CN105698679B - Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part - Google Patents
Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part Download PDFInfo
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- CN105698679B CN105698679B CN201610145388.3A CN201610145388A CN105698679B CN 105698679 B CN105698679 B CN 105698679B CN 201610145388 A CN201610145388 A CN 201610145388A CN 105698679 B CN105698679 B CN 105698679B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- General Physics & Mathematics (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part.There are the X-axis guide rail being connect with main shaft and the Z axis guide rail being connect with Y-axis lifting platform on lathe, main shaft has support base equipped with 3R magic chucks and suction to have the vacuum cup of standard ball one, and transition piece is connect with 3R magic chucks and standard ball two；Measurement sensor fixing piece is located at before Y-axis lifting platform and has measurement sensor.Workpiece is fixed on main shaft, 3R quick-speed jigs will be fixed on main shaft in position detecting mechanism in Z axis guide rail；Driving spindle and Y-axis lifting platform perform spherical crown vertex scan operation to standard ball two, find the position P of standard ball two2(x,y)；Driving spindle and Y-axis lifting platform find out Δ P and carry out two-dimensional section or three dimensional pattern detection, measurement result is obtained after system processing.The achievable fine adjustment of displacement sensor in the height direction of the present invention has the ability for the three-dimensional surface reconstruct for realizing a variety of typical feature structures of spherical surface.
Description
Technical field
The present invention relates to a kind of ultra-precision machine tool processing part in level detecting apparatus and method, especially machine tooling zero
Part technical field.
Background technology
At present, most of in level detecting apparatus is contact, using contact type probe as performing the core component detected,
Although such measuring device has higher Mechanical Reliability, in measurement process, due to measuring probe and tested part table
Face comes into full contact with, and scuffing can be generated, while can also bring measurement error into tested part surface to a certain extent by measuring probe,
This can have an impact the precision of measurement result, cause the untrue of measured value.Only minority is non-contact in level detecting apparatus
Formula, non-contact measurement can efficiently against it is above-mentioned existing for contact type measurement the defects of and deficiency, can be to a certain degree
Upper raising measurement accuracy, it is already present at this stage contactless to carry out two-dimentional inspection to being detected workpiece in level detecting apparatus
It surveys, does not have three dimensional detection ability, therefore this kind equipment is for spherical surface, aspherical, non-structural surface and non-rotational symmetric table
The detection in face has some limitations.
Invention content
The purpose of the present invention is to provide suitable for the non-contact in level detecting apparatus and side of ultra-precision machine tool processing part
Method, the device are moved one-dimensionally platform as machine using the confocal displacement sensor of white light as measurement sensor, and using PI ultraprecises
The Y-axis lifting platform of bed is, it can be achieved that the fine adjustment of the confocal displacement sensor of white light in the height direction.The device and method is realized
To the face type on work piece surface and the accurate measurement of roughness, while the device has and realizes spherical surface, aspherical, non-structural
The ability of the three-dimensional surface reconstruct of the typical feature structure such as surface and non-rotational symmetric surface.
Realize above-mentioned purpose, the present invention takes following technical proposals：Suitable for the non-contact of ultra-precision machine tool processing part
In level detecting apparatus, including X-axis guide rail, Z axis guide rail, position detecting mechanism, standard ball one, main shaft, standard ball two, support base,
3R magic chucks, transition piece and vacuum cup；Described includes Y-axis lifting platform, measurement sensor and survey in position detecting mechanism
Quantity sensor fixing piece；
The X-axis guide rail and Z axis guide rail is each attached to the upper surface of machine tool main body, and main shaft passes through main shaft engine base and X-axis
Guide rail is fixedly connected, and Y-axis lifting platform is fixedly connected by Y-axis engine base with Z axis guide rail, the upper surface of the main shaft and support
The lower surface of seat is fixedly connected, and support base one end adjacent with the Y-axis lifting platform is equipped with 3R magic chucks, institute
The 3R magic chucks stated are fixedly connected with one end of transition piece, and the other end of the transition piece is equipped with standard ball two；Main shaft
Upper one end adjacent with Y-axis lifting platform is fixedly installed vacuum cup, and the standard ball one is located at two homonymy of standard ball and suction
It is attached on vacuum cup, the standard ball two is shifted to install with standard ball one, and measurement sensor fixing piece is arranged on Y-axis lifting
It is fixedly connected on front side of platform and with Y-axis lifting platform, the measurement sensor fixing piece leading flank is installed with measurement sensor.
It is a kind of to utilize the non-contact non-contact inspection in place that ultra-precision machine tool processing part is realized in level detecting apparatus
The method of survey, the method and step are as follows：
Step 1：To double standard ball sizings；
（One）, using the position of inductance amesdial adjustment criteria ball one, one centre of sphere of standard ball is made to be located at lathe master
On axis axis of rotation；
（Two）, driving spindle X-axis guide rail move so as to drive one synchronizing moving of standard ball, make standard ball one realize X-axis
Direction moves；Driving Y-axis lifting platform moves up and down, so as to drive measurement sensor fixing piece and measurement sensor along Y direction
It is synchronized with the movement, the one spherical crown pole location of standard ball for making measurement sensor alignment described records X-axis coordinate at this time and measures biography
Sensor fixing piece Y-axis position P1 (x, y), setting position P1 (x, y) be standard ball single-revolution center；
（Three）, standard ball one removed from main shaft, 3R magic chucks and its subsidiary transition piece and standard ball two are pacified
On support base, the two spherical crown vertex scan operation of standard ball is performed, later, adjustment measurement sensor position so that
The spherical crown pole location of measurement sensor alignment criteria ball two records X-axis coordinate at this time and measurement sensor fixing piece in Y-axis
Position P2 (x, y), setting position P2 (x, y) be two reference center position of standard ball；
（Four）, by reference center position P2 (x, y) phase of the centre of gyration position P1 (x, y) of standard ball one and standard ball two
Coordinate is answered to make the difference to obtain relative position deviation Δ P, with this position deviation Δ P of software records and is preserved（It is saved in configuration file
In, it completes determined in level detecting apparatus installation site in this way）, later, will be taken in position detecting mechanism slave bed main body
Under, 3R magic chucks and its subsidiary transition piece and standard ball two are removed from main shaft；
Step 2：Detection in place；
（One）, by the absorption of workpieces processed on main shaft, Z axis guide rail will be slidably mounted on again in position detecting mechanism
On, the subsidiary standard ball two of 3R quick-speed jigs and transition piece are fixed on support base；
（Two）, driving spindle and Y-axis lifting platform, spherical crown vertex scan operation is performed to standard ball two, to find standard ball
Two position P2 (x, y)；
（Three）, after the position P2 (x, y) of standard ball two is obtained, respectively drive main shaft and moved along X-direction, drive Y-axis
Lifting platform is moved along Y direction, and it is respectively the projection in X-axis and Y direction that the two relative position deviation Δ P, which is, has been moved
Cheng Hou so that the optical axis of measurement sensor is overlapped with main shaft rotation center；
（Four）, carry out corresponding two-dimensional section according to the geometrical construction of processing part or three dimensional pattern detects, measure
Data obtain final measurement result, and be shown in the interactive interface of control software after the processing of control software system.
Compared with prior art, the beneficial effects of the invention are as follows：This patent is surveyed by core of the confocal displacement sensor of white light
Component is measured, and the fine adjustment of short transverse, the method pair based on double standard balls are carried out using PI motion platforms as ancillary equipment
Main shaft rotation center line has carried out precision calibration and the relative position relation between two standard balls is determined.The present invention has pair
The characteristic features surfaces such as plane, spherical surface, aspherical, micro-structure and non-rotational symmetric surface carry out the ability of three-dimensional measurement, simultaneously
Measurement accuracy is increased substantially, can reach within 100nm, stablizes in addition, the present invention is also equipped with easy to operate, control, is integrated
The features such as degree is higher.
Description of the drawings
Fig. 1 is the non-contact overall structure axis in level detecting apparatus for being suitable for ultra-precision machine tool processing part of the present invention
Mapping；
Fig. 2 is the in-place detection system composition frame chart in level detecting apparatus for including the present invention；
Fig. 3 is machine control module structure diagram；
Fig. 4 is the optical schematic diagram of the measurement sensor of Fig. 1；
Fig. 5 is spherical crown fixed point scanning schematic diagram；
Component names and label shown in figure are as follows：
1- machine tool main bodies；2-X axis rails；3-Y axis lifting platforms；4-Z axis rails；5- standard balls one；6- main shafts；7- standard balls
Two；8- support bases；9-3R magic chucks；10- transition pieces；11- measurement sensors；12- measurement sensor fixing pieces；13- vacuum
Sucker；14- is in position detecting mechanism；
A- white light sources；B- spectroscopes；C- prisms；The forming monochrome image point of D- light sources；D1- colored lights one；D2- colored lights
Two；D3- colored lights three；E- focus points；F- is detected workpiece surface；G- light holes；
H-X axis scans track；I-Y axis scans track；J- spherical crowns vertex.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the present invention is clearly and completely retouched
It states, it is clear that described embodiment is only the part of the embodiment of invention, instead of all the embodiments, based in the present invention
Embodiment, those of ordinary skill in the art's all other embodiments obtained without making creative work,
It shall fall within the protection scope of the present invention.
As shown in Figure 1, the invention discloses suitable for the non-contact in level detecting apparatus, packet of ultra-precision machine tool processing part
Include X-axis guide rail 2, Z axis guide rail 4, in position detecting mechanism 14, standard ball 1, main shaft 6, standard ball 27, support base 8,3R quick changes folder
Tool 9, transition piece 10 and vacuum cup 13；It is described position detecting mechanism 14 include Y-axis lifting platform 3, measurement sensor 11 and
Measurement sensor fixing piece 12；
The X-axis guide rail 2 and Z axis guide rail 4 is each attached to the upper surface of machine tool main body 1, main shaft 6 by main shaft engine base with
X-axis guide rail 2 is bolted to connection, and Y-axis lifting platform 3 is bolted to connection by Y-axis engine base and Z axis guide rail 4, described
The upper surface of main shaft 6 be fixedly connected with the lower surface of support base 8, the support base 8 is adjacent with the Y-axis lifting platform 3
One end 3R magic chucks 9 are installed, the 3R magic chucks 9 are fixedly connected with one end of transition piece 10, the transition
The other end of part 10 is equipped with standard ball 27；One end adjacent with Y-axis lifting platform 3, which is bolted, on main shaft 6 is provided with very
Suction disk 13, the standard ball 1 is located at 27 homonymy of standard ball and absorption is on vacuum cup 13, the standard ball 27
It is shifted to install with standard ball 1, measurement sensor fixing piece 12 is arranged on 3 front side of Y-axis lifting platform and passes through with Y-axis lifting platform 3
Bolt is fixedly connected, and 12 leading flank of measurement sensor fixing piece is installed with measurement sensor 11.
The measurement sensor 11 is the confocal displacement sensor of white light.
According to the electric-control system principle and software frame of current super precision lathe, the inspection in place of super precision lathe is realized
It surveys, needs to establish the hardware composition proposal based on Ultra Precise Lathe CNC System, first have to select suitable measurement sensor, and
It is required that the interface of measurement sensor can match with in-place detection system, it is signaling interface that analog output, which may be selected,.This hair
The bright data acquisition plan using DeltaTau company data acquisition modules, the motion control of the main shaft 6 and Y-axis lifting platform 3
Process, i.e. in-place detection system signal principle are：
As shown in Figures 1 and 2, analog signal is sent to by data collecting card, the data by measurement sensor 11
Data transmission, while the monitoring in real time of UMAC controllers and record main shaft 6, measurement sensing are carried out between capture card and UMAC controllers
The motion state of device fixing piece 12 and Y-axis lifting platform 3 realizes that information is handed between UMAC controllers and industrial control computer
Change, finally by industrial control computer realize main shaft 6 in X-axis guide rail 2, measurement sensor fixing piece 12 is in Y-axis lifting platform 3
Motion control of the upper and Y-axis lifting platform 3 in Z axis guide rail 4.
As shown in figure 3, the control software in the present invention is responsible for coordinated scheduling UMac controllers, microprocessor machine operation face
Plate, industrial personal computer or embedded computer and operating user interface.Control software uses modularized design and encapsulation, is based on
The multitask threaded design Machine-Tool Control software of Windows is divided into two layers up and down, and upper strata is user interface, including lathe shape
State display module interface, numerical control program editor module interface, UMac programs operation monitoring interface, fault diagnosis functions module circle
Face.In order to modules interface can free switching, be also provided with function switch module interfaces, design the window of response.Lathe
The bottom of control software is for the monitoring thread with microprocessor communication and the monitoring thread to communicate with UMac controllers.
Wherein, what serial monitoring thread was responsible for is that processing carries out instruction interaction with microprocessor；Operation panel scheduling thread is then responsible for behaviour
Make chief coordinator and the scheduling of panel feature.When user is when having pattern or button operation on operation panel, operation panel dispatches line
Journey is responsible for processing, identifies corresponding hardware instruction, and control instruction is sent to upper-layer user circle in the form of Thread Messages in time
The correspondingly received position in face.UMac monitoring threads are responsible for accessing the UMac service routines, user instruction are sent to UMac in time, together
When the information such as the state of each axis of lathe, the position of axis, speed are captured in time, be sent to conditions of machine tool monitoring interface.
The confocal sensor optical principle of white light generates axially continuous as shown in figure 4, beam of white light passes through prism C
Monochromatic light, the monochromatic light of a branch of specific wavelength focuses on body surface, reflexes to light hole G by spectroscope, light hole G rises
To filter action, reflection source is shielded, only the reflected light of focus point E is allowed to pass through, the monochromatic source across light hole G travels to
Spectroanalysis instrument is analyzed, and spectroanalysis instrument analyzes its monochromatic color, judgment object position.
A large amount of chips can be generated during due to machine tooling and sometimes for spray cutting fluid etc., it is in place in order to protect
Testing agency 14 needs that processing district will be removed in position detecting mechanism 14 in part process.It again will be in place after machining
Testing agency 14 reinstalls.In this way, Accurate Calibration is required in 14 phase of position detecting mechanism mounted on position detecting mechanism 14 every time
For the position of 6 axis of rotation of main shaft.In order to realize the calibration of part, when measurement, cannot remove part from main shaft 6, this
So that many occasion Accurate Calibration lathes become problem in the position of position detecting mechanism 14.In order to solve this problem, the present invention
It devises based on the non-contact non-contact method detected in place that ultra-precision machine tool processing part is realized in level detecting apparatus（Such as figure
Shown in 1 and Fig. 5）, the method and step is as follows：
Step 1：To double standard ball sizings；
（One）, using the position of inductance amesdial adjustment criteria ball 1, one 5 centre of sphere of standard ball is made to be located at lathe
On 6 axis of rotation of main shaft；
（Two）, driving spindle 6 move to drive one 5 synchronizing moving of standard ball in X-axis guide rail 2, make standard ball 1 realize
X-direction moves；Driving Y-axis lifting platform 3 moves up and down, so as to drive 11 edge of measurement sensor fixing piece 12 and measurement sensor
Y direction is synchronized with the movement, and measurement sensor 11 is made to be directed at the one 5 spherical crown pole location of standard ball, records X-axis seat at this time
Mark and measurement sensor fixing piece 12 Y-axis position P1 (x, y), setting position P1 (x, y) be one 5 centre of gyration position of standard ball
It puts；
（Three）, standard ball 1 removed from main shaft 6, by 3R magic chucks 9 and its subsidiary transition piece 10 and standard ball
27 are mounted on support base 8, perform the 27 spherical crown vertex scan operation of standard ball, later, adjust measurement sensor 11
Position so that the spherical crown pole location of 11 alignment criteria ball 27 of measurement sensor records X-axis coordinate at this time and measures sensing
Device fixing piece 12 Y-axis position P2 (x, y), setting position P2 (x, y) be 27 reference center position of standard ball；
（Four）, by the reference center position P2 (x, y) of the centre of gyration position P1 (x, y) of standard ball 1 and standard ball 27
Corresponding coordinate makes the difference to obtain relative position deviation Δ P, with this position deviation Δ P of software records and preserves（It is saved in configuration text
In part, complete determined in level detecting apparatus installation site in this way）, later, will be in position detecting mechanism 14 from machine tool main body 1
On remove, 3R magic chucks 9 and its subsidiary transition piece 10 and standard ball 27 are removed from main shaft 6；
Step 2：Detection in place；
（One）, by the absorption of workpieces processed on main shaft 6, Z axis will be slidably mounted on again in position detecting mechanism 14 and led
On rail 4, the subsidiary standard ball 27 of 3R quick-speed jigs 9 and transition piece 10 are fixed on support base 8；
（Two）, driving spindle 6 and Y-axis lifting platform 3, spherical crown vertex scan operation is performed to standard ball 27, to find standard
The position P2 (x, y) of ball 27；
（Three）, after the position P2 (x, y) of standard ball 27 is obtained, respectively drive main shaft 6 and moved along X-direction, drive Y
Axis lifting platform 3 is moved along Y direction, and it is respectively the projection in X-axis and Y direction that the two relative position deviation Δ P, which is, mobile
After the completion so that the optical axis of measurement sensor 11 is overlapped with 6 centre of gyration of main shaft；
（Four）, carry out corresponding two-dimensional section according to the geometrical construction of processing part or three dimensional pattern detects, measure
Data obtain final measurement result, and be shown in the interactive interface of control software after the processing of control software system.
Operation principle：
Z axis guide rail 4 drives the probe of measurement sensor 11 gradually to level off to detected workpiece surface, and makes measurement sensor
For the measured value of 11 probe always in measurement range, measurement sensor fixing piece 12 drives the probe of measurement sensor 11 real
The adjusting of existing short transverse, X-axis guide rail 2 drive detected workpiece to move along a straight line.According to the surface profile of detected workpiece,
Carry out corresponding two-dimensional section or three-dimensionalreconstruction detection, the survey of the position coordinates of each axis and the probe of measurement sensor 11
Magnitude is recorded by data collecting card, and carries out data processing by data processor, finally shows measurement by Control System Software
As a result.
System integration mechanical mounting device, electric control unit, measures calibration standard, control system at data acquisition module
System software etc..
The function of each component part (module)：
1. system integration mechanical mounting device：It is mainly used for the probe of measurement sensor 11 and measurement sensor fixing piece
12 accurate installation is fixed.
2. data acquisition module：The measurement data of measurement sensor 11 is acquired, while synchronous recording lathe is respectively transported
Sufficient preparation is made in the motion state and coordinate position of moving axis, the data processing for the later stage.
3. electric control unit：It is mainly used for performing the movement of each axis of lathe, is to realize the necessary requirement detected in place.
4. measure calibration standard：It is mainly used for demarcating the position of the theoretical centre of gyration of main shaft 6 and determines two standard balls
Between relative position relation.
5. Control System Software：It is mainly used for issuing the order of each axis of lathe, the movement of each axis of control lathe, to measuring number
Measurement result is shown according to progress data processing and in operation interface.
Correlation between each component part (module)：
System integration mechanical mounting device is for installing, fixing measuring sensor 11 and measurement sensor fixing piece 12, makes
It is mounted on the appropriate position on lathe 1.Measurement sensor 11 is connected to special purpose driver, driver and electric-controlled by optical fiber
Unit processed is connected to data acquisition module by data/address bus and realizes that data transmit, data acquisition module and software control system
It is connected with each other, realizes motion control and data transmission and data processing.
It is obvious to a person skilled in the art that the present invention is not limited to the details of above-mentioned exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in the form of others dress bodies.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Profit requirement rather than above description limit, it is intended that all in the meaning and scope of the condition of equivalent of claim by falling
Variation is included within the present invention.Any reference numeral in claim should not be considered as to the involved claim of limitation.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (3)
1. it is a kind of suitable for the non-contact in level detecting apparatus of ultra-precision machine tool processing part, including X-axis guide rail（2）, Z axis guide rail
（4）, in position detecting mechanism（14）, standard ball one（5）, main shaft（6）, standard ball two（7）, support base（8）, 3R magic chucks（9）、
Transition piece（10）And vacuum cup（13）；It is described in position detecting mechanism（14）Including Y-axis lifting platform（3）, measurement sensor
（11）And measurement sensor fixing piece（12）；It is characterized in that：The X-axis guide rail（2）And Z axis guide rail（4）It is each attached to machine
Bed main body（1）Upper surface, main shaft（6）Pass through main shaft engine base and X-axis guide rail（2）It is bolted to connection, Y-axis lifting platform
（3）Pass through Y-axis engine base and Z axis guide rail（4）It is bolted to connection, the main shaft（6）Upper surface and support base（8）'s
Lower surface is fixedly connected, the support base（8）With the Y-axis lifting platform（3）Adjacent one end is equipped with 3R magic chucks
（9）, the 3R magic chucks（9）With transition piece（10）One end be fixedly connected, the transition piece（10）The other end peace
Equipped with standard ball two（7）；Main shaft（6）Upper and Y-axis lifting platform（3）Adjacent one end, which is bolted, is provided with vacuum cup
（13）, the standard ball one（5）Positioned at standard ball two（7）Homonymy and absorption in vacuum cup（13）On, the standard ball
Two（7）With standard ball one（5）It shifts to install, measurement sensor fixing piece（12）It is arranged on Y-axis lifting platform（3）Front side and and Y-axis
Lifting platform（3）It is bolted to connection, the measurement sensor fixing piece（12）Leading flank is installed with measurement sensing
Device（11）.
It is 2. according to claim 1 suitable for the non-contact in level detecting apparatus, feature of ultra-precision machine tool processing part
It is：The measurement sensor（11）For the confocal displacement sensor of white light.
3. a kind of non-contact realize the non-contact of ultra-precision machine tool processing part using described in claim 1 in level detecting apparatus
The method detected in place, it is characterised in that：The method and step is as follows：
Step 1：To double standard ball sizings；
（One）, using inductance amesdial adjustment criteria ball one（5）Position, make the standard ball one（5）The centre of sphere is located at lathe
Main shaft（6）On axis of rotation；
（Two）, driving spindle（6）In X-axis guide rail（2）Movement is so as to drive standard ball one（5）Synchronizing moving makes standard ball one（5）
Realize X-direction movement；Drive Y-axis lifting platform（3）It moves up and down, so as to drive measurement sensor fixing piece（12）And it measures and passes
Sensor（11）It is synchronized with the movement along Y direction, makes measurement sensor（11）The alignment standard ball one（5）Spherical crown pole location,
Record X-axis coordinate at this time and measurement sensor fixing piece（12）In the position P1 (x, y) of Y-axis, setting position P1 (x, y) is mark
Quasi- ball one（5）Centre of gyration position；
（Three）, by standard ball one（5）From main shaft（6）On remove, by 3R magic chucks（9）And its subsidiary transition piece（10）And mark
Quasi- ball two（7）Mounted on support base（8）On, perform the standard ball two（7）The scan operation of spherical crown vertex, later, adjustment are surveyed
Quantity sensor（11）Position so that measurement sensor（11）Alignment criteria ball two（7）Spherical crown pole location, record X at this time
Axial coordinate and measurement sensor fixing piece（12）In the position P2 (x, y) of Y-axis, setting position P2 (x, y) is standard ball two（7）Ginseng
Examine center；
（Four）, by standard ball one（5）Centre of gyration position P1 (x, y) and standard ball two（7）Reference center position P2 (x, y)
Corresponding coordinate makes the difference to obtain relative position deviation Δ P, with this position deviation Δ P of software records and is saved in configuration file,
It completes and is determined in level detecting apparatus installation site in this way, it later, will be in position detecting mechanism（14）From machine tool main body（1）On
It removes, by 3R magic chucks（9）And its subsidiary transition piece（10）With standard ball two（7）From main shaft（6）On remove；
Step 2：Detection in place；
（One）, by the absorption of workpieces processed in main shaft（6）On, it will be in position detecting mechanism（14）Again Z axis is slidably mounted on to lead
Rail（4）On, by 3R quick-speed jigs（9）Subsidiary standard ball two（7）And transition piece（10）It is fixed on support base（8）On；
（Two）, driving spindle（6）And Y-axis lifting platform（3）, to standard ball two（7）Spherical crown vertex scan operation is performed, to find mark
Quasi- ball two（7）Position P2 (x, y)；
（Three）, obtaining standard ball two（7）Position P2 (x, y) after, respectively drive main shaft（6）It is moved along X-direction, drives Y
Axis lifting platform（3）It is moved along Y direction, it is respectively the projection in X-axis and Y direction that the two relative position deviation Δ P, which is, is moved
After the completion of dynamic so that measurement sensor（11）Optical axis and main shaft（6）The centre of gyration overlaps；
（Four）, carry out corresponding two-dimensional section according to the geometrical construction of processing part or three dimensional pattern detects, measurement data
Final measurement result is obtained, and be shown in the interactive interface of control software after the processing of control software system.
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| CN201610145388.3A CN105698679B (en) | 2016-03-15 | 2016-03-15 | Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part |
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| CN107907061B (en) * | 2017-11-01 | 2019-12-06 | 浙江兴岛机械股份有限公司 | Diameter detection device of standard ball |
| CN108981566A (en) * | 2018-05-30 | 2018-12-11 | 北京理工大学 | A kind of workpiece morpheme is in level detecting apparatus |
| CN109648400B (en) * | 2019-01-25 | 2020-07-10 | 上海交通大学 | Valve core working edge burr form reconstruction method based on white light confocal in-situ measurement |
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