CN105823433A - Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology - Google Patents
Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology Download PDFInfo
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- CN105823433A CN105823433A CN201610273360.8A CN201610273360A CN105823433A CN 105823433 A CN105823433 A CN 105823433A CN 201610273360 A CN201610273360 A CN 201610273360A CN 105823433 A CN105823433 A CN 105823433A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention discloses an apparatus and a method for measuring a large aperture aspheric harmonic diffractive sample based on confocal microscopy technology. The apparatus is constituted by a confocal microscopy module, a rectilinear motion platform module and a detected sample. The confocal microscopy module has an illumination module which propagates in accordance with an illumination light in the following order: a laser, a collimating mirror, a diaphragm, a light splitting prism and an object lens. A detecting module propagates in accordance with a signal light in the following order: the object lens, the light splitting prism, an optical filter, a collecting lens, a pin hole and a photoelectric detector. The illumination module and the detecting module share the object lens and the light splitting prism. The rectilinear motion platform module is an air floatation linear guide rail. The detected sample is a sample to be detected of an aspheric harmonic diffractive element. According to the invention, the apparatus firstly measures the contour of the large aperture harmonic diffractive element through the confocal microscopy technology, proposes a method for calculating the height of a curved surface substrate step, has a high fitting precision, and can measure macro-micro combined complex facial form.
Description
Technical field
The invention belongs to technical field of optical precision measurement, relate to a kind of apparatus and method utilizing confocal microscopy to measure aperture aspherical humorous diffraction sample surface profile.
Background technology
The performance boost of contemporary optics system depends on the development of optical component.Its surface of diffraction optical element has abundant architectural feature, has negative dispersion, the characteristic of negative heat differential, provides more design freedom for optical system, be therefore widely used in the middle of contemporary optics system, especially infrared optical system.Aspheric substrate harmonic diffraction element is design harmonic diffraction surfaces in aspheric surface, and its bus profile is superposition micron order step and the discrete curve that formed in the aspheric surface of macroscopic view, and therefore interferometry is not suitable for measuring this type of sample.Aspheric substrate harmonic diffraction element is rotationally symmetrical processing, and the ripe principle of products being used for measuring this type of element profile at present is Mechanical stylus method.Mechanical stylus formula measurement method measuring speed is fast, certainty of measurement is higher, and Technical comparing is ripe, but the transverse resolution of Mechanical stylus method is the highest, be limited to contact pilotage size, and Mechanical stylus easily scratches optical element surface.
Summary of the invention
In order to solve the problems referred to above, the invention provides a kind of humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy and method, from the own profile feature of aspheric substrate harmonic diffraction element, using cofocus scanning principle as measurement means, have studied curved substrate shoulder height algorithm, it is achieved that the Non-contact nondestructive of diffraction optical element bus profile humorous to aspheric substrate is measured.
The object of the present invention is achieved like this:
A kind of humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy, including confocal microscopy module, linear motion platform module and sample, wherein:
Described confocal microscopy module is made up of lighting module and detecting module two parts；
Described lighting module is followed successively by according to illuminating light propagation direction: laser instrument, collimating mirror, diaphragm, Amici prism and object lens；
Described detecting module is followed successively by according to the flashlight direction of propagation: object lens, Amici prism, optical filter, collecting lens, pin hole and photodetector；
Described lighting module, detecting module share object lens and Amici prism；
Described linear motion platform module is air supporting line slideway；
In described lighting module, laser instrument sends laser beam, and laser beam forms directional light after collimating mirror, then after Amici prism reflection and object lens transmission, forms focal beam spot on sample；
After the light beam of described sample surface reflection sequentially passes through object lens, Amici prism, optical filter, collecting lens and pin hole, collected by photodetector；
Described air supporting line slideway drives sample transverse shifting, makes sample diverse location measured, obtains the two-dimensional silhouette of sample；
Described sample is the testing sample of aspheric surface harmonic diffraction element.
A kind of method utilizing the above-mentioned humorous diffraction sample measurement apparatus of aspheric surface based on confocal microscopy to measure the humorous diffraction sample of aspheric surface, polynomial regression algorithm is used to calculate curved substrate shoulder height, use Levenberg-Marquardt algorithm fitting aspherical floor parameter, be embodied as step as follows:
Step a, laser instrument send exciting light, and laser beam forms directional light after collimator objective, and collimated light beam forms focal beam spot after Amici prism reflection and object lens transmission on sample；
Step b, focal beam spot reflect after object lens, Amici prism, optical filter, collecting lens and pin hole, are collected by photodetector, determine sample surface location by axial response curve vertex position；
Step c, air supporting line slideway drive sample two-dimensional movement, form surface profile scanning imagery；
Step d, employing polynomial regression algorithm calculate curved substrate shoulder height, extract aspheric substrate, simulate the aspheric curve of final sample；
Step e, carry out aspheric surface matching to separating the aspheric substrate data acquisition Levenberg-Marquardt algorithm after step, obtain detected element contour curve and profile errors.
There is advantages that
1, first passage confocal technology of the present invention carries out heavy caliber harmonic diffraction element profile measurement, it is proposed that curved substrate shoulder height computational methods, and not only fitting precision is high, and can carry out the measurement of the complicated face shape to grand micro-combination.
2, the present invention can measure aspheric surface harmonic diffraction element surface two-dimensional silhouette and local stepped portions carried out three-D profile scanning simultaneously, compare compared with method, due to without combining mechanical scanning and multi-angle detector technology, therefore can avoid the uncertainty that mechanical scanning brings with multi-angle detector technology, improve certainty of measurement.
3, owing to eliminating mechanical scanner or multi-detector, use optical non-contact measuring method, therefore turn avoid the damage to sample.
Accompanying drawing explanation
Fig. 1 is aperture aspherical humorous diffraction sample contour outline measuring set；
Fig. 2 is confocal microscopy modular structure schematic diagram in present invention aspheric surface based on confocal microscopy harmonic diffraction element measurement apparatus；
Fig. 3 is present invention aspheric surface based on confocal microscopy harmonic diffraction element measuring method flow chart；
Fig. 4 is the profile measurement data of aspheric surface harmonic diffraction element.
Detailed description of the invention
Below in conjunction with the accompanying drawings technical scheme is further described; but it is not limited thereto; every technical solution of the present invention is modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention, all should contain in protection scope of the present invention.
Detailed description of the invention one: as illustrated in fig. 1 and 2, based on confocal microscopy the smooth deep camber sample measuring device that present embodiment provides includes confocal microscopy modules A, linear motion platform module B and sample 7, wherein:
Described confocal microscopy modules A is made up of lighting module and detecting module two parts；
Described lighting module is followed successively by according to illuminating light propagation direction: laser instrument 1, collimating mirror 3, diaphragm 4, Amici prism 5 and object lens 6；
Described detecting module is followed successively by according to the flashlight direction of propagation: object lens 6, Amici prism 5, optical filter 9, collecting lens 10, pin hole 11 and photodetector 12；
Described lighting module, detecting module share object lens 6 and Amici prism 5；
Described linear motion platform module B is air supporting line slideway 8；
In described lighting module, laser instrument 1 sends laser beam 2, and laser beam 2 forms directional light after collimating mirror 3, then after Amici prism 5 reflection and object lens 6 transmission, forms focal beam spot on sample 7；
After the reflection light that described sample 7 surface excitation goes out sequentially passes through object lens 6, Amici prism 5, optical filter 9, collecting lens 10 and pin hole 11, collected by photodetector 12；
Described air supporting line slideway 8 drives sample 7 transverse shifting, makes sample 7 diverse location measured, obtains the two-dimensional silhouette of sample 7；
The described testing sample that sample 7 is aspheric surface harmonic diffraction element.
In present embodiment, wave-length coverage launched by described laser instrument 1 is 532nm, and illumination light luminous power after object lens is less than 100mW.
In present embodiment, described pin hole 11 is positioned on the back focal plane of collecting lens 10.
In present embodiment, described sample 7 bore is 120mm to the maximum, loses height and is 12mm to the maximum.
Detailed description of the invention two: present embodiments provide for a kind of aspheric surface harmonic diffraction element measuring method based on confocal technology, for the surface profile of aspheric surface harmonic diffraction element.As it is shown on figure 3, it is as follows to be embodied as step:
The sample 7 that step a, present embodiment select is aspheric substrate harmonic diffraction element, and its bus profile is superposition micron order step and the special diffraction original paper of discrete curve that formed in the aspheric surface of macroscopic view；
Step b, laser instrument 1 send exciting light, and laser beam 2 forms directional light after collimator objective 3, and collimated light beam forms focal beam spot after Amici prism 5 reflection and object lens 6 transmission on sample 7；
The reflection of step c, focal beam spot, after photodetector 12 is collected, determines the surface location of sample 7 by axial response curve vertex position；
Step d, air supporting line slideway 8 drive sample 7 two-dimensional movement, form surface profile scanning imagery；
Step e, aspheric surface harmonic diffraction element are superposition step item and the complex outlines of special grand micro-combination that formed on aspheric substrate, and we use polynomial regression to calculate method and calculate curved substrate shoulder height here, extract aspheric substrate.
For an actual aspheric surface harmonic diffraction element profile measurement data as shown in Figure 4, its aspheric substrate processing formula be:
In formula, z1Losing height for aspheric surface, c is aspheric surface vertex curvature, and k is conic constant, and A, B are aspheric surface high-order term coefficient, P1、P2For Difraction surface coefficient.
First, choosing the data measurement points that upper and lower surface near step is stable, use polynomial regression to calculate shoulder height, its formula is:
Z=a0+a1x+a2x2+…+anxn+h·δ。
Wherein, a0, a1, a2……anIt is undetermined parameter with h, a0, a1, a2……anFor multinomial coefficient, 2h is shoulder height.In step lower surface δ=+ 1, in platform upper surface δ=-1.Using quadratic polynomial regression Calculation during calculating, the annulus shoulder height obtained is as shown in table 1.Then deduct corresponding shoulder height with each annulus face, obtain continuous print aspheric substrate.
Table 1 annulus step result of calculation (μm)
| Annulus | Design load | Measured value |
| 1 | 3.66 | 3.58 |
| 2 | 3.66 | 3.59 |
| 3 | 3.66 | 3.64 |
| 4 | 3.66 | 3.61 |
| 5 | 3.66 | 3.68 |
| 6 | 3.66 | 3.66 |
Step f, carrying out aspheric surface matching to separating the aspheric substrate data acquisition Levenberg-Marquardt algorithm after step, obtain the results are shown in Table 2.
Table 2 asphericity coefficient fitting result
| Design load | Match value | |
| c | 0.00534559 | 0.00534636 |
| k | 4.2335 | 4.2330 |
| A | -4.529×10-8 | -4.319×10-8 |
| B | -4.2966×10-12 | -3.8826×10-12 |
| P1 | -1.11511383×10-5 | -1.00006547×10-5 |
| P2 | -2.6693989×10-9 | -5.6889219×10-9 |
Claims (6)
1. the humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy, it is characterised in that described device is made up of, wherein confocal microscopy module, linear motion platform module and sample:
Described confocal microscopy module is made up of lighting module and detecting module two parts；
Described lighting module is followed successively by according to illuminating light propagation direction: laser instrument, collimating mirror, diaphragm, Amici prism and object lens；
Described detecting module is followed successively by according to the flashlight direction of propagation: object lens, Amici prism, optical filter, collecting lens, pin hole and photodetector；
Described lighting module, detecting module share object lens and Amici prism；
Described linear motion platform module is air supporting line slideway；
In described lighting module, laser instrument sends laser beam, and laser beam forms directional light after collimating mirror, then after Amici prism reflection and object lens transmission, forms focal beam spot on sample；
After the light beam of described sample surface reflection sequentially passes through object lens, Amici prism, optical filter, collecting lens and pin hole, collected by photodetector；
Described air supporting line slideway drives sample transverse shifting, makes sample diverse location measured, obtains the two-dimensional silhouette of sample；
Described sample is the testing sample of aspheric surface harmonic diffraction element.
The humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy the most according to claim 1, it is characterised in that described laser emission wavelength scope is 532nm, illumination light luminous power after object lens is less than 100mW.
The humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy the most according to claim 1, it is characterised in that described pin hole is positioned on the back focal plane of collecting lens.
The humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy the most according to claim 1, it is characterised in that described sample bore is 120mm to the maximum, loses height and is 12mm to the maximum.
5. the humorous diffraction sample measurement apparatus of aperture aspherical based on confocal microscopy that a kind utilizes described in claim 1-4 any claim measures the method for the humorous diffraction sample of aspheric surface, it is characterised in that described method step is as follows:
Step a, laser instrument send exciting light, and laser beam forms directional light after collimator objective, and collimated light beam forms focal beam spot after Amici prism reflection and object lens transmission on sample；
Step b, focal beam spot reflect after object lens, Amici prism, optical filter, collecting lens and pin hole, are collected by photodetector, determine sample surface location by axial response curve vertex position；
Step c, air supporting line slideway drive sample two-dimensional movement, form surface profile scanning imagery；
Step d, employing polynomial regression algorithm calculate curved substrate shoulder height, extract aspheric substrate；
Step e, carry out aspheric surface matching to separating the aspheric substrate data acquisition Levenberg-Marquardt algorithm after step, obtain detected element contour curve and profile errors.
The humorous diffraction sample measurement apparatus of utilization the most according to claim 5 aperture aspherical based on confocal microscopy measures the method for the humorous diffraction sample of aspheric surface, it is characterised in that specifically comprising the following steps that of described step d
First choosing the data measurement points that near step, upper and lower surface is stable, use polynomial regression to calculate shoulder height, its formula is:
Z=a0+a1x+a2x2+…+anxn+ h δ,
In formula, a0, a1, a2……anFor multinomial coefficient, 2h is shoulder height, in step lower surface δ=+ 1, in platform upper surface δ=-1, uses quadratic polynomial regression Calculation, obtain annulus shoulder height during calculating；
Then deduct corresponding shoulder height with each annulus face, obtain continuous print aspheric substrate.
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| CN106643557A (en) * | 2017-02-24 | 2017-05-10 | 哈尔滨工业大学 | Measuring device for macro-micro junction surface shape based on con-focal microscopy principle and measuring device method thereof |
| CN106705881A (en) * | 2016-12-12 | 2017-05-24 | 哈尔滨工业大学 | Confocal microscopy principle-based large-aperture optical element bus profile measurement method |
| CN106767512A (en) * | 2016-12-29 | 2017-05-31 | 哈尔滨工业大学 | Optical element high precision measuring device based on real-time monitoring kinematic error |
| CN106842529A (en) * | 2017-01-23 | 2017-06-13 | 清华大学 | Quick three-dimensional micro imaging system |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN109458950A (en) * | 2018-12-07 | 2019-03-12 | 哈尔滨工业大学 | A kind of servo-actuated confocal microscopy device and method of pin hole based on intermediary layer scattering |
| CN109764817A (en) * | 2019-01-14 | 2019-05-17 | 南京信息工程大学 | Contactless lens centre thickness measuring system and method |
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| CN106403843A (en) * | 2016-12-09 | 2017-02-15 | 哈尔滨工业大学 | Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy |
| CN106705881A (en) * | 2016-12-12 | 2017-05-24 | 哈尔滨工业大学 | Confocal microscopy principle-based large-aperture optical element bus profile measurement method |
| CN106767512A (en) * | 2016-12-29 | 2017-05-31 | 哈尔滨工业大学 | Optical element high precision measuring device based on real-time monitoring kinematic error |
| CN106842529A (en) * | 2017-01-23 | 2017-06-13 | 清华大学 | Quick three-dimensional micro imaging system |
| CN106842529B (en) * | 2017-01-23 | 2019-03-01 | 清华大学 | Quick three-dimensional micro imaging system |
| CN106643557A (en) * | 2017-02-24 | 2017-05-10 | 哈尔滨工业大学 | Measuring device for macro-micro junction surface shape based on con-focal microscopy principle and measuring device method thereof |
| CN106643557B (en) * | 2017-02-24 | 2019-04-16 | 哈尔滨工业大学 | Macro micro- faying face shape measuring device and its measurement method based on confocal microscopy principle |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
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| CN109764817A (en) * | 2019-01-14 | 2019-05-17 | 南京信息工程大学 | Contactless lens centre thickness measuring system and method |
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