CN110438459B - Horizontal vacuum coating machine - Google Patents
Horizontal vacuum coating machine Download PDFInfo
- Publication number
- CN110438459B CN110438459B CN201910748001.7A CN201910748001A CN110438459B CN 110438459 B CN110438459 B CN 110438459B CN 201910748001 A CN201910748001 A CN 201910748001A CN 110438459 B CN110438459 B CN 110438459B
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- Prior art keywords
- vacuum coating
- workpiece
- loading
- unloading
- horizontal vacuum
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The application discloses a horizontal vacuum coating machine which comprises a horizontal vacuum coating chamber and two workpiece loading and unloading mechanisms, wherein two sides of the horizontal vacuum coating chamber are provided with an openable loading and unloading opening, and the two workpiece loading and unloading mechanisms are arranged corresponding to the loading and unloading openings and can alternately feed workpieces into the horizontal vacuum coating chamber. The vacuum coating machine changes the traditional vertical structure into the horizontal structure, does not need to build a high platform, is convenient for workers to load and unload workpieces, is favorable for ensuring safe production, and is simultaneously provided with two workpiece loading and unloading mechanisms, so that the loading and unloading can be alternately carried out, the production efficiency is high, the workshop requirement is reduced, the production cost is reduced, and the practicability is high.
Description
Technical Field
The application belongs to the technical field of vacuum coating machines, and particularly relates to a horizontal vacuum coating machine.
Background
The sputtering vacuum coating machine is one of common vacuum coating equipment, the traditional sputtering vacuum coating machine is of a vertical structure, and when a processed workpiece is of a tubular structure or a strip-shaped structure, the coating machine is arranged by adopting a structure of upper-end feeding and discharging, so that a high table is usually required to be built on one side of the coating machine in the actual operation process, and workers can conveniently load and unload the workpiece after the workpiece is moved on a rotating table frame in the vacuum coating chamber. Because a plurality of workpieces are generally arranged on the rotating table frame, the coating machine with the structure and the mode design needs to consume a long time when loading and unloading the workpieces each time, and the production efficiency is affected. And the high operation of the worker has potential safety hazard, which is unfavorable for the safe production. Meanwhile, when tubular workpieces or strip-shaped workpieces are produced, the vertical coating machine is higher in height, a space for the rotating table frame to move upwards is reserved above the coating machine, the height requirement on a production workshop is high, and the production cost is indirectly improved.
Disclosure of Invention
In order to solve the problems, the application provides a horizontal vacuum coating machine, which comprises a horizontal vacuum coating chamber and two workpiece loading and unloading mechanisms, wherein two sides of the horizontal vacuum coating chamber are provided with an openable loading and unloading opening, and the two workpiece loading and unloading mechanisms are arranged corresponding to the loading and unloading openings and can alternately feed workpieces into the horizontal vacuum coating chamber.
Preferably, a movable door capable of opening and closing the feeding and discharging openings is arranged on the horizontal vacuum coating chamber, and a shielding structure capable of closing the feeding and discharging openings is arranged at one end, away from the horizontal vacuum coating chamber, of the workpiece feeding and discharging mechanism.
Preferably, a guiding mechanism is arranged in the horizontal vacuum coating chamber and used for guiding the movement of the workpiece loading and unloading mechanism.
Preferably, the guiding mechanism is provided with at least two sliding rails, and the workpiece loading and unloading mechanism is provided with pulleys matched with the sliding rails.
Preferably, the sliding rail is provided with an adjusting structure for adjusting the height of the sliding rail and the width between the two sliding rails.
Preferably, the workpiece loading and unloading mechanism is provided with a moving device at the outer side of the horizontal vacuum coating chamber, and the moving device is provided with a driving component for driving the workpiece loading and unloading mechanism to enter and exit the horizontal vacuum coating chamber and a supporting component for supporting the workpiece loading and unloading mechanism after the workpiece loading and unloading mechanism exits the sliding rail.
Preferably, the driving assembly comprises a guide rail fixedly arranged relative to the horizontal vacuum coating chamber, a roller and a driving motor, wherein the roller is arranged on the guide rail in a sliding mode, the driving motor drives the roller to rotate, and the supporting assembly is a plurality of fixed pulleys arranged on the guide rail in a lifting mode.
Preferably, the workpiece loading and unloading mechanism is provided with a mounting frame and a rotating rack, the rotating rack is rotatably mounted on the mounting frame around a horizontal shaft, and a workpiece mounting structure for mounting a workpiece is arranged on the rotating rack, and the workpiece mounting structure is linked with the rotating rack, so that the rotating rack rotates along with the workpiece mounting structure when rotating.
Preferably, the turntable frame is provided with two turntable assemblies and a plurality of connecting rods, the two turntable assemblies are symmetrically arranged at two ends of the connecting rods, so that a workpiece loading space is formed between the two turntable assemblies, each turntable assembly comprises a fixed gear ring, a revolution gear ring, a transmission assembly and a rotation seat assembly, the inner rings of the fixed gear ring and the revolution gear ring are respectively provided with gear teeth, the fixed gear rings are fixedly arranged on the mounting frame, the rotation seat assemblies are provided with a plurality of transmission gears which are circumferentially distributed on the revolution gear ring and are meshed with the fixed gear ring, the revolution gear ring is matched and arranged on the fixed gear ring through the matching of the transmission gears and the fixed gear ring, the transmission assembly is provided with a driving gear which is meshed with the revolution gear ring, and the rotation seat assemblies on the turntable assemblies form the workpiece mounting structure.
Preferably, the workpiece mounting structure is provided with a clamping sleeve and a clamping sleeve corresponding to the clamping sleeve, and the clamping sleeve is provided with a detachable semi-cylindrical side wall.
The beneficial effects of the application are as follows:
the vacuum coating machine changes the traditional vertical structure into the horizontal structure, does not need to build a high platform, is convenient for workers to load and unload workpieces, is favorable for ensuring safe production, and is simultaneously provided with two workpiece loading and unloading mechanisms, so that the loading and unloading can be alternately carried out, the production efficiency is high, the workshop requirement is reduced, the production cost is reduced, and the practicability is high.
Drawings
The application is further illustrated by the following examples in conjunction with the accompanying drawings:
FIG. 1 is a schematic view of the overall structure of the present application;
FIG. 2 is a schematic diagram of the cooperation between the workpiece loading and unloading mechanism and the horizontal vacuum coating chamber;
FIG. 3 is a schematic view of the installation of a slide rail;
FIG. 4 is a schematic view of a structure of a slide rail;
FIG. 5 is a schematic view of a structure of the turret frame;
FIG. 6 is a schematic view of the installation of a turret;
fig. 7 is a schematic view of a structure of the clamping sleeve.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.
Referring to fig. 1, the application discloses a horizontal vacuum coating machine, which comprises a horizontal vacuum coating chamber 100 and two workpiece loading and unloading mechanisms 200, wherein two sides of the horizontal vacuum coating chamber 100 are provided with an openable loading and unloading opening 101, and the two workpiece loading and unloading mechanisms 200 are arranged corresponding to the loading and unloading opening 101 and can alternately feed workpieces into the horizontal vacuum coating chamber 100.
By adopting the structure, the vacuum coating machine changes the traditional vertical structure into the horizontal structure, does not need to build a high platform, is convenient for workers to assemble and disassemble workpieces, is favorable for ensuring safe production, and meanwhile, the two workpiece loading and unloading mechanisms 200 are arranged, so that loading and unloading can be alternately carried out, the production efficiency is high, the workshop requirement is reduced, the production cost is reduced, and the practicability is high.
When the workpiece loading and unloading mechanism 200 is sent into the horizontal vacuum coating chamber 100 for processing, the loading and unloading openings 101 at both ends need to be closed and sealed, in order to simplify the structure composition, preferably, as shown in fig. 1, a movable door 300 capable of opening and closing the loading and unloading openings 101 is arranged on the horizontal vacuum coating chamber 100, and a shielding structure capable of closing the loading and unloading openings 101 is arranged at one end, far away from the horizontal vacuum coating chamber 100, of the workpiece loading and unloading mechanism 200. When the workpiece feeding and discharging mechanism 200 on one side is fed into the horizontal vacuum coating chamber 100 for processing, the feeding and discharging opening 101 on the side is closed and sealed through the shielding structure on the workpiece feeding and discharging mechanism 200, and the feeding and discharging opening 101 on the other side is closed and sealed through the movable door 300, so that the working movement mechanism of the workpiece feeding and discharging mechanism 200 is effectively utilized, and the production cost is reduced.
The movable door 300 may be slidably disposed on the horizontal vacuum coating chamber 100, or may be rotatably disposed on the horizontal vacuum coating chamber 100, so as to implement opening and closing of the loading and unloading opening 101 in a sliding manner or implement opening and closing control of the loading and unloading opening 101 in a rotating manner. Since such control means and control structure are common general knowledge, specific mounting structure, drive control means, and the like thereof will not be described in detail herein. The shielding structure on the workpiece loading and unloading mechanism 200 is preferably arranged on a baffle plate matched with the loading and unloading opening 101, so that the production cost is saved. Of course, in actual production, the structure such as a sealing door may be provided.
As is clear from the above-described configuration, the work loading and unloading mechanism 200 is moved in and out of the horizontal vacuum coating chamber 100 during the operation, and when the work length is long, the work loading and unloading mechanism 200 is also inevitably long, and therefore, if the work loading and unloading mechanism 200 is clamped and carried from the outside by a robot or the like, this cannot be applied, and therefore, it is preferable to provide a guide mechanism in the horizontal vacuum coating chamber 100 for guiding the movement of the work loading and unloading mechanism 200. Thus, the workpiece loading and unloading mechanism 200 can be supported by the guide mechanism, and the working stability is improved. Specifically, as shown in fig. 2 and 3, the guiding mechanism is provided with at least two sliding rails 102, and the workpiece loading and unloading mechanism 200 is provided with pulleys 213 adapted to the sliding rails 102.
In order to improve the application range, it is preferable that the slide rail 102 is provided with an adjusting structure for adjusting the height of the slide rail 102 and the width between the two slide rails 102. Specifically, as shown in fig. 4, the slide rail 102 includes a base 103 and a guide portion 105, the guide portion 105 is of a strip structure to cooperate with a pulley 213, a height adjustment support 104 is mounted on the base 103 by a bolt or a screw, a plurality of adjustment bolts 107 located below the height adjustment support 104 are mounted on the base 103, the height of the height adjustment support 104 is adjusted by rotating the adjustment bolts 107, and the guide portion 105 is mounted on the height adjustment support 104. The guide portion 105 is provided with a bar-shaped hole 106, the length direction of the bar-shaped hole 106 is perpendicular to the movement direction of the pulley 213, and the guide portion 105 is fixed on the height-adjusting support 104 by installing a bolt in the bar-shaped hole 106. Thus, the height and width adjustment is realized through the arrangement of the height adjustment support 104 and the strip-shaped hole 106, and the workpiece loading and unloading mechanism 200 with different structure arrangements can be suitable. I.e. the height adjustment support 104 and the bar-shaped hole 106 etc. form an adjustment structure.
In view of the complexity and inconvenience of the aforementioned manner of controlling the feeding and discharging mechanism 200 of the workpiece, it is preferable that the feeding and discharging mechanism 200 of the workpiece is provided with a moving device on the outer side of the horizontal vacuum coating chamber 100, and the moving device is provided with a driving component for driving the feeding and discharging mechanism 200 of the workpiece into and out of the horizontal vacuum coating chamber 100 and a supporting component for supporting the feeding and discharging mechanism 200 of the workpiece after the feeding and discharging mechanism 200 of the workpiece exits the slide rail 102.
As shown in fig. 2, the driving assembly includes a guide rail 201 fixedly disposed relative to the horizontal vacuum coating chamber 100, a roller 203 slidingly mounted on the guide rail 201, and a driving motor 204 for driving the roller 203 to rotate, and the supporting assembly is a plurality of fixed pulleys liftably disposed on the guide rail 201.
As shown in fig. 5 and 6, the workpiece loading and unloading mechanism 200 of the present application is provided with a mounting frame and a turntable frame, the turntable frame is rotatably mounted on the mounting frame about a horizontal axis, and a workpiece mounting structure for mounting a workpiece is provided on the turntable frame, and the workpiece mounting structure is linked with the turntable frame so as to rotate with the turntable frame when the turntable frame rotates.
As shown in fig. 5 and 6, for better workpiece installation and processing, the turntable frame is provided with two turntable assemblies and a plurality of connecting rods 205, two turntable assemblies are symmetrically arranged at two ends of the connecting rods 205, thereby forming a workpiece loading space between the two turntable assemblies, each turntable assembly comprises a fixed gear ring 207, a revolution gear ring 208, a transmission assembly and a rotation seat assembly, the fixed gear ring 207 and the inner rings of the revolution gear ring 208 are respectively provided with gear teeth, the fixed gear ring 207 is fixedly arranged on the mounting frame, the rotation seat assembly is provided with a plurality of rotation seat assemblies which are circumferentially distributed on the revolution gear ring 208, the rotation seat assembly is provided with a transmission gear 209 which is meshed with the fixed gear ring 207, the revolution gear ring 208 is matched and arranged on the fixed gear ring 207 through the matching of the plurality of transmission gears 209, the transmission assembly is provided with a driving gear 210 which is meshed with the revolution gear ring 208, and a workpiece installation structure is formed through the corresponding rotation seat assemblies on the two turntable assemblies. As shown in fig. 5, the distribution circumferences of the stationary ring gear 207, the revolving ring gear 208, and the rotation seat assembly are all coaxially distributed.
The rotating seat assembly further comprises a first bearing seat fixedly installed on the revolution gear 208, a first bearing arranged in the first bearing seat and a first rotating shaft arranged on the first bearing, and the transmission gear 209 is fixedly arranged at the end part of the first rotating shaft. Since the two turntable assemblies are rotated synchronously, it is preferable that the two transmission assemblies are coupled by a transmission shaft, i.e., the two driving gears 210 are mounted on the same transmission shaft.
Corresponding to the structure, the mounting frame is provided with a horizontal bottom plate 215 and side plates 202 vertically arranged at two ends of the bottom plate 215, the pulleys 213, the driving motor 204 and the rollers 203 are all arranged on the mounting frame, the turntable frame is positioned between the two side plates 202, and the fixed gear ring 207 can be fixedly arranged on the side plates 202 or can be relatively fixedly arranged on the bottom plate 215. And as shown in fig. 2, in some embodiments the shielding structure is formed by a side plate 202.
Further, in order to reduce the pressure to the rotation seat assembly, the side plate 202 is provided with a plurality of bearing fixed pulleys 206 on the outer circumferential side of the revolution ring gear 208, which are preferably provided in the lower half circumferential region of the revolution ring gear 208 to sufficiently bear the weight.
Considering that the fixed gear ring 207 and the revolution gear ring 208 are both in a circular ring structure, further, the coating machine of the application is provided with target assemblies on the two side plates 202, and the target cores and targets are mounted through the target assemblies on the two side plates 202. The target head assembly is provided with a second rotating shaft penetrating through the side plate 202, and a linkage gear is installed at the end of the second rotating shaft and is used for connecting a power source. The internal structure of the second shaft, other structures of the target head assembly, the structure of the target core, etc. are all well known, and the improvement points in the present application are not related to the present application, and therefore are not described in detail.
In the working process, the workpiece is clamped on the two rotation seat assemblies, the transmission assembly drives the revolution gear ring 208 to rotate under the drive of the power source, and the revolution gear ring 208 synchronously rotates under the action of the fixed gear ring 207 in the rotating process, so that the workpiece not only revolves but also rotates, and meanwhile, the linkage gear rotates under the drive of the power source to drive the target material and the target core to rotate, so that the sputtering coating is completed.
In the case of coating a part of a tubular workpiece (e.g., a glass tube), there is no need to coat the ends of the workpiece, and for this purpose, in some embodiments, different tools are provided on the corresponding two spin stand assemblies to form the workpiece mounting structure. Specifically, as shown in fig. 5 and 7, a clamping sleeve 211 is disposed on one rotation seat assembly, a clamping sleeve 212 is disposed on the other rotation seat assembly corresponding to the clamping sleeve 211, and the clamping sleeve 212 is provided with a detachable semi-cylindrical side wall 214. When the workpiece is installed, the semi-cylindrical side wall 214 is detached firstly, then the workpiece is inserted into the clamping sleeve 212 and then is placed into the clamping sleeve 212, and finally the semi-cylindrical side wall 214 is installed for locking, so that the installation and the driving of the workpiece can be effectively realized, the shielding of the two ends of the workpiece can be realized, the subsequent treatment is not needed, and the practicability is high. The semi-cylindrical side walls 214 are preferably made of polytetrafluoroethylene to avoid damaging the workpiece.
In addition, other constituent structures of the coating machine are all of common knowledge, and the structure of the vacuum coating chamber 100 is not changed from the vertical state to the horizontal state, and the improvement point of the application does not relate to the structure, so the details are not described.
The above examples are only preferred embodiments of the application, and other embodiments of the application are possible. Equivalent modifications and substitutions can be made by those skilled in the art without departing from the spirit of the application, and these equivalent modifications or substitutions are intended to be included within the scope of the present application as set forth in the following claims.
Claims (1)
1. The horizontal vacuum coating machine is characterized by comprising a horizontal vacuum coating chamber and two workpiece loading and unloading mechanisms, wherein two sides of the horizontal vacuum coating chamber are provided with an openable loading and unloading opening, and the two workpiece loading and unloading mechanisms are arranged corresponding to the loading and unloading openings and can alternately feed workpieces into the horizontal vacuum coating chamber;
a movable door capable of opening and closing the feeding and discharging openings is arranged on the horizontal vacuum coating chamber, and a shielding structure capable of closing the feeding and discharging openings is arranged at one end, away from the horizontal vacuum coating chamber, of the workpiece feeding and discharging mechanism;
a guide mechanism is arranged in the horizontal vacuum coating chamber and is used for guiding the movement of the workpiece loading and unloading mechanism;
the guide mechanism is provided with at least two sliding rails, and the workpiece loading and unloading mechanism is provided with pulleys matched with the sliding rails;
the sliding rail is provided with an adjusting structure for adjusting the height of the sliding rail and the width between the two sliding rails;
the workpiece loading and unloading mechanism is provided with a moving device at the outer side of the horizontal vacuum coating chamber, and the moving device is provided with a driving component for driving the workpiece loading and unloading mechanism to enter and exit the horizontal vacuum coating chamber and a supporting component for supporting the workpiece loading and unloading mechanism after the workpiece loading and unloading mechanism exits the sliding rail;
the driving assembly comprises a guide rail fixedly arranged relative to the horizontal vacuum coating chamber, a roller and a driving motor, the roller is arranged on the guide rail in a sliding mode, the driving motor drives the roller to rotate, and the supporting assembly is a plurality of fixed pulleys arranged on the guide rail in a lifting mode;
the workpiece loading and unloading mechanism is provided with a mounting frame and a rotating table frame, the rotating table frame is rotatably mounted on the mounting frame around a horizontal shaft, the rotating table frame is provided with a workpiece mounting structure for mounting a workpiece, and the workpiece mounting structure is linked with the rotating table frame so as to rotate along with the rotating table frame when the rotating table frame rotates; the turntable comprises a turntable frame, a plurality of turntable assemblies and a plurality of connecting rods, wherein the turntable frame is provided with two turntable assemblies and a plurality of connecting rods, the two turntable assemblies are symmetrically arranged at two ends of the connecting rods, so that a workpiece loading space is formed between the two turntable assemblies, each turntable assembly comprises a fixed gear ring, a revolution gear ring, a transmission assembly and a rotation seat assembly, the fixed gear rings and inner rings of the revolution gear rings are respectively provided with gear teeth, the fixed gear rings are fixedly arranged on the mounting frame, the rotation seat assemblies are provided with a plurality of transmission gears which are circumferentially distributed on the revolution gear rings, the rotation seat assemblies are provided with transmission gears which are meshed with the fixed gear rings, the revolution gear rings are matched with the fixed gear rings through the plurality of transmission gears, and the transmission assembly is provided with a driving gear which is meshed with the revolution gear rings, and the rotation seat assemblies on the turntable assemblies form a workpiece mounting structure;
the workpiece mounting structure is provided with a clamping sleeve and a clamping sleeve corresponding to the clamping sleeve, and the clamping sleeve is provided with a detachable semi-cylindrical side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910748001.7A CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910748001.7A CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
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| CN110438459A CN110438459A (en) | 2019-11-12 |
| CN110438459B true CN110438459B (en) | 2023-08-22 |
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| CN201910748001.7A Active CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342518A (en) * | 2020-10-21 | 2021-02-09 | 派珂纳米科技(苏州)有限公司 | Horizontal vacuum coating machine for magnetic ring coating |
| CN114086145A (en) * | 2021-10-29 | 2022-02-25 | 南京丙辰表面技术有限公司 | Vacuum coating machine |
| CN114855127A (en) * | 2022-07-06 | 2022-08-05 | 靖江市苏伦工程机械有限公司 | Loader round pin axle processing rust-resistant automatic cladding device |
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| US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106637112A (en) * | 2016-11-16 | 2017-05-10 | 上海交通大学 | Horizontal type magnetron sputtering system used for fuel cell metal bipolar plates and coating process |
| CN206538465U (en) * | 2017-01-24 | 2017-10-03 | 沙伯特（中山）有限公司 | Magnetic control film coating machine |
| CN211497769U (en) * | 2019-08-14 | 2020-09-15 | 湖南菲尔姆真空设备有限公司 | Horizontal vacuum coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4199062B2 (en) * | 2003-07-07 | 2008-12-17 | 株式会社神戸製鋼所 | Vacuum deposition equipment |
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|---|---|---|---|---|
| US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| EP0166256A2 (en) * | 1984-06-22 | 1986-01-02 | Westinghouse Electric Corporation | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106637112A (en) * | 2016-11-16 | 2017-05-10 | 上海交通大学 | Horizontal type magnetron sputtering system used for fuel cell metal bipolar plates and coating process |
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Effective date of registration: 20220914 Address after: 3 / F, building A2, mangrove innovation and Development Zone, Hengshan Science City, Cailun Avenue, Yueping Town, Yanfeng District, Hengyang City, Hunan Province, 421000 Applicant after: Hunan Zhongyuan Technology Co.,Ltd. Address before: No. 98, Jinzhou North Road, Jinzhou New District, Ningxiang, Changsha City, Hunan Province, 410600 Applicant before: HUNAN FILM VACUUM EQUIPMENT CO.,LTD. |
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