CN106196351B - Optics manufacture system - Google Patents
Optics manufacture system Download PDFInfo
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- CN106196351B CN106196351B CN201610493994.4A CN201610493994A CN106196351B CN 106196351 B CN106196351 B CN 106196351B CN 201610493994 A CN201610493994 A CN 201610493994A CN 106196351 B CN106196351 B CN 106196351B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
- F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/30—Arrangement or mounting of heat-exchangers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/10—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/20—Humidity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
- F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
- F24F11/84—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers using valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/30—Velocity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2221/00—Details or features not otherwise provided for
- F24F2221/34—Heater, e.g. gas burner, electric air heater
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Drying Of Gases (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention discloses a kind of optics manufacture systems.Optics manufacture system includes: accurate gas control equipment, gas piping and environment control unit, in which: the both ends of gas piping are separately connected accurate gas control equipment and environment control unit；Accurate gas control equipment includes gas return path, gas return path further include: dehumidification device, for dehumidifying to the gas of input；Filter will be transported to environment control unit by gas piping by the gas of dehumidifying and purification filtering for carrying out purification filtering to the gas before dehumidifying and/or after dehumidifying, and further；Environment control unit includes: high efficiency particulate air filter, for being transported in required environment after the further purification filtering of the gas of conveying.By the above-mentioned means, the invention avoids accurate gas control equipments directly to control entire large environmental space, so as to cause waste of resource, environment control unit can only the gas humidity to the local environment controlled and cleanliness be controlled.
Description
Technical field
The present invention relates to ultra-precise optical manufacturing field technical fields, more particularly, to a kind of optics manufacture system.
Background technique
Ultra-precise optical manufacture refers to processing and manufacturing technology of the dimensional accuracy within 100nm, is mainly used in high-end dress
Standby manufacturing field.With the rapid development of aviation, precision instrument, optics and laser technology and artificial satellite gesture stability and
The process requirements of the high precision planes such as remote sensing device, photoetching and silicon wafer processing equipment, curved surface and complicated shape part are increasingly urgent to,
Ultra-precision Turning application range is growing, and its feature can be directly processed with Nanoscale Surface finish and sub-micron
The surface of stepped surface precision so as to realizing various optimization, high imaging quality optical systems, and promotes optical electronic device
Miniaturization, array and integrated.
In ultra-precise optical manufacturing process, when its design accuracy reaches submicron order even nanoscale, by ring
The major obstacle that error caused by border parameter especially temperature is just further increased at precision, such as ultra-precise optical member
Part surface testing technology.Feisuo interferometer surface shape measurement precision high-end at present can achieve λ/10~λ/100.Interference detection
Technical process and measurement result accuracy requirement all propose high demand to the index of environment.In addition, in fine motion motor, laser interference
In the super hot investment castings process core key technology such as instrument measuring system, coordinate measuring machine, high-precision displacement measurement system, by
Deformation unevenly is generated with fluctuation, drift in the spatial distribution of temperature, so as to cause kinematic error；Using laser interferometer as representative
Ultraprecise sensing, measuring device due to temperature, humidity, the spatial distribution of pressure is uneven generates measurement with fluctuation, drift and miss
Difference；Air particles pollution, chemical contamination and lead ultra-precise optical processing corroded, to influence to run.In addition to this, superfinishing
Processing, assembly precision are all high to environmental requirement in close optics manufacture system.Above situation has all reacted urgent need and has introduced environment control
System processed guarantees the realization of design accuracy and the stability of practical application.
Rule of thumb, for the index request of environmental Kuznets Curves during ultra-precise optical processing and manufacturing are as follows:
Temperature index: its control range be 18~24 DEG C, precision be better than ± 0.05 DEG C, stability be ± 0.025 DEG C/
5min, uniformity are ± 0.1 DEG C/1000mm.
Humidity index: its control range is < 70%RH.
Gas bath wind speed index: its control range is 0-0.5m/s, precision 0.1m/s.
Cleanliness index: J6 grades of purification/Class 1000.
Noise objective: inside gas bath≤50dB.
In the prior art, whole structural scheme is commonly designed using structure between three-dimensional " returning " word.Specifically, firstly, benefit
Transitional region is built with periphery of the thermostatic and humidistatic air conditioning unit group between super hot investment casting laboratory and the external world, in super hot investment casting
The upper of laboratory, the air buffer that the face of left, right, front and rear five (lower part is return side) formation temperature precision is ± 0.2 DEG C, are used
External environment influence caused by laboratory to be isolated to greatest extent.Then, using other set thermostatic and humidistatic air conditioning unit group
Controlled temperature, humidity-controlled and laminar flow treated air are provided to laboratory internal, to guarantee that laboratory is ± 0.02 DEG C final
Temperature accuracy and J6 clean level and other requirement.
But there is space waste, such as a 30m in above scheme2An only ultra-precise optical system in laboratory
Manufacturing apparatus needs high-precision environment 10m2, and above scheme will be to 30m2Environment controlled.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of optics manufacture system, can gas to local environment it is wet
Degree and cleanliness are controlled.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of optics manufacture system is provided, it should
Optics manufacture system includes: accurate gas control equipment, gas piping and environment control unit, in which: the gas piping
Both ends be separately connected the accurate gas control equipment and environment control unit；The precision gas control equipment includes: to remove
Wet device, at least partly vapor of the gas for adsorbing input, to dehumidify to the gas of input；Filter is used for
Purification filtering is carried out to by the gas before dehumidifying and/or after dehumidifying, and further will be through excess temperature control and purification filtering
Gas is transported to the environment control unit by the gas piping；The environment control unit includes: high efficiency particulate air filter, is used
It is transported in required environment after the further purification filtering of gas to the accurate gas control equipment conveying.
Wherein, environment control unit further include: temperature sensor, humidity sensor and air velocity transducer, respectively to ring
Temperature parameter, humidity parameter and the wind speed parameter in border are acquired and feed back to the accurate gas control equipment.
Wherein, filter for molten includes primary filter and medium effeciency filter, in which: the primary filter setting is removed described
Gas Jing Guo primary filtration for carrying out preliminary purification filtering to the gas of input, and is transported to institute by the front end of wet device
State dehumidification device；The rear end of the dehumidification device is arranged in the medium effeciency filter, for the gas by dehumidification device dehumidifying
Body carries out double purification filtering, to be transported in the environment control unit by the gas piping.
Wherein, the gas return path further includes heat exchanger, for carrying out temperature control to the gas of input.
Wherein, heat exchanger uses fin-tube heat exchanger, and the form of the heat exchanger, heat exchange area, front face area, total
Pipe range, water pipe number of rows and water pipe bore can be configured according to actual needs.
Wherein, gas return path further includes equal wind apparatus, centrifugal blower and electric heater, and the heat exchanger is changed including primary
Hot device and secondary heat exchanger, in which: the side of the equal wind apparatus is directly contacted with ambient air outside, the other side and it is described just
Effect filter is connected, and the equal wind apparatus is for outside air to be sent into inside the primary filter after homogenizing；Institute
The side for stating centrifugal blower is connect with the primary filter, and the other side is connected with the dehumidification device, the centrifugal blower
For providing suction to the gas filtered by preliminary purification；The side of the dehumidification device is connected with the centrifugal blower,
The other side is connected with the primary heat exchanger；The side of the primary heat exchanger is connect with the dehumidification device, the other side with
The electric heater connection, the primary heat exchanger are used to provide primary temperature stable temperature to the gas after dehumidifying
, to carry out primary gas temperature control；The side of the electric heater is connected with the primary heat exchanger, the other side and institute
It states secondary heat exchanger to be connected, the electric heater is used to carry out heat temperature raising control to by the temperature controlled gas of primary gas
System；The side of the secondary heat exchanger is connected with electric heater, and the other side is connected with the medium effeciency filter, the secondary
Heat exchanger is used to provide secondary temperature stable temperature field to the gas controlled by heat temperature raising, to carry out accurate gas temperature
Control；The side of the medium effeciency filter is connect with the secondary heat exchanger, and the other side is connect with the gas piping.
Wherein, accurate gas control equipment further includes fluid loop, and the fluid loop includes primary regulating valve and secondary
Regulating valve, in which: the primary regulating valve is connect by pipeline with the primary heat exchanger, and the primary regulating valve is for controlling
The flow of the circulation fluid of the primary heat exchanger is flowed in and out, to provide primary temperature stable temperature to the primary heat exchanger
Spend field；The secondary regulator valve connect by pipeline with the secondary heat exchanger, the secondary regulator valve for control inflow with
The flow of the circulation fluid of the secondary heat exchanger is flowed out, to provide secondary temperature stable temperature field to the secondary heat exchanger.
Wherein, accurate gas control equipment further includes main controller, the main controller respectively with the centrifugal blower, electric heating
Device, primary regulating valve and secondary regulator valve are connected, respectively to the heating of the air-supply air quantity, electric heater of the centrifugal blower
The flow of the circulation fluid of the flow and secondary regulator valve control for the circulation fluid that amount, primary regulating valve control is controlled.
Wherein, main controller is further passed with the temperature sensor, humidity sensor and wind speed of the environment control unit
Sensor connection, to receive the temperature parameter, humidity parameter and wind speed parameter and feed back to user.
Wherein, optics manufacture system further includes liquid constant-temperature control device, the liquid constant-temperature control device and the essence
Close gas control equipment is connected, for utilizing outer loop liquid to the gas temperature inside the accurate gas control equipment
It is controlled.
The beneficial effects of the present invention are: be in contrast to the prior art, the present invention provides a kind of optics manufacture system,
The optics manufacture system includes accurate gas control equipment, gas piping and environment control unit, wherein the two of gas piping
End is separately connected accurate gas control equipment and environment control unit；Accurate gas control equipment includes dehumidification device and filtering
Device, wherein dehumidification device is used to adsorb at least partly vapor of the gas of input, to dehumidify to the gas of input；Filtering
Device is used to carry out purification filtering to the gas before dehumidifying and/or after dehumidifying, and further will be by dehumidifying and purification filtering
Gas environment control unit is transported to by gas piping；Environment control unit includes high efficiency particulate air filter, for accurate gas
It is transported in required environment after the further purification filtering of gas of member control apparatus conveying.Therefore, the invention avoids precisions
Gas control equipment directly controls entire large environmental space, and so as to cause waste of resource, environment control unit can be only
The gas humidity and cleanliness of the local environment controlled are controlled.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of optics manufacture system provided in an embodiment of the present invention；
Fig. 2 is a kind of structural schematic diagram of accurate gas control equipment provided in an embodiment of the present invention；
Fig. 3 is a kind of ambient temperature change curve of optics manufacture system actual measurement of the invention；
Fig. 4 is temperature changing curve diagram after a kind of inside actual measurement of optics manufacture system of the invention is stablized.
Specific embodiment
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is a kind of structural schematic diagram of optics manufacture system provided in an embodiment of the present invention, figure
2 be a kind of structural schematic diagram of accurate gas control equipment provided in an embodiment of the present invention.As depicted in figs. 1 and 2, the present embodiment
Optics manufacture system 10 include accurate gas control equipment 100, gas piping 200 and environment control unit 300.
Wherein, the both ends of gas piping 200 are separately connected accurate gas control equipment 100 and environment control unit 300.Gas
Body pipeline 200 is preferably hose connection type, is moved easily.In other embodiments, gas piping 200 can also be fixing pipe
Road.
The side of accurate gas control equipment 100 is directly contacted with outside air, and the other side is connected with gas piping 200
It connects, accurate gas control equipment 100 after dehumidifying and purification for sending outside air to gas piping 200.Specifically, smart
Close gas control equipment 100 includes dehumidification device 4 and filter 28.Wherein dehumidification device 4 is used to adsorb the gas of input extremely
Small part vapor has the function that reduce gas humidity to dehumidify to the gas of input.Filter 28 is used for process
Gas before dehumidifying and/or after dehumidifying carries out purification filtering, and further will pass through gas by the gas of dehumidifying and purification filtering
Body pipeline 200 is transported to environment control unit 300.
Wherein, accurate gas control equipment 100 also homogenizes outside air, temperature controls etc., specifically will be rear
Text is described in detail.
Environment control unit 300 includes high efficiency particulate air filter 201, the gas for conveying to accurate gas control equipment 100
It is transported in required environment after further purification filtering.
Specifically, the air inlet of environment control unit 200 connects high efficiency particulate air filter 201, high efficiency particulate air filter 201 is used for essence
The gas that close gas control equipment 100 conveys is filtered, to improve the cleanliness of gas.The main mistake of high efficiency particulate air filter 201
0.1 μm and 0.3 μm or more dust grain in air filtration body.High efficiency particulate air filter 201 is replaceable, detachably.Gas is filled by environmental Kuznets Curves
It is discharged into the air environment at place after setting the section inside 200.
Optionally, environment control unit 300 can for one closing or semi-enclosed equipment, be disposed at laboratory or
In other working environments of person, then the ultra-precise optical manufacturing equipment for needing high-precision environment is placed in one, and then only to this
Ultra-precise optical manufacturing equipment provides high-precision environment.
Wherein, the size, size of environment control unit 300 can be adjusted according to practical application, and shape can be rectangle, pros
The regular shapes such as shape or irregular shape.Its size can be 3m3、6m3、9m3、15m3Several standard sizes.Thus its is applicable
Environment size includes 3m3、6m3、9m3And 15m3。
Therefore, the optics manufacture system 10 of the embodiment of the present invention is by by the device of the humid control of gas and purification, i.e.,
The device of accurate gas control equipment 100 and environmental Kuznets Curves, i.e. environment control unit 300 is separately provided, so that environment control
Device 300 processed, which can according to need, will carry out dehumidifying and purified acceptable gas is transported in required local environment, thus
Realization only controls required local environment, achievees the purpose that save resource.
Optics manufacture system 10 can be placed in the working environment of temperature accuracy of the ambient temperature range better than ± 2 DEG C
In, such as laboratory, the temperature accuracy of local environment is up to better than ± 0.05 DEG C.
Optionally, optics manufacture system 10 can also place external uncontrolled environment, then the temperature of local environment controls essence
Spend, inside/outside temperature change preferred proportion are as follows: 1:50 related to ambient temperature.
Optionally, accurate gas control equipment 100 can be configured according to calculating, and be connect with multiple environment control units 300, from
And it realizes and multiple local environments is controlled.
In the present embodiment, environment control unit 300 further includes that temperature sensor 202, humidity sensor 203 and wind speed pass
Sensor 204.
Temperature sensor 202, humidity sensor 203 and air velocity transducer 204 respectively join the temperature of local environment
Number, humidity parameter and wind speed parameter are acquired and feed back to accurate gas control equipment 100.Specifically, optics manufacture system
System 10 further includes Electric Wires & Cables 700, temperature sensor 202, humidity sensor 203 and air velocity transducer 204 particular by
Electric Wires & Cables 700 give collected information Real-time Feedback to accurate gas control equipment 100.
Optionally, temperature sensor 202, humidity sensor 203 and air velocity transducer 204 may respectively be one or more
It is a.When temperature sensor 202, humidity sensor 203 and air velocity transducer 204 are respectively multiple, it is uniformly arranged on ring
The different location of border control device 300.
In the present embodiment, accurate gas control equipment 100 includes gas return path 101.Wherein, before gas return path 101 includes
Dehumidification device 4 and filter 28 described in text.Further, filter for molten 28 includes primary filter 2 and medium effeciency filter 8.Its
In, the front end of dehumidification device 4 is arranged in primary filter 2, for carrying out preliminary purification filtering to the gas of input.Primarily efficient filter
Device 2 is mainly used for 5 μm of filtering with dust particles.The rear end of dehumidification device 4 is arranged in medium effeciency filter 8, for by removing
The gas that wet device 4 dehumidifies carries out double purification filtering, to pass through the gas piping 200 outside accurate gas control equipment 100
It is sent in environment control unit 300, wherein medium effeciency filter 8 is replaceable, detachably.In the present embodiment, filter 28 is board-like
Filter, folder filter and pocket type, filtering material are non-woven fabrics, nylon wire, activated carbon filter material and metal hole pattern.
In other embodiments, in order to reduce cost, a filter can also be only set, such as primarily efficient filter is only arranged
Medium effeciency filter 8 is only arranged in device 2, is filtered respectively to the gas before dehumidifying or after dehumidifying.
In the present embodiment, gas return path 101 further includes heat exchanger 57, for carrying out temperature control to the gas of input.This
In embodiment, heat exchanger 57 preferably uses fin-tube heat exchanger, and fin-tube heat exchanger usually has several rows and airflow direction to hang down
Straight, the finned finned tube composition in outside.And the form of heat exchanger 57, heat exchange area, front face area, total pipe range, water pipe row
The structural parameters such as several and water pipe bore can be configured according to actual needs.
Further, gas return path 101 further includes equal wind apparatus 1, centrifugal blower 3 and electric heater 6, and heat exchanger 57 wraps
Include primary heat exchanger 5 and secondary heat exchanger 7.Wherein it is sequentially connected sequence are as follows: equal wind apparatus 1, primary filter 2, centrifugal blower
3, dehumidification device 4, primary heat exchanger 5, electric heater 6, secondary heat exchanger 7 and medium effeciency filter 8.It is specific:
The side of equal wind apparatus 1 is directly contacted with ambient air outside, and the other side is connected with primary filter 2, equal wind
Outside air for being sent into 2 inside primary filter by device 1 after homogenizing.Equal wind apparatus 1 can improve the effect of heat exchanger 57
Rate and air themperature uniformity.
The side of centrifugal blower 3 is connect with primary filter 2, and the other side is connected with dehumidification device 4, and centrifugal blower 3 is used
Suction is provided in the gas filtered to process preliminary purification.Wherein, the sucking air quantity of centrifugal blower 3 is adjustable.Centrifugal blower 3 is sent
Wind air quantity can be configured according to the area of local environment, the i.e. size of environment control unit 300.
The side of dehumidification device 4 is connected with centrifugal blower 3, and the other side is connected with primary heat exchanger 5, dehumidification device 4
For adsorbing at least partly vapor of the gas after centrifugal blower 3, to have the function that reduce gas humidity.
The side of primary heat exchanger 5 is connect with dehumidification device 4, and the other side is connect with electric heater 6, and primary heat exchanger 5 is used
In providing primary temperature stable temperature field to the gas after dehumidifying, to carry out primary gas temperature control.
The side of electric heater 6 is connected with primary heat exchanger 5, and the other side is connected with secondary heat exchanger 7, electric heater
6 for carrying out heat temperature raising control to by the temperature controlled gas of primary gas.The heating amount of electric heater 6 is adjustable.
The side of secondary heat exchanger 7 is connected with electric heater 6, and the other side is connected with medium effeciency filter 8, secondary heat exchange
Device 7 is used to provide secondary temperature stable temperature field to the gas controlled by heat temperature raising, to carry out accurate gas temperature control
System.
The side of medium effeciency filter 8 is connect with secondary heat exchanger 7, and the other side connect 200 with gas piping.
Further, the accurate gas control equipment 100 of the present embodiment further includes fluid loop 102.Fluid loop 102 wraps
Include primary regulating valve 11 and secondary regulator valve 12.Wherein:
Primary regulating valve 11 is connect by pipeline with primary heat exchanger 5, and primary regulating valve 11 is flowed in and out for controlling
The flow of the circulation fluid of primary heat exchanger 5, specifically control flow in and out the circulation fluid of the coil arrangement of primary heat exchanger 5
Flow, to provide primary temperature stable temperature field to primary heat exchanger 5.Primary heat exchanger 5 mentions gas by coil arrangement
The stable temperature field of the primary temperature supplied, to carry out rough gas temperature control.
Secondary regulator valve 12 is connect by pipeline with secondary heat exchanger 7, and secondary regulator valve 12 is flowed in and out for controlling
The flow of the circulation fluid of secondary heat exchanger 7, specifically control flow in and out the circulation fluid of the coil arrangement of secondary heat exchanger 7
Flow, to provide secondary temperature stable temperature field to secondary heat exchanger 7.Secondary heat exchanger 7 mentions gas by coil arrangement
The stable temperature field of the secondary temperature supplied, to carry out accurate gas temperature control.
Further, accurate gas control equipment 100 further includes main controller 9.Main controller 9 adds with centrifugal blower 3, electricity respectively
Hot device 6, primary regulating valve 11 and secondary regulator valve 12 are connected.Specific main controller 9 be by controlling cable 13 respectively with from
Heart blower 3, electric heater 6, primary regulating valve 11 and secondary regulator valve 12 are connected.
Wherein, main controller 9 controls the switch, sucking air quantity and air-supply air quantity of centrifugal blower 3.Main controller 9 controls electricity and adds
The switch and heating amount of hot device 6.Main controller 9 controls the flow and secondary regulator valve 12 for the circulation fluid that primary regulating valve 11 controls
The flow of the circulation fluid of control carries out electrical control.
Further, temperature of the main controller 9 also by being arranged in 700 JA(junction ambient) control device 300 of electrical connection cable
Sensor 202, humidity sensor 203 and air velocity transducer 204, to obtain corresponding temperature, humidity and wind speed information.
Further, accurate gas control equipment 100 further includes touch screen 10.Main controller 9 is connected with touch screen 10, hair
It send the human-machine interaction data of the needs of touch screen 10 and receives the control instruction of touch screen 10.Touch screen 10 receives and real-time display master
The environmental data that device 9 is sent is controlled, and external staff is provided and controls operation.
In the present embodiment, optics manufacture system 10 further includes liquid constant-temperature control device 800, liquid constant-temperature control device
800 are connected with accurate gas control equipment 100, specifically with the inlet and liquid outlet phase of accurate gas control equipment 100
Connection, wherein inlet connects primary regulating valve 11, secondary regulator valve 12, and liquid outlet connects primary heat exchanger 5 and secondary heat exchange
Device 7.Liquid constant-temperature control device 800 is used for using outer loop liquid to the gas temperature inside accurate gas control equipment 100
Degree is controlled.
A kind of optical system device 10 is described above, by actual test, obtains one group of data, it is external referring to attached drawing 3
Variation of ambient temperature curve graph, the temperature change of external environment are as follows: maximum value (Max) is 22.74 DEG C, and minimum value (Min) is
19.63 DEG C, standard value (Std) is 0.7095, and average value (mean) is 20.59 DEG C, and intermediate value (median) is 20.42 DEG C, measurement
Being worth (PV) is 3.109 DEG C.The temperature variation data of the obtained environment control unit inside optical system are as follows: maximum value (Max)
It is 20.16 DEG C, minimum value (Min) is Min:20.02 DEG C, and average value (mean) is 20.12 DEG C, and standard value (Std) is
0.02872, measured value (PV) is 0.146 DEG C, referring specifically to attached drawing 4.Obtain humidity 14%RH, PV:1%RH；Cleanliness:
Class1000 rank；Noise 45db.By test result it is found that the optical system device 10 introduced above can satisfy ultraprecise
High-precision environment in optics manufacturing process, which controls, to be required.
In conclusion of the invention, the realization of optical system device 10 needs superhigh precision to ultra-precise optical manufacturing process
The region of environment is controlled, provide the temperature of local stability, humidity, pressure, wind speed, cleanliness gas bath environment.Mainly answer
For high occasions of environmental Kuznets Curves required precision such as the processing of ultra-precise optical manufacture system, assembly, meet ultra-precise optical system
The index request for making normal processes ensures the realization of design accuracy and the stability of practical application, and design cannot before solving
It is mobile, build and the problems such as maintenance cost is high, space waste.The present invention has the advantages that high (the temperature of local air environment control precision
Degree is better than ± 0.05 DEG C, class1000 grades of cleanliness), expense is low, and low energy consumption, moves, and it is easy to operate, it is easy to maintain.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (7)
1. a kind of optics manufacture system, which is characterized in that the optics manufacture system includes: accurate gas control equipment, gas
Pipeline and environment control unit, in which:
The both ends of the gas piping are separately connected the accurate gas control equipment and environment control unit；
The precision gas control equipment includes gas return path, and the gas return path includes:
Dehumidification device, at least partly vapor of the gas for adsorbing input, to dehumidify to the gas of input；
Filter, for through dehumidifying before and/or dehumidifying after gas carry out purification filtering, and further will by dehumidifying and
The gas of purification filtering is transported to the environment control unit by the gas piping；
The environment control unit includes:
High efficiency particulate air filter, needed for being transported to after the further purification filtering of gas to the accurate gas control equipment conveying
Environment in；
The filter includes primary filter and medium effeciency filter, in which:
The front end of the dehumidification device is arranged in the primary filter, for carrying out preliminary purification filtering to the gas of input,
And the gas Jing Guo primary filtration is transported to the dehumidification device；
The rear end of the dehumidification device is arranged in the medium effeciency filter, for carrying out two to the gas by dehumidification device dehumidifying
Secondary purification filtering, to be transported in the environment control unit by the gas piping；
The gas return path further includes heat exchanger, for carrying out temperature control to the gas of input；
The gas return path further includes equal wind apparatus, centrifugal blower and electric heater, and the heat exchanger includes primary heat exchanger
And secondary heat exchanger, in which:
The side of the equal wind apparatus is directly contacted with ambient air outside, and the other side is connected with the primary filter, institute
Equal wind apparatus is stated for outside air to be sent into inside the primary filter after homogenizing；
The side of the centrifugal blower is connect with the primary filter, and the other side is connected with the dehumidification device, it is described from
Heart blower is used to provide suction to the gas filtered by preliminary purification；
The side of the dehumidification device is connected with the centrifugal blower, and the other side is connected with the primary heat exchanger；
The side of the primary heat exchanger is connect with the dehumidification device, and the other side is connect with the electric heater, the primary
Heat exchanger is used to provide primary temperature stable temperature field to the gas after dehumidifying, to carry out primary gas temperature control；
The side of the electric heater is connected with the primary heat exchanger, and the other side is connected with the secondary heat exchanger, institute
Electric heater is stated for carrying out heat temperature raising control to by the temperature controlled gas of primary gas；
The side of the secondary heat exchanger is connected with electric heater, and the other side is connected with the medium effeciency filter, and described time
Grade heat exchanger is used to provide secondary temperature stable temperature field to the gas controlled by heat temperature raising, to carry out accurate gas temperature
Degree control；
The side of the medium effeciency filter is connect with the secondary heat exchanger, and the other side is connect with the gas piping.
2. optics manufacture system according to claim 1, which is characterized in that the environment control unit further include:
Temperature sensor, humidity sensor and air velocity transducer, respectively to the temperature parameter of environment, humidity parameter and wind speed
Parameter is acquired and feeds back to the accurate gas control equipment.
3. optics manufacture system according to claim 1, which is characterized in that the heat exchanger is exchanged heat using fin tube type
Device, and the form of the heat exchanger, heat exchange area, front face area, total pipe range, water pipe number of rows and water pipe bore can be according to practical need
It is configured.
4. optics manufacture system according to claim 1, which is characterized in that the precision gas control equipment further includes liquid
Body circuit, the fluid loop include primary regulating valve and secondary regulator valve, in which:
The primary regulating valve is connect by pipeline with the primary heat exchanger, and the primary regulating valve is flowed into and flowed for controlling
The flow of the circulation fluid of the primary heat exchanger out, to provide primary temperature stable temperature field to the primary heat exchanger；
The secondary regulator valve is connect by pipeline with the secondary heat exchanger, and the secondary regulator valve is flowed into and flowed for controlling
The flow of the circulation fluid of the secondary heat exchanger out, to provide secondary temperature stable temperature field to the secondary heat exchanger.
5. optics manufacture system according to claim 4, which is characterized in that the precision gas control equipment further includes master
Device is controlled, the main controller is connected with the centrifugal blower, electric heater, primary regulating valve and secondary regulator valve respectively, point
The flow of the circulation fluid of other air-supply air quantity, the heating amount of electric heater, primary regulating valve control to the centrifugal blower and
The flow of the circulation fluid of secondary regulator valve control is controlled.
6. optics manufacture system according to claim 5, which is characterized in that the main controller further with the environment control
The temperature sensor of device processed, humidity sensor and air velocity transducer connection, with receive the temperature parameter, humidity parameter with
And wind speed parameter and feed back to user.
7. optics manufacture system according to claim 1, which is characterized in that the optics manufacture system further includes liquid constant
Temperature control device, the liquid constant-temperature control device is connected with the accurate gas control equipment, for utilizing outer loop
Liquid controls the gas temperature inside the accurate gas control equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610493994.4A CN106196351B (en) | 2016-06-29 | 2016-06-29 | Optics manufacture system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610493994.4A CN106196351B (en) | 2016-06-29 | 2016-06-29 | Optics manufacture system |
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| CN106196351A CN106196351A (en) | 2016-12-07 |
| CN106196351B true CN106196351B (en) | 2019-03-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610493994.4A Expired - Fee Related CN106196351B (en) | 2016-06-29 | 2016-06-29 | Optics manufacture system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110068122B (en) * | 2019-03-21 | 2020-12-29 | 中国科学院微电子研究所 | Air bath device |
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| EP2381311A2 (en) * | 2010-04-23 | 2011-10-26 | Canon Kabushiki Kaisha | Exposure apparatus, device manufacturing method using same, and gas supply device |
| CN102230659A (en) * | 2011-06-02 | 2011-11-02 | 中国电器科学研究院有限公司 | Method for controlling energy-saving precision constant-temperature and constant-humidity air conditioner and air conditioner thereof |
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| CN106196351A (en) | 2016-12-07 |
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