CN103451616B - Vacuum coating system and vacuum gate device thereof - Google Patents
Vacuum coating system and vacuum gate device thereof Download PDFInfo
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- CN103451616B CN103451616B CN201310422166.8A CN201310422166A CN103451616B CN 103451616 B CN103451616 B CN 103451616B CN 201310422166 A CN201310422166 A CN 201310422166A CN 103451616 B CN103451616 B CN 103451616B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 131
- 239000002184 metal Substances 0.000 claims abstract description 109
- 229910052751 metal Inorganic materials 0.000 claims abstract description 109
- 230000007246 mechanism Effects 0.000 claims abstract description 90
- 238000012856 packing Methods 0.000 claims description 38
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- 238000007906 compression Methods 0.000 claims description 5
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- 238000005260 corrosion Methods 0.000 abstract description 5
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- 238000010030 laminating Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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- 238000005859 coupling reaction Methods 0.000 description 1
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- 238000005728 strengthening Methods 0.000 description 1
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Abstract
The invention discloses a vacuum coating system and a vacuum gate device thereof. The vacuum coating system comprises a vacuum gate device and a vacuum gate plate, wherein the vacuum gate device comprises a supporting seat, an elastic sealing mechanism, a double-rocker mechanism and a rotary driving piece; the elastic sealing mechanism comprises a fixing piece, a metal sealing plate and an elastic component; the double-rocker mechanism is connected between the elastic sealing mechanism and the rotary driving piece. The arc motion of the elastic sealing mechanism is realized by utilizing the double-rocker mechanism, the structure is simple, the occupied space is small, and the installation and the maintenance are convenient; the vacuum gate device can be actuated by adopting a simple rotary driving device, and the metal sealing plate is attached to the surface of the vacuum gate plate to realize sealing, so that the sealing performance is improved; the metal sealing plate has good corrosion resistance and high temperature resistance; because the elastic action of the elastic component and the matching of the metal sealing plate have certain flexible deformation compensation action, the mechanical precision of the vacuum gate plate and the sealing plate is reduced, and the processing and assembling difficulty is reduced.
Description
Technical field
The present invention relates to field of vacuum coating, particularly relate to a kind of vacuum coating system and vacuum gate device thereof.
Background technology
The major function of vacuum lock is to realize isolation between vacuum chamber and chamber or vacuum chamber and the external world and UNICOM, and it is widely used in various vacuum coater.
In Modern vacuum coating technique, in order to improve film quality, lower report to the leadship after accomplishing a task pollution and be the osmosis pollution impact on film quality, have employed a kind of hollow vacuum chamber becomes the inevitable development trend of vacuum system.Its concrete structure is: in the inside of a vacuum chamber, is provided with multiple process reaction chamber, is provided with a multichannel and seals structure for vacuum gate valve between process reaction chamber and vacuum chamber, is used for the isolation and the UNICOM that realize between process reaction chamber and vacuum chamber.When carrying out technique, gate and valve is closed, and process chamber and vacuum chamber are in vacuum environment two kinds independent, and this just greatly reduces foreign matter and enters the probability of process chamber, and then avoids the osmosis pollution of rete.At this kind of coating system, a kind of suitable vacuum gate valve device just seems extremely important.In existing vacuum gate valve device, on the one hand, its structure is excessively complicated, and the space of needs is bigger, cost is high and does not utilize system to install maintenance, on the other hand, has high temperature and corrosivity due to process reaction chamber, and the O-ring that existing gate-valve device adopts is as encapsulant, thus the gate valve demand of this kind of coating system can not be met.
Summary of the invention
The technical problem to be solved is in that, it is provided that a kind of vacuum coating system and vacuum gate device, simple in construction, takes up room little, corrosion-resistant and high-temperature resistant, it is simple to process and assemble, and can effectively ensure that sealing effectiveness.
In order to solve above-mentioned technical problem, on the one hand, The embodiment provides a kind of vacuum gate device, the opening on closing vacuum gate sheet, it is characterized in that, described vacuum gate device includes supporting seat, elastic packing mechanism, double rocker mechanism and rotary drive；
The relatively described easamatic power brake door-plate of described supporting seat is fixedly installed；
Described elastic packing mechanism includes fixture, metal sealing plate and elastic parts；Described fixture is positioned at the described metal sealing plate side away from described easamatic power brake door-plate；Described metal sealing plate is tabular, for fitting with face, described easamatic power brake door-plate face with by described closure of openings；Described elastic parts is connected between described fixture and described metal sealing plate, is used for providing elastic force to make described metal sealing plate be pressed in described easamatic power brake door-plate；
Described double rocker mechanism is connected between described elastic packing mechanism and described rotary drive, it includes drive crank, driven rocking bar, connecting rod, one end of described drive crank is in transmission connection and is rotationally connected with described connecting rod in described rotary drive, the other end, and the two ends of described driven rocking bar are rotationally connected with described supporting seat and described connecting rod respectively；Described connecting rod is fixing with described fixture to be connected；
Described rotary drive is fixed on described supporting seat, is used for driving described drive crank to swing, and drives described elastic packing mechanism abut with described easamatic power brake door-plate or separate；
Described supporting seat includes two gripper shoes being oppositely arranged；
Described vacuum valve device also includes active rotating shaft, and one end of described active rotating shaft is in transmission connection to described rotary drive, and the other end is connected to gripper shoe described in by rotational structure；
Described rotating mechanism includes fixing seat and bearing, described fixing seat is column, it has the first axially opposing end and the second end, first end of described fixing seat is provided with annular flange flange, gripper shoe described in one is provided with the shoulder hole matched with described annular flange flange, and the first end of described fixing seat is fixed in described shoulder hole；Second end end face of described fixing seat offers fixing hole, and described bearing is arranged between the hole wall of described active rotating shaft and described fixing hole.
Wherein, the thickness of described metal sealing plate is less than or equal to 4mm.
Wherein, described metal sealing plate is strip, and on described metal sealing plate, the plate face near described fixture is provided with reinforcement；Described reinforcement is strip, and the width along described metal sealing plate is arranged；Described elastic parts is connected to described reinforcement.
Wherein, described elastic parts includes stage clip and joint pin, described fixture is provided with connection through hole, described joint pin slides axially along self and wears described connection through hole, one end of described joint pin is fixing with described metal sealing plate to be connected, the other end is provided with attachment cap, is used for preventing described joint pin from skidding off from described connection through hole；Described compression spring sleeve is located on described joint pin, and compression is arranged between described metal sealing plate and described fixture.
Wherein, described elastic parts includes two symmetrically arranged V-arrangement shell fragments, and the two ends of each described V-arrangement shell fragment are respectively fixedly connected with to described fixture and described metal sealing plate.
Wherein, the elastic parts that described elastic packing mechanism includes is multiple, is distributed between described metal sealing plate and described fixture.
Wherein, described metal sealing plate is strip；Described fixture is the strip matched with described metal sealing plate；In each described elastic packing mechanism, elastic parts described in two is one group, and often two elastic partss in group are arranged along the width arrangement of described metal sealing plate；Many group elastic partss are arranged along the length direction of described metal sealing plate.
Wherein, described metal sealing plate is strip；Described fixture is the strip matched with described metal sealing plate；Described double rocker mechanism is two groups, and the connecting rod of double rocker mechanism described in two is parallel to each other, and the two ends being respectively fixedly connected with to described fastener length direction；
Described vacuum gate device also includes active rotating shaft and driven spindle；The drive crank of double rocker mechanism described in two groups is fixedly connected with in described active rotating shaft, and described active rotating shaft is in transmission connection in described rotary drive；Described driven spindle is rotationally connected with supporting seat, and the driven rocking bar of double rocker mechanism described in two groups is respectively fixedly connected with to driven spindle.
Wherein, vacuum gate device also includes auxiliary double rocker mechanism, and auxiliary double rocker mechanism includes auxiliary main rocker, assists from rocking bar and auxiliary connecting rod；One end of described auxiliary main rocker is fixedly attached to described active rotating shaft, the other end is rotationally connected to described auxiliary connecting rod；Described auxiliary is fixedly attached to described driven spindle from one end of rocking bar, the other end is rotationally connected to described auxiliary connecting rod.
On the other hand, the invention provides a kind of vacuum coating system, including aforesaid vacuum gate device and easamatic power brake door-plate, described vacuum gate device and described easamatic power brake door-plate corresponding matching, for switching the opening on described easamatic power brake door-plate.
The vacuum coating system of embodiment of the present invention offer and vacuum gate device thereof, utilize double rocker mechanism to realize the movement in a curve of elastic packing mechanism, can avoid opening, it is simple to operation while opening opening；Double rocker mechanism simple in construction, takes up room little, and is easily installed and safeguards；Simple rotating driving device is adopted to drive drive crank action can realize the actuating of vacuum gate device, it is easy to install and safeguard；Adopting metal sealing plate as encapsulant, metal sealing plate realizes sealing with the laminating of face, easamatic power brake door-plate face in off position, possesses good sealing property；Metal sealing plate possesses good corrosion-resistant and resistance to elevated temperatures；Owing to the elastic reaction of elastic parts possesses the deformation-compensated effect of certain flexibility with coordinating of metal sealing plate, thus reduce easamatic power brake door-plate and sealing plate mechanical precision, reduce processing and assembly difficulty.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, the accompanying drawing used required in embodiment or description of the prior art will be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the premise not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the schematic diagram of the vacuum lock system that first embodiment of the invention provides；
Fig. 2 is vacuum gate device profile in off position in Fig. 1；
Fig. 3 be in Fig. 1 vacuum gate device at the profile of open mode；
Fig. 4 is the profile of the elastic packing mechanism of vacuum gate device in Fig. 1；
Fig. 5 is the decomposing schematic representation of the elastic packing mechanism of vacuum gate device in Fig. 1
Fig. 6 is the connection profile of the active rotating shaft of vacuum gate device and supporting seat in Fig. 1；
Fig. 7, Fig. 8 are the structural representations of the elastic packing mechanism that second embodiment of the invention provides.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.
Referring to shown in Fig. 1 to Fig. 3, a kind of vacuum coating system that in the present invention, first embodiment provides, including vacuum gate device and easamatic power brake door-plate 9, vacuum gate device and easamatic power brake door-plate corresponding matching, for the opening 90 on closing vacuum gate sheet 9, to realize in vacuum coating system isolation between vacuum chamber or between vacuum chamber and the external world and UNICOM.
Vacuum gate device includes supporting seat 1, double rocker mechanism 2, elastic packing mechanism 3 and rotary drive 4.Double rocker mechanism 2 and rotary drive 4 are connected to supporting seat 1, double rocker mechanism 2 is connected between elastic packing mechanism 3 and rotary drive 4, rotary drive 4 is used for driving double rocker mechanism 2 action to drive elastic packing mechanism 3 to abut with easamatic power brake door-plate 9 or separate, thus switching opening 90.
Supporting seat 1 relative vacuum gate sheet 9 is fixedly installed.Supporting seat 1 includes two gripper shoes being oppositely arranged 11,12.In specific implementation process, supporting seat 1 can be the chamber walls being positioned at easamatic power brake door-plate 9 both sides in vacuum coating system, certainly, in other implementations, independent parts also can be installed in vacuum coating system as supporting seat 1, or directly utilize easamatic power brake door-plate 9 as supporting seat.
Elastic packing mechanism 3 includes fixture 31, metal sealing plate 32 and elastic parts 33, fixture 31 is positioned at the metal sealing plate 32 side away from described easamatic power brake door-plate 9, metal sealing plate 32 is tabular, for fitting with 9 faces of easamatic power brake door-plate to be closed by opening 90；Elastic parts 33 is connected between fixture 31 and metal sealing plate 32, is used for providing elastic force to make metal sealing plate 32 be pressed in easamatic power brake door-plate 9.In the present embodiment, metal sealing plate 32 is strip, in order to opening 90 corresponding matching of strip, the plate face of metal sealing plate 32 is sized larger than opening 90, and the periphery of metal sealing plate 32 can be fitted with the periphery corresponding surface face of opening 90, thus being closed by opening 90.Fixture 31 is also strip, and the corresponding matching being beneficial between fixture 31 with metal sealing plate 32 is connected, and makes elastic packing mechanism 3 overall in strip.
The material of metal sealing plate 32 can be rustless steel, aluminium alloy, copper alloy etc. metal material, possesses good corrosion-resistant and resistance to elevated temperatures.Metal sealing plate 32 is tabular, and itself and easamatic power brake door-plate 9 front end face can be plane-plane contact, and its sealing property is better, and more preferably, when seal face has cut, still can preserve value environmental suitability good sealing property.
The thickness of metal sealing plate 32 is less than or equal to 4mm, it has certain dough deformation function, it is in that when easamatic power brake door-plate 9 front end face seals and can produce certain compensating action, when the front end face of vacuum gate sheet 9 produces Light deformation or flatness is relatively low, still there is good sealing property；Utilize the plastic deformation compensating action of metal sealing plate 32, it is possible to decrease the mechanical precision of easamatic power brake door-plate 9 and metal sealing plate 32 so that the difficulty of processing and assembling is substantially reduced.In the present embodiment, the thickness of metal sealing plate 32 is 2～3mm, it is ensured that metal sealing plate 32 has certain structural strength.
Owing to metal sealing plate 32 is relatively thin, for strengthening its structural strength, on metal sealing plate 32, the plate face near fixture 31 is provided with reinforcement 321, and reinforcement 321 is strip, and the width along metal sealing plate 32 is arranged.Elastic parts 33 is connected to reinforcement 321, can be easy to the assembly connection between elastic parts 33 and metal sealing plate 32, ensures metal sealing plate 32 deformability in the longitudinal direction simultaneously.
As shown in Figure 4, Figure 5, elastic parts 33 includes stage clip 331 and joint pin 332.Fixture 31 is provided with connection through hole 310, joint pin 332 slides axially along self and wears connection through hole 310, one end of joint pin 332 is fixing with metal sealing plate 32 to be connected, and the other end is provided with attachment cap 332a, is used for preventing joint pin 332 from skidding off from connection through hole 310.Stage clip 331 is set on joint pin 332, and compression is arranged between metal sealing plate 32 and fixture 31, to provide restriction metal sealing plate 32 and fixture 31 resistance close to each other.When fixture 31 moves to easamatic power brake door-plate, metal sealing plate 32, between fixture 31 and easamatic power brake door-plate 9, utilizes the elastic force of stage clip 331 that metal sealing plate 32 can be made to fit tightly in easamatic power brake door-plate 9, it is ensured that the reliability of sealing.
By joint pin 332 and the cooperation being connected through hole 310, it is ensured that the stability of metal sealing plate 32 and fixture 31 relative movement, simultaneously facilitate the assembling of stage clip 331 and be connected.Herein, as other embodiment, elastic parts 33 also can only include stage clip 331, and the two ends of stage clip 331 are directly fixedly attached to metal sealing plate 32 and fixture 31 respectively.
Further, connect and be provided with sliding bearing 34 between through hole 310 and joint pin 332, utilize sliding bearing 34 can ensure the stability that joint pin 332 moves.Connection through hole 310 is and the attachment cap 332a stairstepping matched to be easy to the installation of sliding bearing 34 away from one end of metal sealing plate 32 simultaneously.One end of the close metal sealing plate 32 of connection through hole 310 is the stairstepping suitable with stage clip 331, in order to the installation of stage clip 331.
Threaded between joint pin 332 with metal sealing plate 32, in order to and the assembling between joint pin 332 and metal sealing plate 32.More specifically, screw on reinforcement 321, joint pin 332 is provided with and the stud of this screw corresponding matching, and stud is threadedly connected to screw, and stage clip 331 is resisted against reinforcement 321, thus the assembly connection realized between elastic group 33 and metal sealing plate 32.
In the present embodiment, easamatic power brake door-plate 9 is vertically arranged, and it offers the opening 90 of multiple strip, and the length direction of opening 90 is level vertically arranges setting to, the opening 90 of multiple strips.Elastic packing mechanism 3 and opening 90 one_to_one corresponding, be also multiple.Correspondingly, metal sealing plate 32 is the strip matched with opening 90.Fixture 31 is also the strip matched with metal sealing plate 32, in order to it is connected with metal sealing plate 32, simultaneously so that each elastic packing mechanism 3 is overall in strip.
As shown in Figure 5, the elastic parts 33 that elastic packing mechanism 3 includes is for multiple, it is distributed between metal sealing plate 32 and fixture 31, to ensure elastic harmony between metal sealing plate 32 and fixture 31, is effectively ensured the sealing property between metal sealing plate 32 and easamatic power brake door-plate 9.In the present embodiment, specifically, in each elastic packing mechanism 3, two elastic partss 33 are one group, and often two elastic partss 33 in group are arranged along the width arrangement of metal sealing plate 32；Many group elastic partss 33 are arranged along the length direction of metal sealing plate 32, so that each elastic parts 33 is distributed between metal sealing plate 32 and easamatic power brake door-plate.
Reinforcement 321 on metal sealing plate 32 is strip, and arranges along the width of metal sealing plate 32.The screw arranged on reinforcement 321 is two, in order to be connected with the joint pin 332 of two elastic partss 33 being positioned at same group.Reinforcement 321 is multiple, and the length direction along metal sealing plate 32 is arranged, and is beneficial to and organizes being connected of elastic parts 33 more.Utilize reinforcement 321 can strengthen the structural strength of metal sealing plate 32 simultaneously.
As shown in Figure 1 and Figure 2, double rocker mechanism 2 includes drive crank 21, driven rocking bar 22 and connecting rod 23, one end of drive crank 21 is in transmission connection and is rotationally connected with connecting rod 23 in rotary drive 4, the other end, and the two ends of driven rocking bar 22 are rotationally connected with supporting seat 1 and connecting rod 23 respectively.Connecting rod 23 is fixing with fixture 31 to be connected.In the present embodiment, it is connected by angle bar 35 is fixing between connecting rod 23 with fixture 31.Rotary drive 4 is fixed on supporting seat 1, is used for driving drive crank 21 to swing, and drives elastic packing mechanism 3 to abut with easamatic power brake door-plate 9 or separate.
Rotary drive 4 can be the device that rotary cylinder or servomotor etc. can drive drive crank 21 to swing, and adopts simple rotation to drive the actuating that can realize valve system, it is easy to implement.When gate is closed, connecting rod 23 drives elastic packing mechanism 3 to press to easamatic power brake door-plate 9, metal sealing plate 32 under elastic parts 33 elastic force effect tight against easamatic power brake door-plate 9, it is achieved seal.When needing to open gate, drive crank 21 is at the drive lower swing of rotary drive 4, owing to the end of drive crank 21 is that camber line moves when mobile, connecting rod 23 and elastic packing mechanism 3 move in camber line under the drive of drive crank 21, elastic packing mechanism 3 is separated with easamatic power brake door-plate 9, simultaneously elastic packing mechanism 3 moves the side to opening 90, it is to avoid opening 90 is produced to block by elastic packing mechanism 3, on the opening direction of opening 90 can through opening 90 either directly through.
Connecting rod 23 is axially vertically, namely makes multiple elastic packing mechanism 3 arrange along the axial arranging of connecting rod 23, so that connecting rod 23 can be connected with multiple elastic packing mechanisms 3 simultaneously.In the present embodiment, owing to elastic packing mechanism 3 is overall in strip, for ensureing the stability that elastic packing mechanism 3 moves, double rocker mechanism 2 is two groups, the connecting rod 23 of two double rocker mechanisms 2 is parallel to each other, and the two ends being respectively fixedly connected with to fixture 31 length direction.
As shown in Figure 1 to Figure 3, in order to make rotary drive 4 can drive the action simultaneously of two groups of double rocker mechanisms 2 simultaneously, vacuum gate device also includes active rotating shaft 5 and driven spindle 6.The drive crank 21 of two groups of double rocker mechanisms 2 is fixedly connected with in active rotating shaft 5.Active rotating shaft 5 is in transmission connection in rotary drive 4, and around self axial rotation under the drive of rotary drive 4, thus two drive cranks 21 can be driven to swing simultaneously.In the present embodiment, one end of active rotating shaft 5 is in transmission connection to rotary drive 4, and the other end is rotationally connected to gripper shoe 12.Rotary drive 4 and active rotating shaft 5 are separately positioned on the both sides of gripper shoe 11, active rotating shaft 5 can be made to be positioned at inside vacuum chamber, rotary drive 4 is arranged on the outside of vacuum chamber in specific implementation process, thus the cleaning that can ensure in vacuum chamber.Shaft coupling, decelerator etc. can be set between rotary drive 4 and active rotating shaft 5, to ensure the stability of transmission.Have only to a rotary drive 4, utilize active rotating shaft 5 and driven spindle 6 can drive two groups of double rocker mechanism actions simultaneously, it is ensured that elastic packing mechanism 3 two ends can simultaneously synchronizing moving.
As shown in Figure 6, the other end of active rotating shaft 5 is connected to gripper shoe 12 by rotating mechanism 7.Rotating mechanism 7 includes fixing seat 71 and bearing 72, fixing seat 71 is column, it has the first axially opposing end and the second end, first end of fixing seat 71 is provided with annular flange flange 711, gripper shoe 12 is provided with the shoulder hole matched with annular flange flange 711, and the first end of fixing seat 71 is fixed in shoulder hole, in order to the assembly connection between fixing seat 71 and gripper shoe 12, sealing ring can be set between annular flange flange 711 and the cascaded surface of shoulder hole, with the sealing property of both guarantees simultaneously.Second end end face of fixing seat 71 offers fixing hole 710, and bearing 72 is arranged between the hole wall of active rotating shaft 5 and fixing hole 710, in order to the assembly connection between active rotating shaft 5 and rotating mechanism 7.
Driven spindle 6 is rotationally connected with supporting seat 1, and the driven rocking bar 22 of two groups of double rocker mechanisms 2 is respectively fixedly connected with to driven spindle 6.In the present embodiment, the two ends of driven spindle 6 are rotationally connected respectively to two gripper shoes 11,12, further, the two ends of driven spindle 6 are connected to two gripper shoes 11,12 respectively through two other rotating mechanism, the structure of two rotating mechanisms is identical with the structure of such rotation mechanism 7, repeats no more herein.
Further, as shown in Figure 1 to Figure 3, vacuum gate device also includes auxiliary double rocker mechanism 8, and auxiliary double rocker mechanism 8 includes auxiliary main rocker 81, assists from rocking bar 82 and auxiliary connecting rod 83.One end of auxiliary main rocker 81 is fixedly attached to active rotating shaft 5, the other end is rotationally connected to auxiliary connecting rod 83；Auxiliary is fixedly attached to driven spindle 6 from one end of rocking bar 82, the other end is rotationally connected to auxiliary connecting rod 83.Utilize auxiliary double rocker mechanism 8 can ensure the synchronous coordination rotated between active rotating shaft 5 and driven spindle 6, and then ensure the stability that connecting rod 23 moves.Auxiliary double rocker mechanism 8 is also two groups, lays respectively at two ends on active rotating shaft 5 length direction.Auxiliary double rocker mechanism 8 and double rocker mechanism 2 are separately positioned on the both sides of active rotating shaft 5, to avoid interfering therebetween.
As shown in Figure 7, Figure 8, in a kind of vacuum gate device that second embodiment of the invention provides, elastic parts includes two symmetrically arranged V-arrangement shell fragments 233, the two ends of V-arrangement shell fragment 233 are respectively fixedly connected with to fixture 231 and metal sealing plate 232, two V-arrangement shell fragments 233 are utilized to provide the elastic force stoping metal sealing plate 232 and fixture 231 close to each other, its elastic force can be utilized to make metal sealing plate 232 fit tightly in easamatic power brake door-plate 9, to ensure sealing property.In the present embodiment, the opening direction of two V-arrangement shell fragments 233 is opposing, to ensure the compact conformation shape of elastic packing mechanism 3, and ensures the harmony of stress.In other implementations, the opening direction of two V-arrangement shell fragments 233 can also be in opposite directions.
More specifically, fixture 231 and metal sealing plate 232 are the strip tabular cooperated.The opening direction of V-arrangement shell fragment 233 is the width of metal sealing plate 232.Elastic parts is multiple, and the length direction along metal sealing plate 232 is uniformly arranged setting, to ensure the balanced shape of metal sealing plate 232 each position stress, is effectively ensured the sealing effectiveness of each junction.
Fixture 231 is provided with reinforcement 234 away from the side of metal sealing plate 232, to ensure the structural strength of fixture 231.Reinforcement 234 is the strip matched with fixture 231, and the cross section of reinforcement 234 is L-shaped, and one support arm is fixing with fixture 231 laminating to be connected.Reinforcement 234 is two, and the width along fixture 231 is arranged and arranged.In the present embodiment, other parts of vacuum gate device are identical with the first embodiment, do not repeat them here.
In both of the aforesaid embodiment, it is utilized respectively stage clip 331 and V-arrangement shell fragment 233 to realize the elastic effect of elastic parts, in other implementations, also available extension spring realizes elastic effect, such as the stage clip 331 in first embodiment is replaced with extension spring, the joint pin of elastic parts is identical with first embodiment, extension spring is arranged on the fixture 231 side away from metal sealing plate 232, the two ends of extension spring are respectively fixedly connected with to attachment cap 332a to fixture 231, when metal sealing plate 232 is close to each other with fixture 231, joint pin 332 moves and makes extension spring stretch, thus utilizing the pulling force restriction metal sealing plate 232 of extension spring and fixture 231 close to each other.
Vacuum gate device provided by the invention can be applicable in the vacuum coating system of the thin-film technique preparations such as TFT-LED, solar film battery, semiconductor chip, wafer and production.
The vacuum coating system of embodiment of the present invention offer and vacuum gate device thereof, utilize double rocker mechanism 2 to realize the movement in a curve of elastic packing mechanism 3, can avoid opening 90, it is simple to operation while opening opening 90；Double rocker mechanism 2 simple in construction, takes up room little, and is easily installed and safeguards；Simple rotating driving device 4 is adopted to drive drive crank 21 action can realize the actuating of vacuum gate device, it is easy to install and safeguard；Adopting metal sealing plate as encapsulant, metal sealing plate realizes sealing with the laminating of face, easamatic power brake door-plate face in off position, possesses good sealing property；Metal sealing plate possesses good corrosion-resistant and resistance to elevated temperatures；Due to elastic parts elastic reaction and with coordinating of metal sealing plate and possess the deformation-compensated effect of certain flexibility, thus reducing easamatic power brake door-plate and the mechanical precision of metal sealing plate, reduce processing and assembly difficulty.
Embodiments described above, is not intended that the restriction to this technical scheme protection domain.The amendment made within any spirit at above-mentioned embodiment and principle, equivalent replacement and improvement etc., should be included within the protection domain of this technical scheme.
Claims (10)
1. a vacuum gate device, the opening on closing vacuum gate sheet, it is characterised in that described vacuum gate device includes supporting seat, elastic packing mechanism, double rocker mechanism and rotary drive；
The relatively described easamatic power brake door-plate of described supporting seat is fixedly installed；
Described elastic packing mechanism includes fixture, metal sealing plate and elastic parts；Described fixture is positioned at the described metal sealing plate side away from described easamatic power brake door-plate；Described metal sealing plate is tabular, for fitting with face, described easamatic power brake door-plate face with by described closure of openings；Described elastic parts is connected between described fixture and described metal sealing plate, is used for providing elastic force to make described metal sealing plate be pressed in described easamatic power brake door-plate；
Described double rocker mechanism is connected between described elastic packing mechanism and described rotary drive, it includes drive crank, driven rocking bar and connecting rod, one end of described drive crank is in transmission connection and is rotationally connected with described connecting rod in described rotary drive, the other end, and the two ends of described driven rocking bar are rotationally connected with described supporting seat and described connecting rod respectively；Described connecting rod is fixing with described fixture to be connected；
Described rotary drive is fixed on described supporting seat, is used for driving described drive crank to swing, and drives described elastic packing mechanism abut with described easamatic power brake door-plate or separate；
Described supporting seat includes two gripper shoes being oppositely arranged；
Described vacuum valve device also includes active rotating shaft, and one end of described active rotating shaft is in transmission connection to described rotary drive, and the other end is connected to gripper shoe described in by rotational structure；
Described rotating mechanism includes fixing seat and bearing, described fixing seat is column, it has the first axially opposing end and the second end, first end of described fixing seat is provided with annular flange flange, gripper shoe described in one is provided with the shoulder hole matched with described annular flange flange, and the first end of described fixing seat is fixed in described shoulder hole；Second end end face of described fixing seat offers fixing hole, and described bearing is arranged between the hole wall of described active rotating shaft and described fixing hole.
2. vacuum gate device according to claim 1, it is characterised in that the thickness of described metal sealing plate is less than or equal to 4mm.
3. vacuum gate device according to claim 1, it is characterised in that described metal sealing plate is strip, on described metal sealing plate, the plate face near described fixture is provided with reinforcement；Described reinforcement is strip, and the width along described metal sealing plate is arranged；Described elastic parts is connected to described reinforcement.
4. vacuum gate device according to claim 1, it is characterized in that, described elastic parts includes stage clip and joint pin, described fixture is provided with connection through hole, described joint pin slides axially along self and wears described connection through hole, one end of described joint pin is fixing with described metal sealing plate to be connected, and the other end is provided with attachment cap, is used for preventing described joint pin from skidding off from described connection through hole；Described compression spring sleeve is located on described joint pin, and compression is arranged between described metal sealing plate and described fixture.
5. vacuum gate device according to claim 1, it is characterised in that described elastic parts includes two symmetrically arranged V-arrangement shell fragments, the two ends of each described V-arrangement shell fragment are respectively fixedly connected with to described fixture and described metal sealing plate.
6. vacuum gate device according to claim 1, it is characterised in that the elastic parts that described elastic packing mechanism includes is multiple, is distributed between described metal sealing plate and described fixture.
7. vacuum gate device according to claim 6, it is characterised in that described metal sealing plate is strip；Described fixture is the strip matched with described metal sealing plate；In each described elastic packing mechanism, elastic parts described in two is one group, and often two elastic partss in group are arranged along the width arrangement of described metal sealing plate；Many group elastic partss are arranged along the length direction of described metal sealing plate.
8. vacuum gate device according to claim 1, it is characterised in that described metal sealing plate is strip；Described fixture is the strip matched with described metal sealing plate；Described double rocker mechanism is two groups, and the connecting rod of double rocker mechanism described in two is parallel to each other, and the two ends being respectively fixedly connected with to described fastener length direction；
Described vacuum gate device also includes active rotating shaft and driven spindle；The drive crank of double rocker mechanism described in two groups is fixedly connected with in described active rotating shaft, and described active rotating shaft is in transmission connection in described rotary drive；Described driven spindle is rotationally connected with supporting seat, and the driven rocking bar of double rocker mechanism described in two groups is respectively fixedly connected with to driven spindle.
9. vacuum gate device according to claim 8, it is characterised in that vacuum gate device also includes auxiliary double rocker mechanism, and auxiliary double rocker mechanism includes auxiliary main rocker, assists from rocking bar and auxiliary connecting rod；One end of described auxiliary main rocker is fixedly attached to described active rotating shaft, the other end is rotationally connected to described auxiliary connecting rod；Described auxiliary is fixedly attached to described driven spindle from one end of rocking bar, the other end is rotationally connected to described auxiliary connecting rod.
10. a vacuum coating system, it is characterised in that include the vacuum gate device described in any one of claim 1 to 9 and easamatic power brake door-plate, described vacuum gate device and described easamatic power brake door-plate corresponding matching, for switching the opening on described easamatic power brake door-plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310422166.8A CN103451616B (en) | 2013-09-16 | 2013-09-16 | Vacuum coating system and vacuum gate device thereof |
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| CN201310422166.8A CN103451616B (en) | 2013-09-16 | 2013-09-16 | Vacuum coating system and vacuum gate device thereof |
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| CN103451616A CN103451616A (en) | 2013-12-18 |
| CN103451616B true CN103451616B (en) | 2016-07-27 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104633210B (en) * | 2015-01-16 | 2017-04-12 | 杭州大和热磁电子有限公司 | Vacuum valve body |
| CN208014647U (en) * | 2018-04-24 | 2018-10-26 | 君泰创新（北京）科技有限公司 | A kind of xegregating unit of mud chamber |
Citations (3)
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|---|---|---|---|---|
| CN1142029A (en) * | 1994-04-28 | 1997-02-05 | 大明金属工业株式会社 | Flat valve |
| CN101970918A (en) * | 2007-12-20 | 2011-02-09 | 欧瑞康太阳Ip股份公司（特吕巴赫） | Gate valve for a vacuum chamber and vacuum chamber |
| CN203513792U (en) * | 2013-09-16 | 2014-04-02 | 南方科技大学 | Vacuum coating system and vacuum gate device thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109006A (en) * | 2007-10-10 | 2009-05-21 | Tokyo Electron Ltd | Gate valve and base board treating device using it |
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2013
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142029A (en) * | 1994-04-28 | 1997-02-05 | 大明金属工业株式会社 | Flat valve |
| CN101970918A (en) * | 2007-12-20 | 2011-02-09 | 欧瑞康太阳Ip股份公司（特吕巴赫） | Gate valve for a vacuum chamber and vacuum chamber |
| CN203513792U (en) * | 2013-09-16 | 2014-04-02 | 南方科技大学 | Vacuum coating system and vacuum gate device thereof |
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