CN105470078A - Focused tripolar structured fully-packaged X-ray bulb tube based on carbon nanotube cold cathode - Google Patents
Focused tripolar structured fully-packaged X-ray bulb tube based on carbon nanotube cold cathode Download PDFInfo
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- CN105470078A CN105470078A CN201511023782.1A CN201511023782A CN105470078A CN 105470078 A CN105470078 A CN 105470078A CN 201511023782 A CN201511023782 A CN 201511023782A CN 105470078 A CN105470078 A CN 105470078A
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- carbon nanotube
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- cold cathode
- ray bulb
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
Abstract
The invention discloses a focused tripolar structured fully-packaged X-ray bulb tube based on a carbon nanotube cold cathode. The focused tripolar structured fully-packaged X-ray bulb tube comprises a vacuum cavity based on a glass shell, a positive electrode assembly and an electronic gun assembly, wherein the positive electrode assembly is configured in the vacuum cavity and led out of the vacuum cavity by a connection column to be connected with a required power supply and a cooling system, the electronic gun assembly is configured in the vacuum cavity, a negative electrode substrate and a grid in the electronic gun assembly are led out of the vacuum cavity via a negative electrode lead line and a grid lead line, and the negative electrode substrate of the electronic gun assembly is a metal-graphene-vertical carbon nanotube composite cold cathode. The negative electrode substrate of the focused tripolar structured fully-packaged X-ray bulb tube adopts the metal-graphene-vertical carbon nanotube composite cold cathode structure prepared by growing graphene on the surface of metal and then growing a vertical carbon naotube array on the graphene, thus, the contact resistance between a carbon tube and a metal electrode is reduced, the problem of overlarge local current density caused by direct contact of the carbon tube and the metal is effectively solved, and the service life of the cold cathode at the large current density is prolonged.
Description
Technical field
The present invention relates to X ray image equipment technical field, particularly a kind of focus type three-stage structure based on metal-graphite alkene-vertical carbon nanotube composite construction, field emitting electronic source encapsulates X ray bulb entirely.This focus type three-stage structure entirely encapsulates X ray bulb and can be applicable in various X ray image equipment.Especially at modern medicine, bioscience, the scientific researches such as industrial detection and application have important application and bright prospects.
Background technology
Electron emission drawback in Traditional x-ray bulb is obvious: complex process, and bulky, energy consumption is high, and restricted lifetime.And field emission exactly solves the problem that thermionic emission is brought.Field Electron Emission not to need to be supplied in the body of negative electrode source electronics with extra energy, but carrys out the surface potential barrier of oppressive object by strong extra electric field, makes a large amount of electronics in emitter penetrate surface potential barrier effusion due to tunnel effect, forms Field Electron Emission.People have attempted pointed cone array field emission cold cathode before this.This negative electrode is with chemical corrosion or special process, and cathode material is processed into ganoid tip, is arranged into array or edge of a knife form, tip curvature radius is decreased to nm magnitude, makes most advanced and sophisticated geometry amplification factor reach 10E+5 ~ 10E+6cm
-1, therefore, only need to add tens volts of voltages, just can make the electric field that most advanced and sophisticated generation is very strong, form electron emission.But this most advanced and sophisticated manufacture craft and demanding strict technology, makes the manufacturing cost of this kind of negative electrode too high, limits the application of this device.
Carbon nano-tube material is current optimal field electron emission materials, because it has the emission tip be fade-in, easy formation highfield, be very beneficial for the field emission of electronics, carbon nano-tube film material preparation process is relatively simple, and related device overall structure is easy to industrially produce in enormous quantities.But existing directly at the vertical array carbon nanotube of metal surface growth at the local existing defects of carbon pipe and Metal Contact, cause in the course of work, there is the excessive reduction of local current densities, finally cause vertical array carbon nanotube life-span under big current operating state significantly to be reduced.
As the X-ray tube carbon nanotube encapsulation of emission source in a large dynamic vacuum system, need additional complicated vacuum-pumping system to meet the requirement of field emission source to vacuum degree.In the carbon nano-tube x-ray pipe of vacuum sealing, but major part just two-level structure.The comparison of two-level structure X-ray tube is simple, but tube current is determined by anode high voltage, and therefore the controllability of tube current is poor.Simultaneously the focus of two-level structure x-ray source places one's entire reliance upon the area of carbon nano-tube emitter, and be therefore difficult to realize big current and little focus in addition, cold cathode X-ray tube mostly is metal-ceramic pipe, and such pipe cost is higher.
Summary of the invention
Technical problem to be solved by this invention is for the problem existing for above-mentioned prior art and provides a kind of focus type three-stage structure based on carbon nanotube cold cathode entirely to encapsulate X ray bulb.The focus type three-stage structure X ray glass bulb that this vacuum based on carbon nano tube field transmitting electronic source seals.Adopt metal-graphite alkene-vertical carbon nanotube composite cold cathode construction, avoid in the existing course of work directly caused in the local defect that exists of carbon pipe and Metal Contact at the vertical array carbon nanotube of metal surface growth and there is the excessive reduction of local current densities, effectively improve the life-span of cold cathode under big current operating state.Adopt the combined type grid of grapheme material and metal grid mesh, improve the distribution of cathode electric field, reduce the driving voltage of negative electrode, and by being optimized design to the structure of grid, achieve gate electrode focusing function.Therefore the field emitting electronic source of X-ray tube of vacuum sealing has fast response time, low-power consumption and the advantages such as digital controllable.And, the manufacture craft of this New X ray tube and the X-ray tube of conventional hot-cathode completely compatible, therefore there is lower cost.
Realize foregoing invention object to solve, the technical solution adopted in the present invention is as follows:
Focus type three-stage structure based on carbon nanotube cold cathode encapsulates X ray bulb entirely, comprising:
Based on the vacuum cavity of glass shell;
Be configured in the anode assemblies in described vacuum cavity, described anode assemblies is drawn outside described vacuum cavity by joint pin, is connected with required power supply and cooling system;
Be configured in the electron gun structure in described vacuum cavity, the cathode substrate in described electron gun structure and grid are drawn outside described vacuum cavity respectively by cathode leg and grid lead; Described cathode substrate is metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode.
In a preferred embodiment of the invention, described metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode concrete structure is: at metal surface growing graphene layer, and then on graphene layer growth of vertical carbon nano pipe array.
In a preferred embodiment of the invention, the concrete grammar of described growth of vertical carbon nano pipe array on graphene layer is: adopt microwave plasma chemical gaseous phase deposition method, pass into microwave plasma gas H with the speed of 180sccm
2, carbon-source gas CH
4for 20sccm, at reaction pressure 28mbar, microwave incoming frequency 2.45GHz and underlayer temperature 630-640 DEG C, growth 1-5min, prepared by metal-graphite alkene length consistent, be evenly distributed, the carbon nano-tube of orthogonal array.
In a preferred embodiment of the invention, described anode assemblies comprises the anode metal cover being positioned at described vacuum cavity and the plate target for generation of X ray being embedded in described anode metal cover, described anode metal cover is drawn outside described vacuum cavity by joint pin, is connected with required power supply and cooling system.
In a preferred embodiment of the invention, the angle of inclination of described plate target is 12 degree.
In a preferred embodiment of the invention, the thickness of described plate target is 0.1mm.
In a preferred embodiment of the invention, described plate target adopts tungsten to be prepared from.
In a preferred embodiment of the invention, described anode metal cover is made of copper.
In a preferred embodiment of the invention, described joint pin is copper joint pin.
In a preferred embodiment of the invention, described electron gun structure also comprises metal shell, the metal grid mesh forming grid, insulating ceramics holder, insulating ceramics ring plate, cathode substrate and cathode leg and grid lead composition; Described metal shell offers a muzzle, described cathode substrate, metal grid mesh, insulating ceramics holder, insulating ceramics ring plate, cathode substrate are positioned at described metal shell, and wherein said cathode substrate is arranged on described insulating ceramics support in the side of described muzzle; Described cathode substrate and described insulating ceramics ring plate are arranged on described cathode substrate towards in the side of described muzzle, and wherein, described cathode substrate corresponds to described muzzle, and described insulating ceramics ring plate is positioned at the periphery of described cathode substrate; Described metal grid mesh is arranged on described insulating ceramics ring plate in the side of described muzzle and covers described cathode substrate.
In a preferred embodiment of the invention, described cathode substrate is wafer architecture, and diameter is 2mm.
In a preferred embodiment of the invention, the mesh diameter of described metal grid mesh is 100 μm.
In a preferred embodiment of the invention, the distance between described metal grid mesh and described cathode substrate is 300 μm.
In a preferred embodiment of the invention, the distance between the anode in described metal grid mesh and described anode assemblies is 5mm.
In a preferred embodiment of the invention, the grid focal aperture height on described metal grid mesh is 1mm, and diameter is 3mm.
In a preferred embodiment of the invention, described metal grid mesh deposits Graphene, form a Graphene and metal grid mesh combined type grid.
Owing to have employed technical scheme as above, cathode substrate in the present invention adopts and utilizes metal surface growing graphene, and then the metal-graphite alkene that on Graphene prepared by growth of vertical carbon nano pipe array-vertical carbon nanotube composite cold cathode construction, reduce the contact resistance between carbon pipe and metal electrode, effective carbon pipe that improves directly contacts with metal the local current densities problems of too caused, and improves the life-span of cold cathode under high current density.
Further the present invention by the combined type gate application of grapheme material and metal grid mesh in cold cathode X-ray tube, overcome that conventional metals aperture plate is low as electron penetration rate during gate electrode, Electron Beam Focusing poor performance and the shortcoming such as driving voltage is high, reduce gate drive voltage and realize Electron Beam Focusing, having higher job stability and reliability; And preparation technology is substantially constant, there is lower cost-effectivenes.Active control unit is opened simultaneously can provide enough electricity to stay for circuit, and does not affect the characteristic of X-ray tube.
Further, the present invention adopts metal-graphite alkene-vertical carbon nanotube composite cold cathode construction, avoid in the existing course of work directly caused in the local defect that exists of carbon pipe and Metal Contact at the vertical array carbon nanotube of metal surface growth and there is the excessive reduction of local current densities, effectively improve the life-span of cold cathode under big current operating state.Adopt the combined type grid of grapheme material and metal grid mesh, improve the distribution of cathode electric field, reduce the driving voltage of negative electrode, and by being optimized design to the structure of grid, achieve gate electrode focusing function.Therefore the field emitting electronic source of X-ray tube of vacuum sealing has fast response time, low-power consumption and the advantages such as digital controllable.And, the manufacture craft of this New X ray tube and the X-ray tube of conventional hot-cathode completely compatible, therefore there is lower cost.
The present invention prepares metal-graphite alkene-vertical carbon nanotube negative electrode as X-ray tube emitter by the method for chemical gaseous phase deposition (CVD), has equipment, method is simple, low cost and easily realize carbon nano-tube industrialized mass.In addition, the growth of carbon nano-tube also controls by the parameter such as growth time, temperature, can prepare carbon nano-tube film and the array of different shape and performance.
Field-transmitting cathode, in X-ray tube test macro, is connected with a high-pressure MOS DET by the present invention, by controlling the grid voltage of high-pressure MOS DET, can realize the control to Flied emission electric current, improves stability and the reliability of vacuum seal X-ray tube.
When the focus diameter of focus type three-stage structure X ray bulb of the present invention is 1mm, the needs of perspective imaging are met.By changing the width of pulse and the grid voltage of dynamic current control unit MOSFET, be easy to regulate the dosage of the X ray in direct voltage situation and obtain radioscopic image clearly.
Accompanying drawing explanation
Fig. 1 is the outline drawing that the focus type three-stage structure that the present invention is based on carbon nanotube cold cathode encapsulates X ray bulb entirely.
Fig. 2 is the structural representation that the focus type three-stage structure that the present invention is based on carbon nanotube cold cathode encapsulates the electron gun structure of X ray bulb entirely.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described.
Entirely encapsulate X ray bulb see the focus type three-stage structure based on carbon nanotube cold cathode provided in Fig. 1, figure, comprise based on glass shell vacuum cavity 100, be configured in anode assemblies 300 in vacuum cavity 100 and electron gun structure 200.
Anode assemblies 300 comprises the anode metal cover 310 being positioned at vacuum cavity 100 and the plate target 320 for generation of X ray being embedded in anode metal cover 310, anode metal cover 310 is drawn outside vacuum cavity 100 by copper joint pin 330, is connected with required power supply and cooling system.
Anode metal cover 310 adopts the copper that thermal diffusivity is good to become, and is easy to heat radiation.The angle of inclination of plate target 320 is 12 degree, and thickness is 0.1mm, adopts tungsten to be prepared from.
See Fig. 2, electron gun structure 200 comprises metal shell 210, the metal grid mesh 220 of formation grid, the cathode substrate 230 forming negative electrode, insulating ceramics holder 240, insulating ceramics ring plate 250, cathode substrate 260 and cathode leg 270 and grid lead 280 forms; Metal shell 210 offers a muzzle 211, cathode substrate 230, metal grid mesh 220, insulating ceramics holder 240, insulating ceramics ring plate 250, cathode substrate 260 are positioned at metal shell 210, and wherein cathode substrate 260 is arranged on insulating ceramics holder 240 towards in the side 241 of muzzle 211; Cathode substrate 230 and insulating ceramics ring plate 250 are arranged on cathode substrate 260 towards in the side 261 of muzzle 211, and wherein, cathode substrate 230 corresponds to muzzle 211, and insulating ceramics ring plate 250 is positioned at the periphery of cathode substrate 230; Metal grid mesh 220 is arranged on insulating ceramics ring plate 250 in the side 251 of muzzle 211 and covered cathode substrate 230.Cathode substrate 230 and metal grid mesh 220 are drawn outside vacuum cavity 100 respectively by cathode leg 270 and grid lead 280.
Cathode substrate 230 is metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode, this metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode concrete structure is: at metal surface growing graphene layer, and then on graphene layer growth of vertical carbon nano pipe array.On graphene layer, the concrete grammar of growth of vertical carbon nano pipe array is: adopt microwave plasma chemical gaseous phase deposition method, pass into microwave plasma gas H with the speed of 180sccm
2, carbon-source gas CH
4for 20sccm, at reaction pressure 28mbar, microwave incoming frequency 2.45GHz and underlayer temperature 630-640 DEG C, growth 1-5min, prepared by metal-graphite alkene length consistent, be evenly distributed, the carbon nano-tube of orthogonal array.
Cathode substrate 230 is wafer architecture, and diameter is 2mm, and metal grid mesh 220 selects molybdenum alloy, has good heat-resisting quantity, and its mesh diameter is 100 μm.Distance between metal grid mesh 220 and cathode substrate 230 is 300 μm.Distance between plate target 320 in metal grid mesh 220 and anode assemblies 300 is 5mm.
Grid focal aperture height on metal grid mesh 220 is 1mm, and diameter is 3mm.
The electric field adopting the transfer of PMMA wet method to be transferred to by Graphene can to make cathode surface as far as possible evenly, can make again electronics on the surface of the minimum metal grid mesh of the intercepting and capturing at aperture plate place, obtain the combined type grid with bilayer graphene.
Using mineral carbon alkene of the present invention and metal grid mesh combined type grid, reduce gate drive voltage, and by grid structure optimal design, achieve Electron Beam Focusing.By adopting dynamic current control unit, achieving the control to Flied emission electric current, obtaining stable emission current.The focus diameter of this cold cathode X-ray tube is about 1mm, and the anode current of acquisition is about more than 1mA.Carry out mammograms taken with this X-ray tube to some objects, at anode voltage 50kV, anode current 1mA, when time for exposure 1s, obtains perspective photograph clearly.And the preparation technology of this X-ray tube is simple, has lower cost; For advancing digitlization cold cathode X-ray source significant.
Claims (16)
1. the focus type three-stage structure based on carbon nanotube cold cathode encapsulates X ray bulb entirely, comprising:
Based on the vacuum cavity of glass shell;
Be configured in the anode assemblies in described vacuum cavity, described anode assemblies is drawn outside described vacuum cavity by joint pin, is connected with required power supply and cooling system;
Be configured in the electron gun structure in described vacuum cavity, the cathode substrate in described electron gun structure and grid are drawn outside described vacuum cavity respectively by cathode leg and grid lead; It is characterized in that, described cathode substrate is metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode.
2. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 1, it is characterized in that, described metal-graphite alkene-vertical carbon nanotube composite type cold negative electrode concrete structure is: at metal surface growing graphene layer, and then on graphene layer growth of vertical carbon nano pipe array.
3. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 2, it is characterized in that, the concrete grammar of described growth of vertical carbon nano pipe array on graphene layer is: adopt microwave plasma chemical gaseous phase deposition method, pass into microwave plasma gas H with the speed of 180sccm
2, carbon-source gas CH
4for 20sccm, at reaction pressure 28mbar, microwave incoming frequency 2.45GHz and underlayer temperature 630-640 DEG C, growth 1-5min, prepared by metal-graphite alkene length consistent, be evenly distributed, the carbon nano-tube of orthogonal array.
4. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 1, it is characterized in that, described anode assemblies comprises the anode metal cover being positioned at described vacuum cavity and the plate target for generation of X ray being embedded in described anode metal cover, described anode metal cover is drawn outside described vacuum cavity by joint pin, is connected with required power supply and cooling system.
5. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 4, it is characterized in that, the angle of inclination of described plate target is 12 degree.
6. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 4, it is characterized in that, the thickness of described plate target is 0.1mm.
7. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 4, it is characterized in that, described plate target adopts tungsten to be prepared from.
8. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 4, it is characterized in that, described anode metal cover is made of copper.
9. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 1, it is characterized in that, described joint pin is copper joint pin.
10. entirely encapsulate X ray bulb based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 1, it is characterized in that, described electron gun structure also comprises metal shell, the metal grid mesh forming grid, insulating ceramics holder, insulating ceramics ring plate, cathode substrate and cathode leg and grid lead composition; Described metal shell offers a muzzle, described cathode substrate, metal grid mesh, insulating ceramics holder, insulating ceramics ring plate, cathode substrate are positioned at described metal shell, and wherein said cathode substrate is arranged on described insulating ceramics support in the side of described muzzle; Described cathode substrate and described insulating ceramics ring plate are arranged on described cathode substrate towards in the side of described muzzle, and wherein, described cathode substrate corresponds to described muzzle, and described insulating ceramics ring plate is positioned at the periphery of described cathode substrate; Described metal grid mesh is arranged on described insulating ceramics ring plate in the side of described muzzle and covers described cathode substrate.
11. encapsulate X ray bulb entirely based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 10, and it is characterized in that, described cathode substrate is wafer architecture, and diameter is 2mm.
12. encapsulate X ray bulb entirely based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 10, and it is characterized in that, the mesh diameter of described metal grid mesh is 100 μm.
13. encapsulate X ray bulb entirely based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 10, and it is characterized in that, the distance between described metal grid mesh and described cathode substrate is 300 μm.
14. as claimed in claim 10 encapsulate X ray bulb entirely based on the focus type three-stage structures of carbon nanotube cold cathode, it is characterized in that, the distance between the anode in described metal grid mesh and described anode assemblies is 5mm.
15. encapsulate X ray bulb entirely based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 10, and it is characterized in that, the grid focal aperture height on described metal grid mesh is 1mm, and diameter is 3mm.
16. encapsulate X ray bulb entirely based on the focus type three-stage structure of carbon nanotube cold cathode as claimed in claim 10, it is characterized in that, described metal grid mesh deposits Graphene, form a Graphene and metal grid mesh combined type grid.
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| CN108447754A (en) * | 2018-04-18 | 2018-08-24 | 东南大学 | A kind of the cold cathode X-ray tube gate structure and production method of high electron penetration rate |
| CN108539581A (en) * | 2018-05-23 | 2018-09-14 | 西北核技术研究所 | A kind of Metal Substrate graphene film cathode gas spark switch |
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| CN106683963A (en) * | 2016-12-19 | 2017-05-17 | 中国科学院深圳先进技术研究院 | Transmission type X-ray source structure of patterned carbon nano-tube cathode |
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| CN106783486B (en) * | 2016-12-19 | 2019-05-17 | 中国科学院深圳先进技术研究院 | A kind of Reflection X-ray source structure of Patterned Carbon Nanotube cathode |
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| WO2020124691A1 (en) * | 2018-12-17 | 2020-06-25 | 深圳先进技术研究院 | X-ray source array, and x-ray tomography system and method |
| CN112017930A (en) * | 2020-07-22 | 2020-12-01 | 中国原子能科学研究院 | Three-pole grid-control cold cathode X-ray tube |
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