Summary of the invention
It is an object of the invention to for the technical problem that prior art exists, the method of design of a kind of flying probe tester motion girder construction is provided, utilize rigid multi-body dynamics power and compliant motion mechanical analyzing method, joint portion and motion beam base plate to motion girder construction carries out optimum respectively, it is possible to design high performance motion girder construction fast and effectively.
In order to solve problem set forth above, the technical solution used in the present invention is:
A method of design for flying probe tester motion girder construction, the base plate two ends of this motion beam are respectively arranged with slide block, and motion beam is coordinated with the X-axis guide rail on flying probe tester by slide block; These method of design concrete steps are as follows:
Step S1: according to the range demands of motion beam on flying probe tester, it is determined that the length of motion beam base plate, thus determine the span of base plate two ends slide block;
Step S2: according to the motion girder construction gross weight of the base plate two ends slide block span determined, the slide block kind selected in advance and setting, enumerate out the array configuration of different slide block, adopt multi-rigid body dynamic analysis method to set up the analytical model of often kind of slide block array configuration, obtain the characteristic of motion girder construction under often kind of slide block array configuration;
Step S3: according to the characteristic of motion girder construction under the often kind of slide block array configuration obtained, performance and economic target according to motion girder construction select two or more slide block array configuration;
Step S4: according to the slide block array configuration determined, motion girder construction gross weight and the constraint of the installation on flying probe tester, estimate width and the thickness of motion beam base plate, and integrating step S1 determines the length of motion beam base plate, adopt flexible dynamic credit analysis method to set up the analytical model of motion beam base plate, obtain the characteristic of motion beam base plate;
Step S5: according to the requirement of actual complete processing, is optimized motion beam base plate, makes it to meet performance and processing request, it is determined that suitable motion beam base plate;
Step S6: the slide block array configuration of selection is arranged on respectively on the motion beam base plate determined and obtains different motion girder constructions, often kind of motion girder construction is tested, by it under acceleration drives, the inclined pendulum value of the relative initiatively end of comparing motion girder construction driven end, thus obtain meeting the motion girder construction of performance requriements; If the motion girder construction of performance requriements cannot be obtained meeting, then return step S3, reselect slide block array configuration.
In described step S6, motion girder construction is tested, it is driven under 1g acceleration.
A kind of motion girder construction, flying probe tester comprises motor, bearing support and guide rail, and this motion girder construction comprises base plate, the 2nd slide block, the 3rd slide block, Four-slider and the 5th slide block;
The front upper portion of described base plate processes bearing mounting face, lower end processes motor mounting face, the middle part in front processes guide surface, the upper end, the back side of base plate is provided with the 2nd slide block, being provided with the 3rd slide block, Four-slider and the 5th slide block below, the 3rd slide block and Four-slider are horizontally disposed with and are set in parallel in above the 5th slide block; Motor, bearing support and guide rail are separately positioned on motor mounting face, bearing mounting face and guide surface.
The back side of described base plate is processed with two grooves from top to bottom, and the bottom surface of each groove is evenly equipped with groove.
Side perpendicular with front on described base plate also processes guide surface.
Bottom, side relative with guide surface on described base plate outwards extends to form boss, and the 3rd slide block is positioned on boss.
By circular arc and chamfered transition between the upper surface of described boss and the side of base plate, it is arc transition between lower surface and the side of base plate.
Described 3rd slide block, Four-slider is identical with the length of the 5th slide block and is less than the 2nd slide block.
Compared with prior art, the useful effect of the present invention is:
1, the present invention adopt multi-rigid body kinetics and flexible dynamic credit analysis method to carry out the optimization of motion girder construction joint portion rigidity and the optimization of motion beam base plate, utilize multi-rigid body dynamic analysis method can complete the Optimization analyses of motion girder construction joint portion rigidity fast, to compare the motion girder construction dynamic property of different joint portions rigidity, it is determined that suitable slide block array configuration; Flexible dynamic credit analysis method is utilized can fully to consider the flexible characteristic of motion girder construction, the dynamic property of true reflection motion girder construction, thus carrying out the optimization design of motion beam base plate, two kinds of methods combining get up and can design high performance motion girder construction fast.
2, the present invention processes in the front of base plate the mounting face of bearing, motor and guide rail, convenient installs, make that the structure of motion beam is simple, weight light, also reduce the amount of finish that other installs part; Adopting four pieces of slide blocks at the back side of base plate, and arrange one piece in upper end, lower end arranges the array configuration of four pieces, making the good rigidly of motion girder construction, in high-speed motion process, the distortion of motion girder construction is little, and speed of adjusting is fast, it is possible to realize fast and accurate location.
Embodiment
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully. Accompanying drawing gives the better embodiment of the present invention. But, the present invention can realize in many different forms, is not limited to embodiment described herein. On the contrary, it is provided that the object of these embodiments makes the understanding of the disclosure to the present invention more comprehensively thorough.
Unless otherwise defined, all technology used herein are identical with the implication that the those skilled in the art belonging to the present invention understand usually with scientific terminology. The term used in the description of the invention herein is the object in order to describe specific embodiment, is not intended to be restriction the present invention.
Consulting shown in Fig. 1, the method for design of a kind of flying probe tester motion girder construction provided by the invention, the base plate two ends of this motion beam are respectively arranged with slide block, and motion beam is coordinated with the X-axis guide rail on flying probe tester by slide block, it is achieved do tangential movement in the X direction.
These method of design concrete steps are as follows:
Step S1: according to the range demands of motion beam on flying probe tester, it is determined that the length of motion beam base plate, thus determine the span of base plate two ends slide block.
Step S2: according to the motion girder construction gross weight of the base plate two ends slide block span determined, the slide block kind selected in advance and setting, enumerate out the array configuration of different slide block, adopt multi-rigid body dynamic analysis method to set up the analytical model of often kind of slide block array configuration, obtain the characteristic of motion girder construction under often kind of slide block array configuration.
Step S3: according to the characteristic of motion girder construction under the often kind of slide block array configuration obtained, performance and economic target according to motion girder construction select suitable slide block array configuration.
In above-mentioned, in slide block modeling process, specific direction in slide block and guide rail combination section applies linear and torsional stiffness, and other parts are all thought of as rigid body, namely the linear and torsional stiffness of slide block and guide rail combination section is analyzed, obtain the performance quality of motion girder construction, so that it is determined that suitable slide block array configuration; In addition other parts are thought of as rigid body, it is also possible to reduce the time cost analyzed.
Step S4: according to the slide block array configuration determined, motion girder construction gross weight and the constraint of the installation on flying probe tester, estimate width and the thickness of motion beam base plate, and integrating step S1 determines the length of motion beam base plate, adopt flexible dynamic credit analysis method to set up the analytical model of motion beam base plate, obtain motion beam base plate.
Step S5: according to the requirement of actual complete processing, is optimized the base plate of motion girder construction, makes it to meet performance and processing request, it is determined that suitable motion beam base plate.
In this step, adopt flexible dynamic credit analysis method can fully consider the flexible characteristic of motion girder construction, make analytical results more close to real physical condition, motion beam base plate is carried out topological optimization, obtain performance preferably motion beam base plate.
Step S6: the slide block array configuration of selection is arranged on respectively on the motion beam base plate determined and obtains different motion girder constructions, often kind of motion girder construction is tested, by it under 1g acceleration drives, the inclined pendulum value of the relative initiatively end of comparing motion girder construction driven end, thus obtain meeting the motion girder construction of performance requriements; If the motion girder construction of performance requriements cannot be obtained meeting, then return step S3, reselect slide block array configuration.
Below by concrete enforcement, above-mentioned method of design being described, motion girder construction is subject to the constraint of following condition: the span of (1) motion beam two ends slide block is minimum is 784mm; (2) length of motion beam base plate is minimum is 75mm; (3) oeverall quality of motion girder construction is less than 15kg; (4) motion girder construction is under 1g acceleration drives, and the inclined pendulum of the relative initiatively end of its driven end is less than 0.1mm.
Ten kinds of array configurations of short slide block 1 and long slide block 2 are obtained, as shown in Figure 2 according to above-mentioned constraint condition. Application multi-rigid body analytical procedure sets up the analytical model of various slide block unitized construction, applies linear and torsional stiffness, as shown in Figure 3 on the specific direction of guide rail slide block joint portion.
From analytical results, the slide block comparatively small amt of scheme 4 and scheme 5 in Fig. 2, and performance is relatively excellent, therefore slide block array configuration selection scheme 4 and scheme 5.
According to slide block array configuration and other constraint condition, design motion beam base plate, motion girder construction is carried out flexible dynamic credit analysis, according to analytical results, carry out the optimization of motion beam base arrangement.
According to the requirement of structure properties and complete processing, amendment motion beam base plate, obtain performance preferably two kinds of structures, as shown in Figure 4 and Figure 5, compare the dynamic property of two kinds of structures, Fig. 4 can find out, base plate upper end arranges long slide block 2, two short slide blocks that lower end is arranged in three short slide blocks, 1, three short slide blocks 1 are horizontally disposed with and are positioned at bottom, and that remaining short slide block is set in parallel in above two other short slide block. In Fig. 5 it may be seen that base plate upper end arranges base plate upper end and arranges long slide block 2, and lower end arranges a short slide block in three short slide blocks, 1, three short slide blocks 1 and is arranged on bottom, and two other short slide block is horizontally disposed with, and is parallel to that short slide block bottom.
As shown in Figure 6, adopting the motion girder construction of above-mentioned two kinds of slide blocks combination under 1g acceleration drives, the inclined pendulum of the relative initiatively end of motion girder construction driven end, from curve, the inclined amplitude of oscillation value of two kinds of motion girder constructions is all less than 0.1mm, but the performance of structure 2 is relatively excellent.
Adopt the structure shown in Fig. 5 as the optimum structure formation of motion girder construction, this motion girder construction comprises base plate 21, the 2nd slide block 22, the 3rd slide block 23, Four-slider 24 and the 5th slide block 25,3rd slide block 23, Four-slider 24 are identical with the length of the 5th slide block 25 and are less than the 2nd slide block 22, and peripherals comprises motor seat 11, motor 12, bearing support 13, guide rail 14, slide block 15, Z axle web plate 16 and leading screw 17.
Wherein, as shown in Figure 7, base plate 21 uses the rectangular plate that panel machine processes, the front upper portion of base plate 21 processes bearing mounting face 6, lower end processes motor mounting face 7, the middle part in front and with the side of front vertical on process guide surface 8 respectively, on base plate 21, directly process that these mounting faces are not only convenient to be installed, can also reducing the workload of part processing, the side bottom relative with guide surface 8 outwards extends to form boss.
The upper end, the back side of base plate 21 is provided with the 2nd slide block 22, it is provided with the 3rd slide block 23, Four-slider 24 and the 5th slide block 25 below, 3rd slide block 23 and Four-slider 24 are horizontally disposed with and are set in parallel in above the 5th slide block 25,3rd slide block 23 is positioned on boss, namely when by arranging boss only local increases motion beam overall weight, there is provided to again the 3rd slide block 23 and Four-slider 24 and space is installed, thus ensure that it is reliably installed.
In above-mentioned, by circular arc and chamfered transition between the upper surface of boss and the side of base plate 21, it is arc transition between the side of lower surface and base plate 21, the integrally-built rigidity of motion beam can be improved like this.
In above-mentioned, in order to make motion beam one-piece construction compacter, wherein guide rail is arranged on the side of base plate 21, and such two guide rails are mutually vertical, it is possible to reduce scantlings of the structure.
In above-mentioned, in order to use structure can obtain higher dynamic property under certain mass, while increasing base plate 21 thickness, base plate 21 from top to bottom processes two grooves, the bottom surface of each groove digs six grooves 9 again, to alleviate the quality of structure, by being optimized by the dimensional parameters of these grooves 9, structure is made to have better properties under phase homogenous quantities.
Consulting shown in Fig. 8, motion beam is connected with the guide rail of X-direction on flying probe tester by the slide block at base plate 21 back side, it is possible to realize the motion in the X direction of motion beam and location. the bearing mounting face 6 of motion beam base plate 21 is provided with bearing support 13, motor mounting face 7 is provided with motor 12 by motor seat 11, its front be separately installed with on the guide surface 8 of side together with guide rail 14, every road guide rail 14 is all provided with the first slide block 15, connected by Z axle web plate 16 between two the first slide blocks 15, one end of leading screw 17 is connected with the output shaft of motor 12, the other end is installed and is passed through bearing fit with bearing support 13, leading screw 17 also with Z axle web plate 16 thread fit, Z axle web plate 16 is provided with and surveys head (not showing on figure), namely leading screw 17 is driven by Z axle web plate 16 and surveys head, realize surveying head motion in the Y direction and location.
In above-mentioned, motion beam in the X direction high-speed motion time, due to the form using single side to drive, motion beam can produce distortion in moving process, and understand whole timing architecture driven end (i.e. base plate upper end) and swing back and forth in equilibrium theory of tide. In order to improve positioning precision and test efficiency, it should making the amplitude swung back and forth little as much as possible and be reduced in certain scope as soon as possible, also Reducing distortion also improves speed of adjusting as far as possible. In order to make motion girder construction have good kinetic characteristic, should ensure that base plate 1 and guide rail slide block joint portion have enough rigidity in the design process, reduce the quality of structure simultaneously as far as possible.
Above-described embodiment is that the present invention preferably implements mode; but embodiments of the present invention are not restricted to the described embodiments; the change done under the spirit of other any the present invention of not deviating from and principle, modification, replacement, combination, simplification; all should be the substitute mode of equivalence, it is included within protection scope of the present invention.