CN105276769A - Local environment control unit of optical system - Google Patents
Local environment control unit of optical system Download PDFInfo
- Publication number
- CN105276769A CN105276769A CN201510788370.0A CN201510788370A CN105276769A CN 105276769 A CN105276769 A CN 105276769A CN 201510788370 A CN201510788370 A CN 201510788370A CN 105276769 A CN105276769 A CN 105276769A
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- control unit
- environment control
- optical system
- air
- serial communication
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Air Conditioning Control Device (AREA)
Abstract
The invention belongs to the field of photoetching projection objective environment control, and relates to a local environment control unit of an optical system. The local environment control unit comprises a human-computer interaction interface, a master control unit, an air adjusting and supplying unit and an environment control unit. The human-computer interaction interface and the master control unit are connected through a serial communication bus. The master control unit and the air adjusting and supplying unit are connected through a serial communication bus. The air adjusting and supplying unit and the environment control unit are connected through a soft connecting pipe. The environment control unit and the master control unit are connected through a signal and power source cable connected and inserted in the manner of an LEMO connector. The local environment control unit is simple in structure and low in manufacturing cost. In the technology processes of optical system machining, detecting and the like, the temperature and the cleanliness of the local key space air bath environment can be well controlled, the air bath environment is relatively stable, the measuring precision is high, and repeatability is good.
Description
Technical field
The invention belongs to photoetching projection objective lens environmental Kuznets Curves field, be specifically related to a kind of optical system local air environment control unit.
Background technology
Photoetching projection objective lens is a kind of ultra-precise optical system.Along with processing and the raising of accuracy of detection, the ratio that the error that the temperature in environment space and cleanliness factor cause accounts for is more and more higher, therefore for ensureing that the high stable gas bath condition of key component is the emphasis and prerequisite developed.But provide all ranged space gas bath precise hard_drawn tuhes maintenance costs quite high for the whole process equipment of photoetching projection objective lens manufacture and detection, and not easily realize temperature fluctuation and be less than ± strict the control of 0.05 DEG C, optical system local air environment control unit is a relevant equipment for ultra-precise optical VS .NET Prerequisites, is the emphasis and the core that ensure Ultraprecision Equipment internal environment control technology.
High-precision optical interferes detection to be the critical process process realizing the research and development of ultrahigh precision optical system, example is measured as to interfere detection, the face shape of optical element and radius of curvature all need to reach nanometer measurement precision, require that the reference temperature range in region is 22 ± 0.1 DEG C, experimental facilities any test point temperature fluctuation value in region is better than 0.05 DEG C/72 hours, the temperature difference of temperature homogeneity any two points (spacing 400mm and within) in region does not surpass 0.05 DEG C, relative humidity 50%-55%RH is adjustable, cleanliness factor reaches thousand grades of purification standards, optical system local air environment control unit provides controlled temperature in target area, air after humidity-controlled and laminar flow process, to meet above-mentioned strict environmental condition.
Debug in process in photoetching projection objective lens mechanism, capacitance sensor provides accurate displacement benchmark for governor motion, determines the performance of governor motion.Utilize laser interferometer to demarcate in the parameter of capacitance sensor performance, measurement noises, stability, the linearity and repeatability are very responsive to environment temperature, directly affect calibration result.Therefore, need a kind of local air environment control unit, add heat-proof device, control to ensure stable measurement environment condition by temperature.
Adjustable mechanism six-shaft test bench whole system comprises measurand, light path measurement mechanism and tooling platform three part; owing to using multichannel multi-axis interferometer in measuring process; therefore high requirement is had for the temperature stability in local environment space and cleanliness factor; need to use key area the means such as cage to protect, guarantee the accuracy of adjustable mechanism six-shaft test bench result.
The method for designing of existing local air environment control mainly utilizes the clean engineering of capital construction, the temperature stability of whole clean room is controlled by centralised temperature, this implementation method cost is quite large, safeguard not easily, especially in the target area experiment product debug phase, the airflow fluctuation that discrepancy personnel and article bring clearly, and often needs less compared with space, stringent environmental target area, and this conventional method waste resource is serious.
Publication number is that the Chinese patent of CN102564299A discloses a kind of implement device and the method that improve object space temperature stability, and invention is applied to the device that interferometer etc. needs high-temperature stability, can realize long high-temperature stability.This implement device comprises inner casing, shell, static pressure casing, filter, and first medium in inner casing object space and inner casing, shell central filler second medium.This application of installation occasion meets the conditional request of local air environment control, but its design adopts air-flow to flow to the mode of offside bottom from top on the right side of horizontal direction, be unfavorable for that controlled region entirety is immersed in gas bath environment, and by air motion path, regions particulate thing in inner casing is easily piled up, and can not reach and maintain long-time purity requirements.
A kind of optical system local air environment control unit is under the initial natural wind condition of 22 ± 0.1 DEG C, there is provided stability be not less than ± 0.05 DEG C, reach the regional area enclosure space of thousand grades of cleanliness factors, target area can be moved and adjusting size (being not more than 1.6m*1.6m*2m), ensured the prerequisite of the interference such as the certain thermal source of introducing by closed loop control process under, control accuracy is unaffected.
Publication number is that the Chinese patent of CN102193565A discloses a kind of air bath temperature control device and method, and device comprises: gas bath plate, air inlet, the first gas curtain and the second gas curtain, and the first gas curtain is placed with the second gas curtain is mutually vertical, is positioned at the homonymy of orifice plate.When this invention air bath temperature control device and method achieve and carry out temperature control to precision machinery instrument, gas bath all region covering maximizes, and by vertical gas bath and horizontal gas bath complex superposition, achieves the even temperature control to dispersed structure.Not mentioned temperature controls and gatherer process in the invention, and the improvement by means of only version reaches the uniform effect of air themperature, does not use algorithm to carry out Based Intelligent Control to target area, is not suitable for complex environment occasion.
Summary of the invention
The object of the invention is to propose a kind of optical system local air environment control unit, when object is to solve and manufactures photoetching projection objective lens, in the technical process such as optical system processing, detection, temperature, the cleanliness factor of local key space gas bath environment are unstable, cause the problems such as certainty of measurement is low, poor repeatability.
The technical scheme that technical solution problem of the present invention adopts is as follows:
A kind of optical system local air environment control unit, comprises human-computer interaction interface, main control unit, air conditioning feed unit and environment control unit;
Be connected by serial communication bus between human-computer interaction interface with main control unit, be connected by serial communication bus between main control unit with air conditioning feed unit, serial communication bus distance is 1-3m, air conditioning feed unit is connected by hose connector with between environment control unit, hose connector distance is 1-3m, be connected by the signal that patches with LEMO connector form, power cable between environment control unit with main control unit, signal, power cable distance is 1-3m.
The invention has the beneficial effects as follows: simple structure of the present invention, cost is low; In the technical process such as optical system processing, detection, can be good at temperature, the cleanliness factor of controls local key space gas bath environment, make it relatively stable, certainty of measurement is high, reproducible.
Accompanying drawing explanation
Fig. 1 is a kind of optical system local air environment control cellular construction schematic diagram of the present invention;
Fig. 2 is high efficiency particulate air filter layout schematic top plan view in plenum chamber of the present invention;
Fig. 3 is homogenating plate and cleaning lamp layout schematic top plan view in plenum chamber of the present invention;
Fig. 4 is gas bath hole of the present invention schematic diagram;
Wherein: 1, human-computer interaction interface, 2, main control unit, 3, air conditioning feed unit, 4, environment control unit, 5, natural wind, 6, filtration system, 7, heating system, 8, heat-exchange system, 9, blower fan, 10, air outlet, 11, non-return air-valve, 12, hose connector, 13, plenum chamber, 14, high efficiency particulate air filter, 15, homogenating plate, 16, sensor, 17, workbench, 18, 304 stainless steel square tubes, 19, handle, 20, hinge, 21, lucite, 22, universal caster wheel, 23, cleaning lamp, 24, gas bath hole, 25, serial communication bus, 26, LEMO connector, 27, 304 corrosion resistant plates and framework.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 1, a kind of optical system local air environment control unit of the present invention comprises human-computer interaction interface 1, main control unit 2, air conditioning feed unit 3 and environment control unit 4;
Be connected by serial communication bus 25 between human-computer interaction interface 1 with main control unit 2, be connected by serial communication bus 25 between main control unit 2 with air conditioning feed unit 3, serial communication bus 25 is apart from being 1-3m, be connected by hose connector 12 between air conditioning feed unit 3 with environment control unit 4, hose connector 12 is apart from being 1-3m, be connected by the signal that patches with LEMO connector 26 form, power cable between environment control unit 4 with main control unit 2, signal, power cable distance is 1-3m.
Human-computer interaction interface 1 can select 7 cun, 10 cun, 12 cun and above size resistance-type, capacitive touch screen, runs Embedded Configuration Software or built-in system software, utilizes communication protocol communication by serial communication bus 25 and main control unit 2.Human-computer interaction interface 1 meets friendly and ease for use, the environment temperature inquiries such as real time temperature, granularity, wind speed, performs observation and the control command of user.
Main control unit 2 can select the intelligent control unit of the low-power consumption such as PLC, ARM, DSP, single-chip microcomputer, high operation efficiency, it should possess abundant peripheral hardware resource, as serial communication interface, analog-to-digital interface, numeral turn analog interface, general purpose I/O interface etc., 2 road serial communication bus 25 are at least provided to connect the analytic ability with serial communication protocol, and smoothly can run pid control algorithm, meet signals collecting and the power supply of sensor 16, realize the closed-loop control of air conditioning feed unit 3 and environment control unit 4.
Human-computer interaction interface 1 and main control unit 2 can be integrated in a control casing, to reduce the space hold of whole system unit.
Air conditioning feed unit 3 comprises filtration system 6, heating system 7, heat-exchange system 8 and blower fan 9.Possesses natural wind 5 that temperature and humidity primary condition requires successively by the filtration system 6 of air conditioning feed unit 3 inside, heating system 7, heat-exchange system 8 and blower fan 9, be filtered to reach object gas, dehumidify and temperature controlled object, finally by air outlet 10, air supply after adjustment is sent in hose connector 12.
Wherein filtration system 6 comprises roughing-efficiency plate filter, dehydrating unit, board-like medium effeciency filter etc., carries out double-filtration, can reduce the number of object gas particle after this process to natural wind 5.Heating system 7 comprises the electric heater that power adjustable joint controls, and this process helps, in evaporation natural wind 5 moisture, reaches certain effect on moisture extraction.
Heat-exchange system 8 comprises board-like primary heat exchanger and board-like secondary heat exchanger, its thermal source can select thermostatical circulating water machine, this process is the indirect temperature control process performed after the closed-loop control order by the transmission of parsing main control unit 2, because object gas is after flowing through target area, flow out and incorporate external environment condition, its heat causes temperature stability poor, after again entering air conditioning feed unit 3 with natural wind 5 after transmitting, need stable heat source temperature, actively to affect object gas.When controlled area object gas temperature is lower than set point, main control unit 2 sends the order that heats up, thermostatical circulating water machine heating intermediate medium, the object gas and the abundant contact heat-exchanging of thermostatical circulating water machine intermediate medium that flow through heat-exchange system 8 is made, to promote object gas temperature by tight coil arrangement; When controlled area object gas temperature is higher than set point, main control unit 2 sends cooling order, and thermostatical circulating water machine reduces temperature of middle medium, utilizes the thermostatical circulating water machine intermediate medium in heat-exchange system 8 to reduce object gas temperature.
Environment control unit 4 is cube gas controlled area, length, width and height vary in size, be not more than 1.6m*1.6m*2m, comprise plenum chamber 13, sensor 16, workbench 17,304 stainless steel square tube 18, handle 19, hinge 20, lucite 21, universal caster wheel 22, LEMO connector 26,304 corrosion resistant plate and framework 27.
304 stainless steel square tubes 18 are controlled area general frame, lower than 5mm*5mm, mainly play support frame effect.Lucite 21 is the four sides wall of controlled area; Thickness is 1-3mm, and thickness is not easily blocked up, should meet environment control unit 4 outer by the clear observation of transparent organic glass 21, and effectively isolating exterior environment heat exchange.304 corrosion resistant plates and framework 27 are the dividing plate that controlled area is upper and lower and centre is two-layer; Thickness is 1mm, reduces environment control unit 4 overall weight.Under universal caster wheel 22 is arranged on lower partition; LEMO connector 26 is arranged on any lucite 21.
See accompanying drawing 2, plenum chamber 13 comprises high efficiency particulate air filter 14, homogenating plate 15, and its controlled airflow is entered by non-return air-valve 11, and its diameter is 300mm.Air-flow, first by being made up of the ground floor of plane high efficiency particulate air filter 14 and 304 corrosion resistant plate and framework 27, then by being made up of the second layer of plane homogenating plate 15 and 304 corrosion resistant plate and framework 27, finally arrives local environment controlled area.Its surface area of high efficiency particulate air filter 14 is less than or equal to plenum chamber 13 ground floor.Its surface area of homogenating plate 15 is less than or equal to plenum chamber 13 second layer.
See accompanying drawing 3, homogenating plate 15 comprises cleaning lamp 23, gas bath hole 24.Wherein cleaning lamp 23 can select T5 type LED lamp tube, and power is not higher than 9W, and after avoiding the airflow passes fluorescent tube due to controlled area, fluorescent tube discharges a large amount of thermal source and affects temperature stability.
See accompanying drawing 4,2-4mm diameter can be selected in gas bath hole 24, and layout is neat, ensures the equal wind effect of airflow passes.
Sensor 16 comprises temperature sensor, humidity sensor, air velocity transducer, the cleanliness factor sensor of measuring air characteristics.Sensor 16 layout in controlled area middle position, higher than workbench 17.Branched thermistor type sensors selected by temperature sensor, for ensureing that temperature homogeneity measures requirement, places in the same horizontal line, uniform intervals 400mm.Air velocity transducer selects hot-wire type, obtains degree of precision measurement result.The all holding wires of sensor 16 are connected to main control unit 2 by LEMO connector 26, complete the closed loop control algorithm of main control unit 2 real-time data acquisition.
Claims (10)
1. an optical system local air environment control unit, is characterized in that, comprises human-computer interaction interface (1), main control unit (2), air conditioning feed unit (3) and environment control unit (4);
Be connected by serial communication bus (25) between described human-computer interaction interface (1) with main control unit (2), be connected by serial communication bus (25) between described main control unit (2) with air conditioning feed unit (3), serial communication bus (25) distance is 1-3m, described air conditioning feed unit (3) is connected by hose connector (12) with between environment control unit (4), hose connector (12) distance is 1-3m, signal by patching with LEMO connector (26) form between described environment control unit (4) and main control unit (2), power cable is connected, signal, power cable distance is 1-3m.
2. a kind of optical system local air environment control unit according to claim 1, it is characterized in that, described human-computer interaction interface (1) selects 7 cun, 10 cun, 12 cun and above size resistance-type or capacitive touch screen, run Embedded Configuration Software or work out embedded software voluntarily, perform observation and the control operation of user, and utilize the communication of user-defined format serial communication protocol by serial communication bus (25) and main control unit (2).
3. a kind of optical system local air environment control unit according to claim 1, it is characterized in that, described main control unit (2) selects PLC, ARM, DSP or other intelligent control units, it possesses at least 2 road serial communication bus (25) and connects the analytic ability with serial communication protocol, and smoothly can run pid control algorithm, meet signals collecting and the power supply of sensor (16), realize the closed-loop control of air conditioning feed unit (3) and environment control unit (4).
4. a kind of optical system local air environment control unit according to claim 1, it is characterized in that, described air conditioning feed unit (3) comprises filtration system (6), heating system (7), heat-exchange system (8), blower fan (9), possesses temperature, the natural wind (5) that humidity primary condition requires is successively by the filtration system (6) of air conditioning feed unit (3), heating system (7), heat-exchange system (8) and blower fan (9), and by air outlet (10), air supply after adjustment is sent in hose connector (12).
5. a kind of optical system local air environment control unit according to claim 4, it is characterized in that, described filtration system (6) comprises roughing-efficiency plate filter, dehydrating unit, board-like medium effeciency filter; Described heating system (7) comprises the electric heater that power adjustable joint controls; Described heat-exchange system (8) comprises board-like primary heat exchanger and board-like secondary heat exchanger, and its low-temperature receiver can select thermostatical circulating water machine.
6. a kind of optical system local air environment control unit according to claim 1, it is characterized in that, described environment control unit (4) is cube gas controlled area, comprises plenum chamber (13), sensor (16), 304 stainless steel square tubes (18), lucite (21), universal caster wheel (22), LEMO connector (26), 304 corrosion resistant plates and framework (27); Described 304 stainless steel square tubes (18) are controlled area general frame; 304 corrosion resistant plates and framework (27) are for controlled area is upper and lower and middle two-layer dividing plate; The four sides wall that lucite (21) is controlled area; Under universal caster wheel (22) is arranged on lower partition; LEMO connector (26) is arranged on any lucite (21).
7. a kind of optical system local air environment control unit according to claim 6, it is characterized in that, described 304 stainless steel square tube (18) cross-sectional areas are less than 5mm*5*mm, described lucite (21) thickness is 1-3mm, and described 304 corrosion resistant plates and framework (27) thickness are 1mm.
8. a kind of optical system local air environment control unit according to claim 6, it is characterized in that, described plenum chamber (13) comprises high efficiency particulate air filter (14) and homogenating plate (15), controlled airflow is first by being made up of the ground floor of plane high efficiency particulate air filter (14) and 304 corrosion resistant plates and framework (27), then by being made up of the second layer of plane homogenating plate (15) and 304 corrosion resistant plates and framework (27), finally arrival local environment controlled area; Described sensor (16) comprises temperature sensor, humidity sensor, air velocity transducer, the cleanliness factor sensor of measuring air characteristics.
9. a kind of optical system local air environment control unit according to claim 8, is characterized in that, the surface area of described high efficiency particulate air filter (14) is less than or equal to plenum chamber (13) ground floor; The surface area of homogenating plate (15) is less than or equal to plenum chamber (13) second layer.
10. a kind of optical system local air environment control unit according to claim 9, is characterized in that, described homogenating plate (15) comprises cleaning lamp (23) and gas bath hole (24); Described cleaning lamp (23) selects T5 type LED lamp tube, and gas bath hole (24) diameter is 2-4mm.
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| CN201510788370.0A CN105276769A (en) | 2015-11-17 | 2015-11-17 | Local environment control unit of optical system |
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| CN201510788370.0A CN105276769A (en) | 2015-11-17 | 2015-11-17 | Local environment control unit of optical system |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106123163A (en) * | 2016-06-27 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | Accurate gas control equipment and optics manufacture system |
| CN106196351A (en) * | 2016-06-29 | 2016-12-07 | 中国科学院长春光学精密机械与物理研究所 | Optics manufactures system |
| CN107664263A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | A kind of gas bath device and control method and application |
| CN107907989A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院长春光学精密机械与物理研究所 | Telescope and its primary mirror ring control device |
| CN108240681A (en) * | 2018-01-22 | 2018-07-03 | 德淮半导体有限公司 | Humidity conditioner and its temperature control system and photoetching equipment |
| CN109856918A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Interferometer gas bath device and litho machine |
| CN110068122A (en) * | 2019-03-21 | 2019-07-30 | 中国科学院微电子研究所 | A kind of gas bath device |
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| CN107907989A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院长春光学精密机械与物理研究所 | Telescope and its primary mirror ring control device |
| CN109856918A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Interferometer gas bath device and litho machine |
| CN108240681A (en) * | 2018-01-22 | 2018-07-03 | 德淮半导体有限公司 | Humidity conditioner and its temperature control system and photoetching equipment |
| CN110068122A (en) * | 2019-03-21 | 2019-07-30 | 中国科学院微电子研究所 | A kind of gas bath device |
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