CN104409303A - X ray source based on carbon nanotube/graphite alkene composite cathode structure - Google Patents

X ray source based on carbon nanotube/graphite alkene composite cathode structure Download PDF

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Publication number
CN104409303A
CN104409303A CN201410608747.5A CN201410608747A CN104409303A CN 104409303 A CN104409303 A CN 104409303A CN 201410608747 A CN201410608747 A CN 201410608747A CN 104409303 A CN104409303 A CN 104409303A
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CN
China
Prior art keywords
cathode
ray source
carbon nano
nano tube
graphene composite
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Pending
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CN201410608747.5A
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Chinese (zh)
Inventor
陈垚
洪序达
郑海荣
桂建保
胡战利
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Priority to CN201410608747.5A priority Critical patent/CN104409303A/en
Publication of CN104409303A publication Critical patent/CN104409303A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • H01J35/065Field emission, photo emission or secondary emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor

Abstract

The invention relates to an X ray source based on a carbon nanotube/graphite alkene composite cathode structure. The X ray source comprises a vacuum container and an emission unit, wherein the vacuum container is provided with an X ray emission window, the emission unit comprises a cathode structure, a grid structure, a focusing structure and an anode structure, the anode structure comprises an anode seat and an anode target, under the action of the high voltage electric field, electron beams emitted by the cathode structure are focused through the focusing structure and then bombard the anode target to generate X rays emitting from the X ray emission window, the cathode structure comprises a cathode substrate bar and the carbon nanotube/graphite alkene composite cathode structure arranged on the cathode substrate bar. According to the X ray source, the cathode structure comprises the cathode substrate bar and the carbon nanotube/graphite alkene composite cathode structure arranged on the cathode substrate bar, the carbon nanotube/graphite alkene composite cathode structure is employed as an electron emission source, the specific surface area of the graphene is huge, conduction performance and heat radiation performance are excellent, adhesive force of a carbon nanotube layer is improved, and thereby current emission performance and the stability level of the X ray source are improved.

Description

Based on the x-ray source of carbon nano tube/graphene composite cathode structure
Technical field
The application relates to the application and relates to Flied emission technology, particularly relates to a kind of x-ray source based on carbon nano tube/graphene composite cathode structure.
Background technology
X-ray imaging technology, namely utilize X ray can the character that decays of penetrating material carrying out according to the size of penetrator quality, the noninvasive imaging to internal structure of body is realized by the attenuation degree of detecting x-ray, it comprises X-ray technology (Radiography) and X ray computer tomography technology (Computed Tomography, CT).Wherein, CT technology is that ray projection by carrying out different visual angles to object is measured and obtains the imaging technique of object cross sectional information.
X-ray source is one of key core parts of CT system, decides imaging mode and the imaging performance of CT system to a certain extent.Conventional X-ray source adopts hot cathode as electron source, produces electron beam by the mode of thermionic emission.Negative electrode is when being heated to the temperature of more than 1000 DEG C, and a large amount of electronics acquisitions is greater than the kinetic energy of emitter surface potential barrier and overflows.Such X-ray tube volume is comparatively large, frequency response slow and need the power supply of heated cathode, and hot cathode is due to reasons such as working temperature are high, power consumption is large, is not easy to realize integrated multiple negative electrode in single x-ray source, is also unfavorable for the miniaturization of x-ray source.The Field emission X-ray sources being negative electrode with materials such as carbon nano-tube can overcome above limitation.Flied emission utilizes highfield form tunnel effect on a solid surface and move in vacuum by the electronics of solid interior, is a kind of method realizing high-power high density electron stream.Field emission X-ray sources adopts field emissive cathode as electron source, electron beam is produced by the mode of Field Electron Emission, under the effect of extra electric field, the height reduction of cathode surface potential barrier, narrowed width, a large amount of electronics in emitter are overflowed because quantum tunneling effect penetrates surface potential barrier.Compare conventional hot-electron and launch x-ray source, carbon nanotube x-ray sources adopts cold cathode electron transmitting to have the advantage such as high time resolution, programmable type transmitting, and multiple beam x-ray source can be made, the mechanical scanning avoiding the corresponding Sole anode target of single source is rotated, and can carry out Static X-Ray CT imaging.
X-ray source needs the launch stability under high current, prior art adopts carbon nanotube cathod as electron emission source, between carbon nano-tube material and substrate, conductive radiator is limited, and thus adhesive force is limited, thus limits current emission performance and the life-span of x-ray source.
Summary of the invention
The technical problem that the application will solve is for the deficiencies in the prior art, provides a kind of x-ray source based on carbon nano tube/graphene composite cathode structure.
The technical problem that the application will solve is solved by the following technical programs:
A kind of x-ray source based on carbon nano tube/graphene composite cathode structure, comprise vacuum tank and be arranged on the transmitter unit in described vacuum tank, described vacuum tank is provided with X ray exit window, described transmitter unit comprises cathode construction, grid structure, focusing structure and anode construction, described anode construction comprises anode seat and is arranged on the plate target on described anode seat, under high voltage electric field effect between described grid structure and described cathode construction, the electron beam that described cathode construction is launched is after described focusing structure focuses on, bombard described plate target generation X ray to penetrate from described X ray exit window, described cathode construction comprises cathode substrate bar and is arranged on the carbon nano tube/graphene composite construction negative electrode on described cathode substrate bar.
Described transmitter unit has multiple, multiple described transmitter unit towards the projection rotating center pointing to imaging system respectively.
Described cathode substrate bar is provided with multiple described carbon nano tube/graphene composite construction negative electrode.
Described grid structure comprises grid, and described grid is provided with multiple grid hole, and described grid hole coordinates with described carbon nano tube/graphene composite construction negative electrode.
Described focusing structure comprises focusing electrode and is arranged on the multiple focal apertures on described focusing electrode, and described focal aperture coordinates with described grid hole.
Described plate target is multiple, and multiple described plate target is arranged on described anode seat, and described plate target coordinates with described focal aperture.
Described plate target is embedded on described anode seat.
Described plate target is towards adjustable.
Owing to have employed above technical scheme, the beneficial effect that the application is possessed is:
(1) in the embodiment of the application, comprise cathode substrate bar due to cathode construction and be arranged on the carbon nano tube/graphene composite construction negative electrode on cathode substrate bar, and adopt carbon nano tube/graphene laminated film negative electrode as electron emission source, the characteristic that Graphene specific area is huge and conductive radiator is excellent, improve the adhesive force of carbon nanotube layer, thus improve current emission performance and the level of stability of x-ray source.
(2) in the embodiment of the application, adopt the multiple beam x-ray source towards x-ray imaging system, mechanically share a cathode substrate bar, grid, on the basis of focusing electrode and anode seat scheme, plate target adopt adjustable towards embedded design, simultaneously the shape of cathode shape and focal aperture also adopt different towards, make the pivot towards sensing imaging system of each transmitter unit, namely ensure that the accuracy of each transmitter unit mutual alignment, can ensure again every transmitter unit towards being configured towards imaging system, avoid the dosage inconsistency of the different angles projection caused by heel effect.
accompanying drawing explanation
Fig. 1 is the structural representation of the x-ray source based on carbon nano tube/graphene composite cathode structure of the application;
Fig. 2 is the structural representation of the application's carbon nano tube/graphene composite cathode in one embodiment;
Fig. 3 is the schematic diagram of the application's cathode construction in one embodiment, grid structure, focusing structure and anode construction.
Embodiment
By reference to the accompanying drawings the application is described in further detail below by embodiment.
As shown in Figure 1 to Figure 3, the x-ray source based on carbon nano tube/graphene composite cathode structure of the application, its a kind of execution mode, comprise vacuum tank 10 and transmitter unit, transmitter unit is arranged in vacuum tank 10, vacuum tank 10 is provided with X ray exit window 11, transmitter unit comprises cathode construction, grid structure, focusing structure and anode construction, anode construction comprises anode seat 21 and plate target 22, plate target 22 is arranged on anode seat 21, under high voltage electric field effect between grid structure and cathode construction, after the electron beam line focus structure that cathode construction is launched focuses on, bombardment plate target 22 produces X ray, X ray penetrates from X ray exit window 11, cathode construction comprises cathode substrate bar 31 and negative electrode, in one embodiment, this negative electrode is carbon nano tube/graphene composite construction negative electrode 32, carbon nano tube/graphene composite construction negative electrode 32 is arranged on cathode substrate bar 31.
The x-ray source based on carbon nano tube/graphene composite cathode structure of the application, comprises control circuit and high voltage source group, vacuum electrode interface 12, vacuum tank 10, cathode construction, grid structure, aggregated structure, plate target 22 and X ray exit window 11 based on carbon nano tube/graphene composite construction.The working mechanism of this x-ray source is as follows, able to programme, pulsed X ray transmitting can be realized: grid 41 connects high pressure, high electric field is produced between grid 41 and carbon nano tube/graphene composite cathode 32, electron beam launched by carbon nano tube/graphene composite cathode 31, and electron beam obtains focusing to a certain extent under the effect of focusing structure.Accelerated under the electric field that electron beam produces in anode high voltage, bombardment plate target 22 produces X ray 13.Just can be realized the real-time break-make of grid high tension loop by control circuit, thus carry out the PLC technology of x-ray source transmitting.Wherein, the structure of each transmitter unit will customize towards imaging system, namely plate target 22 towards, carbon nano tube/graphene composite cathode shape orientation, focal aperture 52 towards, difference that the projection rotating center all pointing to imaging system can prevent heel effect from causing irradiates the consistency of the dosage of image.
The x-ray source based on carbon nano tube/graphene composite cathode structure of the application, transmitter unit is encapsulated in the environment of a high vacuum, can be glass packaging, cermet encapsulation, or metal vacuum cavity.The vacuum ranges of vacuum tank 10 can from 10 -6millimetres of mercury is to 10 -11millimetres of mercury.Vacuum tank 10 is equipped with X ray exit window 11, is made up of the material of high X ray penetrance, can be but be not limited to metallic beryllium or metallic aluminium.Vacuum cavity is equipped with vacuum electrode interface 12, for the connection of control circuit and vacuum chamber negative electrode, also for the connection of grid, electron beam aggregated structure and external high pressure power pack.
The objects such as carbon nano tube/graphene composite construction cathode construction, grid structure, Electron Beam Focusing structure, anode construction are had in vacuum cavity.Plate target 22 surface of anode construction is angle from 5 ° to 15 ° with horizontal direction angle.
Grid 41 is by electric conductor, and as tungsten etc., structure includes but not limited to mesh-like, poroid or paliform structure.Grid is connected to certain current potential (0 to 10 kilovolt), thus can apply electric field by target 32, makes negative electrode 32 divergent bundle.
Focusing structure, by electric conductor, as the material such as stainless steel, oxygen-free copper is formed, has and crowds around formula structure, its current potential is equal with negative electrode or close, with the photoelectron of the mode focus divergent of electrostatic field, thus constraint electron beam, to obtain the focal spot of moderate size on plate target.
Plate target is made up of the metal that atomic number is high, as metals such as tungsten, molybdenum, copper.And by welding, technique and heat sink material (comprise and be not limited to oxygen-free copper, the alloy material) close contact such as to inlay to improve the rate of heat dissipation of plate target 22.Be connected to high voltage between negative electrode and anode, voltage range is different from 20 kilo electron volt to 500 kilo electron volts according to application demand.Comprise three kinds of high pressure connections: I. anode connects positive high voltage, and negative electrode connects negative high voltage; II. anode connects positive high voltage, minus earth; III. plus earth, negative electrode connects negative high voltage.
In one embodiment, transmitter unit can have multiple, multiple transmitter unit towards the projection rotating center of imaging system pointing to transmitter unit respectively, namely each transmitter unit towards the projection rotating center all pointing to its imaging system.
Cathode substrate bar 31 is provided with multiple carbon nano tube/graphene composite construction negative electrode 32.In Fig. 2, A is carbon nano-tube, and B is Graphene.Grid structure comprises grid 41, and grid is provided with multiple grid hole 42, and grid hole 42 coordinates with carbon nano tube/graphene composite construction negative electrode 32.Multiple focal apertures 52 that focusing structure comprises focusing electrode 51 and is arranged on focusing electrode, focal aperture 52 coordinates with grid hole 42.Plate target more than 22, multiple plate target is arranged on anode seat, and plate target coordinates with focal aperture.Namely the position of each transmitter unit carbon nano tube/graphene composite construction negative electrode 32, grid hole 42, focal aperture 52 and plate target 22 and size coordinate.
Plate target 22 is embedded on described anode seat 21.In one embodiment, plate target 22 is towards adjustable.
The x-ray source based on carbon nano tube/graphene composite cathode structure of the application, mechanically share cathode substrate bar, grid, focusing electrode and an anode seat scheme, and plate target adopt adjustable towards embedded design, simultaneously the shape of cathode shape and focusing unit also adopt different towards, make every transmitter unit towards the pivot pointing to imaging system.Fig. 3 is the structural representation of the electron gun that cathode construction, grid structure, focusing structure and anode construction are formed.
Based on the negative electrode of carbon nano tube/graphene composite construction under the exciting of gate electric field, divergent bundle.Subsequently, electron beam focuses under the effect of focusing structure, and draws acceleration under the effect of the electric field of anode electric field generation, and bombardment plate target forms focal spot, and logical bremsstrahlung mechanism transmitting X ray.The X-ray beam sent from focal spot region penetrates from the X ray exit window of vacuum window.
Control circuit is connected electronic cathode and electron beam aggregation apparatus with high voltage source group by vacuum electrode interface.By regulating the magnitude of voltage of high voltage source, the magnitude of voltage of grid and aggregated structure can be changed.Change the magnitude of voltage of grid, the size of electronic beam current can be adjusted.The magnitude of voltage changing aggregated structure can adjust congregational rate.By arranging the parameter of control circuit, realizing the real-time break-make of grid high tension loop, the open and close that electron beam is launched can be controlled, thus carry out the transmitting of able to programme, the pulsed of x-ray source.
Present application has been the performance test of carbon nano tube/graphene laminated film negative electrode, demonstrate current emission performance and the level of stability of this negative electrode excellence.
Above content is the further description done the application in conjunction with concrete execution mode, can not assert that the concrete enforcement of the application is confined to these explanations.For the application person of an ordinary skill in the technical field, under the prerequisite not departing from the application's design, some simple deduction or replace can also be made.

Claims (8)

1. the x-ray source based on carbon nano tube/graphene composite cathode structure, comprise vacuum tank and be arranged on the transmitter unit in described vacuum tank, described vacuum tank is provided with X ray exit window, described transmitter unit comprises cathode construction, grid structure, focusing structure and anode construction, described anode construction comprises anode seat and is arranged on the plate target on described anode seat, under high voltage electric field effect between described grid structure and described cathode construction, the electron beam that described cathode construction is launched is after described focusing structure focuses on, bombard described plate target generation X ray to penetrate from described X ray exit window, it is characterized in that, described cathode construction comprises cathode substrate bar and is arranged on the carbon nano tube/graphene composite construction negative electrode on described cathode substrate bar.
2., as claimed in claim 1 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described transmitter unit has multiple, multiple described transmitter unit towards the projection rotating center pointing to imaging system respectively.
3., as claimed in claim 2 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described cathode substrate bar is provided with multiple described carbon nano tube/graphene composite construction negative electrode.
4. as claimed in claim 3 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described grid structure comprises grid, and described grid is provided with multiple grid hole, and described grid hole coordinates with described carbon nano tube/graphene composite construction negative electrode.
5. as claimed in claim 4 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described focusing structure comprises focusing electrode and is arranged on the multiple focal apertures on described focusing electrode, and described focal aperture coordinates with described grid hole.
6., as claimed in claim 5 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described plate target is multiple, and multiple described plate target is arranged on described anode seat, and described plate target coordinates with described focal aperture.
7., as claimed in claim 6 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described plate target is embedded on described anode seat.
8., as claimed in claim 7 based on the x-ray source of carbon nano tube/graphene composite cathode structure, it is characterized in that, described plate target is towards adjustable.
CN201410608747.5A 2014-10-31 2014-10-31 X ray source based on carbon nanotube/graphite alkene composite cathode structure Pending CN104409303A (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104867800A (en) * 2015-05-15 2015-08-26 山东航天电子技术研究所 Miniature X-ray source based on carbon nanotube field emission
CN105470078A (en) * 2015-12-29 2016-04-06 无锡吉仓纳米材料科技有限公司 Focused tripolar structured fully-packaged X-ray bulb tube based on carbon nanotube cold cathode
CN106683963A (en) * 2016-12-19 2017-05-17 中国科学院深圳先进技术研究院 Transmission type X-ray source structure of patterned carbon nano-tube cathode
CN106783485A (en) * 2016-12-09 2017-05-31 中国科学院深圳先进技术研究院 CT system and its cold cathode X-ray tube
CN106783486A (en) * 2016-12-19 2017-05-31 中国科学院深圳先进技术研究院 A kind of Reflection X-ray source structure of Patterned Carbon Nanotube negative electrode
CN106783488A (en) * 2016-12-09 2017-05-31 中国科学院深圳先进技术研究院 CT system and its cold cathode X-ray tube
CN107907810A (en) * 2017-11-03 2018-04-13 北京东方计量测试研究所 The adjustable parallel-plate electrode Electromagnetic Field Irradiation discharge system of vacuum
CN108109892A (en) * 2017-12-13 2018-06-01 无锡格菲电子薄膜科技有限公司 Photoemission ionization source based on graphene
US20190193193A1 (en) * 2017-12-22 2019-06-27 Arcam Ab Electron beam source and the use of the same
WO2020082279A1 (en) * 2018-10-24 2020-04-30 深圳先进技术研究院 Superficial x-ray skin treatment apparatus and system
WO2021037481A1 (en) * 2019-08-29 2021-03-04 Friedrich-Alexander-Universität Erlangen-Nürnberg Electron source for generating an electron beam

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104867800A (en) * 2015-05-15 2015-08-26 山东航天电子技术研究所 Miniature X-ray source based on carbon nanotube field emission
CN105470078A (en) * 2015-12-29 2016-04-06 无锡吉仓纳米材料科技有限公司 Focused tripolar structured fully-packaged X-ray bulb tube based on carbon nanotube cold cathode
CN106783488B (en) * 2016-12-09 2019-05-10 中国科学院深圳先进技术研究院 CT system and its cold cathode X-ray tube
CN106783485A (en) * 2016-12-09 2017-05-31 中国科学院深圳先进技术研究院 CT system and its cold cathode X-ray tube
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CN106783486A (en) * 2016-12-19 2017-05-31 中国科学院深圳先进技术研究院 A kind of Reflection X-ray source structure of Patterned Carbon Nanotube negative electrode
CN106683963A (en) * 2016-12-19 2017-05-17 中国科学院深圳先进技术研究院 Transmission type X-ray source structure of patterned carbon nano-tube cathode
CN106783486B (en) * 2016-12-19 2019-05-17 中国科学院深圳先进技术研究院 A kind of Reflection X-ray source structure of Patterned Carbon Nanotube cathode
CN107907810A (en) * 2017-11-03 2018-04-13 北京东方计量测试研究所 The adjustable parallel-plate electrode Electromagnetic Field Irradiation discharge system of vacuum
CN108109892A (en) * 2017-12-13 2018-06-01 无锡格菲电子薄膜科技有限公司 Photoemission ionization source based on graphene
CN108109892B (en) * 2017-12-13 2024-03-29 常州第六元素半导体有限公司 Ion source based on photoelectric effect of graphene electrode
US20190193193A1 (en) * 2017-12-22 2019-06-27 Arcam Ab Electron beam source and the use of the same
WO2020082279A1 (en) * 2018-10-24 2020-04-30 深圳先进技术研究院 Superficial x-ray skin treatment apparatus and system
WO2021037481A1 (en) * 2019-08-29 2021-03-04 Friedrich-Alexander-Universität Erlangen-Nürnberg Electron source for generating an electron beam

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