CN106403843A - Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy - Google Patents
Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy Download PDFInfo
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- CN106403843A CN106403843A CN201611129169.2A CN201611129169A CN106403843A CN 106403843 A CN106403843 A CN 106403843A CN 201611129169 A CN201611129169 A CN 201611129169A CN 106403843 A CN106403843 A CN 106403843A
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- optical element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention relates to the technical field of optical precision measurement and provides a contour scanning measurement device and method for a large-aperture high-curvature optical element based on confocal microscopy, so as to solve the problems of high difficult, low measurement speed and big error of existing large-aperture high-curvature optical element measurement methods. Laser light emitted by a laser passes through a collimator, a diaphragm, a dichroic mirror and an objective lens in order, then the objective lens focuses the laser light to a to-be-measured sample, and fluorescent light excited from the surface of the to-be-measured sample passes through the objective lens, the dichroic mirror, a filter converter, a converging lens and a pinhole in order and finally goes to a photoelectric detector. The present invention is applicable to measuring large-aperture high-curvature optical elements and microstructure optical elements.
Description
Technical field
The present invention relates to technical field of optical precision measurement is and in particular to measure heavy caliber Gao Qu using confocal microscopy
The technology of rate optical element surface profile.
Background technology
With the continuous development of optical manufacturing and detection technique, optical elements of large caliber has become astronomicalc optics, spatial light
Learn and ground Space Object Detection is passive with the fields such as identification, Laser Atmospheric Transmission, inertial confinement fusion (ICF)
One of critical component, is also the product that design of Optical System and Ultraprecision Machining are combined closely simultaneously.Large-aperture optical unit
Part combines the characteristic in above each field, not only effectively can correct senior aberration in optical system, significantly improve optical system
Image quality, can substantially simplify optical system structure, expansion optical systemic-function simultaneously again, be widely used in all kinds of weapon dresses
In standby, the research and development direction of this kind equipment is：Miniaturization, lightweight, over the horizon, wide visual field and high resolution, and restrict big
The key of bore optical element level of processing, depending on the detection method being adapted with manufacture requirements and instrument；But it is existing common
Burnt measuring method is difficult to detect the surface face shape of heavy caliber higher curvature optical sample, and measuring speed is slow, error is big.
Content of the invention
The invention aims to the method detection difficulty solving existing measurement heavy caliber higher curvature optical element is big, survey
The amount problem that speed is slow, error is big, thus provide the profile of the heavy caliber higher curvature optical element based on confocal microscopy to sweep
Retouch measurement apparatus and method.
The profile scan measurement apparatus of the heavy caliber higher curvature optical element based on confocal microscopy of the present invention,
Including confocal microscope system and two-dimensional gas floating motion platform；
Described confocal microscope system includes illuminator and detection system；
Described illuminator includes laser instrument, collimating mirror, diaphragm, dichroic mirror and object lens；
The laser that described laser instrument sends forms directional light after described collimating mirror, and described directional light is incident through described diaphragm
To described dichroic mirror, dichroic mirror by laser-bounce to described object lens, object lens by laser focusing to testing sample, described to be measured
Sample is placed on described two-dimensional gas floating motion platform；
The surface of testing sample is coated with organic fluorescence film；
Illuminator and described detection system share object lens and dichroic mirror；
Described detection system includes object lens, dichroic mirror, filter changer, plus lens, pin hole and photodetector；
The fluorescence that testing sample surface excitation goes out is transmitted through dichroic mirror, the fluorescence warp successively of dichroic mirror transmission through object lens
Described filter changer, plus lens and pin hole are incident to described photodetector.
Preferably, the wavelength of the laser that described laser instrument sends is 532nm.
Preferably, the laser power of described object lens transmission is more than 0mW and is less than 50mW.
Preferably, described pin hole is located on the back focal plane of plus lens.
The profile scan measuring method of the heavy caliber higher curvature optical element based on confocal microscopy of the present invention,
The method comprises the following steps：
Step one, testing sample plated surface organic fluorescence film；
The fluorescence that described testing sample sends collected by step 2, photodetector；
Step 3, object lens move along optical axis direction, and photodetector obtains axial response curve, bent according to axial response
Line, determines the surface location of testing sample；
Step 4, two-dimensional gas floating motion platform drive testing sample to move in the two dimensional surface perpendicular to optical axis；
Repeat step two is to step 3 four, until obtaining the three-dimensional surface profile of testing sample, completes to measure.
Preferably, described organic fluorescence film is rhodamine B thin film.
Beneficial effect：The present invention is capable of the grand micro structure of high precision test heavy caliber higher curvature optical element, co-occurrence
There is e measurement technology to compare, achieve optical elements of large caliber and the contour detecting of Microstructure Optics element multiplexing first, and survey
Accuracy of measurement is very high；Simultaneously present invention incorporates intermediary layer scattering method measures the research method of higher curvature optical surface type, take into account realization
Detection to higher curvature sample surface type；Eliminate mechanical scanner or multi-detector simultaneously, therefore reduce cost again.
The present invention is applied to measurement heavy caliber higher curvature optical element and Microstructure Optics element.
Brief description
Fig. 1 is the profile of the heavy caliber higher curvature optical element based on confocal microscopy described in specific embodiment one
The structural representation of scanning and measuring apparatus；
Fig. 2 is the object lens of specific embodiment five and the schematic diagram of two-dimensional gas floating motion platform scanning direction.
Specific embodiment
Specific embodiment one：Illustrate present embodiment in conjunction with Fig. 1, described in present embodiment based on confocal microscopy
The profile scan measurement apparatus of the heavy caliber higher curvature optical element of technology, flat including confocal microscope system and two-dimensional gas floating motion
Platform 7；
Described confocal microscope system includes illuminator and detection system；
Described illuminator includes laser instrument 1, collimating mirror 2, diaphragm 3, dichroic mirror 4 and object lens 5；
The laser that described laser instrument 1 sends forms directional light after described collimating mirror 2, and described directional light is through described diaphragm 3
It is incident to described dichroic mirror 4, by laser-bounce to described object lens 5, object lens 5 are by laser focusing to testing sample for dichroic mirror 4
6, described testing sample 6 is placed on described two-dimensional gas floating motion platform 7；
The surface of testing sample 6 is coated with organic fluorescence film；
Illuminator and described detection system share object lens 5 and dichroic mirror 4；
Described detection system includes object lens 5, dichroic mirror 4, filter changer 8, plus lens 9, pin hole 10 and photoelectricity
Detector 11；
The fluorescence that testing sample 6 surface excitation goes out is transmitted through dichroic mirror 4 through object lens 5, the fluorescence of dichroic mirror 4 transmission according to
Secondary it is incident to described photodetector 11 through described filter changer 8, plus lens 9 and pin hole 10.
Adjustment filter changer 8 filters green laser.The multimode that fluorescence is connected with photodetector 11 through pin hole 10 incidence
Optical fiber 12.When measuring samples are micro structure (nanometer, micron-sized grating, groove etc.), the surface of testing sample can not be plated
Organic fluorescence film, can not contain filter changer 8 in device.
Specific embodiment two：Present embodiment is to big based on confocal microscopy described in specific embodiment one
The profile scan measurement apparatus of bore higher curvature optical element are described further, and in present embodiment, described laser instrument 1 sends
Laser wavelength be 532nm.
Specific embodiment three：Present embodiment be to described in specific embodiment one or two based on confocal microscopy
The profile scan measurement apparatus of heavy caliber higher curvature optical element be described further, in present embodiment, described object lens 5 are saturating
The laser power penetrated is more than 0mW and is less than 50mW.
The laser power inciding testing sample 7 is less than 50mW it is ensured that the surface energy of testing sample 7 inspires fluorescence,
Testing sample will not be destroyed again.
Specific embodiment four：Present embodiment be to described in specific embodiment one or two based on confocal microscopy
The profile scan measurement apparatus of heavy caliber higher curvature optical element be described further, in present embodiment, described pin hole 10
On the back focal plane of plus lens 9.
Hot spot on back focal plane is minimum, and light intensity is the strongest, is conducive to improving certainty of measurement.
Specific embodiment five：Illustrate present embodiment in conjunction with Fig. 2, described in present embodiment based on being embodied as
The scanning survey method of the contour outline measuring set of heavy caliber higher curvature optical element of the confocal microscopy described in mode one, should
Method comprises the following steps：
Step one, testing sample 6 plated surface organic fluorescence film；
The fluorescence that described testing sample 6 sends collected by step 2, photodetector 11；
Step 3, object lens 5 move along optical axis direction, and photodetector 11 obtains axial response curve, according to axial response
Curve, determines the surface location of testing sample 6；
Step 4, two-dimensional gas floating motion platform 7 drive testing sample 6 to move in the two dimensional surface perpendicular to optical axis；
Repeat step two is to step 3 four, until obtaining the three-dimensional surface profile of testing sample 6, completes to measure.
Determine sample surface location by the vertex position of axial response curve.Z axis motor belt motor animal mirror does axle
To scanning motion.As shown in Fig. 2 object lens move along Z axis, as indicated by the motion arrows in the figure, two-dimensional gas floating motion platform 7 drives
Testing sample 7 moves along x-axis and y-axis, as shown in the four-headed arrow that in figure is intersected.
Specific embodiment six：Present embodiment is to big based on confocal microscopy described in specific embodiment five
The profile scan measuring method of bore higher curvature optical element is described further, in present embodiment, described organic fluorescence film
For rhodamine B thin film.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of the spirit or essential attributes of the present invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit requires rather than described above limits, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.
Although herein with reference to specific embodiment, the present invention to be described it should be understood that, these are real
Apply the example that example is only principles and applications.It should therefore be understood that exemplary embodiment can be carried out
Many modifications, and can be designed that other arrangements, the spirit of the present invention being limited without departing from claims
And scope.It should be understood that can come by way of different from described by original claim with reference to different appurtenances
Profit requires and feature specifically described herein.It will also be appreciated that can use with reference to the feature described by separate embodiments
In other described embodiments.
Claims (6)
1. the profile scan measurement apparatus of the heavy caliber higher curvature optical element based on confocal microscopy are it is characterised in that wrap
Include confocal microscope system and two-dimensional gas floating motion platform (7)；
Described confocal microscope system includes illuminator and detection system；
Described illuminator includes laser instrument (1), collimating mirror (2), diaphragm (3), dichroic mirror (4) and object lens (5)；
The laser that described laser instrument (1) sends forms directional light after described collimating mirror (2), and described directional light is through described diaphragm
(3) it is incident to described dichroic mirror (4), by laser-bounce to described object lens (5), object lens (5) are by laser focusing for dichroic mirror (4)
To testing sample (6), described testing sample (6) is placed on described two-dimensional gas floating motion platform (7)；
The surface of testing sample (6) is coated with organic fluorescence film；
Illuminator and described detection system share object lens (5) and dichroic mirror (4)；
Described detection system includes object lens (5), dichroic mirror (4), filter changer (8), plus lens (9), pin hole (10)
With photodetector (11)；
The fluorescence that testing sample (6) surface excitation goes out is transmitted through dichroic mirror (4) through object lens (5), dichroic mirror (4) transmission glimmering
Light is incident to described photodetector (11) through described filter changer (8), plus lens (9) and pin hole (10) successively.
2. the profile scan measurement of the heavy caliber higher curvature optical element based on confocal microscopy according to claim 1
Device is it is characterised in that the wavelength of laser that described laser instrument (1) sends is 532nm.
3. the profile scan of the heavy caliber higher curvature optical element based on confocal microscopy according to claim 1 and 2
Measurement apparatus are it is characterised in that the laser power of described object lens (5) transmission is more than 0mW and is less than 50mW.
4. the profile scan of the heavy caliber higher curvature optical element based on confocal microscopy according to claim 1 and 2
Measurement apparatus are it is characterised in that described pin hole (10) is located on the back focal plane of plus lens (9).
5. the profile scan based on the heavy caliber higher curvature optical element based on confocal microscopy described in claim 1 measures
The scanning survey method of device, the method comprises the following steps：
Step one, testing sample (6) plated surface organic fluorescence film；
The fluorescence that described testing sample (6) sends collected by step 2, photodetector (11)；
Step 3, object lens (5) move along optical axis direction, and photodetector (11) obtains axial response curve, according to axial response
Curve, determines the surface location of testing sample (6)；
Step 4, two-dimensional gas floating motion platform (7) drive testing sample (6) to move in the two dimensional surface perpendicular to optical axis；
Repeat step two is to step 3 four, until obtaining the three-dimensional surface profile of testing sample (6), completes to measure.
6. the profile scan measurement of the heavy caliber higher curvature optical element based on confocal microscopy according to claim 5
Method is it is characterised in that described organic fluorescence film is rhodamine B thin film.
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| CN109141224A (en) * | 2018-10-08 | 2019-01-04 | 电子科技大学 | A kind of interference reflective optic film microscopic measuring method based on structure light |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN109443711A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of optical elements of large caliber measuring device and method being servo-actuated high-velocity scanning confocal microscopy based on pin hole |
| CN109458950A (en) * | 2018-12-07 | 2019-03-12 | 哈尔滨工业大学 | A kind of servo-actuated confocal microscopy device and method of pin hole based on intermediary layer scattering |
| CN109556837A (en) * | 2018-11-21 | 2019-04-02 | 北方夜视技术股份有限公司 | A method of measurement image intensifier photocathode sensitivity |
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| CN106643557A (en) * | 2017-02-24 | 2017-05-10 | 哈尔滨工业大学 | Measuring device for macro-micro junction surface shape based on con-focal microscopy principle and measuring device method thereof |
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| CN109141224A (en) * | 2018-10-08 | 2019-01-04 | 电子科技大学 | A kind of interference reflective optic film microscopic measuring method based on structure light |
| CN109141224B (en) * | 2018-10-08 | 2020-05-22 | 电子科技大学 | Interference reflection type optical thin film microscopic measurement method based on structured light |
| CN109556837A (en) * | 2018-11-21 | 2019-04-02 | 北方夜视技术股份有限公司 | A method of measurement image intensifier photocathode sensitivity |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN109443711A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of optical elements of large caliber measuring device and method being servo-actuated high-velocity scanning confocal microscopy based on pin hole |
| CN109458950A (en) * | 2018-12-07 | 2019-03-12 | 哈尔滨工业大学 | A kind of servo-actuated confocal microscopy device and method of pin hole based on intermediary layer scattering |
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