CN102490020A - Simple precision displacement platform - Google Patents
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- CN102490020A CN102490020A CN2011103669555A CN201110366955A CN102490020A CN 102490020 A CN102490020 A CN 102490020A CN 2011103669555 A CN2011103669555 A CN 2011103669555A CN 201110366955 A CN201110366955 A CN 201110366955A CN 102490020 A CN102490020 A CN 102490020A
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Abstract
The invention relates to a simple precision displacement platform, which comprises a base, a vibration isolator, an internal hexagonal fastening screw, a linear guide rail, an internal hexagonal set screw, a micro-displacement work table, a piezoelectric actuator, a linear grating bar and a linear motor, wherein the displacement platform is a precision one-dimensional displacement platform. As the displacement platform is provided with the linear motor and the piezoelectric actuator, compared with a traditional ball screw mode, the displacement platform has the advantages that intermediate mechanical transmission links are greatly decreased, and the length of a transmission chain is reduced to be zero. The displacement platform is capable of realizing large-displacement rapid positioning and small-displacement precision effective output. Besides, the displacement platform has the advantages of simple structure, high response speed, high precision, high dynamic stiffness, short acceleration and deceleration process, quietness in movement, low noise, high efficiency and the like, and can be used for the field of precision measurement and precision machining.
Description
Technical field
The invention belongs to the precision engineering technical field, refer in particular to a kind of simple and easy precision displacement table, be used for Precision Machining and measurement.
Background technology
Along with the development of relevant high-end fields such as electronic information, bioengineering, nanometer technology, the importance of Precision Machining and measuring technique highlights day by day.And Precision Machining and measuring technique dependence and Precision Machining and precision measurement equipment.The performance of precise machining equipment and precision measurement equipment directly influences processing and the quality of measuring.High accuracy, high-resolution, big stroke, high response speed, the Precision Machining of high rigidity and measurement device occupy extremely important status in sophisticated industry production and the scientific research field in modern times.It is the key link of directly influence precision, ultraprecise level of processing and accurate measurement level.The fund that countries in the world are all a large amount of to the high precise equipment input is in the hope of obtaining bigger industrial efficiency.The Heui jae Park of Seoul, South Korea university etc. are installed in the microposition workbench of Piezoelectric Ceramic on the grand positioning table of electric rotating machine driving, use laser interferometer to realize the closed-loop control position feedback of two workbench, have realized high orientation precision.The upright X-Y-θ Three Degree Of Freedom micro displacement workbench of being developed of making of Japan combines with the grand moving workbench of two-freedom, and oneself is used for projection mask aligner and electron beam exposure apparatus.At home, Xi'an Communications University adopts electric rotating machine and ball-screw to realize the grand driving of 100mm, and adopts piezoelectric actuator to realize that the microposition platform drives, and positioning accuracy is ± 10nm.But ball-screw adds the guided mode of pair of nut and exists such as response speed slowlyer, and processing is high with assembly precision, and reparation property is poor, and need and servomotor such as are used at problem.It is single that flexible hinge exists processing method again, non-exchange property, defective such as reparation property is poor, and stroke is limited, and is highly lower.Therefore, design a have simple in structure, high response speed, high accuracy, dynamic stiffness is high, the acceleration and deceleration process is short, the displacement platform of efficient advantages of higher has become the emphasis problem of various countries and each well-known universities and colleges.
Summary of the invention
The object of the present invention is to provide a kind of simple and easy precision displacement table.This platform is slow for solving traditional displacement platform response speed, and rigidity is lower, and problems such as big stroke and high accuracy contradiction have proposed a solution.
This platform can be divided into the two large divisions: linear electric motors and line slideway are realized big stroke, fast the location; Micromotion platform is realized little stroke, hi-Fix.Because required member is few, platform structure is able to simplify.The displacement platform is owing to introduced linear electric motors and piezoelectric ceramic actuator; Compare traditional ball-screw pattern; Machine driving link in the middle of having significantly reduced, driving-chain length reduction are zero, thereby make whole flat satisfy under the high-precision basic demand; Also had high response speed, high advantages such as rigidity.The vibration isolator of installing at pedestal can effectively reduce extraneous factor to the whole flat Effect on Performance.The linear grating chi can be realized the Displacement Feedback of linear electric motors, realizes that displacement is controlled.Micromotion platform adopts integral material warp cutting processing to form, thereby has avoided rigging error, has guaranteed dimensional accuracy simultaneously, makes workbench have good displacement output characteristics.This platform can be used for Precision Machining feeding, Error Feedback compensation and accurate measurement field.
This simple and easy precision displacement table is divided into pedestal, vibration isolator, fixedly soket head cap screw, line slideway, interior hexagonal holding screw, micro displacement workbench; Piezoelectric ceramic actuator, linear grating chi, linear electric motors; The drive part of described precision displacement table adopts linear electric motors and piezoelectric ceramic actuator; Because the direct contact movement parts of driving element make that the driving-chain length reduction is zero, effectively raises response speed and integral rigidity; The introducing of line slideway and rectangle spring leaf makes displacement platform overall volume reduce simultaneously, has simplified greatly on the structure.
The linear electric motors part of described precision displacement table, two linear electric motors about comprising; Two motors are installed on the homonymy of line slideway, adopt Synchronization Control, realize the big stroke of whole micromotion platform; The linear grating chi is housed on each linear electric motors, is used for the FEEDBACK CONTROL of displacement, realize the synchronous shift control of two linear electric motors.
Described precision displacement table has effectively reduced the influence of extraneous factor to the whole flat output performance through the mode of installation vibration isolator under pedestal, has reduced the restriction that environmental working condition is used the displacement platform to a certain extent.
Described micromotion platform has adopted the rectangle spring leaf as director element, and piezoelectric ceramic actuator is as the pattern of driving element, and structure is able to simplify, and is easy to process; Through the spring leaf of the parallel placement in workbench both sides, workbench can obtain favorable linearity displacement output, and has the better elastic reset capability.
The present invention has effectively reduced transmission link through adopting linear drive mode, makes the more traditional ball-screw of integral rigidity add too many levels transmission mode such as pair of nut and is significantly improved; The raising of rigidity means the raising of antijamming capability.
Description of drawings
Fig. 1 is the three-dimensional installation diagram of simple and easy precision displacement table.
Fig. 2 is the three-dimensional model diagram of micromotion platform.
Among the figure, 1, pedestal; 2, vibration isolator; 3, fixing soket head cap screw; 4, line slideway; 5, interior hexagonal holding screw; 6, micro displacement workbench; 7, piezoelectric ceramic actuator; 8, the linear grating chi; 9, linear electric motors.
The specific embodiment
The simple and easy precision displacement table of invention is as shown in Figure 1, comprises pedestal 1, vibration isolator 2, fixedly soket head cap screw 3, line slideway 4, interior hexagonal holding screw 5, micro displacement workbench 6, piezoelectric ceramic actuator 7, linear grating chi 8, linear electric motors 9.
Pedestal 1 has played the effect of supporting of installing as the carrier of whole displacement platform to whole parts.The vibration isolator of installing in pedestal 1 bottom 2 plays the vibration isolation effect, can effectively eliminate extraneous factor, particularly extraneous vibration, to the whole flat Effect on Performance.
Line slideway 4 is fastened on the pedestal 1 through fixing soket head cap screw 3, as the guiding parts of big stroke motion.Install by linear electric motors 9 on the line slideway 4, and be connected through interior hexagonal holding screw 5 with micromotion platform 6.Soket head cap screw is little to requirements of installation space, can effectively reduce the volume of each parts.Through the guiding of guide rail 4, can realize the no gap of linear electric motors 9 and micromotion platform 6, be synchronized with the movement.
Linear electric motors 9 have two, are distributed in respectively on the same end inboard of line slideway 4.Linear grating chi 8 is housed on it, and the output shift quantity that is used for linear electric motors 9 detects and feedback.Can realize the synchronous precise displacement output of two linear electric motors 9 through the feedback data of linear grating chi 8.
The threedimensional model of micromotion platform 6, as shown in Figure 2.Platform adopts the method for overall wire cutting to process, thereby has avoided rigging error, has guaranteed simultaneously machining accuracy to have shortened process time.The workbench both sides are being uniformly distributed with the rectangle spring leaf, and the parallel symmetric arrangement through spring leaf has constituted parallelogram lindage, thereby have guaranteed the linearity of workbench output displacement.Simultaneously, the rectangle spring leaf also can be realized the displacement reset function of workbench, has guaranteed that the zero-clearance of workbench and piezoelectric ceramic actuator contacts, and has improved drive rigidity.Workbench in the micromotion platform 6 is provided with threaded mounting hole, can be used to install and measure head or min-cutter etc., to be used for accurate measurement and Precision Machining.
Piezoelectric ceramic actuator 7 guarantee its with situation that the workbench zero-clearance contacts under, be fixedly mounted in the draw-in groove of micromotion platform 6.Piezoelectric ceramic actuator has advantages such as volume is little, and response speed is high, and rigidity is high, and antijamming capability is strong, has improved the performance of fine motion displacement platform greatly.
Among the present invention; As to select minimum resolution for use be 0.001mm; Range is that linear electric motors and the minimum resolution of 50mm is 0.01 μ m, and range is the piezoelectric ceramic actuator of 0.2mm, realize the displacement output of 12.45811mm; Its step is following: at first, should simple and easy precision displacement table be fixedly mounted on equipment needed thereby or the position through 4 vibration isolators 2.Then, through Synchronization Control, realize that micromotion platform 6 is along moving on line slideway 4 directions to two linear electric motors 9.Through the feedback signal of linear grating chi 8, the displacement X1=12.458mm of control linear electric motors 9.Keep motor input shift invariant, through piezoelectric ceramic actuator 7 input displacement X2=0.11 μ m=0.00011mm.Can know that the output shift quantity X of workbench is the displacement output quantity X2 sum of the displacement output quantity X1 and the piezoelectric ceramic actuator 7 of linear electric motors 9, so X=X1+X2=12.458+0.00011=12.45811mm is arranged.Required displacement is achieved, and whole process control is simple, and response speed is fast.
Claims (2)
1. simple and easy precision displacement table; It is characterized in that, comprise pedestal (1), vibration isolator (2), fixedly soket head cap screw (3), line slideway (4), interior hexagonal holding screw (5); Micro displacement workbench (6); Piezoelectric ceramic actuator (7), linear grating chi (8), linear electric motors (9);
Said pedestal (1) is the carrier of whole displacement platform; The vibration isolator of installing in pedestal (1) bottom (2); Two line slideways (4) are fastened on the pedestal (1) through fixing soket head cap screw (3); Two linear electric motors (9) are distributed in respectively on the same end inboard of line slideway (4), and linear electric motors (9) are connected through interior hexagonal holding screw (5) with micromotion platform (6); Linear grating chi (8) is housed on two linear electric motors (9); Through the feedback data of linear grating chi (8), two linear electric motors (9) are exported accurate displacement synchronously; Through the guiding of guide rail (4), linear electric motors (9) and the no gap of micromotion platform (6), be synchronized with the movement;
Said micro displacement workbench (6) adopts " III " font to arrange that the housing of workbench links to each other with linear electric motors (9) through interior hexagonal holding screw (5), makes the displacement output of linear electric motors (9) pass to micro displacement workbench (6); The workbench both sides of micro displacement workbench (6) central authorities are being uniformly distributed with the rectangle spring leaf of isometric uniform thickness, and the parallel symmetric arrangement of spring leaf constitutes parallelogram lindage; Piezoelectric ceramic actuator 7 guarantee its with situation that the workbench zero-clearance contacts under, be fixedly mounted in the draw-in groove of micromotion platform 6; Workbench in the micromotion platform 6 is provided with threaded mounting hole, can be used to install and measure head or min-cutter etc., to be used for accurate measurement and Precision Machining;
Said line slideway (4) adopts " worker " font guide rail, and each guide rail respectively has both sides, and a side through being uniformly distributed with three fixedly soket head cap screw (3) is fastened on the pedestal (1), and opposite side then is equipped with linear electric motors (9).
2. according to the described a kind of simple and easy precision displacement table of claim 1; It is characterized in that adopt linear electric motors (9) as big stroke driving element, piezoelectric ceramic actuator (7) is as the micrometric displacement driving element; Realize the height response of whole workbench, performances such as high rigidity through the two; Linear grating chi (8) has been realized the feedback regulation of linear electric motors (9), has realized the accurately controlled of output displacement.
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| CN 201110366955 CN102490020B (en) | 2011-11-18 | 2011-11-18 | Simple precision displacement platform |
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| CN 201110366955 CN102490020B (en) | 2011-11-18 | 2011-11-18 | Simple precision displacement platform |
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| CN102490020B CN102490020B (en) | 2013-10-23 |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102818688A (en) * | 2012-08-27 | 2012-12-12 | 中国矿业大学 | Loading device and method of vibration test of imitating flexible member |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102922309A (en) * | 2012-09-29 | 2013-02-13 | 黑龙江科技学院 | Precise micro motion platform based on shape memory material coarse motion driver |
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103273328A (en) * | 2013-05-08 | 2013-09-04 | 武汉科技大学 | Large-stroke micro-drive precise two-dimensional worktable |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN105222713A (en) * | 2015-08-10 | 2016-01-06 | 西安盛佳光电有限公司 | A kind of utilize fiber grating to carry out accurate displacement method and device |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN106371464A (en) * | 2016-08-31 | 2017-02-01 | 无锡信欧光电科技有限公司 | Electronically controlled precision displacement platform |
| CN106891306A (en) * | 2017-04-25 | 2017-06-27 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| CN109531184A (en) * | 2018-12-13 | 2019-03-29 | 广东工业大学 | A kind of both sides adjust the Coupled Rigid-flexible platform and motion platform of rigidity |
| CN109675781A (en) * | 2019-01-31 | 2019-04-26 | 天津大学 | A kind of plane ultrasonic vibration auxiliary tooling platform |
| CN110031027A (en) * | 2019-03-22 | 2019-07-19 | 中国科学院微电子研究所 | A kind of detection device with vibration isolation nested structure |
| CN110587552A (en) * | 2019-09-09 | 2019-12-20 | 辽宁工业大学 | Rotary moving workbench |
| CN110722523A (en) * | 2019-08-29 | 2020-01-24 | 广东工业大学 | Macro-micro composite motion platform based on piezoelectric ceramic measurement and compensation and application |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113327490A (en) * | 2021-07-06 | 2021-08-31 | 广州中科博约医疗科技有限公司 | Precision simulation device for human body surface physiological micromotion |
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Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102818688A (en) * | 2012-08-27 | 2012-12-12 | 中国矿业大学 | Loading device and method of vibration test of imitating flexible member |
| CN102818688B (en) * | 2012-08-27 | 2015-05-20 | 中国矿业大学 | Loading device and method of vibration test of imitating flexible member |
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN102922309A (en) * | 2012-09-29 | 2013-02-13 | 黑龙江科技学院 | Precise micro motion platform based on shape memory material coarse motion driver |
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103219049B (en) * | 2013-03-04 | 2015-04-29 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103273328A (en) * | 2013-05-08 | 2013-09-04 | 武汉科技大学 | Large-stroke micro-drive precise two-dimensional worktable |
| CN103273328B (en) * | 2013-05-08 | 2015-11-18 | 武汉科技大学 | Large-stroke micro-drive precise two-dimensional worktable |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN105222713A (en) * | 2015-08-10 | 2016-01-06 | 西安盛佳光电有限公司 | A kind of utilize fiber grating to carry out accurate displacement method and device |
| KR101910522B1 (en) | 2016-06-29 | 2018-10-22 | 광동 유니버시티 오브 테크놀로지 | Single-drive rigid-to-flexible coupling precision motion platform and method and apparatus for implementing the same |
| WO2018000516A1 (en) * | 2016-06-29 | 2018-01-04 | 广东工业大学 | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| GB2561990A (en) * | 2016-06-29 | 2018-10-31 | Univ Guangdong Technology | Precision movement platform for single-drive rigid-flexible coupling, and method of realization and application thereof |
| GB2561990B (en) * | 2016-06-29 | 2019-06-12 | Univ Guangdong Technology | Single-drive rigid-flexible coupling precision motion platform |
| CN106020246A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | Motion platform |
| CN106371464A (en) * | 2016-08-31 | 2017-02-01 | 无锡信欧光电科技有限公司 | Electronically controlled precision displacement platform |
| CN106891306A (en) * | 2017-04-25 | 2017-06-27 | 西安理工大学 | Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure |
| CN109531184B (en) * | 2018-12-13 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling platform with rigidity adjusted on two sides and motion platform |
| CN109531184A (en) * | 2018-12-13 | 2019-03-29 | 广东工业大学 | A kind of both sides adjust the Coupled Rigid-flexible platform and motion platform of rigidity |
| CN109675781A (en) * | 2019-01-31 | 2019-04-26 | 天津大学 | A kind of plane ultrasonic vibration auxiliary tooling platform |
| CN110031027A (en) * | 2019-03-22 | 2019-07-19 | 中国科学院微电子研究所 | A kind of detection device with vibration isolation nested structure |
| CN110031027B (en) * | 2019-03-22 | 2021-07-13 | 中国科学院微电子研究所 | Detection apparatus with vibration isolation nested structure |
| CN110722523A (en) * | 2019-08-29 | 2020-01-24 | 广东工业大学 | Macro-micro composite motion platform based on piezoelectric ceramic measurement and compensation and application |
| CN110722523B (en) * | 2019-08-29 | 2023-01-20 | 广东工业大学 | Macro-micro composite motion platform based on piezoelectric ceramic measurement and compensation and application |
| CN110587552B (en) * | 2019-09-09 | 2023-08-11 | 辽宁工业大学 | Rotary moving workbench |
| CN110587552A (en) * | 2019-09-09 | 2019-12-20 | 辽宁工业大学 | Rotary moving workbench |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113327490A (en) * | 2021-07-06 | 2021-08-31 | 广州中科博约医疗科技有限公司 | Precision simulation device for human body surface physiological micromotion |
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Address after: 212005 No. 8 Shangdang Eco-automobile Complementary Industrial Park, Dantu District, Zhenjiang City, Jiangsu Province Patentee after: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. Address before: 212005 101 South Xu Road, Zhenjiang, Jiangsu Patentee before: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. |
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Effective date of registration: 20191223 Address after: 225200 No. 88 Wenchang East Road, Jiangdu District, Yangzhou, Jiangsu. Patentee after: Yangzhou (Jiangdu) New Energy Automobile Industry Research Institute of Jiangsu University Address before: 212005 No.8 Shangdang ecological automobile supporting industrial park, Dantu District, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU HUIZHI INTELLECTUAL PROPERTY SERVICES CO., LTD. |