CN106238905A - A kind of laser energy automatic compensating method and equipment - Google Patents
A kind of laser energy automatic compensating method and equipment Download PDFInfo
- Publication number
- CN106238905A CN106238905A CN201610412432.2A CN201610412432A CN106238905A CN 106238905 A CN106238905 A CN 106238905A CN 201610412432 A CN201610412432 A CN 201610412432A CN 106238905 A CN106238905 A CN 106238905A
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- China
- Prior art keywords
- laser energy
- eyeglass
- laser
- compensating factor
- value
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of laser energy automatic compensating method and equipment.The method includes: (1) detects the laser energy value that the laser energy received is corresponding；(2) based on the laser energy value detected, it is judged that whether laser energy value meets preset value；(3) when laser energy value is unsatisfactory for described preset value, calculate compensating factor and judge that described compensating factor is whether in compensation range；(4) when described compensating factor is in described compensation range, quantity and the anglec of rotation of each eyeglass of eyeglass in lens combination unit is determined based on movable information corresponding with described compensating factor；(5) operate to obtain the laser energy with predetermined wavelength to eyeglass according to the quantity of the eyeglass determined and the anglec of rotation of each eyeglass.Laser energy can be monitored and adjust laser energy in real time by the method in real time such that it is able to obtains the laser energy of desired size, improves the stability of laser energy.
Description
Technical field
The present invention relates to laser technology field, particularly relate to a kind of laser energy automatic compensating method and equipment thereof.
Background technology
Along with the development of technology, display floater, produce as OLED or LCD display panel are widely used to various consumer electronics
Product.Owing to, in display floater manufacture process, bad defect generally can be produced in glass substrate, as there is open circuit between circuit
Or the defect such as short circuit, accordingly, it would be desirable to whether detection glass substrate has bad defect.If there is bad defect, need to use and swash
Defect is repaired by light device.And in actual applications, affected by manufacturing process, ambient temperature etc., there is laser energy in laser instrument
The problem of amount unstable (such as, decay).This can produce ratio large effect, such as, laser instrument output energy to the repairing of product
When measuring big, can get to underlying film layer during repairing, energy is little, can cut bad by energy line, i.e. cause the line of circuit defect between circuit
Road connection fails to completely cut through.Additionally, in the prior art, laser preparing process is not carried out real-time power monitoring, from
And cause repairing failed glass substrate and be flowed in following process, cause the waste of manpower and material.
Summary of the invention
The invention aims to solve the problems referred to above, it is provided that a kind of laser energy automatic compensating method and equipment thereof,
Laser energy can be monitored and adjust laser energy in real time by the method in real time such that it is able to obtain the laser energy of desired size
Amount, improves the stability of laser energy.
The one side of the exemplary embodiment according to the present invention, it is provided that a kind of laser energy automatic compensating method, described side
Method includes: (1) detects the laser energy value that the laser energy received is corresponding；(2) based on the laser energy value detected, it is judged that
Whether laser energy value meets preset value；(3) when laser energy value is unsatisfactory for described preset value, calculate compensating factor and judge
Whether described compensating factor is in compensation range；(4) when described compensating factor is in described compensation range, based on described benefit
Repay the anglec of rotation of the factor corresponding movable information quantity and each eyeglass to determine the eyeglass in lens combination unit；
(5) according to the quantity of the eyeglass determined and the anglec of rotation of each eyeglass eyeglass operated, to obtain, there is predetermined wavelength
Laser energy.
Further, described compensating factor is the energy information by being pre-stored in configuration file and the laser energy detected
Value and obtain.
Further, described compensation range is to pre-set according to number of lenses and the anglec of rotation of each eyeglass
Scope.
Further, the step carrying out operating according to the quantity of the eyeglass determined and the anglec of rotation of each eyeglass includes:
Make the plurality of eyeglass arrange according to horizontal direction and rotate the plurality of eyeglass so that laser energy passes through the plurality of eyeglass
Level penetrates.
Further, the step carrying out operating according to the quantity of the eyeglass determined and the anglec of rotation of each eyeglass includes:
Make the plurality of eyeglass arrange according to vertical direction and rotate the plurality of eyeglass so that laser energy passes through the plurality of eyeglass
Level penetrates.
Further, when described compensating factor is beyond described compensation range, the laser cell sending laser energy is entered
Row hardware adjustments or replacing laser cell.
Further, described method, also include: judge the laser energy value that the laser energy of described predetermined wavelength is corresponding
Whether meeting described preset value, if being unsatisfactory for, then repeating step (3), (4) and (5).
The another aspect of the exemplary embodiment according to the present invention, it is provided that a kind of laser energy compensates equipment automatically, described
Equipment includes: the first energy detection unit, detects the laser energy value that the laser energy received is corresponding；
Control unit, is configured to: based on the laser energy value detected, it is judged that whether laser energy value meets is preset
Value；When laser energy value is unsatisfactory for described preset value, calculates compensating factor and judge whether described compensating factor is compensating model
In enclosing, when described compensating factor is in described compensation range, movable information corresponding with described compensating factor is sent to fortune
Dynamic control unit；Motion control unit, be configured to based on the movable information received determine in lens combination unit multiple
The quantity of eyeglass and the anglec of rotation of each eyeglass；Lens combination unit, is configured to according to the number of lenses determined and rotation
Gyration carries out operating to obtain the laser energy with predetermined wavelength.
Further, the first energy detection unit is additionally configured to send out laser energy value corresponding for the laser energy of detection
Deliver to control unit.
Further, lens combination unit is additionally configured to the laser energy of described predetermined wavelength is sent to the first energy
Detector unit.
Further, described equipment, also include: the second energy detection unit, be configured to detect described predetermined wavelength
The size of laser energy to obtain laser energy value, and described laser energy value is sent to control unit.
At least one technical scheme above-mentioned that the embodiment of the present invention uses can reach following beneficial effect: can be by real
Time detection laser energy and based on detection laser energy obtain compensating factor laser energy is carried out real-Time Compensation, thus
Improve the stability of laser energy, it is to avoid the waste of man power and material.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the present invention, this
Bright schematic description and description is used for explaining the present invention, is not intended that inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the flow chart of laser energy automatic compensating method according to an embodiment of the invention；
Fig. 2 is the flow chart of laser energy automatic compensating method according to another embodiment of the present invention；
Fig. 3 is the block diagram of lens combination unit according to an embodiment of the invention；
Fig. 4 is the block diagram of lens combination unit according to another embodiment of the present invention；
Fig. 5 is the block diagram that laser energy compensates equipment automatically according to an embodiment of the invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with the specific embodiment of the invention and
Technical solution of the present invention is clearly and completely described by corresponding accompanying drawing.Obviously, described embodiment is only the present invention one
Section Example rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not doing
Go out the every other embodiment obtained under creative work premise, broadly fall into the scope of protection of the invention.
Fig. 1 is the flow chart of laser energy automatic compensating method according to an embodiment of the invention.
With reference to Fig. 1, in step S110, the size of the laser energy that detection receives is to obtain laser energy value.Wherein, described
Laser energy is exported by laser cell, and laser cell includes but not limited to laser instrument.Laser energy include deep ultraviolet, near ultraviolet,
Visible ray, the laser beam of the multi-wavelength such as infrared.
Subsequently in step S120, judge whether laser energy value meets preset value based on the laser energy value detected.
This preset value can obtain according to the characteristic of laser cell (such as, the type of laser cell or model etc.) and be prestored.When swashing
When light energy value is unsatisfactory for preset value, in step S130, calculate compensating factor and judge compensating factor whether in compensation range,
Wherein, (can include laser cell is debugged with being pre-stored in configuration file (recipe) by the laser energy value detected
Multiple parameters of rear acquisition) in energy information obtain compensating factor.Specifically, when initial start equipment, it is right to need
Substrate to be repaired carries out various debugging according to material, thus obtains corresponding configuration file, and laser debugging operations is to instigate
Cut various material with the laser energy of laser cell output, then respectively obtain the cutting effect in the case of backlight and positive light
Fruit also determines the multiple parameters in configuration file by cutting effect.Additionally, compensation range will be retouched in greater detail below
State, therefore will omit descriptions thereof at this.
When compensating factor is in compensation range, in step S140, come really based on movable information corresponding with compensating factor
The quantity of the eyeglass in horizontal glass sheet assembled unit and the anglec of rotation of each eyeglass.Then, in step S150, lens combination
Unit operates according to the number of lenses determined and the anglec of rotation so that laser energy is obtained by lens combination unit to be had
The laser energy (i.e. it is desired to laser energy of size) of predetermined wavelength.
For example, when compensating factor is in compensation range and when laser energy is less than normal, control unit will with compensate because of
The corresponding movable information of son is sent to motion control unit, and motion control unit determines eyeglass according to the movable information received
Quantity and the angle of each eyeglass, filter out longer wavelengths of laser beam to obtain less wavelength, thus ensure laser
Energy stabilization.The most such as, when laser energy is bigger than normal, motion control unit determines the number of eyeglass according to the movable information received
According to this and the angle of each eyeglass, filter out the less laser beam of wavelength to obtain longer wavelength, thus ensure that energy is steady
Fixed.
Compensation range refers to the scope that can compensate laser energy.Can be according to the eyeglass number in lens combination unit
Amount obtains compensation range with the combination of lens angle, and is prestored in a control unit by compensation range.
Fig. 2 is the flow chart of laser energy automatic compensating method according to another embodiment of the present invention.
Step S201 to S205 in step S110 to S150 in Fig. 1 corresponding diagram 2 respectively, therefore, in order to clear and simple
See from tomorrow, will no longer the content repeated be described at this.
As in figure 2 it is shown, when meeting preset value in the size of step S202 laser energy, continue to step S207,
Laser energy is used to process glass substrate.
Additionally, in the case of obtaining laser energy by step S205, with reference to Fig. 2, continue to step S206,
The size of detection laser energy, the laser energy value that i.e. detection laser energy is corresponding, and it is pre-to judge whether laser energy value meets
If value, as being unsatisfactory for, then proceed step S203 to S205, till laser energy value meets preset value.
If additionally, judge that compensating factor exceeds compensation range in step S203, then going to step 208, manually regulating
Or replacing laser cell, the most manually laser cell after regulation or the laser cell Output of laser energy again after replacing
Amount.
Fig. 3 is the block diagram of lens combination unit according to an embodiment of the invention.
With reference to Fig. 3, in the case of determining that compensating factor is in compensation range, control unit will be corresponding with compensating factor
Movable information is sent to motion control unit, according to movable information, motion control unit determines that number of lenses is two, and two
Individual eyeglass vertically arranges, and rotates the two eyeglass so that laser energy is penetrated by level after lens combination unit.
Fig. 4 is the block diagram of lens combination unit according to another embodiment of the present invention.
With reference to Fig. 4, in the case of determining that compensating factor is in compensation range, control unit will be corresponding with compensating factor
Movable information is sent to motion control unit, according to movable information, motion control unit determines that number of lenses is three, and three
Individual eyeglass arranges in the horizontal direction, and rotates these three eyeglass so that laser energy is penetrated by level after lens combination unit.
Fig. 5 is the block diagram that laser energy compensates equipment 500 automatically according to an embodiment of the invention.
With reference to Fig. 5, laser energy automatically compensates equipment 500 and includes the first energy detection unit 510, control unit 520, fortune
Dynamic control unit 530 and lens combination unit 540.
Specifically, laser cell 400 Output of laser energy.Wherein, laser energy includes the laser of multiple different wave length
Bundle.The size of the laser energy that the first energy detection unit 510 detection receives, the laser energy that i.e. detection laser energy is corresponding
Value, and laser energy value is sent to control unit 520.
Based on the laser energy value detected, control unit 520 judges whether laser energy value meets preset value, when swashing
When light energy value is unsatisfactory for described preset value, calculates compensating factor and judge that compensating factor, whether in compensation range, works as compensation
When the factor is in compensation range, movable information corresponding with compensating factor is sent to motion control unit 530.
Motion control unit 530 determines the quantity of the eyeglass in lens combination unit 440 based on the movable information received
And the anglec of rotation of each eyeglass.
Lens combination unit 540 operates according to the number of lenses determined and the anglec of rotation so that laser energy passes through
Lens combination unit 540 obtains the laser energy with predetermined wavelength.
Although additionally, do not show that in accompanying drawing, but laser energy automatically compensates equipment 500 and may also include the second energy inspection
Surveying unit, this energy detection unit detects the laser energy after receiving by lens combination unit 540, and by laser energy pair
The laser energy value answered is sent to control unit 520.Alternatively, laser energy also can be sent to by lens combination unit 540
One energy detection unit 510, corresponding the swashing of laser energy that control unit 520 detects based on the first energy detection unit 510
Light energy value judges whether laser energy value meets preset value, when laser energy value is unsatisfactory for described preset value, repeat into
Row subsequent operation is until laser energy value meets preset value.
The compensation that the embodiment of the present invention can be obtained by real time detection laser energy laser energy based on detection because of
Son carries out real-Time Compensation to laser energy, thus improve the stability of laser energy, it is to avoid the waste of man power and material.
Above-described instantiation, has been carried out the purpose of the present invention, technical scheme and beneficial effect the most in detail
Illustrate, be it should be understood that the specific embodiment that the foregoing is only the present invention, be not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. done, should be included in the protection of the present invention
Within the scope of.
Claims (11)
1. a laser energy automatic compensating method, including:
(1) the laser energy value that the laser energy received is corresponding is detected；
(2) based on the laser energy value detected, it is judged that whether laser energy value meets preset value；
(3) when laser energy value is unsatisfactory for described preset value, calculate compensating factor and judge whether described compensating factor is being mended
In the range of repaying；
(4) when described compensating factor is in described compensation range, come really based on movable information corresponding with described compensating factor
The quantity of the eyeglass in horizontal glass sheet assembled unit and the anglec of rotation of each eyeglass；
(5) according to the quantity of the eyeglass determined and the anglec of rotation of each eyeglass eyeglass operated, to obtain, there is pre-standing wave
Long laser energy.
2. the method for claim 1, it is characterised in that described compensating factor is the energy by being pre-stored in configuration file
Amount information and the laser energy value that detects and obtain.
3. the method for claim 1, it is characterised in that described compensation range is according to number of lenses and each eyeglass
The anglec of rotation and the scope that pre-sets.
4. the method for claim 1, it is characterised in that according to quantity and the anglec of rotation of each eyeglass of the eyeglass determined
The step that degree carries out operating includes: makes the plurality of eyeglass arrange according to horizontal direction and rotates the plurality of eyeglass so that swash
Light energy is penetrated by the plurality of eyeglass level.
5. the method for claim 1, it is characterised in that according to quantity and the anglec of rotation of each eyeglass of the eyeglass determined
The step that degree carries out operating includes: makes the plurality of eyeglass arrange according to vertical direction and rotates the plurality of eyeglass so that swash
Light energy is penetrated by the plurality of eyeglass level.
6. the method for claim 1, it is characterised in that when described compensating factor is beyond described compensation range, to sending out
The laser cell sending laser energy carries out hardware adjustments or changes laser cell.
7. the method for claim 1, also includes: judge the laser energy value that the laser energy of described predetermined wavelength is corresponding
Whether meeting described preset value, if being unsatisfactory for, then repeating step (3), (4) and (5).
8. laser energy compensates an equipment automatically, including:
First energy detection unit, detects the laser energy value that the laser energy received is corresponding；
Control unit, is configured to: based on the laser energy value detected, it is judged that whether laser energy value meets preset value；When
When laser energy value is unsatisfactory for described preset value, calculate compensating factor and judge described compensating factor whether in compensation range,
When described compensating factor is in described compensation range, movable information corresponding with described compensating factor is sent to motor control
Unit；
Motion control unit, is configured to determine the number of the multiple eyeglasses in lens combination unit based on the movable information received
Amount and the anglec of rotation of each eyeglass；
Lens combination unit, is configured to carry out operating according to the number of lenses determined and the anglec of rotation have pre-standing wave to obtain
Long laser energy.
9. equipment as claimed in claim 8, it is characterised in that: the first energy detection unit is additionally configured to the laser of detection
The laser energy value that energy is corresponding is sent to control unit.
10. equipment as claimed in claim 8, it is characterised in that: lens combination unit is additionally configured to described predetermined wavelength
Laser energy be sent to the first energy detection unit.
11. equipment as claimed in claim 8, it is characterised in that also include: the second energy detection unit, are configured to detection
The size of the laser energy of described predetermined wavelength is to obtain laser energy value, and is sent to described laser energy value control list
Unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610412432.2A CN106238905B (en) | 2016-06-14 | 2016-06-14 | A kind of laser energy automatic compensating method and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610412432.2A CN106238905B (en) | 2016-06-14 | 2016-06-14 | A kind of laser energy automatic compensating method and equipment |
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| CN106238905A true CN106238905A (en) | 2016-12-21 |
| CN106238905B CN106238905B (en) | 2019-06-21 |
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| CN201610412432.2A Active CN106238905B (en) | 2016-06-14 | 2016-06-14 | A kind of laser energy automatic compensating method and equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110023027A (en) * | 2017-01-17 | 2019-07-16 | 极光先进雷射株式会社 | Laser-processing system and laser processing |
| CN112828451A (en) * | 2020-12-31 | 2021-05-25 | 华灿光电（浙江）有限公司 | Laser cutting method and device for light-emitting diode chip |
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| Publication number | Publication date |
|---|---|
| CN106238905B (en) | 2019-06-21 |
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