CN105665919A - On-line automatic substrate defect repairing system and method - Google Patents
On-line automatic substrate defect repairing system and method Download PDFInfo
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- CN105665919A CN105665919A CN201410663574.7A CN201410663574A CN105665919A CN 105665919 A CN105665919 A CN 105665919A CN 201410663574 A CN201410663574 A CN 201410663574A CN 105665919 A CN105665919 A CN 105665919A
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Abstract
The invention provides an on-line automatic substrate defect repairing system and method. The system comprises a laser unit, an optical unit, a monitoring device and a feedback device. Through the laser unit, the optical unit and the monitoring device, defects of a substrate can be scanned accurately, and high-accuracy scanning is realized; meanwhile, the feedback device is arranged and used for receiving scanning information, transmitted by the monitoring device, of the defects of the substrate and feeding back a scanning result to the laser unit through analysis, so that the defects are removed or repaired automatically on line by adjusting the wavelength and energy of lasers; the repair time is shortened, manpower resource waste caused by manual repair is avoided, the defect repair cost is lowered, and the repairing efficiency is improved.
Description
Technical field
The present invention relates to flat display field, be specifically related to system and the method thereof of a kind of on-line automatic repairing substrate defect.
Background technology
Flat-panel screens technology has tended to ripe, but the element of display floater, such as array base palte, can produce some defects in the fabrication process unavoidably. Such as, the scanning line on array base palte and data wire because of its length very long, it is easy to there is the situation of broken string. When scanning line and data wire and broken string occurring, can cause a part pixel cannot action (line defect), therefore must try to repair break lines; If additionally, rely on, to improve Technology to realize zero-fault rate be extremely difficult, and therefore, the defect repair techniques of substrate just becomes fairly heavy and wants.
In the prior art, the defect repair of substrate generally adopts the modes such as laser welding (laserwelding) and cut (lasercutting) to carry out. Initially with automatic optics inspection (AutomaticOpticInspection, AOI) substrate is detected by equipment, find out the Position Approximate of base on-board circuitry defect, the use of matching camera and capture screen again, by the defective locations manually looking for pre-reparation, it is judged that the kind of defect is also repaired. But, AOI detection can only detect the Position Approximate of defect, cannot accurately find out definite defect coordinate, staff is needed manually to find, circuit with a 1000mm length, human eye detection is used at least to need within more than 5 minutes, just can complete (for 5 μm of pixel resolutions), speed labor intensive again slowly, and tired the going down with vision of the glasses that easily cause testing staff. Further, artificial searching defect also carries out repairing the waste that will also result in human resources, improves the cost repaired.
Therefore, a kind of high accuracy scanning of offer, the method for on-line Full repairing substrate defect are needed badly.
Summary of the invention
It is an object of the invention to provide the system of a kind of on-line automatic repairing substrate defect and method thereof, it is possible to achieve high accuracy scanning, it is determined that the particular location of defect, and realize on-line automatic reparation.
For achieving the above object, the present invention provides the system of a kind of on-line automatic repairing substrate defect: include laser cell, optical unit, supervising device and feedback device; Described laser cell is used for launching laser; Described optical unit is used for reflecting described laser to substrate, thus scanning the defect information of described substrate; Described supervising device is for receiving the scanning information reflecting and passing through described optical unit from described substrate, and transmits described scanning information to described feedback device; Described feedback device is used for analyzing described scanning information and draws scanning result and scanning result feeds back to described laser cell; And described laser cell exports the laser of different-energy and wavelength for the difference according to scanning result and reflexes to described substrate by described optical unit, so that described defect is removed or repairs.
Optionally, described laser cell includes: lasing light emitter, the first attenuator and frequency division module;Described lasing light emitter is used for launching laser, and described first attenuator is for changing the energy of laser.
Optionally, described laser cell also includes frequency division module, and described frequency division module includes frequency divider and the second attenuator, and described frequency divider is for controlling the wavelength of laser, and described second attenuator is for the energy of the laser after control break wavelength; Described frequency division module can integral-rotation.
Optionally, described optical unit includes half-reflecting half mirror and protective unit, in described protective unit light path between described half-reflecting half mirror and described supervising device.
Optionally, described supervising device includes lens and imageing sensor, and described lens are for amplifying or/and filter scan information, and scanning information is carried out signal conversion by described imageing sensor, and by optical signal, described scanning information is converted to the signal of telecommunication.
Accordingly, the present invention also provides for a kind of method that system adopting above-mentioned on-line automatic repairing substrate defect carries out on-line automatic repairing substrate defect, including:
Laser cell launches laser;
Optical unit reflects described laser to substrate to scan the defect information of described substrate;
Supervising device receives the scanning information reflecting and passing through described optical unit from described substrate, and by described scanning information transmission to feedback device;
Feedback device is analyzed described scanning information and is drawn scanning result and scanning result feeds back to described laser cell; And
Laser cell exports the laser of different-energy and wavelength according to the difference of scanning result and reflexes to described substrate by described optical unit, so that described defect is removed or to be repaired.
Optionally, during the defect information of substrate described in described laser scanning, rotating described frequency division module to closed mode, described laser is either directly through described frequency division module; When described defect is removed or repairs by described laser, rotating described frequency division module to opening, described frequency division module changes wavelength and the energy of laser.
Optionally, when the Laser Transmission of described laser cell output is to described optical unit, described protective unit is closed, and described laser is reflected onto described substrate; When the scanning information transmission of described substrate reflection is to described optical unit, described protective unit is opened, and described scanning information passes through described optical unit; Described laser is reflexed to by described optical unit before described substrate, through a rotating lens, to regulate the hot spot of laser.
Optionally, described feedback device is according to the position of described scanning information analyzing defect, kind and size, the wavelength of the laser thus judged whether to and energy, and this analysis result is fed back to described laser cell; The kind of described defect includes foreign body residual and/or circuit disappearance.
Optionally, before on-line automatic repairing substrate defect, wavelength and the energy of laser cell laser when scanning defect and repairing defect is manually set.
Compared with prior art, the method for on-line automatic repairing substrate defect provided by the invention, by the use of laser cell, optical unit and supervising device, it is possible to the defect of accurate scan substrate, it is achieved that high accuracy scanning; Simultaneously, feedback device is set, feedback device receives the scanning information of the base board defect of supervising device transmission, by analyzing, scanning result is fed back to laser cell, thus regulating wavelength and the energy of laser, on-line automatic defect being removed or repairs, save repair time, avoid the waste manually repairing the human resources caused, reduce defect repair cost, improve remediation efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of the system of on-line automatic repairing substrate defect provided by the present invention.
Fig. 2 is the flow chart of the method for on-line automatic repairing substrate defect provided by the present invention.
Detailed description of the invention
For making present disclosure clearly understandable, below in conjunction with Figure of description, present disclosure is described further. Certainly the invention is not limited in this specific embodiment, the general replacement known by those skilled in the art is also covered by protection scope of the present invention.
Secondly, the present invention utilizes schematic diagram to carry out detailed statement, and when describing present example in detail, for the ease of illustrating, schematic diagram, should to this restriction as the present invention not according to general ratio partial enlargement.
The core concept of the present invention is: received the scanning information of base board defect of supervising device transmission by feedback device, by analyzing, Scan Architecture is fed back to laser cell, thus controlling wavelength and the energy of laser, on-line automatic defect being removed or repairs.
Refer to Fig. 1, the structural representation of the system of its on-line automatic repairing substrate defect provided for one embodiment of the invention. As it is shown in figure 1, the system of described on-line automatic repairing substrate defect, including laser cell 10, optical unit 20, supervising device 30 and feedback device 40; Described laser cell 10 is used for launching laser; Described optical unit 20 is used for reflecting described laser to substrate 50, thus scanning the defect of described substrate 50; Described supervising device 30 is for receiving the scanning information of described optical unit 20, and transmits described scanning information to described feedback device 40; Described feedback device 40 is used for analyzing described scanning information and show that scanning result is fed back to described laser cell 10 by scanning result; Described laser cell 10 exports the laser of different-energy and wavelength for the difference according to scanning result and reflexes to described substrate 50 by described optical unit 20, and described defect is removed or repaired.
In the present embodiment, described laser cell 10 includes lasing light emitter the 11, first attenuator 12 and frequency division module 13; Described lasing light emitter 11 is used for launching laser; Described first attenuator 12 is for controlling the energy size of laser; Described frequency division module 13 includes frequency divider 131 and the second attenuator 132, described frequency divider 131 is for controlling the wavelength of laser, described second attenuator 132 is for the energy of the laser after control break wavelength, described frequency division module can integral-rotation, determine the closed mode of described frequency division module 13 and opening by rotating. When laser is for the defect of scanning substrate 50, rotate described frequency division module 13 to closed mode, passing through after described first attenuator 12 regulates energy either directly through described frequency division module 13 from the laser of described lasing light emitter 11 output, laser will not be had any impact by described frequency division module 13; When laser is used for repairing defect, rotating described frequency division module 13 to opening, the difference according to defect, it is desirable to provide the laser of different wave length and energy, now described frequency division module 13 is for changing wavelength and the energy of laser, with the defect that applicable reparation is different.
Described optical unit 20 includes half-reflecting half mirror 21 and protective unit 22, it will be seen from figure 1 that in the light path that described protective unit 22 is between described half-reflecting half mirror 21 and described supervising device 30. And described protective unit 22 is connected with described half-reflecting half mirror 21;When the Laser Transmission of described laser cell 10 output is to described optical unit 20, described protective unit 22 is closed, laser is reflexed to described substrate 50 by half-reflecting half mirror 21, when the scanning information transmission of described substrate 50 reflection is to described optical unit 20, described protective unit 22 is opened, and scanning information is either directly through half-reflecting half mirror 21 transmission to described supervising device 30.
Before the laser of described laser cell 10 output is reflexed to described substrate 50 by optical unit 20, through a rotating lens 60, namely the light path between described optical unit 20 and described substrate 50 is additionally provided with rotating lens 60, for regulating the hot spot of laser.
Described supervising device 30 includes lens 31 and imageing sensor 32, described lens 31 for amplifying or/and filter scan information, described scanning information is carried out signal conversion by described imageing sensor 32, by optical signal, described scanning information is converted to the signal of telecommunication, and transmits to described feedback device 40; Described feedback device 40 is according to the position of described scanning information analyzing defect, kind and size, the wavelength of the laser thus judged whether to and energy, and this analysis result is fed back to described laser cell. In the present embodiment, the kind of described defect includes foreign body residual or/and circuit lacks, as shown in Figure 1, described defect is the foreign body residual on substrate, it should be noted that, in other embodiments, it is also possible to be the other defect easily produced on the art substrate, be suitable for laser and repair.
It is understandable that, before on-line automatic repairing substrate defect, wavelength and the energy of laser cell laser when scanning defect and repairing defect can also be manually set, avoid the need for using the laser repairing defect of fixing wavelength and energy to arrange, such as: wavelength and the energy size of different time sections laser are set by program (recipe), the laser of first time period is used for scanning substrate, the laser of the second time period is used for repairing defect, the wavelength of the laser of described second time period and energy size to be needed to determine according to substantial amounts of test data.
In the present embodiment, described substrate is glass substrate, form the defect (foreign body residual, circuit disappearance etc.) formed in the process of circuit on the glass substrate, the method for on-line automatic repairing substrate defect of the present invention can be adopted to carry out the reparation of defect; In other embodiments, described substrate can also be the substrate of other materials that those skilled in the art adopt, as long as the defect of this substrate is applicable to laser repairing, the method for on-line automatic repairing substrate defect of the present invention all can be adopted to be operated.
Accordingly, the present invention also provides for a kind of method of on-line automatic repairing substrate defect, uses the system of above-mentioned on-line automatic repairing substrate defect. As in figure 2 it is shown, the flow chart of the method for its on-line automatic repairing substrate defect provided for one embodiment of the invention. Refer to Fig. 1 and Fig. 2, specifically comprising the following steps that of the method for on-line automatic repairing substrate defect
Step S01: laser cell 10 launches laser; Frequency division module 13 is closed;
Step S02: optical unit 20 reflects described laser to substrate 50 to scan the defect information of described substrate; Protective unit 22 is closed, and the rotating lens 60 arranged between optical unit 20 and substrate regulates the hot spot of laser;
Step S03: supervising device 30 receives the scanning information reflecting and passing through described optical unit 20 from described substrate 50, and by described scanning information transmission to feedback device 40;Protective unit 22 is opened, and scanning information is either directly through optical unit 20;
Step S04: described feedback device 40 is analyzed described scanning information and drawn scanning result and scanning result feeds back to described laser cell 10;
Step S05: described laser cell 10 exports the laser of different-energy and wavelength according to the difference of scanning result and reflexes to described substrate 50 by described optical unit 20, and described defect is removed or repaired; Now frequency division module 13 is opened, and the result fed back by feedback device 40 regulates the optical maser wavelength and energy that are suitable for.
In sum, in the method for on-line automatic repairing substrate defect provided by the invention, by the use of laser cell, optical unit and supervising device, it is possible to the defect of accurate scan substrate, it is achieved that high accuracy scanning; Simultaneously, feedback device is set, feedback device receives the scanning information of the base board defect of supervising device transmission, by analyzing, scanning result is fed back to laser cell, thus regulating wavelength and the energy of laser, on-line automatic defect being removed or repairs, save repair time, avoid the waste manually repairing the human resources caused, reduce defect repair cost, improve remediation efficiency.
Foregoing description is only the description to present pre-ferred embodiments, not any restriction to the scope of the invention, any change that the those of ordinary skill in field of the present invention does according to the disclosure above content, modification, belongs to the protection domain of claims.
Claims (10)
1. the system of an on-line automatic repairing substrate defect, it is characterised in that including: laser cell, optical unit, supervising device and feedback device; Described laser cell is used for launching laser; Described optical unit is used for reflecting described laser to substrate, thus scanning the defect information of described substrate; Described supervising device is for receiving the scanning information reflecting and passing through described optical unit from described substrate, and transmits described scanning information to described feedback device; Described feedback device is used for analyzing described scanning information and draws scanning result and scanning result feeds back to described laser cell; And described laser cell exports the laser of different-energy and wavelength for the difference according to scanning result and reflexes to described substrate by described optical unit, so that described defect is removed or repairs.
2. the system of on-line automatic repairing substrate defect as claimed in claim 1, it is characterised in that described laser cell includes: lasing light emitter and the first attenuator; Described lasing light emitter is used for launching laser, and described first attenuator is for changing the energy of laser.
3. the system of on-line automatic repairing substrate defect as claimed in claim 2, it is characterized in that, described laser cell also includes frequency division module, described frequency division module includes frequency divider and the second attenuator, described frequency divider is for controlling the wavelength of laser, and described second attenuator is for the energy of the laser after control break wavelength; Described frequency division module can integral-rotation.
4. the system of on-line automatic repairing substrate defect as claimed in claim 1, it is characterised in that described optical unit includes half-reflecting half mirror and protective unit, in described protective unit light path between described half-reflecting half mirror and described supervising device.
5. the system of on-line automatic repairing substrate defect as claimed in claim 1, it is characterized in that, described supervising device includes lens and imageing sensor, described lens are for amplifying or/and filter scan information, scanning information is carried out signal conversion by described imageing sensor, and by optical signal, described scanning information is converted to the signal of telecommunication.
6. the method that the system of the on-line automatic repairing substrate defect used described in claim 1～5 carries out on-line automatic repairing substrate defect, it is characterised in that including:
Laser cell launches laser;
Optical unit reflects described laser to substrate to scan the defect information of described substrate;
Supervising device receives the scanning information reflecting and passing through described optical unit from described substrate, and by described scanning information transmission to feedback device;
Feedback device is analyzed described scanning information and is drawn scanning result and scanning result feeds back to described laser cell; And
Laser cell exports the laser of different-energy and wavelength according to the difference of scanning result and reflexes to described substrate by described optical unit, so that described defect is removed or to be repaired.
7. the method for on-line automatic repairing substrate defect as claimed in claim 6, it is characterised in that during the defect information of substrate described in described laser scanning, rotating described frequency division module to closed mode, described laser is either directly through described frequency division module; When described defect is removed or repairs by described laser, rotating described frequency division module to opening, described frequency division module changes wavelength and the energy of laser.
8. the method for on-line automatic repairing substrate defect as claimed in claim 6, it is characterised in that when the Laser Transmission of described laser cell output is to described optical unit, described protective unit is closed, and described laser is reflected onto described substrate; When the scanning information transmission of described substrate reflection is to described optical unit, described protective unit is opened, and described scanning information passes through described optical unit; Described laser is reflexed to by described optical unit before described substrate, through a rotating lens, to regulate the hot spot of laser.
9. the method for on-line automatic repairing substrate defect as claimed in claim 6, it is characterized in that, described feedback device is according to the position of described scanning information analyzing defect, kind and size, the wavelength of the laser thus judged whether to and energy, and this analysis result is fed back to described laser cell; The kind of described defect includes foreign body residual and/or circuit disappearance.
10. the method for on-line automatic repairing substrate defect as claimed in claim 6, it is characterised in that before on-line automatic repairing substrate defect, manually arranges wavelength and the energy of laser cell laser when scanning defect and repairing defect.
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| CN201410663574.7A CN105665919B (en) | 2014-11-19 | 2014-11-19 | The system and method for on-line automatic repairing substrate defect |
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| CN201410663574.7A CN105665919B (en) | 2014-11-19 | 2014-11-19 | The system and method for on-line automatic repairing substrate defect |
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| CN106782247A (en) * | 2017-01-05 | 2017-05-31 | 京东方科技集团股份有限公司 | A kind of bad prosthetic device of display panel and the method repaired |
| CN107367516A (en) * | 2017-07-19 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | One kind coating detection prosthetic device and its method |
| CN110010514A (en) * | 2019-03-20 | 2019-07-12 | 上海华虹宏力半导体制造有限公司 | Online bug repairing apparatus and method in wafer manufacturing process |
| CN114012350A (en) * | 2021-11-11 | 2022-02-08 | 云谷（固安）科技有限公司 | Evaporation mask plate maintenance device, system and method |
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