CN202710848U - Linearly-polarized light generating device with high energy utilization rate and application thereof - Google Patents
Linearly-polarized light generating device with high energy utilization rate and application thereof Download PDFInfo
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- CN202710848U CN202710848U CN 201220417782 CN201220417782U CN202710848U CN 202710848 U CN202710848 U CN 202710848U CN 201220417782 CN201220417782 CN 201220417782 CN 201220417782 U CN201220417782 U CN 201220417782U CN 202710848 U CN202710848 U CN 202710848U
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Abstract
The utility model discloses a linearly-polarized light generating device with a high energy utilization rate and an application thereof. The linearly-polarized light generating device comprises a linearly-polarized light source 101, a quarter wave plate 103, a quarter wave plate 104 and a linear polarizer 102 which is installed in a hollow rotating device 105, wherein the quarter wave plate 103 and the linearly-polarized light source 101 are mechanically fixed, and an inclined angle between an azimuth angle C1 of the quarter wave plate 103 and an azimuth angle L of a polarization surface of the linearly-polarized light source 101 is C1-L=[0.5*(k2+k1)=0.25]*Pi; an inclined angle between an azimuth angle C2 of the quarter wave plate 104 and an azimuth angle P of the linear polarizer 102 is P-C2=[0.5*(k2-k1)+0.25]*Pi, the quarter wave plate 104 and the linear polarizer rotates synchronously, k1 is any integer of -1, 0 and 1; and k2 is any integer of -2, -1, 0 and 1. The linearly-polarized light generating device has advantages that regardless of how the azimuth angle of the linear polarizer 102 is set, the energy utilization rate of the light source can be always kept approximate 100 percent.
Description
Technical field
The utility model relates to the polarization optics field, especially a kind of linearly polarized light generation device and application thereof of the high-energy utilization factor based on the linear polarization light source.
Background technology
Polarization is one of fundamental characteristics of light wave, the polarization optics system be utilize the light wave polarization characteristic and with the interactional class optical system of material Polarization Modulation (list of references 1:R.M.A.Azzam and N.M.Bashara, Ellipsometry and Polarized Light, 1
StEdition, Amsterdam:North-Holland publishing company, 1977,1-486).Typical case's polarization optics system comprises: transmission-type polarized systems, diffuse transmission type polarized systems, reflective ellipse inclined to one side system etc.
The application of polarization optics system is very extensive.Such as, the transmission-type polarization measurement system can be measured the polarization state of light wave, the dichroism of optical device, the bit phase delay of wave plate etc.For another example, the ellipsometer of measuring based on reflection type polarization is a kind of important method that surface and interface of materials is characterized, it is the important means of nano thin-film sample characterization, can obtain simultaneously the parameters such as the thickness of nanometer rete and refractive index, and has a following advantage: noncontact, without destructive, can reach the sensitivity for analysis of atomic layer magnitude, almost applicable to any (list of references 2:Har land G.Tompkins and Eugene A.Irene such as material, Handbook of ellipsometry, New York:William Andrew Inc., 2005).Can be used for the practical material of nano thin-film and the surface device such as artificial membrane, novel sensor, SIC (semiconductor integrated circuit), light quantum device, biochip, high density storage.
Typical polarization optics system (see figure 1) generally comprises successively: polarized light generation device 1, sample 2, polarized light detecting device 3.Wherein, polarized light generation device 1 for generation of the known elliptically polarized light of polarization state (as linearly polarized light, circularly polarized light, elliptically polarized light etc.), the polarization state of 2 pairs of incident lights of sample is modulated by modes such as transmission, reflection, refraction, scatterings, and polarized light detecting device 3 is for detection of the polarization state of light wave behind sample 2 modulating actions.The testing process of system is: polarized light generation device 1 produces the known certain elliptical polarized light of polarization state; After sample 2 modulation, the polarization state of polarized light changes, and this variation is relevant with the character of sample 2; Optical polarization after utilizing polarized light detecting device 3 modulation detects; Set up the physical model of sample and polarization conversion, adopt mathematical method solve sample 2 relevant nature (as, dichroism, refractive index, extinction coefficient etc.).
In said system, typical polarized light generation device 1(is as shown in Figure 2) comprise at least a linearly polarized light generation device 10, some system also comprises phase delay device 11.In linearly polarized light generation device 10, light source 101 and linear polarizer 102 have been comprised, through the only linearly polarized photon of linear polarizer 102 outgoing; If also comprised phase delay device 11 in the polarized light generation device 1, can produce specific elliptically polarized light according to being arranged on phase delay device 11 exit ends so.This shows, in polarized light generation device 1, the linearly polarized light generation device 10 that is comprised of light source 101 and linear polarizer 102 is common parts, also is foundation.
In linearly polarized light generation device 10, light source 101 is for generation of the light beam with certain energy and spectral distribution.Can be divided into three kinds of forms such as lamp, partial polarization light source, complete polarized light source by outgoing polarization state light source 101.Wherein the lamp of random polarization distribution exists hardly, commonly has the partial polarization light source of certain polarization advantage.Along with the development of the development of light source technology, especially semiconductor technology, the polarized light source with high Linear polarization of laser has appearred comprising, and feature is that emergent light is linearly polarized photon, and its extinction ratio is generally greater than 100:1.This type of light source comprises polarization laser, polarization laser diode etc., has certainly also comprised the linear polarization light source that is composited by unpolarized light source and polaroid.This class linear polarization light source is used very extensive at present, and such as in ellipsometer, adopting the laser ellipsometer of linearly polarized laser device is exactly a class important instrument form.
Convenient for following discussion, do following agreement:
● the luminous energy of linear polarization light source 101 is I
0, the position angle of linear polarization light source 101 is defined as the plane of polarization of its emerging ray polarized light with respect to the anticlockwise angle of reference zero-bit, is designated as L.
● the position angle of linear polarizer 102 is defined as its light transmission shaft with respect to the anticlockwise angle of reference zero-bit, is designated as P.
● linear polarization light source 101 is designated as θ=P-L with the angle of linear polarizer 102.
● when polarizer around optical axis when rotation, being defined as of direction: observe in face of the direction that light is propagated, when rotate counterclockwise be the position angle for just, clockwise rotate as negative.
● the position angle of wave plate be defined as fast axle with reference to the angle of zero-bit.
When aforesaid linear polarization light source 101 was applied to linearly polarized light generation device 10, investigating, energy utilized problem.According to Marlu's principle, the luminous energy behind linear polarizer 102 is I=I
0Cos
2θ.Whether the angle theta according to linear polarization light source 101 during the system works and linear polarizer 102 changes, minute following situation discussion:
(1) θ remains unchanged.This shows, constant by the luminous energy maintenance of linear polarizer 102 outgoing in system work process, if θ ≠ 0, so I ≠ I
0, namely linearly polarized light generation device 10 can not take full advantage of the energy of linear polarization light source 101, in order to take full advantage of the energy of linear polarization light source 101, will regulate θ=0 in the use;
(2) θ changes.Common phenomenon is that linear polarizer 102 will change the position angle, however linear polarization light source 101 owing to the reasons such as physical construction, device weight inconvenience with the former synchronously due to.This moment I=I
0Cos
2θ can become along with the variation of θ, this means during system works, can't keep constant by the luminous energy of linear polarizer 102 outgoing, for a lot of polarized systems, and precise quantitative measuring system especially, this will do one's utmost to be avoided.
In order to illustrate further the situation in above-mentioned (2), provide two kinds of typical systems at this:
(a) in the ellipsometer of the polarizer-sample-compensator-analyzer structure or the polarizer-compensator-sample-analyzer structure, when adopting light extinction method to carry out ellipse drift angle ψ and Δ measurement, need to repeatedly regulate the position angle of the polarizer and analyzer, finally reach delustring.In this system, linear polarization light source 101 can not rotate, in measuring process, constantly conversion of position angle along with the line polarizer 102, θ can change, the luminous energy that has caused entering the subsequent probe system can not keep constant, and this delustring judgement to signal can cause certain difficulty, even causes and can't measure;
(b) in the ellipsometer of the polarizer-sample-analyzer structure rotation polarizer, when adopting polarizer spinning solution to measure ψ and Δ measurement.Linear polarization light source 101 can not rotate, and the line polarizer 102 continuous rotations whenever rotate to a position angle, the system acquisition data.In this process, also can run into as above identical problem, cause carrying out the measurement of high accuracy, so this type of ellipsometer is used few.
This shows, in linear polarization generation device 10, face to solve two large problems arranged: how (1) farthest utilizes the luminous energy of linear polarization light source 101; (2) along with azimuthal relatively rotating between linear polarizer 102 and the linear polarization light source 101, constant by the energy reserving of the light of linear polarizer 102 outgoing.The problems referred to above are for quantitative measurement system especially weak signal detection system, and are particularly important.
In order to address the above problem the raising capacity usage ratio, adopted at present following method: adopt half-wave plate, be placed between linear polarization light source 101 and the linear polarizer 102 angle of its fast axle bisector polarized light source 101 plane of polarizations and linear polarizer 102 light transmission shafts.If when system works, when linear polarizer rotated, this half-wave plate need to be installed on the hollow rotating device that becomes 1:2 angle ratio with linear polarization, thereby realized taking full advantage of of energy.Obviously, this structure has increased the structure of system and the complicacy of control, has also affected system reliability.
The utility model content
Problem for the prior art existence, the purpose of this utility model be to provide a kind of mechanism simple, be easy to realize, can bring up to linearly polarized light generation device near 100% high-energy utilization factor to the utilization ratio of optical energy of linear polarization light source, another purpose of the present utility model provides a kind of application of above-mentioned patent.
For achieving the above object, the linearly polarized light generation device of a kind of high-energy utilization factor of the utility model comprises:
A linear polarization light source (101) is for generation of the linear polarization light wave;
A linear polarizer (102) is used for any light wave is transformed into the linear polarization light wave;
Between the two, also comprise:
A quarter-wave plate (103) follows linear polarization light source (101) setting closely, and fixing with linear polarization light source (101) machinery, its position angle C
1Be set to the angle of the polarized light plane of polarization position angle L of linear polarization light source (101) outgoing:
A quarter-wave plate (104), between quarter-wave plate 103 and linear polarizer 102, and fixing with linear polarizer (102) machinery, the position angle of its fast axle is C
2Be set to the angle of the position angle P of linear polarizer (102):
In with following formula (1) and formula (2), k
1Value is any one integer in-1,0,1; k
2Value is any one integer in-2 ,-1,0,1.
Further, described linear polarizer (102) is installed in the hollow rotating platform (105), changes the position angle of described linear polarizer (102) by the rotation of hollow rotating platform (105).
Further, described quarter-wave plate (103) and quarter-wave plate (104) are that can to produce certain phasic differences in two mutually perpendicular directions be 90 ° ± 10 ° optical anisotropy device for mica waveplate, quartz wave-plate, liquid crystal wave plate, total-reflection type phase delayer or other.
Further, the major axis of the polarization light output of described linear polarization light source (101) and the ratio of minor axis are greater than 10, or its extinction ratio is greater than 100; Described linear polarization light source (101) is polarization laser or polarization laser diode, or the linear polarization light source that combines of common light source and linear polarization.
Further, described linear polarizer (102) is dichroism linear polarization, Glan-Taylor, Glan-Thompson linear polarization, and perhaps other can be transformed into any light wave the polarizer of linearly polarized light; Described hollow rotating platform (105) is electric rotary table, adopts rotary magnet, stepper motor, servomotor or direct current generator to drive.
A kind of PCSA ellipsometer that utilizes above-mentioned linearly polarized light generation device to make, comprise polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) comprises described linearly polarized light generation device and phase delay device (11).
Further, described polarized light detecting device (3) comprises linear polarizer (31) and photodetector (32), linear polarizer (31) and the coaxial installation of photodetector (32), the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
Further, described photodetector (32) is Si detector, PbS detector, charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
A kind of PSCA ellipsometer that utilizes above-mentioned linearly polarized light generation device to make, comprise polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) is made of described linearly polarized light generation device, polarized light detecting device (3) comprises the phase delay device (11) of successively coaxial installation, linear polarizer (31) and photodetector (32), the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
A kind of PSA ellipsometer that utilizes above-mentioned linearly polarized light generation device to make, comprise polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) is made of described linearly polarized light generation device, polarized light detecting device (3) comprises linear polarizer (31) and the photodetector (32) of successively coaxial installation, the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
The advantage of linear polarization generation device 10 of the present utility model is: the capacity usage ratio of linear polarization light source 101 is reached near 100%; When linear polarization 102 with the cut angle of azimuths of linear polarization light source 101 relative variation occured, the luminous energy of linear polarizer outgoing remained constant.In addition, this method structure very simple, be easy to realize.
Description of drawings
Fig. 1 is typical polarization optics system schematic;
Fig. 2 is typical polarized light generation device schematic diagram;
Fig. 3 is for adopting the structural representation of linearly polarized light generation device of the present utility model;
Fig. 4 is the PCSA(polarizer-compensator of adopting linearly polarized light generation device of the present utility model-sample-analyzer) ellipsometer;
Fig. 5 is the PSCA(polarizer-sample of adopting linearly polarized light generation device of the present utility model-compensator-analyzer) ellipsometer;
Fig. 6 is the PSA(polarizer-sample of adopting polarized light generation device of the present utility model-analyzer) ellipsometer of structure.
Wherein, 1 is that polarized light generation device, 2 is that sample, 3 is that polarized light detecting device, 31 is that phase delay device, 31 is that linear polarizer, 32 is that photodetector, 10 is that linearly polarized light generation device, 101 is that polarized light source, 102 is that linear polarizer, 103 is that quarter-wave plate, 104 is that quarter-wave plate, 105 is that hollow rotating platform, 11 is phase delay device.
Embodiment
Below, with reference to the accompanying drawings, the utility model is more fully illustrated, shown in the drawings of exemplary embodiment of the present utility model.Yet the utility model can be presented as multiple multi-form, and should not be construed as the exemplary embodiment that is confined to narrate here.But, these embodiment are provided, thereby make the utility model comprehensively with complete, and scope of the present utility model is fully conveyed to those of ordinary skill in the art.
In order to be easy to explanation, here can use such as " on ", the space relative terms such as D score " left side " " right side ", be used for element shown in the key diagram or feature with respect to the relation of another element or feature.It should be understood that except the orientation shown in the figure, spatial terminology is intended to comprise the different azimuth of device in using or operating.For example, if the device among the figure is squeezed, be stated as the element that is positioned at other elements or feature D score will be positioned at other elements or feature " on ".Therefore, the exemplary term D score can comprise upper and lower orientation both.Device can otherwise be located (90-degree rotation or be positioned at other orientation), and the relative explanation in used space here can correspondingly be explained.
The linearly polarized light generation device of a kind of high-energy utilization factor based on the linear polarization light source of the utility model, solved the capacity usage ratio problem of 10 pairs of linear polarization light sources 101 of linearly polarized light generation device in the polarization optics system, and solution remains the outgoing constant in energy in linear polarizer 102 rotary courses.Specifically, namely in linearly polarized light generation device 10, a linear polarization light source 101 and linear polarizer 102 have been comprised, owing to reasons such as construction weights, so that in system work process, the cut angle of azimuths of linear polarization light source 101 and linear polarizer 102 changes, in this case, still require the energy of the polarized light of linear polarizer 102 outgoing can be near the energy of linear polarization light source 101, and when the two angle changed, energy reserving be constant.
The method that the utility model adopts is: increase by two quarter- wave plates 103 and 104 between online polarized light source 101 and the linear polarizer 102, quarter-wave plate 103 follows linear polarization light source 101 closely, and keeps the two cut angle of azimuths to fix; Before quarter-wave plate 104 is positioned at linear polarization 102, and keep the two cut angle of azimuths to fix.Adopt certain setting, can bring up to the utilization ratio of optical energy of linear polarization light source near 100%.
Convenient for following narration, define:
● the position angle of quarter-wave plate 103 is designated as C
1
● the position angle of quarter-wave plate 103 is designated as C
2
The purpose of this utility model is achieved in that
Basic composition is of linearly polarized light generation device 10:
(1) one linear polarization light source 101 has linearly polarized photon output;
(2) the one line polarizers 102 are used for any light wave of incident is transformed to the linear polarization light wave, and linear polarizer 102 is installed on the hollow rotating platform 105, can change the position angle of linear polarizer 102 by hollow rotating platform 105;
(3) one four molecule one wave plates 103, immediately following linear polarization light source 11, and fixing with linear polarization light source 101 machineries, the two azimuthal angle is formula (1):
(4) one quarter-wave plates 104,103 and linear polarization 102 between, and fixing with linear polarizer 102 machinery, the two azimuthal angle is formula (2):
In with following formula (1) and formula (2), k
1Value is any one integer in-1,0,1; k
2Value is any one integer in-2 ,-1,0,1.
When investigation is rotated at linear polarizer 102, the situation of its emergent light energy.If the transmittance of quarter- wave plate 103 and 104 is respectively τ
103(τ
103≈ 1), τ
104(τ
104≈ 1), the linear polarization transmitance of the line polarizer 102 is τ
102(τ 1
02≈ 1).The theoretical analysis can get, and when the position angle of linear polarizer 102 P changes, is I=I through the light intensity of linear polarizer 102 outgoing
0τ
103τ
104τ
102≈ I
0That is, through after this system, the energy of linearly polarized light has obtained maximum utilization, and near 100%, other energy loss mainly is the scattering, reflection, absorption of device etc., but off-energy is very low.
Embodiment 1:
3 having provided the preferred embodiment that the utility model is made with reference to the accompanying drawings, is the linearly polarized light generation device of a high-energy utilization factor.
The basic device that comprises in the present embodiment device comprises: linear polarizer light source 101, quarter-wave plate 103, quarter-wave plate 104, and linear polarizer 102.
The used linear polarization light source 101 of the present embodiment is polarization lasers;
The used quarter-wave plate 103 of the present embodiment and 104 is mica quarter-wave plates, and namely under the wavelength of online polarized light source 101, the phase-delay difference that fast and slow axis produces is 90 °.
The used linear polarizer 102 of the present embodiment is dichroism linear polarizations, and linear polarizer 102 is installed in the hollow rotating platform 105, can or change its position angle by manual or electronic setting.
Linear polarization light source 101 and linear polarizer 102 coaxial installations.Quarter-wave plate 103 is fixing with linear polarization light source 101 machineries, and the cut angle of azimuths of the two is seen formula (1).
Quarter-wave plate 104 is fixing with linear polarizer 102 machineries, and 1/4ths and linear polarizer 102 between, the two cut angle of azimuths is seen formula (2).
Linear polarization light source 101 can also use: the polarization laser diode.
Linear polarization light source 101 can also use: by the nonlinear polarization light source (as, xenon lamp, light emitting diode etc.) and the compounded linear polarized light source with linear polarization output that combines of polarizer.
The described quarter-wave plate 103 of the present embodiment and 104 can also use liquid crystal bit phase delay sheet, for liquid crystal bit phase delay sheet, can be set to 90 ° to phasic difference by supporting driver.
Hollow rotating platform 105 is electric rotary table, can adopt rotary magnet, stepper motor, servomotor or direct current generator to drive.
The described linear polarization 102 of the present embodiment can also use the Glan-Thompson polarizing prism.
The described linear polarization 102 of the present embodiment can also use Glan-Taylor polarizing prism, Rochon linear polarization.
During linearly polarized light generation device 10 work, according to linearly polarized light is azimuthal requirement being set, change the position angle of linear polarizations 102 by hollow rotating platform 105.In this device, no matter which position linear polarization 102 position angles are arranged on, and the energy of output light remains constant to the capacity usage ratio of linear polarization light source 101 near 100%.
As seen, adopt structure of the present utility model, simple, be easy to realize.
Embodiment 2:
This embodiment is one of application of the utility model linearly polarized light generation device, 4 has provided a better ellipsometer embodiment who utilizes the utility model linearly polarized light generation device to make with reference to the accompanying drawings.The basic structure of this ellipsometer is PCSA, i.e. the polarizer-compensator-sample-analyzer, and employing light extinction method carries out ellipse drift angle ψ and Δ is measured.
Comprised polarized light generation device 1 in the present embodiment, sample 2, polarized light detecting device 3.Linearly polarized light generation device 10 and phase delay device 11 in polarized light generation device 1, have been comprised.Linear polarizer 31 and photodetector 32 have been comprised in the polarized light detecting device 3.System Working Principle is: polarized light generation device 1 produces the known elliptically polarized light of polarization state, and after sample 2 reflections, the polarization state of surveying light wave changes, and polarized light detecting device 3 detects the polarization state after reflecting.In order to obtain the parameter of sample, adopt light extinction method to measure, namely repeatedly regulate linear polarizer 102 and linear polarizer 31, final so that the luminous energy that obtains on the photodetector 32 reaches zero.
The used linear polarization light source 101 of the present embodiment is polarization laser He-Ne laser instruments;
The used quarter-wave plate 103 of the present embodiment and 104 is mica quarter-wave plates, and namely under the wavelength of online polarized light source 101, the phase-delay difference that fast and slow axis produces is 90 °;
The used linear polarizer 102 of the present embodiment is Glan-Tomphson polarizing prisms, and linear polarizer 102 is installed in the hollow rotating platform 105, can or change its position angle by manual or electronic setting;
Linear polarization light source 101 and linear polarizer 102 coaxial installations.Quarter-wave plate 103 is fixing with linear polarization light source 101 machineries, and keeps the two azimuthal angle for seeing formula (1).
Quarter-wave plate 104 is fixing with linear polarizer 102 machineries, and between quarter-wave plate 103 and linear polarizer 102, the two cut angle of azimuths is seen formula (2).
Linear polarization light source 11 can also use: the polarization laser diode.
The described quarter-wave plate 103 of the present embodiment and 104 can also use liquid crystal bit phase delay sheet, for liquid crystal bit phase delay sheet, can be set to 90 ° to phasic difference by supporting driver.
Hollow rotating platform 105 is electric rotary table, can adopt stepper motor or servomotor to drive.
The described linear polarizer 102 of the present embodiment can also use the dichroic polarizing sheet.
The described linear polarizer 102 of the present embodiment can also use the Glan-Taylor polarizing prism.
The described linear polarizer 102 of the present embodiment can also use Lip river breast polarizing prism.
For sample of quantitative measurment, be the film of the nanometer scale thickness for preparing on the solid substrate such as, sample, in order to obtain ellipse drift angle ψ and the Δ of above-mentioned sample, adopt following step: repeatedly regulate linear polarizer 102 and 31, until photodetector 32 reaches the delustring state.
When system works, change the position angle of linear polarizers 102 by hollow rotating platform 105, no matter which position linear polarizer 102 position angles are arranged on, the energy of output light remains constant, the capacity usage ratio of linear polarization light source 101 near 100%.Thus, can find out, the method can take full advantage of the light energy output of light source.
Embodiment 3:
This embodiment be the utility model linearly polarized light generation device application two, 5 provided a better ellipsometer embodiment who utilizes the utility model device to make with reference to the accompanying drawings.This system is based on the PSCA structure, i.e. the polarizer-sample-compensator-analyzer, and employing light extinction method carries out in the ellipsometer of ellipse drift angle ψ and Δ measurement.
Its device is basic identical with accompanying drawing 4, and difference only is that phase delay device 11 is arranged in polarized light detecting device 3.
Its principle of work is identical with embodiment 2.
Embodiment 4:
This embodiment be the utility model linearly polarized light generation device application three, 5 provided the embodiment that utilizes the better elliptical polarization measuring system that the utility model device makes with reference to the accompanying drawings.This system is based on the ellipsometer of PSCA structure (being the polarizer-sample-compensator-analyzer).
Identical with the basic structure of embodiment 4, but its control mode is different with metering system, and Main Differences is, adopts the whirl compensator method to carry out in the ellipsometer of ellipse drift angle ψ and Δ measurement.
When system was measured, at first linear polarizer 102 was arranged on 45 °, and phase delay device 11 rotates a circle, and gathered a secondary data at the sampled point of each appointment, then calculated ellipse drift angle ψ and the Δ value of one group of sample; Then linear polarizer 102 is arranged on-45 °, and phase delay device 11 rotates a circle, and gathers a secondary data at the sampled point of each appointment, calculates another group ψ and Δ; Twice measurement result averages.
Adopt linearly polarized light generation device 10 of the present utility model, can find out, be arranged at linear polarizer 102+when measuring under 45 ° and-45 ° of two angles, all can reach 100% to the capacity usage ratio of linear polarization light source 101.
Embodiment 5:
This embodiment be the utility model linearly polarized light generation device application four, 6 provided a better ellipsometer embodiment who utilizes the utility model device to make with reference to the accompanying drawings.This system is the polarizer-sample-analyzer based on PSA() structure.
In order to carry out quantitative measurment, adopt rotation polarizer method to carry out ellipse drift angle ψ and Δ measurement.When measuring, linear polarizer 102 continuous rotations under given position angle, carry out data acquisition.By analyzing as seen, when linear polarization 102 arranges at different position angles, all can obtain 100% capacity usage ratio.Guaranteed the measurement accuracy of this system.
Claims (10)
1. the linearly polarized light generation device of a high-energy utilization factor is characterized in that, this linearly polarized light generation device comprises:
A linear polarization light source (101) is for generation of the linear polarization light wave;
A linear polarizer (102) is used for any light wave is transformed into the linear polarization light wave;
Between the two, also comprise:
A quarter-wave plate (103) follows linear polarization light source (101) setting closely, and fixing with linear polarization light source (101) machinery, its position angle C
1Be set to the angle of the polarized light plane of polarization position angle L of linear polarization light source (101) outgoing:
A quarter-wave plate (104), between quarter-wave plate 103 and linear polarizer 102, and fixing with linear polarizer (102) machinery, the position angle of its fast axle is C
2Be set to the angle of the position angle P of linear polarizer (102):
In with following formula (1) and formula (2), k
1Value is any one integer in-1,0,1; k
2Value is any one integer in-2 ,-1,0,1.
2. linearly polarized light generation device as claimed in claim 1 is characterized in that, described linear polarizer (102) is installed in the hollow rotating platform (105), changes the position angle of described linear polarizer (102) by the rotation of hollow rotating platform (105).
3. linearly polarized light generation device as claimed in claim 1, it is characterized in that, described quarter-wave plate (103) and quarter-wave plate (104) are that can to produce certain phasic differences in two mutually perpendicular directions be 90 ° ± 10 ° optical anisotropy device for mica waveplate, quartz wave-plate, liquid crystal wave plate, total-reflection type phase delayer or other.
4. linearly polarized light generation device as claimed in claim 1 is characterized in that, the major axis of the polarization light output of described linear polarization light source (101) and the ratio of minor axis are greater than 10, or its extinction ratio is greater than 100; Described linear polarization light source (101) is polarization laser or polarization laser diode, or the linear polarization light source that combines of common light source and linear polarization.
5. linearly polarized light generation device as claimed in claim 1, it is characterized in that, described linear polarizer (102) is dichroism linear polarization, Glan-Taylor linear polarization, Glan-Thompson linear polarization, Rochon linear polarization, and perhaps other can be transformed into any light wave the polarizer of linearly polarized light; Described hollow rotating platform (105) is electric rotary table, adopts rotary magnet, stepper motor, servomotor or direct current generator to drive.
6. PCSA ellipsometer that utilizes linearly polarized light generation device as claimed in claim 1 to make, it is characterized in that, this PCSA ellipsometer comprises polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) comprises described linearly polarized light generation device and phase delay device (11).
7. PCSA ellipsometer as claimed in claim 6, it is characterized in that, described polarized light detecting device (3) comprises linear polarizer (31) and photodetector (32), linear polarizer (31) and the coaxial installation of photodetector (32), the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
8. PCSA ellipsometer as claimed in claim 7 is characterized in that, described photodetector (32) is Si detector, PbS detector, charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
9. PSCA ellipsometer that utilizes linearly polarized light generation device as claimed in claim 1 to make, it is characterized in that, this PSCA ellipsometer comprises polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) is made of described linearly polarized light generation device, polarized light detecting device (3) comprises the phase delay device (11) of successively coaxial installation, linear polarizer (31) and photodetector (32), the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
10. PSA ellipsometer that utilizes linearly polarized light generation device as claimed in claim 1 to make, it is characterized in that, this PSA ellipsometer comprises polarized light generation device (1) and polarized light detecting device (3), sample (2) setting is situated between, wherein, polarized light generation device (1) is made of described linearly polarized light generation device, polarized light detecting device (3) comprises linear polarizer (31) and the photodetector (32) of successively coaxial installation, the optical axis intersection of described polarized light generation device (1) and polarized light detecting device (3) is on the surface on the testing sample (2), and the surface normal of sample (2) is divided the angle of two optical axises equally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220417782 CN202710848U (en) | 2012-08-21 | 2012-08-21 | Linearly-polarized light generating device with high energy utilization rate and application thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798984A (en) * | 2012-08-21 | 2012-11-28 | 北京量拓科技有限公司 | Linearly-polarized light generating device with high energy utilization rate and application thereof |
| CN105865631A (en) * | 2015-02-05 | 2016-08-17 | 岩崎电气株式会社 | Light irradiation device |
| CN107689541A (en) * | 2017-10-25 | 2018-02-13 | 中国人民解放军国防科技大学 | Defocusing compensation type high-power narrow-linewidth linearly polarized optical fiber laser generation system |
| CN112596255A (en) * | 2020-12-31 | 2021-04-02 | 山东高等技术研究院 | Wave plate-based unidirectional transmission device for linear and circular polarized light, experimental device and use method |
-
2012
- 2012-08-21 CN CN 201220417782 patent/CN202710848U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798984A (en) * | 2012-08-21 | 2012-11-28 | 北京量拓科技有限公司 | Linearly-polarized light generating device with high energy utilization rate and application thereof |
| CN105865631A (en) * | 2015-02-05 | 2016-08-17 | 岩崎电气株式会社 | Light irradiation device |
| CN107689541A (en) * | 2017-10-25 | 2018-02-13 | 中国人民解放军国防科技大学 | Defocusing compensation type high-power narrow-linewidth linearly polarized optical fiber laser generation system |
| CN112596255A (en) * | 2020-12-31 | 2021-04-02 | 山东高等技术研究院 | Wave plate-based unidirectional transmission device for linear and circular polarized light, experimental device and use method |
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