CN105336656A - Single-wafer bearing chamber structure - Google Patents
Single-wafer bearing chamber structure Download PDFInfo
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- CN105336656A CN105336656A CN201410273894.1A CN201410273894A CN105336656A CN 105336656 A CN105336656 A CN 105336656A CN 201410273894 A CN201410273894 A CN 201410273894A CN 105336656 A CN105336656 A CN 105336656A
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- wafer
- bearing chamber
- compartment
- compartment door
- cell structure
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Abstract
The invention discloses a single-wafer bearing chamber structure. A bearing chamber door is installed at the outer surface of the single-wafer bearing chamber; clamp cylinders are installed on the bearing chamber door; and with the clamp cylinders, sealing or air ventilation of the single-wafer bearing chamber by the bearing chamber door is realized. A switch cylinder is installed at the bottom of the bearing chamber door longitudinally and is used for opening or closing the bearing chamber door. Magnetic induction sensors are installed at one side of the single-wafer bearing chamber; guide rails are installed at the left end and the right end of the single-wafer bearing chamber; Teflon rings are installed at the upper ends and the lower ends of the guide rails and are used for reducing pressures and friction forces while the bearing chamber door is opened or closed. According to the invention, because the Teflons are used as materials for manufacturing rubber rings, an overtime door opening fault due to adhesiveness can be eliminated permanently; the normal operation time of the machine is improved and the manpower is saved; a problem caused by rubber ring wearing and aging can be solved; and a yield of the silicon wafer can be enhanced.
Description
Technical field
The present invention relates to semiconductor integrated circuit and manufacture field, particularly relate to a kind of single-wafer bearing cavity cell structure.
Background technology
If board does not run goods, more than 3 hours, the fault of single-wafer compartment enabling time-out (SWLLDoorOpenTimeout) just can be there is when the preparation of product wafer enters single-wafer compartment (SWLL) in single-wafer compartment door (SWLLDoor) when closing.First owing to being atmospheric environment outside single-wafer compartment door (SWLLDoor), product wafer runs into this fault, can rest on atmospheric environment, increases the probability affected by particle (Particle), thus affect the yield of product, even cause product wafer scrap; Secondly this fault causes board to be shut down, and because the gap of running goods at board just this problem can occur, can waste a large amount of race ETCD estimated time of commencing discharging and board uptime (Uptime), the process of waste of manpower simultaneously.By the failture evacuation (TroubleShooting) of time-out (SWLLDoorOpenTimeout) fault of opening the door to single-wafer compartment; the basic reason (RootCause) of this fault is single-wafer compartment door (SWLLDoor) overlong time when closing; single-wafer compartment door (SWLLDoor) assembly is clung by hard stop (HardStop) rubber ring on rail plate, causes opening.To the extruding of hard stop (HardStop) rubber ring and friction during single-wafer compartment door (SWLLDoor) switch, easily produce particle after hard stop (HardStop) rubber ring wear and aging thus affect product wafer.
Summary of the invention
In view of this, the present invention proposes a kind of single-wafer bearing cavity cell structure, and close for a long time to solve above-mentioned single-wafer compartment door, the assembly on single-wafer compartment door is sticked by the rubber ring on rail plate, causes overtime problem of opening the door.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of single-wafer bearing cavity cell structure, comprise single-wafer compartment, compartment door, clamp cylinder, switching cylinder and guide rail, wherein, described compartment door is installed on the outer surface of described single-wafer compartment, described clamp cylinder is installed on described compartment door, described compartment door realizes sealing and the ventilation of described single-wafer compartment by described clamp cylinder, described switching cylinder is longitudinally installed on the bottom of described compartment door, be used to open or close described compartment door, described guide rails assembling is in the two ends, left and right of described single-wafer compartment, the two ends up and down of each described guide rail are all provided with Teflon circle, described Teflon circle is for reducing pressure and the frictional force of generation when described compartment door opens or closes.
Above-mentioned single-wafer compartment structure, wherein, described guide rail is rail plate.
Above-mentioned single-wafer compartment structure, wherein, also comprises transducer, and described sensor setting is in the side of described single-wafer compartment.
Above-mentioned single-wafer compartment structure, wherein, described transducer comprises: photosensitive sensors and magnetic strength transducer;
Described photosensitive sensors is for responding to because of the light change between described single-wafer compartment sealing and ventilation;
Described magnetic strength transducer opens or closes and the changes of magnetic field caused for responding to described compartment door.
Above-mentioned single-wafer compartment structure, wherein, one end of described switching cylinder connects described compartment door by air cylinder guide rod.
Above-mentioned single-wafer compartment structure, wherein, described clamp cylinder comprise two clamping cylinders and two unclamp cylinder.
The present invention is owing to have employed above-mentioned technology, and the good effect of generation is:
The present invention passes through the material of Teflon as rubber ring, and due to not viscosity and the mar proof of Teflon, the enabling time out fault caused is sticked in permanent solution, promotes the uptime of board and saves manpower; The series of problems produced after solving rubber ring wear and aging, improves the yield of product silicon chip.
Accompanying drawing explanation
The accompanying drawing forming a part of the present invention is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation of a kind of single-wafer bearing cavity cell structure of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as limiting to the invention.
Embodiment
Shown in Figure 1, a kind of single-wafer bearing cavity cell structure of the present invention, comprise single-wafer compartment 8, compartment door 1, clamp cylinder, switching cylinder 4 and guide rail 6, wherein, compartment door 1 is installed on the outer surface of single-wafer compartment 8, clamp cylinder is installed on compartment door 1, compartment door 1 realizes sealing and the ventilation of single-wafer compartment 8 by clamp cylinder, switching cylinder 4 is longitudinally installed on the bottom of compartment door 1, be used to open or close compartment door 1, guide rail 6 is installed on the two ends, left and right of single-wafer compartment 8, the two ends up and down of each guide rail 6 are all provided with Teflon circle 7, Teflon circle 7 is for reducing pressure and the frictional force of generation when compartment door opens or closes.
The present invention also has following execution mode on the basis of the above, please continue shown in Figure 1,
In further embodiment of the present invention, guide rail 6 is rail plate, and the frictional force of rail plate is little, and useful life improves.
In further embodiment of the present invention, also comprise transducer 5, transducer 5 is arranged at the side of single-wafer compartment.
In further embodiment of the present invention, transducer 5 comprises: photosensitive sensors and magnetic strength transducer;
Photosensitive sensors is for responding to the change of the light between sealing because of single-wafer compartment 8 and ventilating;
Magnetic strength transducer opens or closes and the changes of magnetic field caused for responding to compartment door 1.
In further embodiment of the present invention, one end of switching cylinder 4 connects compartment door by air cylinder guide rod.
In further embodiment of the present invention, clamp cylinder comprise two clamping cylinders 2 and two unclamp cylinder 3.
User can further be familiar with characteristic of the present invention and function according to following explanation.
The process that single-wafer compartment 8 opens or closes compartment door 1 is as follows:
First system can send release command, unclamp cylinder 3 to move, compartment door 1 horizontally outward ejects, after arriving released position, magnetic induction sensor 5 detects light, so feedback DI unlock signal, system sends door after receiving DI signal and opens order, switching cylinder 4 moves, magnetic induction sensor 5 is because cylinder moving detects changes of magnetic field, so feedback DI switching signal, system receives DI signal and judges that compartment door 1 is opened.
Before using new design, can there is overtime fault of opening the door in the board being provided with single-wafer bearing cavity cell structure behind the gap of running goods, causes shutting down, and affects the manpower that the yield of product wafer is a large amount of with waste; To the extruding of the rubber ring of hard stop and friction during compartment door 1 switch, easily produce particle after rubber ring wear and aging thus affect the yield of product wafer.
After using new design, due to not viscosity and the mar proof of Teflon, the enabling time out fault caused is sticked in permanent solution, promotes the uptime of board and saves manpower; The series of problems produced after solving rubber ring wear and aging, improve the yield of product silicon chip, Teflon circle 7 is 1 to 1 formed objects with former rubber ring size.
Use Teflon (Teflon, polytetrafluoroethylene) for manufactured materials replacement rubber in the present embodiment, Teflon has the following advantages:
Not viscosity: nearly all material does not bond with polytetrafluoroethylcoating coating films, very thin film also demonstrates well not adhesion property.Known solid material all can not stick on the surface, is the minimum solid material of a kind of surface energy.
Resistant of high or low temperature: little on the impact change of temperature, temperature range scope is wide, can serviceability temperature-190 ~ 260 DEG C.Polytetrafluoroethylcoating coating films has excellent heat-resisting and low temperature tolerance characteristics, short time can be high temperature resistant to 300 DEG C, generally can use continuously between 240 DEG C ~ 260 DEG C, have significant thermal stability, it can work and not brittle under cryogenic temperature, does not at high temperature melt.
Mar proof: under high load, has excellent anti-wear performance.Under certain load, possesses wear-resistant and inadhesive two-fold advantage.
Corrosion resistance: polytetrafluoroethylene corrodes by medicine hardly; the alkali metal except melting can be born; fluorinated dielectric and the effect higher than all strong acid (comprising chloroazotic acid), strong oxidizer, reducing agent and the various organic solvent outside 300 DEG C of NaOH, can protect part to avoid suffering the chemical corrosion of any kind.
Use these advantages of Teflon we can permanent solution stick the enabling time out fault and rubber ring wear and aging caused after the series of problems that produces.
Use die size and the size of former hard stop rubber ring; use Teflon for making material; produce the hard stop Teflon circle with former hard stop rubber ring 1 to 1 size; be arranged on single-wafer bearing cavity cell structure is installed board on replace original rubber ring; after installation; inspection switch gate is normal, after measurement particle passes through, just perfectly can replace and not affect the board manufacturing.
In sum, the present invention passes through the material of Teflon as rubber ring, and due to not viscosity and the mar proof of Teflon, the enabling time out fault caused is sticked in permanent solution, promotes the uptime of board and saves manpower; The series of problems produced after solving rubber ring wear and aging, improves the yield of product silicon chip.
The foregoing is only preferred embodiment of the present invention; not thereby embodiments of the present invention and protection range is limited; to those skilled in the art; should recognize and all should be included in the scheme that equivalent replacement done by all utilizations specification of the present invention and diagramatic content and apparent change obtain in protection scope of the present invention.
Claims (6)
1. a single-wafer bearing cavity cell structure, comprise single-wafer compartment, compartment door, clamp cylinder, switching cylinder and guide rail, it is characterized in that, described compartment door is installed on the outer surface of described single-wafer compartment, described clamp cylinder is installed on described compartment door, described compartment door realizes sealing and the ventilation of described single-wafer compartment by described clamp cylinder, described switching cylinder is longitudinally installed on the bottom of described compartment door, be used to open or close described compartment door, described guide rails assembling is in the two ends, left and right of described single-wafer compartment, the two ends up and down of each described guide rail are all provided with Teflon circle, described Teflon circle is for reducing pressure and the frictional force of generation when described compartment door opens or closes.
2. single-wafer bearing cavity cell structure according to claim 1, is characterized in that, described guide rail is rail plate.
3. single-wafer bearing cavity cell structure according to claim 1, is characterized in that, also comprise transducer, and described sensor setting is in the side of described single-wafer compartment.
4. single-wafer bearing cavity cell structure according to claim 3, it is characterized in that, described transducer comprises: photosensitive sensors and magnetic strength transducer;
Described photosensitive sensors is for responding to because of the light change between described single-wafer compartment sealing and ventilation;
Described magnetic strength transducer opens or closes and the changes of magnetic field caused for responding to described compartment door.
5. single-wafer bearing cavity cell structure according to claim 1, is characterized in that, one end of described switching cylinder connects described compartment door by an air cylinder guide rod.
6. single-wafer bearing cavity cell structure according to claim 1, is characterized in that, described clamp cylinder comprise two clamping cylinders and two unclamp cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410273894.1A CN105336656B (en) | 2014-06-18 | 2014-06-18 | Single wafer bearing cavity structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410273894.1A CN105336656B (en) | 2014-06-18 | 2014-06-18 | Single wafer bearing cavity structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105336656A true CN105336656A (en) | 2016-02-17 |
| CN105336656B CN105336656B (en) | 2020-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410273894.1A Active CN105336656B (en) | 2014-06-18 | 2014-06-18 | Single wafer bearing cavity structure |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020085346A (en) * | 2001-05-08 | 2002-11-16 | 삼성전자 주식회사 | Apparatus for sealing of reactor chamber |
| CN102138033A (en) * | 2008-08-28 | 2011-07-27 | 应用材料股份有限公司 | Slotted TSSL door to couple O-ring with moving mating part |
| KR20110095014A (en) * | 2010-02-18 | 2011-08-24 | 세메스 주식회사 | Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus |
| CN102187430A (en) * | 2008-10-20 | 2011-09-14 | 应用材料公司 | In/out door for a vacuum chamber |
| CN102315145A (en) * | 2011-09-23 | 2012-01-11 | 北京七星华创电子股份有限公司 | Reaction-chamber cover plate and reaction chamber provided with same |
-
2014
- 2014-06-18 CN CN201410273894.1A patent/CN105336656B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020085346A (en) * | 2001-05-08 | 2002-11-16 | 삼성전자 주식회사 | Apparatus for sealing of reactor chamber |
| CN102138033A (en) * | 2008-08-28 | 2011-07-27 | 应用材料股份有限公司 | Slotted TSSL door to couple O-ring with moving mating part |
| CN102187430A (en) * | 2008-10-20 | 2011-09-14 | 应用材料公司 | In/out door for a vacuum chamber |
| KR20110095014A (en) * | 2010-02-18 | 2011-08-24 | 세메스 주식회사 | Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus |
| CN102315145A (en) * | 2011-09-23 | 2012-01-11 | 北京七星华创电子股份有限公司 | Reaction-chamber cover plate and reaction chamber provided with same |
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| Publication number | Publication date |
|---|---|
| CN105336656B (en) | 2020-01-21 |
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