CN105093538A - Modified Galileo zoom beam expander and application thereof - Google Patents
Modified Galileo zoom beam expander and application thereof Download PDFInfo
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- CN105093538A CN105093538A CN201510650891.XA CN201510650891A CN105093538A CN 105093538 A CN105093538 A CN 105093538A CN 201510650891 A CN201510650891 A CN 201510650891A CN 105093538 A CN105093538 A CN 105093538A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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Abstract
The invention discloses a modified Galileo zoom beam expander and application thereof. The modified Galileo zoom beam expander comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged in the light beam incidence direction, wherein the diopters of the first lens, the second lens, the third lens and the fourth lens are sequentially negative, positive, negative and positive; the distance between the first lens and the second lens is adjustable, the distance between the third lens and the fourth lens is adjustable, and the distance between the second lens and the third lens is unadjustable; the modified Galileo zoom beam expander has the amplification factor of 2-8, and within the adjustable range of the amplification factor, the light beam on the surface of each lens is always larger than the incident light beam. The modified Galileo zoom beam expander is small in translation distance and high in safety, can be applied to a 10.6 [mu]m CO2 laser, and can also be used in other wavelength or wave band ranges through fine adjustment of the distance between adjacent elements.
Description
Technical field
The present invention relates to a kind of correction type Galilean type Zooming expander and application thereof, belong to optical field.
Background technology
Beam expanding lens is a kind of instrument of expansion collimation (parallel) light (as laser beam) beam size.Beam expanding lens has two major functions: expansion collimated light beam size and reduction beam divergence angle.As used same focus lamp, the collimated light with larger beam sizes and the less angle of divergence can be focused into less spot size.Simultaneously, in the application aspect such as laser marking, laser bonding, can require that system can change the size of focal beam spot as requested to realize different marks/welding fineness degree, meanwhile, also require that beam expanding lens can cross zoom to be used for the light beam change of correcting because the different output state of laser instrument brings.Therefore, use in the various application of laser treatment material at these, employ the beam expanding lens of energy zoom widely, realize variable focal beam spot and correct light beam change.
From a structural point, beam expanding lens has two types: Galilean type and Keplerian.Multiplying power Galilean type beam expanding lens is determined for standard, has the output element of a negative dioptric input element and a positive diopter.The structure of Keplerian is then contrary: it has the input element of a positive diopter and a negative dioptric output element.For Zooming expander structure, Galilean type has a negative dioptric input element, the middle zoom element of a positive diopter and the collimating element of a positive diopter, because needing larger translation distance, Galilean type is only widely used in magnification zoom ratio and is less than in the design of 2, and zoom ratio is defined as the ratio of maximum magnification and minimum magnification; On the other hand, the structure of zoomable Keplerian, for the input of positive diopter element, middle is that negative diopter element realizes zoom, positive diopter element below exports, due to same magnification zoom ratio, only need comparatively short translation distance, the Zooming expander making the structure of Keplerian be more suitable for zoom ratio to be greater than 2 times.But, in superpower laser application aspect, Keplerian beam expanding lens has an inherent shortcoming: input element has positive diopter, beat intermediary element beam sizes much smaller than input light size, less laser beam size makes the surface of intermediary element bear the light intensity higher than the surface of input element, middle element is easily broken in the unwitting situation of client, and therefore the damage threshold of whole optical system is lowered.
About Zooming expander, domestic patent aspect, No. 2010102077391 patents announced by people such as Li Jiaying for 2010, and the 201410795058.X patent that 2014 are invented by people such as Peng Hongpan, from a structural point, be all Keplerian, there is the problems such as damage threshold is low.International monopoly aspect, by on July 28th, 1992 Cobb at the patent No.5 of the U.S., 134,523 disclose a kind of Galilean type Zooming expander, in version, the patent of Cobb belongs to traditional Galilean type Zooming expander, enlargement ratio is 4.251 ×-6.79 ×, magnification zoom ratio is 1.6X, and translation distance is 97.4mm, there is magnification zoom ratio little, the problems such as translation distance is large.
In sum, develop the Zooming expander that a kind of energy realizes comparatively short translation distance, light beam inside diameter can be greater than again input beam diameter to be badly in need of very much.
Summary of the invention
In order to solve the defects such as translation distance in prior art is large, damage threshold is low, the invention provides a kind of correction type Galilean type Zooming expander and application thereof.
For solving the problems of the technologies described above, the technical solution adopted in the present invention is as follows:
A kind of correction type Galilean type Zooming expander, comprises the first lens, the second lens, the 3rd lens and the 4th lens that are arranged in order along light beam incident direction; Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens is followed successively by negative, positive, negative, positive; Distance between first lens and the second lens is adjustable, and the distance between the 3rd lens and the 4th lens is adjustable, and the distance between the second lens and the 3rd lens is non-adjustable; The enlargement ratio of correction type Galilean type Zooming expander is 2-8, in the adjustable extent of enlargement ratio, is always greater than the size of incident beam in the beam sizes of each lens surface.
The enlargement ratio of above-mentioned Zooming expander from 2 × to 8 × adjustable; Second lens and the 3rd lens as a whole together with move, the distance between the Distance geometry between the first lens and the second lens the 3rd lens and the 4th lens correspondingly moves with enlargement ratio.
The structure of existing Zooming expander comprises three elements usually, and while first element is positive, such structure comparatively easily designs, and often has a shorter translation distance and shorter total length.But what have the first element of positive diopter will make incident beam focus inner at beam expanding lens, usually make the beam sizes on certain minute surface inner less than incident beam 3 ~ 4 times, and therefore will the laser damage threshold of this beam expanding lens be made to reduce about 10 times.For the application using lower-wattage laser instrument, inner hot spot focus issues is not problem to element, but, when the laser instrument required reaches a certain intensity, as required in cut, the inner member of beam expanding lens will have the high risk of being broken by laser, and cannot discover from outward appearance, greatly have impact on beam quality and the intensity of focal beam spot.
And the application is by using negative lens as the first element, avoid inner focus issues.Different from traditional Galilean type beam expanding lens, for shortening translation distance scope also in order to reduce wavefront difference, an additional negative lens element is with the addition of after second positive lens of zoom, make the beam sizes in beam expanding lens inside always be greater than the size of incident beam, therefore ensure that the security of inner member.And the translation distance of this structure shortens dramatically than traditional Galilean type, and have and good expand quality, be suitable for using superpower laser field.
In order to reduce translation distance, ensure enlargement ratio, the distance between the first lens and the second lens is adjustable from 12.1mm to 1.8mm; Distance between 3rd lens and the 4th lens is adjustable from 81.7mm to 131.3mm.Such translation distance is less than 50mm, and this makes to manufacture the beam expanding lens microscope base with high concentricity becomes possibility.
In order to improve the security of each element further, ensure to expand quality, the first lens front surface is concave surface, curvature is 73.44mm, and the first lens rear surface is concave surface, curvature is 37.93mm, and the center thickness of the first lens is 3.0mm simultaneously; Second lens front surface is convex surface, curvature is 21.50mm, and the second lens rear surface is concave surface, curvature is 63.40mm, and the center thickness of the second lens is 3.0mm; 3rd lens front surface is concave surface, curvature is 301.3mm, and the 3rd lens rear surface is concave surface, curvature is 51.35mm, and the center thickness of the 3rd lens is 3.5mm; 4th lens front surface is plane, and the 4th lens rear surface is convex surface, curvature is 223.48mm, and the center thickness of the 4th lens is 5.0mm, and the direction of each lens from front surface to rear surface is consistent with light beam incident direction.Namely the vertical direction of the application is consistent with the direction of propagation of light beam.
In order to ensure the quality of correction type Galilean type Zooming expander further, first lens form by bearing dioptric ZnSe lens, second lens are made up of the ZnSe lens of positive diopter, and the 3rd lens form by bearing dioptric ZnSe lens, and the 4th lens are made up of the ZnSe lens of positive diopter.
Above-mentioned correction type Galilean type Zooming expander, in the adjustable extent of enlargement ratio, the peak valley wavefront error of output beam is less than 0.1 number of wavelengths.
Above-mentioned correction type Galilean type Zooming expander can be used for the CO2 laser instrument being operated in 10.6um.But by adjusting the distance between Distance geometry the 3rd lens between the first lens and the second lens and the 4th lens, the application's correction type Galilean type Zooming expander can be operated in other wavelength from seeing LONG WAVE INFRARED.
The NM technology of the present invention is all with reference to prior art.
Correction type Galilean type Zooming expander of the present invention, enlargement ratio is 2 ×-8 ×, zoom ratio is 4, and maximum moving distance is less than 50mm, and security is high, makes the excentricity manufacturing and kept become possibility; Can be used for the CO2 laser instrument of 10.6um, by finely tuning the distance of adjacent elements, also can be used in other wavelength or wavelength band.
Accompanying drawing explanation
Fig. 1 is the diagrammatic cross-section of correction type Galilean type Zooming expander of the present invention when 2 × enlargement ratio.
Fig. 2 is the diagrammatic cross-section of correction type Galilean type Zooming expander of the present invention when 5 × enlargement ratio.
Fig. 3 is the diagrammatic cross-section of correction type Galilean type Zooming expander of the present invention when 8 × enlargement ratio.
Fig. 4 is dispersion angle (mrad) comparison diagram of correction type Galilean type Zooming expander correspondence of the present invention 2 ×-8 × enlargement ratio.
The scale diagrams of the incident beam at the first lens front surface place when Fig. 5 a is correction type Galilean type Zooming expander of the present invention difference enlargement ratio.
The beam sizes schematic diagram at the 3rd lens front surface place when Fig. 5 b is correction type Galilean type Zooming expander of the present invention difference enlargement ratio.
Wave front chart when Fig. 6 a is correction type Galilean type Zooming expander 2 × enlargement ratio of the present invention.
Wave front chart when Fig. 6 b is correction type Galilean type Zooming expander 5 × enlargement ratio of the present invention.
Wave front chart when Fig. 6 c is correction type Galilean type Zooming expander 8 × enlargement ratio of the present invention.
In figure, 10 is the first lens, and 11 is the first lens front surface, 12 is the first lens rear surface, 20 is the second lens, and 21 is the second lens front surface, and 22 is the second lens rear surface, 30 is the 3rd lens, 31 is the 3rd lens front surface, and 32 is the 3rd lens rear surface, and 40 is the 4th lens, 41 is the 4th lens front surface, and 42 is the 4th lens rear surface.
Embodiment
In order to understand the present invention better, illustrate content of the present invention further below in conjunction with embodiment, but content of the present invention is not only confined to the following examples.
Embodiment 1
A kind of correction type Galilean type Zooming expander, comprises the first lens, the second lens, the 3rd lens and the 4th lens that are arranged in order along light beam incident direction; Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens is followed successively by negative, positive, negative, positive; Distance between first lens and the second lens is adjustable, and the distance between the 3rd lens and the 4th lens is adjustable, and the distance between the second lens and the 3rd lens is non-adjustable; The enlargement ratio of correction type Galilean type Zooming expander is 2-8, in the adjustable extent of enlargement ratio, be always greater than the size of incident beam in the beam sizes of each lens surface, and the peak valley wavefront error of output beam is less than 0.1 number of wavelengths.
Distance between first lens and the second lens is adjustable from 12.1mm to 1.8mm; Distance between 3rd lens and the 4th lens is adjustable from 81.7mm to 131.3mm;
First lens front surface is concave surface, curvature is 73.44mm, and the first lens rear surface is concave surface, curvature is 37.93mm, and the center thickness of the first lens is 3.0mm; Second lens front surface is convex surface, curvature is 21.50mm, and the second lens rear surface is concave surface, curvature is 63.40mm, and the center thickness of the second lens is 3.0mm; 3rd lens front surface is concave surface, curvature is 301.3mm, and the 3rd lens rear surface is concave surface, curvature is 51.35mm, and the center thickness of the 3rd lens is 3.5mm; 4th lens front surface is plane, and the 4th lens rear surface is convex surface, curvature is 223.48mm, and the center thickness of the 4th lens is 5.0mm;
First lens form by bearing dioptric ZnSe lens, and the second lens are made up of the ZnSe lens of positive diopter, and the 3rd lens form by bearing dioptric ZnSe lens, and the 4th lens are made up of the ZnSe lens of positive diopter.
As shown in Figure 1, input light enters beam expanding lens from the first lens, and the second lens and the 3rd lens are zoom element, and the 4th lens are collimating mirror and output element, first lens and the 3rd lens have negative diopter, and the second lens and the 4th lens have positive diopter; Second lens and the 3rd lens as a whole together with move, the distance D2 between them is fixing in the process of zoom; Distance definition between first lens and the second lens is D1, and the distance between the second lens and the 3rd lens is called D2, and the distance definition between the 3rd lens and the 4th lens is D3, D1 and D3 is variable element, changes along with the change of enlargement ratio.
Fig. 1 to Fig. 3 be the present embodiment respectively enlargement ratio be 2 ×, 5 ×, the sectional view of the Zooming expander in 8 × time: in Fig. 1 to Fig. 3, the collimated light beam being no more than 4mm is transferred to the right of beam expanding lens from the left side of beam expanding lens, depend on the distance between element, outgoing beam will can be 2 times of incident beam respectively, 5 times, with 8 times, be D1 by the distance definition between the first lens and the second lens, distance definition between 3rd lens and the 4th lens is D3, table 1 is the value of D1 and D3 corresponding when the present embodiment Zooming expander enlargement ratio is 2 to 8 times, the variation range of this form display D1 is the 1.8mm from 12.1mm during 2 × (referring to 2 times) to 8 × time, simultaneously, the variation range of D3 is the 131.3mm from the 81.7mm in 2 × time to 8 × time, within the scope of whole enlargement ratio, the variation range of D1 is less than 10.5mm, the variation range of D3 is less than 50mm, the variation range of entire length is less than 40mm.
Table 2 gives the technical parameter of each lens in the present embodiment, surperficial label in table refers to the front surface of each lens and rear surface (identical with the Reference numeral meaning in Fig. 1), namely 11, the forward and backward surface of 12 expression the first lens, 21, the forward and backward surface of 22 expression the second lens, the like; On surface type hurdle, all surfaces are all standard form at this, this means to only have spherical surface type or plane face type to be included in this beam expanding lens; The radius-of-curvature in eight faces is listed on radius-of-curvature hurdle, on the occasion of the direction being meant to propagate towards light accordingly bend, and negative value represents that the opposite direction propagated towards light accordingly bends; Thickness hurdle represents the distance between the center thickness of each lens and adjacent two lens, is followed successively by the center thickness of the center thickness of the first lens, distance between the first lens and the second lens, the center thickness of the second lens, distance between the second lens and the 3rd lens, the center thickness of the 3rd lens, distance between the 3rd lens and the 4th lens, the 4th lens from top to bottom; Material column represents the material that respective lens uses, and is all ZnSe here; Give the logical light diameter of each lens in clear aperture hurdle, the clear aperture of the 4th lens is 40mm, and for 8 × enlargement ratio of 4mm incidence, this value does not enough have any blocking for the output beam through 32mm diameter.
Fig. 4 is the present embodiment Zooming expander, beam divergence angle when 2 ×-8 × different enlargement ratio, this simulation drawing is consistent with theory, and namely the enlargement ratio of beam expanding lens is larger, the beam divergence angle obtained is less, and the ratio that beam divergence angle reduces is identical with enlargement ratio.
Because the second lens in beam expanding lens in the present embodiment have positive diopter, light is restrained, inner minimum beam sizes will be positioned at the front surface 31 of the 3rd lens.For the beam sizes illustrating beam expanding lens inside is always greater than the size of incident beam, Fig. 5 a and Fig. 5 b sets forth corresponding 2 × to the size of 8 × unpolarized light beam and the minimum beam size of beam expanding lens inside; From Fig. 5 a, incident beam is of a size of constant, be the light beam of the 4mm diameter of setting, from Fig. 5 b, have beam expanding lens inside minimum beam the 3rd lens front surface 31 on, beam sizes increases along with magnification and increases, so it is 2 × time that minimum light beam occurs in magnification, but it is as shown in the drawing, at the front surface 31 of the 3rd lens, beam diameter value during 2 × magnification is still greater than 4mm, therefore confirms, the beam sizes of the present embodiment beam expanding lens inside is always greater than to the size of incident beam.
Fig. 6 a, 6b and 6c show the present embodiment enlargement ratio and be respectively 2 ×, 5 × and 8 × time beam expanding lens output beam wave front chart, within the scope of all enlargement ratios, the peak-to-valley value of wave front chart fluctuation is all less than 0.1 number of wavelengths, and this shows that the beam expanding lens of the present embodiment has within the scope of whole enlargement ratio and extraordinaryly expands quality.Above-mentioned correction type Galilean type Zooming expander can be used for the CO2 laser instrument being operated in 10.6um.But by adjusting the distance between Distance geometry the 3rd lens between the first lens and the second lens and the 4th lens, the application's correction type Galilean type Zooming expander can be operated in other wavelength from seeing LONG WAVE INFRARED.
In the application such as cut/welding/mark, the laser beam of collimation focuses on material surface for processing by object lens: to the object lens of a fixed focal length, the size of the spot size focused on and the laser beam of collimation is inversely proportional to, the beam sizes for a change focused on, the laser beam size of collimation also will correspondingly be changed by Zooming expander; Along with laser power becomes more and more higher, light beam inside size inside beam expanding lens should be not less than the size of incident beam, in order to avoid produce inner infringement in the process regulating enlargement ratio, this target then realizes by above-mentioned correction type Galilean type Zooming expander smoothly.
Table 1 arranges table for correction type Galilean type Zooming expander of the present invention in the distance of 2 ×-8 × corresponding different enlargement ratio
| Enlargement ratio | 2X | 3X | 4X | 5X | 6X | 7X | 8X |
| D1 | 12.1 | 10.4 | 8.7 | 7.0 | 5.3 | 3.5 | 1.8 |
| D3 | 81.7 | 102.7 | 113.5 | 120.1 | 124.6 | 127.9 | 131.3 |
Table 2 is the design parameter table of lens element in correction type Galilean type Zooming expander of the present invention
| Surface label | Surface type | Radius-of-curvature | Thickness | Material | Clear aperture |
| 11 | Standard | -73.44 | 3.0 | ZnSe | 12 |
| 12 | Standard | 37.93 | Variable | 10 | |
| 21 | Standard | 21.50 | 3.0 | ZnSe | 12 |
| 22 | Standard | 63.40 | 29.7 | 12 | |
| 31 | Standard | -301.30 | 3.5 | ZnSe | 12 |
| 32 | Standard | 51.35 | Variable | 10 | |
| 41 | Standard | Infinitely great | 5.0 | ZnSe | 40 |
| 42 | Standard | -223.48 | 40 |
Claims (7)
1. a correction type Galilean type Zooming expander, is characterized in that: comprise the first lens, the second lens, the 3rd lens and the 4th lens that are arranged in order along light beam incident direction; Wherein, the diopter of the first lens, the second lens, the 3rd lens and the 4th lens is followed successively by negative, positive, negative, positive; Distance between first lens and the second lens is adjustable, and the distance between the 3rd lens and the 4th lens is adjustable, and the distance between the second lens and the 3rd lens is non-adjustable; The enlargement ratio of correction type Galilean type Zooming expander is 2-8, in the adjustable extent of enlargement ratio, is always greater than the size of incident beam in the beam sizes of each lens surface.
2. correction type Galilean type Zooming expander as claimed in claim 1, is characterized in that: the distance between the first lens and the second lens is adjustable from 12.1mm to 1.8mm.
3. correction type Galilean type Zooming expander as claimed in claim 1 or 2, is characterized in that: the distance between the 3rd lens and the 4th lens is adjustable from 81.7mm to 131.3mm.
4. correction type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterized in that: the first lens front surface is concave surface, curvature is 73.44mm, the first lens rear surface is concave surface, curvature is 37.93mm, and the center thickness of the first lens is 3.0mm; Second lens front surface is convex surface, curvature is 21.50mm, and the second lens rear surface is concave surface, curvature is 63.40mm, and the center thickness of the second lens is 3.0mm; 3rd lens front surface is concave surface, curvature is 301.3mm, and the 3rd lens rear surface is concave surface, curvature is 51.35mm, and the center thickness of the 3rd lens is 3.5mm; 4th lens front surface is plane, and the 4th lens rear surface is convex surface, curvature is 223.48mm, and the center thickness of the 4th lens is 5.0mm, and the direction of each lens from front surface to rear surface is consistent with light beam incident direction.
5. correction type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterized in that: the first lens form by bearing dioptric ZnSe lens, second lens are made up of the ZnSe lens of positive diopter, 3rd lens form by bearing dioptric ZnSe lens, and the 4th lens are made up of the ZnSe lens of positive diopter.
6. correction type Galilean type Zooming expander as claimed in claim 1 or 2, it is characterized in that: in the adjustable extent of enlargement ratio, the peak valley wavefront error of output beam is less than 0.1 number of wavelengths.
7. the application of the correction type Galilean type Zooming expander described in claim 1-6 any one, is characterized in that: for being operated in the CO of 10.6um
2laser instrument.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111283320A (en) * | 2020-03-06 | 2020-06-16 | 大族激光科技产业集团股份有限公司 | Laser beam expanding lens and laser processing equipment |
| CN112404704A (en) * | 2020-11-03 | 2021-02-26 | 深圳市韵腾激光科技有限公司 | Variable-power laser beam expander and laser processing system |
| CN112858341A (en) * | 2020-12-23 | 2021-05-28 | 北京纬百科技有限公司 | Detection method, shooting system and detection system |
| CN116175967A (en) * | 2023-03-30 | 2023-05-30 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
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| JPS6125117A (en) * | 1984-07-14 | 1986-02-04 | Akio Suzuki | Galilean zoom telescope |
| JPS63503170A (en) * | 1986-04-21 | 1988-11-17 | ヒューズ・エアクラフト・カンパニー | Infrared afocal zoom telescope |
| CN104781716A (en) * | 2012-10-31 | 2015-07-15 | 大族激光科技产业集团股份有限公司 | Extreme ultraviolet laser marking F(theta) shot and laser processing device |
| CN204964888U (en) * | 2015-10-09 | 2016-01-13 | 南京波长光电科技股份有限公司 | Correction type galileo formula becomes times beam expanding lens |
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| JPS6125117A (en) * | 1984-07-14 | 1986-02-04 | Akio Suzuki | Galilean zoom telescope |
| JPS63503170A (en) * | 1986-04-21 | 1988-11-17 | ヒューズ・エアクラフト・カンパニー | Infrared afocal zoom telescope |
| CN104781716A (en) * | 2012-10-31 | 2015-07-15 | 大族激光科技产业集团股份有限公司 | Extreme ultraviolet laser marking F(theta) shot and laser processing device |
| CN204964888U (en) * | 2015-10-09 | 2016-01-13 | 南京波长光电科技股份有限公司 | Correction type galileo formula becomes times beam expanding lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111283320A (en) * | 2020-03-06 | 2020-06-16 | 大族激光科技产业集团股份有限公司 | Laser beam expanding lens and laser processing equipment |
| CN112404704A (en) * | 2020-11-03 | 2021-02-26 | 深圳市韵腾激光科技有限公司 | Variable-power laser beam expander and laser processing system |
| CN112858341A (en) * | 2020-12-23 | 2021-05-28 | 北京纬百科技有限公司 | Detection method, shooting system and detection system |
| CN116175967A (en) * | 2023-03-30 | 2023-05-30 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
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| CN105093538B (en) | 2017-06-09 |
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Address after: 211121 18 Jiangning Lake Industrial Zone, Jiangning, Nanjing. Co-patentee after: Edinburgh (Nanjing) Optoelectronic Equipment Co., Ltd. Patentee after: NANJING WAVELENGTH OPTOELECTRONICS TECHNOLOGY CO., LTD. Address before: 211121 18 Jiangning Lake Industrial Zone, Jiangning, Nanjing. Co-patentee before: NANJING EDINGBURGH ENVIRONMENTAL TECHNOLOGY CO., LTD. Patentee before: NANJING WAVELENGTH OPTOELECTRONICS TECHNOLOGY CO., LTD. |
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