CN105239051B - Two-way disengaging alternate plating device and method - Google Patents
Two-way disengaging alternate plating device and method Download PDFInfo
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Abstract
The present invention discloses a kind of two-way disengaging alternate plating device and method, its device is to be symmetrical arranged sequentially connected surge chamber, input and output material room and input and output material frame at coating chamber both ends, the charging and discharging positioned at the input and output material frame of coating chamber the same end, input and output material room and the same workpiece of surge chamber complete independently or same group of workpiece；It is equipped with the transmission roller group of Bidirectional driving in coating chamber, the same workpiece or same group of workpiece is driven to move back and forth in coating chamber, carries out multicoating.Its method is in coating chamber one end, and workpiece sequentially enters input and output material frame, input and output material room, surge chamber and coating chamber, drives workpiece to move back and forth carry out multicoating by transmission roller group in coating chamber；After completing plated film, workpiece counter motion is sent out；Meanwhile it being conveyed by corresponding input and output material frame positioned at the workpiece of the coating chamber other end；The workpiece at coating chamber both ends alternately enters coating chamber, carries out coating film treatment.The present invention can meet the thick film requirement of magnetic material, and can effectively improve processing efficiency.
Description
Technical field
The present invention relates to high-volume or the coating technique field of large area thick film, in particular to a kind of two-way disengaging is alternately plated
Film device and method.
Background technique
Although vacuum coating technology has obtained more and more applications in recent years, due to the deposition rate of vacuum coating
Lower, the reasons such as equipment input cost height still fail universal use in certain field of surface treatment.Such as：For high-volume or
The field of large area thick film (thicknesses of layers is at 1 μm or more) plated film.Specifically such as：The surface anticorrosion of magnetic material is handled, at present also
It is to use the conventional surfaces such as water power plating, electrophoresis processing work for main skill, but these traditional process of surface treatment processing procedures are not environmentally,
The needs of social development are not met.
It is uniform due to film layer to be considered otherwise for the vacuum coating processing of the workpiece of some three-dimensional shapes
Property, it is to be surface-treated using the box type vacuum filming equipment with public rotation rotating mechanism all the time.But it is inevitable because
The defects of fixing for clamping to be carried out and cause workpiece surface part thicknesses of layers insufficient, and influence at the surface of final products
Manage quality.In addition the process heavy workload of clamping workpiece, time-consuming, causes working efficiency low, and may be because rotary course
Falling for workpiece leads to problems such as rejection rate increase.Therefore no catcher mark, high-volume high efficiency production, low operating cost are designed
Automation vacuum coating equipment has great meaning.
Summary of the invention
That it is an object of the invention to overcome the deficiencies of the prior art and provide a kind of production efficiencys is higher, magnetic material can be achieved
Material high-volume or the two-way disengaging alternate plating device of large area thick film production.
Another object of the present invention is to provide a kind of two-way disengaging alternate plating methods realized by above-mentioned apparatus.
The technical scheme is that：A kind of two-way disengaging alternate plating device, including it is input and output material frame, input and output material room, slow
Room and coating chamber are rushed, coating chamber both ends are symmetrical arranged sequentially connected surge chamber, input and output material room and input and output material frame, are located at coating chamber
The input and output material frame, input and output material room and surge chamber of the same end form an independent work conveyance system, the same work of complete independently
The charging and discharging of part or same group of workpiece；The indoor lower part of plated film is equipped with the transmission roller group of Bidirectional driving, by being driven roller group
It drives the same workpiece or same group of workpiece to move back and forth in coating chamber, carries out multicoating.By being arranged in coating chamber
The transmission roller group of Bidirectional driving makes workpiece move back and forth carry out plated film, the thickness of workpiece surface film plating layer can be made in time processing
In just reach requirement, not only production efficiency is improved, and product quality is also improved；Meanwhile it being set respectively at coating chamber both ends
Two sets of independent work conveyance systems, and two sets of work conveyance system alternate runs are set, production efficiency can be effectively improved, significantly
Improve production capacity.
The indoor top of plated film is equipped with more set magnetic controlled sputtering targets, the target of magnetic controlled sputtering target be single block-like target or
The Double runway type heavy caliber that muti-piece splices shape rotates cylindrical target, and the difficulty of processing of rare metal can be greatly lowered, and improves rare
Metal utilization.
The transmission roller group includes multiple live-rollers arranged side by side, and each live-roller respectively includes live-roller set and live-roller
Axis, live-roller are sheathed on drive roller shaft periphery, and support base is respectively set in drive roller shaft both ends, and drive roller shaft one end passes through driving wheel
Driving mechanism identical with existing equipment can be used in external driving mechanism, driving mechanism.
The drive roller shaft both ends further respectively have insulating base, insulating base be located at support base and live-roller set end face it
Between.
The both ends of the live-roller further respectively have barricade, and each barricade is respectively arranged on above support base.
It is equipped with vacuum lock between the input and output material frame and input and output material room, also is provided with vacuum between input and output material room and surge chamber
Lock, coating chamber are connected to the vacuum chamber to be formed and be connected with the surge chamber at its both ends.The general vacuum in current market can be used in vacuum lock
Lock.
Input and output material room side is equipped with and vacuumizes unit, and surge chamber or coating chamber side also are provided with vacuumizing unit, into
Ion processing component is equipped in discharge chamber.Vacuumize unit and ion processing component be all made of with used by existing coating apparatus
Vacuumize unit and ion processing component.
Input and output material room side is additionally provided with the quickly cooling device of convection current Cooling Mode, and quickly cooling device includes
The compressor and condenser being connected, the outlet end of compressor are also connect with the side of input and output material room, and the outlet end of condenser is logical
Supercooling pipe is connect with the other side of input and output material room；
When input and output material room is in feed state, unlatching vacuumizes unit and carries out vacuumize process to input and output material room；When into
When discharge chamber is in discharge state, opens quickly cooling device and processing is rapidly cooled to workpiece.
The two-way disengaging alternate plating method realized by above-mentioned apparatus, includes the following steps：
(1) workpiece is sent into input and output material room by input and output material frame, first carries out vacuumize process to input and output material room, then to workpiece table
Face carries out ion processing；
(2) workpiece is then sequentially sent to surge chamber and coating chamber, by being driven the drive of roller group, workpiece is in coating chamber
It moves back and forth, carries out multicoating；
(3) after completing plated film, workpiece counter motion is sequentially sent to surge chamber and input and output material room；Meanwhile it is another to be located at coating chamber
The workpiece of one end is conveyed by corresponding input and output material frame；
(4) it when the workpiece of completion plated film enters input and output material room, is rapidly cooled in input and output material room, is then sent to disengaging
Expect frame, sends out two-way disengaging alternate plating device；
(5) step (1) to (4) are repeated, the workpiece positioned at coating chamber both ends alternately enters coating chamber, carries out coating film treatment.
In the step (4), when being rapidly cooled to the workpiece for completing plated film, it is quickly cooled down using inert gas convection current
Mode, cooling efficiency is higher, the slice speed of workpiece can be improved, and be greatly lowered workpiece surface absorption magazine energy
Power effectively improves product quality.
The present invention compared with the existing technology, has the advantages that：
This two-way disengaging alternate plating device and method uses the form processing of coating chamber both ends alternate feed and discharging, leads to
It crosses and is respectively formed two sets of mutually independent work conveyance systems at coating chamber both ends, realize the mode that both-end independently passes in and out, a side
Face can satisfy the thick film requirement of magnetic material, on the other hand can effectively improve the processing efficiency of workpiece, increase substantially production capacity.
In this two-way disengaging alternate plating device, by be arranged in coating chamber can way traffic transmission roller group, realize
Workpiece moves back and forth in coating chamber and carries out multicoating, not only can effective guarantee film plating layer thickness meet the requirements, can also be with
The interference for effectively reducing outer bound pair workpiece effectively improves the technique repetition stability of production efficiency and product.
In this two-way disengaging alternate plating device, by the way that more set magnetic controlled sputtering targets are arranged in coating chamber, make its target
The Double runway type heavy caliber of single block-like target or muti-piece splicing shape rotates cylindrical target, and the processing of rare metal can be greatly lowered
Difficulty improves rare metal utilization rate and production efficiency.
In this two-way disengaging alternate plating device, disengaging piece is all made of the mode of inert gas convection current rapid cooling, cold
But efficiency is higher, and the slice speed of workpiece can be improved, and the ability of workpiece surface absorption magazine is greatly lowered, and effectively improves
Product quality.
In this two-way disengaging alternate plating device, since workpiece is usually polyhedron 3D shape, it is related to turn-over plating
Film passes in and out structure using both-end, can use waiting time completion flaps process, production efficiency is greatly improved.
It is thicker to can also be applied to film plating layer requirement in addition to being applied to magnetic material plated film for this two-way disengaging alternate plating device
Other types workpiece plated film, application range is wider.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of this two-way disengaging alternate plating Installation practice 1.
Fig. 2 is the structural schematic diagram of the enterprising discharge chamber in the direction A and quickly cooling device in Fig. 1.
Fig. 3 is the indoor structural schematic diagram of plated film on the direction A in Fig. 1.
Fig. 4 is the structural schematic diagram that Double runway type heavy caliber rotates cylindrical target in Fig. 3.
Fig. 5 is the structural schematic diagram of this two-way disengaging alternate plating Installation practice 2.
Specific embodiment
Below with reference to embodiment, the present invention is described in further detail, and embodiments of the present invention are not limited thereto.
Embodiment 1
A kind of two-way disengaging alternate plating device of the present embodiment, as shown in Figure 1, including input and output material frame 1, input and output material room 2, delaying
Room 3 and coating chamber 4 are rushed, coating chamber both ends are symmetrical arranged sequentially connected surge chamber, input and output material room and input and output material frame, are located at plated film
The input and output material frame, input and output material room and surge chamber of room the same end form an independent work conveyance system, and complete independently is same
The charging and discharging of workpiece or same group of workpiece；The indoor lower part of plated film is equipped with the transmission roller group of Bidirectional driving, passes through live-roller
Group drives the same workpiece or same group of workpiece to move back and forth in coating chamber, carries out multicoating.By being set in coating chamber
The transmission roller group for setting Bidirectional driving makes workpiece move back and forth carry out plated film, and the thickness of 5 surface coating layer of workpiece can be made once to add
Just reach requirement in work, not only production efficiency is improved, and product quality is also improved；Meanwhile distinguishing at coating chamber both ends
Two sets of independent work conveyance systems, and two sets of work conveyance system alternate runs are set, production efficiency can be effectively improved, substantially
Degree improves production capacity.
Wherein, the indoor top of plated film is equipped with more set magnetic controlled sputtering targets 6, and the target of magnetic controlled sputtering target is single block-like target
Or the Double runway type heavy caliber of muti-piece splicing shape rotates cylindrical target (as shown in Figures 3 and 4), and rare metal can be greatly lowered
Difficulty of processing improves rare metal utilization rate.
Being driven roller group includes multiple live-rollers arranged side by side, as shown in figure 3, each live-roller respectively includes live-roller set 7
With drive roller shaft 8, live-roller is sheathed on drive roller shaft periphery, and support base 9, drive roller shaft one end is respectively set in drive roller shaft both ends
By the external driving mechanism of driving wheel 10, driving mechanism identical with existing equipment is can be used in driving mechanism.Drive roller shaft both ends
Insulating base 11 is further respectively had, insulating base is located between support base and the end face of live-roller set.The both ends of live-roller are also set respectively
There is barricade 12, each barricade is respectively arranged on above support base.
As shown in Figure 1, being equipped with vacuum lock 13 between input and output material frame and input and output material room, also set between input and output material room and surge chamber
There is vacuum lock, coating chamber is connected to the vacuum chamber to be formed and be connected with the surge chamber at its both ends.It is general that current market can be used in vacuum lock
Vacuum lock.
Input and output material room side is equipped with and vacuumizes unit 14, and surge chamber or coating chamber side also are provided with vacuumizing unit, disengaging
Material is indoor to be equipped with ion processing component.It vacuumizes unit and ion processing component is all made of and pumping used by existing coating apparatus
Vacuum pump set and ion processing component.
Input and output material room side is additionally provided with the quickly cooling device 15 of convection current Cooling Mode, as shown in Fig. 2, being quickly cooled down
Device includes the compressor 17 and condenser 18 being connected, and the outlet end of compressor is also connect with the side of input and output material room, condensation
The outlet end of device is connect by cooling tube 19 with the other side of input and output material room；When input and output material room is in feed state, opens and take out
Vacuum pump set carries out vacuumize process to input and output material room；When input and output material room is in discharge state, quickly cooling device pair is opened
Workpiece is rapidly cooled processing.
The present embodiment realizes a kind of two-way disengaging alternate plating method by above-mentioned apparatus, as illustrated by the arrows in fig. 1, packet
Include following steps：
(1) workpiece is sent into input and output material room by input and output material frame, first carries out vacuumize process to input and output material room, then to workpiece table
Face carries out ion processing；
(2) workpiece is then sequentially sent to surge chamber and coating chamber, by being driven the drive of roller group, workpiece is in coating chamber
It moves back and forth, carries out multicoating；
(3) after completing plated film, workpiece counter motion is sequentially sent to surge chamber and input and output material room；Meanwhile it is another to be located at coating chamber
The workpiece of one end is conveyed by corresponding input and output material frame；
(4) it when the workpiece of completion plated film enters input and output material room, is rapidly cooled in input and output material room, is then sent to disengaging
Expect frame, sends out two-way disengaging alternate plating device；When being rapidly cooled to the workpiece for completing plated film, using inert gas convection current
The mode of rapid cooling, cooling efficiency is higher, and the slice speed of workpiece can be improved, and workpiece surface absorption is greatly lowered
The ability of magazine, effectively improves product quality；
(5) step (1) to (4) are repeated, the workpiece 5 positioned at coating chamber both ends alternately enters coating chamber, carries out coating film treatment.
Embodiment 2
A kind of two-way disengaging alternate plating device of the present embodiment, as shown in figure 5, compared with Example 1 compared with difference
It is：There are two coating chambers 4, is respectively cooperating with work conveyance system (i.e. input and output material frame, input and output material room and the buffering of its left and right ends
Room) it uses, meanwhile, the lateral surface of two coating chambers further respectively has surge chamber, it can be achieved that the friendship in plated film of left and right ends workpiece
The plated film back and forth of change place, greatly improves production efficiency.
Embodiment 3
A kind of two-way disengaging alternate plating device of the present embodiment, compared with Example 2 compared with, the difference is that：Two
Surge chamber on the outside of coating chamber is for an entirety, it can be achieved that the plated film back and forth of left and right ends workpiece circulation conversion position, substantially mentions
High efficiency.
As described above, the present invention can be better realized, above-described embodiment is only presently preferred embodiments of the present invention, is not used
To limit practical range of the invention；It is i.e. all according to equivalent changes and modifications made by the content of present invention, all wanted for right of the present invention
Range claimed is asked to be covered.
Claims (7)
1. two-way disengaging alternate plating device, which is characterized in that including input and output material frame, input and output material room, surge chamber and coating chamber, plating
Film room both ends are symmetrical arranged sequentially connected surge chamber, input and output material room and input and output material frame, the input and output material positioned at coating chamber the same end
The charging and discharging of frame, input and output material room and the same workpiece of surge chamber complete independently or same group of workpiece；The indoor lower part of plated film
Transmission roller group equipped with Bidirectional driving drives the same workpiece or same group of workpiece to backhaul in coating chamber by transmission roller group
It is dynamic, carry out multicoating；
The indoor top of plated film is equipped with more set magnetic controlled sputtering targets, and the target of magnetic controlled sputtering target is single block-like target or muti-piece
The Double runway type heavy caliber for splicing shape rotates cylindrical target；
The transmission roller group includes multiple live-rollers arranged side by side, and each live-roller respectively includes live-roller set and drive roller shaft,
Live-roller is sheathed on drive roller shaft periphery, and support base is respectively set in drive roller shaft both ends, and drive roller shaft one end passes through outside driving wheel
Connect driving mechanism；
The method that two-way disengaging alternate plating device is realized includes the following steps：
(1) workpiece by input and output material frame be sent into input and output material room, first to input and output material room carry out vacuumize process, then to workpiece surface into
Row ion processing；
(2) workpiece is then sequentially sent to surge chamber and coating chamber, by being driven the drive of roller group, workpiece in coating chamber back and forth
Movement carries out multicoating；
(3) after completing plated film, workpiece counter motion is sequentially sent to surge chamber and input and output material room；Meanwhile being located at the coating chamber other end
Workpiece conveyed by corresponding input and output material frame；
(4) it when the workpiece of completion plated film enters input and output material room, is rapidly cooled in input and output material room, is then sent to input and output material
Frame sends out two-way disengaging alternate plating device；
(5) step (1) to (4) are repeated, the workpiece positioned at coating chamber both ends alternately enters coating chamber, carries out coating film treatment.
2. two-way disengaging alternate plating device according to claim 1, which is characterized in that the drive roller shaft both ends are also divided
Not She You insulating base, insulating base be located at support base and live-roller set end face between.
3. two-way disengaging alternate plating device according to claim 1, which is characterized in that the both ends of the live-roller are also divided
Not She You barricade, each barricade is respectively arranged on above support base.
4. two-way disengaging alternate plating device according to claim 1, which is characterized in that the input and output material frame and input and output material
It is equipped with vacuum lock between room, vacuum lock also is provided between input and output material room and surge chamber, coating chamber is connected to the surge chamber at its both ends
Form connected vacuum chamber.
5. two-way disengaging alternate plating device according to claim 4, which is characterized in that input and output material room side is equipped with
Unit is vacuumized, surge chamber or coating chamber side also are provided with vacuumizing unit, are equipped with ion processing component in input and output material room.
6. two-way disengaging alternate plating device according to claim 5, which is characterized in that input and output material room side is also set
There is the quickly cooling device of convection current Cooling Mode, quickly cooling device includes the compressor and condenser being connected, compression
The outlet end of machine is also connect with the side of input and output material room, and the outlet end of condenser is connected by the other side of cooling tube and input and output material room
It connects；
When input and output material room is in feed state, unlatching vacuumizes unit and carries out vacuumize process to input and output material room；Work as input and output material
When room is in discharge state, opens quickly cooling device and processing is rapidly cooled to workpiece.
7. two-way disengaging alternate plating device according to claim 1, which is characterized in that in the step (4), to completion
When the workpiece of plated film is rapidly cooled, by the way of inert gas convection current rapid cooling.
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| CN110878408A (en) * | 2019-12-23 | 2020-03-13 | 众鼎瑞展电子科技(深圳)有限公司 | Horizontal vertical magnetron sputtering coating equipment |
| CN112359340A (en) * | 2020-10-30 | 2021-02-12 | 湘潭宏大真空技术股份有限公司 | Coating system applied to plate-type workpiece |
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| CN115058698B (en) * | 2022-06-06 | 2023-05-09 | 广东腾胜科技创新有限公司 | Winding type vacuum coating machine |
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Effective date of registration: 20211129 Address after: 526000 room 336, third floor, oxygen bar Mingxuan Garden Club B, Kengkou new town, Dinghu District, Zhaoqing City, Guangdong Province Patentee after: GUANGDONG TENGSHENG TECHNOLOGY INNOVATION Co.,Ltd. Address before: 526060 binri industrial village, Duanzhou 1st Road, Zhaoqing City, Guangdong Province Patentee before: GUANGDONG TENGSHENG VACUUM TECHNOLOGY ENGINEERING CO.,LTD. |