CN105738281A - Single-grain continuous scratching interference behavioral testing method for spherical grinding head pre-maintenance rigid and brittle test piece - Google Patents
Single-grain continuous scratching interference behavioral testing method for spherical grinding head pre-maintenance rigid and brittle test piece Download PDFInfo
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Abstract
The invention discloses a single-grain continuous scratching interference behavior testing method for a spherical grinding head pre-maintenance rigid and brittle test piece, and belongs to the field of material performance testing and precision and ultra-precision machining in machining.The method comprises the steps that the rigid and brittle test piece is fixed to an electric spindle, and online movable balance is performed on the test piece; then, a spherical grinding head is adopted for performing disc maintenance on the test piece, and the requirement for testing needed end face run-out and roughness is met; then, a reloading top end is fixedly connected with a tool head for single grains, and tool setting is performed in the displacement process; finally, scratching testing is performed, the test piece rotates at the designated rotating speed, a tool head performs radial feed with the designated cutting depth, interference spiral scratches are performed on the end face of the test piece, and a measuring system collects scratching force, acoustic emission signals and other physical quantity in the process.According to the single-grain continuous scratching interference behavior testing method, interference behaviors among the grains in the high-speed grinding process can be simulated, and the related testing result can be used for intensive study of a grinding mechanism and optimization of grinding parameters.
Description
Technical field
The invention belongs to the material properties test in machining and precise and ultraprecise machining field, be specifically related to a kind of spherical mounted point and repair the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance.
Background technology
Grinding process can be regarded as abrasive surface and arranges uneven in a large number, is distributed the working angles that irregular different abrasive particle completes jointly.In scientific research, often complicated phenomenon is abstracted into the pattern of a kind of simplification, the problem inquiring into some essence.The shear action constituting the tiny abrasive particle of emery wheel is the basis of grinding, and single abrasive grain cutting, as the basic model of grinding, becomes a kind of important means of the complicated ablation of understanding.In actual grinding process, abrasive particle on the grinding tools such as emery wheel interferes on the same position of machined surface, the form that abrasive particle removes material is made to complicate, therefore the forming on often same position many abrasive grain cuttings, plough the result of plough or scratching effect of machined surface in abrasive machining, therefore studies many abrasive particles interference effect from the teeth outwards power to analyzing in grinding process, temperature, the chip formation mechanism of material and workpiece machining surface quality and has important directive significance.
Many scholars have experimentally done substantial amounts of work single abrasive particle scratching; relevant test method and device thereof are developed; but the shortcoming due to research technique and assay device; all without the impact considering that many abrasive particles interfere; the research that many abrasive particles interfere also rests on simulation stage mostly; as utilized the material of Boolean calculation emulation abrasive particle interventional procedures to remove, or numerical value emulation method is utilized to be modeled the interventional procedures of many abrasive particles analyzing.Also a small amount of many abrasive particles of research are had to interfere the device of impact, as many abrasive particles are arranged with certain relative angle and radial spacing, the effect interfered is produced when scratching, but the arrangement error that many abrasive particles are on radial spacing relatively big (resolution 10 μm), therefore when many abrasive particles interfere, the control accuracy of actual amount of interference is not higher than 10 μm, therefore the interference testing of some large scales (more than 100 μm) abrasive particle can only be carried out, device structure is complicated simultaneously, adjustment process is largely dependent upon the experience of operator, it is not carried out automatization to adjust and position feedback control, thus it is difficult to the test of high-precision act of interference.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art part, provide a kind of spherical mounted point and repair the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, dish and precise motion feedback control is repaiied in conjunction with Ultra-precision Turning, utilize single abrasive particle can make the scratching act of interference of many abrasive particles, device structure is simple, and the control accuracy of abrasive particle amount of interference is high；Dependence test result may be used for grinding mechanism and the further investigation of grinding skin forming process, thus optimizing grinding parameter, improves product quality.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of spherical mounted point repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, including:
1) being fixed on electro spindle by hard crisp test specimen, test specimen can be rotated by electro spindle；This test specimen is carried out on-line dynamic balancing；
2) adopting spherical mounted point that this test specimen is repaiied dish, be better than IT1 level forming end face run-out amount in surface of test piece, what surface average roughness Ra was better than 10nm repaiies disk area, specifically comprises the following steps that
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
3) spherical mounted point touching tool setting gauge, it is determined that repair disk area and the tool setting gauge difference in height h to cutter plane0；Spherical mounted point is replaced by top and is connected with the tool heads of single abrasive particle, the abrasive particle on tool heads top touching tool setting gauge, then shifting h on the axial direction that tool heads is rotated along test specimen0+ δ, so that the abrasive particle on tool heads top is positioned at test specimen and repaiies δ place above disk area, completes cutter；
4) tool heads level is moved to directly over the scratching point repairing disk area, and move down δ+apSo that the scratching degree of depth is ap；Scratching radius R according to the scratching speed v that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece；According to the interference ratio ρ that need to test, the arc radius r of single abrasive particle, scratching degree of depth ap, pass throughCalculate the radial feed speed s of tool heads；Test specimen rotates according to setting speed n, and tool heads is according to radial feed speed s and scratching degree of depth apAlong test specimen radial feed, so that abrasive particle is repairing disk area scratching and is being formed the cut of predetermined interference degrees, by the data in the measurement system acquisition scratching process that is connected with tool heads in this process.
In one embodiment: described step 4) in, tool heads is according to radial feed speed s and scratching degree of depth apAlong while test specimen radial feed along the direction feeding of test specimen rotation axis.
In one embodiment: described abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, abrasive particle is shaped as spherical, conical or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads is pressure head.
In one embodiment: described test specimen is disc；Described when repairing dish, the feeding distance of spherical mounted point is less than test specimen radius, and repairing disk area is annular.
In one embodiment: described measurement system is dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；Described tool heads is connected with dynamometer and acoustic emission system.
In one embodiment: the natural frequency of described dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of described data collecting card is higher than 2M/s.
In one embodiment: described tool heads is superior to 0.1 μm in the positioning precision of the axial direction rotated along test specimen and radial direction, this positioning precision coordinates control by displacement transducer and corresponding position feedback system.
In one embodiment: the positioning precision of described tool setting gauge is better than 0.1 μm.
In one embodiment: described cut is continuous helical shape cut, and the cut number of turns is more than 3.
In one embodiment: described tool heads axis is parallel to test specimen rotation axis；Described spherical mounted point axis is parallel to test specimen rotation axis；Repair the direction of rotation of test specimen and the direction of rotation of spherical mounted point during dish identical or contrary.
Except having explanation, the connected mode between the single processing procedure of each device involved in the present invention and each device is this area routine techniques, is not described in detail at this.
The technical program is compared with background technology, and it has the advantage that
1. the high precision measurement method of single abrasive particle scratching act of interference disclosed in this invention; utilize single abrasive particle can make the scratching act of interference of many abrasive particles; can be used for studying single abrasive particle act of interference under the different scratching degree of depth, different interference degrees, different scratching speed, due to be continuous scratching can accurate stable collect scratching force signal；Device structure is simple, and the control accuracy of abrasive particle amount of interference is high；Dependence test result may be used for grinding mechanism and the further investigation of grinding skin forming process, thus optimizing grinding parameter, improves product quality.
2. main shaft-sample system is carried out on-line dynamic balancing by the present invention, it is to avoid significantly end face run-out in high-speed rotation or circular runout, thus keep the stable contact condition between abrasive particle and test specimen；Simultaneously, utilize spherical mounted point that test specimen is carried out on-line machining, improve form accuracy and the surface smoothness of test specimen simultaneously, improve test specimen rotating accuracy and grain motion precision, thus the relative motion precision that ensure that between abrasive particle and test specimen, coordinate dynamic balancing, further ensure and can contact continually and steadily in relatively dash wiping distance between abrasive particle and test specimen, thus realizing the high-speed, high precision scratching test of abrasive particle.
3., according to the general knowledge of this area, the machined surface quality of test specimen must be better than the surface quality that relevant grinding process obtains, it is desirable to exceeding an order of magnitude, the cut test result obtained could be used for the analysis of grinding process cutting mechanisms；Owing to the present invention is greatly improved the quality of surface of test piece, therefore, it is possible to meet the requirement of the high accuracy analysis such as grinding process cutting mechanisms, can be used for the research of Material Removal Mechanism in process of friction and wear and grinding.
4. the abrasive particle scratching degree of depth is more than the stability of more than 5 times guarantee scratchings of surface of test piece fluctuating quantity; owing to the present invention is greatly improved the quality of surface of test piece; surface of test piece precision and fineness are good; even the abrasive particle of small grain size also can realize stable high accuracy scratching; therefore may be used for single abrasive particle scratching test of small grain size abrasive particle; expand the range of application of the present invention further, be also being greatly facilitated single abrasive particle scratching experimental technique of the industry.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is the method for testing principle schematic of the present invention.
Fig. 2 be the present invention repair dish Principle of Process schematic diagram.
Fig. 3 is the act of interference schematic diagram of the present invention.
Fig. 4 repaiies the contrast of surface of test piece three-dimensional appearance before and after dish in the embodiment of the present invention, wherein Fig. 4 a for before repairing dish (through conventional planar accurate grinding processes), Fig. 4 b is for after repairing dish.
Fig. 5 repaiies the contrast of surface of test piece end face run-out amount before and after dish in the embodiment of the present invention, wherein Fig. 5 a for before repairing dish (through conventional planar accurate grinding processes), its end face run-out amount maximum is up to 29.1 μm；Fig. 5 b is for after repairing dish, and its end face run-out amount maximum is 9.1 μm.
Accompanying drawing labelling: test specimen 1, vacuum cup 2, tool heads 3, repair disk area 4, tool setting gauge 5, spherical mounted point 6.
Detailed description of the invention
Illustrate present disclosure by the examples below:
Embodiment 1
A kind of spherical mounted point repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, and the device adopted includes:
Lathe, the hard crisp test specimen 1 of disc is installed on the electro spindle of lathe by vacuum cup 2, and test specimen 1 can be rotated by electro spindle；
Dynamic balance instrument, for carrying out on-line dynamic balancing to test specimen 1；
Spherical mounted point 6, for repairing dish to test specimen 1 end face；This spherical mounted point 6 is installed in support dismantledly, and is installed in lathe movably by support；Spherical mounted point 6 axis is parallel to test specimen 1 rotation axis；
Tool heads 3, is used for carrying out scratching test；This tool heads 3 top is connected with the abrasive particle of single；This tool heads 3 can replace mounting or dismounting mutually with spherical mounted point be installed in support, and is installed in lathe movably by support；Tool heads 3 axis is parallel to test specimen 1 rotation axis, tool heads 3 can test specimen 1 rotate axial direction and move in the radial direction, and it being superior to 0.1 μm in the positioning precision of both direction, the control with grating scale and corresponding position feedback system thereof of this positioning precision ensures；
Tool setting gauge 5, for carrying out cutter to spherical mounted point 6 and tool heads 3, positioning precision is better than 0.1 μm；Be installed in lathe, and and relative position between test specimen 1 keep fixing；
Measurement system, for dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；This tool heads 3 is connected with dynamometer and acoustic emission system；Data acquisition card signal connects computer；The natural frequency of dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of data collecting card is higher than 2M/s.
Air-cooler, is used for the spherical mounted point repaiied in dish process and test specimen, and tool heads and the test specimen in scratching process blows cooling.
Concrete method of testing is as follows:
1) being fixed on the electro spindle of lathe by the sapphire wafer of 6 inches (diameter is about 150mm) and test specimen 1 vacuum cup 2 clamping, test specimen 1 can be rotated by electro spindle；With dynamic balance instrument, this test specimen 1 is carried out on-line dynamic balancing, to reduce the test specimen 1 vibration when high speed rotating, thus ensureing that in scratching process, abrasive particle can stably contact with test specimen 1；
2) adopt spherical mounted point 6 that this test specimen 1 is repaiied dish, first carry out roughing, carry out polish again, to form end face run-out amount 3 μm on test specimen 1 surface, the annular of surface average roughness Ra 10nm repaiies disk area 4, to reduce test specimen 1 end face run-out amount, improving surface quality, being further ensured that in scratching process, abrasive particle can stably contact with test specimen 1；Specifically comprise the following steps that
2-1) dish is repaiied in spherical mounted point roughing: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, simultaneously outside test specimen 1 with the cutting-in of 10 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is 45mm；
2-2) dish is repaiied in spherical mounted point polish: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, simultaneously outside test specimen with the cutting-in of 2 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is 45mm；
Repair the contrast of test specimen 1 three-dimensional surface shape and end face run-out amount before and after dish and see Fig. 4 and Fig. 5 respectively；
3) spherical mounted point 6 touches tool setting gauge 5, it is determined that repair disk area 4 and the tool setting gauge 5 difference in height h to cutter plane0；Spherical mounted point 6 is taken off from support, it is replaced by the tool heads 3 that top plating is connected with the spherical wear particles of single radius 0.1mm, tool heads 3 top moves closer to tool setting gauge 5, when measuring system data and producing sudden change, the abrasive particle on representational tool head 3 top just touches tool setting gauge 5 to cutter plane, then shifting h on axial direction tool heads 3 rotated along test specimen0+ δ, so that the abrasive particle on tool heads 3 top is positioned at test specimen 1 and repaiies δ place above disk area 4, completes cutter, thus can accurately control the scratching degree of depth when ensureing follow-up test；
4) every test parameter is calculated:
Scratching radius R (mm) according to the scratching speed v (m/s) that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece 1；
Among the present embodiment, the scratching speed v of required test takes 30～60m/s, it is 30～75mm that annular repaiies the radius of disk area, repair the radius carrying out scratching test in disk area be also set to 30～75mm at this, using the range of speeds of this scratching speed and radius calculation testing piece and take a suitable intermediate value 8000rpm as rotating speed n；With this understanding, scratching radius R corresponding to the scratching speed of 30m/s the is corresponding scratching speed that scratching radius R is 35.8mm, 60m/s is 71.6mm；
Interference degrees is generally with interfering ratio ρ (mm/r2) characterize, interfere ratio to be defined as:
Wherein, s (mm/r) for tool heads every turn along the test specimen amount of feeding radially, for the radial feed speed of characterization tool head；L (mm) is scratching width；The arc radius that r (mm) is single abrasive particle, arc radius is the radius of the circular arc of the two-dimensional section of abrasive particle, and when abrasive particle is spherical, arc radius is equal with abrasive particle radius；ap(mm) for the scratching degree of depth；
According to the interference ratio ρ that need to test, the arc radius r and scratching degree of depth a of single abrasive particlep, utilize the defined formula of above-mentioned interference ratio, pass throughCalculate the radial feed speed s obtaining tool heads；
Among the present embodiment, the interference ratio ρ of required test is set to 25%, 50%, 75%；The arc radius r of single spherical wear particles is 0.1mm；Scratching degree of depth apIt is set to 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, calculates corresponding s value respectively.
As required, in scratching process, it is possible to adjust tool heads and make its axis direction upper feeding rotated at test specimen 1, make scratching degree of depth apChange, the scratching degree of depth a of two adjacent rings cutpDifference be calculated as h, such that it is able to study single abrasive particle act of interference under the different scratching degree of depth；In the present embodiment, h=0.
Tool heads 3 level is moved to and repaiies directly over the setting scratching point of disk area 4, and move down δ+apTo reach to set scratching degree of depth ap；Open cold blower fan, makes cold wind alignment tools 3 and test specimen 1 cool down；Test specimen 1 rotates according to above-mentioned setting speed n=8000rpm, and tool heads 3 is according to the radial feed speed s set and scratching degree of depth apAlong test specimen 1 radial feed, in conjunction with the rotation of test specimen 1, so that abrasive particle is repairing the continuous helical shape cut that the formation of disk area 4 scratching interferes ratio to be ρ, the cut number of turns is more than 3；Scratching process gathers the data in scratching process by the dynamometer being connected with tool heads 3 and acoustic emission system, and by signal amplifier transmission to data collecting card, transmit again to computer and be calculated, the physical quantitys such as scratching power, acoustic emission signal can be obtained, for studying the act of interference under above-mentioned various condition.
Embodiment 2
1) being fixed on the electro spindle of lathe by the sapphire wafer of 6 inches (diameter is about 150mm) and test specimen 1 vacuum cup 2 clamping, test specimen 1 can be rotated by electro spindle；With dynamic balance instrument, this test specimen 1 is carried out on-line dynamic balancing, to reduce the test specimen 1 vibration when high speed rotating, thus ensureing that in scratching process, abrasive particle can stably contact with test specimen 1；
2) adopt spherical mounted point 6 that this test specimen 1 is repaiied dish, first carry out roughing, carry out polish again, to form end face run-out amount 3 μm on test specimen 1 surface, the annular of surface average roughness Ra 10nm repaiies disk area 4, to reduce test specimen 1 end face run-out amount, improving surface quality, being further ensured that in scratching process, abrasive particle can stably contact with test specimen 1；Specifically comprise the following steps that
2-1) dish is repaiied in spherical mounted point roughing: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, simultaneously outside test specimen 1 with the cutting-in of 10 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is 45mm；
2-2) dish is repaiied in spherical mounted point polish: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, simultaneously outside test specimen with the cutting-in of 2 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is 45mm；
3) spherical mounted point 6 touches tool setting gauge 5, it is determined that repair disk area 4 and the tool setting gauge 5 difference in height h to cutter plane0；Spherical mounted point 6 is taken off from support, it is replaced by the tool heads 3 that top plating is connected with the spherical wear particles of single radius 0.2mm, tool heads 3 top moves closer to tool setting gauge 5, when measuring system data and producing sudden change, the abrasive particle on representational tool head 3 top just touches tool setting gauge 5 to cutter plane, then shifting h on axial direction tool heads 3 rotated along test specimen0+ δ, so that the abrasive particle on tool heads 3 top is positioned at test specimen 1 and repaiies δ place above disk area 4, completes cutter, thus can accurately control the scratching degree of depth when ensureing follow-up test；
4) every test parameter is calculated:
Scratching radius R (mm) according to the scratching speed v (m/s) that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece 1；
Among the present embodiment, the scratching speed v of required test takes 10～20m/s, it is 30～75mm that annular repaiies the radius of disk area, repair the radius carrying out scratching test in disk area be also set to 30～75mm at this, using the range of speeds of this scratching speed and radius calculation testing piece and take a suitable intermediate value 3000rpm as rotating speed n；With this understanding, scratching radius R corresponding to the scratching speed of 10m/s the is corresponding scratching speed that scratching radius R is 31.8mm, 20m/s is 63.6mm；
According to the interference ratio ρ that need to test, the arc radius r and scratching degree of depth a of single abrasive particlep, pass throughCalculate the radial feed speed s obtaining tool heads；
Among the present embodiment, the interference ratio ρ of required test is set to 25%, 50%, 75%；The arc radius r of single spherical wear particles is 0.2mm；Scratching degree of depth apIt is set to 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, calculates corresponding s value respectively；The axis direction that tool heads rotates along test specimen with the speed of 0.05mm/s while with s radial feed is to lower feeding, so that the scratching degree of depth a of two adjacent rings cutpDifference h=0.1 μm.
Tool heads 3 level is moved to and repaiies directly over the setting scratching point of disk area 4, and move down δ+apTo reach to set scratching degree of depth ap；Open cold blower fan, makes cold wind alignment tools 3 and test specimen 1 cool down；Test specimen 1 rotates according to above-mentioned setting speed n=3000rpm, and tool heads 3 is according to the radial feed speed s set and scratching degree of depth apAlong test specimen 1 radial feed, simultaneously with the speed axial feed of 0.05mm/s, in conjunction with the rotation of test specimen 1, so that abrasive particle is repairing the continuous helical shape cut that the formation of disk area 4 scratching interferes ratio to be ρ, the cut number of turns is more than 3；Scratching process gathers the data in scratching process by the dynamometer being connected with tool heads 3 and acoustic emission system, and by signal amplifier transmission to data collecting card, transmit again to computer and be calculated, the physical quantitys such as scratching power, acoustic emission signal can be obtained, for studying the act of interference under above-mentioned various condition.
As required, described hard brittle material can also be pottery, silicon chip.
In the embodiment of the present invention, for ease of describing, single abrasive particle is spherical, but it is not limited thereto, abrasive particle shape can also be cone or polygonal pyramid shape etc., the arc radius r of taper abrasive particle is the round end radius of taper abrasive particle, is commercially available round end radius on the market at the 50 μm～1mm taper abrasive particle not waited；Abrasive particle can be diamond, CBN (cubic boron nitride), oxide ceramics or nitride ceramics；Abrasive particle shape can also be cone or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads can be pressure head or other fixed grain form.
As required, repairing the parameter of dish and adjust in following scope and carry out one or many and repair dish, can form end face run-out amount in surface of test piece and be better than IT1 level, what surface average roughness Ra was better than 10nm repaiies disk area:
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；Repair during dish the direction of rotation of test specimen and the direction of rotation of spherical mounted point can identical can also be contrary, speed of related movement can be increased on the contrary, improve crudy；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；Repair during dish the direction of rotation of test specimen and the direction of rotation of spherical mounted point can identical can also be contrary, speed of related movement can be increased on the contrary, improve crudy.
Comparative example
It should be noted that, test condition in this comparative example is set between adjacent cut not interfere, so that the difference of paired observation cut form, scratching effect, but this comparative example still can reflect the act of interference test adopting the method for testing of the present invention can realize high-speed, high precision.
Take hard crisp test specimen, after conventional planar accurate grinding processes, surface of test piece is divided into two regions, one of them region carries out repairing dish according to the dish step of repairing of the present invention, making its surface quality reach end face run-out amount and be better than IT1 level, surface average roughness Ra is better than 10nm, is designated as and repaiies disk area；Another region does not carry out repairing dish, is designated as and does not repair disk area.
The method of testing that above-mentioned test specimen adopts the present invention is carried out single the continuous scratching of abrasive particle, repairing disk area and do not repairing formation cut in disk area under same test parameter, scratch depth is only small, micron order can be reached, result shows, when scratch depth is only small, the cut repairing disk area forms coherent spiral type, it is distributed in uniform intervals, detect its depth direction error less than 1 μm/1mm, show that abrasive particle all can contact in the relatively dash wiping distance repairing in disk area continually and steadily with test specimen, such that it is able to the high-speed, high precision scratching act of interference for abrasive particle is tested；And the cut not repairing disk area can not form coherent spiral type, differ in cut interval, the cut depth, scratch width are respectively provided with macroscopic diversity, it was shown that cannot contact continually and steadily between abrasive particle and test specimen, are more not used to the high-speed, high precision scratching act of interference test of abrasive particle.
The above, be only present pre-ferred embodiments, therefore can not limit scope of the invention process according to this, and the equivalence namely made according to the scope of the claims of the present invention and description changes and modifies, and all should still belong in the scope that the present invention contains.
Claims (10)
1. the continuous scratching act of interference method of testing of single abrasive particle that a spherical mounted point repaiies hard crisp test specimen in advance, it is characterised in that: including:
1) being fixed on electro spindle by hard crisp test specimen, test specimen can be rotated by electro spindle；This test specimen is carried out on-line dynamic balancing；
2) adopting spherical mounted point that this test specimen is repaiied dish, be better than IT1 level forming end face run-out amount in surface of test piece, what surface average roughness Ra was better than 10nm repaiies disk area, specifically comprises the following steps that
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
3) spherical mounted point touching tool setting gauge, it is determined that repair disk area and the tool setting gauge difference in height h to cutter plane0；Spherical mounted point is replaced by top and is connected with the tool heads of single abrasive particle, the abrasive particle on tool heads top touching tool setting gauge, then shifting h on the axial direction that tool heads is rotated along test specimen0+ δ, so that the abrasive particle on tool heads top is positioned at test specimen and repaiies δ place above disk area, completes cutter；
4) tool heads level is moved to directly over the scratching point repairing disk area, and move down δ+apSo that the scratching degree of depth is ap；Scratching radius R according to the scratching speed v that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece；According to the interference ratio ρ that need to test, the arc radius r of single abrasive particle, scratching degree of depth ap, pass throughCalculate the radial feed speed s of tool heads；Test specimen rotates according to setting speed n, and tool heads is according to radial feed speed s and scratching degree of depth apAlong test specimen radial feed, so that abrasive particle is repairing disk area scratching and is being formed the cut of predetermined interference degrees, by the data in the measurement system acquisition scratching process that is connected with tool heads in this process.
2. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: described step 4) in, tool heads is according to radial feed speed s and scratching degree of depth apAlong while test specimen radial feed along the direction feeding of test specimen rotation axis.
3. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterized in that: described abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, abrasive particle is shaped as spherical, conical or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads is pressure head.
4. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: described test specimen is disc；Described when repairing dish, the feeding distance of spherical mounted point is less than test specimen radius, and repairing disk area is annular.
5. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterized in that: described measurement system is dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；Described tool heads is connected with dynamometer and acoustic emission system.
6. a kind of spherical mounted point according to claim 5 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: the natural frequency of described dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of described data collecting card is higher than 2M/s.
7. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterized in that: described tool heads is superior to 0.1 μm in the positioning precision of the axial direction rotated along test specimen and radial direction, this positioning precision coordinates control by displacement transducer and corresponding position feedback system.
8. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: the positioning precision of described tool setting gauge is better than 0.1 μm.
9. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: described cut is continuous helical shape cut, and the cut number of turns is more than 3.
10. a kind of spherical mounted point according to claim 1 repaiies the continuous scratching act of interference method of testing of single abrasive particle of hard crisp test specimen in advance, it is characterised in that: described tool heads axis is parallel to test specimen rotation axis；Described spherical mounted point axis is parallel to test specimen rotation axis；Repair the direction of rotation of test specimen and the direction of rotation of spherical mounted point during dish identical or contrary.
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