CN106353277A - Gas absorption cell based on copper scandium oxide infrared transparent conductive film - Google Patents
Gas absorption cell based on copper scandium oxide infrared transparent conductive film Download PDFInfo
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- CN106353277A CN106353277A CN201610803395.8A CN201610803395A CN106353277A CN 106353277 A CN106353277 A CN 106353277A CN 201610803395 A CN201610803395 A CN 201610803395A CN 106353277 A CN106353277 A CN 106353277A
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- infrared
- conducting film
- absorption cell
- shell
- transparent conducting
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- 238000010521 absorption reaction Methods 0.000 title claims abstract description 74
- BKHSBMXUNIDCBQ-UHFFFAOYSA-N [O-2].[Sc+3].[Cu+2] Chemical compound [O-2].[Sc+3].[Cu+2] BKHSBMXUNIDCBQ-UHFFFAOYSA-N 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000010980 sapphire Substances 0.000 claims abstract description 26
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 26
- 239000007789 gas Substances 0.000 claims description 84
- 239000010408 film Substances 0.000 claims description 63
- KLTQNZKJIQDFHD-UHFFFAOYSA-N oxocopper scandium Chemical compound [Cu]=O.[Sc] KLTQNZKJIQDFHD-UHFFFAOYSA-N 0.000 claims description 37
- 238000000137 annealing Methods 0.000 claims description 22
- AXJFPMGRQPKZLD-UHFFFAOYSA-N [O].[Sc] Chemical compound [O].[Sc] AXJFPMGRQPKZLD-UHFFFAOYSA-N 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 15
- 230000000694 effects Effects 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 9
- 239000003292 glue Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 6
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000013019 agitation Methods 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 239000010437 gem Substances 0.000 claims description 3
- 229910001751 gemstone Inorganic materials 0.000 claims description 3
- 239000004570 mortar (masonry) Substances 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 239000004568 cement Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000007772 electrode material Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 241001062009 Indigofera Species 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 12
- 238000001311 chemical methods and process Methods 0.000 abstract 1
- 229910000906 Bronze Inorganic materials 0.000 description 16
- 239000010974 bronze Substances 0.000 description 16
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 16
- 238000005259 measurement Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Abstract
The invention provides a gas absorption cell based on copper scandium oxide infrared transparent conductive film; the sidewall of the gas absorption cell is provided with a vent hole, a first shell and a second shell are disposed on the same inner side of the gas absorption cell, a third shell is disposed on the other inner side of the gas absorption cell, a space for gas under test is provided between the two sides, an infrared source and an infrared detector are arranged respectively in the first shell and the second shell, and waterproof connectors of the third infrared source and infrared detector extend out of the gas absorption cell to act as power supply and signal acquisition interfaces; a spherical reflector is arranged inside the third shell, a sapphire substrate is embedded on each of opposing inner faces of the first shell, second shell and third shell, copper scandium oxide infrared transparent conductive film is applied to the outer side of any sapphire substrate through a chemical process, and a positive pole and a negative pole are plated to two sides of any copper scandium oxide infrared transparent conductive film; the gas absorption cell has the advantage that the gas absorption cell is suitable for precisely measuring gas in the environments such as heavy dust and high humidity.
Description
Technical field
The invention belongs to infrared gas detection technical field, especially relate to one kind and be based on copper scandium oxygen infrared transparent conducting film
Gas absorption cell.
Background technology
In existing infrared gas detection system, gas absorption cell is various informative, and its Main Function is by infrared light supply
The light sending is along the path transmission setting, and incides on detector.Wherein can be shown using the gas absorption cell of Open architecture
Write the response speed improving sensor, thus having superior real-time.It is right that gas absorption cell typically adopts optical glass to improve
The light gathering efficiency of infrared light, eyeglass model, parameter etc. depend on physical size and the luminous parameters of light source and detector.However,
Infrared light supply in opening gas absorption cell, detector and optical glass are all directly contacted with external environment, the water in environment
Vapour and dust can adhere to over such devices, the propagation of impact infrared light, and then affect the performance of whole instrument.When steam is larger
During (as warmhouse booth) or dust more (as colliery), optics especially optical window will be ineffective, will lead when serious
Cause instrument failure.
People when designing infrared gas detection instrument it is contemplated that dust-proof, damp proof problem, generally dust-proof, anti-using having
The material of wet effect covers in plenum surface, but the diffusion velocity of gas so can be led to slow down, thus extending the response of instrument
Time.What is more important, when such materials'use for a period of time after can because the absorption of dust lead to aperture block, be unfavorable for gas
Body exchanges so that people need to remove the dust of absorption or more conversion materials between aperture through conventional high wind.Different from such scheme, this
Invention has infrared light, conductive thin-film material it is proposed that the design side of a kind of Dustproof, damp proof air chamber based on develop
Case, relies on the effect of nesa coating and attached electricity drive module, this air chamber can be to light source, detector, optical mirror
Form good protective action, and do not affect the transmission of infrared light and the diffusion of gas, ensure that simultaneously instrument response speed,
Reliability and life-span.
Content of the invention
For the deficiencies in the prior art, the invention discloses a kind of GAS ABSORPTION based on copper scandium oxygen infrared transparent conducting film
Pond, solves that traditional infrared gas detecting instrument is dust-proof, damp proof method and the not good enough technical barrier of result, thus for dust many,
Gas accurate measurement under the adverse circumstances such as high humidity provides solution.
The technical scheme is that a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film of the present invention,
The side wall of gas absorption cell is provided with passage, and the first shell, second housing are arranged on homonymy in gas absorption cell, the 3rd shell
It is arranged in gas absorption cell opposite side relatively, be under test gas space between both sides, set respectively in the first shell, second housing
There are infrared light supply, Infrared Detectorss, infrared light supply, the water joint of Infrared Detectorss extend out through gas absorption cell, make
For power supply and signal acquisition interface；
3rd inside the shell is provided with spherical reflector, and the first shell, second housing, the opposite face of the 3rd inside the shell are all inlayed
There is Sapphire Substrate, outside arbitrary Sapphire Substrate, copper scandium oxygen infrared transparent conducting film, Ren Yitong are coated with by chemical technology
The both sides of scandium oxygen infrared transparent conducting film are coated with anelectrode, negative electrode respectively, and positive and negative electrode passes through wire respectively and is arranged on gas
Conductor interface on body absorption cell pool wall is connected, and connection insulation glue seals, and when anelectrode, negative electrode energising, copper scandium oxygen is infrared
Nesa coating heats, and plays damp proof effect, and anelectrode is hanging, during negative electrode ground connection, can guide copper scandium oxygen infrared transparent and lead
The electrostatic of film surface, plays the effect of dedusting.
Preferably, on infrared transparent conducting film, the electrode material of evaporation is at gold, and the connecting terminal of electrode and conducting film
Insulating cement is wanted to seal.
Preferably, described infrared light supply is thermal light source, model irl715, ir55；Infrared Detectorss detect for pyroelectricity
Device, the reflecting surface material of described spherical reflector is aluminum or gold.
Preferably, infrared light supply, Infrared Detectorss and during spherical reflector are installed, the main shaft of spherical reflector should be parallel to
Upper and lower, the front and back walls of gas absorption cell；Infrared light supply and Infrared Detectorss be located on the principal section of spherical reflector and with regard to
The main shaft of spherical reflector is symmetrical, and the distance of light source place principal section and sphere summit place principal section should give optimization
To improve light gathering efficiency.
Another aspect of the present invention, also includes the described gas absorption cell based on copper scandium oxygen infrared transparent conducting film and detects gas
The method of body, it comprises the following steps:
S1: infrared signal produces process: under modulated signal effect, infrared light supply launches initial infrared signal, and
Transmit under test gas space through after the Sapphire Substrate on the first housing, copper scandium oxygen infrared transparent conducting film；
S2: infrared signal and under test gas molecular action stage 1: acted on by under test gas molecule absorption, initially infrared
The light matching with test gas molecule absorption peak in optical signal will be absorbed, and produces the infrared signal once absorbing；
S3: infrared signal reflection process: the infrared signal once being absorbed described in s2 is via on the second housing
Copper scandium oxygen infrared transparent conducting film, incide on spherical reflector after the transmission of Sapphire Substrate；Spherical reflector is to once
The infrared signal absorbing is reflected, then via the second housing blueing gem substrate and copper scandium oxygen infrared transparent conducting film transmission
After transmit under test gas space；
S4: infrared signal and under test gas molecular action stage 2: acted on by under test gas molecule absorption, once infrared
The light matching with test gas molecule absorption peak in optical signal will be absorbed, and produces the infrared signal of double absorption；
S5: the photoelectric signal transformation stage: the infrared signal of the double absorption described in s4 is via the copper on the 3rd housing
After the transmission of scandium oxygen infrared transparent conducting film and Sapphire Substrate, incide on Infrared Detectorss, two sensitive windows of the latter
Receive the infrared signal matching with its response wave length respectively, and be converted into signal output.
Another aspect of the present invention, also includes the coating process of copper scandium oxygen infrared transparent conducting film, comprises the following steps:
(1) prepare high purity copper scandium oxygen target first, comprise the concrete steps that: with analytically pure cu (no3)2With sc (no3)3For former
Material, dehydrated alcohol are solvent, triethanolamine as solubilizing agent；Weigh the cu (no of 0.02mol respectively3)2With sc (no3)3, will
It is dissolved in the dehydrated alcohol of 30ml, and the triethanolamine adding 3ml, as solubilizing agent, is formed uniformly after magnetic agitation 5h under room temperature
Colloidal sol, the colloidal sol of gained is put in drying baker and dries 48h at 200 DEG C and obtain gel；Gel agate mortar is developed
Become nano level powder particle, powder is put into the in the air annealing 10h at 1200 DEG C in annealing furnace.Powder after annealing is used
Tablet machine, under the pressure of 20mpa, is pressed into the solid-state target that a diameter of 52mm thickness is 8mm, then in 1100 DEG C of annealing furnace
Middle annealing 5h, finally obtains the cusco of pure phase2Target；
(2) prepare cusco2Thin film, comprises the concrete steps that: using the cusco of preparation2Target, using magnetron sputtering method in cleaning
Cusco is deposited on clean Sapphire Substrate2Thin film；Sedimentary condition is: adopts direct current magnetron sputtering process, sputtering power is
150w, substrate vacuum is 1.0 × 10-5Pa, the ar throughput being passed through is 20sccm, and underlayer temperature is 300 DEG C, and target-substrate distance is
7.5cm, sedimentation time is 30min；
(3) by the thin film having deposited in n2In made annealing treatment, annealing temperature be 900 DEG C, move back annealing time be 5h.
The present invention has the advantages and positive effects that:
1st, by means of preparation infrared transparent conducting film regular transmission infrared light on a sapphire substrate, and by infrared light
Source, spherical reflector and Infrared Detectorss are sealed respectively, thus three is isolated tentatively to suppress water with external environment
The impact to them of vapour, dust.
2nd, voltage is accessed by the positive and negative electrode of each infrared transparent conducting film, to conducting film heating, evaporate its surface
Steam；Infrared transparent conducting film is grounded with the electrostatic guiding its surface so that dust is difficult to absorption on conducting film, thus entering one
Step suppression steam, the impact to gas absorption cell for the dust.
3rd, the present invention solve traditional infrared gas detecting instrument open air chamber is dust-proof, damp proof method and effect are owed
Good technical barrier, provides solution for gas accurate measurement in strong dust, the adverse circumstances of high humility.
Brief description
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the three-dimensional structure diagram of the first shell；
Fig. 3 is the left view of the present invention；
Fig. 4 is the three-dimensional structure diagram of second housing；
Fig. 5 is the three-dimensional structure diagram of the 3rd shell；
Fig. 6 is the right view of the present invention；
Fig. 7 is the front view of the present invention；
Fig. 8 is the rearview of the present invention；
Fig. 9 is the preparation process schematic diagram of copper scandium oxygen infrared transparent conducting film；
Figure 10 a-10b is the sem figure of copper scandium oxygen infrared transparent conducting film；
Figure 11 a-11b is the transmission measurement figure of copper scandium oxygen infrared transparent conducting film；
Figure 12 is the electrical conductivity test chart of copper scandium oxygen infrared transparent conducting film.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is elaborated.
Referring to Fig. 1, this device by the first shell 1, infrared light supply 2, the first water joint 3, the first Sapphire Substrate 4,
One bronze medal scandium oxygen infrared transparent conducting film 5, the second bronze medal scandium oxygen infrared transparent conducting film 6, the second Sapphire Substrate 7, the second waterproof connect
8, Infrared Detectorss 9, second housing 10, the first conductor interface 11, the first wire 12, the second wire 13, the first anelectrode 14,
First negative electrode 15, the second anelectrode 16, the second negative electrode 17, privates 18, the 5th wire 19, the second conductor interface 20,
Privates 21, the 3rd anelectrode 22, the 3rd negative electrode 23, the 6th wire 24, the 3rd shell 25, spherical reflector the 26, the 3rd
Sapphire Substrate 27, the 3rd bronze medal scandium oxygen infrared transparent conducting film 28, gas absorption cell shell 29 form.
Gas absorption cell shell 29 is rectangle cavity body structure, including left, right, front and rear, upper and lower totally six walls；Gas is inhaled
First shell 1 and second housing 10 are fixed on receives pond left wall, right wall is fixed the 3rd shell 25；Left wall has the first water joint
3rd, the second water joint 8, the two is connected with infrared light supply 2, Infrared Detectorss 9 respectively, as infrared light supply 2 and infrared acquisition
The power supply of device 9 and signal acquisition interface；Antetheca and rear wall are respectively with the first conductor interface 11 and the second conductor interface 20；On
Wall, lower wall are sealing structure；The left, right, front and rear of gas absorption cell shell, upper and lower wall are all interfixed by screw.
First bronze medal scandium oxygen infrared transparent conducting film 5 is prepared in the first Sapphire Substrate 4 by chemical technology, and with first
Upper and lower, forward and backward four wall phases of shell 1 are fixed, thus infrared light supply 2, the first conductor interface 11 are sealed in a cuboid
In space；The both sides of the first bronze medal scandium oxygen infrared transparent conducting film 5 are coated with the first anelectrode 14 and the first negative electrode 15；First positive electricity
Pole 14 is connected with the first wire 12, and the first negative electrode 15 is connected with privates 18, and connection insulation glue seals；First wire
12 are connected with the first conductor interface 11；Privates 18 are connected with the second conductor interface 20；
Second bronze medal scandium oxygen infrared transparent conducting film 6 is prepared in the second Sapphire Substrate 7 by chemical technology, and with second
Upper and lower, forward and backward four wall phases of shell 10 are fixed, thus by Infrared Detectorss 9, the second conductor interface 20 be sealed in one long
In cube space；The both sides of the second bronze medal scandium oxygen infrared transparent conducting film 6 are coated with the second anelectrode 16 and the second negative electrode 17；Second
Anelectrode 16 is connected with the second wire 13, and the second negative electrode 17 is connected with the 5th wire 19, and connection insulation glue seals；Second
Wire 13 is connected with the first conductor interface 11；5th wire 19 is connected with the second conductor interface 20；
3rd bronze medal scandium oxygen infrared transparent conducting film 28 is prepared in the 3rd Sapphire Substrate 27 by chemical technology, and with the
Upper and lower, forward and backward four wall phases of three shells 25 are fixed, thus spherical reflector 26 is sealed in a rectangular parallelepiped space；The
The both sides of three bronze medal scandium oxygen infrared transparent conducting films 28 are coated with the 3rd anelectrode 14 and the 3rd negative electrode 15；3rd anelectrode 14 and
Three wires 21 are connected, and the 3rd negative electrode 15 is connected with the 6th wire 24, and connection insulation glue seals；Privates 21 and first
Conductor interface 11 is connected, and the 6th wire 24 is connected with the second conductor interface 20.
Referring to Fig. 2 and Fig. 3, the first shell 1 is in rectangular structure, by the first shell upper wall 51, the first housing front plate 52, the
One shell lower wall 54, the first housing back wall 55 are constituted；Its upper and lower, forward and backward four wall pass through the first screw 30, the 3rd screw 32,
6th screw 35, the 8th screw 37 are fixed in the left wall of gas absorption cell shell 29；Infrared light supply 2 pass through the second screw 31,
4th screw 33, the 5th screw 34, the 7th screw 36 are fixed in gas absorption cell left wall, thus infrared light supply is placed in gas and inhales
In the space that upper and lower, forward and backward four walls of receives pond left wall and the first shell 1 are formed.
Referring to Fig. 4 and Fig. 3, second housing 10 is in rectangular structure, by second housing upper wall 56, second housing antetheca 57,
Second housing lower wall 59, second housing rear wall 60 are constituted；Its upper and lower, forward and backward four wall passes through the 9th screw 38, the 11st spiral shell
Silk the 40, the 14th screw 43, the 16th screw 45 are fixed in the left wall of gas absorption cell shell 29；Infrared Detectorss 9 pass through
Tenth screw 39, the tenth two-screw 41, the 13rd screw 42, the 15th screw 44 are fixed in gas absorption cell left wall, thus
Infrared Detectorss are placed in gas absorption cell left wall and the space of upper and lower, forward and backward four walls formation of second housing 10.
Referring to Fig. 5 and Fig. 6, the 3rd shell 25 is in rectangular structure, and by the 3rd shell upper wall 61, the 3rd housing front plate
64th, the 3rd shell lower wall 63, the 3rd housing back wall 62 are constituted；Upper and lower, forward and backward four walls of the 3rd shell 25 pass through the 17th
Screw 46, the 18th screw 47, the 19th screw 48, the 20th screw 49 are fixed in the right wall of gas absorption cell shell 29；
Spherical reflector 26 glue is fixed in gas absorption cell right wall, thus spherical reflector is placed in gas absorption cell right wall and the 3rd
In the space that upper and lower, forward and backward four walls of shell 25 are formed.
Referring to Fig. 7 and Fig. 8, forward and backward two walls of gas absorption cell have many round vents 50, so that in external environment condition
Gas diffusion to gas absorption cell, and antetheca and rear wall are respectively with the first conductor interface 11 and the second conductor interface
20.
Using infrared light supply be thermal light source, model irl715, ir55；Infrared Detectorss are pyroelectric detector, its
Depending on model can be according to the Absorption Line of selected under test gas molecule；The reflecting surface material of spherical reflector is aluminum or gold；Install
When infrared light supply, Infrared Detectorss and spherical reflector, the main shaft of spherical reflector should parallel to gas absorption cell upper and lower,
Front and back walls；On the principal section of spherical reflector and the main shaft with regard to spherical reflector is left for infrared light supply and Infrared Detectorss
Right symmetrical, and the distance of light source place principal section and sphere summit place principal section should give optimization to improve light gathering efficiency；This
Sample can make infrared light supply transmitting infrared light through spherical reflector reflection be ultimately incident upon detector sensitive area on.
Described gas absorption cell has two kinds of mode of operations, and one is dehumidification mode, now the first anelectrode and first negative
Electrode, the second anelectrode and the second negative electrode, the 3rd anelectrode and the 3rd negative electrode are respectively used to infrared to the first bronze medal scandium oxygen
Bright conducting film, the second bronze medal scandium oxygen infrared transparent conducting film and the 3rd bronze medal scandium oxygen infrared transparent conducting film provide supply voltage, to leading
Electrolemma heats, and evaporates the steam on its surface, plays damp proof effect；Two are, dust-proof pattern；Now the first anelectrode, second
Anelectrode, the 3rd anelectrode are in vacant state it is only necessary to by the first negative electrode, the second negative electrode, the 3rd negative electrode ground connection, lead
Walk the electrostatic on conducting film surface so that dust is difficult absorption on conducting film, it is to avoid infrared light is affected by dust, thus playing
Dust-proof effect.
Referring to Fig. 9, using magnetron sputtering method, prepare high purity copper scandium oxygen target first, comprise the concrete steps that: with analytically pure cu
(no3) 2 and sc (no3) 3 be raw material, dehydrated alcohol be solvent, triethanolamine as solubilizing agent；Weigh 0.02mol's respectively
Cu (no3) 2 and sc (no3) 3, is dissolved in the dehydrated alcohol of 30ml, and the triethanolamine adding 3ml is as solubilizing agent, room temperature
Form uniform colloidal sol after lower magnetic agitation 5h, the colloidal sol of gained is put in drying baker and dries 48h at 200 DEG C and coagulated
Glue；Gel agate mortar is developed into nano level powder particle, powder is put into the in the air at 1200 DEG C in annealing furnace
Annealing 10h.By the powder tablet machine after annealing under the pressure of 20mpa, it is pressed into the solid-state that a diameter of 52mm thickness is 8mm
Target, then the 5h that anneals in 1100 DEG C of annealing furnace, finally obtain the cusco2 target of pure phase.Secondly, prepare cusco2 thin film,
Comprise the concrete steps that: using the cusco2 target of preparation, deposited in the Sapphire Substrate cleaning up using magnetron sputtering method
Cusco2 thin film；Sedimentary condition is: adopts direct current magnetron sputtering process, sputtering power is 150w, substrate vacuum is 1.0 × 10-
5pa, the ar throughput being passed through is 20sccm, and underlayer temperature is 300 DEG C, and target-substrate distance is 7.5cm, and sedimentation time is 30min.?
Afterwards, the thin film having deposited is made annealing treatment in n2, annealing temperature is 900 DEG C, moving back annealing time is 5h.
Referring to Figure 10, the surface of copper scandium oxygen infrared transparent conducting film and cross-sectional morphology can pass through Field Emission Scanning Electron
Microscope (fe-sem) is observed and is obtained, respectively as shown in Figure 10 (a) and 10 (b).From Field Emission Scanning Electron microscope photograph
Can see, the thin film table second is dense and uniform, and does not have micro crack.Thin film is adhere tightly in Sapphire Substrate, and thin film is thick
Degree is about 240nm.
Referring to Figure 11, in the wave-length coverage of 250-3000nm, the transmitance of copper scandium oxygen infrared transparent conducting film can be passed through
Ultraviolet-visible-near infrared spectrometer measurement obtains, and in 2.5-20 μm of wave-length coverage, then can use Fourier transformation red
External spectrum instrument measurement obtains.Can be obtained by Figure 11 (a), in whole visible light wave ranges, film transmission rate is 40-65%, closely red
External spectrum scope, transmitance is up to 65-85%.Can be obtained by Figure 11 (b), in the middle-infrared band of 2.5-6 micron, the transmission of thin film
Rate is more than 85%, and does not have any absorption characteristic drastically.
Referring to Figure 12, the conductivity of copper scandium oxygen infrared transparent conducting film to be measured by Hall effect measuring system and to obtain, and surveys
The temperature range of amount is 90-300k.With the increase of temperature, the resistance coefficient of thin film is gradually reduced, and under room temperature, copper scandium oxygen is infrared
The resistance coefficient of nesa coating is 1.047 ω cm, thus having higher electrical conductivity.
The invention provides a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film, use it for detected gas
When, work process is as follows: infrared light supply launches initial infrared signal under modulated signal effect, and through the first sapphire lining
Transmit under test gas space behind bottom, the first bronze medal scandium oxygen infrared transparent conducting film；Acted on by under test gas molecule absorption, initially red
The light matching with test gas molecule absorption peak in outer optical signal will be absorbed, and produces the infrared signal once absorbing；Quilt
The infrared signal once absorbing is via incident after the transmission of the second bronze medal scandium oxygen infrared transparent conducting film and the second Sapphire Substrate
To on spherical reflector；Spherical reflector reflects to the infrared signal once absorbing, then via the second Sapphire Substrate
Transmit under test gas space with after the second bronze medal scandium oxygen infrared transparent conducting film transmission；Acted on by under test gas molecule absorption, one
The light matching with test gas molecule absorption peak in secondary infrared signal will be absorbed, and produces the infrared light letter of double absorption
Number；After the transmission via the 3rd bronze medal scandium oxygen infrared transparent conducting film and the 3rd Sapphire Substrate for the infrared signal of double absorption,
Incide on Infrared Detectorss, two sensitive windows of the latter receive the infrared signal matching with its response wave length respectively,
And it is converted into signal output.
Above one embodiment of the present of invention is described in detail, but described content has been only the preferable enforcement of the present invention
Example is it is impossible to be considered the practical range for limiting the present invention.All impartial changes made according to the present patent application scope and improvement
Deng all should still belong within the patent covering scope of the present invention.
Claims (6)
1. a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film it is characterised in that: on the side wall of gas absorption cell
It is provided with passage, the first shell, second housing are arranged on homonymy in gas absorption cell, the 3rd shell is arranged in gas absorption cell
Opposite side relatively, is under test gas space between both sides, is respectively equipped with infrared light supply, infrared spy in the first shell, second housing
Survey device, infrared light supply, the water joint of Infrared Detectorss extend out through gas absorption cell, connect as power supply and signal acquisition
Mouthful；
3rd inside the shell is provided with spherical reflector, and the first shell, second housing, the opposite face of the 3rd inside the shell are all inlaid with indigo plant
Gem substrate, is coated with copper scandium oxygen infrared transparent conducting film, arbitrary copper scandium oxygen by chemical technology outside arbitrary Sapphire Substrate
The both sides of infrared transparent conducting film are coated with anelectrode, negative electrode respectively, and positive and negative electrode passes through wire respectively and is arranged on gas suction
Conductor interface on receives pond pool wall is connected, and connection insulation glue seals, when anelectrode, negative electrode energising, copper scandium oxygen infrared transparent
Conducting film heats, and plays damp proof effect, and anelectrode is hanging, during negative electrode ground connection, can guide copper scandium oxygen infrared transparent conducting film
The electrostatic on surface, plays the effect of dedusting.
2. a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film according to claim 1 it is characterised in that:
On described infrared transparent conducting film, the electrode material of evaporation is insulating cement envelope at gold, and the connecting terminal of electrode and conducting film.
3. a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film according to claim 1 it is characterised in that:
Described infrared light supply is thermal light source, model irl715, ir55；Infrared Detectorss are pyroelectric detector, described spheric reflection
The reflecting surface material of mirror is aluminum or gold.
4. a kind of gas absorption cell based on copper scandium oxygen infrared transparent conducting film according to claim 1 it is characterised in that:
Infrared light supply, Infrared Detectorss and during spherical reflector are installed, the main shaft of spherical reflector should parallel to gas absorption cell upper,
Under, front and back walls；Infrared light supply and Infrared Detectorss are located on the principal section of spherical reflector and the main shaft with regard to spherical reflector
Symmetrical, and the distance of light source place principal section and sphere summit place principal section should give optimization to improve light gathering efficiency.
5. a kind of side of the gas absorption cell detected gas based on copper scandium oxygen infrared transparent conducting film as claimed in claim 1
Method, it comprises the following steps:
S1: infrared signal produces process: under modulated signal effect, infrared light supply launches initial infrared signal, and passes through
Transmit under test gas space after Sapphire Substrate on first housing, copper scandium oxygen infrared transparent conducting film；
S2: infrared signal and under test gas molecular action stage 1: acted on by under test gas molecule absorption, initial infrared light letter
The light matching with test gas molecule absorption peak in number will be absorbed, and produces the infrared signal once absorbing；
S3: infrared signal reflection process: the infrared signal once being absorbed described in s2 is via the copper on the second housing
Incide on spherical reflector after scandium oxygen infrared transparent conducting film, the transmission of Sapphire Substrate；Spherical reflector is to once absorbing
Infrared signal reflected, then via after the second housing blueing gem substrate and copper scandium oxygen infrared transparent conducting film transmission pass
Transport under test gas space；
S4: infrared signal and under test gas molecular action stage 2: acted on by under test gas molecule absorption, an infrared light letter
The light matching with test gas molecule absorption peak in number will be absorbed, and produces the infrared signal of double absorption；
S5: the photoelectric signal transformation stage: the infrared signal of the double absorption described in s4 is via the copper scandium oxygen on the 3rd housing
After the transmission of infrared transparent conducting film and Sapphire Substrate, incide on Infrared Detectorss, two sensitive windows of the latter are respectively
Receive the infrared signal matching with its response wave length, and be converted into signal output.
6. a kind of method preparing copper scandium oxygen infrared transparent conducting film as claimed in claim 1, comprises the following steps:
(1) prepare high purity copper scandium oxygen target first, comprise the concrete steps that: with analytically pure cu (no3)2With sc (no3)3For raw material,
Dehydrated alcohol is solvent, triethanolamine as solubilizing agent；Weigh the cu (no of 0.02mol respectively3)2With sc (no3)3, it is dissolved in
In the dehydrated alcohol of 30ml, the triethanolamine adding 3ml, as solubilizing agent, forms uniformly molten after magnetic agitation 5h under room temperature
Glue, the colloidal sol of gained is put in drying baker and dries 48h at 200 DEG C and obtain gel；Gel agate mortar is developed into and receives
The powder particle of meter level, powder is put into the in the air annealing 10h at 1200 DEG C in annealing furnace.By the powder tabletting after annealing
Machine, under the pressure of 20mpa, is pressed into the solid-state target that a diameter of 52mm thickness is 8mm, then moves back in 1100 DEG C of annealing furnace
Fiery 5h, finally obtains the cusco of pure phase2Target；
(2) prepare cusco2Thin film, comprises the concrete steps that: using the cusco of preparation2Target, is being cleaned up using magnetron sputtering method
Sapphire Substrate on deposit cusco2Thin film；Sedimentary condition is: adopts direct current magnetron sputtering process, sputtering power is 150w, base
Bottom vacuum is 1.0 × 10-5Pa, the ar throughput being passed through is 20sccm, and underlayer temperature is 300 DEG C, and target-substrate distance is 7.5cm, sinks
The long-pending time is 30min；
(3) by the thin film having deposited in n2In made annealing treatment, annealing temperature be 900 DEG C, move back annealing time be 5h.
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