CN105606901A - MEMS seawater conductivity sensor with filtering device - Google Patents
MEMS seawater conductivity sensor with filtering device Download PDFInfo
- Publication number
- CN105606901A CN105606901A CN201510987749.4A CN201510987749A CN105606901A CN 105606901 A CN105606901 A CN 105606901A CN 201510987749 A CN201510987749 A CN 201510987749A CN 105606901 A CN105606901 A CN 105606901A
- Authority
- CN
- China
- Prior art keywords
- metal electrode
- mems
- filter
- conductivity sensor
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/22—Measuring resistance of fluids
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The present invention discloses an MEMS seawater conductivity sensor with a filtering device. The sensor comprises an insulating substrate, four metal electrodes and a filtering device. The filtering device is in the shape of rectangular box cover, the top surface of the filtering device is provided with a filtering hole array. The filtering device covers the upper end face of the insulating substrate through an edge part. A cavity formed between the filtering device and the insulating substrate is a conductivity cell. The four metal electrodes are arranged at the insulating substrate in the conductivity cell and are connected to an external testing circuit through lead wires. Compared with the prior art, the MEMS seawater conductivity sensor has the advantages that the shortcomings of poor anti-pollution ability and low measurement precision of an existing MEMS conductivity sensor are overcome, the MEMS seawater conductivity sensor has the advantages of simple structure, small size, low power, low cost, and versatility, and the real-time seawater conductivity measurement with high precision is conveniently realized.
Description
Technical field
The invention belongs to microelectromechanical systems and manufacture field, be applicable to Ocean Surveying application scenario, the sea water conductivity that is specially adapted to real-time high-precision is measured, and relates to a kind of sea water conductivity sensor with filter, relates in particular to a kind of MEMS sea water conductivity sensor with filter.
Background technology
At present, oceanographic observation is paid close attention to always widely, sea water conductivity is the most basic physical element of ocean water body, various phenomenons in ocean, process, halobiontic existence and breeding, and the mankind's sea activity, comprise marine military activity, nearly all directly or indirectly relevant to the spatial and temporal distributions of sea water conductivity.
In prior art, sea water conductivity is measured the special testing equipment adopting, apparatus expensive, bulky, measure cost high. And MEMS conductivity sensor volume is little, low in energy consumption, cost is low, can be mass-produced, be applicable to being applied to oceanographic observation automatic, online, long-term, continuous, multi-platform, networking, but the contamination resistance of existing MEMS conductivity sensor is poor, easily cause measure error, cause certainty of measurement not high, limited its application in oceanographic observation.
Summary of the invention
The problem that the present invention need to solve is for above-mentioned existing sea water conductivity measurement device, expensive, bulky, measure cost high; The contamination resistance of existing MEMS conductivity sensor is poor, there is measure error, certainty of measurement is not high, limits the deficiency that it observes in ocean, and provides a kind of simple in structure, volume is small and exquisite, easy to operate, cost is lower, and measuring speed is fast, contamination resistance is strong, a kind of MEMS sea water conductivity sensor with filter that certainty of measurement is high.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
A kind of MEMS sea water conductivity sensor with filter, comprise dielectric substrate, four metal electrodes and filter, described filter is rectangle lid-like, on its end face, there is filtering holes array, filter covers along portion on the upper surface of dielectric substrate by it, the cavity forming between filter and dielectric substrate is conductance cell, four metal electrodes are all arranged in the dielectric substrate in conductance cell, four metal electrodes comprise the first metal electrode that is set gradually and be parallel to each other by dielectric substrate one side direction opposite side, the second metal electrode, the 3rd metal electrode and the 4th metal electrode, four metal electrodes are cuboid, the size of the first metal electrode and the 4th metal electrode measure-alike, the size of the second metal electrode and the 3rd metal electrode measure-alike, and the size of the first metal electrode is greater than the size of the second metal electrode, the first metal electrode, the second metal electrode and the 3rd metal electrode, the 4th metal electrode is symmetrical, spacing between the second metal electrode and the 3rd metal electrode is greater than the spacing between the first metal electrode and the second metal electrode, wherein the first metal electrode and the 4th metal electrode are galvanic electrode, the second metal electrode and the 3rd metal electrode are voltage electrode, four metal electrodes are connected with extraneous test circuit by connecting lead wire respectively.
Dielectric substrate is that silica-base material is made, and the upper surface of dielectric substrate is silicon dioxide insulating layer.
Four metal electrodes are made through metal micro fabrication by the nickel material of surface gold-plating.
Filtering holes is rectangle, and the size of filtering holes and spacing can be processed according to need for environment.
Filter is made up of body silicon and silica.
Filter forms through micro fabrication manufacture, comprises the following steps:
A, first the lower surface of body silicon is corroded, erode away a cavity, the upper surface of body silicon forms one deck silicon thin film;
B, the silicon thin film of body silicon upper surface is carried out to etching, form the filtering holes of array distribution;
C, then utilize dry oxygen technique to be oxidized the surface of the body silicon that completes above-mentioned processing technology, make this body silicon face form the silica that one deck shields.
Described filter is connected by anode linkage technique with the joint face of dielectric substrate.
Compared with prior art, the invention has the beneficial effects as follows:
(1) adopt the filter of MEMS silicon on glass bonding technique manufacture can effectively filter out organic detritus in seawater, particulate, air bubble, marine alga etc., make to enter seawater in conductance cell comparatively pure, overcome the shortcoming that existing MEMS conductivity sensor contamination resistance is poor, certainty of measurement is low;
(2) a kind of MEMS sea water conductivity sensor with filter of the present invention is based on MEMS process technology, has the advantages such as simple in structure, volume is small and exquisite, low in energy consumption, cost is low, highly versatile, and the sea water conductivity of being convenient to realize real-time high-precision is measured.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of MEMS sea water conductivity sensor with filter of the present invention;
Fig. 2 is the structural representation of filter;
Fig. 3 is the structural representation of dielectric substrate and metal electrode;
Fig. 4 is the cutaway view of Fig. 1.
Wherein, 1, dielectric substrate, 201, the first metal electrode, 202, the second metal electrode, 203, the 3rd metal electrode, 204, the 4th metal electrode, 3, filter, 301, body silicon, 302, silica, 303, filtering holes, 4, conductance cell.
Detailed description of the invention
In conjunction with the accompanying drawings, the present invention is further detailed explanation. These accompanying drawings are the schematic diagram of simplification, and basic structure of the present invention is only described in a schematic way, and therefore it only shows the formation relevant with the present invention.
As Figure 1-4, a kind of MEMS sea water conductivity sensor with filter, comprise dielectric substrate 1, four metal electrodes and filter 3, described filter 3 is rectangle lid-like, on its end face, there are filtering holes 303 arrays, filter 3 covers along portion on the upper surface of dielectric substrate 1 by it, the cavity forming between filter 3 and dielectric substrate 1 is conductance cell 4, four metal electrodes are all arranged in the dielectric substrate 1 in conductance cell 4, four metal electrodes comprise the first metal electrode 201 that is set gradually and be parallel to each other by dielectric substrate 1 one side direction opposite sides, the second metal electrode 202, the 3rd metal electrode 203 and the 4th metal electrode 204, four metal electrodes are cuboid, the size of the first metal electrode 201 and the 4th metal electrode 204 measure-alike, the size of the second metal electrode 202 and the 3rd metal electrode 203 measure-alike, and the size of the first metal electrode 201 is greater than the size of the second metal electrode 202, the first metal electrode 201, the second metal electrode 202 and the 3rd metal electrode 203, the 4th metal electrode 204 is symmetrical, spacing between the second metal electrode 202 and the 3rd metal electrode 203 is greater than the spacing between the first metal electrode 201 and the second metal electrode 202, wherein the first metal electrode 201 and the 4th metal electrode 204 are galvanic electrode, the second metal electrode 202 and the 3rd metal electrode 203 are voltage electrode, four metal electrodes are connected with extraneous test circuit by connecting lead wire respectively.
Dielectric substrate 1 is made for silica-base material, and the upper surface of dielectric substrate 1 is silicon dioxide insulating layer.
Four metal electrodes are made through metal micro fabrication by the nickel material of surface gold-plating.
Filtering holes 303 is rectangle, and the size of filtering holes 303 and spacing can be processed according to need for environment.
Filter 3 is made up of body silicon 301 and silica 302.
Filter 3 forms through micro fabrication manufacture, comprises the following steps:
A, first the lower surface of body silicon 301 is corroded, erode away a cavity, the upper surface of body silicon 301 forms one deck silicon thin film;
B, the silicon thin film of body silicon 301 upper surfaces is carried out to etching, form the filtering holes 303 of array distribution;
C, then utilize dry oxygen technique to be oxidized the surface of the body silicon 301 that completes above-mentioned processing technology, make these body silicon 301 surfaces form the silica 302 that one decks shield.
Described filter 3 is connected by anode linkage technique with the joint face of dielectric substrate 1.
With a measuring method for the MEMS sea water conductivity sensor of filter, it is characterized in that: comprise the following steps:
A, a kind of MEMS sea water conductivity sensor with filter is immersed in seawater, filter 3 filters seawater, organic detritus, particulate, air bubble and marine alga in elimination seawater, and purer seawater enters in conductance cell 4;
B, apply excitation, measure response, incoming transport pumping signal on the first metal electrode 201 and the 4th metal electrode 204 respectively, at two galvanic electrodes: the first metal electrode 201 and the 4th metal electrode 204, between seawater in generate an AC field, measure two voltage electrodes simultaneously: the second metal electrode 202 and the 3rd metal electrode 203, the voltage drop of the alternating electric field above receiving, keeps the amplitude of these two voltages by amplifier feedback circuit;
C, result of calculation, utilize electrical conductivity and apply the relational expression between electric current, measuring voltage, obtains extra large electrical conductivity of water, and formula is as follows:
In formula, K is cell constant of conductometric vessel, and I is apply ac-excited, and V is the voltage of measuring.
Compared with prior art, the invention has the beneficial effects as follows:
(1) adopt the filter of MEMS silicon on glass bonding technique manufacture can effectively filter out organic detritus in seawater, particulate, air bubble, marine alga etc., make to enter seawater in conductance cell comparatively pure, overcome the shortcoming that existing MEMS conductivity sensor contamination resistance is poor, certainty of measurement is low;
(2) a kind of MEMS sea water conductivity sensor with filter of the present invention is based on MEMS process technology, has the advantages such as simple in structure, volume is small and exquisite, low in energy consumption, cost is low, highly versatile, and the sea water conductivity of being convenient to realize real-time high-precision is measured.
Taking above-mentioned foundation desirable embodiment of the present invention as enlightenment, by above-mentioned description, relevant staff can, not departing from the scope of this invention technological thought, carry out various change and amendment completely. The technical scope of this invention is not limited to the content on description, must determine its technical scope according to claim scope.
Claims (7)
1. the MEMS sea water conductivity sensor with filter, it is characterized in that: comprise dielectric substrate, four metal electrodes and filter, described filter is rectangle lid-like, on its end face, there is filtering holes array, filter covers along portion on the upper surface of dielectric substrate by it, the cavity forming between filter and dielectric substrate is conductance cell, four metal electrodes are all arranged in the dielectric substrate in conductance cell, four metal electrodes comprise the first metal electrode that is set gradually and be parallel to each other by dielectric substrate one side direction opposite side, the second metal electrode, the 3rd metal electrode and the 4th metal electrode, four metal electrodes are cuboid, the size of the first metal electrode and the 4th metal electrode measure-alike, the size of the second metal electrode and the 3rd metal electrode measure-alike, and the size of the first metal electrode is greater than the size of the second metal electrode, the first metal electrode, the second metal electrode and the 3rd metal electrode, the 4th metal electrode is symmetrical, spacing between the second metal electrode and the 3rd metal electrode is greater than the spacing between the first metal electrode and the second metal electrode, wherein the first metal electrode and the 4th metal electrode are galvanic electrode, the second metal electrode and the 3rd metal electrode are voltage electrode, four metal electrodes are connected with extraneous test circuit by connecting lead wire respectively.
2. a kind of MEMS sea water conductivity sensor with filter according to claim 1, is characterized in that: dielectric substrate is that silica-base material is made, and the upper surface of dielectric substrate is silicon dioxide insulating layer.
3. a kind of MEMS sea water conductivity sensor with filter according to claim 1, is characterized in that: four metal electrodes are made through metal micro fabrication by the nickel material of surface gold-plating.
4. a kind of MEMS sea water conductivity sensor with filter according to claim 1, is characterized in that: filtering holes is rectangle, and the size of filtering holes and spacing can be processed according to need for environment.
5. a kind of MEMS sea water conductivity sensor with filter according to claim 1, is characterized in that: filter is made up of body silicon and silica.
6. a kind of MEMS sea water conductivity sensor with filter according to claim 5, is characterized in that: filter forms through micro fabrication manufacture, comprises the following steps:
A, first the lower surface of body silicon is corroded, erode away a cavity, the upper surface of body silicon forms one deck silicon thin film;
B, the silicon thin film of body silicon upper surface is carried out to etching, form the filtering holes of array distribution;
C, then utilize dry oxygen technique to be oxidized the surface of the body silicon that completes above-mentioned processing technology, make this body silicon face form the silica that one deck shields.
7. a kind of MEMS sea water conductivity sensor with filter according to claim 1, is characterized in that: described filter is connected by anode linkage technique with the joint face of dielectric substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510987749.4A CN105606901B (en) | 2015-12-24 | 2015-12-24 | A kind of MEMS sea water conductivity sensors with filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510987749.4A CN105606901B (en) | 2015-12-24 | 2015-12-24 | A kind of MEMS sea water conductivity sensors with filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105606901A true CN105606901A (en) | 2016-05-25 |
| CN105606901B CN105606901B (en) | 2018-02-23 |
Family
ID=55986989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510987749.4A Expired - Fee Related CN105606901B (en) | 2015-12-24 | 2015-12-24 | A kind of MEMS sea water conductivity sensors with filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105606901B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108169299A (en) * | 2018-01-12 | 2018-06-15 | 山东省科学院海洋仪器仪表研究所 | A kind of diamond seawater salinity sensor based on MEMS technology and preparation method thereof |
| CN108529554A (en) * | 2017-03-02 | 2018-09-14 | 中芯国际集成电路制造(上海)有限公司 | A kind of MEMS device and preparation method thereof |
| CN108917853A (en) * | 2018-08-28 | 2018-11-30 | 山东省科学院海洋仪器仪表研究所 | A kind of thermohaline depth sensor and its control method |
| WO2020252699A1 (en) * | 2019-06-19 | 2020-12-24 | 山东省科学院海洋仪器仪表研究所 | Diamond seawater salinity sensor based on mems technology and manufacturing method therefor |
| US11342829B2 (en) | 2017-01-15 | 2022-05-24 | Colin Kerr | Ocean current and tidal power electric generator |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1474561A1 (en) * | 1987-01-29 | 1989-04-23 | Научно-Производственное Объединение Космических Исследований | Device for measuring specific electric conductivity of sea water |
| JPH07280765A (en) * | 1994-04-13 | 1995-10-27 | Aretsuku Denshi Kk | Conductivity measuring sensor |
| CN2621295Y (en) * | 2003-05-28 | 2004-06-23 | 国家海洋技术中心 | Point open four-electrode conductivity sensor |
| CN102539932A (en) * | 2010-10-19 | 2012-07-04 | 恩德莱斯和豪瑟尔测量及调节技术分析仪表两合公司 | Conductivity sensor |
| CN102656446A (en) * | 2009-12-22 | 2012-09-05 | 通用电气健康护理生物科学股份公司 | Conductivity sensor assembly |
| CN202512173U (en) * | 2012-01-06 | 2012-10-31 | 北京科技大学 | Apparatus for measuring molten salt electrical conductivity by utilizing four-electrode method |
| CN203786211U (en) * | 2014-02-27 | 2014-08-20 | 宝帝流体控制***（上海）有限公司 | New conductivity measuring electrode |
-
2015
- 2015-12-24 CN CN201510987749.4A patent/CN105606901B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1474561A1 (en) * | 1987-01-29 | 1989-04-23 | Научно-Производственное Объединение Космических Исследований | Device for measuring specific electric conductivity of sea water |
| JPH07280765A (en) * | 1994-04-13 | 1995-10-27 | Aretsuku Denshi Kk | Conductivity measuring sensor |
| CN2621295Y (en) * | 2003-05-28 | 2004-06-23 | 国家海洋技术中心 | Point open four-electrode conductivity sensor |
| CN102656446A (en) * | 2009-12-22 | 2012-09-05 | 通用电气健康护理生物科学股份公司 | Conductivity sensor assembly |
| CN102539932A (en) * | 2010-10-19 | 2012-07-04 | 恩德莱斯和豪瑟尔测量及调节技术分析仪表两合公司 | Conductivity sensor |
| CN202512173U (en) * | 2012-01-06 | 2012-10-31 | 北京科技大学 | Apparatus for measuring molten salt electrical conductivity by utilizing four-electrode method |
| CN203786211U (en) * | 2014-02-27 | 2014-08-20 | 宝帝流体控制***（上海）有限公司 | New conductivity measuring electrode |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11342829B2 (en) | 2017-01-15 | 2022-05-24 | Colin Kerr | Ocean current and tidal power electric generator |
| US11811289B2 (en) | 2017-01-15 | 2023-11-07 | Colin Kerr | Ocean current and tidal power electric generator |
| CN108529554A (en) * | 2017-03-02 | 2018-09-14 | 中芯国际集成电路制造(上海)有限公司 | A kind of MEMS device and preparation method thereof |
| CN108169299A (en) * | 2018-01-12 | 2018-06-15 | 山东省科学院海洋仪器仪表研究所 | A kind of diamond seawater salinity sensor based on MEMS technology and preparation method thereof |
| CN108169299B (en) * | 2018-01-12 | 2023-07-14 | 山东省科学院海洋仪器仪表研究所 | Diamond seawater salinity sensor based on MEMS technology and manufacturing method thereof |
| CN108917853A (en) * | 2018-08-28 | 2018-11-30 | 山东省科学院海洋仪器仪表研究所 | A kind of thermohaline depth sensor and its control method |
| CN108917853B (en) * | 2018-08-28 | 2024-04-19 | 山东省科学院海洋仪器仪表研究所 | Temperature and salt depth sensor and control method thereof |
| WO2020252699A1 (en) * | 2019-06-19 | 2020-12-24 | 山东省科学院海洋仪器仪表研究所 | Diamond seawater salinity sensor based on mems technology and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105606901B (en) | 2018-02-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105606901A (en) | MEMS seawater conductivity sensor with filtering device | |
| CN105388192B (en) | A kind of sea water conductivity sensor based on MEMS silica glass bonding technologies | |
| CN101839944B (en) | Seven-electrode conductivity sensor | |
| CN102645486B (en) | Plane array type electromagnetic sensor with trapezoidal structure | |
| CN103852649B (en) | Three-dimensional electric field measuring method based on coplanar sensing units | |
| CN104330831B (en) | Unpolarizable electrode | |
| CN106501615B (en) | A kind of MEMS electrode formula low conductivity sensor and its measurement method | |
| CN105424590B (en) | The sensor and detection method detected for steel component or test piece atmospheric corrosion | |
| CN104062463B (en) | Piezoresistive acceleration sensor and manufacturing method thereof | |
| CL2015002408A1 (en) | Assembly to measure the electric current in an individual electrode in an electrolysis system. | |
| CN106645306A (en) | Electrode apparatus of conductivity sensor | |
| CN103487488B (en) | Deep sea ph sensor | |
| CN103076500B (en) | Conductivity sensor in cofiring structure and manufacturing method thereof | |
| CN104458848B (en) | Comb nanosensor with pH indication and self-calibration and preparation method of comb nanosensor | |
| CN103601147A (en) | Preparation method of contact type four-electrode salinity sensor based on micro electro mechanical systems (MEMS) technology | |
| CN105628746B (en) | A kind of manufacture method of the seven-electrode conductivity sensor based on MEMS silicon technologies | |
| CN103592341A (en) | Contact type four-electrode salinity sensor based on MEMS (micro electro mechanical systems) technology and detection method of salinity sensor | |
| CN107576854B (en) | Concentric circle-shaped MEMS low-conductivity sensor with interdigital and application method | |
| CN201852580U (en) | Level meter | |
| CN108226236A (en) | A kind of integrated humidity sensor and its manufacture craft | |
| CN207866749U (en) | A kind of integrated humidity sensor | |
| CN208568661U (en) | A kind of diamond seawater salinity sensor based on MEMS technology | |
| CN103134839A (en) | Method for rapidly detecting trace heavy metal ions | |
| CN202975172U (en) | Conductivity sensor with cofiring structure | |
| CN106979963A (en) | A kind of device for measuring water quality pH value |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180223 Termination date: 20201224 |