CN105698679A - Non-contact on-line measurement device and method applied to ultra-precision machine tool part processing - Google Patents
Non-contact on-line measurement device and method applied to ultra-precision machine tool part processing Download PDFInfo
- Publication number
- CN105698679A CN105698679A CN201610145388.3A CN201610145388A CN105698679A CN 105698679 A CN105698679 A CN 105698679A CN 201610145388 A CN201610145388 A CN 201610145388A CN 105698679 A CN105698679 A CN 105698679A
- Authority
- CN
- China
- Prior art keywords
- standard ball
- axis
- guide rail
- main shaft
- lifting platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The invention discloses a non-contact on-line measurement device and a method applied to ultra-precision machine tool part processing. The machine tool is provided with an X-axis guide rail connected with a spindle and a Z-axis guide rail connected with a Y-axis lifting table, the spindle is provided with a supporting seat for a 3R magic chuck and a vacuum sucker sucking a first standard ball, and a transition piece is connected with the 3R magic chuck and a second standard ball; a measurement sensor fixing piece is arranged in front of the Y-axis lifting table and a measurement sensor is arranged; the spindle is fixed with a workpiece, an on-line measurement mechanism is arranged on the Z-axis guide rail, and the 3R magic chuck is fixed on the spindle; the spindle and the Y-axis lifting table are driven to execute spherical cap vertex scanning operation on the second standard ball, and the position P2(x, y) of the second standard ball is found; and the spindle and the Y-axis lifting table are driven, delta P is found for two-dimensional section or three-dimensional mode detection, and a measurement result is obtained after system processing. Precise adjustment of a displacement sensor in a height direction can be realized, and an ability of rebuilding a three-dimensional surface for typical feature structures of multiple spherical surfaces is provided.
Description
Technical field
The present invention relates to a kind of ultra-precision machine tool processing part in level detecting apparatus and method, especially machine tooling part technical field。
Background technology
At present, great majority are contact at level detecting apparatus, core component using contact type probe as execution detection, although this type of measurement apparatus has higher Mechanical Reliability, but in measurement process, owing to measuring probe and tested part surface are fully contacted, tested part surface can be produced to scratch by measuring probe to a certain extent, also bringing measurement error into, the precision of measurement result can be produced impact by this, causes the untrue of measured value simultaneously。Only minority is contactless at level detecting apparatus, non-contact measurement can efficiently against the above-mentioned defect of contact type measurement existence and deficiency, certainty of measurement can be improved to a certain extent, present stage is already present contactless can only carry out two-dimensional detection to detected workpiece at level detecting apparatus, not possessing three-dimensional values ability, therefore this kind equipment has some limitations for the detection on sphere, aspheric surface, non-structural surface and non-rotational symmetric surface。
Summary of the invention
It is an object of the invention to provide and process the noncontact of part in level detecting apparatus and method suitable in ultra-precision machine tool, this device is using the confocal displacement transducer of white light as measuring sensor, and adopt PI ultraprecise one-dimensional movement platform as the Y-axis lifting platform of lathe, it may be achieved the confocal displacement transducer of white light fine adjustment in the height direction。This device and method achieves the accurate measurement of the face type to work piece surface and roughness, and this device possesses the ability of the three-dimensional surface reconstruct realizing the typical feature structure such as sphere, aspheric surface, non-structural surface and non-rotational symmetric surface simultaneously。
Realize above-mentioned purpose, the present invention takes following technical proposals: suitable in ultra-precision machine tool process part noncontact at level detecting apparatus, including X-axis guide rail, Z axis guide rail, at position detecting mechanism, standard ball one, main shaft, standard ball two, supporting seat, 3R magic chuck, transition piece and vacuum cup；Described includes Y-axis lifting platform, measurement sensor at position detecting mechanism and measures sensor fixture；
Described X-axis guide rail and Z axis guide rail are each attached to the upper surface of machine tool main body, main shaft is connected by main shaft support and X-axis guide rail are fixing, Y-axis lifting platform is connected by Y-axis support and Z axis guide rail are fixing, the upper surface of described main shaft is fixing with the lower surface of supporting seat to be connected, one end that described supporting seat is adjacent with described Y-axis lifting platform is provided with 3R magic chuck, described 3R magic chuck is fixing with one end of transition piece to be connected, and the other end of described transition piece is provided with standard ball two；One end adjacent with Y-axis lifting platform on main shaft is fixedly installed vacuum cup, described standard ball one is positioned at standard ball two homonymy and is adsorbed on vacuum cup, described standard ball two shifts to install with standard ball one, measurement sensor fixture is arranged on front side of Y-axis lifting platform and fixes with Y-axis lifting platform and is connected, and described measurement sensor fixture leading flank is installed with measurement sensor。
A kind of method of the noncontact detection in place utilizing described noncontact to realize ultra-precision machine tool processing part at level detecting apparatus, described method step is as follows:
Step one: double; two standard ball are calibrated；
(1), adopt inductance amesdial adjustment criteria ball one position, make described standard ball one centre of sphere be positioned on machine tool chief axis axis of rotation；
(2), drive shaft move thus driving standard ball one synchronizing moving at X-axis guide rail, make standard ball one realize X-direction motion；Y-axis lifting platform is driven to move up and down, thus driving measurement sensor fixture and measurement sensor to be synchronized with the movement along Y direction, make the standard ball one spherical crown pole location described in measurement sensor alignment, record now X-axis coordinate and measure the sensor fixture position P in Y-axis1(x, y), setting position P1(x, y) for standard ball single-revolution center；
(3), standard ball one is taken off from main shaft, 3R magic chuck and subsidiary transition piece thereof and standard ball two are arranged on supporting seat, perform described standard ball two spherical crown summit scan operation, afterwards, adjust and measure sensing station, make to measure the spherical crown pole location of sensor alignment standard ball two, record now X-axis coordinate and the measurement sensor fixture position P in Y-axis2(x, y), setting position P2(x, y) for standard ball two reference center position；
(4), by the centre of gyration position P of standard ball one1(x, y) with the reference center position P of standard ball two2(x, y) corresponding coordinate is done to differ from and is obtained relative position deviation Δ P, with software records this position deviation Δ P and preserve and (be saved in configuration file, so namely the determination in level detecting apparatus installation site is completed), afterwards, to take off machine tool main body at position detecting mechanism, 3R magic chuck and subsidiary transition piece thereof and standard ball two will be taken off from main shaft；
Step 2: detection in place；
(1), by the absorption of workpieces that processes on main shaft, again will be slidably mounted on Z axis guide rail at position detecting mechanism, standard ball two subsidiary for 3R quick-speed jigs and transition piece will be fixed on supporting seat；
(2), drive shaft and Y-axis lifting platform, standard ball two is performed the scan operation of spherical crown summit, to find the position P of standard ball two2(x, y)；
(3), the position P of standard ball two is being obtained2(x, after y), drive shaft moves along X-direction respectively, Y-axis lifting platform is driven to move along Y direction, the two relative position deviation Δ P i.e. respectively projection in X-axis and Y direction, after having moved so that the optical axis measuring sensor overlaps with main shaft rotation center；
(4), according to the geometric construction of machined part carrying out corresponding two-dimensional section or tridimensional model detection, measurement data obtains final measurement result after control software design system processes, and is shown in the interactive interface of control software design。
Compared with prior art, the invention has the beneficial effects as follows: this patent measures parts with the confocal displacement transducer of white light for core, and the fine adjustment of short transverse is carried out using PI motion platform as auxiliary equipment, based on the method for double; two standard ball, main shaft rotation center line carried out precision calibration and determined the relative position relation between two standard ball。The present invention possesses the ability that the typical characteristic surfaces such as plane, sphere, aspheric surface, micro structure and non-rotational symmetric surface carry out three-dimensional measurement, certainty of measurement is increased substantially simultaneously, within 100nm can being reached, additionally, the present invention be also equipped with simple to operate, control stable, integrated level relatively high。
Accompanying drawing explanation
Fig. 1 is the noncontact overall structure axonometric drawing at level detecting apparatus being applicable to ultra-precision machine tool processing part of the present invention；
Fig. 2 is the in-place detection system composition frame chart at level detecting apparatus including the present invention；
Fig. 3 is machine control module structured flowchart；
Fig. 4 is the optical schematic diagram measuring sensor of Fig. 1；
Fig. 5 is spherical crown fixed point scanning schematic diagram；
Component names shown in figure and label are as follows:
1-machine tool main body；2-X axis rail；3-Y axle lifting platform；4-Z axis rail；5-standard ball one；6-main shaft；7-standard ball two；8-supporting seat；9-3R magic chuck；10-transition piece；11-measures sensor；12-measures sensor fixture；13-vacuum cup；14-is at position detecting mechanism；
A-white light source；B-spectroscope；C-prism；The forming monochrome image point of D-light source；D1-colored light one；D2-colored light two；D3-colored light three；E-focus point；F-is detected surface of the work；G-light hole；
H-X axle scanning track；I-Y axle scanning track；J-spherical crown summit。
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention; technical scheme in the present invention is clearly and completely described; obviously; described embodiment is only a part of embodiment of invention; rather than whole embodiments; based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under not making creative work premise, broadly fall into the scope of protection of the invention。
As shown in Figure 1, the invention discloses suitable in ultra-precision machine tool process part noncontact at level detecting apparatus, including X-axis guide rail 2, Z axis guide rail 4, at position detecting mechanism 14, standard ball 1, main shaft 6, standard ball 27, supporting seat 8,3R magic chuck 9, transition piece 10 and vacuum cup 13；Described includes Y-axis lifting platform 3, measurement sensor 11 at position detecting mechanism 14 and measures sensor fixture 12；
Described X-axis guide rail 2 and Z axis guide rail 4 are each attached to the upper surface of machine tool main body 1, main shaft 6 is bolted to connection by main shaft support and X-axis guide rail 2, Y-axis lifting platform 3 is bolted to connection by Y-axis support and Z axis guide rail 4, the upper surface of described main shaft 6 is fixing with the lower surface of supporting seat 8 to be connected, one end that described supporting seat 8 is adjacent with described Y-axis lifting platform 3 is provided with 3R magic chuck 9, described 3R magic chuck 9 is fixing with one end of transition piece 10 to be connected, and the other end of described transition piece 10 is provided with standard ball 27；One end adjacent with Y-axis lifting platform 3 on main shaft 6 is bolted and is provided with vacuum cup 13, described standard ball 1 is positioned at standard ball 27 homonymy and is adsorbed on vacuum cup 13, described standard ball 27 shifts to install with standard ball 1, measuring sensor fixture 12 be arranged on front side of Y-axis lifting platform 3 and be bolted to connection with Y-axis lifting platform 3, described measurement sensor fixture 12 leading flank is installed with measurement sensor 11。
Described measurement sensor 11 is the confocal displacement transducer of white light。
Electric-control system principle according to current super precision lathe and software frame, realize the detection in place of super precision lathe, need to set up the hardware composition proposal based on Ultra Precise Lathe CNC System, first have to select suitable measurement sensor, and requiring that the interface measuring sensor can match with in-place detection system, optional analog output is signaling interface。The present invention adopts the data acquisition plan of DeltaTau company data acquisition module, the motor control process of described main shaft 6 and Y-axis lifting platform 3, and namely in-place detection system signal principle is:
As shown in Figures 1 and 2, by measuring sensor 11, analogue signal is sent to data collecting card, data transmission is carried out between described data collecting card and UMAC controller, UMAC controller is monitored and is recorded main shaft 6 in real time, measures the kinestate of sensor fixture 12 and Y-axis lifting platform 3 simultaneously, realize information exchange between UMAC controller and industrial control computer, finally by industrial control computer realize main shaft 6 on X-axis guide rail 2, measure sensor fixture 12 is on Y-axis lifting platform 3 and Y-axis lifting platform 3 is on Z axis guide rail 4 motor control。
As it is shown on figure 3, the control software design in the present invention is responsible for coordinated scheduling UMac controller, microprocessor machine operation panel, industrial computer or embedded computer and operating user interface。Control software design adopts modularized design and encapsulation, multitask threaded design Machine-Tool Control software based on Windows is divided into upper and lower two-layer, upper strata is User Interface, including conditions of machine tool display module interface, numerical control program editor module interface, UMac program operation monitoring interface, fault diagnosis functions module interfaces。In order to modules interface can freely switch, it is also provided with function handover module interface, the window of design response。The bottom of Machine-Tool Control software be namely for the monitoring thread of microprocessor communication and the monitoring thread that communicates with UMac controller。Wherein, what serial monitoring thread was responsible for is process to carry out instruction interaction with microprocessor；Guidance panel scheduling thread is then responsible for chief coordinator and the scheduling of guidance panel function。When having pattern or button operation on guidance panel as user, guidance panel scheduling thread is responsible for processing, identifying corresponding hardware instruction in time, and with Thread Messages form, control instruction is sent to correspondingly received position, upper-layer user interface。UMac monitoring thread is responsible for accessing this UMac service routine, is sent in time by user instruction to UMac, the information such as the state of each axle of lathe, the position of axle, speed is caught in time simultaneously, be sent to conditions of machine tool monitoring interface。
The confocal sensor optical principle of white light is as shown in Figure 4, beam of white light is through prism C, generating continuous print monochromatic light axially, the monochromatic light of a branch of specific wavelength focuses on body surface, by dichroic mirror to light hole G, light hole G plays filter action, shielding reflection source, only allows the reflection light traverse of focus point E, and the monochromater through light hole G propagates spectroanalysis instrument analysis, its monochromatic color analyzed by spectroanalysis instrument, it is judged that object position。
Owing to the process of machine tooling can produce a large amount of chip and sometimes for spray cutting fluid etc., in order to protect at position detecting mechanism 14, the part course of processing needs to remove processing district at position detecting mechanism 14。To reinstall at position detecting mechanism 14 again after machining。So, it is arranged on position detecting mechanism 14 every time and is required for Accurate Calibration in the position detecting mechanism 14 position relative to main shaft 6 axis of rotation。In order to realize the demarcation of part, cannot being taken off from main shaft 6 by part during measurement, this makes many occasion Accurate Calibration lathes become a difficult problem in the position of position detecting mechanism 14。In order to solve this difficult problem, the present invention devises the method (as shown in Figures 1 and 5) of the noncontact detection in place realizing ultra-precision machine tool processing part based on noncontact at level detecting apparatus, and described method step is as follows:
Step one: double; two standard ball are calibrated；
(1), adopt inductance amesdial adjustment criteria ball 1 position, make described standard ball 1 centre of sphere be positioned on machine tool chief axis 6 axis of rotation；
(2), drive shaft 6 move thus driving standard ball 1 synchronizing moving at X-axis guide rail 2, make standard ball 1 realize X-direction motion；Y-axis lifting platform 3 is driven to move up and down, thus driving measurement sensor fixture 12 and measurement sensor 11 to be synchronized with the movement along Y direction, make measurement sensor 11 be directed at described standard ball 1 spherical crown pole location, record now X-axis coordinate and measure the sensor fixture 12 position P in Y-axis1(x, y), setting position P1(x, y) for standard ball 1 centre of gyration position；
(3), standard ball 1 is taken off from main shaft 6,3R magic chuck 9 and subsidiary transition piece 10 thereof and standard ball 27 are arranged on supporting seat 8, perform described standard ball 27 spherical crown summit scan operation, afterwards, adjust and measure sensor 11 position, make to measure the spherical crown pole location of sensor 11 alignment criteria ball 27, record now X-axis coordinate and the measurement sensor fixture 12 position P in Y-axis2(x, y), setting position P2(x, y) for standard ball 27 reference center position；
(4), by the centre of gyration position P of standard ball 11(x, y) with the reference center position P of standard ball 272(x, y) corresponding coordinate is done to differ from and is obtained relative position deviation Δ P, with software records this position deviation Δ P and preserve and (be saved in configuration file, so namely the determination in level detecting apparatus installation site is completed), afterwards, to take off machine tool main body 1 at position detecting mechanism 14,3R magic chuck 9 and subsidiary transition piece 10 thereof and standard ball 27 will be taken off from main shaft 6；
Step 2: detection in place；
(1), the workpiece 13 processed is adsorbed on main shaft 6, again will be slidably mounted on Z axis guide rail 4 at position detecting mechanism 14, standard ball 27 subsidiary for 3R quick-speed jigs 9 and transition piece 10 are fixed on supporting seat 8；
(2), drive shaft 6 and Y-axis lifting platform 3, standard ball 27 is performed the scan operation of spherical crown summit, to find the position P of standard ball 272(x, y)；
(3), the position P of standard ball 27 is being obtained2(x, after y), drive shaft 6 moves along X-direction respectively, Y-axis lifting platform 3 is driven to move along Y direction, the two relative position deviation Δ P i.e. respectively projection in X-axis and Y direction, after having moved so that the optical axis measuring sensor 11 overlaps with main shaft 6 centre of gyration；
(4), according to the geometric construction of machined part carrying out corresponding two-dimensional section or tridimensional model detection, measurement data obtains final measurement result after control software design system processes, and is shown in the interactive interface of control software design。
Operation principle:
Z axis guide rail 4 drives the probe measuring sensor 11 progressively to level off to detected surface of the work, and make the measured value of the probe of measurement sensor 11 be in all the time within the scope of measurement, measuring sensor fixture 12 drives the probe measuring sensor 11 to realize the adjustment of short transverse, and X-axis guide rail 2 drives detected workpiece to carry out rectilinear motion。Surface profile according to detected workpiece, carry out corresponding two-dimensional section or three-dimensionalreconstruction detection, the measured value of the position coordinates of each axle and the probe of measurement sensor 11 is by data collecting card record, and carried out data process by data processor, finally represented measurement result by Control System Software。
System integration mechanical mounting device, data acquisition module, electric control unit, measurement calibration standard, Control System Software etc.。
The function of each ingredient (module):
1. system integration mechanical mounting device: be mainly used in measuring the probe of sensor 11 and measuring the accurate installation of sensor fixture 12, fix。
2. data acquisition module: the measurement data measuring sensor 11 is acquired, the simultaneously kinestate of each kinematic axis of synchronous recording lathe and coordinate position, the data for the later stage process the preparation making abundance。
3. electric control unit: be mainly used in performing the motion of each axle of lathe, be the necessary requirement realizing detection in place。
4. measure calibration standard: be mainly used in demarcating the position of the theoretical centre of gyration of main shaft 6, and determine the relative position relation between two standard ball。
5. Control System Software: be mainly used in issuing the order of each axle of lathe, control the motion of each axle of lathe, carries out data process and shows measurement result in operation interface measurement data。
Mutual relation between each ingredient (module):
System integration mechanical mounting device is used for installing, fixing measuring sensor 11 and measure sensor fixture 12 so that it is be arranged on the appropriate position on lathe 1。Measure sensor 11 and be connected to special purpose driver by optical fiber, driver and electric control unit are connected to data acquisition module by data/address bus and realize data transmission, data acquisition module and software control system are connected with each other, it is achieved motor control and data transmission and data process。
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, and when without departing substantially from the spirit of the present invention or basic feature, it is possible to realize the present invention with other dress bodily form formula。Therefore, no matter from which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the invention rather than described above limits, it is intended that all changes in the implication of the condition of equivalent dropping on claim and scope included in the present invention。Any accompanying drawing labelling in claim should be considered as the claim that restriction is involved。
In addition, it is to be understood that, although this specification is been described by according to embodiment, but not each embodiment only comprises an independent technical scheme, this narrating mode of description is only for clarity sake, description should be made as a whole by those skilled in the art, and the technical scheme in each embodiment through appropriately combined, can also form other embodiments that it will be appreciated by those skilled in the art that。
Claims (3)
1. be applicable to ultra-precision machine tool processing part noncontact at a level detecting apparatus, including X-axis guide rail (2), Z axis guide rail (4), at position detecting mechanism (14), standard ball one (5), main shaft (6), standard ball two (7), supporting seat (8), 3R magic chuck (9), transition piece (10) and vacuum cup (13)；Described includes Y-axis lifting platform (3), measurement sensor (11) at position detecting mechanism (14) and measures sensor fixture (12)；It is characterized in that: described X-axis guide rail (2) and Z axis guide rail (4) are each attached to the upper surface of machine tool main body (1), main shaft (6) is connected by main shaft support and X-axis guide rail (2) (passing through bolt) are fixing, Y-axis lifting platform (3) is connected by Y-axis support and Z axis guide rail (4) (passing through bolt) are fixing, the upper surface of described main shaft (6) is fixing with the lower surface of supporting seat (8) to be connected, one end that described supporting seat (8) is adjacent with described Y-axis lifting platform (3) is provided with 3R magic chuck (9), described 3R magic chuck (9) is fixing with one end of transition piece (10) to be connected, the other end of described transition piece (10) is provided with standard ball two (7)；The upper one end (pass through bolt) adjacent with Y-axis lifting platform (3) of main shaft (6) is fixedly installed vacuum cup (13), described standard ball one (5) is positioned at standard ball two (7) homonymy and is adsorbed on vacuum cup (13), described standard ball two (7) shifts to install with standard ball one (5), measurement sensor fixture (12) is arranged on front side of Y-axis lifting platform (3) and fixes with Y-axis lifting platform (3) (passing through bolt) and is connected, and described measurement sensor fixture (12) leading flank is installed with measurement sensor (11)。
2. the noncontact suitable in ultra-precision machine tool processing part according to claim 1 is at level detecting apparatus, it is characterised in that: described measurement sensor (11) is the confocal displacement transducer of white light。
3. the noncontact utilized described in claim 1 realizes, at level detecting apparatus, the method that ultra-precision machine tool processes the noncontact detection in place of part, it is characterised in that: described method step is as follows:
Step one: double; two standard ball are calibrated；
(1), adopt inductance amesdial adjustment criteria ball one (5) position, make described standard ball one (5) centre of sphere be positioned on machine tool chief axis (6) axis of rotation；
Drive shaft (6) is mobile thus driving standard ball one (5) synchronizing moving at X-axis guide rail (2), makes standard ball one (5) realize X-direction motion；Y-axis lifting platform (3) is driven to move up and down, thus driving measurement sensor fixture (12) and measurement sensor (11) to be synchronized with the movement along Y direction, make standard ball one (5) the spherical crown pole location that measurement sensor (11) alignment is described, record now X-axis coordinate and measure the sensor fixture (12) the position P in Y-axis1(x, y), setting position P1(x, y) for standard ball one (5) centre of gyration position；
(3), standard ball one (5) is taken off from main shaft (6), 3R magic chuck (9) and subsidiary transition piece (10) thereof and standard ball two (7) are arranged on supporting seat (8), perform described standard ball two (7) spherical crown summit scan operation, afterwards, adjust and measure sensor (11) position, make to measure the spherical crown pole location of sensor (11) alignment criteria ball two (7), record now X-axis coordinate and measurement sensor fixture (12) the position P in Y-axis2(x, y), setting position P2(x, y) for standard ball two (7) reference center position；
(4), by the centre of gyration position P of standard ball one (5)1(x, y) with the reference center position P of standard ball two (7)2(x, y) corresponding coordinate is done to differ from and is obtained relative position deviation Δ P, with software records this position deviation Δ P and preserve and (be saved in configuration file, so namely the determination in level detecting apparatus installation site is completed), afterwards, to take off machine tool main body (1) at position detecting mechanism (14), 3R magic chuck (9) and subsidiary transition piece (10) thereof and standard ball two (7) will be taken off from main shaft (6)；
Step 2: detection in place；
(1), the workpiece (13) processed is adsorbed on main shaft (6), again will be slidably mounted on Z axis guide rail (4) in position detecting mechanism (14), standard ball two (7) subsidiary for 3R quick-speed jigs (9) and transition piece (10) will be fixed on supporting seat (8)；
(2), drive shaft (6) and Y-axis lifting platform (3), standard ball two (7) is performed the scan operation of spherical crown summit, to find the position P of standard ball two (7)2(x, y)；
(3), at the position P obtaining standard ball two (7)2(x, y) after, drive shaft (6) moves along X-direction respectively, Y-axis lifting platform (3) is driven to move along Y direction, the two relative position deviation Δ P i.e. respectively projection in X-axis and Y direction, after having moved so that the optical axis measuring sensor (11) overlaps with main shaft (6) centre of gyration；
(4), according to the geometric construction of machined part carrying out corresponding two-dimensional section or tridimensional model detection, measurement data obtains final measurement result after control software design system processes, and is shown in the interactive interface of control software design。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610145388.3A CN105698679B (en) | 2016-03-15 | 2016-03-15 | Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610145388.3A CN105698679B (en) | 2016-03-15 | 2016-03-15 | Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105698679A true CN105698679A (en) | 2016-06-22 |
| CN105698679B CN105698679B (en) | 2018-06-29 |
Family
ID=56220696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610145388.3A Active CN105698679B (en) | 2016-03-15 | 2016-03-15 | Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105698679B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907061A (en) * | 2017-11-01 | 2018-04-13 | 湖州永恒钢球有限公司 | A kind of apparatus for detecting diameter of standard ball |
| CN108981566A (en) * | 2018-05-30 | 2018-12-11 | 北京理工大学 | A kind of workpiece morpheme is in level detecting apparatus |
| CN109648400A (en) * | 2019-01-25 | 2019-04-19 | 上海交通大学 | Spool working edge burr form reconstructing method based on the confocal on-position measure of white light |
| CN112415023A (en) * | 2020-11-10 | 2021-02-26 | 浙江夏厦精密制造股份有限公司 | Detection method and device for representing grinding lines of columnar parts |
| CN112959323A (en) * | 2021-03-02 | 2021-06-15 | 中国工程物理研究院激光聚变研究中心 | Robot motion error on-line detection and compensation method and equipment |
| CN114563981A (en) * | 2022-03-10 | 2022-05-31 | 中国科学院光电技术研究所 | Micro-gap non-contact measurement regulation and control device and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000136944A (en) * | 1998-10-30 | 2000-05-16 | Sony Corp | Device for measuring angle of rotation |
| CN101334270A (en) * | 2008-07-25 | 2008-12-31 | 西安交通大学 | Laser line scanning feeler geometric transformation calibration and curved face interpolation correcting method and apparatus |
| JP2011242139A (en) * | 2010-05-14 | 2011-12-01 | Pulstec Industrial Co Ltd | Device and method for measuring three dimensional shape |
| CN104154875A (en) * | 2014-08-20 | 2014-11-19 | 深圳大学 | Three-dimensional data acquisition system and acquisition method based on two-axis rotation platform |
-
2016
- 2016-03-15 CN CN201610145388.3A patent/CN105698679B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000136944A (en) * | 1998-10-30 | 2000-05-16 | Sony Corp | Device for measuring angle of rotation |
| CN101334270A (en) * | 2008-07-25 | 2008-12-31 | 西安交通大学 | Laser line scanning feeler geometric transformation calibration and curved face interpolation correcting method and apparatus |
| JP2011242139A (en) * | 2010-05-14 | 2011-12-01 | Pulstec Industrial Co Ltd | Device and method for measuring three dimensional shape |
| CN104154875A (en) * | 2014-08-20 | 2014-11-19 | 深圳大学 | Three-dimensional data acquisition system and acquisition method based on two-axis rotation platform |
Non-Patent Citations (2)
| Title |
|---|
| 毕超: "基于球形目标的激光位移传感器光束方向标定", 《光学 精密工程》 * |
| 赵学森等: "超精密机床主轴在线动平衡装置研究现状", 《航空精密制造技术》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907061A (en) * | 2017-11-01 | 2018-04-13 | 湖州永恒钢球有限公司 | A kind of apparatus for detecting diameter of standard ball |
| CN107907061B (en) * | 2017-11-01 | 2019-12-06 | 浙江兴岛机械股份有限公司 | Diameter detection device of standard ball |
| CN108981566A (en) * | 2018-05-30 | 2018-12-11 | 北京理工大学 | A kind of workpiece morpheme is in level detecting apparatus |
| CN109648400A (en) * | 2019-01-25 | 2019-04-19 | 上海交通大学 | Spool working edge burr form reconstructing method based on the confocal on-position measure of white light |
| CN112415023A (en) * | 2020-11-10 | 2021-02-26 | 浙江夏厦精密制造股份有限公司 | Detection method and device for representing grinding lines of columnar parts |
| CN112959323A (en) * | 2021-03-02 | 2021-06-15 | 中国工程物理研究院激光聚变研究中心 | Robot motion error on-line detection and compensation method and equipment |
| CN114563981A (en) * | 2022-03-10 | 2022-05-31 | 中国科学院光电技术研究所 | Micro-gap non-contact measurement regulation and control device and method |
| CN114563981B (en) * | 2022-03-10 | 2023-09-19 | 中国科学院光电技术研究所 | Micro-gap non-contact measurement regulation and control device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105698679B (en) | 2018-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105698679B (en) | Suitable for the non-contact in level detecting apparatus and method of ultra-precision machine tool processing part | |
| CN105758343A (en) | C-axis gyration center calibrating device and method based on double standard ball | |
| CN102303224B (en) | Device and method for integrally machining and measuring optical parts | |
| US8659763B2 (en) | Method for machine measurement | |
| CN202869440U (en) | Five-shaft system solid of revolution measuring instrument | |
| CN100361785C (en) | Digitized precise curve grinding integrated control system | |
| CN100404201C (en) | Control method of digitized precise curved grinding | |
| CN110539020B (en) | Precision self-diagnosis method for double five-axis mirror milling machine tool | |
| CN106643466B (en) | Bridge cylindricity measuring instrument and working method thereof | |
| CN204843713U (en) | Test bench is measured at machine to high accuracy gear | |
| CN105345595A (en) | High-precision tool setting device and tool setting method of micro-diameter milling tool | |
| CN101387495A (en) | Cylinder liner intelligent detection device | |
| CN106737194B (en) | A kind of air bag profile detection method and device in place | |
| CN109352422A (en) | A kind of multi-functional on-position measure method and device of dual-headed laser scanning | |
| CN110081821A (en) | Intelligent high-speed rail white body assembling quality detection device and its method | |
| CN111928776A (en) | Multi-sensor-based non-contact online measurement system and method for numerical control machine tool | |
| Iwasawa et al. | Development of a measuring method for several types of programmed tool paths for NC machine tools using a laser displacement interferometer and a rotary encoder | |
| JP5469476B2 (en) | Eyeglass lens processing equipment | |
| CN208254413U (en) | A kind of mobile three coordinates laser measuring device for measuring | |
| CN208026612U (en) | A kind of small internal surface of hole on-line measuring device | |
| CN109708606A (en) | A kind of multiple mounted cam precision measurement and detection device and method based on kinematic parameter characterization | |
| CN205380566U (en) | Laser detection device and control system of eccentric shaft | |
| CN106353110A (en) | Ergonomics test device for automotive cab handbrake system | |
| CN210070867U (en) | High-precision intelligent aperture testing device | |
| CN209131602U (en) | Gluing guidance and detection system based on laser three-D profile measurer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhao Xuesen Inventor after: Huang Yanhua Inventor after: Li Guo Inventor after: Zou Xicong Inventor after: Hu Zhenjiang Inventor after: Wang Zongwei Inventor after: Li Zengqiang Inventor after: Sun Tao Inventor before: Zhao Xuesen Inventor before: Li Guo Inventor before: Zou Xicong Inventor before: Hu Zhenjiang Inventor before: Li Zengqiang Inventor before: Sun Tao |
|
| CB03 | Change of inventor or designer information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |