CN103776537B - A kind of measurement mechanism of polarised light stokes parameter and optimization method thereof - Google Patents
A kind of measurement mechanism of polarised light stokes parameter and optimization method thereof Download PDFInfo
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Abstract
The invention discloses a kind of measurement mechanism and optimization method thereof of polarised light stokes parameter, wave plate, light-splitting device, two photodetectors that measurement mechanism comprises beam splitter and introduces separately respectively on two path-splittings of beam splitter. Incident polarized light, after beam splitter, produces the different polarised light of two bundle polarization states, and this two bundles polarised light impinges perpendicularly on respectively on two blocks of wave plates again, by the position phase modulating action of wave plate, produces two and restraints the light beam with new polarization state; This two bundles polarised light is become four bundle polarised lights by two other light-splitting device, and impinge perpendicularly on four photodetectors, produces corresponding current signal, regulates the azimuth of two blocks of wave plates to optimum azimuth, can make instrument matrix optimization. Solve after instrument matrix by calibration, will treat that the caused current signal of photometry calculates to solve, can realize the real-time measurement of incident light stokes parameter. Structure of the present invention and optimization method are simple, are easy to realize, and certainty of measurement is high, and adaptability is stronger.
Description
Technical field
The invention belongs to optical measurement and field of measuring techniques, particularly a kind of measurement of polarised light stokes parameterDevice and optimization method thereof.
Background technology
The accurate Quick Measurement of Stokes (stokes) parameter of light polarization is in industry, military affairs and scientific research etc.The aspect meaning that is widely used. Polarised light Stokes' parameter ellipsometer is exactly typical application, and it has, and measuring speed is fast, surveyAccuracy of measurement high, has important application in many fields such as optical measurement, film and material character research and optical patternings. SurveyThe device of amount polarization state Stokes parameter mainly contains: the photometric measurement device of spinner member and point amplitude light polarization are measured dressPut (DOAP). At present, develop point amplitude light polarization measurement mechanism of more than ten kind of different structure both at home and abroad, mainly contained plated filmLight splitting type, four probe type, metal grating type, liquid crystal type and optical-fiber type etc. Nineteen eighty-two American scholar R.M.A.Azzam designFirst utilize amplitude-divided method to measure the device (DOAP) of light polarization, without any rotatable parts or modulator, structure letterSingle. But its structure is not optimized to design. Practical study shows: be to have to the spectroscopical design parameter of the plated film in DOAPNecessarily required, like this, system just arrives optimization, and measuring accuracy is just the highest, and stability is best, and sample adaptability is the strongest.But obtain satisfactory plated film optical splitter, not a duck soup, accurately design and control coating process and parameter. PinThe problem of amplitude-divided method being measured to the device existence of light polarization, on the basis of this structure, the present invention introduces two a phaseThe wave plate of modulating action, has built point amplitude light polarization measurement mechanism of modulating mutually based on position, and has proposed system instrument matrixOptimization method.
Summary of the invention
The problem existing for solving prior art, the object of the present invention is to provide a kind of point of amplitude polarised light StokesThe measurement mechanism of parameter and optimization method thereof, not only avoid special and complicated plated film or etching technics, and can improve partiallyReliability, certainty of measurement and the adaptability of the optical parameter of shaking, concrete technical scheme is as follows.
A measurement mechanism for polarised light stokes parameter, it comprises incident light is divided into transmitted light and catoptrical pointBundle device, transmitted light path also comprise successively the first wave plate of modulating mutually for position, the first light-splitting device of realizing polarization spectro andReceive respectively the first photodetector and second photodetector of the two-beam after the first light-splitting device light splitting; At reverberationOn road, also comprise successively the second wave plate of modulating mutually for position, realize the second light-splitting device of polarization spectro and receive respectively throughThe 3rd photodetector of the two-beam after two light-splitting device light splitting and the 4th photodetector; The light intensity of four described detectorsSignal output part by data collecting card be connected for the electronic computer that data are processed.
In the measurement mechanism of above-mentioned polarised light stokes parameter, described transmitted light and reverberation be two bundle polarization states notSame polarised light, transmitted light impinges perpendicularly on the first wave plate, and reverberation impinges perpendicularly on the second wave plate, the first optical splitterPart, the second light-splitting device further become the different polarised light of described two bundle polarization state into four bundle polarised lights, four bundle polarised light warpsAfter four described detectors, produce corresponding current signal; The azimuth of described the first wave plate, the second wave plate is adjustable, regulates twoThe azimuth of wave plate, to optimum azimuth, can make instrument matrix optimization, solves after instrument matrix by calibration, will treat photometryCaused current signal calculates and solves, and realizes the real-time measurement of incident light stokes parameter.
In theory, the bit phase delay amount of the first wave plate, the second wave plate has multiple combination, typically has: the first wave plate,The combination of two wave plates adopt 1/2nd wave plates and quarter-wave plate mutually combine or adopt 1/2nd wave plates and four/One wave plate combined, 1/2nd wave plates and 1/2nd wave plate combined, quarter-wave plate and quarter-wave plate combination orThe wave plate combined of quarter-wave plate bit phase delay amounts different from it, the wave plate of 1/2nd wave plates bit phase delay amounts different from itCombination etc.
The optimization method of the measurement mechanism of above-mentioned polarised light stokes parameter, can adopt measurement method, and detailed process is:Under the condition that the light channel structure of measurement mechanism is determined and each optical element is selected, by regulating the first wave plate, the second wave plateAzimuth is realized and being optimized, and by the instrument determinant of a matrix size of measurement mechanism under actual measurement different orientations, obtainsThe azimuthal relation curve of the size of matrix determinant and wave plate so determine when instrument matrix corresponding wave plate of when maximumGood azimuth, realizes the instrument matrix optimization of measurement mechanism.
The optimization method of the measurement mechanism of above-mentioned polarised light stokes parameter, can adopt simulation, and detailed process is: profitWith optical gauge or equipment, the ellipsometric parameter of all beam splitters in the light path of measurement mechanism, obtains described in actual measurementThe matrix expression of single beam splitter, and the instrument matrix of computation and measurement device, to instrument matrix and the row thereof of measurement mechanismRow formula is carried out numerical simulation and analysis, and corresponding wave plate optimum azimuth while obtaining instrument matrix maximum, realizes measurement mechanismThe optimization of instrument matrix. In the method, by fixing in two blocks of wave plates the azimuth of, adopt method for numerical simulation, meterCalculate instrument matrix determinant with the azimuthal change curve of another piece wave plate, on curve, the corresponding abscissa of maximum is anotherThe optimum azimuth of piece wave plate.
In above-mentioned optimization method, the stokes parameter of establishing incident light is, make T, R respectivelyRepresent transmission matrix and the reflection matrix of beam splitter (1),、Be transmission matrix and the reflection square of the first light-splitting device (4)Battle array,、Be transmission matrix and the reflection matrix of the second light-splitting device (5),For the opto-electronic conversion system of photodetectorNumber,、Be respectively the transmission matrix of the first wave plate and the second wave plate in transmitted light path and reflected light path, four photoelectricityThe current signal that detector produces is expressed as:
The first detector:
The second detector:
The 3rd detector:
The 4th detector:，
Make D represent the instrument matrix of whole measurement mechanism, I represents the current moment that each photodetector currents signal formsBattle array,
（1），
Instrument matrix D is obtained by calibrating method, if instrument matrix D exists invertible matrix, this of light so to be measuredLentor vector is
（2），
The instrument matrix of known measurement mechanism, determines that by the signal of telecommunication vector of surveying the Stokes of any light is vowedAmount;
Make ABS=
ABS=（3）。
Wherein, det represents Matrix Calculating determinant, by adjust to make determinant absolute value ABS to wave plate azimuthLargeization, realizes the optimization of instrument matrix.
When each line linearity independence of instrument matrix D is larger, instrument matrix will more be optimized, now the measurement of polarization statePrecision will improve greatly, on this situation mathematics, corresponding to the ABS maximum of determinant, therefore selects suitable optical element,Carry out suitable azimuth adjustment determinant absolute value ABS is maximized, can realize the optimization of instrument matrix.
The present invention has the following advantages with respect to prior art:
(1) optimization that the inventive method can implement device instrument matrix. Optimization method and process are simple, reliable and easyIn realization.
(2) apparatus of the present invention are simple in structure, do not need any special processing and film plating technique, and required element easily obtains, light pathEasy to adjust, can change parameter setting according to all kinds of light-splitting devices of selecting at any time.
(3) apparatus of the present invention measurement polarised light stokes parameter precision is high, and result is more stablized credible, and adaptability is stronger;Not only cost cheapness, and can miniaturization, be applicable to various actual measuring systems, as ellipsometer etc.
Brief description of the drawings
Fig. 1 is measurement mechanism light channel structure of the present invention and schematic diagram;
Fig. 2 is the light channel structure schematic diagram of a kind of specific embodiments of measurement mechanism of the present invention;
Fig. 3 is Stokes ellipsometer structure and light path schematic diagram.
Detailed description of the invention
In order to understand better the present invention, below in conjunction with drawings and Examples--this device is at Stokes ellipsometerIn application, further illustrate optimization method and the process of apparatus of the present invention structure and instrument matrix thereof, but enforcement of the present inventionBe not limited to this with protection.
As shown in Figure 1, for a kind of light channel structure and schematic diagram of measurement mechanism of polarised light stokes parameter, enterPenetrate light and after beam splitter 1, be conventionally divided into two-beam, i.e. transmitted light and reverberation; On transmitted light path and reflected light path, respectively introduceA wave plate of modulating mutually for position (the first wave plate 2 and the second wave plate 3); Transmitted light path place successively modulate mutually for positionOne wave plate 2, the first light-splitting device 4, the first photodetector 6, the second photodetector 7; Reflected light path and transmitted light path are similar,Place successively for position the second wave plate 3, the second light-splitting device 5, the 3rd photodetector 8, the 4th photodetector of modulation mutually9. Wherein the azimuth of wave plate and the ellipsometric parameter of light-splitting device used are closely related. Incident light, through beam splitter, wave plate, divides againAfter light, incide on four detectors, the light intensity signal of detector output reaches electronic computer through data collecting card and carries out dataProcess. The instrument matrix of this measurement mechanism can be optimized by regulating wave plate azimuth to realize. Utilize multiple (four or four withOn) the known light beam of Stokes parameter incides in measurement mechanism successively, can realize measurement or the calibration of instrument matrix.
The alternative of the light-splitting device (1,4,5) that the present invention uses is more, as common plated film light splitting level crossing, and polarization platingFilm Amici prism, Wollaston prism, prism and wedge prism etc. Wave plate can be selected the materials such as mica, quartz lamp or liquid crystalThe device that material is made. The bit phase delay amount of the first wave plate 2 and the second wave plate 3 can be selected difference, has multiple possible combination. ChoosingMutually combine with common 1/2nd wave plates and quarter-wave plate, also can realize the optimization of instrument matrix. Can also adoptWith 1/2nd wave plates (the first wave plate 2) and quarter-wave plate (the second wave plate 3) combination, 1/2nd wave plates and 1/2ndWave plate combined, quarter-wave plate and quarter-wave plate combination or quarter-wave plate different bit phase delay amounts with itWave plate combined, the wave plate combined of 1/2nd wave plates bit phase delay amounts different from it etc.
From aforementioned optimization method, after selected light-splitting device and detector,For certain is certainValue, the major parameter that affects ABS only has、, after retardation of wave plate is determined,、Parameter now mainly byThe azimuth of two blocks of wave plates determines, therefore the degree of optimization of instrument matrix depends on the azimuthal value of wave plate.
By above analysis, measurement mechanism of the present invention can adopt following two kinds of optimization methods.
Optimization method 1:
Measurement method is determined wave plate optimum azimuth: after selected light-splitting device and wave plate, by rotating wave plate, change its orientationAngle, and surveying record is under different orientations, surveys the size of the ABS of instrument matrix. ABS can adopt E-P method, in place fixed at 4Acquisition is surveyed and calculated to mark method or multiple spot scaling method. The best side that when ABS obtains maximum, corresponding azimuth is wave plateParallactic angle.
Optimization method 2:
Simulation is determined wave plate optimum azimuth: after the kind of selected light-splitting device and wave plate, adopt extinction type ellipsometerMeasure the ellipsometric parameter of light-splitting device (1,4,5), the expression of bringing the retardation parameter of itself and wave plate into formula (3) derivation ABSFormula. The fixing wherein azimuth of wave plate of, adopts method for numerical simulation, calculates ABS with the azimuthal change of another piece wave plateChange curve, the optimum azimuth that on curve, the corresponding abscissa of maximum is wave plate.
In accompanying drawing 2, beam splitter 1 adopts common plated film Amici prism, and the first wave plate 2 is got approximate 1/2nd wave plates, theTwo wave plates 3 are got approximate quarter-wave plate, and the first light-splitting device 4 adopts Wollaston prism, and the second light-splitting device 5 also adopts fertileThe Lars prism that pauses, 6,7,8,9 is photodetector, also comprises the first wave plate circulator 10, the second wave plate circulator 11, rib in figureMirror fixed mount (12,13,14), 15 is entrance pupil, 16 is datum hole. What wherein common plated film Amici prism adopted is Daheng's lightThe GCC-401021 model that electricity company produces. What Wollaston prism adopted is the GCC-402032 type that photoelectricity company of Daheng producesNumber. Photodetector (6,7,8,9) is photovoltaic detector, the PIN-that selects U.S. AnOSISystemsCompany to produce13DP photodiode. The first wave plate 2 and the second wave plate 3 can select respectively mica or quartz etc. material 1/2nd wave plates andQuarter-wave plate. The precision of the first wave plate circulator 10 and the second wave plate circulator 11 is 2 °. Entrance pupil 15 and datum hole16 diameter is about 2-3mm. In accompanying drawing 2, all devices are all positioned in a little black box 17, and described casing is closePrinting opacity, interior is black, black box size is about 15*7*13(cm), there is opening casing front and rear part.
Fig. 3 is the installation drawing of the measurement of Stokes ellipsometer instrument matrix and sample in measurement, and figure comprises: He-Ne laser18 are, polarizer 19, sample stage 20, Standard Thin diaphragm or sample thin film sheet 21. Wherein the wavelength of laser instrument is 632.8nm, partiallyThe sheet polarizing angle that shakes is adjustable, and running accuracy is 0.5 °. Sample stage is controllable lift table top, and its height and horizontal tilt angle are all adjustable.
The device that the present embodiment provides can be used for the refractive index of Stokes' parameter and the film sample of measuring polarised lightAnd thickness, wherein the assembling of measurement mechanism and measuring process realize by following steps:
(1) beam splitter 1 is the installation of Amici prism: laser impinges perpendicularly in case from entrance pupil 15, from datum hole 16Penetrate, put into Amici prism 1, now the position of Amici prism should be able to ensure that the emergent light of transmitted light path also penetrates from datum hole,Be fixed with prism fixed mount 12, and mark S the position on chest by the outgoing luminous point of reflected light path.
(2) installation of Wollaston prism (the first light-splitting device 4, the second light-splitting device 5): with the installation class of Amici prismSeemingly, put into after the first Wollaston prism, regulate its position, make the outgoing luminous energy of transmitted light path pass through smoothly datum hole. Equally,Put into after the second Wollaston prism, reflected light path outgoing luminous point is still positioned at S place. Determine after prism location, adopt fixed mount(13,14) are fixed two prisms respectively.
(3) adopt simulation to find wave plate optimum azimuth. Wave plate optimum azimuth determine and install concrete steps asUnder:
The first step: adopt the transmission ellipsometric parameter of HST type extinction type ellipsometer measurement plated film Amici prism and reflect ellipseParameter partially, the first Wollaston prism and the second Wollaston prism transmission matrix are known.
Second step: wave plate selected. The phase-delay quantity that measures the first wave plate 2 and the second wave plate 3 is respectively 84.7 °With 162.2 °.
The 3rd step: bring the phase-delay quantity of each prism ellipsometric parameter and wave plate into formula (3) and carry out sunykatuib analysis, askSolution obtains many group optimum azimuths, chooses wherein one group, and the optimum azimuth of the first wave plate 2 and the second wave plate 3 is respectively（180°，225°）。
The 4th step: the first wave plate 2 and the second wave plate 3 are respectively charged into wave plate swivel mount (10,11), and rotation is to the best sideFixing behind parallactic angle position.
The 5th step: the installation of detector. Regulate respectively the position of four photodetectors, make four incident luminous points position respectivelyIn the middle position of four detectors, and Detector and data acquisition is linked and connect.
(4) measurement of instrument matrix and demarcation. Adopt the instrument matrix of 4 scaling method measuring system optimal states largeLittle. It is 1.46 Si substrate Si O that used thickness is respectively 57.3nm., 199.3nm, 86.0nm, 9.5nm and refractive index2MarkAccurate diaphragm is calibrated, and after laser instrument preheating half an hour, four Standard Thin diaphragms is placed on to sample stage 20 successively in orderUpper, after He-Ne laser sends laser and is 19-polarizer (being positioned at 45 ° of azimuths) by the polarizer, inclined to one side with the line of 70 ° of incidence anglesThe light that shakes incides on sample, four bundle light after sample reflection measured, and corresponding with the automatic capture program of labviewRecord collected Si road current signal. Block entrance pupil 15, obtain one group of detector dark current signal,, solve instrument matrix D according to formula (1), and preserve.
So far, the optimization of Stokes ellipsometry instrument system the mark of implement device instrument matrix have been completedFixed. As the film sample of a unknown parameter is placed on sample stage, in the current signal generation collecting, is returned formula (3), calculatesArrive the Stokes parameter S of the polarised light after sample reflection, and then obtain refractive index and the thickness etc. of film according to ellipse folk prescription journeyParameter.
The survey of table 1 for utilizing the Stokes ellipsometry instrument of apparatus of the present invention and the development of instrument matrix optimizing method to obtainAmount result. Experiment shows: system experimentation good stability, certainty of measurement is high, sample strong adaptability.
The experimental measurements of table 1 Peking University Standard Thin diaphragm
| Standard sample | n | d（nm） | ||
| 1Film (n=1.46, d=100nm) | 79.01° | 41.42° | 1.463±0.003 | 100.1±0.2 |
Patent of the present invention has multiple specific embodiment. Therefore, as long as at point amplitude polarised light Stokes' parameterIn measurement mechanism, in two-beam road, introduce respectively two blocks of wave plates, realize system instrument matrix by the azimuth of rotating wave plateOptimized technical scheme and measurement mechanism, all belong to the protection domain of this patent.
Claims (4)
1. a measurement mechanism for polarised light stokes parameter, is characterized in that comprising incident light is divided into transmitted light and reflectionThe beam splitter of light, also comprises the first wave plate of modulating mutually for position, the first light splitting that realizes polarization spectro successively at transmitted light pathDevice and receive respectively the first photodetector and second photodetector of the two-beam after the first light-splitting device light splitting; ?On reflected light path, also comprise successively the second wave plate of modulating mutually for position, realize the second light-splitting device of polarization spectro and connect respectivelyReceive the 3rd photodetector and the 4th photodetector of the two-beam after the second light-splitting device light splitting; Four photodetectorsLight intensity signal output by data collecting card be connected for the electronic computer that data are processed; The first wave plate positionThe combination of the bit phase delay amount of phase retardation amount and the second wave plate comprises: 1/2nd wave plates and quarter-wave plate combination, four pointsOne of wave plate and 1/2nd wave plate combined, 1/2nd wave plates and 1/2nd wave plate combined, quarter-wave plate and four pointsOne of not coordination of the wave plate combined of wave plate combined, quarter-wave plate bit phase delay amounts different from it or 1/2nd wave plates and itsThe wave plate combined of phase retardation amount; Described transmitted light is the different polarised light of two bundle polarization states with reverberation, transmitted light vertical incidenceTo the first wave plate, reverberation impinges perpendicularly on the second wave plate, described in the first light-splitting device, the second light-splitting device are further incited somebody to actionThe different polarised light of two bundle polarization states becomes four bundle polarised lights, and four bundle polarised lights produce corresponding electricity after four photodetectorsStream signal; The azimuth of described the first wave plate, the second wave plate is adjustable, regulates the azimuth of two blocks of wave plates to optimum azimuth, energyMake instrument matrix optimization, solve after instrument matrix by calibration, will treat that the caused current signal of photometry calculates to askSeparate, realize the real-time measurement of incident light stokes parameter.
2. for optimizing the method for a kind of measurement mechanism of polarised light stokes parameter described in claim 1, it is characterized in thatAdopt measurement method, detailed process is: under the condition that light channel structure is determined and each optical element is selected of measurement mechanism, by adjustingSave the azimuth of the first wave plate, the second wave plate and realize optimization, by the instrument of measurement mechanism under actual measurement different orientationsDeterminant of a matrix size, the size of acquisition matrix determinant and the azimuthal relation curve of wave plate and then definite when instrument matrixCorresponding wave plate optimum azimuth when maximum, realizes the instrument matrix optimization of measurement mechanism; Wherein fix in two blocks of wave platesThe azimuth of one, adopts method for numerical simulation, and computing equipment matrix determinant is with the azimuthal change curve of another piece wave plate,On curve, the corresponding abscissa of maximum is the optimum azimuth of another piece wave plate.
3. for optimizing the method for a kind of measurement mechanism of polarised light stokes parameter described in claim 1, it is characterized in thatAdopt simulation, detailed process is: utilize optical gauge or equipment, and all in the light path of measurement mechanism described in actual measurementThe ellipsometric parameter of beam splitter, obtains the matrix expression of single beam splitter, and the instrument matrix of computation and measurement device, to surveyingInstrument matrix and the determinant thereof of amount device carry out numerical simulation and analysis, and corresponding wave plate is when the most maximum to obtain instrument matrixGood azimuth, realizes the optimization of measurement mechanism instrument matrix.
4. according to method described in claim 2 or 3, it is characterized in that:
If the stokes parameter of incident light is S (S0，S1，S2，S3), make T, R represent respectively transmission matrix and the reflection of beam splitterMatrix, T1、R1Be transmission matrix and the reflection matrix of the first light-splitting device, T2、R2Be that the transmission matrix of the second light-splitting device is with anti-Penetrate matrix, d1For the photoelectric conversion factors of photodetector, Mt、MrBe respectively the first wave plate in transmitted light path and reflected light pathWith the transmission matrix of the second wave plate, the current signal that four photodetectors produce is expressed as:
The first photodetector: I0＝d1T1MtTS
The second photodetector: I1＝d1R1MtTS
The 3rd photodetector: I2＝d1R2MrRS
The 4th photodetector: I3＝d1T2MrRS，
Make D represent the instrument matrix of whole measurement mechanism, I represents the current matrix that each photodetector currents signal forms,?
I＝D·S(1)，
Instrument matrix D is obtained by calibrating method, if instrument matrix D exists invertible matrix D-1, the stoke of light so to be measuredThis vector is
S＝D-1·I(2)，
The instrument matrix of known measurement mechanism, determines the Stokes vector of any light by the signal of telecommunication vector of surveying;
Make ABS=|det (D) |
ABS＝f(T，R，T1，R1，T2，R2，d1，Mr，Mt)(3)，
Wherein, det represents Matrix Calculating determinant, by adjust to make determinant absolute value ABS to maximize to wave plate azimuth,Realize the optimization of instrument matrix.
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| CN102288294A (en) * | 2011-05-09 | 2011-12-21 | 浙江大学 | Amplitude division measuring instrument and measuring method for polarization Stokes parameters |
| CN102243104A (en) * | 2011-06-17 | 2011-11-16 | 中国科学院上海技术物理研究所 | Device for measuring properties of polarized light in real time |
| CN202648799U (en) * | 2012-05-28 | 2013-01-02 | 中国科学院上海光学精密机械研究所 | Light beam Stokes parameter measuring device |
| CN103017908A (en) * | 2012-11-30 | 2013-04-03 | 中国科学院上海技术物理研究所 | Polarized light characteristic real-time measuring device and method based on four-way light splitting module |
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