-02-23 | 2005-11-16 | 塞威公司 | Particle beam device probe operation |
| US8229080B2 (en) * | 2006-11-10 | 2012-07-24 | Verizon Patent And Licensing Inc. | Testing and quality assurance of multimodal applications |
| CN101982780A (en) * | 2010-09-03 | 2011-03-02 | 长春理工大学 | Technique and system for real-time detecting, controlling and diagnosing cells of robot micro nanometer mixed living body |
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