CN101762879B - Laser beam expanding system - Google Patents
Laser beam expanding system Download PDFInfo
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- CN101762879B CN101762879B CN2010101025169A CN201010102516A CN101762879B CN 101762879 B CN101762879 B CN 101762879B CN 2010101025169 A CN2010101025169 A CN 2010101025169A CN 201010102516 A CN201010102516 A CN 201010102516A CN 101762879 B CN101762879 B CN 101762879B
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Abstract
A fixed focus beam expanding system applied to ultraviolet laser comprises a first lens, a second lens and a third lens, which are located at the incidence direct of light beam and are arranged in turn. The first lens is a crescent-shaped negative lens the curved face of which backs on the incidence direction of light and bends. The second lens is a crescent-shaped positive lens the curved face of which backs on the incidence direction of light and bends. The third lens is a plano-convex positive lens. The beam expanding system consisting of the first lens, the second lens and the third lens can expand the diameter of incident laser beam for 22 times and the expanded beam comes out in the form of parallel light. Because the focal length of the first lens is short and the beam expanding multiplying power of the beam expanding system is large, two positive lenses are needed to bear the quality of the emergent light beam of the beam expanding system, thus the reshaping requirement is ensured, the best imaging quality can be obtained and the size is the smallest.
Description
[technical field]
The present invention relates to a kind of fixed times beam-expanding system that is applied to Ultra-Violet Laser.
[background technology]
In the laser processing procedure; Usually require laser very concentrated at the energy of focus point; Guarantee the energy density of laser processing procedure focus point; Make laser work effectively, and improve the work efficiency of laser, but how when work, to improve the focus energy density of laser? Generally be through obtaining little focus point as far as possible.
Theoretical according to diffraction limit: the angle of divergence θ of laser and waist diameter d
0Relation do
Wherein for using certain laser instrument, Wavelength of Laser λ is certain, so, the angle of divergence θ of laser and waist diameter d
0Product be constant.Generally less from the laser beam diameter of laser instrument output, before the convergence optical system through certain focus focuses on, require the expanded light beam diameter to reduce angle of divergence θ, obtain bigger incident beam diameter simultaneously.
Suppose in laser instrument and focal length are the convergence optical system of f, to add a laser beam expanding system, select suitable expansion bundle multiple β as requested for use, making laser beam enlarge to diameter is D=β d
0, this moment laser angle of divergence θ
Go intoStill satisfy the diffraction limit theoretical relationship
So,
Like this, desirable convergent laser hot spot
So, obtain suitable D value through selecting suitable multiple β for use, just can obtain desirable focal beam spot δ to improve the energy density at job spotlight place.
Fixed times beam-expanding system of the present invention, mainly be for the shaping that solves uv laser beam and expansion of laser light beam diameter to improve the needs of image quality.Though thisly decide power beam expansion lens design more relatively easily, very convenient effectively to the ability of laser beam reshaping.
[summary of the invention]
The present invention provide a kind of can with the diameter of incoming laser beam expand bundle to 22 times, get very desirable laser beam expanding system to improve image quality and to expand bundle back picture element balance.
The technical scheme that the present invention adopted is a kind of laser beam expanding system, comprising: be positioned at first, second and third lens that the incident direction of light beam is arranged in regular turn, said first lens are the negative lens of curved month type, its curved surface dorsad the incident direction of light crooked; Said second lens are the positive lens of curved month type, its curved surface dorsad the incident direction of light crooked; Said the 3rd lens are the positive lens of planoconvex; After this laser beam expanding system can expand 22 times of bundles with the diameter of incoming laser beam, be still a branch of directional light and penetrate.
Wherein, said first lens and the spacing of second lens on optical axis are 140mm, and its margin tolerance is ± 5%.
Wherein, the largest beam diameter of said this laser beam expanding system incoming laser beam of allowing to pass through is 4mm.
Wherein, said incident laser is that wavelength is the Ultra-Violet Laser of 355nm.
Wherein, the center thickness of said first lens on optical axis is 1mm, and its margin tolerance is ± 5%.
Wherein, the center thickness of said second lens on optical axis is 2mm, and its margin tolerance is ± 5%.
Wherein, said second lens and the spacing of the 3rd lens on optical axis are 1.5mm, and its margin tolerance is ± 5%.
Wherein, the center thickness of said the 3rd lens on optical axis is 3mm, and its margin tolerance is ± 5%.
This laser beam expanding system is through three lens arranging in regular turn with " negative-just-just " are set, because the focal length of the first negative lens is shorter; And because whole laser beam expanding system expansion bundle multiplying power is bigger, so, need bear with two positive lenss and expand bundle outgoing beam quality; Like this, both guaranteed the needs of shaping, and can also make it reach best image quality; And the physical dimension that guarantees it also is minimum, and the picture element of this beam-expanding system also balance gets very desirablely, and whole camera lens volume is also very little.
[description of drawings]
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Fig. 1 is the optical system structure synoptic diagram of laser beam expanding system of the present invention;
Fig. 2 is the disc of confusion figure in the beam-expanding system preferred embodiment of the present invention;
Fig. 3 is the spherical aberration figure in the beam-expanding system preferred embodiment of the present invention;
Fig. 4 is the figure of the optical transfer function MTF in the beam-expanding system preferred embodiment of the present invention.
[embodiment]
Along with developing rapidly of Laser Processing, the optical beam-expanding mirror occupies considerable status in the Laser Processing optical system.Owing to be used for the laser beam of Laser Processing the angle of divergence is arranged; So will adjust the irregularity of laser beam with the optics beam expanding lens; Can make laser focusing system obtain bigger picture side's aperture angle, the energy density of along when improving laser focusing, thereby the elaboration and the efficient of raising laser.
According to Laplace invariant (Lagrange) theorem: energy J=nD θ=n ' D ' θ ', wherein, and n and the refractive index of n ' expression optical system in medium, when medium is air, n=n '=1; The entrance pupil diameter and the exit pupil diameter of D and D ' expression optical system; The field angle of the incident light of θ and θ ' expression optical system and the field angle of emergent light when field angle is very little, can be represented with radian.
Visible by following formula, when the emitting laser bundle had the angle of divergence, when promptly θ was big, by D → D ', promptly enlargement factor β=D '/D doubly can make the angle of divergence of laser beam dwindle β doubly, thereby reach the purpose of shaping laser beam through beam expanding lens.
On the other hand, general laser beam bright dipping diameter all very little (about about Φ=1mm) for this reason, directly focus on so thin light beam, and its Rayleigh disk is just very big, according to the Rayleigh disk formula: Rayleigh disk diameter δ=2.44 λ f/D.
It is thus clear that D is more little for the entrance pupil diameter, diameter δ is just big more, will reduce the precision of amasthenic lens widely.
In view of above two basic demands, the optical system of Laser Processing is generally all wanted the adapted beam expanding lens.Remove in addition, the beam expanding lens that has can mate use with focus lamp or f-θ camera lens separately, and some also must link together with the optical system that is used and consider the balance of aberration, just can obtain ideal results.
Disclosed by the invention is exactly that a kind of Ultra-Violet Laser is used fixed times beam-expanding system.
As shown in Figure 1, Ultra-Violet Laser disclosed by the invention is used fixed times beam-expanding system, comprises that it is three lens that incident ray direction according to light sorts successively, respectively the first lens L1, the second lens L2, and the 3rd lens L3.It is the combination of " negative-just-just " that these three lens L1, L2, L3 adopt the focal power forms of distribution, and the focal length of negative lens is shorter, and is little to aberration effects, and positive lens is the main undertaker who determines beam expanding lens outgoing beam quality.
Said first, second lens L1, L2 are meniscus lens, and curved surface all dorsad the light incident direction crooked; Lens L3 is a plane-convex lens.
Their concrete structure and parameter are: lens L1 is that two curved surface S1, the S2 of R1, R2 constitute by radius-of-curvature respectively, and the center thickness d1 on its optical axis, material are Nd1:Vd1; Lens L2 is that two curved surface S3, the S4 of R3, R4 constitute by radius-of-curvature respectively, and the center thickness d3 on its optical axis, material are Nd3:Vd3; Lens L3 is R5 by radius-of-curvature respectively, and two curved surface S5 of R6, S6 constitute, and the center thickness d5 on its optical axis, material are Nd5:Vd5; Lens L1 and the spacing of lens L2 on optical axis are d2, and lens L2 and the spacing of lens L3 on optical axis are d4.
In conjunction with above parameter, we have designed a beam-expanding system, and its concrete data are as follows respectively:
Instance:
Φ
Go into=4mm β=22X λ=355nm
Φ wherein
Go intoThe maximum light inlet diameter that this beam-expanding system allows, that is: the largest beam of the receivable incoming laser beam of this beam-expanding system directly is 4mm; β is for expanding the bundle multiple, that is: this beam-expanding system is after the diameter expansion of incoming laser beam is restrainted 22 times, to remain a branch of directional light, and the shaping expansion of laser light beam diameter that can solve uv laser beam is to improve the demand of image quality; λ is a wavelength, that is: incident light is the Ultra-Violet Laser of wavelength 355nm.
| Curved surface S | Curvature R (mm) | Face is d (mm) at interval | Material Nd/Vd |
| 1 | ?20 | ?1 | 1.46/68 |
| 2 | ?2.5 | ?140 | |
| 3 | ?230 | ?2 | 1.5/70 |
| 4 | ?140 | ?1.5 | |
| 5 | ?0 | ?3 | 1.6/41 |
| 6 | ?-24 | ?∞ |
Through the foregoing description, parameter area is following:
1)R1-R6 ΔR1-6≤±5％ (R1-R6)
2)d1-d5 Δd1-5≤±5％ (d1-d5)
3)Nd1/Vd1-Nd5/Vd5 ΔNd1-5/ΔVd1-5≤±5％ (Nd1/Vd1-Nd5/Vd5)
Through above-mentioned concrete experiment parameter; Can probably conclude the process of this beam-expanding system: the largest beam diameter is the incoming laser beam of 4mm; At first light beam is become divergent beams through the first negative lens L1; Pass through positive second, third lens L2, L3 then with the divergent beams shaping, penetrate with parallel beam.The effect of whole beam-expanding system is exactly after the diameter expansion of incoming laser beam is restrainted 22 times, and still penetrates with parallel beam.Wherein the focal length of the negative first lens L1 of this system is shorter, and is little to aberration effects, and positive lens is the main undertaker of decision beam expanding lens outgoing beam quality.But because it is bigger to expand the multiple of bundle, if only use a slice positive lens, its focal power burden will be very big; In order to guarantee to expand the beam quality of bundle back laser beam, so, need bear to expand with two positive lenss and restraint the outgoing beam quality; Like this; Both guaranteed the needs of shaping, and can also make it reach best image quality, and guaranteed that its physical dimension also was minimum.
Because the irregularity of laser beam, its angle of divergence is not the quantity of being scheduled to, and for the d2 (first lens and the spacing of second lens on optical axis) of this this beam-expanding system is adjustable, it is that mechanical adjustment through lens barrel realizes.
Through regulating the spacing of first, second lens on optical axis is the size of d2=140mm, just can be easily carry out the shaping of directional light to the laser beam of input, and the picture element of this beam-expanding system also balance get very desirablely, whole camera lens volume is also very little.
Fig. 2 has only 3 μ for the disc of confusion figure in the beam-expanding system preferred embodiment of the present invention, judges near Rayleigh, shows to have very high image quality; Fig. 3 is the spherical aberration figure in the beam-expanding system preferred embodiment of the present invention, and is very desirablely calibrated; Fig. 4 can find out that for the optical transfer function MTF figure of the comprehensive image quality evaluation in the beam-expanding system preferred embodiment of the present invention the resolution of this system is high, reaches perfect condition.
Claims (3)
1. a laser beam expanding system is characterized in that, comprising: be positioned at first, second and third lens that the incident direction of light beam is arranged in regular turn, said first lens are the negative lens of curved month type, its curved surface dorsad the incident direction of light crooked; Said second lens are the positive lens of curved month type, its curved surface dorsad the incident direction of light crooked; Said the 3rd lens are the positive lens of planoconvex; And first lens are that two curved surface S1, the S2 of R1=20mm, R2=2.5mm constitute by radius-of-curvature respectively, and the center thickness d1=1mm on its optical axis, material are Nd1: Vd1=1.46/68; Second lens are that two curved surface S3, the S4 of R3=230mm, R4=140mm constitute by radius-of-curvature respectively, and the center thickness d3=2mm on its optical axis, material are Nd3: Vd3=1.5/70; The 3rd lens are R5=0 by radius-of-curvature respectively, and two curved surface S5 of R6=-24mm, S6 constitute, and the center thickness d5=3mm on its optical axis, material are Nd5: Vd5=1.6/41; First lens and the spacing of second lens on optical axis are d2=140mm; Second lens and the spacing of the 3rd lens on optical axis are d4=1.5mm, and the margin tolerance of radius of curvature R 1-R6, center thickness and spacing d1-d5, material Nd1: Vd1-Nd5: Vd5 is ± 5%; After said beam-expanding system can expand the diameter of incoming laser beam 22 times of bundles, be still a branch of directional light and penetrate.
2. laser beam expanding system as claimed in claim 1 is characterized in that: the largest beam diameter of the incoming laser beam that said this laser beam expanding system permission is passed through is 4mm.
3. laser beam expanding system as claimed in claim 1 is characterized in that: said incident laser is that wavelength is the Ultra-Violet Laser of 355nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101025169A CN101762879B (en) | 2010-01-25 | 2010-01-25 | Laser beam expanding system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101025169A CN101762879B (en) | 2010-01-25 | 2010-01-25 | Laser beam expanding system |
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| CN101762879A CN101762879A (en) | 2010-06-30 |
| CN101762879B true CN101762879B (en) | 2012-03-14 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102004319B (en) * | 2010-09-30 | 2012-07-04 | 深圳市大族激光科技股份有限公司 | Ultraviolet zoom beam expander |
| CN103185964B (en) * | 2011-12-30 | 2015-04-01 | 中国科学院安徽光学精密机械研究所 | Ultraviolet multi-wavelength achromatic beam expander lens device |
| CN103322939B (en) * | 2013-06-26 | 2016-04-13 | 中国科学院上海光学精密机械研究所 | Annular polishing machine wax disk surface shape On-line sampling system device |
| CN109445114A (en) * | 2018-12-12 | 2019-03-08 | 常州英诺激光科技有限公司 | Two waveband beam expanding lens optical system |
| CN116365364A (en) * | 2023-02-06 | 2023-06-30 | 无锡亮源激光技术有限公司 | Multi-wavelength laser beam combining device |
| CN116175967A (en) * | 2023-03-30 | 2023-05-30 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014662A1 (en) * | 2005-08-02 | 2007-02-08 | Carl Zeiss Laser Optics Gmbh | Optical system for creating a line focus scanning system using such optical system and method for laser processing of a substrate |
| CN101414052A (en) * | 2008-11-26 | 2009-04-22 | 中国科学院上海技术物理研究所 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
-
2010
- 2010-01-25 CN CN2010101025169A patent/CN101762879B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014662A1 (en) * | 2005-08-02 | 2007-02-08 | Carl Zeiss Laser Optics Gmbh | Optical system for creating a line focus scanning system using such optical system and method for laser processing of a substrate |
| CN101414052A (en) * | 2008-11-26 | 2009-04-22 | 中国科学院上海技术物理研究所 | Galileo type multiple-wave length magnification changeable laser bundle-enlarging collimation system |
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Owner name: HAN S LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Free format text: FORMER NAME: DAZU LASER SCI. + TECH. CO., LTD., SHENZHEN |
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Address after: No. 9988 Nanshan District Shennan Road Shenzhen city Guangdong province 518000 Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: Dazu laser Building No. 9 Nanshan District high tech Park North new road Shenzhen city Guangdong province 518055 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |