CN105345829B - A kind of wafer transport paw device - Google Patents
A kind of wafer transport paw device Download PDFInfo
- Publication number
- CN105345829B CN105345829B CN201510872638.9A CN201510872638A CN105345829B CN 105345829 B CN105345829 B CN 105345829B CN 201510872638 A CN201510872638 A CN 201510872638A CN 105345829 B CN105345829 B CN 105345829B
- Authority
- CN
- China
- Prior art keywords
- swing arm
- flange plate
- disc
- fixedly connected
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000011888 foil Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 5
- 230000003139 buffering effect Effects 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of wafer transport paw devices, comprising: sucker, ring flange, swing arm lower wall, disk, swing arm in swing arm；Wherein, a newel is provided on the ring flange；The swing arm lower wall is fixedly connected on the first face of the swing arm, and disk is fixedly connected on the second face of the swing arm in the swing arm；Newel disk and swing arm in the swing arm lower wall, the swing arm；Wherein, the first face of the swing arm and the second face of the swing arm are two faces opposite in the swing arm；The sucker is fixedly connected with the ring flange, and the newel is connect with the first face of the ring flange, and the sucker is connect with the second face of the ring flange；Wherein, the first face of the ring flange and the second face of the ring flange are two faces opposite on the ring flange.The present invention solves the technical issues of traditional thin slice grabbing device reliability is low, structure is complicated.
Description
Technical Field
The invention relates to a conveying device, in particular to a thin sheet conveying paw device.
Background
In the manufacturing process of special semiconductor equipment, the realization of automatic taking, placing and automatic transmission of ultrathin silicon wafers is a key technology. In modern production facilities, a common wafer gripper has: clamping, electromagnetic adsorption, vacuum chuck adsorption, and the like. The wafer is easily damaged by the clamping type wafer grabbing device, the electromagnetic adsorption type wafer grabbing device and the vacuum chuck adsorption type wafer grabbing device are complex in structure, the difficulty in part processing is high, and the problem that the wafer grabbing device is difficult to control exists.
Disclosure of Invention
The invention provides a sheet transportation hand-grasping device, and aims to solve the technical problems of low reliability and complex structure of the traditional sheet hand-grasping device.
In order to achieve the above object, an embodiment of the present invention provides a sheet transport gripper device including: the device comprises a sucker, a flange plate, a lower swing arm plate, an upper swing arm plate and a swing arm; wherein,
a central column is arranged on the flange plate;
the swing arm lower disc is fixedly connected to a first surface of the swing arm, and the swing arm upper disc is fixedly connected to a second surface of the swing arm; the central column penetrates through the lower swing arm disc, the upper swing arm disc and the swing arm; wherein,
the first surface of the swing arm and the second surface of the swing arm are two opposite surfaces on the swing arm;
the sucking disc is fixedly connected with the flange plate, the central column is connected with a first surface of the flange plate, and the sucking disc is connected with a second surface of the flange plate; wherein,
the first face of the flange and the second face of the flange are opposing faces of the flange.
In the sheet transport paw device, a micropore ceramic is arranged on the sucker.
In the sheet transport gripper device, a vacuum channel is arranged in the radial direction of the flange plate.
In the sheet transport gripper device, one end of the vacuum channel, which is close to the center of the flange plate, is in conductive connection with the microporous ceramic.
In the sheet transport gripper device, the suction disc is fixedly connected with the second surface of the flange plate through screws.
In the above-mentioned gripper device for transporting sheets, the lower swing arm plate and the upper swing arm plate are respectively fixedly connected to the swing arms through screws.
In the sheet transport gripper device, the inner wall of a central hole of the swing arm is connected with a linear ball guide sleeve.
In the above-mentioned sheet transport gripper apparatus, the swing arm lower disc, the swing arm upper disc and the swing arm are fitted over the center post through the linear ball guide sleeve, and are locked by a nut.
The sheet transportation paw device further comprises a spring, and the spring is sleeved on the central column.
In the sheet transport gripper device, the spring is connected to the flange and the linear ball guide sleeve.
The scheme of the invention has the following beneficial effects:
the thin sheet conveying paw device provided by the embodiment of the invention is simple and practical, is convenient to operate, and has the advantages of reliable structure and stable operation. Due to the adoption of the dual-structure design of the spring and the linear ball guide sleeve, the device has a compact integral structure, can play a role in buffering, and prevents fragments.
Drawings
FIG. 1 is a cross-sectional view of a sheet transport hand grip of an embodiment of the invention;
FIG. 2 is a physical diagram of a sheet transport gripper according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a flange according to an embodiment of the invention;
fig. 4 is a physical diagram of a flange according to an embodiment of the invention.
Description of reference numerals:
1. a suction cup;
2. a flange plate;
3. a swing arm lower disc;
4. a spring;
5. a swing arm upper disc;
6. a linear ball guide sleeve;
7. a nut;
8. swinging arms;
9. a central column.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, 2, 3 and 4, embodiments of the present invention provide a sheet transport gripper apparatus comprising: the device comprises a sucker 1, a flange 2, a lower swing arm disc 3, an upper swing arm disc 5 and a swing arm 8. Wherein, a central column 9 is arranged on the flange 2. The lower swing arm disc 3 is fixedly connected to a first surface of the swing arm 8, and the upper swing arm disc 5 is fixedly connected to a second surface of the swing arm 8; the central column 9 passes through the lower swing arm disc 3, the upper swing arm disc 5 and the swing arm 8; wherein, the first surface of the swing arm 8 and the second surface of the swing arm 8 are two opposite surfaces on the swing arm 8; the sucking disc 1 is fixedly connected with the flange plate 2, the central column 9 is connected with a first surface of the flange plate 2, and the sucking disc 1 is connected with a second surface of the flange plate 2; wherein, the first surface of the flange plate 2 and the second surface of the flange plate 2 are two opposite surfaces on the flange plate 2. This embodiment allows for lateral and longitudinal movement of the absorbent sheet.
Furthermore, in the sheet transport gripper device, the suction cup 1 is provided with a microporous ceramic. The flange 2 is provided with a vacuum channel in the radial direction. One end of the vacuum channel close to the center of the flange plate 2 is connected with the microporous ceramic in a conduction way. One end of the vacuum channel, which is positioned at the edge of the flange plate 2, is connected with a vacuum pump, and the sheet is adsorbed by the microporous ceramic on the sucking disc 1 under the action of the vacuum pump.
Further, in the above-described sheet transport gripper apparatus, the second surfaces of the suction cup 1 and the flange 2 are fixedly connected by a screw. The swing arm lower plate 3 and the swing arm upper plate 5 are also fixedly connected with the swing arm 8 through screws respectively. Fastening by screws increases the strength of the connection of the parts.
Further, in the above-mentioned sheet transport gripper apparatus, it is characterized in that a linear ball guide 6 is connected to an inner wall of a center hole of the swing arm 8. The swing arm lower disc 3, the swing arm upper disc 5 and the swing arm 8 are sleeved on a central column 9 of the flange disc through linear ball guide sleeves 6 and are locked through nuts 7. The upper swing arm disc 5 and the lower swing arm disc 3 have the function of positioning the linear ball guide sleeve 6, so that the swing arm 8 and the linear ball guide sleeve 6 are connected stably. The nut 7 plays a limiting role, and the swing arm 8 is prevented from falling off along the longitudinal movement of the linear ball guide sleeve 6.
Furthermore, the sheet transportation paw device further comprises a spring 4, and the spring 4 is sleeved on the central column 9. The spring 4 is also connected to the flange 2 and the linear ball guide 6. When the spring 4 is compressed, the sucker 1 slides upwards along with the linear ball guide sleeve 6, and plays a certain buffering role in sheet adsorption to prevent fragments.
The thin sheet conveying paw device provided by the embodiment of the invention is simple and practical, is convenient to operate, and has the advantages of reliable structure and stable operation. Due to the adoption of the dual-structure design of the spring and the linear ball guide sleeve, the device has a compact integral structure, can play a role in buffering, and prevents fragments.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (2)
1. A sheet transport gripper apparatus, comprising: the device comprises a sucker (1), a flange plate (2), a swing arm lower plate (3), a swing arm upper plate (5) and a swing arm (8); wherein,
a central column (9) is arranged on the flange plate (2);
the swing arm lower disc (3) is fixedly connected to a first surface of the swing arm (8), and the swing arm upper disc (5) is fixedly connected to a second surface of the swing arm (8); the central column (9) penetrates through the swing arm lower disc (3), the swing arm upper disc (5) and the swing arm (8); the swing arm lower disc (3) and the swing arm upper disc (5) are respectively fixedly connected with the swing arm (8) through screws;
the inner wall of the central hole of the swing arm (8) is connected with a linear ball guide sleeve (6); the swing arm lower disc (3), the swing arm upper disc (5) and the swing arm (8) are sleeved on the central column (9) through the linear ball guide sleeve (6) and locked through a nut (7), and the nut (7) is positioned on the swing arm upper disc (5);
the sheet conveying paw device further comprises a spring (4), and the spring (4) is sleeved on the central column (9); the spring (4) is connected with the flange plate (2) and the linear ball guide sleeve (6);
wherein the first face of the swing arm (8) and the second face of the swing arm (8) are two opposite faces on the swing arm (8);
the sucker (1) is fixedly connected with the flange plate (2), the central column (9) is connected with a first surface of the flange plate (2), and the sucker (1) is connected with a second surface of the flange plate (2); wherein,
the first surface of the flange plate (2) and the second surface of the flange plate (2) are two opposite surfaces on the flange plate (2);
wherein, the sucking disc (1) is provided with a microporous ceramic; a vacuum channel is arranged in the radial direction of the flange plate (2); one end of the vacuum channel, which is close to the center of the flange plate (2), is in conduction connection with the microporous ceramic, and one end of the vacuum channel, which is positioned at the edge of the flange plate (2), is connected with a vacuum pump.
2. Foil transport gripper unit according to claim 1, characterised in that the suction plate (1) and the second side of the flange (2) are fixedly connected by means of screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510872638.9A CN105345829B (en) | 2015-12-02 | 2015-12-02 | A kind of wafer transport paw device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510872638.9A CN105345829B (en) | 2015-12-02 | 2015-12-02 | A kind of wafer transport paw device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105345829A CN105345829A (en) | 2016-02-24 |
| CN105345829B true CN105345829B (en) | 2019-09-17 |
Family
ID=55321963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510872638.9A Active CN105345829B (en) | 2015-12-02 | 2015-12-02 | A kind of wafer transport paw device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105345829B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107283396B (en) * | 2016-04-05 | 2020-06-02 | 佛山市禾才科技服务有限公司 | Force application adjustable manipulator and use its robot |
| CN106426289B (en) * | 2016-11-11 | 2019-01-01 | 北京中电科电子装备有限公司 | A kind of end face spinning cleaning machinery hand system |
| CN108161965A (en) * | 2017-12-25 | 2018-06-15 | 苏州塔比诺机电有限公司 | A kind of suction means |
| CN111874623B (en) * | 2020-07-17 | 2022-08-26 | 苏州精濑光电有限公司 | Adsorption device and carrying device |
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| JP3424676B2 (en) * | 2001-06-25 | 2003-07-07 | セイコーエプソン株式会社 | Semiconductor device storage container and method of transporting the same |
| CN101067962A (en) * | 2006-12-29 | 2007-11-07 | 深圳易拓科技有限公司 | Hard disk protective cover fetching device |
| CN201505910U (en) * | 2009-08-18 | 2010-06-16 | 广州新格拉斯光盘设备有限公司 | Blowing-type compact disc taking and placing device |
| CN101934573A (en) * | 2009-07-02 | 2011-01-05 | 中日龙(襄樊)机电技术开发有限公司 | Memory adsorption hardware fitting |
| CN202155878U (en) * | 2011-06-21 | 2012-03-07 | 东莞丰裕电机有限公司 | Automatic unloading manipulator |
| CN104057439A (en) * | 2014-06-26 | 2014-09-24 | 上海恒动汽车电池有限公司 | Suction cup type plate-picking device |
| CN204622069U (en) * | 2015-02-02 | 2015-09-09 | 昆山龙腾光电有限公司 | Sucker and there is its mechanical arm |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101192131B1 (en) * | 2010-10-22 | 2012-10-16 | 이우승 | Vaccum suction device |
-
2015
- 2015-12-02 CN CN201510872638.9A patent/CN105345829B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3424676B2 (en) * | 2001-06-25 | 2003-07-07 | セイコーエプソン株式会社 | Semiconductor device storage container and method of transporting the same |
| CN101067962A (en) * | 2006-12-29 | 2007-11-07 | 深圳易拓科技有限公司 | Hard disk protective cover fetching device |
| CN101934573A (en) * | 2009-07-02 | 2011-01-05 | 中日龙(襄樊)机电技术开发有限公司 | Memory adsorption hardware fitting |
| CN201505910U (en) * | 2009-08-18 | 2010-06-16 | 广州新格拉斯光盘设备有限公司 | Blowing-type compact disc taking and placing device |
| CN202155878U (en) * | 2011-06-21 | 2012-03-07 | 东莞丰裕电机有限公司 | Automatic unloading manipulator |
| CN104057439A (en) * | 2014-06-26 | 2014-09-24 | 上海恒动汽车电池有限公司 | Suction cup type plate-picking device |
| CN204622069U (en) * | 2015-02-02 | 2015-09-09 | 昆山龙腾光电有限公司 | Sucker and there is its mechanical arm |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105345829A (en) | 2016-02-24 |
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| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wang Haiming Inventor after: Zhang Wenbin Inventor after: Yang Shengrong Inventor after: Yi Zhongbo Inventor after: Liu Guojing Inventor after: He Dongge Inventor before: Zhang Wenbin Inventor before: Yang Shengrong Inventor before: Yi Zhongbo Inventor before: Liu Guojing Inventor before: He Dongge |
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