CN106238905B - A kind of laser energy automatic compensating method and equipment - Google Patents
A kind of laser energy automatic compensating method and equipment Download PDFInfo
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- CN106238905B CN106238905B CN201610412432.2A CN201610412432A CN106238905B CN 106238905 B CN106238905 B CN 106238905B CN 201610412432 A CN201610412432 A CN 201610412432A CN 106238905 B CN106238905 B CN 106238905B
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- laser energy
- eyeglass
- laser
- compensation factor
- rotation angle
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of laser energy automatic compensating method and equipment.This method comprises: (1) detects the corresponding laser energy value of laser energy received；(2) based on the laser energy value detected, judge whether laser energy value meets preset value；(3) it when laser energy value is unsatisfactory for the preset value, calculates compensation factor and judges the compensation factor whether in compensation range；(4) when the compensation factor is in the compensation range, the quantity of the eyeglass in lens combination unit and the rotation angle of each eyeglass are determined based on motion information corresponding with the compensation factor；(5) eyeglass is operated to obtain the laser energy with predetermined wavelength according to the quantity of determining eyeglass and the rotation angle of each eyeglass.This method can be monitored to laser energy and be adjusted in real time in real time laser energy, so as to obtain the laser energy of desired size, improve the stability of laser energy.
Description
Technical field
The present invention relates to laser technology field more particularly to a kind of laser energy automatic compensating method and its equipment.
Background technique
With the development of technology, display panel, as OLED or LCD display panel are widely used to various consumer electronics and produce
Product.Since bad defect can be generated usually in glass substrate in display panel manufacturing process, as open circuit occurs between route
Or the defects of short circuit, therefore, it is necessary to detect whether glass substrate has bad defect.If there is bad defect, need using sharp
Light device repairs defect.And in practical applications, it is influenced by manufacturing process, environment temperature etc., there are laser energy for laser
The problem of measuring unstable (for example, decaying).This can generate bigger influence to the repairing of product, for example, laser exports energy
When measuring big, when repairing, can get to underlying film layer, and energy is small, can energy line cut bad, that is, cause the line of circuit defect between route
Road connection fails to completely cut through.In addition, in the prior art, real-time power monitoring is not carried out to laser preparing process, from
And the glass substrate for causing repairing to fail is flowed into following process, causes the waste of manpower and material.
Summary of the invention
The purpose of the present invention is to solve the above problem, a kind of laser energy automatic compensating method and its equipment are provided,
This method can be monitored to laser energy and be adjusted in real time in real time laser energy, so as to obtain the laser energy of desired size
Amount, improves the stability of laser energy.
The one side of an exemplary embodiment of the present invention provides a kind of laser energy automatic compensating method, the side
Method includes: that (1) detects the corresponding laser energy value of laser energy received；(2) based on the laser energy value detected, judgement
Whether laser energy value meets preset value；(3) it when laser energy value is unsatisfactory for the preset value, calculates compensation factor and judges
Whether the compensation factor is in compensation range；(4) it when the compensation factor is in the compensation range, is based on and the benefit
The corresponding motion information of the factor is repaid to determine the quantity of the eyeglass in lens combination unit and the rotation angle of each eyeglass；
(5) eyeglass is operated to obtain and have predetermined wavelength according to the quantity of determining eyeglass and the rotation angle of each eyeglass
Laser energy.
Further, the compensation factor is by the energy information being pre-stored in configuration file and the laser energy detected
Magnitude and obtain.
Further, the compensation range is rotation angle according to number of lenses and each eyeglass and pre-set
Range.
Further, the step of being operated according to the rotation angle of the quantity of determining eyeglass and each eyeglass include:
It arranges the multiple eyeglass according to horizontal direction and rotates the multiple eyeglass, so that laser energy passes through the multiple eyeglass
Level projects.
Further, the step of being operated according to the rotation angle of the quantity of determining eyeglass and each eyeglass include:
It arranges the multiple eyeglass according to vertical direction and rotates the multiple eyeglass, so that laser energy passes through the multiple eyeglass
Level projects.
Further, when the compensation factor exceed the compensation range when, to send laser energy laser cell into
Row hardware adjustments or replacement laser cell.
Further, the method, further includes: judge the corresponding laser energy value of the laser energy of the predetermined wavelength
Whether the preset value is met, if not satisfied, then repeating step (3), (4) and (5).
The another aspect of an exemplary embodiment of the present invention provides a kind of laser energy and compensates equipment automatically, described
Equipment includes: the first energy detection unit, detects the corresponding laser energy value of the laser energy received；
Control unit is configured as: based on the laser energy value detected, it is default to judge whether laser energy value meets
Value；When laser energy value is unsatisfactory for the preset value, calculates compensation factor and judge the compensation factor whether in compensation model
In enclosing, when the compensation factor is in the compensation range, fortune is sent by motion information corresponding with the compensation factor
Dynamic control unit；Motion control unit is configured as determining based on received motion information multiple in lens combination unit
The rotation angle of the quantity of eyeglass and each eyeglass；Lens combination unit is configured as according to determining number of lenses and rotation
Gyration is operated to obtain the laser energy with predetermined wavelength.
Further, the first energy detection unit is additionally configured to the corresponding laser energy value hair of the laser energy that will test
It is sent to control unit.
Further, lens combination unit is additionally configured to send the first energy for the laser energy of the predetermined wavelength
Detection unit.
Further, the equipment, further includes: the second energy detection unit is configured as detecting the predetermined wavelength
Laser energy size to obtain laser energy value, and send control unit for the laser energy value.
At least one above-mentioned technical solution used in the embodiment of the present invention can reach following the utility model has the advantages that can pass through reality
When detection laser energy and based on the laser energy of detection obtain compensation factor come to laser energy carry out real-time compensation, thus
The stability for improving laser energy avoids the waste of man power and material.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes a part of the invention, this hair
Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the flow chart of the laser energy automatic compensating method of embodiment according to the present invention；
Fig. 2 is the flow chart of laser energy automatic compensating method according to another embodiment of the present invention；
Fig. 3 is the block diagram of the lens combination unit of embodiment according to the present invention；
Fig. 4 is the block diagram of lens combination unit according to another embodiment of the present invention；
Fig. 5 is that the laser energy of embodiment according to the present invention compensates the block diagram of equipment automatically.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with the specific embodiment of the invention and
Technical solution of the present invention is clearly and completely described in corresponding attached drawing.Obviously, described embodiment is only the present invention one
Section Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
Fig. 1 is the flow chart of the laser energy automatic compensating method of embodiment according to the present invention.
Referring to Fig.1, in step S110, the size of received laser energy is detected to obtain laser energy value.Wherein, described
Laser energy is exported by laser cell, and laser cell includes but is not limited to laser.Laser energy include deep ultraviolet, near ultraviolet,
The laser beam of the multi-wavelengths such as visible light, infrared.
Then in step S120, judge whether laser energy value meets preset value based on the laser energy value detected.
The preset value can be obtained and be prestored according to the characteristic (for example, type or model etc. of laser cell) of laser cell.When sharp
When light energy value is unsatisfactory for preset value, in step S130, calculate compensation factor and judge compensation factor whether in compensation range,
Wherein, (including laser cell can be debugged by the laser energy value that detects with configuration file (recipe) is pre-stored in
The multiple parameters that obtain afterwards) in energy information obtain compensation factor.Specifically, it in initial start equipment, needs pair
The substrate to be repaired carries out various debugging according to material, to obtain corresponding configuration file, laser debugging operations are to instigate
A variety of materials are cut with the laser energy that laser cell exports, then respectively obtain the cutting effect under backlight and positive light situation
Fruit simultaneously determines the multiple parameters in configuration file by cutting effect.In addition, compensation range will be retouched in greater detail below
It states, therefore descriptions thereof will be omitted herein.
When compensation factor is in compensation range, in step S140, based on motion information corresponding with compensation factor come really
The quantity of eyeglass in horizontal glass piece assembled unit and the rotation angle of each eyeglass.Then, in step S150, lens combination
Unit is operated according to determining number of lenses and rotation angle, so that laser energy is had by lens combination unit
The laser energy (i.e. it is desired to laser energy of size) of predetermined wavelength.
For example, when compensation factor is in compensation range and laser energy is less than normal, control unit will with compensation because
Sub corresponding motion information is sent to motion control unit, and motion information determines eyeglass to motion control unit based on the received
The angle of quantity and each eyeglass filters out longer wavelengths of laser beam to obtain lesser wavelength, to guarantee laser
Energy stabilization.In another example when laser energy is bigger than normal, motion information determines the number of eyeglass to motion control unit based on the received
Accordingly and the angle of each eyeglass, the lesser laser beam of wavelength is filtered out to obtain longer wavelength, to guarantee that energy is steady
It is fixed.
Compensation range refers to can be to the range that laser energy compensates.It can be according to the eyeglass number in lens combination unit
Compensation range is stored in advance in a control unit to obtain compensation range for the combination of amount and lens angle.
Fig. 2 is the flow chart of laser energy automatic compensating method according to another embodiment of the present invention.
Step S110 to S150 in Fig. 1 respectively corresponds the step S201 to S205 in Fig. 2, therefore, for clear and letter
For the sake of bright, no longer duplicate content will be described herein.
As shown in Fig. 2, step S207 is continued to when the size of step S202 laser energy meets preset value,
Glass substrate is handled using laser energy.
In addition, referring to Fig. 2, step S206 is continued in the case where having passed through step S205 acquisition laser energy,
The size of laser energy is detected, i.e. the corresponding laser energy value of detection laser energy, and it is pre- to judge whether laser energy value meets
If value, is such as unsatisfactory for, then continues step S203 to S205, until laser energy value meets preset value.
In addition, if judging that compensation factor beyond compensation range, then goes to step 208, manually adjusts in step S203
Or replacement laser cell, laser energy is then exported by the laser cell after manually adjusting or the laser cell after replacement again
Amount.
Fig. 3 is the block diagram of the lens combination unit of embodiment according to the present invention.
Referring to Fig. 3, in the case where determining that compensation factor is in compensation range, control unit will be corresponding with compensation factor
Motion information is sent to motion control unit, and motion control unit determines that number of lenses is two according to motion information, and two
A eyeglass vertically arranges, and rotates the two eyeglasses, so that laser energy is projected by horizontal after lens combination unit.
Fig. 4 is the block diagram of lens combination unit according to another embodiment of the present invention.
Referring to Fig. 4, in the case where determining that compensation factor is in compensation range, control unit will be corresponding with compensation factor
Motion information is sent to motion control unit, and motion control unit determines that number of lenses is three according to motion information, and three
A eyeglass arranges in the horizontal direction, and rotates these three eyeglasses, so that laser energy is projected by horizontal after lens combination unit.
Fig. 5 is that the laser energy of embodiment according to the present invention compensates the block diagram of equipment 500 automatically.
Referring to Fig. 5, it includes the first energy detection unit 510, control unit 520, fortune that laser energy compensates equipment 500 automatically
Dynamic control unit 530 and lens combination unit 540.
Specifically, laser cell 400 exports laser energy.Wherein, laser energy includes the laser of a variety of different wave lengths
Beam.The size for the laser energy that the detection of first energy detection unit 510 receives, the i.e. corresponding laser energy of detection laser energy
Value, and laser energy value is sent to control unit 520.
Control unit 520 judges whether laser energy value meets preset value based on the laser energy value detected, when sharp
When light energy value is unsatisfactory for the preset value, calculates compensation factor and judge that compensation factor whether in compensation range, works as compensation
When the factor is in compensation range, motion control unit 530 is sent by motion information corresponding with compensation factor.
Motion control unit 530 determines the quantity of the eyeglass in lens combination unit 440 based on received motion information
And the rotation angle of each eyeglass.
Lens combination unit 540 is operated according to determining number of lenses and rotation angle, so that laser energy passes through
Lens combination unit 540 obtains the laser energy with predetermined wavelength.
Although laser energy compensates equipment 500 automatically may also include the inspection of the second energy in addition, not showing that in attached drawing
Unit is surveyed, energy detection unit detection is received through the laser energy after lens combination unit 540, and by laser energy pair
The laser energy value answered is sent to control unit 520.Optionally, lens combination unit 540 can also send laser energy to
One energy detection unit 510, control unit 520 are corresponding sharp based on the laser energy that the first energy detection unit 510 detects
Light energy value judges whether laser energy value meets preset value, when laser energy value is unsatisfactory for the preset value, repeat into
Row subsequent operation is until laser energy value meets preset value.
The embodiment of the present invention can by real-time detection laser energy and the laser energy based on detection obtain compensation because
Son to avoid the waste of man power and material to improve the stability of laser energy to laser energy progress real-time compensation.
Above-described specific example has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Illustrate, it should be understood that the above is only a specific embodiment of the present invention, be not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (10)
1. a kind of laser energy automatic compensating method, comprising:
(1) the corresponding laser energy value of laser energy received is detected；
(2) based on the laser energy value detected, judge whether laser energy value meets preset value；
(3) it when laser energy value is unsatisfactory for the preset value, calculates compensation factor and judges whether the compensation factor is being mended
It repays in range, the compensation factor is obtained by the energy information being pre-stored in configuration file and the laser energy value detected
?；
(4) when the compensation factor is in the compensation range, based on motion information corresponding with the compensation factor come really
The quantity of eyeglass in horizontal glass piece assembled unit and the rotation angle of each eyeglass；
(5) eyeglass is operated to obtain and have pre- standing wave according to the quantity of determining eyeglass and the rotation angle of each eyeglass
Long laser energy；
The quantity that the eyeglass in lens combination unit is determined based on motion information corresponding with the compensation factor and
The rotation angle of each eyeglass, comprising:
When laser energy is less than normal, the quantity of the eyeglass in lens combination unit and the rotation angle of each eyeglass, mistake are determined
Longer wavelengths of laser beam is filtered to obtain lesser wavelength；When laser energy is bigger than normal, determine in lens combination unit
The rotation angle of the quantity of eyeglass and each eyeglass filters out the lesser laser beam of wavelength to obtain longer wavelength.
2. the method as described in claim 1, which is characterized in that the compensation range is according to number of lenses and each eyeglass
Rotation angle and pre-set range.
3. the method as described in claim 1, which is characterized in that according to the quantity of determining eyeglass and the rotation angle of each eyeglass
The step of degree is operated includes: to arrange each eyeglass according to horizontal direction and rotate each eyeglass, so that swashing
Light energy is projected by each eyeglass level.
4. the method as described in claim 1, which is characterized in that according to the quantity of determining eyeglass and the rotation angle of each eyeglass
The step of degree is operated includes: to arrange each eyeglass according to vertical direction and rotate each eyeglass, so that swashing
Light energy is projected by each eyeglass level.
5. the method as described in claim 1, which is characterized in that when the compensation factor exceeds the compensation range, to hair
The laser cell of laser energy is sent to carry out hardware adjustments or replacement laser cell.
6. the method as described in claim 1, further includes: judge the corresponding laser energy value of the laser energy of the predetermined wavelength
Whether the preset value is met, if not satisfied, then repeating step (3), (4) and (5).
7. a kind of laser energy compensates equipment automatically, comprising:
First energy detection unit detects the corresponding laser energy value of the laser energy received；
Control unit is configured as: based on the laser energy value detected, judging whether laser energy value meets preset value；When
When laser energy value is unsatisfactory for the preset value, calculate compensation factor and judge the compensation factor whether in compensation range,
When the compensation factor is in the compensation range, motion control is sent by motion information corresponding with the compensation factor
Unit；Wherein, the compensation factor is by the energy information that is pre-stored in configuration file and and the laser energy value detected
It obtains；
Motion control unit, be configured as the quantity that the eyeglass in lens combination unit is determined based on received motion information with
And the rotation angle of each eyeglass, comprising: when laser energy is less than normal, determine the eyeglass in lens combination unit quantity and
The rotation angle of each eyeglass filters out longer wavelengths of laser beam to obtain lesser wavelength；When laser energy is bigger than normal,
It determines the quantity of the eyeglass in lens combination unit and the rotation angle of each eyeglass, filters out the lesser laser beam of wavelength
To obtain longer wavelength；
Lens combination unit is configured as being operated according to determining number of lenses and rotation angle to obtain and have pre- standing wave
Long laser energy.
8. equipment as claimed in claim 7, it is characterised in that: the first energy detection unit is additionally configured to the laser that will test
The corresponding laser energy value of energy is sent to control unit.
9. equipment as claimed in claim 7, it is characterised in that: lens combination unit is additionally configured to the predetermined wavelength
Laser energy is sent to the first energy detection unit.
10. equipment as claimed in claim 7, which is characterized in that further include: the second energy detection unit is configured as detecting
The size of the laser energy of the predetermined wavelength sends control list for the laser energy value to obtain laser energy value
Member.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610412432.2A CN106238905B (en) | 2016-06-14 | 2016-06-14 | A kind of laser energy automatic compensating method and equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610412432.2A CN106238905B (en) | 2016-06-14 | 2016-06-14 | A kind of laser energy automatic compensating method and equipment |
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| CN106238905A CN106238905A (en) | 2016-12-21 |
| CN106238905B true CN106238905B (en) | 2019-06-21 |
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| CN110023027B (en) * | 2017-01-17 | 2021-05-11 | 极光先进雷射株式会社 | Laser processing system and laser processing method |
| CN112828451B (en) * | 2020-12-31 | 2023-09-22 | 华灿光电（浙江）有限公司 | Laser cutting method and device for light-emitting diode chip |
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| CN1069600A (en) * | 1991-08-12 | 1993-03-03 | 凤凰激光***有限公司 | Control outside the dynamic chamber of laser energy output |
| CN105448681A (en) * | 2014-07-04 | 2016-03-30 | 上海微电子装备有限公司 | Laser annealing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7139294B2 (en) * | 2004-05-14 | 2006-11-21 | Electro Scientific Industries, Inc. | Multi-output harmonic laser and methods employing same |
| US7343218B2 (en) * | 2006-05-09 | 2008-03-11 | Branson Ultrasonics Corporation | Automatic part feedback compensation for laser plastics welding |
| CN100493814C (en) * | 2007-10-10 | 2009-06-03 | 厦门大学 | Multifunctional laser processing tool bit with measuring apparatus |
| CN104903044B (en) * | 2013-01-11 | 2018-01-12 | 伊雷克托科学工业股份有限公司 | Laser pulse energy amount control system and method |
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2016
- 2016-06-14 CN CN201610412432.2A patent/CN106238905B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1069600A (en) * | 1991-08-12 | 1993-03-03 | 凤凰激光***有限公司 | Control outside the dynamic chamber of laser energy output |
| CN105448681A (en) * | 2014-07-04 | 2016-03-30 | 上海微电子装备有限公司 | Laser annealing device |
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