CN105403382A - Wave plate phase retardation and fast axis azimuth measurement device and method - Google Patents

Wave plate phase retardation and fast axis azimuth measurement device and method Download PDF

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Publication number
CN105403382A
CN105403382A CN201510708498.1A CN201510708498A CN105403382A CN 105403382 A CN105403382 A CN 105403382A CN 201510708498 A CN201510708498 A CN 201510708498A CN 105403382 A CN105403382 A CN 105403382A
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variable delay
delay device
wave plate
phase
retardation
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曾爱军
顾帅妍
朱玲琳
黄惠杰
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties

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  • Analytical Chemistry (AREA)
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract

The invention discloses a wave plate phase retardation and fast axis azimuth measurement device, which comprises a collimation light source, a circular polarizer, a first variable retarder, a second variable retarder, a polarizer, a photoelectric detector and a signal processing system. The wave plate phase retardation and the fast axis azimuth can be measured in real time; and as no mechanical transmission device exists and no complicated signal modulation and demodulation unit is needed, the structure is simple, the measurement time is short, and the measurement range is wide.

Description

The measurement mechanism of retardation of wave plate and phase retardation and method
Technical field
The present invention relates to real-time measurement apparatus and the method for wave plate measurement, particularly a kind of retardation of wave plate and phase retardation.
Background technology
Along with the development of polarized-light technique, the requirement of polarized systems to indexs such as resolution, precision, signal to noise ratio (S/N ratio)s is more and more higher.And wave plate is widely used in polarization technology field, being device the most frequently used in polarized systems, therefore seeming particularly important to accurately measuring while most important two the technology parameter phase-delay quantities of wave plate and phase retardation.
First technology [1] (see Cui Xiangxia, Wu Fuquan, Chen Jun etc. retardation of wave plate four step phase-shifting methods measure. Qufu Normal University journal .Vol.36, No.2,2010) gone out by the Muller matrix of wave plate and Stokes vector derivation the general expression measuring retardation of wave plate, proposed the four step phase-shifting methods separating in the optical path and correct light beam.The method, without the need to knowing the concrete orientation of wave plate optical axis, also without the need to judging extinction position, can measure the phase-delay quantity of wave plate.But in measuring process, analyzer needs generation four mechanical rotation, can reduce conventional efficient, affect experimental precision.
First technology [2] (see Xu Wendong, Li Xishan. retardation of wave plate precision measurement new method. Acta Optica .Vol.14, No.10,1994) a kind of polarization interference technology utilizing rotating wave plate is proposed, in conjunction with mechano-optical optically-active modulator to the modulation of light phase, by judging the presence or absence of square-wave signal, the method for the phase-delay quantity of precise standing wave sheet.But the method introduces rotatable mechano-optical optically-active modulator, and complex structure, debugs difficulty, and error is larger.
In first technology [3] (see BaoliangWang, C.OwenGriffiths, RickR.Rockwell, Etc.The dUVBirefringenceMeasurementSystemandItsApplicationtoMeas uringLithographyGradeCaF2LensBlanks.SPIE.Vol.5192,2003) a kind of method utilizing two light ball modulator measurement phase-delay quantity and phase retardation is proposed, but in the method, it is more difficult to demarcate modulator, and signal processing is also comparatively complicated.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of phase-delay quantity of wave plate and the measurement mechanism of phase retardation and method are provided, phase-delay quantity and the phase retardation of wave plate can be measured simultaneously.
Technical solution of the present invention is as follows:
A kind of phase-delay quantity of wave plate and the measurement mechanism of phase retardation, its feature is, this device is made up of collimated light source, circular polarizer, the first variable delay device, the second variable delay device, analyzer, photodetector and signal processing system, its position relationship is: along in the light beam working direction of described collimated light source, be described circular polarizer, the first variable delay device, the second variable delay device, analyzer, photodetector successively, the socket of wave plate to be measured is set between described circular polarizer and the first described variable delay device;
The first described variable delay device and the second described variable delay device can be combined by single or multiple variable delay device respectively.The first described variable delay device and the phase-delay quantity of the second variable delay device change simultaneously, are respectively δ 1, δ 2, δ 3and δ 4, δ 1, δ 2, δ 3and δ 4span be (0 °, 180 °).The phase retardation of the first described variable delay device is θ 1, the phase retardation of the second described variable delay device is θ 2, θ 1and θ 2span be (0 °, 180 °);
Described analyzer light transmission shaft direction and horizontal direction angle are the span of α, α is (0 °, 180 °);
θ 1, θ 2can be combination in any with α, phase-delay quantity δ 1, δ 2, δ 3and δ 4also can be multiple various combination, but following transfer matrix T (α must be met; θ 1, θ 2; δ 1, δ 2, δ 3, δ 4) be nonsingular matrix.
Described signal processing system is made up of signal amplification circuit, signal acquisition circuit and the computing machine with data process&analysis software.
The measurement mechanism of the retardation of wave plate described in utilization and phase retardation measures the phase-delay quantity of wave plate and the method for phase retardation, and its feature is to comprise the following steps:
1. the circular polarizer described in being inserted wave plate to be measured and to arrange between the first described variable delay device in the socket of wave plate to be measured and to adjust light path, makes beam orthogonal by wave plate to be measured;
2. open described collimated light source, the phase-delay quantity of the first variable delay device described in control and the second described variable delay device is δ 1; Photodetector detection light intensity I described in utilization 1and by light intensity I 1change electric signal into and be input to described signal processing system;
3. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 2; Photodetector detection light intensity I described in utilization 2and by light intensity I 2change electric signal into and be input to described signal processing system;
4. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 3; Photodetector detection light intensity I described in utilization 3and by light intensity I 3change electric signal into and be input to described signal processing system;
5. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 4; Photodetector detection light intensity I described in utilization 4and by light intensity I 4change electric signal into and be input to described signal processing system;
6. described signal processing system carries out lower column count:
By above formula, phase retardation θ and the phase-delay quantity δ of described wave plate to be measured can be solved.Wherein, for transfer matrix
T (α; θ 1, θ 2; δ 1, δ 2, δ 3, δ 4) element, T (α; θ 1, θ 2; δ 1, δ 2, δ 3, δ 4) can be expressed as:
With compared with first technology, technique effect of the present invention is as follows:
1, do not have mechanical rotation device, without the need to the modulating and demodulating signal unit of complexity, structure is simple, and Measuring Time is shorter.
2, can measure phase-delay quantity and phase retardation, and measurement range is wide, phase-delay quantity measurement range is 0 ° ~ 180 ° and phase retardation measurement range is 0 ° ~ 180 ° simultaneously.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the embodiment of the measurement mechanism of retardation of wave plate of the present invention and phase retardation.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
First refer to Fig. 1, Fig. 1 is the structured flowchart of the measurement mechanism embodiment of retardation of wave plate of the present invention and phase retardation.As seen from Figure 1, the measurement mechanism of retardation of wave plate of the present invention and phase retardation, is made up of collimated light source 1, circular polarizer 2, first variable delay device 4, second variable delay device 5, analyzer 6, photodetector 7, signal processing system 8.Its position relationship is: along in the light beam working direction of collimated light source 1, is circular polarizer 2, first variable delay device 4, second variable delay device 5, analyzer 6, photodetector 7 successively.The electric signal that photodetector 7 exports is input in signal processing system 8 and carries out signal amplification and data processing.
The first described variable delay device 4, second variable delay device 5 is nematic crystal delayer, and the first described variable delay device and the phase-delay quantity of the second variable delay device change simultaneously, are respectively δ 1, δ 2, δ 3and δ 4, δ 1, δ 2, δ 3and δ 4span be (0 °, 180 °).The phase retardation of the first described variable delay device 4 is θ 1, the phase retardation of the second described variable delay device 5 is θ 2, θ 1and θ 2span be (0 °, 180 °);
Described analyzer 6 is polaroid, and its light transmission shaft direction is the span of α, α is (0 °, 180 °);
Described signal processing system 8 is made up of signal amplification circuit, signal acquisition circuit and the computing machine with data process&analysis software.
Described wave plate to be measured 3 to insert in the wave plate socket to be measured between described circular polarizer 2 and the first described variable delay device 4 and adjusts light path, makes beam orthogonal by wave plate to be measured.The parallel beam of described collimated light source 2 outgoing forms rotatory polarization through described circular polarizer 2 successively, this rotatory polarization arrives the second described variable delay device 4 and the 3rd described variable delay device 5 after described wave plate to be measured 3, and the phase-delay quantity of the first variable delay device 4 described in control and the second described variable delay device 5 is δ 1, phase delay is produced to incident light, after described analyzer 6, the light intensity I of light path 1received by described photodetector 7; The phase-delay quantity of the first variable delay device 4 described in control and the second described variable delay device 5 is δ 2, phase delay is produced to incident light, after described analyzer 6, the light intensity I of light path 2received by described photodetector 7; The phase-delay quantity of the first variable delay device 4 described in control and the second described variable delay device 5 is δ 3, phase delay is produced to incident light, after described analyzer 6, the light intensity I of light path 3received by described photodetector 7; The phase-delay quantity of the first variable delay device 4 described in control and the second described variable delay device 5 is δ 4, thus phase delay is produced to incident light, and after described analyzer 6, the light intensity I of light path 4received by described photodetector 7.
Described collimated laser beam becomes circularly polarized light after described circular polarizer, and the Stokes vector of this circularly polarized light is S i, can be expressed as
Wherein, I 0for the light intensity of the incident beam of wave plate to be measured.
The Muller matrix M of described wave plate to be measured scan be expressed as
Wherein: δ is the phase-delay quantity of described wave plate to be measured, θ is the phase retardation of described wave plate to be measured.The Stokes vector S of the outgoing beam of then described wave plate to be measured iIfor
Wherein, I 1for the light intensity of the outgoing beam of wave plate to be measured, Q 1, U 1for the linear polarization component of the outgoing beam of wave plate to be measured, V 1for the circular component of the outgoing beam of wave plate to be measured
The Muller matrix M of the delayer of any phase retardation and phase-delay quantity lcan be expressed as
Wherein: δ is the phase-delay quantity of delayer, θ is the phase retardation of delayer.
Therefore four Muller matrixes of the first described variable delay device can be expressed as M l1(θ 1, δ 1), M l1(θ 1, δ 2), M l1(θ 1, δ 3), M l1(θ 1, δ 4).Four Muller matrixes of the second described variable delay device can be expressed as M l2(θ 2, δ 1), M l2(θ 2, δ 2), M l2(θ 2, δ 3), M l2(θ 2, δ 4).
The Muller matrix M of the azimuthal analyzer of any light transmission shaft acan be expressed as
Wherein α is the polarization axle position angle of analyzer.
Therefore the Muller matrix of described analyzer can be expressed as M a(α).
Then the polarization state S of the emergent light of analyzer can be expressed as
Wherein, I is the light intensity of the outgoing beam of analyzer, and Q, U are the linear polarization component of the outgoing beam of analyzer, and V is the circular component of the outgoing beam of analyzer.
The light intensity I that described photodetector detects can be expressed as
I＝m 11I 1+m 12Q 1+m 13U 1+m 14V 1
Historical facts or anecdotes is tested four measurements and can be expressed as
Wherein, transfer matrix
Can obtain
Then
By above formula, phase retardation θ and the phase-delay quantity δ of described wave plate to be measured can be solved.
The structure of most preferred embodiment of the present invention as shown in Figure 1, its concrete structure and parameter as follows:
Described collimated light source 1 is stable He-Ne laser instrument, and its optical maser wavelength is 632.8nm, and its stabilized intensity degree is ± 0.2%.The line polarizer in described circular polarizer 2 is extinction ratio 10 -2polaroid.The zero level quartz wave-plate of to be phase delay device precision be λ/300 of the quarter-wave plate in described circular polarizer 2.The first described variable delay device 4 and the second described variable delay device 5 are nematic crystal delayer, and its clear aperature is 10mm, and applicable wavelengths scope is 350-700nm.The first described variable delay device 4 phase retardation is 45 °, and the second described variable delay device 5 phase retardation is 30 °.Described analyzer 6 is extinction ratios 10 -2polaroid.Described photodetector 7 is PIN pipe.Described signal processing system 8 is formed by 2.5mA electric current being converted to the amplifying circuit of 3V voltage, 100M data acquisition circuit and the computing machine with LabView software.
Collimated laser beam becomes circularly polarized light after described circular polarizer 2, the Stokes vector S of this circularly polarized light ifor
Wherein, I 0for the light intensity of the incident beam of wave plate to be measured.
The Muller matrix M of described wave plate to be measured 3 scan be expressed as
Wherein: δ is the phase-delay quantity of described wave plate to be measured 3, θ is the phase retardation of described wave plate to be measured 3.The Stokes vector S of the outgoing beam of described wave plate to be measured 3 iIfor
Wherein, I 1for the light intensity of the outgoing beam of wave plate to be measured, Q 1, U 1for the linear polarization component of the outgoing beam of wave plate to be measured, V 1for the circular component of the outgoing beam of wave plate to be measured
The Muller matrix M of the delayer of any phase retardation and phase-delay quantity lcan be expressed as
Wherein: δ is the phase-delay quantity of delayer, θ is the phase retardation of delayer.Therefore the phase retardation of the first described variable delay device 4 is 45 °, phase-delay quantity is respectively Muller matrix M when 0 °, 45 °, 90 ° and 135 ° l1(θ 1, δ 1), M l1(θ 1, δ 2), M l1(θ 1, δ 3), M l1(θ 1, δ 4) be respectively
The phase retardation of the second described variable delay device 5 is 30 °, and phase-delay quantity is respectively Muller matrix M when 0 °, 45 °, 90 ° and 135 ° l2(θ 2, δ 1), M l2(θ 2, δ 2), M l2(θ 2, δ 3), M l2(θ 2, δ 4) be respectively
The Muller matrix M of the azimuthal analyzer of any light transmission shaft acan be expressed as
Wherein α is the polarization axle position angle of analyzer.Described analyzer 5 light transmission shaft position angle is 0 °, therefore its Muller matrix M a(α) be
The polarization state S of the emergent light of analyzer can be expressed as
Wherein, I is the light intensity of the outgoing beam of analyzer, and Q, U are the linear polarization component of the outgoing beam of analyzer, and V is the circular component of the outgoing beam of analyzer.
The light intensity I that described photodetector 6 detects can be expressed as
I＝m 11I 1+m 12Q 1+m 13U 1+m 14V 1
Historical facts or anecdotes is tested four measurements and can be expressed as
Wherein, transfer matrix
Can obtain
Then can be obtained by calculating
The value calculating δ can obtain the phase-delay quantity of wave plate, and the value calculating θ can obtain the phase retardation of wave plate, therefore can measure phase-delay quantity and the phase retardation of described wave plate to be measured 3 simultaneously.
What described collimated light source 1 adopted is the He-Ne laser instrument that 632.8nm is stable, and its stabilized intensity degree is ± 0.2%, therefore in measuring process, I 0can be considered as constant.Measurement result and initial beam intensity have nothing to do.
Utilize above-described embodiment to measure 1/8th wave plates 3 to be measured that phase-delay quantity is 45 °, experimental result shows that the measuring accuracy of the phase-delay quantity of 1/8th wave plates to be measured is 0.1 °, and the precision of phase retardation is 1 °.

Claims (6)

1. the measurement mechanism of a retardation of wave plate and phase retardation, it is characterized in that, comprise collimated light source (1), circular polarizer (2), the first variable delay device (4), the second variable delay device (5), analyzer (6), photodetector (7) and signal processing system (8);
The position relationship of above-mentioned each parts is:
Light beam working direction along described collimated light source is described circular polarizer, the first variable delay device, the second variable delay device, analyzer and photodetector successively, the output terminal of this photodetector is connected with the input end of described signal processing system, is provided with the socket placed for wave plate to be measured between described circular polarizer and the first variable delay device.
2. the measurement mechanism of retardation of wave plate according to claim 1 and phase retardation, it is characterized in that, the first described variable delay device and the second variable delay device are nematic crystal delayer, the first described variable delay device and the phase-delay quantity of the second variable delay device change simultaneously, are respectively δ 1, δ 2, δ 3and δ 4, δ 1, δ 2, δ 3and δ 4span be (0 °, 180 °).
3. the measurement mechanism of retardation of wave plate according to claim 1 and phase retardation, is characterized in that, the phase retardation of the first described variable delay device is θ 1, the phase retardation of the second described variable delay device is θ 2, θ 1and θ 2span be (0 °, 180 °).
4. the measurement mechanism of retardation of wave plate according to claim 1 and phase retardation, is characterized in that, described analyzer is polaroid, and its light transmission shaft direction is α, and span is (0 °, 180 °).
5. the measurement mechanism of retardation of wave plate according to claim 1 and phase retardation, is characterized in that, described signal processing system is made up of signal amplification circuit, signal acquisition circuit and the computing machine with data process&analysis software.
6. utilize the measurement mechanism described in claim 1, measure the phase-delay quantity of wave plate and the method for phase retardation, it is characterized in that, comprise the following steps:
1. wave plate to be measured is inserted circular polarizer and the first variable delay device between to arrange in the socket of wave plate to be measured and adjust light path, make beam orthogonal by wave plate to be measured;
2. open collimated light source, the phase-delay quantity controlling the first variable delay device and the second variable delay device is δ 1; Photodetector is utilized to detect light intensity I 1and by light intensity I 1change electric signal into and be input to signal processing system;
3. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 2; Photodetector detection light intensity I described in utilization 2and by light intensity I 2change electric signal into and be input to described signal processing system;
4. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 3; Photodetector detection light intensity I described in utilization 3and by light intensity I 3change electric signal into and be input to described signal processing system;
5. the phase-delay quantity controlling the first described variable delay device and the second described variable delay device is δ 4; Photodetector detection light intensity I described in utilization 4and by light intensity I 4change electric signal into and be input to described signal processing system;
6. calculate phase retardation θ and the phase-delay quantity δ of wave plate to be measured, formula is as follows:
θ = 1 2 a r c t a n m 11 2 I 1 + m 12 2 I 2 + m 13 2 I 3 + m 14 2 I 4 m 11 3 I 1 + m 12 3 I 2 + m 13 3 I 3 + m 14 3 I 4
δ = a r c t a n ( m 11 2 I 1 + m 12 2 I 2 + m 13 2 I 3 + m 14 2 I 4 ) 2 + ( m 11 3 I 1 + m 12 3 I 2 + m 13 3 I 3 + m 14 3 I 4 ) 2 m 11 4 I 1 + m 12 4 I 2 + m 13 4 I 3 + m 14 4 I 4
Wherein, for transfer matrix T (α; θ 1, θ 2; δ 1, δ 2, δ 3, δ 4) element, α is the polarization axle position angle of analyzer;
T (α; θ 1, θ 2; δ 1, δ 2, δ 3, δ 4) be expressed as:
T α ; θ 1 , θ 2 ; δ 1 , δ 2 , δ 3 , δ 4 = m 11 1 m 12 1 m 13 1 m 1 4 1 m 11 2 m 12 2 m 1 3 2 m 1 4 2 m 11 3 m 12 3 m 1 3 3 m 1 4 3 m 11 4 m 12 4 m 1 3 4 m 1 4 4 .
CN201510708498.1A 2015-10-27 2015-10-27 Wave plate phase retardation and fast axis azimuth measurement device and method Pending CN105403382A (en)

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CN112326201B (en) * 2020-10-13 2023-02-14 中国科学院上海光学精密机械研究所 Quarter-wave plate fast axis azimuth angle and phase retardation distribution measuring device and method
CN113654996A (en) * 2021-07-20 2021-11-16 上海精测半导体技术有限公司 Device and method for measuring phase retardation of composite achromatic wave plate
CN114279977A (en) * 2021-12-28 2022-04-05 深圳市麓邦技术有限公司 Method for detecting liquid crystal optical sheet and storage medium
WO2024065878A1 (en) * 2022-09-28 2024-04-04 上海镭望光学科技有限公司 Wave plate delay and fast axis measurement method based on light intensity

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