CN105658298B

CN105658298B - Magnetic filter device, liquid rinse system and liquid rinse method

Info

Publication number: CN105658298B
Application number: CN201480057713.XA
Authority: CN
Inventors: 山田正良
Original assignee: Nissin Manufacturing Co Ltd
Current assignee: Nissin Manufacturing Co Ltd
Priority date: 2013-10-21
Filing date: 2014-10-20
Publication date: 2017-06-16
Anticipated expiration: 2034-10-20
Also published as: JP5802251B2; KR20160075637A; CN105658298A; WO2015060265A1; KR101853409B1; JP2015080735A

Abstract

Magnetic filter device is provided, it prevents the decline of the intensity in the magnetic field of the position away from magnet unit.Magnetic filter device (1A (1B)) possesses：Treatment vessel (6), it has process chamber (S1), and the process chamber (S1) is adsorbed scattered ferromagnetic particle in the processed fluid for flowing through inside using magneticaction and the ferromagnetic particle is removed from the processed filtering flow；Magnet unit (2), is consisted of, and the multiple magnetic poles comprising different magnetic poles are configured along the flow direction of processed fluid, and positioned at the outside of process chamber (S1)；And the yoke (41) of more than 1, it is arranged in process chamber (S1) in the way of allowing the flowing of processed fluid, the direction away from magnet unit (2) that the magnetic line of force respectively with multiple magnetic poles as starting point is guided into process chamber (S1).

Description

Magnetic filter device, liquid rinse system and liquid rinse method

Technical field

The present invention relates to magnetic filter device, liquid rinse system and liquid rinse method.

Background technology

Generally, the lathe such as honing machine or grinding machine is supported on working substance (the hereinafter referred to as work of processing department to configuration Part) supply be stored in supplying tank cooling agent (grinding fluid, cutting fluid etc.) and carry out grinding.Produced in the grinding The metal removal powder of workpiece be recovered together with cooling agent.Cooling agent after the use being recovered is filtered by filter for installation, Thus, metal removal powder is removed and is reused.

The filter for installation of powder is ground as the filtering metal from the cooling agent after the use, it is proposed that such as patent document Magnetic filter device described in 1.

The magnetic filter device possesses the filtering material being made up of magnetic material that is configured in treatment vessel and makes this The magnetized magnet of filtering material, metal removal powder (the strong magnetic that the magnetic filter device will be included in the cooling agent after by use Gonosome particle) it is adsorbed onto on the filtering material being magnetized.

Prior art literature

Patent document

Patent document 1：Japanese Unexamined Patent Publication 2011-11205 publications

The content of the invention

The invention problem to be solved

In most cases, in process chamber, the vicinity of the magnetic line of force of magnet from certain magnetic pole through magnet towards its His different magnetic pole.Therefore, in process chamber, near magnet, the intensity in magnetic field becomes big, at the position away from magnet, The intensity in magnetic field declines.

The present invention is to complete in view of the foregoing, its object is to provide at the position for preventing away from magnet unit Magnetic filter device and liquid rinse system that the intensity in magnetic field declines.

Means for solving the problems

(1) magnetic filter device of the invention possesses：Treatment vessel, it has process chamber, and the process chamber is made using magnetic force Want scattered ferromagnetic particle in the processed fluid that inside is flowed through for adsorbing and by the ferromagnetic particle from processed Removal is filtered in fluid；Magnet unit, consists of, the multiple magnetic poles comprising different magnetic poles along processed fluid flowing Direction configures, and the magnet unit is located at the outside of process chamber；And the yoke of more than 1, it is allowing processed fluid The mode of flowing is arranged in process chamber, by the magnetic line of force respectively with multiple magnetic poles as starting point guide into the process chamber away from The direction of the magnet unit.

As described above, in the structure for being not configured with yoke in process chamber, in most cases, the magnetic line of force is from certain magnetic Vicinity direction other different magnetic poles of the pole through magnet unit.Therefore, in process chamber, near magnet unit, magnetic field Intensity become big, but at the position away from magnet unit, the intensity in magnetic field declines.

On the other hand, because magnetic filter device of the invention possesses into the magnetic line of force is guided direction away from magnet unit Yoke, therefore, it is possible to prevent the decline of the intensity in the magnetic field at the position away from magnet unit.

(2) can also be that the yoke of above-mentioned more than 1 includes the 1st yoke and the 2nd yoke, and the 1st yoke is configured at Near the 1st position in process chamber, the 1st position is answered with a pole pair of magnet unit, and the 2nd yoke is configured in process chamber The 2nd position near, the 2nd position is corresponding with other different magnetic poles of magnet unit, the 2nd yoke by the direction in magnetic field place The direction from the 1st yoke towards the 2nd yoke is changed into reason interior, and the direction in the magnetic field is guided into from a magnetic pole along the 1st yoke Away from the direction of magnet unit.

According to this structure, the 2nd yoke makes to guide the magnetic field in the direction away from magnet unit into along the 1st yoke from magnetic pole Direction in the process chamber in change into direction from the 1st yoke towards the 2nd yoke.Thereby, it is possible to improve from the 1st yoke direction The magnetic flux density in the magnetic field of the 2nd yoke.

(3) can also be that above-mentioned magnet unit has the multiple magnetic configured along the flow direction of above-mentioned processed fluid Iron, above-mentioned multiple magnet are respectively configured as that polarity and adjacent other magnet identical magnetic poles are relative, and above-mentioned yoke exists many Individual, multiple yokes are respectively arranged near the relative position of the magnetic pole of multiple magnet on the flow direction of processed fluid.

According to this structure, the magnetic field of the flow direction due to producing processed fluid from multiple magnet respectively, therefore, it is possible to Improve the magnetic flux density in the magnetic field of the flow direction of processed fluid.

(4) can also be that above-mentioned magnet unit also has multiple pair yokes, multiple above-mentioned secondary yokes are respectively interposed in adjacent Between 2 magnet.

(5) can also be that the inner side that above-mentioned treatment vessel has cylindrical body, cylindrical body constitutes above-mentioned process chamber, magnet list Unit is configured at the outside of cylindrical body.

According to this structure, due to the magnetic flux density in process chamber can be improved, therefore, it is possible to improve strainability.

(6) can also be that above-mentioned treatment vessel has the shape that the 2nd cylindrical body is configured with the outside of the 1st cylindrical body, the Region between 1 cylindrical body and the 2nd cylindrical body constitutes above-mentioned process chamber, and magnet unit is configured at the inner side of above-mentioned 1st cylindrical body.

According to this structure, have the advantages that easily to make process chamber become big.

(7) can also be that above-mentioned yoke forms above-mentioned with the inside of above-mentioned process chamber between above-mentioned magnet unit The mode of the stream of processed fluid is configured, and introduces the magnetic line of force respectively with above-mentioned multiple magnetic poles as starting point.

According to this structure, yoke introduces the magnetic line of force respectively with multiple magnetic poles of magnet unit as starting point.Thereby, it is possible to carry Height is from magnet unit towards the magnetic flux density in the magnetic field of yoke.

(8) can also be that magnetic filter device of the invention is also equipped with filtering material, the filtering material is by magnetic material structure Into, and be configured in the above-mentioned process chamber of above-mentioned treatment vessel.

According to this structure, by possessing filtering material, it is possible to increase strainability.

(9) possess from the liquid rinse system of the invention from the viewpoint of other：The magnetic filter device of above-mentioned (8)； Pump, it is above-mentioned processed that the above-mentioned process chamber supply of its above-mentioned treatment vessel possessed to magnetic filter device is made up of liquid Fluid；And switching part, the stream of its described processed fluid supplied to pump switches over, and treatment vessel has：1st matches somebody with somebody Pipe, it is connected with process chamber；2nd pipe arrangement, its be located at the filtering material in process chamber with the 1st with the opposite side of tube side, Connected with the process chamber；And air storage area forming portion, the described 2nd of its filtering material in process chamber the The air storage area of stored air is formed with tube side, switching part is in the stream by the processed fluid to cause pump to be supplied Switched over through the mode of the 1st pipe arrangement and the 2nd pipe arrangement and be present in after the air of the air storage area compressing, Being present in air utilizing through switching over by way of the 2nd pipe arrangement with the stream of processed fluid for pump is supplied The processed fluid that the pressure of the air after being compressed of storage area will be present in process chamber is through the 1st pipe arrangement to the place The outside extrusion of reason room.

According to this structure, the stream of processed fluid is switched by being controlled to switching part, will be present in air storage Deposit the air compression in region.Hereafter, stream of the switching part further to the fluid that is processed is switched over, and thus, is present in treatment Indoor processed fluid is in the presence of the pressure of the air of air storage area is present in by successfully to the 1st pipe arrangement pressure Go out.Now, cleaned and flowed away by processed fluid due to being attached to the dirt such as ferromagnetic particle of filtering material, therefore, disappear Except the blocking of filtering material.

(10) additionally, in liquid rinse system of the invention, or, above-mentioned air storage area forming portion with it is upper The connection of the 2nd pipe arrangement is stated, prominent pipe arrangement is constituted from process chamber.

According to this structure, the simplification of air storage area forming portion can be realized.

(11) additionally, in liquid rinse system of the invention, or, above-mentioned switching part is configured to comprising multidirectional Valve.

(12) additionally, liquid rinse system of the invention is also equipped with：The 3rd pipe arrangement being connected with said pump；Liquid after treatment 4th pipe arrangement；The discharge pipe arrangement of the discharge of above-mentioned processed fluid；And above-mentioned 2nd pipe arrangement and the 3rd pipe arrangement are carried out The bypass pipe arrangement of branch, above-mentioned switching part has：1st triple valve, it makes above-mentioned 1st pipe arrangement and the 3rd pipe arrangement and discharge pipe arrangement Any one party connection；2nd triple valve, it makes the 2nd pipe arrangement be connected with any one party of the 4th pipe arrangement and bypass pipe arrangement；And control Portion processed, it is controlled to the 1st triple valve and the 2nd triple valve, and control unit is controlled to the 1st triple valve, makes the 1st pipe arrangement and 3 pipe arrangements are connected, and the 2nd triple valve is controlled, and the 2nd pipe arrangement is connected with the 4th pipe arrangement, thus, are switched to from pump by suitable Sequence flows to the 1st stream of the 2nd pipe arrangement via the 1st pipe arrangement, filtering material, and control unit is controlled to the 1st triple valve, makes the 1st Pipe arrangement is connected with the 3rd pipe arrangement, and the 2nd triple valve is controlled, and the 2nd pipe arrangement is connected with the bypass pipe arrangement, thus, is cut It is changed to from pump and flows to the 2nd stream in process chamber through the 1st pipe arrangement and the 2nd pipe arrangement, control unit is controlled to the 1st triple valve System, makes the 1st pipe arrangement be connected with pipe arrangement with discharge, and the 2nd triple valve is controlled, and the 2nd pipe arrangement is connected with bypass pipe arrangement, Thus, the 3rd stream for flowing to the 1st pipe arrangement via the 2nd pipe arrangement, filtering material in order from pump is switched to.

(13) from the magnetic filter device of the liquid rinse method usage right of the invention requirement 8 from the viewpoint of other And the quilt that the process chamber supply of the treatment vessel possessed to the magnetic filter device is made up of liquid The pump for the treatment of fluid, wherein, the treatment vessel has with the 1st pipe arrangement connected in the process chamber and positioned at the treatment The filtering material in room with the described 1st with the opposite side of tube side and with the 2nd pipe arrangement connect in the process chamber, this Liquid rinse method is comprised the following steps：The described 2nd of the filtering material in the process chamber forms storage with tube side The air storage area of air；Match somebody with somebody through the described 1st by with the stream of the described processed fluid for the pump is supplied The mode of pipe and the 2nd pipe arrangement switches over to be compressed the air for being present in the air storage area；And it is logical Cross by so that the stream of described processed fluid that is supplied of the pump is utilized through switching in the way of the 2nd pipe arrangement It is present in the described processed fluid that the pressure of the air after being compressed of air storage area will be present in the process chamber Extruded to the outside of the process chamber through the 1st pipe arrangement.

Invention effect

In accordance with the invention it is possible to provide the magnetic filter device that can improve strainability and liquid rinse system.

Brief description of the drawings

Fig. 1 is the summary construction diagram of the liquid rinse system of implementation method.

Fig. 2 is the summary construction diagram of the magnetic filter device of implementation method.

Fig. 3 shows the yoke of implementation method, and (a) is stereogram, and (b) is sectional view.

Fig. 4 is the block diagram of the control unit of implementation method.

Fig. 5 is the action specification figure of the magnetic filter device of implementation method.

Fig. 6 is the action specification figure of the magnetic filter device of comparative example.

Fig. 7 is the performance specification figure of the magnetic filter device of implementation method.

Fig. 8 is the flow chart of the action of the control unit for showing implementation method.

Fig. 9 is the flow chart of the action of the control unit for showing implementation method.

Figure 10 is the flow chart of the action of the control unit for showing implementation method.

Figure 11 is the action specification figure of the magnetic filter device of implementation method.

Figure 12 is the action specification figure of the magnetic filter device of implementation method.

Figure 13 is the action specification figure of the magnetic filter device of implementation method.

Figure 14 is the summary construction diagram of the magnetic filter device of variation.

Figure 15 shows the yoke of variation, and (a) is stereogram, and (b) is sectional view.

Figure 16 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 17 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 18 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 19 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 20 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 21 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Figure 22 is the summary construction diagram of a part for the magnetic filter device for showing variation.

Specific embodiment

<1>Structure

【Overall structure】

Fig. 1 is the skeleton diagram of the fluid purge system of present embodiment.

Fluid purge system is that the cooling agent (processed fluid) to being used in the lathe 108 of honing machine etc. is cleaned System.

Fluid purge system possesses magnetic filter device 1A, 1B, pump 90, accumulator 96, de- liquid/solid unit 100, buffering Tank 104, recycling can 106, pressure sensor 120 and control unit 190.

Recycling can 106 is used to reclaim the cooling agent (using rear cooling agent) used in lathe 108.

Pump 90 makes the rear cooling agent of the use being stored in recycling can 106 that 2 magnetic filters dresses are supplied to through pipe arrangement 114 Put 1A.

Magnetic filter device 1A, 1B are cleaned to the rear cooling agent of use sent through pipe arrangement 114.Later to the magnetic The details of filter for installation 1A, 1B is described.

Accumulator 96 stores the cooling agent (cooling agent after cleaning) and air cleaned by magnetic filter device 1A (1B).Storage The cooling agent for being stored in accumulator 96 is flowed into from magnetic filter device 1A (1B) through pipe arrangement 118, and air passes through pipe arrangement 99 and valve 98 and flow into.

Surge tank 104 stores cooling agent after the cleaning supplied to lathe 108.Also, pump 102 makes to be stored in surge tank 104 Cleaning after cooling agent supplied to lathe 108.

Valve 98 is used to switching the stream for flowing through cooling agent after the cleaning of pipe arrangement 118.In the case where valve 98 is closed, flow through Cooling agent flows into accumulator 96 after the cleaning of pipe arrangement 118.On the other hand, in the case where valve 98 is opened, cooling agent after cleaning Surge tank 104 is flowed into through pipe arrangement 99.Additionally, air flows into accumulator 96 through pipe arrangement 99.

Passed through from magnetic filter device 1A during the magnetic filter device 1A that de- liquid/solid unit 100 will be stated after cleaning and matched somebody with somebody Pipe 116 and the dirt such as metal powder for including is separated and solidified in the cooling agent that flows into.

Pressure sensor 120 is arranged at the vicinity of pump 90, detects the submitting pressure of pump 90.

【Magnetic filter device】

Fig. 2 is the general profile chart of the magnetic filter device 1A of present embodiment.In addition, magnetic filter device 1B and magnetic mistake Filter unit 1A is same.

Magnetic filter device 1A is dispersion in the rear cooling agent of use that will be flowed into through pipe arrangement 114 using magneticaction Ferromagnetic particle (for example, the metal removal powder produced by honing) device of removal is filtered from cooling agent.

Magnetic filter device 1A mainly possesses treatment vessel 6, magnet unit 2, filtering material 4, yoke 41, liquid tee valve 16th, 18, air triple valve 134,136, compressed air source 138 and pressure sensor 120.

Treatment vessel 6 be configured to comprising the 2nd substantially cylindric cylindrical body 62, the 1st substantially cylindric cylindrical body 61, on Lid 17b, lower cover 17a, top board 7 and base station 9.

In the section vertical with the cylinder axis direction of the 2nd cylindrical body 62, the external diameter of the 1st cylindrical body 61 is than the 2nd cylindrical body 62 Internal diameter it is small.Treatment vessel 6 have be configured with the shape of the 2nd cylindrical body 62 in the outside of the 1st cylindrical body 61.2nd cylindrical body 62 And the 1st cylindrical body 61 cylinder axis direction on length it is roughly equal.2nd cylindrical body 62 and the 1st cylindrical body 61 are by for example non magnetic The nonmagnetic material such as body stainless steel material is constituted.

Top board 7 is with a side (upper end in Fig. 2 on the cylinder axis direction for closing the 2nd cylindrical body 62 and the 1st cylindrical body 61 Side) mode be installed on the 2nd cylindrical body 62 and the 1st cylindrical body 61.Base station 9 is closing the 2nd cylindrical body 62 and the 1st cylindrical body 61 The mode of the another side (lower end side in Fig. 2) on cylinder axis direction is installed on the 2nd cylindrical body 62 and the 1st cylindrical body 61.Also, Region between 2nd cylindrical body 62 and the 1st cylindrical body 61 constitutes process chamber S1, and the region of the inner side of the 1st cylindrical body 61 is constituted matches somebody with somebody It is equipped with the magnet room S2 of magnet unit 2.

The air that position corresponding with the inner side of the 1st cylindrical body 61 in top board 7 is provided with compressed air importing is matched somebody with somebody Pipe 142.Additionally, the position corresponding with process chamber S1 in top board 7 be provided with for will after cleaning cooling agent from process chamber S1 The pipe arrangement 10 of discharge.The leading section 10a of pipe arrangement 10 is protruded downwards than the following table of top board 7.In the pipe arrangement 10 to process chamber Prominent part (protuberance) constitutes air storage area forming portion in S1, and the air storage area forming portion forms stored air Air storage area (with reference to the A1 of aftermentioned Figure 11).The position beyond above-mentioned protuberance in above-mentioned protuberance and pipe arrangement 10 (the 2nd pipe arrangement) is connected.

Also, when using magnetic filter device 1A (1B), lower surface and the pipe arrangement 10 of the top board 7 in process chamber S1 The air storage area (with reference to the A1 of Figure 11 described later) of stored air is formed between the 10a of leading section.

Position corresponding with the inner side of the 1st cylindrical body 61 in base station 9 is provided with lower port 143a.Additionally, base station 9 In position corresponding with process chamber S1 be connected with pipe arrangement (the 1st pipe arrangement) 8.The leading section of the pipe arrangement 8 is constituted for that will cool down Agent imports the process chamber S1 or treatment fluid importing discharge port 8a that cooling agent is discharged from process chamber S1.

The filtering material configuring area S11 for being configured with filtering material 4 is formd in process chamber S1.Filtering material 4 is by magnetic Property material constitute.As filtering material 4, such as steel wool (steel wool), woven wire and wire rod etc. can be used.This Sample, by possessing filtering material 4, it is possible to increase the strainability of magnetic filter device 1A.

Be held in filtering material 4 in treatment vessel 6 by upper lid 17b and lower cover 17a.Arranged on upper lid 17b and lower cover 17a There is the liquid-through hole of multiple sizes that filtering material 4 can not be made to pass through and can pass a coolant through.

Liquid tee valve 18 is connected with pipe arrangement 10,22,118, by the linking objective of pipe arrangement 10 switch to the side of pipe arrangement 118 or The side of pipe arrangement 22.Liquid tee valve 18 switches over action according to the control signal from control unit 190.

Liquid tee valve 16 is connected with pipe arrangement 8,114,116, by the linking objective of pipe arrangement 8 switch to the side of pipe arrangement 114 or The side of pipe arrangement 116.Liquid tee valve 18 switches over action according to the control signal from control unit 190.

Air triple valve 134,136 is connected with air line 135,137, and the linking objective of air line 135,137 is cut It is changed to air line 142,143 sides or open sides.

Air line 135,137 is connected with compressed air source 138.

Compressed air source 138 is for example made up of air compressor etc..

Magnet unit 2 be configured at the inner side (outside of process chamber S1) of the 1st cylindrical body 61 with filtering material configuring area The corresponding regions of S11.That is, treatment vessel 6 have be configured with the shape of the 2nd cylindrical body 62, the 1st in the outside of the 1st cylindrical body 61 Region between the cylindrical body 62 of cylindrical body 61 and the 2nd constitutes process chamber S1, and magnet unit 2 is configured at the inner side of the 1st cylindrical body 61.

Thus, have the advantages that to be easy to make process chamber S1 become big.

Magnet unit 2 has generally cylindrical shape, by multiple (being in fig. 2 8) magnet 25 and multiple (in figure It is 9 in 2) secondary yoke 27,27A, 27B composition.

The effect of secondary yoke 27,27A, 27B is that the magnetic flux radiated from magnet 25 is guided to yoke described later 41.Thus, Because the magnetic flux radiated from magnet 25 is efficiently guided to yoke 41, therefore, it is possible to reduce from the magnetic flux of the radiation of magnet 25 Loss.

Additionally, magnet 25 and secondary yoke 27,27A, 27B have substantially discoid shape.Magnet 25 is for example by neodymium (Neodymium) permanent magnet such as magnet is constituted.Secondary yoke 27,27A, 27B is for example made up of magnetic materials such as soft irons.Secondary yoke The internal diameter size that 27 footpath is sized to than magnet room S2 is slightly smaller.The footpath of magnet 25 is sized to than secondary yoke 27 Footpath size is small.

Multiple magnet 25 and multiple pair yokes 27,27A, 27B are configured with alternately laminated state.In magnet unit 2 2 magnet 25 adjacent on heart direction of principal axis are configured to the magnetic pole (N poles and N poles or S poles and S poles) of identical polar across pair each other Yoke 27 is relative.Thus, magnet unit 2 includes S poles, the mutually different magnetic pole of N poles.Secondary yoke 27,27A, 27B is respectively configured In on the flow direction of cooling agent respectively near position corresponding with the magnetic pole of multiple magnet 25.

Magnet unit 2 has structure described above, thus, due to generating the plurality of magnet respectively from multiple magnet 25 The magnetic field of 25 orientation, therefore, it is possible to improve the magnetic flux density in the magnetic field of the orientation of multiple magnet 25.

Magnet unit 2 can be moved in magnet room S2 on the cylinder axis direction (above-below direction in Fig. 2) of the 1st cylindrical body 61 It is dynamic.

Yoke 41 is configured at the filtering material configuring area S11 in process chamber S1.The yoke 41 is for example by magnetic such as soft irons Material is constituted.At least a portion (for example, radially outer side portions of yoke 41) of yoke 41 is vertical with the flow direction of cooling agent Direction on be configured at the position away from magnet unit 2.Therefore, yoke 41 is configured to respectively with many of magnet unit 2 The direction away from magnet unit 2 that individual magnetic pole is guided into process chamber S1 for the magnetic line of force of starting point.

Additionally, a yoke 41 is configured at position the (the 1st corresponding with a magnetic pole of magnet unit 2 in process chamber S1 Position) near, another yoke 41 is configured at the corresponding position of another different magnetic pole from magnet unit 2 in process chamber S1 Put near (the 2nd position).Also, another yoke 41 will be drawn towards away from magnet unit from a magnetic pole along a yoke 41 The direction in the magnetic field in 2 direction is changed into from a yoke 41 towards the direction of another yoke 41 in process chamber S1.

In this case, another yoke 41 will be drawn towards away from magnet unit from a magnetic pole along a yoke 41 The direction in the magnetic field in 2 direction changed into process chamber S1 from a yoke towards the direction of another yoke (cooling agent Flow direction).Thereby, it is possible to improve from yoke 41 towards the magnetic field of another yoke 41 (along the flowing side of cooling agent To magnetic field) magnetic flux density.

Fig. 3 shows the yoke 41 of present embodiment, and (a) is stereogram, and (b) is sectional view.

Yoke 41 have be formed with through hole 41b rounded during vertical view it is discoid (that is, vertical view when in substantially annulus Shape) shape.The internal diameter size of yoke 41 is more bigger than the outside dimension of the 1st cylindrical body 61 for the treatment of vessel 6.Additionally, yoke 41 Outside dimension it is more smaller than the internal diameter size of the 2nd cylindrical body 62 for the treatment of vessel 6.Also, yoke 41 runs through in the 1st cylindrical body 61 It is inserted in the state of through hole 41b and is configured at filtering material configuring area S11.Additionally, be formed with yoke 41 insertion its Multiple through hole 41a of thickness direction.Additionally, yoke 41 is configured to cylinder axis direction of its thickness direction along treatment vessel 6.And And, in the state of yoke 41 is configured at filtering material configuring area S11, as being filled out on the inside of the through hole 41a of yoke 41 State filled with filtering material 4.Cooling agent passes through the periphery of yoke 41 and the gap of the 2nd cylindrical body 62 and is formed at yoke 41 Through hole 41a, thus, has allowed the flowing of the cooling agent in process chamber S1.

【Control unit】

Control unit 190 carries out the action control of fluid purge system.

Fig. 4 is the block diagram of the control unit 190 of present embodiment.

Control unit 190 possesses CPU 200, memory 292 and input/output port 296.CPU 200, memory 292 and Input/output port 296 is connected via bus B US.Control program 290 is stored in memory 292.

Control element (for example, relay) and measuring cell are connected with (for example, simulation number in input/output port 296 Word converter), wherein, the control element is to valve 98, air triple valve 134,136, liquid tee valve 16,18, pump 90, compression sky Source of the gas 138 is controlled, and output of the measuring cell to pressure sensor 120 is measured.

CPU 200 is stored in the control program 298 of memory 292 and realizes the various functions of control unit 190 by performing.

Control unit 190 pairs represents that the magnetic filter device for just having carried out back washing treatment described later is 2 magnetic filter devices Which information in 1A, 1B is managed.Specifically, respectively 2 magnetic filter devices 1A, 1B are assigned with identification letter Breath, will just carry out the identification information of magnetic filter device 1A (1B) of back washing treatment as the magnetic mistake for carrying out last time back washing treatment The identification information of filter unit is stored in memory 292.The identification information updates according to back washing treatment is carried out every time.

<2>The performance of magnetic filter device

Next, being illustrated to the performance of the magnetic filter device 1A of present embodiment.Here, with the magnetic mistake of comparative example Performance of the filter unit 1001 (reference picture 6) by comparison to the magnetic filter device 1A (reference picture 5) of present embodiment is carried out Explanation.Further, since magnetic filter device 1B is identical with magnetic filter device 1A, therefore, omit the description here.

The magnetic filter device 1001 of comparative example is substantially same structure with the magnetic filter device 1A of present embodiment, There is no yoke this point different from magnetic filter device 1A in the process chamber S1 for the treatment of vessel 6.

All it is secondary yoke in the magnetic filter device 1A of present embodiment and the magnetic filter device 1001 of comparative example 27th, 27A, 27B become the magnetic pole of the starting point of the magnetic line of force in the magnetic field of the generation of magnet unit 2.

Fig. 5 is the action specification figure of the magnetic filter device 1A of present embodiment, and Fig. 6 is the magnetic filter device of comparative example 1001 action specification figure.In Fig. 5 and Fig. 6, the magnetic line of force M radiated from the side face of the secondary yoke 27 of magnet unit 2 is shown Image.

As shown in fig. 6, in the magnetic filter device 1001 of comparative example, from the magnetic line of force M that the side face of secondary yoke 27 is radiated Density it is bigger than near the inner peripheral surface of the 2nd cylindrical body 62 near the outer peripheral face of the 1st cylindrical body 61.

On the other hand, as shown in figure 5, in the magnetic filter device 1A of present embodiment, yoke 41 is by magnet unit 2 The direction away from magnet unit 2 that the path of the magnetic line of force in the magnetic field produced by (secondary yoke 27) is guided into process chamber S1.Thus, Compared to the situation of the magnetic filter device 1001 of comparative example, the Density Distribution of the magnetic line of force M radiated from the side face of secondary yoke 27 Weighting it is smaller.That is, the density (magnetic flux density) of the magnetic line of force M near the outer peripheral face of the 1st cylindrical body 61 and the 2nd cylindrical body 62 The difference of the density (magnetic flux density) of the magnetic line of force M near inner peripheral surface diminishes.This represent compared to magnetic filter device 1001, In magnetic filter device 1A, reached near the inner peripheral surface of the 2nd cylindrical body 62 from the magnetic field of the radiation of magnet unit 2.

Additionally, yoke 41 is configured as making being produced in process chamber S1 the magnetic field along the cylinder axis direction for the treatment of vessel 6.Magnetic force Line M the side of the outer wall near the 1st cylindrical body 61 or close 2nd cylindrical body 62 inwall side all with the 2nd The cylinder axle of cylindrical body 62 is almost parallel.Additionally, magnetic flux density is being close to the side of the outer wall of the 1st cylindrical body 61 and is being close to the 2nd The side of the inwall of shape body 62 is roughly equal.

Fig. 7 is close to the magnetic flux in the magnetic filter device 1A of present embodiment and the magnetic filter device 1001 of comparative example The result that the distribution of degree is compared.Shown in (a) that the distribution of the magnetic flux density B of (b) in Fig. 7 illustrates in such as Fig. 7 that Sample with the outer peripheral face of the 1st cylindrical body 61 as the 1st cylindrical body 61 in the case of basic point and the radial direction (r) of the 2nd cylindrical body 62 point Cloth.In addition, in (b) in the figure 7, solid line represents the distribution in the case of the magnetic filter device 1A of present embodiment, dotted line Represent the distribution in the case of the magnetic filter device 1001 of comparative example.Additionally, (b) in Fig. 7 represents the 1st cylindrical body 61 and the 2 distributions of the central portion of secondary yoke 27 on the cylinder axis direction of 2 cylindrical bodies 62.

As shown in (b) in Fig. 7, compared to the magnetic filter device 1001 of comparative example, in magnetic filter device 1A, the The weighting of the magnetic flux distribution of the radial direction (r) of 1 cylindrical body 61 and the 2nd cylindrical body 62 is smaller.Also, compared to comparative example, The magnetic field radially from the radiation of magnet unit 2 of the 1st cylindrical body 61 and the 2nd cylindrical body 62 is applied evenly in magnetic filter dress Put the filtering material 4 of 1A.

That is, due to putting on the magnetic field of filtering material 4 in the radially uniform of the 1st cylindrical body 61 and the 2nd cylindrical body 62 Ground applies, therefore, it is possible to eliminate the strainability of filtering material 4 the 1st cylindrical body 61 and the 2nd cylindrical body 62 radial direction it is inclined Weight.The strainability near the inner peripheral surface of the 2nd cylindrical body 62 of filtering material 4 can especially be improved.

<3>Action

<3-1>Molar behavior

Next, the action to the control unit 190 of the liquid rinse system of present embodiment is illustrated.

Fig. 8 and Fig. 9 are the flow charts of the action of the control unit 190 of the liquid rinse system for showing present embodiment.

First, control unit 190 determines whether to use magnetic filter device 1A (step S1).Specifically, control unit 190 Judge whether last time has been carried out to magnetic filter device 1A according to the identification information of the magnetic filter device for being stored in memory 292 inverse Wash treatment.Also, in the case where last time has carried out back washing treatment to magnetic filter device 1A, control unit 190 is judged to use Magnetic filter device 1A.

In step sl, if it is decided that be to have used magnetic filter device 1A (step S1：It is), control unit 190 is to magnetic mistake The air triple valve 134,136 of filter unit 1A is controlled and switches to the air supply target of compressed air source 138 Portion port 142a sides (step S2).Now, control unit 190 is controlled to the air triple valve 134,136 of magnetic filter device 1A The linking objective of air line 135 is switched to the side of air line 142 by system.

Next, control unit 190 makes compressed air source 138 be acted (step S3).Now, in magnetic filter device 1A In, the top of the magnet unit 2 from the upper port 142a for the treatment of vessel 6 into magnet room S2 imports compressed air.Thus, magnetic Iron unit 2 is fixed in the lower section of magnet room S2, completes the preparation using magnetic filter device 1A.

On the other hand, in step sl, if it is decided that be not use magnetic filter device 1A (step S1：It is no), then control Portion processed 190 is controlled to the air triple valve 134,136 of magnetic filter device 1B and supplies the air of compressed air source 138 Target switches to upper port 142a sides (step S4).Now, air triple valve of the control unit 190 to magnetic filter device 1A 134th, 136 it is controlled the linking objective of air line 135 is switched into the side of air line 142.

Next, control unit 190 makes compressed air source 138 be acted (step S5).Now, in magnetic filter device 1B In, the top from the upper port 142a for the treatment of vessel 6 to magnet room S2 for magnet unit 2 imports compressed air.Thus, magnetic Iron unit 2 is fixed in the lower section of magnet room S2, completes the preparation using magnetic filter device 1B.

Next, control unit 190 opens valve 98 (step S6).Thus, from recycling can 106 via pipe arrangement 114, magnetic filter Device 1A (or magnetic filter device 1B), pipe arrangement 118 and pass through the stream of surge tank 104 open-minded.

Hereafter, the transfer tube 90 (step S7) of control unit 190.Thus, the rear cooling agent of use of recycling can 106 is stored in by pump 90 suct, and are admitted to the treatment fluid importing discharge port 8a of magnetic filter device 1A (or magnetic filter device 1B). In addition, in the case of pump 90 is powered, control unit 190 omits the treatment of step S4.

Thus, it is admitted to treatment fluid and imports the rear cooling agent of use of discharge port 8a by process chamber S1 guiding.Also, The cooling agent filtered by filtering material 4 in process chamber S1 flows into surge tank 104 through pipe arrangement 118.

Next, control unit 190 obtains the value (step S8) of pressure sensor 120.

Next, control unit 190 judge acquired pressure sensor 120 value whether below setting (step S9).In step s 6, (the step S9 in the case that the value of pressure sensor 120 is below setting：It is), control unit 190 is again The secondary treatment for carrying out step S5.On the other hand, in step s 6, in the case where the value of pressure sensor 120 exceedes setting (step S9：It is no), the shutoff valve 98 (step S11) of control unit 190.

In magnetic filter device 1A, 1B, in the result that dirt is captured by filtering material 40, so-called blocking is generated. Now, the submitting pressure of pump 90 rises.Therefore, in magnetic filter device 1A, control unit 190 is by means of pressure sensor 120 To monitor the submitting pressure of pump 90, in the case where the submitting pressure of pump 90 exceedes setting, shutoff valve 98 is carried out described later inverse Wash the preparation for the treatment of.

In step s 11, valve 98 is closed, and thus, is flowed into from cooling agent after the cleaning of magnetic filter device 1A outflows and stored Energy device 96, stores cooling agent after cleaning in accumulator 96.

Hereafter, whether control unit 190 is cold after judging to be have passed through since shutoff valve 98 for being cleaned to the storage of accumulator 96 But time (step S12) of the regulation of agent.Here, the CPU 200 of control unit 190 carries out timing using such as built-in timer. In addition, it is stipulated that time be in capacity and time per unit according to accumulator 96 cooling agent from magnetic filter device 1A, 1B Set to the influx of accumulator 96.

Next, control unit 190 judge last time back washing treatment whether with magnetic filter device 1A as object (step S13).Specifically, control unit 190 according to the identification information of the magnetic filter device 1A for being stored in memory 292 come on judging Whether secondary back washing is processed with magnetic filter device 1A as object.

In step s 13, (step S13 in the case that the back washing treatment in last time is with magnetic filter device 1A as object： It is), control unit 190 is controlled the sky of compressed air source 138 to the air triple valve 134,136 of magnetic filter device 1B Gas supply target switches to lower port 143a sides (step S14).Now, for magnetic filter device 1B, control unit 190 is by sky The linking objective of gas pipe arrangement 135 switches to the side of air line 142.

Next, control unit 190 makes compressed air source 138 be acted (step S15).Now, in magnetic filter device In 1B, the lower section of the magnet unit 2 from the lower port 143a for the treatment of vessel 6 into magnet room S2 imports compressed air.Thus, Magnet unit 2 is fixed in the top of magnet room S2, completes the preparation that back washing treatment is carried out to magnetic filter device 1B.This Afterwards, control unit 190 carries out back washing treatment (step S16).<3-2>In to the back washing treatment details be described in detail.

On the other hand, in step s 13, if the back washing of last time is processed not with magnetic filter device 1A as object, i.e. on Secondary back washing processes with magnetic filter device 1B as object (step S13：It is).In this case, control unit 190 is to Magnetic filter The air triple valve 134,136 of device device 1A is controlled and for the path from compressed air source 138 to switch to lower port 143a sides (step S17).Now, control unit 190 is controlled to the air triple valve 134,136 of magnetic filter device 1B and incites somebody to action Path from compressed air source 138 switches to upper port 142a sides.

Next, control unit 190 makes compressed air source 138 be acted (step S18).Now, in magnetic filter device In 1A, the lower section of the magnet unit 2 from the lower port 143a for the treatment of vessel 6 into magnet room S2 imports compressed air.Thus, Magnet unit 2 is fixed in the top of magnet room S2, completes the preparation that back washing treatment is carried out to magnetic filter device 1A.This Afterwards, control unit 190 carries out back washing treatment (step S16).<3-2>In to the back washing treatment details be described in detail.

As described above, in the liquid rinse system of present embodiment, alternately to magnetic filter device 1A, 1B is cleaned.

<3-2>Back washing is processed

Next, the back washing treatment to the liquid rinse system of present embodiment is described in detail.

Figure 10 is the flow chart of the action of the back washing treatment of the control unit 190 for showing present embodiment.Additionally, Figure 11~figure 13 is the action specification figure of the magnetic filter device 1A (1B) of present embodiment.

First, the stream of cooling agent is set to flow to pipe arrangement 10 via pipe arrangement 8, process chamber S1 in order from pump 90 Stream (the 1st stream).

In this condition, first, control unit 190 is controlled to liquid tee valve 18 and cuts the linking objective of pipe arrangement 10 Change to the side (step S21) of pipe arrangement 22.Thus, the stream of cooling agent is switched to from pump 90 through pipe arrangement 8 and matched somebody with somebody from above-mentioned 1st stream The both sides of pipe 10 flow into the stream (the 2nd stream) in process chamber S1.Also, as shown in figure 11, by means of pump 90, even for wearing Cross the stream of pipe arrangement 22, liquid tee valve 18 and pipe arrangement 10, it is also possible to supplying cooling agent in the process chamber S1 for the treatment of vessel 6 (arrow in reference picture 11).Now, the liquid level of cooling agent is pushed to more top than the leading section of pipe arrangement 10 by the submitting pressure of pump 90 At the position of side.Also, the air for being stored in the air storage area A1 of the top of process chamber S1 turns into what is compressed by cooling agent State.

Control unit 190 is cut to the linking objective that liquid tee valve 16 is controlled the pipe arrangement 8 that will be connected with process chamber S1 It is changed to the side (step S22) of pipe arrangement 116 being connected with de- liquid/solid unit 100.Thus, the stream of cooling agent is from above-mentioned 2nd stream Switch to the stream (the 3rd stream) for flowing to pipe arrangement 8 via pipe arrangement 10, process chamber S1 in order from pump 90.Also, such as Figure 12 institutes Show, by means of the pressure of the compressed air for being stored in air storage area A1, the cooling agent imported in process chamber S1 is smooth Flowed out (arrow in reference picture 12) to pipe arrangement 116 on ground.

Next, whether control unit 190 judges passed through after the linking objective of switching pipe arrangement 8 and the linking objective of pipe arrangement 10 Spend the time (step S23) of regulation.As long as no the time by regulation, then control unit 190 maintains holding state (step S23： It is no).

Now, as shown in figure 13, constantly supplied in process chamber S1 through pipe arrangement 22 from the cooling agent that pump 90 is supplied (arrow in reference picture 13).Thus, the stream that filtering material 4 is flowed to cooling agent during with using magnetic filter device 1A (1B) Cooling agent cleaning in the opposite direction.

In step S23, if it is decided that be time (the step S23 by specifying：It is), then control unit 190 is to liquid three Port valve 18 is controlled and for the linking objective of pipe arrangement 10 to switch to the side (step S24) of pipe arrangement 118.

Hereafter, control unit 190 makes pump 90 stop (step S25).In addition, control unit 190 can not also carry out step S25's Process and continue transfer tube 90.

Finally, control unit 190 is controlled to switch to the linking objective of pipe arrangement 8 to liquid tee valve 16 and connects with pump 90 The side (step S26) of pipe arrangement 114 for connecing.

<4>Summarize

But, for being configured without the structure of yoke in process chamber S1 (for example, the magnetic mistake of the comparative example shown in Fig. 6 Filter unit 1001), in most cases, vicinity of the magnetic line of force from certain magnetic pole through magnet unit is different towards others Magnetic pole.Therefore, in process chamber S1, near magnet unit 2, the intensity in magnetic field becomes big, but in the position away from magnet unit 2 Put, the intensity in magnetic field declines.

On the other hand, in the magnetic filter device 1A (1B) of present embodiment, because yoke 41 is configured to the magnetic line of force The direction away from magnet unit 2 is introduced, therefore, it is possible to prevent the decline of the intensity in the magnetic field of the position away from magnet unit 2.

The result, for the magnetic field that multiple magnetic poles of magnet unit 2 are produced in process chamber S1 respectively, can reduce and locate The weighting of the distribution of the intensity in the magnetic field in the vertical direction in the flow direction of the cooling agent after reason.

Additionally, control unit 190 is controlled to liquid tee valve 16,18 stream of cooling agent is switched from the 1st stream It is the 2nd stream, thus, the air for being present in air storage area A1 is compressed.Hereafter, control unit 190 to liquid tee valve 16, 18 are controlled and for the stream of cooling agent to switch to the 3rd stream from the 2nd stream, thus, are present in the cooling in process chamber S1 Agent is successfully released in the presence of the pressure of the air of air storage area A1 is present in pipe arrangement 8.Now, due to attachment The dirt of the ferromagnetic particle in filtering material 4 etc. is cleaned and flowed away by cooling agent, therefore, eliminate the stifled of filtering material 4 Plug.

(1) in the magnetic filter device 1A (1B) of implementation method, in treatment vessel 6, the inner side of the 1st cylindrical body 61 Magnet room S2 is constituted, the example that the region between the 2nd cylindrical body 62 and the 1st cylindrical body 61 constitutes process chamber S1 is illustrated. However, it can be, treatment vessel is made up of in the same manner as implementation method the 2nd cylindrical body 62 and the 1st cylindrical body 61, the 1st tubular The inner side of body 61 constitutes process chamber, and the region between the 2nd cylindrical body 62 and the 1st cylindrical body 61 constitutes magnet room.I.e., it is also possible to It is that the inner side of the 1st cylindrical body 61 for the treatment of vessel 6 constitutes process chamber S1, and magnet unit 2 is configured so that the 1st cylindrical body 61 A part is around cylinder axle.

Figure 14 is the summary construction diagram of the magnetic filter device 201 of this variation.In addition, in fig. 14, pair and embodiment party The same structure of formula assigns same label and suitably omits the description.

In magnetic filter device 201, treatment vessel 206 is in the same manner as implementation method by the 2nd cylindrical body 62 and the 1st tubular Body 61 is constituted.Also, the inner side of the 1st cylindrical body 61 constitutes process chamber S21, the area between the 2nd cylindrical body 62 and the 1st cylindrical body 61 Domain constitutes magnet room S22.

Magnet unit 202 is configured with magnet room S22.Magnet unit 202 is by multiple (being in fig. 14 8) magnet 225 are constituted with multiple (being in fig. 14 9) pair yoke 227,227A, 227B.Magnet 225 and secondary yoke 227,227A, 227B With shape when overlooking in substantially annular shape.Also, the internal diameter size of magnet 225 and secondary yoke 27 is set to than the 1st The outside dimension of shape body 61 is slightly larger.

Also, in the same manner as implementation method, magnet unit 202 can be in magnet room S22 along the cylinder of the 1st cylindrical body 61 Direction of principal axis (above-below direction in Figure 14) is mobile.

Figure 15 shows the yoke 241 of this variation, and (a) is stereogram, and (b) is sectional view.

Yoke 241 has discoid shape.The outside dimension of yoke 241 is than in the 1st cylindrical body 61 for the treatment of vessel 6 Footpath size is slightly smaller.Additionally, being formed with multiple through hole 241a of its thickness direction of insertion in yoke 241.Also, in yoke 241 are configured in the state of filtering material configuring area S211, and the inner side as the through hole 241a in yoke 241 was filled with The state of filter material material 4.

According to this structure, due to the magnetic flux density in process chamber S21 can be improved, therefore, it is possible to improve strainability.

(2) in embodiments, the structure that magnet unit 2 possesses secondary yoke 27 is illustrated, but, differ fixed limit In the structure for possessing secondary yoke.

(a)~(d) in Figure 16 is the sectional view of a part for the magnetic filter device for showing this variation.

Magnetic filter device shown in (a) in Figure 16 possesses the treatment vessel 306 of tubular, in treatment vessel 306 Side along parellel arranged 2 tabulars of cylinder axis direction for the treatment of vessel 306 yoke 341a and be configured at the outer for the treatment of vessel 306 The magnet unit 302a in portion.The through hole (not shown) in full thickness direction is formed with 2 yoke 341a, this 2 yokes 341a is configured to seal the inner side for the treatment of vessel 306.Additionally, being configured with filtering material 4 between 2 yoke 341a.

Also, magnet unit 302a is configured to of the cylinder axle around treatment vessel 306 in the outer wall with treatment vessel 306 Part is opposed.Additionally, magnet unit 302a is made up of 1 magnet of the shape with substantially C-shaped, 2 leading sections respectively with Yoke 341a magnetic couplings.2 leading sections of magnet unit 302a turn into magnetic pole.

The magnet unit 302b of the outside for being configured at treatment vessel 306 of the magnetic filter device shown in (b) in Figure 16 It is different from the structure shown in (a) in Figure 16.

In magnet unit 302b, 3 magnet 302b1 are configured with the state being laminated.Adjacent 2 magnet 302b1 are each other The magnetic pole (N poles and N poles or S poles and S poles) for being configured to identical polar is relative.Also, the boundary portion of adjacent 2 magnet 302b1 The position corresponding with yoke 341a divided in the outer wall for the treatment of vessel 306.Additionally, adjacent 2 magnetic of magnet unit 302b The boundary section of iron 302b1 turns into magnetic pole.

In the configuration of the yoke 341a as shown in (a) in figure 16 and (b), in the inner side for the treatment of vessel 306 The magnetic field along the cylinder axis direction for the treatment of vessel 306 is produced in process chamber.

The structure shown in (a) in the configuration of the yoke 341b of the magnetic filter device shown in (c) in Figure 16 and Figure 16 It is different.

Yoke 341b is configured at the opposition side with magnet unit 302a sides of the inside for the treatment of vessel 306.Also, in yoke Filtering material 4 is separated between 341b and magnet unit 302a.Filtering material 4 (is not schemed by the upper lid same with above-mentioned implementation method Show) and lower cover (not shown) be fixed on the position of regulation.Additionally, yoke 341b is configured to the cylinder axis direction in treatment vessel 306 On across 2 leading sections of magnet unit 302a.Thus, due to the 2 leading sections radiation from magnet unit 302a can be reduced Magnetic flux in the magnetic flux being leaked to outside yoke 341b composition, therefore, it is possible to effectively apply flexibly from magnet unit 302a radiation Magnetic flux.

Magnetic filter device shown in (d) in Figure 16 has with the magnetic filter device shown in (b) in Figure 16 substantially Same structure, the configuration of yoke 341b is different from the structure shown in (b) in Figure 16.

Yoke 341b is configured at the opposition side with magnet unit 302b sides of the inside for the treatment of vessel 306.Additionally, yoke 341b is configured on the cylinder axis direction for the treatment of vessel 306 dividing across the adjacent 2 magnet 302b1 for constituting magnet unit 302b Boundary part.Thus, yoke is leaked in the magnetic flux for being radiated due to the boundary section that can be reduced from adjacent 2 magnet 302b1 The composition of the magnetic flux outside 341b, therefore, it is possible to effectively apply flexibly the magnetic flux from magnet unit 302a radiation.

Additionally, in the configuration of yoke 341b as shown in (c) in figure 16 and (d), in treatment vessel 306 The magnetic field vertical with the cylinder axis direction for the treatment of vessel 306 is produced in the process chamber of side.

As a result, in the magnetic filter device shown in (c) and (d) in figure 16, yoke 341b is configured in process chamber Inside, is formed with the stream of cooling agent between magnet unit 2, also, yoke 341b is set to allow the stream of cooling agent It is dynamic.Also, yoke 341b introduces the magnetic line of force respectively with multiple magnetic poles of magnet unit 2 as starting point.

In this case, because yoke 341b introduces the magnetic line of force respectively with multiple magnetic poles of magnet unit 2 as starting point, Therefore, it is possible to improve the magnetic flux density from magnet unit 2 towards the magnetic field of yoke 341b.

(3) configuration of the number of secondary yoke or secondary yoke is not limited to the knot of the magnetic filter device 1A (1B) of implementation method Structure.

(a)~(f) in Figure 17 is the sectional view of a part for the magnetic filter device for showing this variation.

The structure shown in (a) in the magnetic filter device Figure 16 for illustrating middle with above-mentioned (2) shown in (a) in Figure 17 is big Cause identical, magnet unit 402a differences.In addition, pair structure same with the structure shown in (a) in Figure 16 assigns same label And suitably omit the description.Additionally, in magnetic filter device shown in (a) in fig. 17~(f), magnet unit is configured to and place Manage container 306 outer wall in the cylinder axle around treatment vessel 306 it is a part of opposed.

As shown in (a) in Figure 17, magnet unit 402a is made up of 1 magnet 425a and 2 pair yoke 427a.And And, 2 secondary yoke 427a respectively with magnet 425a and yoke 341a magnetic couplings.

Magnetic filter device shown in (b) in Figure 17 has with the magnetic filter device shown in (a) in Figure 16 substantially Same structure, magnet unit 402b is different.In addition, same to the structure same with the structure shown in (a) in Figure 16 imparting Label is simultaneously suitably omitted the description.

As shown in (b) in Figure 17, magnet unit 402b is made up of 2 magnet 425b and 1 pair yoke 427b.And And, 2 magnet 425b distinguish side at one end and yoke 341a magnetic couplings, in another side and secondary yoke 427b magnetic couplings.Additionally, 2 magnet 425b it is vertical with the cylinder axis direction for the treatment of vessel 306 radially, polarity is opposite mutually.

Magnetic filter device shown in (c) in Figure 17 has with the magnetic filter device shown in (a) in Figure 16 substantially Same structure, magnet unit 402c is different.In addition, same to the structure same with the structure shown in (a) in Figure 16 imparting Label is simultaneously suitably omitted the description.

As shown in (c) in Figure 17, magnet unit 402c is with 3 magnet 425c, 425d, 425e across secondary yoke 427c The state configuration of stacking.Adjacent 2 magnet (magnet 425c and magnet 425d and, magnet 425d and magnet 425e) is configured each other For the magnetic pole (N poles and N poles or S poles and S poles) of identical polar is relative.Also, secondary yoke 427c is located at the outer for the treatment of vessel 306 Position corresponding with yoke 341a in wall, with yoke 341a magnetic couplings.

(a) in the configuration of the yoke 341b of each magnetic filter device shown in (d)~(f) in Figure 17 and Figure 17~ C the structure shown in () is different.

In magnetic filter device shown in (d) in fig. 17~(f), yoke 341b is with along in treatment vessel 306 The shape configuration of a part for wall.That is, the overall of yoke 41 is configured at far on the direction vertical with the flow direction of cooling agent From the position of magnet unit 402a, 402b, 402c.Also, the magnet unit in the perisporium of yoke 341b and treatment vessel 306 Filtering material 4 is accompanied between a part for 402a, 402b, 402c side.In addition, filtering material 4 is by same with above-mentioned implementation method Upper lid (not shown) and lower cover (not shown) be fixed on the position of regulation.

In magnetic filter device shown in (d) in fig. 17 and (f), yoke 341b is configured in treatment vessel 306 2 opposed with secondary yoke 427a, 427c position on cylinder axis direction in treatment vessel 306.Additionally, in fig. 17 E in the magnetic filter device shown in (), yoke 341b is configured on the cylinder axis direction for the treatment of vessel 306 across treatment vessel 2 opposed with magnet 425b position in 306.

Thus, due to that can reduce from letting out in the magnetic flux of 2 leading sections radiation of magnet unit 402a, 402b, 402c The composition of the magnetic flux outside yoke 341b is drained to, therefore, it is possible to effectively apply flexibly the magnetic from magnet unit 402a, 402b, 402c radiation It is logical.

(4) in variation (2) and (3), holding around treatment in the outer wall with treatment vessel 306 is configured to magnet unit A part of opposed example of the cylinder axle of device 306 is illustrated, but magnet unit 2 configuration not limited to this.For example, it is also possible to It is that magnet unit is configured so that the cylinder axle of the part around treatment vessel 306 of the outer wall for the treatment of vessel 306.

(a)~(e) in (a)~(d) and Figure 19 in Figure 18 is of the magnetic filter device for showing this variation The sectional view for dividing.

Magnetic filter device shown in (a) in Figure 18 is roughly the same with the magnetic filter device shown in (a) in Figure 16, The structure of magnet unit 502a is different.In addition, pair structure same with the structure shown in (a) in Figure 16 assigns same label simultaneously Suitably omit the description.

Magnet unit 502a has the substantially circular shape around treatment vessel 306 in the way of around cylinder axle, by 1 permanent magnet for having the shape of substantially C-shaped with its circumferential vertical section is constituted.Also, match somebody with somebody in magnet unit 502a In the state of being placed in around treatment vessel 306, on the section vertical with the circumference of magnet unit 502a, 2 leading sections with The outer wall for the treatment of vessel 306 is opposed.Now, 2 leading sections of magnet unit 502a respectively with yoke 341a magnetic couplings.

Magnetic filter device shown in (b) in Figure 18 is roughly the same with the magnetic filter device shown in (a) in Figure 16, The structure of magnet unit 502b is different from the structure shown in (a) in Figure 16.

In magnet unit 502b, with substantially circular shape and make a part for treatment vessel 306 around place 3 magnet 502b1 for managing the cylinder axle of container 306 are configured with the state being laminated.Adjacent 2 magnet 302b1 are configured to identical each other The magnetic pole (N poles and N poles or S poles and S poles) of polarity is relative.Also, the boundary section of adjacent 2 magnet 502b1 is located at treatment Position corresponding with yoke 341a in the outer wall of container 306.

Magnetic filter device shown in (c) in Figure 18 is roughly the same with the structure shown in (a) in Figure 16, magnet unit The structure of 502c is different.In addition, pair structure same with the structure shown in (a) in Figure 16 assigns same label and suitably omits Explanation.

As shown in (c) in Figure 18, magnet unit 502c is made up of 1 magnet 525c and 2 pair yoke 527c.Magnet 525c and secondary yoke 527c have substantially circular shape, a part for the outer wall for the treatment of vessel 306 is held around treatment The cylinder axle of device 306.Also, 2 secondary yoke 527c respectively with magnet 525c and yoke 341a magnetic couplings.

Magnetic filter device shown in (d) in Figure 18 has with the magnetic filter device shown in (a) in Figure 16 substantially Same structure, magnet unit 502d is different.In addition, the same structure of structure shown in (a) in Figure 16 assigns same label And suitably omit the description.

As shown in (d) in Figure 18, magnet unit 502d is made up of 2 magnet 525d and 1 pair yoke 527d.Magnet 525d and secondary yoke 527d have substantially circular shape, a part for the outer wall for the treatment of vessel 306 is held around treatment The cylinder axle of device 306.Also, 2 magnet 525d distinguish side at one end and yoke 341a magnetic couplings, in another side and secondary yoke 527b magnetic couplings.Additionally, 2 magnet 525d it is vertical with the cylinder axis direction for the treatment of vessel 306 radially, polarity is reciprocal.

(a) in the configuration of the yoke 841a of each magnetic filter device shown in (a)~(d) in Figure 19 and Figure 18~ D the structure shown in () is different.In addition, pair structure same with the structure shown in (a)~(d) in Figure 18 assigns same label simultaneously Suitably omit the description.

In the magnetic filter device shown in (a)~(d) in Figure 19, yoke 841a is with along in treatment vessel 306 The shape configuration of heart axle.Also, filtering material 4 is separated between the inwall of yoke 841a and treatment vessel 306.In addition, filtering Material 4 is fixed at the position of regulation by the upper lid (not shown) and lower cover (not shown) same with above-mentioned implementation method.

Additionally, in magnetic filter device shown in (b) in Figure 19, or, adjacent 2 magnet 502b1 it Between secondary yoke is set.

In magnetic filter device shown in (e) in Figure 19, between magnet 825a and magnet 825b, magnet 825b with Substantially circular secondary yoke 827a is separated between magnet 825c respectively.Also, yoke 841a is configured in treatment vessel 306 2 positions opposed with 2 secondary yoke 827a difference on cylinder axis direction in treatment vessel 306.

Additionally, in the configuration of yoke 841a as shown in (a)~(e) in Figure 19, in treatment vessel 306 The magnetic field vertical with the cylinder axis direction for the treatment of vessel 306 is produced in the process chamber of side.

(5) in variation (1), possesses the secondary yoke 27,227A, 227B of multiple magnet 225, multiple to magnet unit 2 Structure is illustrated, but, magnet unit is not limited to the structure for possessing secondary yoke.Additionally, magnet unit is not limited to possess many The structure of individual magnet 225.

(a)~(d) in (a) and (b) and Figure 21 in Figure 20 is the one of the magnetic filter device for showing this variation Partial sectional view.

Magnetic filter device shown in (a) in Figure 20 possesses treatment vessel 606,2 yoke 641a, the filter materials of tabular 4 and magnet unit 602a of material.Treatment vessel 606 is configured to comprising cylindric the 2nd cylindrical body 662 and the 1st cylindrical body 661, wherein, the 1st cylindrical body 661 is cylindric, also, on the section vertical with cylinder axis direction, external diameter is than the 2nd cylindrical body 662 internal diameter is small.2 yoke 641a are shaped generally as annular shape, in the 2nd cylindrical body 662 for the treatment of vessel 606 and the 1st tubular Configured side by side along the cylinder axis direction for the treatment of vessel 606 in process chamber between body 661.It is formed with 2 yoke 641a and is passed through The through hole (not shown) of logical thickness direction, this 2 yoke 641a are configured to seal above-mentioned process chamber.Additionally, in 2 yokes Filtering material 4 is configured between 641a.

Magnet unit 602a is made up of 3 columned magnet 602a1.3 magnet 602a1 are with the 1st cylindrical body 661 Inner side magnet room in along the 1st cylindrical body 661 cylinder axis direction be laminated state and configure.Additionally, adjacent 2 magnet The boundary section of 602a1 is located at the position corresponding with yoke 641a in the inwall of the 1st cylindrical body 661.

Magnetic filter device shown in (b) in Figure 20 has with the magnetic filter device shown in (a) in Figure 20 substantially Same structure, the structure of magnet unit 602b is different.In addition, pair structure same with the structure shown in (a) in Figure 20 is assigned Give same label and suitably omit the description.

Magnet unit 602b possesses 1 magnet 625b and 2 secondary yoke 627b.Also, 2 secondary yoke 627b respectively with Magnet 625b and yoke 641a magnetic couplings.

Additionally, in the configuration of yoke 641a as shown in (a) in fig. 20 and (b), in treatment vessel 306 The magnetic field along the cylinder axis direction for the treatment of vessel 606 is produced in the process chamber of side.

(a) in the configuration of the yoke 941a of each magnetic filter device shown in (a) and (b) in Figure 21 and Figure 20 and B the structure shown in () is different.In addition, pair structure same with the structure shown in (a) and (b) in Figure 20 assigns same label simultaneously Suitably omit the description.

In magnetic filter device shown in (a) in figure 21 and (b), cylindric yoke 941a is with along treatment vessel The shape configuration of the inwall of 606 the 2nd cylindrical body 662.Also, it is separated between the outer wall of yoke 941a and the 1st cylindrical body 661 Filtering material 4.In addition, filtering material 4 is (not shown) fixed by the upper lid (not shown) same with above-mentioned implementation method and lower cover At the position of regulation.

Each magnetic filter device shown in (c) and (d) in Figure 21 has and the magnetic shown in (a) and (b) in Figure 21 The substantially same structure of filter for installation, the structure of magnet unit is different.

In magnetic filter device shown in (c) in figure 21, magnet unit 902a is by multiple (in (c) in figure 21 It is 5) magnet 902a1 compositions.Multiple magnet 902a1 are configured with the state being laminated.Additionally, adjacent 2 magnet 902a1 match somebody with somebody each other The magnetic pole (N poles and N poles or S poles and S poles) for being set to identical polar is relative.Also, the yoke 941b of cylindrical shape is with across adjacent 2 Whole mode of the boundary section of individual magnet 902a1 along the 2nd cylindrical body 662 inner wall arrangement.

In magnetic filter device shown in (d) in figure 21, magnet unit 902b is by multiple (in (d) in figure 21 It is 4) magnet 925b and multiple (being 5 in (d) in figure 21) pair yoke 927b constitutes.Multiple magnet 925b and multiple Secondary yoke 927b is configured with alternately laminated state.Additionally, adjacent 2 magnet 925b are configured to the magnetic pole (N of identical polar each other Pole and N poles or S poles and S poles) it is relative.Also, the yoke 941b of cylindrical shape with the outer wall of the 1st cylindrical body 661 with Whole mode of multiple pair yoke 927b opposed part along the 2nd cylindrical body 662 inner wall arrangement.

Additionally, (a) in figure 21~(d) shown in as yoke 941a, 941b configuration in, in treatment vessel Produced in the process chamber of 606 inner side vertical with the cylinder axis direction for the treatment of vessel 606 (the 1st cylindrical body 661, the 2nd cylindrical body 662) Magnetic field.

(6) it is many to possessing in the magnetic filter device illustrated in the magnetic filter device and variation (1) of implementation method The example of individual magnet and 1 alternately laminated magnet unit of multiple pair yokes is illustrated.But, the number of magnet unit is not It is limited to 1, it is also possible to possess multiple magnet units.

(a) and (b) in Figure 22 is the sectional view of a part for the magnetic filter device for showing this variation.

Magnetic filter device shown in (a) in Figure 22 has with the magnetic filter device shown in (a) in Figure 16 substantially Identical structure, it is different from the structure shown in (a) in Figure 16 on following point, with respectively around the outer wall for the treatment of vessel 306 In separate 2 positions on the cylinder axis direction for the treatment of vessel 306 mode distributed magnet unit 702a, 702b.

Each magnet unit 702a, 702b are made up of 1 magnet 725a, 725b and 2 secondary yokes 727a, 727b respectively. Magnet 725a, 725b and secondary yoke 727a, 727b all have substantially circular shape, make the one of the outer wall for the treatment of vessel 306 Cylinder axle of the part around treatment vessel 306.Also, 2 secondary yokes 727a, 727b respectively with magnet 725a, 725b and yoke 741a, 741b magnetic coupling.

Magnetic filter device shown in (b) in Figure 22 has with the magnetic filter device shown in (b) in Figure 20 substantially Same structure is different from the structure shown in (b) in Figure 20 in following point：With respectively in the outer wall for the treatment of vessel 306 Separate 2 positions on the cylinder axis direction for the treatment of vessel 306 mode distributed magnet unit 702c, 702d.

Each magnet unit 702c, 702d are made up of 1 magnet 725c, 725d and 2 secondary yokes 727c, 727d respectively. Magnet 725c, 725d and secondary yoke 727c, 727d all have substantially discoid shape.Also, 2 secondary yokes 727c, 727d Respectively with magnet 725c, 725d and yoke 741g, 741h magnetic coupling.

Additionally, in yoke 741a, 741b, the configuration of 741g, 741h as shown in (a) in fig. 22 and (b), Produced along treatment vessel 306,606 (the 1st cylindrical body 661, the 2nd cylindrical body in the process chamber of the inner side for the treatment of vessel 306,606 662) magnetic field of cylinder axis direction.

(7) in implementation method and variation, to being answered with each pole pair of magnet unit in the process chamber for the treatment of vessel Position it is neighbouring each configuration 1 yoke example be illustrated.But, the configuration not limited to this of yoke, for example, it is also possible to Be, the vicinity of multiple yokes position corresponding with each magnetic pole in the process chamber along treatment vessel cylinder axis direction (cooling agent Flow direction) overlap.

(8) in implementation method and above-mentioned each variation, magnetic filter device will be included in the liquid such as cooling agent Ferromagnetic particulate filter is removed and the example of cleaning liquid is illustrated.But, cleaned as magnetic filter device The processed fluid of object is not limited to liquid, for example, can also be the gas for being dispersed with ferromagnetic particle.

(9) in embodiments, the magnet of the part to constituting magnet unit is that the situation of permanent magnet is said It is bright, but, the species of magnet is not limited to permanent magnet, or electromagnet.

(10) in embodiments, when filtering material 4 is cleaned, to make cooling agent to use magnetic filter device 1A The example of the opposite direction flowing in the flow direction of cooling agent when (1B) is illustrated.But, the cleaning side of filtering material 4 To not limited to this, for example, it is also possible to be the top for making magnet unit 2 be configured at magnet room S2, make cooling agent to use magnetic mistake The flow direction identical direction flowing of cooling agent during filter unit 1A (1B).

In this case, as long as example, liquid tee valve 18 by the linking objective of pipe arrangement 10 switch to the side of pipe arrangement 118 and Pipe arrangement (not shown) side being directly connected to de- liquid/solid unit 100.Also, when filtering material 4 is cleaned, liquid three As long as port valve 18 linking objective of pipe arrangement 10 is switched to be connected with de- liquid/solid unit 100 with tube side.

(11) in embodiments, vicinity, the i.e. magnetic filter device 1A (1B) of pump 90 is arranged to pressure sensor 120 Coolant entrance side pipe arrangement 114, detect that the example of submitting pressure of pump 90 is illustrated, but, pressure sensor 120 The pipe arrangement 118 of the coolant outlet side of magnetic filter device 1A (1B) can also be arranged at.In this case, pressure sensor 120 pressure losses of the detection based on the stream being made up of pipe arrangement 118, valve 98 and pipe arrangement 114, in step s 9, as long as judging Whether more than setting.And then, pressure sensor 120 can also detect that the cooling agent of magnetic filter device 1A (1B) enters Pressure differential between the mouth pipe arrangement 114 of side and the pipe arrangement 118 of coolant outlet side.Also, in step S9 (reference picture 8), only Determine whether more than setting.

(12) in embodiments, filtering material is configured with process chamber, however, it is also possible to omit filtering material. In this case, the dirt in the cooling agent in process chamber can be adsorbed in yoke, and removal is filtered from cooling agent.

Label declaration

1A、1B、1001：Magnetic filter device；2、202、302a、302b、402a、402b、402c、502a、502b、 502c、502d、602a、602b、702a、702b、702c、702d、902a、902b：Magnet unit；4：Filtering material；6、206、 306、606：Treatment vessel；7：Top board；8、10、22、99、114、116、118：Pipe arrangement；8a：Treatment fluid imports discharge port； 9：Base station；16、18：Liquid tee valve；17a：Upper lid；17b：Lower cover；98：Valve；25、225、302b1、425a、425b、425c、 425d、425e、502b1、525c、525d、602a1、625b、725a、725b、725c、725d、825a、825b、825c、 902a1、925b：Magnet；27、27A、27B、227、227A、227B、427a、427b、427c、527b、527c、527d、627b、 727a、727c、727d、827a、927b：Secondary yoke；41、241、341a、341b、641a、741a、741b、741g、741h、 841a、941a、941b：Yoke；41a、41b、241a：Through hole；61、661：1st cylindrical body；62、662：2nd cylindrical body；90、 102：Pump；96：Accumulator；100：De- liquid/solid unit；104：Surge tank；106：Recycling can；108：Lathe；120：Pressure is passed Sensor；134、136：Air triple valve；135、137、142、143：Air line；138：Compressed air source；142a：Upper end Mouthful；143a：Lower port；190：Control unit；292：Memory；296：Input/output port；298：Control program；A1：Air Storage area；S1、S21：Process chamber；S2、S22：Magnet room；S11、S211：Filtering material configuring area.

Claims

1. a kind of liquid rinse system, it possesses：

Magnetic filter device, it possesses：Treatment vessel, it has process chamber, and the process chamber is adsorbed using magneticaction and flowed through Scattered ferromagnetic particle in internal processed fluid, the ferromagnetic particle is crossed from the processed fluid and is filtered off Remove；Magnet unit, it is so that the multiple magnetic poles comprising different magnetic poles are along the flow direction configuration of the processed fluid and are located at The mode of the outside of the process chamber is constituted；The yoke of more than 1, they are respectively allowing the flowing of the processed fluid Mode is arranged in the process chamber, the magnetic line of force respectively with the multiple magnetic pole as starting point is guided into remote in the process chamber From the direction of the magnet unit；And filtering material, it is made up of magnetic material, and is configured at the described of the treatment vessel In process chamber；

Pump, the process chamber of its treatment vessel having to the magnetic filter device supplies the institute being made up of liquid State processed fluid；And

Switching part, the stream of its described processed fluid supplied to the pump is switched over,

The treatment vessel has：

1st pipe arrangement, it is connected with the process chamber；

2nd pipe arrangement, its be located at the filtering material in the process chamber with the described 1st with the opposite side of tube side, with institute State connection in process chamber；And

Air storage area forming portion, the described 2nd of its filtering material in the process chamber forms storage with tube side The air storage area of air,

The switching part with the stream of the pump is supplied described processed fluid from the pump through the 1st pipe arrangement and The mode that the both sides of the 2nd pipe arrangement are flowed into the process chamber is switched over, thus to being present in the air storage area In air be compressed, then,

The switching part is carried out in the way of the stream of described processed fluid of the pump supply is passed through the 2nd pipe arrangement Switching, thus using the pressure of the air being present in after being compressed in the air storage area, will be present in the treatment Indoor described processed fluid is extruded through the 1st pipe arrangement to the outside of the process chamber.

2. liquid rinse system according to claim 1, wherein,

Air storage area forming portion is connected with the 2nd pipe arrangement, and prominent pipe arrangement is constituted from the process chamber.

3. liquid rinse system according to claim 1, wherein,

The switching part includes changeover valve.

4. the liquid rinse system described in any one in claims 1 to 3, wherein,

The liquid rinse system is also equipped with：

The 3rd pipe arrangement being connected with the pump；

4th pipe arrangement of liquid after treatment；

The discharge pipe arrangement of the discharge of the processed fluid；And

The bypass pipe arrangement of branch is carried out to the 2nd pipe arrangement and the 3rd pipe arrangement,

The switching part has：

1st triple valve, it makes the 1st pipe arrangement be connected with any one party in the 3rd pipe arrangement and the discharge pipe arrangement；

2nd triple valve, it makes the 2nd pipe arrangement be connected with any one party in the 4th pipe arrangement and the bypass pipe arrangement；And

Control unit, it is controlled to the 1st triple valve and the 2nd triple valve,

The control unit is controlled to the 1st triple valve, the 1st pipe arrangement is connected with the 3rd pipe arrangement, and to institute State the 2nd triple valve to be controlled, the 2nd pipe arrangement is connected with the 4th pipe arrangement, thus, switch to from the pump in order The 1st stream of the 2nd pipe arrangement is flowed to via the 1st pipe arrangement and the filtering material,

The control unit is controlled to the 1st triple valve, the 1st pipe arrangement is connected with the 3rd pipe arrangement, and to institute State the 2nd triple valve to be controlled, the 2nd pipe arrangement is connected with the bypass pipe arrangement, thus, switch to from the pump and pass through institute The 2nd stream stated the 1st pipe arrangement and the 2nd pipe arrangement and flow in the process chamber,

The control unit is controlled to the 1st triple valve, the 1st pipe arrangement is connected with pipe arrangement with the discharge, and 2nd triple valve is controlled, the 2nd pipe arrangement is connected with the bypass pipe arrangement, thus, switched to from pump in order The 3rd stream of the 1st pipe arrangement is flowed to via the 2nd pipe arrangement and filtering material.

5. a kind of liquid rinse method, has used pump and magnetic filter device, and the magnetic filter device possesses：Treatment vessel, its With process chamber, the process chamber adsorbs scattered ferromagnetic grain in the processed fluid for flowing through inside using magneticaction Son, removal is filtered by the ferromagnetic particle from the processed fluid；Magnet unit, it is with the multiple comprising different magnetic poles Magnetic pole is configured along the flow direction of the processed fluid and the mode positioned at the outside of the process chamber is constituted；More than 1 Yoke, they are arranged in the process chamber in the way of allowing the flowing of the processed fluid respectively, will respectively with institute State the direction away from the magnet unit that the magnetic line of force that multiple magnetic poles are starting point is guided into the process chamber；And filter material Material, it is made up of magnetic material, and is configured in the process chamber of the treatment vessel, and the pump is to the magnetic filter device The described processed fluid that the process chamber supply of the treatment vessel being had is made up of liquid,

The treatment vessel has：The 1st pipe arrangement connected with the process chamber；And the 2nd pipe arrangement, it is located at the process chamber In the filtering material with the described 1st with the opposite side of tube side, and connected with the process chamber,

The liquid rinse method is comprised the following steps：

The described 2nd air storage area with tube side formation stored air of the filtering material in the process chamber；

Matched somebody with somebody through the 1st pipe arrangement and the described 2nd from the pump with the stream of the described processed fluid for the pump is supplied The mode that the both sides of pipe are flowed into the process chamber is switched over, and is thus entered to being present in the air in the air storage area Row compression；And

Switched in the way of the stream of described processed fluid of the pump supply is passed through the 2nd pipe arrangement, thus Using the pressure of the air being present in after being compressed in the air storage area, make to be present in described in the process chamber Processed fluid is extruded through the 1st pipe arrangement to the outside of the process chamber.