CN102485640A - Task-oriented mixed mode nano operation method based on atomic force microscope - Google Patents

Task-oriented mixed mode nano operation method based on atomic force microscope Download PDF

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CN102485640A
CN102485640A CN2010105725574A CN201010572557A CN102485640A CN 102485640 A CN102485640 A CN 102485640A CN 2010105725574 A CN2010105725574 A CN 2010105725574A CN 201010572557 A CN201010572557 A CN 201010572557A CN 102485640 A CN102485640 A CN 102485640A
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董再励
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Shenyang Institute of Automation of CAS
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Abstract

The invention relates to the field of nanotechnology, and discloses a task-oriented mixed mode nano operation method based on an atomic force microscope. In the invention, the task-oriented concept is proposed for the first time, wherein a master-slave operation mode is adopted for the zero-dimensional and one-dimensional nano structures with complicated targets, and a pre-programming operation mode is adopted in other conditions; a multi-mode working way is adopted, the software and hardware resources of the system are sufficiently utilized, the functions of a nano operating system are increased, and the nano operation efficiency is improved; and manual monitoring operation on a complicated task can be realized through the master-slave mode, the force feedback in the operation process enables the operator to feel present, and the operation accuracy and reliability are enhanced. The pre-programming operation mode has the characteristics of small step and quick multi-point orientation, and efficiently operates and controls the position and orientation of the operated object. Through the organic combination of two operation methods, the system is greatly improved in terms of application range, operation efficiency, robustness, stability and the like.

Description

Task orientation mixed mode nano-manipulation method based on AFM
Technical field
The present invention relates to field of nanometer technology, specifically is a kind of nano-manipulation method based on AFM.
Background technology
Nanosecond science and technology are emerging scientific research fields of 21 century.Under the nanoscale, the physicochemical properties of material all can change a lot.Have only the material under the nanoscale is operated effectively, could study the natural phenomenas such as various physics, chemistry of material under the nanoscale, could develop nano-device, the technical equipment that nano-sensor and nanocomputer etc. are advanced.Therefore, the research to nanometer operating system is a focus in micro-nano scientific and technological forward position, the current world.AFM is one of visual plant of carrying out at present nano collimation and operation, and its operating type is to control the probe motion of AFM and apply power to carry out nano collimation and operation.Characteristics such as the nanometer operating system based on AFM is extensive with its application, environmental requirement is low, performance accuracy height and being widely used.But the nanometer operating system based on AFM all adopts single principal and subordinate's operator scheme at present, and its mode of operation can't be changed according to the difference of task.Since nano-manipulation towards environment and object all very complicated, so the application of this single operation pattern nanometer operating system has great limitation, has crucial meaning so develop a kind of various modes nanometer operating system towards different task.
Summary of the invention
The present invention has proposed the notion of task orientation first.Object, path and target with operation task are foundation, differentiate the clear-cut degree of task.And according to which kind of operator scheme of clear-cut degree decision-making employing; Under the hardware architecture of same nanometer operating system, through revising software algorithm, in main control computer, introduce planning layer, in the AFM controller, introduce execution level, and utilize the probe enhancement work method, realize the pre-programmed operator scheme.This operator scheme has small step distance, quick multipoint directional, and operation is efficient, and control is by the characteristics of operand pose.Under principal and subordinate's work pattern; Assisting down of active force feedback and scan image; The operator can need carry out the man-machine interactive nano-manipulation based on scientific research and operations, thereby can realize having the nanometer operation auxiliary with visualized graphs of sensor information feedback.This system adopts the multi-mode working mode, has made full use of the software and hardware resources of system.Enrich the function of nanometer operating system, improved the nanometer efficiency of operation.Implementation method is simple, has very strong versatility, and its design philosophy can be transplanted in other nanometer operating system.
So-called nano material, be meant microstructure on the one dimension direction, receive at least nanoscale (1nm---100nm) the various solid super-fine materials of modulation, it comprises the atomic group a small bundle of straw, etc. for silkworms to spin cocoons on (aggregations of tens atoms) and the nanoparticle of zero dimension; The nano-multilayer film of one-dimensional modulation; The nanoparticle film (coating) of two-dimensional modulation; And the nano-phase material of three-dimensional modulation.
Said task orientation refers to: mainly rely on AFM to obtain by the information of operand and operating environment.Based on topological structure, can be divided into zero-dimension nano structure and one-dimensional nano structure by operand; Based on mechanical attribute, can be divided into rigid body and flexible body by operand; What of barrier are courses of action also can be divided into simple path and pahtfinder hard with distribution situation based on, and Action Target also can require and required be divided into simple target and complex target by the final configuration of operand based on pose accuracy; Can be expressed as according to above classification task guiding principle: complicated for courses of action, target complicated zero dimension, one-dimensional nano structure should adopt principal and subordinate's operator scheme, should adopt the pre-programmed operator scheme under other situation.
Concrete technical scheme of the present invention is:
A kind of task orientation mixed mode nano-manipulation method based on AFM, for target complicated zero dimension, one-dimensional nano structure adopt principal and subordinate's operator scheme, should adopt the pre-programmed operator scheme under other situation;
Said principal and subordinate's operator scheme is: the operator is issued to main control computer with control command through the input equipment with force sensing function; Main control computer is converted into the macro-scale position coordinates to receive sees the dimension location coordinate; And pass to the AFM controller through Ethernet; By controller the positional information of probe is sent to the AFM complete operation, simultaneously probe suffered force signal in operating process is fed back to the operator;
Said pre-programmed pattern is: planning layer is set in the main control computer; So-called planning layer is meant the mission planning algorithm of in main control computer, realizing through software; Its main function is to obtain operator's mission requirements; Carry out assigning of assignment decisions, decomposition and operational order, simultaneously to operator's feedback operation result.In the AFM controller execution level is set; So-called execution level is under the programmed environment that AFM carries; The AFM bottom hardware control algolithm of utilizing its interface function that provides to realize; Its main function is to accept the operational order of planning layer and pass through the driving device controls probe motion, and the transducing signal that obtaining sensor provides is uploaded to planning layer.The operator only needs through human-computer interaction interface operational requirements to be provided; Ask for by the differential seat angle of the horizontal coordinate difference of the initial position of operand and final position and vertical coordinate difference and initial position and final position by planning layer; Again these differences are resolved into a series of translations and rotation basic operation of probe, the initial sum of decomposing the back basic operation is stopped coordinate send to execution level through Ethernet; Execution level utilizes initial sum to stop coordinate as the input data; Adopt atomic force microscope probe to strengthen translation operation planning and rotating operation planning that operational method strengthens probe; And the probe location information after will planning sends to AFM, operated by AFM control probe.It is a kind of through the AFM bottom hardware is programmed wherein strengthening the probe operational method, and the probe of realization is quick, the multipoint directional operational method; This method can make the quick small step of the realization of probe on a certain direction apart from motion, and realizes the multiple spot motion on the direction vertical with this direction; Utilize the cumulative effect of small step distance and multipoint operation effect, realize translation and rotating operation operand;
In said principal and subordinate's operator scheme, the input equipment of said force sensing function is the force feedback handle, and this equipment has X, Y to the horizontal free degree, through the communication of hardware description language DirectX realization with main control computer; The coordinate of force feedback handle input is macroscopical three dimensional space coordinate; Main control computer can obtain the operating space size according to the scanning nano image; Macroscopical Coordinate Conversion is seen yardstick operating space coordinate for receiving; And coordinate information sent to the AFM controller through Ethernet, the ethernet communication agreement is an ICP/IP protocol; The AFM controller then converts the coordinate information that obtains into drive unit required voltage signal, amplifies the rear drive probe motion through high pressure;
The operating process middle probe is that open loop does not have feedback states in vertical direction, and pressing down and lifting of probe all needs the operator to control; Owing to the active force of probe and sample room can change along with the variation of distance between the two, force feedback function layout strategy is following: α>=1 o'clock, and the joystick power output is zero; When probe approaches sample surfaces gradually, and when not contacting with sample, that is: 0<α<1, the power of joystick output increases gradually, but the speed that increases be linearity; When probe with after sample contacts; Feedback force will sharply increase along with the distance that probe gos deep into sample; Promptly-0.2 α≤0, we utilize segmentation place function continuous and reciprocal identical with the value of quadratic function increase feedback force; Can solve the coefficient of quadratic function, the functional relation of distance and power is following:
Figure 2010105725574100002DEST_PATH_IMAGE001
(1)
Wherein: probe apart from the initial distance of sample surfaces does d Its ,The actual range of operating process middle probe and sample does d Pts , α= d Pts / d Its
According to this force feedback function, to counter the asking of signal that sensing device obtains, to confirm the physical location of probe, AFM control returns the operation information that obtains to main control computer through Ethernet; Main control computer then with the form of image update and force feedback, informs the operator with operation information;
Said pre-programmed operator scheme adopts probe enhancement work, and the operator is as long as provide operational requirements through interactive interface to system; Planning layer is at first asked for and is strengthened probe initial position and the horizontal coordinate difference of final position and the differential seat angle of vertical coordinate difference and original position and final position, and the formulae express of acquiring method is following:
Figure 136759DEST_PATH_IMAGE002
(2)
Wherein (xi,, yi), (xi' yi') is the starting point coordinate that strengthens probe, (xo,, yo), (xo' is yo') for strengthening probe terminating point coordinate.
Strengthen the initial slope of probe:
Figure 2010105725574100002DEST_PATH_IMAGE003
(3)
Strengthen the termination slope of probe:
Figure 899441DEST_PATH_IMAGE004
(4)
Differential seat angle ask for formula:
(5)
Again these differences are resolved into a series of translations and rotation basic operation that strengthen probe, its formulae express is following:
Figure 443686DEST_PATH_IMAGE006
(6)
Wherein: r jBe the j time rotating operation of probe enhancement work, m XkBe probe enhancement work k sub-level translation operation, m YlBe the l time vertical translation operation of probe enhancement work;
Planning layer will be operated needed initial sum termination coordinate at every turn and send to execution level; Execution level then utilizes initial sum termination coordinate to begin to carry out as preprogrammed input, sends control information to AFM, and the control probe is operated; The pre-programmed operator scheme is based upon on the basis of atomic force microscope probe enhancing operation technique; Through the nanometer operating system that makes up with human-computer interaction interface, planning layer and operation layer three-fies system structure, can realize probe basic operation action design and planning based on the pre-programmed technology, the nanometer that can accomplish given parameter automatically promotes operation.
Advantage of the present invention is: the present invention adopts the multi-mode working mode, has made full use of the software and hardware resources of system, has enriched the function of nanometer operating system, has improved the nanometer efficiency of operation; Implementation method of the present invention is simple, has very strong versatility, and its design philosophy can be transplanted in other nanometer operating system; Can realize the manual monitoring operation to complex task through master slave mode, the force feedback in the operating process makes the operator have good telepresenc, has strengthened the precision and the reliability of operation.The pre-programmed operator scheme has small step distance, quick multipoint directional, and efficient operation is controlled by the characteristics of operand pose.The combination of two kinds of methods of operating makes this system be greatly improved at aspects such as the scope of application, operation usefulness, robustness, stability.
Description of drawings
Fig. 1 is principal and subordinate's operator scheme system architecture;
Fig. 2 pre-programmed operator scheme system architecture;
Fig. 3 pre-programmed operator scheme basic procedure.
The specific embodiment
Rely on AFM to obtain by the information of operand and operating environment.Based on topological structure, can be divided into zero-dimension nano structure and one-dimensional nano structure by operand; Based on mechanical attribute, can be divided into rigid body and flexible body by operand.What of barrier are courses of action also can be divided into simple path and pahtfinder hard with distribution situation according to.Action Target also can require to be divided into simple target and complex target based on the pose accuracy requirement and by the final configuration of operand.Can be expressed as according to above classification task guiding principle, complicated for courses of action, target complicated zero dimension, one-dimensional nano structure should adopt principal and subordinate's operator scheme, should adopt the pre-programmed operator scheme under other situation.
Be illustrated in figure 1 as principal and subordinate's operator scheme:
The input of system is force feedback equipment (being generally the force feedback handle), and this equipment has X, Y to the horizontal free degree, through the communication of hardware description language DirectX realization with main control computer.The coordinate of force feedback equipment input is macroscopical three dimensional space coordinate, and main control computer can obtain the operating space size according to the scanning nano image, and macroscopical Coordinate Conversion is seen yardstick operating space coordinate for receiving.And coordinate information sent to the AFM controller through Ethernet.The ethernet communication agreement is an ICP/IP protocol.The AFM controller then converts the coordinate information that obtains into drive unit required voltage signal, amplifies the rear drive probe motion through high pressure.
The operating process middle probe is that open loop does not have feedback states in vertical direction, and pressing down and lifting of probe all needs the operator to control.Owing to the active force of probe and sample room can change along with the variation of distance between the two.Force feedback function layout strategy is following: α>=1 o'clock, joystick power output are zero; When probe approaches sample surfaces gradually, and when not contacting with sample, that is: 0<α<1, the power of joystick output increases gradually, but the speed that increases be linearity; When probe with after sample contacts; Feedback force will sharply increase along with the distance that probe gos deep into sample; Promptly-0.2 α≤0, we utilize segmentation place function continuous and reciprocal identical with the value of quadratic function increase feedback force; Can solve the coefficient of quadratic function, the functional relation of distance and power is following:
Figure 51430DEST_PATH_IMAGE001
(1)
Wherein: probe apart from the initial distance of sample surfaces does d Its ,The actual range of operating process middle probe and sample does d Pts , α= d Pts / d Its
According to this force feedback function, counter the asking of signal that sensing device is obtained.AFM control returns the operation information that obtains to main control computer through Ethernet.Main control computer then with the form of image update and force feedback, informs the operator with operation information.
Under this pattern, the physics closed loop though the vertical direction of probe is unrealized, the operator has realized the control to operating physical force through the method for power perception, has played the effect of protection probe and stable operation power.
Shown in Figure 2 is the pre-programmed operator scheme: this pattern is utilized the method for software programming, in main control computer, has realized the mission planning algorithm, in the atomic force microscope controller, has realized the bottom hardware control algolithm.The user assigns operation task through human-computer interaction interface to system.Operation task is decomposed through planning layer; Ask for and strengthen probe operation initial position and the horizontal coordinate difference of final position and the differential seat angle of vertical coordinate difference and original position and final position; Again these differences are resolved into a series of translations and rotation basic operation that strengthen probe, the initial sum of decomposing the back basic operation is stopped coordinate send to execution level through Ethernet; By execution level control AFM complete operation.
The pre-programmed operator scheme adopts probe enhancement work, and the operator is as long as provide operational requirements through interactive interface to system; Planning layer is at first asked for and is strengthened probe initial position and the horizontal coordinate difference of final position and the differential seat angle of vertical coordinate difference and original position and final position, and the formulae express of acquiring method is following:
Figure 930393DEST_PATH_IMAGE002
(2)
Wherein (xi,, yi), (xi' yi') is the starting point coordinate that strengthens probe, (xo,, yo), (xo' is yo') for strengthening probe terminating point coordinate.
Strengthen the initial slope of probe:
(3)
Strengthen the termination slope of probe:
Figure 754572DEST_PATH_IMAGE004
(4)
Differential seat angle ask for formula:
Figure 309050DEST_PATH_IMAGE005
(5)
Again these differences are resolved into a series of translations and rotation basic operation that strengthen probe, its formulae express is following:
(6)
Wherein: r jBe the j time rotating operation of probe enhancement work, m XkBe probe enhancement work k sub-level translation operation, m YlBe the l time vertical translation operation of probe enhancement work.
Planning layer will be operated needed initial sum termination coordinate at every turn and send to execution level, and execution level then utilizes initial sum termination coordinate to begin to carry out as preprogrammed input, sends control information to AFM, and the control probe is operated; The pre-programmed operator scheme is based upon on the basis of atomic force microscope probe enhancing operation technique; Through the nanometer operating system that makes up with human-computer interaction interface, planning layer and operation layer three-fies system structure; Can realize probe basic operation action design and planning based on the pre-programmed technology; The nanometer that can accomplish given parameter automatically promotes operation, and the efficient of nano-manipulation and automaticity are high; Its work flow is shown in Fig. 3: planning layer carries out task and decompose, and the operation task after will decomposing is assigned to execution level after obtaining operator's demand.The implementation of decomposing the back task constitutes a circulation.The basic operation that in this circulation, strengthens the probe operation constantly is performed under the control of execution level again, accomplishes up to operation task.

Claims (3)

  1. A kind of task orientation mixed mode nano-manipulation method based on AFM is characterized in that: for target complicated zero dimension, one-dimensional nano structure adopt principal and subordinate's operator scheme, should adopt the pre-programmed operator scheme under other situation;
    Said principal and subordinate's operator scheme is: the operator is issued to main control computer with control command through the input equipment with force sensing function; Main control computer is converted into the macro-scale position coordinates to receive sees the dimension location coordinate; And pass to the AFM controller through Ethernet; By controller the positional information of probe is sent to the AFM complete operation, simultaneously probe suffered force signal in operating process is fed back to the operator;
    Said pre-programmed pattern is: planning layer is set in the main control computer, in the AFM controller execution level is set; The operator only needs through human-computer interaction interface operational requirements to be provided; Ask for by the differential seat angle of the horizontal coordinate difference of the initial position of operand and final position and vertical coordinate difference and initial position and final position by planning layer; Again these differences are resolved into a series of translations and rotation basic operation of probe, the initial sum of decomposing the back basic operation is stopped coordinate send to execution level through Ethernet; Execution level utilizes initial sum to stop coordinate as the input data; Adopt atomic force microscope probe to strengthen translation operation planning and rotating operation planning that operational method strengthens probe; And the probe location information after will planning sends to AFM, operated by AFM control probe.
  2. Method according to claim 1; It is characterized in that: in said principal and subordinate's operator scheme; The input equipment of said force sensing function is the force feedback handle, and this equipment has X, Y to the horizontal free degree, through the communication of hardware description language DirectX realization with main control computer; The coordinate of force feedback handle input is macroscopical three dimensional space coordinate; Main control computer can obtain the operating space size according to the scanning nano image; Macroscopical Coordinate Conversion is seen yardstick operating space coordinate for receiving; And coordinate information sent to the AFM controller through Ethernet, the ethernet communication agreement is an ICP/IP protocol; The AFM controller then converts the coordinate information that obtains into drive unit required voltage signal, amplifies the rear drive probe motion through high pressure;
    The operating process middle probe is that open loop does not have feedback states in vertical direction, and pressing down and lifting of probe all needs the operator to control; The functional relation of distance and power is following:
    Figure 2010105725574100001DEST_PATH_IMAGE001
    Wherein: probe apart from the initial distance of sample surfaces does d Its ,The actual range of operating process middle probe and sample does d Pts , α= d Pts / d Its
    According to this force feedback function, to counter the asking to confirm the physical location of probe of signal that sensing device obtains, AFM control returns the operation information that obtains to main control computer through Ethernet; Main control computer then with the form of image update and force feedback, informs the operator with operation information.
  3. Method according to claim 1 is characterized in that: said pre-programmed operator scheme adopts probe enhancement work, and the operator is as long as provide operational requirements through interactive interface to system; Planning layer is at first asked for and is strengthened probe initial position and the horizontal coordinate difference of final position and the differential seat angle of vertical coordinate difference and original position and final position, and the formulae express of acquiring method is following:
    Figure 691033DEST_PATH_IMAGE002
    Wherein (xi,, yi), (xi' yi') is the starting point coordinate that strengthens probe, (xo,, yo), (xo' is yo') for strengthening probe terminating point coordinate;
    Strengthen the initial slope of probe:
    Strengthen the termination slope of probe:
    Figure 85237DEST_PATH_IMAGE004
    Differential seat angle ask for formula:
    Figure 2010105725574100001DEST_PATH_IMAGE005
    Again these differences are resolved into a series of translations and rotation basic operation that strengthen probe, its formulae express is following:
    Wherein: r jBe the j time rotating operation of probe enhancement work, m XkBe probe enhancement work k sub-level translation operation, m YlBe the l time vertical translation operation of probe enhancement work;
    Planning layer will be operated needed initial sum termination coordinate at every turn and send to execution level; Execution level then utilizes initial sum termination coordinate to begin to carry out as preprogrammed input, sends control information to AFM, and the control probe is operated; The pre-programmed operator scheme is based upon on the basis of atomic force microscope probe enhancing operation technique; Through the nanometer operating system that makes up with human-computer interaction interface, planning layer and operation layer three-fies system structure, can realize probe basic operation action design and planning based on the pre-programmed technology, the nanometer that can accomplish given parameter automatically promotes operation.
CN2010105725574A 2010-12-03 2010-12-03 Task-oriented mixed mode nano operation method based on atomic force microscope Pending CN102485640A (en)

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Cited By (3)

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CN103395058A (en) * 2013-07-12 2013-11-20 兰州大学 Nanometer robot control device
CN104930981A (en) * 2015-06-03 2015-09-23 华中科技大学 Atomic force probe posture adjusting apparatus
CN106426085A (en) * 2016-10-28 2017-02-22 上海大学 High-throughput multi-mode representation system and method based on micro-nano manipulation robot

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CN1821743A (en) * 2006-03-27 2006-08-23 北京航空航天大学 Atomic force microscopic detecting method and device for moonscape environment locating measurement
CN1900687A (en) * 2005-07-22 2007-01-24 董再励 Low-price touch interactive interface implementation method based on scanning probe microscope
CN101419466A (en) * 2007-10-26 2009-04-29 中国科学院沈阳自动化研究所 Nanometer operating system based on SPM probe enhancement operation
US20090139315A1 (en) * 2007-11-30 2009-06-04 Chikuang Charles Wang Non-destructive ambient dynamic mode afm amplitude versus distance curve acquisition

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CN1757591A (en) * 2004-10-10 2006-04-12 中国科学院沈阳自动化研究所 Real-time force sense and visual image man-machine interaction method and system based on nanometer operation
CN1900687A (en) * 2005-07-22 2007-01-24 董再励 Low-price touch interactive interface implementation method based on scanning probe microscope
CN1821743A (en) * 2006-03-27 2006-08-23 北京航空航天大学 Atomic force microscopic detecting method and device for moonscape environment locating measurement
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CN103395058A (en) * 2013-07-12 2013-11-20 兰州大学 Nanometer robot control device
CN103395058B (en) * 2013-07-12 2016-04-20 兰州大学 A kind of Nanometer robot control device
CN104930981A (en) * 2015-06-03 2015-09-23 华中科技大学 Atomic force probe posture adjusting apparatus
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CN106426085A (en) * 2016-10-28 2017-02-22 上海大学 High-throughput multi-mode representation system and method based on micro-nano manipulation robot
CN106426085B (en) * 2016-10-28 2019-01-11 上海大学 High-throughput multi-mode based on micro-nano operation robot characterizes system and method

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Application publication date: 20120606