CN107703012B - Variable-temperature indexable micro-nano indentation testing device - Google Patents
Variable-temperature indexable micro-nano indentation testing device Download PDFInfo
- Publication number
- CN107703012B CN107703012B CN201710982770.4A CN201710982770A CN107703012B CN 107703012 B CN107703012 B CN 107703012B CN 201710982770 A CN201710982770 A CN 201710982770A CN 107703012 B CN107703012 B CN 107703012B
- Authority
- CN
- China
- Prior art keywords
- working cavity
- pressure head
- mounting plate
- micro
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 51
- 238000007373 indentation Methods 0.000 title claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 9
- 230000009471 action Effects 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 7
- 230000033001 locomotion Effects 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 230000001360 synchronised effect Effects 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 17
- 229910052736 halogen Inorganic materials 0.000 claims description 13
- 150000002367 halogens Chemical class 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 238000005057 refrigeration Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 238000002474 experimental method Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 4
- 230000017105 transposition Effects 0.000 claims description 4
- 235000007164 Oryza sativa Nutrition 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 235000009566 rice Nutrition 0.000 claims description 3
- 240000007594 Oryza sativa Species 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 11
- 238000011161 development Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004154 testing of material Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/54—Performing tests at high or low temperatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
- G01N2203/0051—Piezoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0078—Hardness, compressibility or resistance to crushing using indentation
- G01N2203/0082—Indentation characteristics measured during load
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0222—Temperature
- G01N2203/0226—High temperature; Heating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0222—Temperature
- G01N2203/0228—Low temperature; Cooling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0676—Force, weight, load, energy, speed or acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0682—Spatial dimension, e.g. length, area, angle
Abstract
The invention relates to a variable-temperature indexable micro-nano indentation testing device, and belongs to the field of precise instruments. The device comprises a workbench indexing base, a high-low temperature working cavity and a pressure head driving/feeding mechanism, wherein the high-low temperature working cavity is arranged on an L-shaped mounting plate of the workbench indexing base, and the pressure head driving/feeding mechanism is arranged on an equipment base of the workbench indexing base; the workbench indexing base is mainly used for realizing workbench indexing action and supporting the whole machine, the high-low temperature working cavity can provide continuous variable-temperature environment atmosphere for the test piece measuring process and isolate external interference, the pressure head driving/feeding mechanism mainly realizes feeding action of the pressure head in the vertical direction, and measurement data are obtained through the pressure sensor and the displacement sensor. The advantages are that: the measuring result is accurate, the measuring range is wide, the structure is compact, and the development of the technical field of testing the mechanical properties of materials and equipment thereof is greatly promoted.
Description
Technical Field
The invention relates to the field of precise instruments, in particular to a variable-temperature indexable micro-nano indentation testing device. The test device is suitable for indentation tests of various materials such as metal, ceramic, high polymer, semiconductor, special functional materials, biological tissues and the like. Multiple groups of indentation tests can be carried out on different parts of the same test piece under the environment condition of continuous temperature change, and multiple groups of data are measured so as to improve the measurement accuracy and the experiment feasibility; the high-low temperature working cavity provides high-temperature and low-temperature environment atmosphere for indentation test through the halogen lamp and the refrigeration probe, and the application range of the instrument is greatly improved.
Background
With the development of society and the progress of scientific technology, the demand for new materials is also becoming more and more urgent. The most important ring is the testing of the mechanical properties of the new material before the new material is put into use, which provides challenges for various material performance testing machines. Currently, the lack of advanced testing techniques and instruments among many factors affecting the performance testing and detection level of materials is a technical bottleneck restricting the development of new materials. Therefore, the development of a novel and widely applied material testing device has important significance for the research and development of novel materials. The indentation measuring instrument is an important device for testing a series of important mechanical properties such as material hardness, elastic modulus, creep property and the like under different temperature environments, and is a very critical ring for testing the mechanical properties of the material. The existing indentation testing instrument at home and abroad can only realize high-temperature and low-temperature loading independently, cannot realize nano indentation testing experiments under high-temperature and low-temperature continuous variable-temperature environments, has certain limitations in testing environments, and is not slow to start to develop novel indentation measuring instruments.
Disclosure of Invention
The invention aims to provide a variable-temperature indexable micro-nano indentation testing device which solves the problems existing in the prior art. The invention is characterized in that the workbench can realize continuous 360-degree transposition, so that the tested piece can carry out multipoint indentation measurement under the same test environment, and a plurality of groups of experimental data can be measured; the high-low temperature working cavity can provide a required test environment atmosphere for a test sample in an indentation experiment, the internal pressure of the working cavity can be accurately regulated through the air inlet, the air outlet and the vacuum pressure gauge, and the high-temperature and low-temperature environment atmosphere is provided for the indentation test through the halogen lamp and the refrigeration probe; in addition, the ball screw is dragged by the servo motor to drive the ultra-high precision ball guide rail to push the pressure head in the vertical direction to generate accurate displacement vertical to the surface of the test sample, and the precise pressing-in motion of the tested sample is realized after contact detection.
The above object of the present invention is achieved by the following technical solutions:
the variable-temperature indexable micro-nano indentation testing device comprises a workbench indexing base 1, a high-low temperature working cavity 2 and a pressure head driving/feeding mechanism 3, wherein the high-low temperature working cavity 2 is arranged on an L-shaped mounting plate 112 of the workbench indexing base 1, and the pressure head driving/feeding mechanism 3 is arranged on an equipment base 102 of the workbench indexing base 1; the workbench indexing base 1 realizes workbench indexing action and complete machine support, the high-low temperature working cavity 2 provides continuous variable-temperature environment atmosphere for the test piece measuring process, external interference can be isolated, the pressure head driving/feeding mechanism 3 realizes feeding action of the pressure head in the vertical direction, and measurement data are obtained through the pressure sensor 319 and the displacement sensor 317.
The workbench indexing base 1 is as follows: the T-shaped support 101, the lower bearing seat A103 and the T-shaped mounting plate 114 are respectively mounted on the equipment base 102, the double-linked angular contact ball bearing A104 is mounted in an inner hole of the lower bearing seat A103, and the double-linked angular contact ball bearing A104 axially and radially supports the lower journal of the rotating shaft 106; the driven synchronous pulley 105 is arranged on the rotating shaft 106, the rotating shaft 106 is arranged in the inner holes of the duplex angular contact ball bearing A104 and the deep groove ball bearing A108, the upper bearing seat A107 is arranged on the L-shaped mounting plate 112, and the deep groove ball bearing A108 is arranged in the inner hole of the upper bearing seat A107; the insulating cushion block 109, the insulating platform 111 and the workbench 110 are sequentially arranged at the upper end of the rotating shaft 106; the L-shaped mounting plate 112 is mounted on the T-shaped mounting plate 114, the motor mounting seat 117 is mounted on the T-shaped support 101, the servo motor A115 is mounted on the motor mounting seat 117, the driving synchronous pulley 116 is mounted on the output shaft of the servo motor A115, the synchronous belt 113 is mounted on the driving synchronous pulley 116 and the driven synchronous pulley 105, and the servo motor A115 transmits power to the rotating shaft 106 through the transmission of the synchronous belt 113.
The servo motor A115 is an alternating current servo motor, and realizes linear feeding motion.
The heat insulation platform 111 is a platform with a T-shaped groove.
The high-low temperature working cavity 2 is: the air inlet connector 201, the air outlet connector 203 and the vacuum pressure gauge 202 are respectively arranged on one side of the working cavity 207, the refrigeration probe 206 is arranged on the other side of the working cavity 207, wherein the air inlet connector 201 and the air outlet connector 203 respectively ventilate and exhaust the interior of the working cavity 207, the pressure in the working cavity 207 is controlled, and meanwhile, the vacuum pressure gauge 202 displays the internal pressure of the working cavity 207 in real time; the rear end of the refrigeration probe 206 is connected with a liquid nitrogen circulator, and the temperature of the inside of the working cavity 207 is reduced by circularly loading the temperature of liquid nitrogen and nitrogen; the transparent window 208 is arranged on the front surface of the working cavity 207 and is pressed and fixed by the window pressing plate 209; the two halogen lamps 204 are symmetrically arranged in the working cavity 207, and high-low temperature continuous loading of a test piece is realized by adjusting the power of the halogen lamps 204 and the power of the refrigerating probe 206; a sealing cap 205 is mounted on top of the working chamber 207.
The ram driving/feeding mechanism 3 is: the guide rail mounting seat 309 is mounted on a vertical plate of the equipment base 102, the upper bearing seat B308 and the lower bearing seat B301 are both mounted on the guide rail mounting seat 309, the duplex angular ball bearing B314 is mounted in an inner hole of the upper bearing seat B308, the deep groove ball bearing B302 is mounted in an inner hole of the lower bearing seat B301, the ball screw 307 is mounted in inner holes of the duplex angular ball bearing B314 and the deep groove ball bearing B302, the lock nut 311 is mounted on the ball screw 307, the motor mounting plate 310 is mounted on the guide rail mounting seat 309, the servo motor B312 is mounted on the motor mounting plate 310, and the coupler 313 is connected with a motor output shaft and a shaft end of the ball screw; the ball guide rail 315 is mounted on the guide rail mounting seat 309, the slide block mounting plate 304 is mounted on the slide block of the ball guide rail 315, the nut connecting block 306 is mounted on the slide block mounting plate 304 and the nut of the ball screw 307, and the nut drives the slide block mounting plate 304 to do macroscopic linear motion under the limit of the ball guide rail 315 while the ball screw 307 is in rotary motion; the connecting block 316 is arranged on the slider mounting plate 304, the flexible hinge 318 is arranged on the connecting block 316, the piezoelectric stack 305 is arranged inside the flexible hinge 318, and indentation experiments and microscopic feeding motions are carried out through the inverse piezoelectric effect of the piezoelectric stack 305; the displacement sensor 317 is mounted on the slider mounting plate 304, the pressure sensor 319 is mounted at the end of the flexible hinge 318, the ram mounting bar 320 is mounted on the pressure sensor 319, the sensor trigger plate 303 is sandwiched between the pressure sensor 319 and the ram mounting bar 320, the ram 321 is mounted on the ram mounting bar 320, the ram 321 and the slider mounting plate 304 are simultaneously in linear motion and data is fed back to the operator via the pressure sensor 319 and the displacement sensor 317.
The ball guide rail 315 is an SP ultra-polished rice ball guide rail, so that macroscopic driving is realized;
the pressure head 321 is a glass pressure head, and is assisted by a flexible hinge and a piezoelectric stack to realize micro-driving of linear driving.
The pressure sensor 319 is a precision load sensor, so as to realize accurate detection of the pressing-in load force.
The invention has the beneficial effects that: the workbench can realize continuous 360-degree transposition, so that a single tested test piece can realize multi-group experimental data measurement through a rotary conversion point mechanism, and then data processing is carried out through a mathematical statistics method, so that a more accurate measurement result can be obtained; the continuous temperature changing function of the high-low temperature working cavity can obtain indentation experimental data under the continuous temperature changing condition; the halogen lamp and the refrigeration probe provide high-temperature and low-temperature environmental atmosphere for indentation test, so that the test range is enlarged; in conclusion, the invention has the advantages of accurate measurement result, wide measurement range, compact structure and the like, and greatly promotes the development of the technical field of mechanical property testing of materials and equipment thereof.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate and explain the invention and together with the description serve to explain the invention.
FIG. 1 is a schematic diagram of the whole machine of the present invention;
FIG. 2 is a schematic view of an assembly structure of a workbench indexing base according to the present invention;
FIG. 3 is an exploded view of the assembly of the indexing base of the table of the present invention;
FIG. 4 is a schematic diagram of an assembled structure of a high and low temperature working chamber according to the present invention;
FIG. 5 is an exploded view of the high and low temperature working chamber assembly of the present invention;
FIG. 6 is a schematic view of the assembled structure of the ram drive/feed mechanism of the present invention;
FIG. 7 is an exploded view of the ram drive/feed mechanism assembly of the present invention;
fig. 8 is a schematic diagram of an indentation apparatus of the present invention.
In the figure: 1. a workbench indexing base; 2. a high-low temperature working chamber; 3. a ram drive/feed mechanism; 101. a T-shaped support; 102. an equipment base; 103. a lower bearing seat A; 104. a duplex angular contact ball bearing A; 105. a driven synchronous pulley; 106. a rotating shaft; 107. an upper bearing seat A; 108. a deep groove ball bearing A; 109. insulating cushion blocks; 110. a work table; 111. a thermal insulation platform; 112. an L-shaped mounting plate; 113. a synchronous belt; 114. a T-shaped mounting plate; 115. a servo motor A; 116. a driving synchronous pulley; 117. a motor mounting seat; 201. an air inlet joint; 202. a vacuum pressure gauge; 203. an air outlet joint; 204. a halogen lamp; 205. sealing cover; 206. a refrigerated probe; 207. a working chamber; 208. a transparent window; 209. a window compacting plate; 301. a lower bearing seat B; 302. a deep groove ball bearing B; 303. a sensor trigger plate; 304. a slider mounting plate; 305. a piezoelectric stack; 306. a nut connecting block; 307. a ball screw; 308. an upper bearing seat B; 309. a guide rail mounting seat; 310. a motor mounting plate; 311. a lock nut; 312. a servo motor B; 313. a coupling; 314. a duplex angular contact ball bearing B; 315. a ball guide rail; 316. a connecting block; 317. a displacement sensor; 318. a flexible hinge; 319. a pressure sensor; 320. a ram mounting bar; 321. a pressure head.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 8, the variable-temperature indexable micro-nano indentation testing device comprises a workbench indexing base 1, a high-low temperature working cavity 2 and a pressure head driving/feeding mechanism 3, wherein the high-low temperature working cavity 2 is arranged on an L-shaped mounting plate 112 of the workbench indexing base 1, and the pressure head driving/feeding mechanism 3 is arranged on an equipment base 102 of the workbench indexing base 1; the workbench indexing base 1 is mainly used for realizing workbench indexing action and supporting the whole machine, the high-low temperature working cavity 2 can provide continuous variable-temperature environment atmosphere for a test piece measuring process and isolate external interference, and the pressure head driving/feeding mechanism 3 mainly realizes feeding action of a pressure head in the vertical direction and obtains measurement data through the pressure sensor 319 and the displacement sensor 317.
Referring to fig. 2 and 3, the table indexing base 1 is: the T-shaped support 101, the lower bearing seat A103 and the T-shaped mounting plate 114 are respectively arranged on the equipment base 102, the T-shaped support 101 and the T-shaped mounting plate 114 play a supporting role, and the lower bearing seat 103 is used for mounting a bearing; the double-joint angular contact ball bearing A104 is arranged in an inner hole of the lower bearing seat A103, and the double-joint angular contact ball bearing A104 axially and radially supports the lower journal of the rotating shaft 106; the driven synchronous pulley 105 is arranged on the rotating shaft 106, the rotating shaft 106 is arranged in the inner holes of the duplex angular contact ball bearing A104 and the deep groove ball bearing A108, the upper bearing seat A107 is arranged on the L-shaped mounting plate 112, the deep groove ball bearing A108 is arranged in the inner hole of the upper bearing seat A107, and the combination of the parts realizes the rotation of the rotating shaft on the fixed axis; the insulating cushion block 109, the heat insulation platform 111 and the workbench 110 are sequentially arranged at the upper end of the rotating shaft 106, wherein the insulating cushion block 109 and the heat insulation platform 111 are used for ensuring that the measurement experiment process is not interfered by external factors, and the workbench 110 is used for fixedly supporting a tested piece; the L-shaped mounting plate 112 is mounted on the T-shaped mounting plate 114, the motor mounting seat 117 is mounted on the T-shaped support 101, the servo motor A115 is mounted on the motor mounting seat 117, the driving synchronous pulley 116 is mounted on the output shaft of the servo motor A115, the synchronous belt 113 is mounted on the driving synchronous pulley 116 and the driven synchronous pulley 105, and the servo motor A115 transmits power to the rotating shaft 106 through the transmission of the synchronous belt 113.
The servo motor A115 is an alternating current servo motor, and realizes linear feeding motion.
The heat insulation platform 111 is a platform with a T-shaped groove, so that the fixed installation of the workbench can be facilitated, and a test piece can be replaced conveniently.
Referring to fig. 4 and 5, the high and low temperature working chamber 2 is: the air inlet connector 201, the air outlet connector 203 and the vacuum pressure gauge 202 are respectively arranged on one side of the working cavity 207, the refrigeration probe 206 is arranged on the other side of the working cavity 207, wherein the air inlet connector 201 and the air outlet connector 203 respectively ventilate and exhaust the interior of the working cavity 207, the pressure in the working cavity 207 is controlled, and meanwhile, the vacuum pressure gauge 202 displays the internal pressure of the working cavity 207 in real time; the rear end of the refrigeration probe 206 is connected with a liquid nitrogen circulator, and the temperature of the inside of the working cavity 207 is reduced by circularly loading the temperature of liquid nitrogen and nitrogen; the transparent window 208 is arranged on the front surface of the working cavity 207 and is pressed and fixed by the window pressing plate 209; the two halogen lamps 204 are symmetrically arranged in the working cavity 207, the transparent window 208 can facilitate operators to observe the conditions in the working cavity 207, the halogen lamps 204 can realize the heating of a test piece through focusing, and the high-low temperature continuous loading of the test piece is realized by adjusting the power of the halogen lamps 204 and the power of the refrigerating probe 206; the sealing cover 205 is installed at the top end of the working chamber 207, so that the whole indentation measurement process is isolated from the outside.
Referring to fig. 6 and 7, the ram driving/feeding mechanism 3 is: the guide rail mounting seat 309 is mounted on a vertical plate of the equipment base 102, the upper bearing seat B308 and the lower bearing seat B301 are mounted on the guide rail mounting seat 309, the duplex angular ball bearing B314 is mounted in an inner hole of the upper bearing seat B308, the deep groove ball bearing B302 is mounted in an inner hole of the lower bearing seat B301, the ball screw 307 is mounted in the inner holes of the duplex angular ball bearing B314 and the deep groove ball bearing B302, the lock nut 311 is mounted on the ball screw 307, the motor mounting plate 310 is mounted on the guide rail mounting seat 309, the servo motor B312 is mounted on the motor mounting plate 310, the shaft coupling 313 is connected with a motor output shaft and shaft ends of the ball screw, and after the components are mounted, the servo motor B312 can drive the ball screw 307 to perform rotary motion, and the lock nut 311 is used for fixing the ball screw and an inner ring of the duplex angular ball bearing B314; the ball guide rail 315 is mounted on the guide rail mounting seat 309, the slide block mounting plate 304 is mounted on the slide block of the ball guide rail 315, the nut connecting block 306 is mounted on the slide block mounting plate 304 and the nut of the ball screw 307, and the nut drives the slide block mounting plate 304 to do macroscopic linear motion under the limit of the ball guide rail 315 while the ball screw 307 is in rotary motion; the connecting block 316 is arranged on the slider mounting plate 304, the flexible hinge 318 is arranged on the connecting block 316, the piezoelectric stack 305 is arranged inside the flexible hinge 318, and indentation experiments and microscopic feeding motions are carried out through the inverse piezoelectric effect of the piezoelectric stack 305; the displacement sensor 317 is mounted on the slider mounting plate 304, the pressure sensor 319 is mounted at the end of the flexible hinge 318, the ram mounting bar 320 is mounted on the pressure sensor 319, the sensor trigger plate 303 is sandwiched between the pressure sensor 319 and the ram mounting bar 320, the ram 321 is mounted on the ram mounting bar 320, the ram 321 and the slider mounting plate 304 are simultaneously in linear motion and data is fed back to the operator via the pressure sensor 319 and the displacement sensor 317.
The ball guide rail 315 is an SP ultra-polished rice ball guide rail, and macroscopic driving is realized.
The pressure head 321 is a glass pressure head, and is assisted by a flexible hinge and a piezoelectric stack to realize micro-driving of linear driving.
The pressure sensor 319 is a precision load sensor, so as to realize accurate detection of the pressing-in load force. The refrigerating probe and the halogen lamp provide high-temperature and low-temperature environment atmosphere for indentation test, and the test range is enlarged.
Referring to fig. 8, the high-low temperature pressure swing indentation measuring device of the invention is schematically divided into a nano indentation module, a high-low temperature loading module and a vacuum sealing control module. The macro-driving of the nano-indentation is mainly controlled by a PCI 1020 motion control card motion control module, so that the macro-feeding motion of the indentation module and the rotating point changing function of the transposition table are realized. The micro-drive of the nano-indentation realizes the micro-displacement feeding motion of the nano-indentation by utilizing the inverse piezoelectric effect of the piezoelectric stack through the SPP parallel port and the piezoelectric laminated micro-displacement brake. The pressing load and the pressing stroke in the test process are detected by the corresponding force and displacement signal acquisition module, and after signal conditioning, the PCI8602 data acquisition card is used for synchronous acquisition. The temperature loading module is mainly communicated with the computer through a LAN (local area network) port by the Cryoon 22C thermometer, and is used for loading the temperature of a test piece through the liquid nitrogen circulator and the halogen lamp and measuring the temperature through the acquisition module. The vacuum sealing control module controls the vacuum degree of the sealing cavity through a movable door and an air inlet valve of the vacuum chamber, and detects the vacuum degree of the sealing cavity through a vacuum pressure gauge.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a but alternating temperature transposition micro-nano indentation testing arrangement which characterized in that: the device comprises three parts, namely a workbench indexing base (1), a high-low temperature working cavity (2) and a pressure head driving/feeding mechanism (3), wherein the high-low temperature working cavity (2) is arranged on an L-shaped mounting plate (112) of the workbench indexing base (1), and the pressure head driving/feeding mechanism (3) is arranged on an equipment base (102) of the workbench indexing base (1); the workbench indexing base (1) realizes workbench indexing action and complete machine support, the high-low temperature working cavity (2) provides continuous variable-temperature environment atmosphere for a test piece measuring process, external interference can be isolated, the pressure head driving/feeding mechanism (3) realizes feeding action of the pressure head in the vertical direction, and measurement data are obtained through the pressure sensor (319) and the displacement sensor (317);
the workbench indexing base (1) is as follows: the T-shaped support (101), the lower bearing seat A (103) and the T-shaped mounting plate (114) are respectively arranged on the equipment base (102), the double-linked angular contact ball bearing A (104) is arranged in an inner hole of the lower bearing seat A (103), and the double-linked angular contact ball bearing A (104) axially and radially supports the lower shaft neck of the rotating shaft (106); the driven synchronous pulley (105) is arranged on the rotating shaft (106), the rotating shaft (106) is arranged in the inner holes of the duplex angular contact ball bearing A (104) and the deep groove ball bearing A (108), the upper bearing seat A (107) is arranged on the L-shaped mounting plate (112), and the deep groove ball bearing A (108) is arranged in the inner hole of the upper bearing seat A (107); insulating pad (109), thermal-insulated platform (111) and workstation (110) are installed in proper order in pivot (106) upper end, and L type mounting panel (112) are installed on T type mounting panel (114), and motor mount pad (117) are installed on T type support (101), and servo motor A (115) are installed on motor mount pad (117), and initiative synchronous pulley (116) are installed on the output shaft of servo motor A (115), and hold-in range (113) are installed on initiative synchronous pulley (116) and driven synchronous pulley (105), and servo motor A (115) are passed through hold-in range (113) transmission and are given pivot (106) power transmission.
2. The variable temperature indexable micro-nano indentation testing device as set forth in claim 1, wherein: the servo motor A (115) is an alternating current servo motor, and linear feeding motion is realized.
3. The variable temperature indexable micro-nano indentation testing device as set forth in claim 1, wherein: the heat insulation platform (111) is a platform with T-shaped grooves.
4. The variable temperature indexable micro-nano indentation testing device as set forth in claim 1, wherein: the high-low temperature working cavity (2) is: the air inlet connector (201), the air outlet connector (203) and the vacuum pressure gauge (202) are respectively arranged on one side of the working cavity (207), the refrigerating probe (206) is arranged on the other side of the working cavity (207), the air inlet connector (201) and the air outlet connector (203) respectively ventilate and exhaust the interior of the working cavity (207), the pressure in the working cavity (207) is controlled, and meanwhile the vacuum pressure gauge (202) displays the internal pressure of the working cavity (207) in real time; the rear end of the refrigeration probe (206) is connected with a liquid nitrogen circulator, and the temperature of the inside of the working cavity (207) is reduced by the circulating loading temperature of liquid nitrogen and nitrogen; the transparent window (208) is arranged on the front surface of the working cavity (207) and is pressed and fixed through a window pressing plate (209); the two halogen lamps (204) are symmetrically arranged in the working cavity (207), and high-low temperature continuous loading of a test piece is realized by adjusting the power of the halogen lamps (204) and the power of the refrigerating probe (206); the sealing cover (205) is arranged at the top end of the working cavity (207).
5. The variable temperature indexable micro-nano indentation testing device as set forth in claim 1, wherein: the pressure head driving/feeding mechanism (3) is: the guide rail mounting seat (309) is mounted on a vertical plate of the equipment base (102), the upper bearing seat B (308) and the lower bearing seat B (301) are both mounted on the guide rail mounting seat (309), the duplex angular contact ball bearing B (314) is mounted in an inner hole of the upper bearing seat B (308), the deep groove ball bearing B (302) is mounted in an inner hole of the lower bearing seat B (301), the ball screw (307) is mounted in an inner hole of the duplex angular contact ball bearing B (314) and the deep groove ball bearing B (302), the lock nut (311) is mounted on the ball screw (307), the motor mounting plate (310) is mounted on the guide rail mounting seat (309), the servo motor B (312) is mounted on the motor mounting plate (310), and the coupler (313) is connected with a motor output shaft and a shaft end of the ball screw; the ball guide rail (315) is arranged on the guide rail mounting seat (309), the slide block mounting plate (304) is arranged on the slide block of the ball guide rail (315), the screw nut connecting block (306) is arranged on the slide block mounting plate (304) and the screw nut of the ball screw (307), and the screw nut drives the slide block mounting plate (304) to do macroscopic linear motion under the limit of the ball guide rail (315) while the ball screw (307) does rotational motion; the connecting block (316) is arranged on the sliding block mounting plate (304), the flexible hinge (318) is arranged on the connecting block (316), the piezoelectric stack (305) is arranged inside the flexible hinge (318), and indentation experiments and microscopic feeding motions are carried out through the inverse piezoelectric effect of the piezoelectric stack (305); the displacement sensor (317) is installed on the slider mounting plate (304), the tip at flexible hinge (318) is installed to pressure sensor (319), pressure head installation pole (320) are installed on pressure sensor (319), sensor trigger plate (303) clamp is in the middle of pressure sensor (319) and pressure head installation pole (320), pressure head (321) are installed on pressure head installation pole (320), pressure head (321) and slider mounting plate (304) are rectilinear motion simultaneously and feed back data to the operator through pressure sensor (319) and displacement sensor (317).
6. The variable temperature indexable micro-nano indentation testing device as set forth in claim 5, wherein: the ball guide rail (315) is an SP ultra-polished rice ball guide rail, and macroscopic driving is achieved.
7. The variable temperature indexable micro-nano indentation testing device as set forth in claim 5, wherein: the pressure head (321) is a glass pressure head, and is assisted by a flexible hinge and a piezoelectric stack to realize micro-driving of linear driving.
8. The variable temperature indexable micro-nano indentation testing device as set forth in claim 5, wherein: the pressure sensor (319) is a precise load sensor, so that the accurate detection of the pressing-in load force is realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710982770.4A CN107703012B (en) | 2017-10-20 | 2017-10-20 | Variable-temperature indexable micro-nano indentation testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710982770.4A CN107703012B (en) | 2017-10-20 | 2017-10-20 | Variable-temperature indexable micro-nano indentation testing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107703012A CN107703012A (en) | 2018-02-16 |
| CN107703012B true CN107703012B (en) | 2024-02-02 |
Family
ID=61181903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710982770.4A Active CN107703012B (en) | 2017-10-20 | 2017-10-20 | Variable-temperature indexable micro-nano indentation testing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107703012B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535129B (en) * | 2018-04-16 | 2022-04-01 | 吉林大学 | Low-temperature micro-nano indentation testing system with large stroke and low temperature drift under microscopic assembly |
| CN108982268A (en) * | 2018-09-06 | 2018-12-11 | 河钢股份有限公司 | A kind of high-temperature hardness gauge that can carry out continuous alternating temperature multi-point sampler |
| CN109632450B (en) * | 2018-11-19 | 2020-09-25 | 浙江大学 | Mechanism for cooling and transmitting sample in sealed cavity |
| CN109764990B (en) * | 2018-11-28 | 2020-11-13 | 东台世恒机械科技有限公司 | Method for detecting die cutting pressure by using die cutting machine pressure testing device |
| CN109883868A (en) * | 2019-03-22 | 2019-06-14 | 吉林大学 | Impression test device is impacted under hot environment |
| CN110132750B (en) * | 2019-06-26 | 2022-08-05 | 华东理工大学 | Indentation testing device and testing method |
| CN110470555B (en) * | 2019-08-26 | 2022-04-01 | 吉林大学 | Non-vacuum atmosphere type refrigerating system of low-temperature micro-nano indentation testing system |
| CN110736672B (en) * | 2019-11-13 | 2022-05-24 | 吉林大学 | Normal-pressure immersed type continuous low-temperature micro-nano indentation testing device |
| CN110926974B (en) * | 2019-11-27 | 2021-03-30 | 北京大学 | Method for testing mechanical property of small sample |
| CN111921568B (en) * | 2020-07-14 | 2023-10-20 | 吉林大学 | Contact/atmosphere mixing variable-temperature chamber and temperature control method |
| CN113607584B (en) * | 2021-10-08 | 2021-12-07 | 太原科技大学 | Nano-indentator test sample high-temperature heating device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10222228A (en) * | 1997-02-12 | 1998-08-21 | Toshiba Corp | Straight motion mechanism and positioning mechanism |
| JP3182252U (en) * | 2012-12-28 | 2013-03-14 | 独立行政法人産業技術総合研究所 | Mechanical property measurement test equipment |
| CN202903617U (en) * | 2012-10-29 | 2013-04-24 | 吉林大学 | In-situ three-point bending test device |
| CN104502202A (en) * | 2014-12-15 | 2015-04-08 | 吉林大学 | Online material biaxial static-dynamic performance test platform under service temperature |
| CN104697872A (en) * | 2015-01-12 | 2015-06-10 | 吉林大学 | Method and device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation |
| CN105628487A (en) * | 2015-12-23 | 2016-06-01 | 吉林大学 | Combined load mode mechanical-electrical and thermal-magnetic coupling material performance in-situ test instrument and method |
| CN107132139A (en) * | 2017-05-08 | 2017-09-05 | 吉林大学 | Suspension type rotary quickly positions impression in situ/deepen arc cut test device |
| CN207423715U (en) * | 2017-10-20 | 2018-05-29 | 吉林大学 | The indexable micro-nano impression test device of alternating temperature |
-
2017
- 2017-10-20 CN CN201710982770.4A patent/CN107703012B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10222228A (en) * | 1997-02-12 | 1998-08-21 | Toshiba Corp | Straight motion mechanism and positioning mechanism |
| CN202903617U (en) * | 2012-10-29 | 2013-04-24 | 吉林大学 | In-situ three-point bending test device |
| JP3182252U (en) * | 2012-12-28 | 2013-03-14 | 独立行政法人産業技術総合研究所 | Mechanical property measurement test equipment |
| CN104502202A (en) * | 2014-12-15 | 2015-04-08 | 吉林大学 | Online material biaxial static-dynamic performance test platform under service temperature |
| CN104697872A (en) * | 2015-01-12 | 2015-06-10 | 吉林大学 | Method and device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation |
| CN105628487A (en) * | 2015-12-23 | 2016-06-01 | 吉林大学 | Combined load mode mechanical-electrical and thermal-magnetic coupling material performance in-situ test instrument and method |
| CN107132139A (en) * | 2017-05-08 | 2017-09-05 | 吉林大学 | Suspension type rotary quickly positions impression in situ/deepen arc cut test device |
| CN207423715U (en) * | 2017-10-20 | 2018-05-29 | 吉林大学 | The indexable micro-nano impression test device of alternating temperature |
Non-Patent Citations (3)
| Title |
|---|
| High temperature microcompression and nanoindentation in vacuum;Sandra Korte;《Journal of Materials Research》;全文 * |
| Mechanical properties of solid oxide fuel cell glass-ceramic seal at high temperatures;J. Milhans;《Journal of Power Sources》;全文 * |
| 纳米压痕技术及其应用;黎明;《中国机械工程》;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107703012A (en) | 2018-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107703012B (en) | Variable-temperature indexable micro-nano indentation testing device | |
| CN103499483B (en) | Multi-load multiple physical field coupling material micro-property in-situ test machine | |
| CN107941624B (en) | High-temperature high-frequency material mechanical property in-situ testing device | |
| CN105628487A (en) | Combined load mode mechanical-electrical and thermal-magnetic coupling material performance in-situ test instrument and method | |
| CN108072572A (en) | The biaxial stretch-formed mechanics performance testing device of low-temperature in-site | |
| CN108398258B (en) | Piano key switch life-span testing arrangement | |
| CN110044752B (en) | In-situ high/low temperature indentation testing device for cone beam CT imaging | |
| CN108535129B (en) | Low-temperature micro-nano indentation testing system with large stroke and low temperature drift under microscopic assembly | |
| CN109060575A (en) | Driving type piezoelectric actuator low-temperature in-site high-frequency reciprocating micro-moving frictional wear test platform | |
| CN103512803A (en) | Multi-load and multi-physics coupling material micromechanical performance in-situ testing instrument | |
| CN105181481A (en) | Three-point bending fatigue testing machine | |
| CN113551980A (en) | Multi-shaft type tensile test testing machine and testing method | |
| CN201037822Y (en) | High temperature high carrying frictional wear experimental device | |
| CN207423715U (en) | The indexable micro-nano impression test device of alternating temperature | |
| CN210154960U (en) | In-situ high/low temperature indentation testing device for cone beam CT imaging | |
| CN109507057B (en) | Wear experiment device of carbon brush for subway | |
| CN208765894U (en) | A kind of vacuum pressure sensor detection device | |
| CN208297279U (en) | The micro-nano impression test system of low temperature that large journey low-temperature floats under micro- component | |
| CN205280528U (en) | Clutch blocks test bench | |
| CN207586060U (en) | A kind of reciprocating friction abrasion tester of super-magnetostrictive drive loading | |
| CN107560959A (en) | A kind of reciprocating friction abrasion tester of super-magnetostrictive drive loading | |
| CN208171759U (en) | Material mechanical property in-situ test equipment for neutron scattering analysis | |
| CN212255027U (en) | Reciprocating sliding friction and wear testing machine for end faces of column tiles | |
| CN108760496A (en) | Evolvent type flexible material multi-shaft stretching testing machine | |
| CN211148858U (en) | Motor comprehensive load testing machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |