CN106191783A - The manufacture method of vapor deposition mask, evaporation coating method and vapor deposition mask - Google Patents
The manufacture method of vapor deposition mask, evaporation coating method and vapor deposition mask Download PDFInfo
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- CN106191783A CN106191783A CN201510214919.5A CN201510214919A CN106191783A CN 106191783 A CN106191783 A CN 106191783A CN 201510214919 A CN201510214919 A CN 201510214919A CN 106191783 A CN106191783 A CN 106191783A
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Abstract
The present invention provides a kind of vapor deposition mask for forming electroluminescent material layer in panel substrate, this vapor deposition mask includes body membrane and is entrained in the magnetic-particle within body membrane, this body membrane is resin material, this body membrane includes at least one pixel region, and each pixel region is formed the first opening that evaporation is required.Owing to vapor deposition mask doped magnetic granule in body membrane of the present invention makes body membrane have magnetic, vapor deposition mask is fixed by the magnetic force of magnetic-particle, body membrane uses the resin material being easier to processing to replace the vapor deposition mask of the metal material of prior art, is favorably improved the precision of evaporation.
Description
Technical field
The present invention relates to a kind of vapor deposition mask, evaporation coating method and the manufacture method of vapor deposition mask.
Background technology
Current organic EL display panel is by being deposited with organic luminescent substance to be formed on substrate by organic luminescent substance on substrate.Vapor deposition mask typically selects metal material, and by a Magnet by substrate and vapor deposition mask fluid-tight engagement during evaporation, the mask pattern on vapor deposition mask is generally processed by etching mode.So, the more difficult control of the fine degree of processing graphic pattern on metal material, thus affect the precision of evaporation.
Summary of the invention
In view of problem above, it is necessary to provide a kind of vapor deposition mask of high accuracy, evaporation coating method and the manufacture method of vapor deposition mask.
A kind of vapor deposition mask, for forming electroluminescent material layer in panel substrate, this vapor deposition mask includes body membrane and is entrained in the magnetic-particle within this body membrane, this body membrane is resin material, this body membrane includes at least one pixel region, and each described pixel region is formed the first opening that evaporation is required.
A kind of evaporation coating method, the method comprises the steps:
This vapor deposition mask is adhered on above panel substrate；
Electroluminescent material is provided, to form electroluminescent material layer in this panel substrate from this vapor deposition mask side to this panel substrate.
The manufacture method of a kind of vapor deposition mask, this vapor deposition mask is for forming electroluminescent material layer in panel substrate, and the method comprises the steps:
Form a body membrane, and during forming this body membrane, mix magnetic-particle；
This body membrane defines at least one pixel region, and on this at least one pixel region, forms the first opening that evaporation is required.
The vapor deposition mask of present invention doped magnetic granule in body membrane makes described body membrane have magnetic, during evaporation, described vapor deposition mask is fixed by the magnetic force of described magnetic-particle, described body membrane uses the resin material being easier to processing to replace the vapor deposition mask of the metal material of prior art, is favorably improved the precision of evaporation.
Accompanying drawing explanation
Fig. 1 is the structural representation of the vapor deposition mask that first embodiment of the invention is provided.
Fig. 2 be in Fig. 1 vapor deposition mask along the sectional view of II-II line.
Fig. 3 is the flow chart of steps of the vapor deposition mask manufacture method that first embodiment of the invention is provided.
Fig. 4 to Fig. 7 is the schematic diagram of each steps flow chart in Fig. 3.
Fig. 8 is the structural representation of the vapor deposition mask that second embodiment of the invention is provided.
Fig. 9 be in Fig. 8 vapor deposition mask along the sectional view of IX-IX line.
Figure 10 is the flow chart of steps of the vapor deposition mask manufacture method that second embodiment of the invention is provided.
Figure 11 to Figure 14 is the schematic diagram of each steps flow chart in Figure 10.
Figure 15 is the structural representation of the vapor deposition mask that third embodiment of the invention is provided.
Figure 16 be in Figure 15 vapor deposition mask along the sectional view of XVI-XVI line.
Figure 17 is the flow chart of steps of the vapor deposition mask manufacture method that third embodiment of the invention is provided.
Figure 18 to Figure 25 is the schematic diagram of each steps flow chart in Figure 17.
Figure 26 is to use vapor deposition mask provided by the present invention to carry out the flow chart of steps being deposited with.
Main element symbol description
| Vapor deposition mask | 100,200,300 |
| First framework | 110,210,310 |
| Second opening | 111,211,311 |
| Body membrane | 120,220,320 |
| Pixel region | 121,221,321 |
| First opening | 1211,2211,3211 |
| Magnetic-particle | 130,230,330 |
| Second framework | 340 |
| 3rd opening | 341 |
| Second substrate | 10 |
| First surface | 11 |
| Second surface | 12 |
| Photoresist layer | 20 |
| Photoresist layer pattern | 21 |
| Optical mask | 30 |
| Laser | L |
Following detailed description of the invention will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Detailed description of the invention
It is the structural representation of the vapor deposition mask 100 that first embodiment of the invention is provided please with reference to Fig. 1 and Fig. 2, Fig. 1.Fig. 2 be in Fig. 1 vapor deposition mask 100 along the sectional view of II-II line.First embodiment of the invention provides a kind of vapor deposition mask 100, for forming electroluminescent material on substrate.Specifically, this vapor deposition mask 100 can be used for being formed with electroluminescent material layer on display floater (such as mobile phone display floater or Computer display panel etc.) (not shown) substrate.This vapor deposition mask 100 includes the first framework 110, body membrane 120 and magnetic-particle 130.This first framework 110 runs through and offers one second opening 111, this first framework 110 square shape in hollow.This magnetic-particle 130 is entrained in the inside of this body membrane 120, in the present embodiment, this magnetic-particle 130 is entrained in the inside of this body membrane 120 equably, the doping of this magnetic-particle 130 can adjust according to the actual requirements, in other embodiments, this magnetic-particle 130 adjusts also dependent on actual demand and is entrained in the uniformity within this body membrane 120.This body membrane 120 doped with this magnetic-particle 130 is attached at the surface of this first framework 110, makes this first framework 110 be supported in 120 weeks sides of this body membrane to act the effect supporting and strengthening.Having a pixel region 121 in this body membrane 120, this pixel region 121 is corresponding with described display floater, in present embodiment, forms multiple first openings 1211 required for evaporation by laser L on this pixel region 121.In other embodiments, it is also possible to logical overetched mode forms described first opening 1211.The plurality of first opening 1211 is all revealed in described second opening 111.
In other embodiments, this vapor deposition mask 100 can not also include described first framework 110, and is only made up of the described body membrane 120 doped with described magnetic-particle 130.
This first framework 110 can be glass material or magnetic metal material, and in the present embodiment, this first framework 110 is invar alloy (Invar) material.This body membrane 120 with described first framework 110 by welding or combining by the way of gluing.Additionally, due to the existence of described magnetic-particle 130, described body membrane 120 is adsorbed with tool this first framework 110 phase magnetic further by the magnetic force of described magnetic-particle 130.In other embodiments, when this first framework 110 uses glass material, described body membrane 120 combines with described first framework 110 by the way of gluing.
This body membrane 120 is resin material, such as any one in polyimides, poly-naphthalenedicarboxylic acid ethanol ester, polyethylene terephthalate or polyether sulfone.In the present embodiment, this body membrane 120 is polyimide resin (Polyimide resin).The size and shape of the plurality of first opening 1211 being formed in this body membrane 120 according to reality be deposited with it needs to be determined that.The shape of described first opening 1211 can be square, rectangle, circle, ellipse or Else Rule polygon or irregular polygon.In present embodiment, described first opening 1211 is square.
This magnetic-particle 130 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 130 of spherical structure is less than 1 μm, preferably less than 50nm, is most preferably less than 20nm.In present embodiment, the diameter of described magnetic-particle 130 is less than 20nm.In other embodiments, the diameter of the strong point of the described magnetic-particle 130 of oval or random polygonized structure is less than 1 μm.This magnetic-particle 130 can be ferrimagnet, paramagnetic material, superparamagnetic material or antimagnetic material.Preferably, this magnetic-particle 130 is the ferrimagnet of relatively high magnetism, such as: the combination of any one or several in ferrum, cobalt, nickel and alloy thereof or the compound of any one or several, ferrum oxide, ferroso-ferric oxide.Present embodiment selects ferroso-ferric oxide.
It is to use vapor deposition mask 100 provided by the present invention to carry out the flow chart of steps being deposited with please refer to Figure 26, Figure 26.It is set forth below each step of this evaporation coating method.
Step S401, adheres on this vapor deposition mask 100 above panel substrate.
Specifically, the described body membrane 120 being carved with the plurality of first opening 1211 is adsorbed in panel substrate (not shown) to be deposited with by the magnetic attraction provided by a magnetic sheet (not shown), it is appreciated that, when having selected tool this first framework 110 magnetic, described first framework 110 is adsorbed by described magnetic sheet in the lump, thus fixing.
Step S402, provides electroluminescent material from this vapor deposition mask 100 side to this panel substrate, to form electroluminescent material layer in this panel substrate.
It is the flow chart of steps of vapor deposition mask 100 manufacture method that first embodiment of the invention is provided please refer to Fig. 3 to Fig. 7, Fig. 3.Fig. 4 to Fig. 7 is the schematic diagram of each steps flow chart in Fig. 3.For convenience of description, the reference numerals of foregoing first embodiment continued to use by the assembly in following method flow.It is set forth below each step of the manufacture method of this vapor deposition mask 100, it should be noted that, the manufacture method of this vapor deposition mask 100 of the present invention is not limited to the order of following step, and in other embodiments, the manufacture method of this vapor deposition mask 100 of the present invention can only include a portion of the following stated step, or part steps therein can be deleted.
Step S101, as shown in Figure 4, utilizes the resin material being mixed with magnetic-particle 130 to prepare body membrane 120.In the present embodiment, this body membrane 120 is polyimide resin (Polyimide
resin).This magnetic-particle 130 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 130 of spherical structure is less than 1 μm, preferably less than 50nm, is most preferably less than 20nm.This body membrane 120 is square structure.
Step S102, as shown in Figure 5, it is provided that a substrate (not shown), and offers the second opening 111 on the substrate to form the first framework 110 of hollow.This substrate is glass material or magnetic metal material, and in the present embodiment, this first framework 110 is invar alloy (Invar) material.The area of this second opening 111 is less than the area of described body membrane 120, so that all sides of described body membrane 120 are supported by described first framework 110.
Step S103, as shown in Figure 6, is attached at the surface of this first framework 110 by this body membrane 120.By welding or can combine by the way of gluing with described first framework 110 in this body membrane 120.In the present embodiment, due to the existence of described magnetic-particle 130, described body membrane 120 by the magnetic force of described magnetic-particle 130 further with described first attracting the chiming in of framework 110 of Invar material and more firm combination.
Step S104, as it is shown in fig. 7, define a pixel region 121 in this body membrane 120, this pixel region 121 is corresponding with described display floater, and on this pixel region 121, form, by laser L, multiple first openings 1211 that evaporation is required, obtain described vapor deposition mask 100.
Wherein, this pixel region 121 is corresponding with this second opening 111, and the area of described pixel region 121 is not more than the area of described second opening 111.It is understood that in other embodiments, if this vapor deposition mask 100 can not also include described first framework 110, and be only made up of the described body membrane 120 doped with described magnetic-particle 130, then step S102 and S103 all can omit.
It is the structural representation of the vapor deposition mask 200 that second embodiment of the invention is provided please with reference to Fig. 8 and Fig. 9, Fig. 8.Fig. 9 be in Fig. 8 vapor deposition mask 200 along the sectional view of IX-IX line.Second embodiment of the invention provides a kind of vapor deposition mask 200, for forming electroluminescent material on substrate.Specifically, this vapor deposition mask 100 can be used for being formed with electroluminescent material layer on display floater (such as mobile phone display floater or Computer display panel etc.) (not shown) substrate.This vapor deposition mask 200 includes the first framework 210, body membrane 220 and magnetic-particle 230.This first framework 210 runs through and offers one second opening 211, this first framework 210 square shape in hollow.This magnetic-particle 230 is entrained in the inside of this body membrane 220, in the present embodiment, this magnetic-particle 130 is entrained in the inside of this body membrane 120 equably, the doping of this magnetic-particle 130 can adjust according to the actual requirements, in other embodiments, this magnetic-particle 130 adjusts also dependent on actual demand and is entrained in the uniformity within this body membrane 120.This body membrane 220 doped with this magnetic-particle 230 is attached at this first framework 210 surface, makes this first framework 210 be supported in 220 weeks sides of this body membrane to act the effect supporting and strengthening.Being interval with multiple pixel region 221 in this body membrane 220, each described pixel region 221 is corresponding with display floater described in, in present embodiment, forms multiple first openings 2211 required for evaporation by laser L on the plurality of pixel region 221.In other embodiments, it is also possible to logical overetched mode forms described first opening 2211.The plurality of first opening 2211 is all revealed in described second opening 211.In other embodiments, this vapor deposition mask 200 can not also include described first framework 210, and is only made up of the described body membrane 220 doped with described magnetic-particle 230.
This first framework 210 can be glass material or magnetic metal material, and in the present embodiment, this first framework 210 is Invar material.With described first framework 210 by welding or combining by the way of gluing in this body membrane 220.Additionally, due to the existence of described magnetic-particle 230, described body membrane 120 is adsorbed with tool this first framework 210 phase magnetic further by the magnetic force of described magnetic-particle 230.In other embodiments, when this first framework 210 uses glass material, described body membrane 220 combines with described first framework 210 by the way of gluing.
This body membrane 220 is resin material, such as any one in polyimides, poly-naphthalenedicarboxylic acid ethanol ester, polyethylene terephthalate or polyethersulfone resin.In the present embodiment, this body membrane 220 is polyimide resin (Polyimide resin).The size and shape of the plurality of first opening 2211 being formed in this body membrane 220 according to reality be deposited with it needs to be determined that.The shape of described first opening 2211 can be square, rectangle, circle, ellipse or Else Rule polygon or irregular polygon.In present embodiment, described first opening 2211 is square.
This magnetic-particle 230 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 230 of spherical structure is less than 1 μm, preferably less than 50nm, is most preferably less than 20nm.In present embodiment, the diameter of described magnetic-particle 130 is less than 20nm.In other embodiments, the diameter of the strong point of the described magnetic-particle 230 of oval or random polygonized structure is less than 1 μm.This magnetic-particle 230 can be ferrimagnet, paramagnetic material, superparamagnetic material or antimagnetic material.Preferably, this magnetic-particle 230 is the ferrimagnet of relatively high magnetism, such as: the combination of any one or several in ferrum, cobalt, nickel and alloy thereof or the compound of any one or several, ferrum oxide, ferroso-ferric oxide.Present embodiment selects ferroso-ferric oxide.
It is to use vapor deposition mask 200 provided by the present invention to carry out the flow chart of steps being deposited with please refer to Figure 26, Figure 26.It is set forth below each step of this evaporation coating method.
Step S401, adheres on this vapor deposition mask 200 above panel substrate.
Specifically, this body membrane 220 being carved with the plurality of first opening 2211 is adsorbed in panel substrate (not shown) to be deposited with by the magnetic attraction provided by a magnetic sheet (not shown), it is appreciated that, when having selected magnetic described first framework 210 of tool, described first framework 210 is adsorbed by described magnetic sheet in the lump, thus fixing.
Step S402, provides electroluminescent material from this vapor deposition mask 200 side to this panel substrate, to form electroluminescent material layer in this panel substrate.
It is the flow chart of steps of vapor deposition mask 200 manufacture method that second embodiment of the invention is provided please refer to Figure 10 to Figure 14, Figure 10.Figure 11 to Figure 14 is the schematic diagram of each steps flow chart in Figure 10.For convenience of description, the reference numerals of aforementioned second embodiment continued to use by the assembly in following method flow.It is set forth below each step of the manufacture method of this vapor deposition mask 200, it should be noted that, the manufacture method of this vapor deposition mask 200 of the present invention is not limited to the order of following step, and in other embodiments, the manufacture method of this vapor deposition mask 200 of the present invention can only include a portion of the following stated step, or part steps therein can be deleted.
Step S201, as shown in figure 11, utilizes the resin material being mixed with magnetic-particle 230 to prepare body membrane 220.In the present embodiment, this body membrane 220 is polyimide resin (Polyimide resin).This magnetic-particle 230 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 230 of spherical structure is less than 1 μm, preferably less than 50nm, is most preferably less than 20nm.In present embodiment, the diameter of described magnetic-particle 130 is less than 20nm.This body membrane 220 is square structure.
Step S202, as shown in figure 12, it is provided that a substrate (not shown), and offers the second opening 211 on the substrate to form the first framework 210 of hollow.This substrate is glass material or magnetic metal material, and in the present embodiment, this first framework 210 is Invar material.The area of this second opening 211 is less than the area of described body membrane 220, so that all sides of described body membrane 220 are supported by described first framework 210.
Step S203, as shown in figure 13, this body membrane 220 is attached at this first framework 210 surface.Wherein, this body membrane 220 by welding or can combine by the way of gluing with described first framework 210.Additionally, due to the existence of described magnetic-particle 230, described body membrane 220 by the magnetic force of described magnetic-particle 230 further with described first attracting the chiming in of framework 210 of Invar material and more firm combination.
Step S204, as shown in figure 14, this body membrane 220 defines multiple pixel regions 221 corresponding with multiple display floaters respectively, and on the plurality of pixel region 221, forms multiple first openings 2211 that evaporation is required by laser L respectively, obtain described vapor deposition mask 200.
It is understood that in other embodiments, if this vapor deposition mask 200 can not also include described first framework 210, and only had the described body membrane 220 of described magnetic-particle 230 to constitute by Uniform Doped, then step S202 and S203 all can omit.
It is the structural representation of the vapor deposition mask 300 that third embodiment of the invention is provided please with reference to Figure 15 and Figure 16, Figure 15.Figure 16 be in Figure 15 vapor deposition mask 300 along the sectional view of XVI-XVI line.Third embodiment of the invention provides a kind of vapor deposition mask 300, for forming electroluminescent material on substrate.Specifically, this vapor deposition mask 300 can be used for being formed with electroluminescent material layer on display floater (such as mobile phone display floater or Computer display panel etc.) (not shown) substrate.
This vapor deposition mask 300 includes the first framework 310, body membrane 320, magnetic-particle 330 and the second framework 340.This magnetic-particle 330 is entrained in the inside of this body membrane 320 equably, and this body membrane 320 doped with this magnetic-particle 330 is attached at this second framework 340 surface.Being interval with multiple pixel region 321 in this body membrane 320, each described pixel region 321 is corresponding with display floater described in, in present embodiment, forms multiple first openings 3211 required for evaporation by laser L on the plurality of pixel region 321.In other embodiments, it is possible to logical overetched mode forms described first opening 3211.This second framework 340 is located between the first framework 310 and this body membrane 320 for acting the effect supporting and strengthening described body membrane 320.This second framework 340 and the plurality of pixel region 321 run through accordingly and offer multiple 3rd opening 341, and the size of each described 3rd opening 341 is more than or equal to the size of each described pixel region 321.Running through in the middle of this first framework 310 and offer one second opening 311, make described first framework 310 square shape in hollow, this first framework 310 is used for supporting described second framework 340, and the plurality of 3rd opening 341 is all revealed in described second opening 311.In other embodiments, described vapor deposition mask 300 can not also include described first framework 310, and the most described vapor deposition mask 300 includes the described body membrane 320 being mixed with described magnetic-particle 330 and for carrying the second framework 340 of this body membrane 320.
This first framework 310 and this second framework 340 can be all glass material or magnetic metal material, and in the present embodiment, this first framework 310 and this second framework 340 are invar alloy (Invar) material.Wherein, more described second framework 340 of this first framework 310 is thin makes the thickness of whole described vapor deposition mask 300 increase with deduction and exemption as far as possible due to the increase of described second framework 340.Described first framework 310 and described second framework 340 by mutual magnetic force, weld or one of the glutinous mode such as viscous combines.With described second framework 340 by welding or combining by the way of gluing in this body membrane 320.Additionally, due to the existence of described magnetic-particle 330, described body membrane 320 is adsorbed with tool this first framework 310 phase magnetic further by the magnetic force of described magnetic-particle 330.In other embodiments, when this first framework 310 uses glass material, described body membrane 320 combines with described first framework 310 by the way of gluing.
This body membrane 320 is resin material, such as any one in polyimides, poly-naphthalenedicarboxylic acid ethanol ester, polyethylene terephthalate or polyethersulfone resin.In the present embodiment, this body membrane 320 is polyimide resin (Polyimide resin).The size and shape of the plurality of first opening 3211 being formed in this body membrane 320 according to reality be deposited with it needs to be determined that.The shape of described first opening 3211 can be square, rectangle, circle, ellipse or Else Rule polygon or irregular polygon.In present embodiment, described first opening 3211 is square.
This magnetic-particle 330 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 330 of spherical structure is less than 1 μm, preferably less than 50nm, is most preferably less than 20nm.In present embodiment, the diameter of described magnetic-particle 130 is less than 20nm.In other embodiments, the diameter of the strong point of the described magnetic-particle 330 of oval or random polygonized structure is less than 1 μm.This magnetic-particle 330 can be ferrimagnet, paramagnetic material, superparamagnetic material or antimagnetic material.Preferably, this magnetic-particle 330 is the ferrimagnet of relatively high magnetism, such as: the combination of any one or several in ferrum, cobalt, nickel and alloy thereof or the compound of any one or several, ferrum oxide, ferroso-ferric oxide.Present embodiment selects ferroso-ferric oxide.
It is to use vapor deposition mask 300 provided by the present invention to carry out the flow chart of steps being deposited with please refer to Figure 26, Figure 26.It is set forth below each step of this evaporation coating method.
Step S401, adheres on this vapor deposition mask 300 above panel substrate.Specifically, this body membrane 320 being carved with the plurality of first opening 3211 is adsorbed in panel substrate (not shown) to be deposited with by the magnetic attraction provided by a magnetic sheet (not shown), it is appreciated that, when having selected magnetic described first framework 310 of tool, described first framework 310 is adsorbed by described magnetic sheet in the lump, thus fixing.
Step S402, provides electroluminescent material from this vapor deposition mask 300 side to this panel substrate, to form electroluminescent material layer in this panel substrate.
It is the flow chart of steps of vapor deposition mask 300 manufacture method that third embodiment of the invention is provided please refer to Figure 17 to Figure 25, Figure 17.Figure 18 to Figure 25 is the schematic diagram of each steps flow chart in Figure 17.For convenience of description, the reference numerals of aforementioned 3rd embodiment continued to use by the assembly in following method flow.It is set forth below each step of the manufacture method of this vapor deposition mask 300, it should be noted that, the manufacture method of this vapor deposition mask 300 of the present invention is not limited to the order of following step, and in other embodiments, the manufacture method of this vapor deposition mask 300 of the present invention can only include a portion of the following stated step, or part steps therein can be deleted.
Step S301, as shown in figure 18, utilizes the resin material being mixed with magnetic-particle 330 to prepare body membrane 320.In the present embodiment, this body membrane 320 is polyimide resin (Polyimide
resin).This magnetic-particle 330 can be spherical, oval or random polygon, and present embodiment is spherical, and wherein, the diameter of this magnetic-particle 330 of spherical structure is less than 1 μm, it is preferred that preferably less than 50nm, be most preferably less than 20nm.This body membrane 320 is square structure.
Step S302, as shown in figure 19, it is provided that a second substrate 10, and is attached at the first surface 11 of this second substrate 10 by this body membrane 320.This second substrate 10 is glass material or magnetic metal material, and in the present embodiment, this second substrate 10 is Invar material.Wherein, this body membrane 320 by welding or can combine by the way of gluing with described second substrate 10.Additionally, due to the existence of described magnetic-particle 330, described body membrane 320 by the magnetic force of described magnetic-particle 330 further with attracting the chiming in of described second substrate 10 of Invar material and more firm combination.
Step S303, as shown in figure 20, this second substrate 10 is turned over turnback, makes described second substrate 10 be formed and be covered in the attitude above described body membrane 320, and on the second surface 12 that this second substrate 10 is relative with this first surface 11, form the photoresist layer 20 covering this second surface 12.
Step S304, as shown in Figure 21 and Figure 22, patterns this photoresist layer 20, to form photoresist layer pattern 21.Specifically, an optical mask 30 is utilized to pattern this photoresist layer 20 to form described photoresist layer pattern 21 by gold-tinted developing manufacture process.
Step 305, as shown in figure 23, the described second substrate 10 that etching is not hidden by this photoresist layer pattern 21, form multiple 3rd openings 341 with interval on this second substrate 10 thus form the second framework 340.
Walk poly-306, as shown in figure 24, one first substrate (not shown) is provided, and on this first substrate, offers one second opening 311 to form the first framework 310 of hollow, then described second framework 340 is attached at described first framework 310 surface away from the one side of described body membrane 320.This first framework 310 supports all sides of described first framework 310, and the plurality of described 3rd opening 341 is revealed in described second opening 311.Wherein, this first substrate is glass material or magnetic metal material, and in the present embodiment, this first substrate is Invar material.Described first framework 310 and described second framework 340 by mutual magnetic force, weld or one of the glutinous mode such as viscous combines.In present embodiment, described first framework 310 and described second framework 340 are fixed together by mutual magnetic force.
Walk poly-307, as shown in figure 25, described body membrane 320 defines multiple pixel regions 321 corresponding with multiple display floaters respectively, the plurality of pixel region 321 is made to arrange with the plurality of opening one_to_one corresponding respectively, each described pixel region 321 is revealed in described 3rd opening 341 of correspondence, and on the plurality of pixel region 321, form, by laser L, multiple first openings 3211 that evaporation is required, obtain described vapor deposition mask 300.
In other embodiments, described vapor deposition mask 300 can not also include described first framework 310, the most described vapor deposition mask 300 includes the described body membrane 320 being mixed with described magnetic-particle 330 and for carrying the second framework 340 of this body membrane 320, then can omit step 306.
The beneficial effect of this vapor deposition mask of the present invention and the manufacture method of this vapor deposition mask is presented below, it should be noted, the beneficial effect of the manufacture method of this vapor deposition mask and this vapor deposition mask is not limited only to as described below, also should include other unlisted but beneficial effect that those of skill will appreciate that in field.
1). employing resin material is as body membrane, because the thermal coefficient of expansion of resin material can reach the numerical value being closer to the thermal coefficient of expansion as mobile phone or the panel substrate of computer, such as, 3.39 μm/m DEG C.So using resin material to have, as the vapor deposition mask of body membrane, the thermal coefficient of expansion being closer to described panel substrate, the displacement that this vapor deposition mask and described panel substrate are caused because of variations in temperature during evaporation can be reduced, thus improve the precision of evaporation.
2). doped with described magnetic-particle in this body membrane, described body membrane is made to have certain magnetic, during evaporation described vapor deposition mask can fix by the magnetic force of described magnetic-particle and to the material of described first framework without being strict with, even can omit described first framework, thus use the relatively greatly deformation that causes or relative to panel substrate offset thus affect the phenomenon of the precision of evaporation relevant to the thermal coefficient of expansion of described display floater due to described first framework during avoiding evaporation.
3). described first framework is selected has magnetic metal material, therefore during evaporation, magnetic by described magnetic-particle and described first framework described vapor deposition mask can be fixed simultaneously, described vapor deposition mask is made to be adjacent to more closely with described panel substrate, and it is bigger owing to providing described second opening in described first framework, described first framework is only supported in the periphery of described body membrane, therefore, without accurate para-position when described body membrane is attached at described first framework, the size of described first opening required for making the evaporation formed at described pixel region depends on the ability of Laser Processing, thus easily improve the resolution of described vapor deposition mask.
4). it is to form, by etching mode, the patterns of openings that evaporation is required on metal cover compared to prior art, the present invention can save the step of etching metal cover, and use instead and laser machine described body membrane and form the first opening that evaporation is required, the fine degree of processing is relatively easy to control, and can be effectively improved machining accuracy and reduce processing cost.
5). use granular described magnetic-particle to be doped in described body membrane, contribute to improving the easness of doping and being prone to uniform doping.
6). owing to being formed with multiple described pixel region corresponding with multiple described display floaters respectively in this body membrane, when being deposited with, can disposably be deposited with the pixel on multiple described display floater in large-scale deposited substrate, evaporation efficiency can be effectively improved, thus improve production capacity.
7). due to the existence of described second framework, described body membrane can be played the effect of reinforcement, especially, when the quantity of described pixel region is more, described second framework can support and be positioned at the described body membrane that described first frame mid portion is not supported by described first framework due to the existence of described second opening, affects evaporation effect to prevent from sinking in the middle part of described body membrane.
Embodiment of above is only in order to illustrate technical scheme and unrestricted, although the present invention being described in detail with reference to better embodiment, it will be understood by those within the art that, technical scheme can be modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention.
Claims (22)
1. a vapor deposition mask, for forming electroluminescent material layer in panel substrate, it is characterized in that: this vapor deposition mask includes body membrane and is entrained in the magnetic-particle within this body membrane, this body membrane is resin material, this body membrane includes at least one pixel region, and each described pixel region is formed the first opening that evaporation is required.
Vapor deposition mask the most according to claim 1, it is characterised in that: this vapor deposition mask also includes that one first framework, described first framework have provided one second opening, and this first framework is the square shape structure of hollow, for supporting all sides of described body membrane.
Vapor deposition mask the most according to claim 2, it is characterised in that: this first framework is Invar material.
Vapor deposition mask the most according to claim 1, it is characterized in that: vapor deposition mask also includes one second framework, described second framework is provided with and runs through described second framework and at least one the 3rd corresponding with described at least one pixel region respectively opening, and the size of described 3rd opening is not less than the size of described pixel region.
Vapor deposition mask the most according to claim 1, it is characterised in that: described magnetic-particle is spherical.
Vapor deposition mask the most according to claim 5, it is characterised in that: the diameter of described magnetic-particle is less than 1 μm.
Vapor deposition mask the most according to claim 6, it is characterised in that: the diameter of described magnetic-particle is less than 20nm.
Vapor deposition mask the most according to claim 1, it is characterised in that: described magnetic-particle is oval or irregular polygon.
Vapor deposition mask the most according to claim 8, it is characterised in that: the longest diameter of described magnetic-particle is less than 1 μm.
Vapor deposition mask the most according to claim 1, it is characterised in that: the material of this body membrane is polyimide resin.
11. vapor deposition masks according to claim 1, it is characterised in that: on this pixel region, form this first opening by laser technology.
12. vapor deposition masks according to claim 1, it is characterised in that: the combination of any one or several in this magnetic-particle chosen from Fe, cobalt, nickel and alloy thereof or the compound of any one or several, ferrum oxide, ferroso-ferric oxide.
The evaporation coating method of 13. 1 kinds of vapor deposition masks used as described in claim 1 to 12 any one, the method comprises the steps:
This vapor deposition mask is adhered on above panel substrate；
Electroluminescent material is provided, to form electroluminescent material layer in panel substrate from this vapor deposition mask side to this panel substrate.
The manufacture method of 14. 1 kinds of vapor deposition masks, this vapor deposition mask is for forming electroluminescent material layer in panel substrate, and the method comprises the steps:
Form a body membrane, and during forming this body membrane, mix magnetic-particle；
This body membrane defines at least one pixel region, and on this at least one pixel region, forms the first opening that evaporation is required.
The manufacture method of 15. vapor deposition masks according to claim 14, it is characterised in that: the method also comprises the steps:
One substrate is provided, offers second opening the first framework with formation hollow on the substrate, and this body membrane being mixed with this magnetic-particle is arranged at this first framework surface.
The manufacture method of 16. vapor deposition masks according to claim 15, it is characterised in that: also comprise the steps: before this body membrane is arranged at this first framework surface
One second substrate is provided, and this body membrane is attached at a surface of this second substrate；
Another surface that described second substrate is relative with this body membrane forms at least one threeth opening corresponding with this at least one pixel region, so that this second substrate forms the second framework；
This second framework is attached at away from the surface of this body membrane the surface of this first framework.
The manufacture method of 17. vapor deposition masks according to claim 14, it is characterised in that: described magnetic-particle is spherical, oval or irregular polygon.
The manufacture method of 18. vapor deposition masks according to claim 17, it is characterised in that: the longest diameter of described magnetic-particle is less than 1 μm.
The manufacture method of 19. vapor deposition masks according to claim 18, it is characterised in that: the longest diameter of described magnetic-particle is less than 20nm.
The manufacture method of 20. vapor deposition masks according to claim 14, it is characterised in that: at least one penetrate pixel region to form this first opening by laser according to this.
The manufacture method of 21. vapor deposition masks according to claim 14, it is characterised in that: this body membrane is resin material.
The manufacture method of 22. vapor deposition masks according to claim 14, it is characterised in that: the combination of any one or several in this magnetic-particle chosen from Fe, cobalt, nickel and alloy thereof or the compound of any one or several, ferrum oxide, ferroso-ferric oxide.
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| CN2015100526755 | 2015-02-02 | ||
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| CN107507915A (en) * | 2017-08-09 | 2017-12-22 | 武汉华星光电半导体显示技术有限公司 | A kind of substrate and evaporation coating device for manufacturing organic electroluminescence display panel |
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Application publication date: 20161207 |