CN106199996B - Utilize the method for aperture position in diffraction pattern calibration spatial filter - Google Patents
Utilize the method for aperture position in diffraction pattern calibration spatial filter Download PDFInfo
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- CN106199996B CN106199996B CN201610766057.1A CN201610766057A CN106199996B CN 106199996 B CN106199996 B CN 106199996B CN 201610766057 A CN201610766057 A CN 201610766057A CN 106199996 B CN106199996 B CN 106199996B
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- spatial filter
- aperture
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- diffraction pattern
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
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Abstract
The invention discloses a kind of methods using aperture position in diffraction pattern calibration spatial filter, comprising steps of being previously inserted into a calibration diaphragm in spatial filter, specific location using the far field construction pattern generated after CCD observation laser irradiation calibration diaphragm come Calibration of Laser focus in spatial filter at aperture, is overlapped laser spot accurately with small hole center by adjusting aperture.The problem of distorting present invention efficiently solves laser because of shoot laser hot spot caused by via hole deviation, have the characteristics that proofread it is accurate, easy to adjust, be simple and efficient with it is practical.
Description
Technical field
The present invention relates to spatial filter, physical optical arts and large-scale high power pulsed laser device fields, especially relate to
A kind of and method using aperture position in diffraction pattern calibration spatial filter.
Background technique
In high power pulsed laser device field, based on Fourier transform principle and in design according to " 4f " system
Spatial filter, because it has the function of filtering interception to high-frequency information and plays the work of Image relaying during laser transmits
With to be effectively protected working-laser material and improve the near field beam quality of laser output.So spatial filter is in height
Power pulsed laser device is indispensable especially in clapping watt grade high power pulsed laser device.
Currently advanced device of high power laser can all use a large amount of and different bore spatial filter, general next
It says, the determination of aperture position is to pass through CCD in the laser spot brightness of computer or display screen display in spatial filter
It whether is relatively most secretly standard, should be not only rough in this way, but also laser spot all cannot be accurately determined under normal conditions
Whether the center of aperture is passed through.However, accuracy of the laser in spatial filter through aperture directly affects laser output
Near field beam quality.Therefore, accurate calibration laser becomes in the focus in spatial filter and the relative position between aperture
It is particularly important.
Chinese patent CN104570380A discloses a kind of spatial filter debugging apparatus and adjustment method, the patent of invention
Although can guarantee that the front and back lens of spatial filter are confocal coaxial using fiber optic point source and lateral shear interferometer,
How do not refer in the patent makes focus of the laser in spatial filter accurately by the center of aperture.
Therefore, for above situation, it is necessary to propose that a kind of utilization diffraction pattern calibrates aperture position in spatial filter
Method.
Summary of the invention
The purpose of the present invention is to solve at present due to can not accurately determine aperture and laser spot in spatial filter
Between relative position the problem of eventually leading to the distortion of shoot laser hot spot, mentioned there are certain deviation when causing laser vias
For a kind of method using aperture position in diffraction pattern calibration spatial filter, a calibration is previously inserted into spatial filter
Diaphragm, using the far field construction pattern generated after CCD observation laser irradiation calibration diaphragm come Calibration of Laser focus in space filtering
Specific location in device at aperture is overlapped laser spot accurately with small hole center by adjusting aperture.
In order to achieve the above-mentioned object of the invention, technical solution of the invention is as follows:
By being previously inserted into a calibration diaphragm in spatial filter, produced after calibrating diaphragm using CCD observation laser irradiation
Raw far field construction pattern carrys out specific location of the Calibration of Laser focus in spatial filter at aperture, is made by adjusting aperture small
Hole center is accurately overlapped with laser spot.
A method of utilizing aperture position in diffraction pattern calibration spatial filter, the specific steps are as follows:
Step 1, with the cross section of aperture in spatial filter be the face YZ, will calibration apertured bracket be fixed on along the x axis
The front end of spatial filter, the geometry that the optical axis of the front lens and rear lens that make spatial filter passes through calibration apertured bracket light passing
Center, and the light passing plane for calibrating apertured bracket is parallel with the cross section of aperture；
Step 2 will calibrate rectangular diaphragm insertion calibration apertured bracket, make the geometric center for calibrating rectangular diaphragm light passing and determine
The geometric center for marking apertured bracket light passing is overlapped；When laser irradiation is when calibrating rectangular diaphragm, laser forms one at aperture
Cross diffraction pattern, the diffraction pattern are finally imaged on CCD by plane mirror and glass window；
Step 3, the position that aperture is adjusted by adjusting aperture adjuster, make the small hole center on CCD spread out with laser far field
The cross searching for penetrating pattern is overlapped；
Step 4 will calibrate rectangular diaphragm removal.
The front lens of the spatial filter is coaxial confocal with rear lens.
Position is focal point of the laser in spatial filter to the aperture along the x axis.
The clear aperture of the calibration apertured bracket is greater than the cross section spot size of laser, the calibration square light
The clear aperture of door screen is slightly less than the cross section spot size of laser.
The space directivity of the laser front lens and rear lens along the x axis and in central ray and spatial filter
Optical axis be completely coincident.
Plane mirror described in step 2 should not hinder transmission of the laser in spatial filter；Described in step 2
Diffraction pattern, physical basis are the Kirchhoff diffraction integral formula under fraunhofer approximation, i.e. fraunhofer square hole diffraction,
Specific formula is as follows:
Wherein, U (P) is the complex amplitude at focal point any point, and k is wave vector, and λ is wavelength, and x is to calibrate rectangular diaphragm to arrive
The distance of focus, f are the focal length of spatial filter front lens, S1For the clear field for calibrating rectangular diaphragm, A0To calibrate square light
Laser complex amplitude at door screen, y, z are the coordinate in focal point YZ plane, y0、z0To calibrate the coordinate at rectangular diaphragm in YZ plane.
CCD described in step 3 answers coupled computer or image display panel to use；The aperture adjuster, should be in YZ plane on
Lower left and right is adjustable.
Compared with prior art, the beneficial effects of the present invention are:
1) it solves at present due to can not accurately determine the relative position in spatial filter between aperture and laser spot,
There are certain deviation when causing laser vias, the problem of eventually leading to emergent light spot distortion；
2) it is common to the spatial filter of all specifications, is passing through space filtering especially for the biggish laser of diffraction limit
Effect when device is especially apparent；
3) have the characteristics that check and correction it is accurate, easy to adjust, be simple and efficient with it is practical.
Detailed description of the invention
Fig. 1 is the overall structure diagram using aperture position in diffraction pattern calibration spatial filter
Specific embodiment
The present invention will be described in detail for son in the following with reference to the drawings and specific embodiments.
The present invention is in order to solve at present due to can not accurately determine the phase in spatial filter between aperture and laser spot
To position, there are certain deviation when causing laser vias, the problem of eventually leading to emergent light spot distortion, a kind of utilization is proposed
The method that diffraction pattern calibrates aperture position in spatial filter.
A method of utilizing aperture position in diffraction pattern calibration spatial filter, the specific steps are as follows:
Step 1, with the cross section of aperture 5 in spatial filter 1 be the face YZ, will calibration apertured bracket 2 fix along the x axis
Optical axis in the front end of spatial filter 1, the front lens 10 and rear lens 11 that make spatial filter 1 passes through calibration apertured bracket 2
The geometric center of the light passing and light passing plane for calibrating apertured bracket 2 is parallel with the cross section of aperture 5；
Step 2 will calibrate the rectangular insertion of diaphragm 3 calibration apertured bracket 2, make the geometric center for calibrating rectangular 3 light passing of diaphragm
It is overlapped with the geometric center of calibration 2 light passing of apertured bracket.When the irradiation of laser 9 is when calibrating rectangular diaphragm 3, laser 9 is at aperture 5
A specific cross diffraction pattern is formed, which is finally imaged on CCD8 through window 7 by plane mirror 6
On；
Laser 9 is in the diffraction pattern of focal point and the relative position of aperture 5 in step 3, control CCD8, by adjusting aperture
Adjuster 4 adjusts the position of aperture 5, is overlapped the aperture 5 on CCD8 with the cross searching of 9 far field construction pattern of laser；
Step 4 removes and calibrates rectangular diaphragm 3, makes laser 9 completely by spatial filter 1, thus efficiently solve due to
It can not accurately determine the relative position in spatial filter between aperture and laser spot, there are certain when causing laser vias
Deviation eventually leads to the problem of shoot laser hot spot distorts.
Finally it should be noted that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although ginseng
It is described the invention in detail according to embodiment, those skilled in the art should understand that, to technical side of the invention
Case is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered in the present invention
Scope of the claims in.
Claims (8)
1. a kind of method using aperture position in diffraction pattern calibration spatial filter, is previously inserted into one in spatial filter
Diaphragm is calibrated, using the far field construction pattern generated after CCD observation laser irradiation calibration diaphragm come Calibration of Laser focus in space
Specific location in filter at aperture is overlapped small hole center accurately with laser spot by adjusting aperture position, feature
It is, the specific steps are as follows:
Step 1, with the cross section of aperture (5) in spatial filter (1) for the face YZ, will calibration apertured bracket (2) it is solid along the x axis
It is scheduled on the front end of spatial filter (1), the optical axis of the front lens (10) and rear lens (11) that make spatial filter (1) passes through calibration
The geometric center of apertured bracket (2) light passing, and the light passing plane for calibrating apertured bracket (2) is parallel with the cross section of aperture (5)；
Step 2 will calibrate rectangular diaphragm (3) insertion calibration apertured bracket (2), make to calibrate in the geometry of rectangular diaphragm (3) light passing
The heart is overlapped with the geometric center of calibration apertured bracket (2) light passing；When laser (9) irradiate the laser when calibrating rectangular diaphragm (3)
(9) a cross diffraction pattern is formed at aperture (5), which passes through plane mirror (6) and glass window (7),
It is finally imaged on CCD (8)；
Step 3, the position by adjusting aperture adjuster (4) adjustment aperture (5) make aperture (5) center on CCD (8) and swash
The cross searching of light (9) far field construction pattern is overlapped；
Step 4 will calibrate rectangular diaphragm (3) removal.
2. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, feature exist
In the front lens (10) of the spatial filter (1) is coaxial confocal with rear lens (11).
3. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, feature exist
In the clear aperture of the calibration apertured bracket (2) is greater than the cross section spot size of laser (9), and the calibration is rectangular
The clear aperture of diaphragm (3) is slightly less than the cross section spot size of laser (9).
4. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, described swashs
The space directivity of light (9) front lens (10) and rear lens (11) along the x axis and in central ray and spatial filter (1)
Optical axis is completely coincident.
5. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, feature exist
In position is the focal point of laser (9) in spatial filter (1) to the aperture (5) along the x axis.
6. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, described is flat
Face reflecting mirror (6) does not hinder transmission of the laser (9) in spatial filter (1).
7. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, the CCD
(8) it is connected with computer or image display panel.
8. the method according to claim 1 using aperture position in diffraction pattern calibration spatial filter, described is small
Hole adjuster (4) is adjustable up and down in YZ plane.
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| CN201610766057.1A CN106199996B (en) | 2016-08-30 | 2016-08-30 | Utilize the method for aperture position in diffraction pattern calibration spatial filter |
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| CN106199996B true CN106199996B (en) | 2018-12-25 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110146991B (en) * | 2019-04-18 | 2024-07-09 | 珠海市运泰利自动化设备有限公司 | Laser spot shaping optical system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3851308A (en) * | 1972-02-14 | 1974-11-26 | Asahi Optical Co Ltd | Pattern identification system utilizing coherent light |
| US20040090621A1 (en) * | 2001-03-15 | 2004-05-13 | Robert Bennett | Spectroscopy apparatus and method |
| CN101266340A (en) * | 2008-04-25 | 2008-09-17 | 中国科学院上海光学精密机械研究所 | Method for adjusting light path collimation of high-power laser device |
| CN102236174A (en) * | 2010-04-28 | 2011-11-09 | 北京国科世纪激光技术有限公司 | Spatial filtering system |
| CN103698896A (en) * | 2013-12-26 | 2014-04-02 | 中国科学院苏州生物医学工程技术研究所 | Precise pinhole alignment debugging method |
| CN104570380A (en) * | 2015-01-22 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | Spatial filter debugging device and method |
-
2016
- 2016-08-30 CN CN201610766057.1A patent/CN106199996B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3851308A (en) * | 1972-02-14 | 1974-11-26 | Asahi Optical Co Ltd | Pattern identification system utilizing coherent light |
| US20040090621A1 (en) * | 2001-03-15 | 2004-05-13 | Robert Bennett | Spectroscopy apparatus and method |
| CN101266340A (en) * | 2008-04-25 | 2008-09-17 | 中国科学院上海光学精密机械研究所 | Method for adjusting light path collimation of high-power laser device |
| CN102236174A (en) * | 2010-04-28 | 2011-11-09 | 北京国科世纪激光技术有限公司 | Spatial filtering system |
| CN103698896A (en) * | 2013-12-26 | 2014-04-02 | 中国科学院苏州生物医学工程技术研究所 | Precise pinhole alignment debugging method |
| CN104570380A (en) * | 2015-01-22 | 2015-04-29 | 中国科学院上海光学精密机械研究所 | Spatial filter debugging device and method |
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