CN105033376A - Power supply unit and multi-wire electrical discharge machining apparatus - Google Patents

Power supply unit and multi-wire electrical discharge machining apparatus Download PDF

Info

Publication number
CN105033376A
CN105033376A CN201510214275.XA CN201510214275A CN105033376A CN 105033376 A CN105033376 A CN 105033376A CN 201510214275 A CN201510214275 A CN 201510214275A CN 105033376 A CN105033376 A CN 105033376A
Authority
CN
China
Prior art keywords
power supply
supply terminal
installation portion
supply unit
cylindric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510214275.XA
Other languages
Chinese (zh)
Other versions
CN105033376B (en
Inventor
栗原治弥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Marketing Japan Inc
Makino Milling Machine Co Ltd
Original Assignee
Canon Marketing Japan Inc
Makino Milling Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Marketing Japan Inc, Makino Milling Machine Co Ltd filed Critical Canon Marketing Japan Inc
Publication of CN105033376A publication Critical patent/CN105033376A/en
Application granted granted Critical
Publication of CN105033376B publication Critical patent/CN105033376B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • B23H7/08Wire electrodes
    • B23H7/10Supporting, winding or electrical connection of wire-electrode
    • B23H7/107Current pickups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B23H1/02Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits or other abnormal discharges
    • B23H1/028Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits or other abnormal discharges for multiple gap machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • B23H7/04Apparatus for supplying current to working gap; Electric circuits specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H11/00Auxiliary apparatus or details, not otherwise provided for
    • B23H11/006Electrical contacts or wires

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Connections Arranged To Contact A Plurality Of Conductors (AREA)

Abstract

Provided is a power supply unit, which is to be used for a multi-wire electrical discharge machining apparatus arranged to slice a material to be machined by an electrical discharge generated between a wire group including a plurality of turns of a wire arranged in parallel and the material to be machined, and to which a power supply terminal to be brought into contact with the wire group at a time to supply a voltage to the wire group is mounted, the power supply unit including: a mounting portion to which the power supply terminal to be brought into contact with the wire group at a time is mounted; and an adjusting portion arranged to adjust an inclination of the mounting portion in a direction crossing a running direction of the wire group.

Description

Power supply unit and multi-thread electro erosion plant
Technical field
The present invention relates to power supply unit and multi-thread electro erosion plant, more specifically, relate to the technology of the change of the contact between a kind of power supply terminal reducing line group and contact wire group, wherein, line group comprises the multiple wire turns be arranged in parallel in the lump.
Background technology
In recent years, the method utilizing electric discharge processing simultaneously machined material (such as semi-conducting material, solar cell material and hard material) to be cut into more than one piece at short notice has been developed.
Such as, in order to machined material is cut into thin plate shaped piece, line electro erosion plant control line while being applied on line by power supply terminal by voltage is advanced, and makes machined material near line, to cause electric discharge phenomena.By this way, just electric discharge processing is performed to machined material.
In Japanese Patent Application Publication No.08-19920, describe and use cylindric or columned power supply terminal, and its outer surface is used as the contact position with line electrode.
In addition, in Japanese Patent Application Publication No.04-105821, disclose the power supply terminal be made up of the material (such as copper or brass) that resistance is little, it comprises the electrodeposited coating be made up of the hard material being formed on the surface of the little material of resistance.
The line electro erosion plant be disclosed in respectively in Japanese Patent Application Publication No.08-19920 and No.04-105821 is all single line electro erosion plant.
On the other hand, in the multi-thread electro erosion plant using power supply terminal, wherein said power supply terminal contacts to provide voltage to line group with the line group comprising the multiple wire turns be arranged in parallel in the lump, contact between power supply terminal and line can change, unless power supply terminal and line group are arranged in parallel with each other, and contact with each other in the parallel state.In this case, probably electric power can not be supplied stably to line.
In addition, power to line stabilization if be firmly pressed onto on line by power supply terminal, so the wear intensity of power supply terminal or the injury tolerance of line can adversely increase.Therefore, it is difficult for carrying out stable electric discharge processing for a long time.
Summary of the invention
Given this, the invention provides a kind of system reducing the change of contact between power supply terminal and line group, wherein, power supply terminal contacts with the line group comprising the multiple wire turns be arranged in parallel in the lump.
According to one embodiment of present invention, a kind of power supply unit for multi-thread electro erosion plant is provided, this multi-thread electro erosion plant is configured to utilize the electric discharge produced between online group and machined material to cut machined material, and power supply unit is provided with power supply terminal, power supply terminal in the lump contact wire group provides voltage to line group, this power supply unit comprises: installation portion, and the power supply terminal of contact wire group is installed to described installation portion in the lump; And adjustment part, the direction being configured to intersect along the direct of travel with line group adjusts the inclination angle of described installation portion.
Further aspect of the present invention becomes obvious by from referring to accompanying drawing in the description of exemplary embodiment.
Accompanying drawing explanation
Fig. 1 is the external view from the multi-thread electrical discharge machining system viewed from front.
Fig. 2 A, 2B and 2C illustrate the outer shape of the power supply terminal shown in Fig. 1.
Fig. 3 is included in the side view being provided with the power supply terminal fixed block in the power supply unit of power supply terminal shown in Fig. 1.
Fig. 4 is included in the side view being provided with power supply terminal fixed block in the power supply unit of power supply terminal and power supply terminal fixed block support portion shown in Fig. 1.
Fig. 5 is included in the side view being provided with power supply terminal fixed block in the power supply unit of power supply terminal and power supply terminal fixed block support portion shown in Fig. 1, the figure shows power supply terminal fixed block support portion in the state keeping power supply terminal with the power supply terminal fixed block that moves up while parallel between line group.
Fig. 6 illustrates the view being provided with the power supply unit of power supply terminal from upside viewing.
Fig. 7 illustrates the view being provided with the power supply unit of power supply terminal watched from the right side of Fig. 1.
Fig. 8 illustrates the view being provided with the power supply unit of power supply terminal watched from the right side of Fig. 1, the figure shows line group and power supply terminal uneven state each other.
Fig. 9 illustrates the view being provided with the power supply unit of power supply terminal watched from the right side of Fig. 1, the figure shows and increases the distance between the power supply terminal fixed block of dorsal part and plate by the height adjusting screws of fastening dorsal part and make line group and power supply terminal state parallel to each other.
Figure 10 A, 10B and 10C are the side views of the power supply unit that multiple embodiment is shown.
Figure 11 A is the stereogram of power supply terminal, and described power supply terminal comprises the internal part made with copper or stainless steel and the peripheral part made with carbide alloy, and Figure 11 B is the side view of described power supply terminal, and Figure 11 C is the top view of described power supply terminal.
Figure 12 A is the stereogram of power supply terminal, and the inside that described power supply terminal has sky (hollow) and the peripheral part made with carbide alloy, Figure 12 B is the side view of described power supply terminal, and Figure 12 C is the top view of described power supply terminal.
Figure 13 A, 13B and 13C are the views that the power supply terminal with the axle that the hollow space through power supply terminal inserts is shown.
Figure 14 is the view being provided with the power supply unit of power supply terminal according to a modified example watched from the right side of Fig. 1.
Figure 15 is the view being provided with the power supply unit of power supply terminal according to described modified example from upside viewing.
Figure 16 A, 16B and 16C are the side views that power supply terminal is shown respectively, and wherein, each power supply terminal has mark on its side surface.
Detailed description of the invention
Now, embodiments of the invention are described in detail with reference to the attached drawings.
Fig. 1 is the external view (front view) of the multi-thread electro erosion plant 1 according to the present embodiment from front side viewing.The structure of each mechanism (unit) shown in Fig. 1 is only example.Obviously, according to object and application, there is various structure example.In addition, upward direction herein and the in downward direction corresponding upward direction along gravity direction and in downward direction respectively, and the left direction of this paper and right direction correspond respectively to left direction when watching multi-thread electro erosion plant from front side and right direction.
Multi-thread electro erosion plant 1, power subsystem (power-supply device) 15 and working fluid supply arrangement 18 is comprised according to the multi-thread electrical discharge machining system of the present embodiment.
Multi-thread electrical discharge machining system can utilize electric discharge that machined material 5 (such as silicon ingot) is cut into thin slice in the interval between the multirow line be arranged in parallel.
Multi-thread electro erosion plant 1 is connected to power subsystem 15 by electric wire (voltage applying line), and the electric power provided by power subsystem 15 activates.
By the vertical motion of the charging gear 3 for machined material driven by servomotor (not shown), multi-thread electro erosion plant 1 can vertically move machined material 5, and machined material 5 is tied to the charging gear 3 for machined material by binding portion 4 (such as conducting resinl).
Multi-thread electro erosion plant 1 is the application example of the multi-thread electro erosion plant according to the present embodiment, and utilizes the electric discharge produced between line group 7 and machined material 5 to cut and process machined material 5.
In the present embodiment, machined material 5 makes machined material 5 more near line group 7 along movement in downward direction.Then, produce between machined material 5 and line group 7 and discharge, to perform electric discharge processing to machined material 5.Now, the gap between machined material 5 and line group 7 is full of working fluid.Working fluid has the resistance value in preset range, so create electric discharge between machined material 5 and line group 7.In this way, electric discharge processing can be performed to machined material 5.
Alternatively, also can perform to discharge between machined material 5 and line group 7 in the following manner and process.Particularly, the position for the charging gear 3 of machined material is lower than line group 7.Machined material 5 is moved in upward direction.Then, make machined material 5 closer to line group 7.
In the present embodiment, although silicon ingot to be described as the example of machined material 5, other material (conductor or semiconductor) of the such as carborundum (SiC) not being insulating materials also can be used.
As shown in Figure 1, multi-thread electro erosion plant 1 comprises block 19 and block 2, and block 19 is used as the substrate of multi-thread electro erosion plant 1, and block 2 is arranged on the top of block 19.Multi-thread electro erosion plant 1 also comprises for the charging gear 3 of machined material, binding portion 4, machined material 5, has working fluid and provide the processing liquid bath 6 of port 701, home roll 8, line group 7, home roll 9, power supply unit 10 and power supply terminal 11.
Power subsystem (power-supply device) 15 provides electric power to multi-thread electro erosion plant 1.
Charging gear 3 for machined material is located machined material 5 and is advanced electric discharge processing.In addition, in order to produce electric discharge efficiently according to the state of electric discharge, controlling servomotor with electric discharge servo control circuit, making the discharging gap between machined material 5 and line group 7 keep constant, control the charging gear 3 of machined material.
Charging gear 3 for machined material is the equipment comprising the mechanism vertically moving machined material 5, and machined material 5 is bound (joint) by binding portion 4.By the edge mobile charging gear 3 being used for machined material in downward direction, machined material 5 can closer to line group 7.
Working fluid feedway 18 provides port 701 to provide working fluid to processing liquid bath 6 by pump by working fluid, described working fluid be produce between the online group 7 of cooling and machined material 5 electric discharge electric discharge processing department and remove to process and consider to be worth doing needed for (fragment).In addition, working fluid feedway 18 removes the processing bits in working fluid, the resistance utilizing ion exchange resin controlling and adjustment concrete or conductance (1 μ S/cm to 250 μ S/cm), and controlling and adjustment fluid temperature (near 20 DEG C).Although use water predominantly as working fluid, also electric discharge processing oil can be used.Although use water as the example into working fluid in the present embodiment, also can alternatively use electric discharge processing oil.
Each in home roll 8 and 9 has the guide groove of the predetermined quantity of preset space length, makes machined material 5 can be processed to the thickness expected.From the solid wire 801 with controlled tension force provided for line cylinder (not shown) around two home rolls 8 and 9, form multiple circle (the required number of turn), then send reel to.The gait of march comprising the line group 7 of the circle of the solid wire 801 be arranged in parallel can be set to about 100 ms/min to 900 ms/min.
By the rotation of home roll 9, the line group 7 around home roll 9 is advanced.
Rotated linkedly each other along identical direction with identical speed with 9 by two home rolls 8, from periphery around two home rolls 8 and 9 of the solid wire 801 of line supply unit (for line cylinder) (not shown) supply.As a result, the line group 7 being included in multiple circles of the line 801 be arranged in parallel between home roll 8 and 9 can be advanced along equidirectional.
Line group 7 comprises single continuous print line 801.From supplying line cylinder (not shown) supply line 801.While embedding the guide groove (not shown) being formed on the outer surface of home roll 8 and 9 in a spiral manner around the outer surface of home roll 8 and 9 with after forming multiple circle (the most about 2000 circles), line 801 is wound around by reel (not shown).
Water is provided to the position (point of discharge) in discharging gap by processing liquid bath 6 as working fluid, described water by controlling and adjustment to have the specific electrical resistance (conductance) in preset range, in described position, line group 7 and machined material 5 close to each other, wherein, line group 7 comprises multiple circles (line 801 is also called " line electrode ") of the line 801 be arranged in parallel.
Processing liquid bath 6 stores for producing the working fluid of electric discharge between machined material 5 and line group 7, and processes liquid bath 6 and be installed into and make machining fluid level in processing liquid bath 6 between machined material 5 and line group 7.
Working fluid provides port 701 (being also called " working fluid providing unit ") to be provided to processing liquid bath 6 by the working fluid being formed in processing liquid bath 6 bottom.
Voltage from power subsystem 15 is applied to power supply terminal 11 by electric wire by power supply unit 10.Power supply unit 10 is installed above being and is fixed with the power supply unit of the power supply terminal 11 of voltage to be applied.
Particularly, power supply unit 10 is the power supply units according to the present embodiment, is provided with the power supply terminal 11 contacted with the line group 7 of the multiple circles comprising the line 801 be arranged in parallel in the lump to provide voltage to line group 7 above.
Power supply unit 10 comprises mechanism for axial adjusting (adjustment part), for installing the power supply terminal 11 of cylindric or cylindric (having the shape of hollow), and adjust the inclination angle of the axis of power supply terminal 11 (cylindric or cylindric), to be parallel to the direction (width along this direction arrange the multiple wire turns that comprise in online group 7) vertical with the direct of travel of line group 7.Power supply unit 10 also to comprise power supply terminal 11 (cylindric or cylindric) translation close to or away from line group 7 power supply terminal 11 vertically to be pressed to mechanism's (moving part) of the direct of travel of line group 7.
The only surface of power supply terminal 11 or comprise its inside power supply terminal 11 entity in any one can use opposing mechanical wear and the carbide alloy with electric conductivity is made.
Machined material 5 is placed in above the middle position between home roll 8 and 9.Machined material 5 is installed to the charging gear 3 for machined material.By the vertical motion of the charging gear 3 for machined material, vertically move machined material 5, to make it possible to process machined material 5.
Middle position between home roll 8 and 9, installs processing liquid bath 6.Line group 7 and machined material 5 immerse in the working fluid in processing liquid bath 6, to cool electric discharge processing department, and remove processing bits.
In addition, line 801 is electric conductors.By being provided from the contact between the power supply terminal 11 of the power supply unit 10 of the voltage of power subsystem 15 and line group 7, the voltage provided has been applied to line group 7 by from power supply terminal 11.Particularly, power supply unit 10 applies voltage by power supply terminal 11 to line group 7.
Then, produce between each and machined material 5 in multiple circles of the line 801 be contained in line group 7 and discharge.As a result, machined material 5 can processed (by electric discharge processing), to form lamellar converted products (such as Silicon Wafer).
Next, see Fig. 2 A-2C.Fig. 2 A-2C illustrates the outer shape of the power supply terminal 11 shown in Fig. 1.
Fig. 2 A is the stereogram of power supply terminal 11, and Fig. 2 B is the side view of power supply terminal 11, and Fig. 2 C is the top view of power supply terminal 11.As seen in figs. 2a-2c, power supply terminal 11 is cylindric.
As mentioned above, by forming columned power supply terminal 11, can by use power supply terminal 11 by electric power uniformly (in the lump) be supplied to line group 7.In addition, the infringement to line group 7 caused by the contact between power supply terminal 11 and line group 7 can be reduced.In addition, the whole outer surface of cylindric power supply terminal 11 can as the part contacted with line group 7.Therefore, the frequency changing power supply terminal 11 can be reduced, and power supply terminal 11 can use the longer time.
Next, with reference to Fig. 3.
Fig. 3 is the side view that the power supply terminal fixed block 301 be included in the power supply unit 10 being provided with power supply terminal 11 shown in Fig. 1 is shown.
Particularly, Fig. 3 shows the power supply terminal fixed block 301 being included in when watching multi-thread electro erosion plant 1 from front side and being provided with in the power supply unit 10 of power supply terminal 11.
As shown in Figure 3, multiple circle of line 801 in online group 7 is comprised and the outer surface of cylindric power supply terminal 11 keeps in touch.
Power supply terminal fixed block 301 is application examples of the installation portion according to the present embodiment.The power supply terminal 11 with the peripheral part contacted with line group 7 is installed to power supply terminal fixed block 301 in the lump.
In addition, power supply terminal fixed block 301 is the blocks for fixing power supply terminal 11, and has the depression of the shape of the circular section shape meeting cylindric power supply terminal 11, and power supply terminal 11 can be installed on wherein.
A depression (part for installation portion, power supply terminal is installed on wherein) shape that has makes the central point of the circular cross-section of cylindric or cylindric power supply terminal be positioned at installation portion inside, and at least half of the outer surface of cylindric or cylindric power supply terminal keeps and this dimple contacts.
As shown in Figure 3, otch (depression) is formed on power supply terminal fixed block 301, makes the central point 111 of the circular cross-section of power supply terminal 11 be positioned at the inside of power supply terminal fixed block 301.By the columned power supply terminal 11 that slides axially along power supply terminal 11, power supply terminal 11 can be installed to power supply terminal fixed block 301.
By the columned power supply terminal 11 that slides axially simply along power supply terminal 11, make power supply terminal 11 be installed to power supply terminal fixed block 301, can expect owing to contacting with the line group 7 of advancing, so power supply terminal 11 can rotate undesirably.In order to avoid power supply terminal 11 rotates, the hold-down screw 302 being used for fixing power supply terminal 11 is set.
Hold-down screw 302 inserts through the screw be formed in power supply terminal fixed block 301, to contact with power supply terminal 11, thus fixing power supply terminal 11.
Hold-down screw 302 is application examples of the first fixed part according to the present embodiment, and is with the parts of fixing power supply terminal 11 along the direction pressing power supply terminal 11 towards installation portion.
Next, with reference to figure 4,5,6 and 7, the power supply unit 10 being provided with power supply terminal 11 shown in Fig. 1 and power supply terminal fixed block support portion 402 are described.
Fig. 4 is included in the side view of power supply terminal fixed block 301 in the power supply unit 10 being provided with power supply terminal 11 shown in Fig. 1 and power supply terminal fixed block support portion 402.
Fig. 5 is included in the side view of power supply terminal fixed block 301 in the power supply unit 10 being provided with power supply terminal 11 shown in Fig. 1 and power supply terminal fixed block support portion 402, the figure shows and is keeping power supply terminal 11 and power supply terminal fixed block support portion 402 while parallel between line group 7 to move up the state of power supply terminal fixed block 301.
Fig. 6 is the view of the power supply unit 10 being provided with power supply terminal 11 illustrated from upside viewing.Fig. 7 is the view that the power supply unit 10 being provided with power supply terminal 11 watched from the right side of Fig. 1 is shown.
As shown in Figure 4, power supply unit 10 comprises power supply terminal fixed block 301 and power supply terminal fixed block support portion 402.
As shown in figs. 4 and 6, power supply terminal fixed block 301 comprises for the hold-down screw 302 of fixing power supply terminal 11, height adjusting screws 603, trip bolt 602 and the screw for each screw.
In addition, as shown in figs. 4 and 6, power supply terminal fixed block support portion 402 comprises insulation board 403, plate 601, hold-down screw 405, the lever 404 comprising axle fixed part 409, axle 406, hold-down screw 407 and cam 408.As shown in Fig. 4,6 and 7, power supply terminal fixed block support portion 402 comprises further and having for the plate 501 of the screw of trip bolt 602, trip bolt 401, axle 604 and axle 406.
Although power supply terminal fixed block 301 is described to the example of the installation portion according to the present embodiment, the combination of power supply terminal fixed block 301 and power supply terminal fixed block support portion 402 can be used as the installation portion according to the present embodiment.
Power supply terminal fixed block support portion 402 comprises insulation board 403, to avoid the block 19 of voltage leak to the substrate as power supply unit 10 being supplied to power supply terminal 11 from power subsystem 15 by electric wire.Insulation board 403 is the plates comprising the parts be made up of insulator.
In addition, as shown in Figure 6, power supply terminal fixed block 301 and power supply terminal fixed block support portion 402 fastening by trip bolt 602.
In the present embodiment, describe the example of power supply unit 10, wherein, power supply terminal fixed block 301 and power supply terminal fixed block support portion 402 are formed as independently individual, and fastening by screw etc.But power supply terminal fixed block 301 and power supply terminal fixed block support portion 402 can by integrated to be used as power supply unit 10.
Hold-down screw 401 becomes for by secured to one another for plate 601 and 501 and along the support portion (rotating shaft) of gravity direction movable plate 501 rotatably up or down.
In addition, lever 404 is secured to axle 406, and axle 406 has the cam 408 of elliptical shape by hold-down screw 407 fastening (coupling) to watching from front side.
Each being included in axle fixed part in lever 404 409 (axle fixed part 409 and lever 404 form as one) and axle 406 has the screw for hold-down screw 407.By hold-down screw 407, axle 406 and lever 404 fastened.
In addition, hold-down screw 405 is set and maintains the state coming after movable plate 501 by the rotation that is axis with hold-down screw 401.Lever 404 is fixed by being fastened and fixed screw 405.
Hold-down screw 405 is application examples of the fixed part according to the present embodiment, and the installation portion by moving part movement is fixed to the position after moving.
Axle 406 is installed in the hole of the plate 601 being arranged on front side and rear side (hole that axle 406 passes).It is oval cam 408 that axle 406 is coupled to cross section.
Therefore, when lever 404 as shown in Figure 5 with axle 406 be axis to anticlockwise time, cam 408 contact plate 501, with make plate 501 can with from hold-down screw 401 to the straight line of axle 604 for axis is to anticlockwise.So power supply terminal 11 can move up along gravity direction.
When cam 408 rotates centered by axle 406, hold-down screw 405 also to anticlockwise, as shown in Figure 5.Due to the movement of hold-down screw 405, arcuation groove (not shown) is formed in the plate 601 of front side.
Lever 404, axle 406, cam 408, plate 501 and hold-down screw 407 are application examples of the moving part according to the present embodiment.
As mentioned above, according to the moving part of the present embodiment to maintain the state at the inclination angle of the installation portion adjusted by following adjustment part, installation portion is moved to the position (moving installation portion along the direction towards line group 7) of the power supply terminal 11 contact wire group 7 be installed on installation portion.
Plate 501 is fastened to power supply terminal fixed block 301 by trip bolt 602.
Plate 501 is application examples of the support portion according to the present embodiment, and trip bolt 602 is application examples of the fastening part according to the present embodiment.
Trip bolt 602 (fastening part) by tighten by power supply terminal fixed block 301 (installation portion) and the plate 501 (support portion) for supporting power supply terminal fixed block 301 secured to one another.
Although power supply terminal fixed block 301 and plate 501 can not be completely fixed by trip bolt 602 each other, have loosening while trip bolt 602 is fastening between maintenance power supply terminal fixed block 301 and plate 501.Therefore, according to the degree pressing height adjusting screws 603 to plate 501, the distance between power supply terminal fixed block 301 and plate 501 can increase or reduce.
Trip bolt 602 can at least a position by power supply terminal fixed block 301 and plate 501 secured to one another.In addition, when trip bolt 602 is in multiple position when fastening power supply terminal fixed block 301 and plate 501, one of trip bolt 602 can be arranged at least one position away from another trip bolt 602, the direction that intersects along the direct of travel with line group 7.In addition, trip bolt 602 can be arranged in any one in power supply terminal fixed block 301 and plate 501, as long as power supply terminal fixed block 301 and plate 501 can be secured to one another.
Plate 601 is arranged on front side and the rear side of power supply terminal fixed block support portion 402 respectively, and is fixed to plate 501 by hold-down screw 401 and axle 604.
Height adjusting screws 603 adjusts the height between plate 501 and power supply terminal fixed block 301, makes power supply terminal 11 parallel with the direction (layout comprises the width organizing multiple wire turns of the line 801 in 7 online) of the direct of travel circle perpendicular to line group 7.Height adjusting screws 603 is application examples of the adjustment part (mechanism for axial adjusting) according to the present embodiment.
The adjustment part of the present embodiment adjusts the inclination angle of installation portion along the direction that the direct of travel with line group 7 intersects.Particularly, adjustment installation portion in adjustment part comprises the inclination angle in the direction of multiple circles of the line 801 in online group 7 relative to be arrangeding in parallel.
In position away from each other, the direction intersected along the direct of travel with line group 7, multiple height adjusting screws 603 (adjustment part) is installed to power supply terminal fixed block 301 (installation portion), as shown in Fig. 6 etc.
At height adjusting screws 603 by height adjusting screws 603 and the screw be formed in power supply terminal fixed block 301 being engaged and fastening and position on plate 501 that is that contact with plate 501 after movement, the not screw of height of formation adjustment screw 603.Therefore, by fastening height adjusting screws 603, height adjusting screws 603 pressing plate 501 increases and adjusts the distance between power supply terminal fixed block 301 and plate 501.
Therefore, height adjusting screws 603 can in the position of the direction intersected along the direct of travel with line group 7 away from trip bolt 602, the distance between adjustment power supply terminal fixed block 301 and plate 501, as shown in FIG. 8 and 9.
Fig. 8 is the view of the power supply unit 10 being provided with power supply terminal 11 watched from the right side of Fig. 1, the figure shows line group 7 and power supply terminal 11 uneven state each other.
In fig. 8, the distance (L2) between the line 801 of front side and power supply terminal 11 is shorter than the distance (L1) between the line 801 of rear side and power supply terminal 11.
Therefore, by the height adjusting screws 603 of fastening rear side, the distance between the power supply terminal fixed block 301 of rear side and plate 501 is increased, and makes line group 7 and power supply terminal 11 parallel to each other.
State shown in Fig. 9 increases distance between the power supply terminal fixed block 301 of rear side and plate 501 by the height adjusting screws 603 of fastening rear side, makes line group 7 and power supply terminal 11 parallel to each other.
Fig. 9 is the view that the power supply unit 10 being provided with power supply terminal 11 watched from the right side of Fig. 1 is shown, the figure shows and increase distance between the power supply terminal fixed block 301 of rear side and plate 501 by the height adjusting screws 603 of fastening rear side, make the state that line group 7 and power supply terminal 11 are parallel to each other.In fig .9, the line group 7 of front side is all identical distance L2 with the distance between the line group 7 on rear side of the Distance geometry between power supply terminal 11 and power supply terminal 11.
Make as mentioned above line group 7 and power supply terminal 11 parallel to each other after, lever 404 is as shown in Figure 5 to anticlockwise.So power supply terminal 11 can contact in parallel with each other with line group 7.
Next, the modified example of power supply terminal 11 is described.
Power supply terminal 11 is described, as shown in Figure 10 A under the prerequisite be made up of carbide alloy 1001 at power supply terminal 11.But the inside of power supply terminal 11 can be formed the parts made with copper 1002 or stainless steel, as shown in Figure 10 B.
In addition, as illustrated in figure 10 c, the inside of power supply terminal 11 can be formed as empty (hollow 1003).
Figure 10 A-10C is the side view of the power supply terminal 11 according to multiple embodiment.
Figure 11 A-11C is the stereogram (Figure 11 A) of power supply terminal 11, side view (Figure 11 B) and top view (Figure 11 C), power supply terminal 11 comprises the internal part made with copper 1002 or stainless steel and the peripheral part made with carbide alloy 1001, as shown in Figure 10 B.
As shown in Figure 11 A-11C, the inside of carbide alloy 1001 is full of copper 1002.Copper 1002 is set to there is the length longer than the axial length of the carbide alloy 1001 of power supply terminal 11.
As mentioned above, power supply terminal 11 comprises the internal part made with copper 1002 or stainless steel and the peripheral part made with carbide alloy 1001, and copper 1002 or stainless steel are cheap and resistance is little compared with carbide alloy 1001.So, power supply terminal 11 can be manufactured with low cost.
Power supply terminal 11 shown in Figure 11 A-11C is columned power supply terminals.As shown in Figure 11 A-11C, columned power supply terminal comprises internal part (parts be made up of copper 1002 or stainless steel), and the resistance of described internal part is lower than the peripheral part (carbide alloy 1001) of power supply terminal.The internal part that resistance is low is also formed in two axial end portions of cylindric power supply terminal.
The low parts of the resistance described in the present embodiment are by comprising copper or stainless material is made.
Next, Figure 12 A-12C is the stereogram (Figure 12 A) of power supply terminal 11, side view (Figure 12 B) and top view (Figure 12 C), the inside of power supply terminal 11 is formed empty (hollow 1003), peripheral part is made up of carbide alloy 1001, as illustrated in figure 10 c.Power supply terminal shown in Figure 12 A-12C is cylindric power supply terminal.
When use above-mentioned there is the power supply terminal 11 of hollow 1003 time, axle 1301 inserts the inner space of cylindric power supply terminal, and as shown in Figure 13 A-13C, wherein, axle 1301 is by and copper 1002 that resistance low or parts that stainless steel make more cheap than carbide alloy 1001.In this way, the central part (axle 1301) be included in power supply terminal 11 can be reused.Figure 13 A-13C is the stereogram (Figure 13 A) of power supply terminal 11, side view (Figure 13 B) and top view (Figure 13 C), and power supply terminal 11 has the axle 1301 of insertion hollow 1003 wherein as seen in figures 12 a-12 c.
Even with reference to described in Figure 11 A-11C in this case, still use the axle 1301 with the length longer than the axial length of the carbide alloy 1001 be included in power supply terminal.
Particularly, axle 1301 is the axles being inserted into cylindric power supply terminal, and is the parts (parts be made up of copper 1002 or stainless steel) that resistance is lower than the peripheral part (carbide alloy 1001) of power supply terminal.The length of axle 1301 is longer than the axial length of power supply terminal 11.
Next, the method power supply terminal 11 that the modified example above according to Figure 11 A-11C and 13A-13C describes being fixed to power supply terminal fixed block 301 is described.
When being fixed on power supply terminal fixed block 301 according to the power supply terminal 11 of above-mentioned modified example, as shown in FIG. 14 and 15, power supply terminal fixed block 301 and copper 1002 or axle 1301 fastening by power supply terminal hold-down screw 1401.
Power supply terminal hold-down screw 1401 is application examples of the second fixed part according to the present embodiment.Be formed in the two ends of the low resistance parts of the axial end portion of cylindric power supply terminal or any one end by along towards to be affixed to the direction of installation portion press.
In addition, power supply terminal hold-down screw 1401 is application examples of the 3rd fixed part according to the present embodiment.Insert the two ends of the axle of cylindric power supply terminal or any one end by along towards to be affixed to the direction of installation portion press.
Fix power supply terminal 11 in this way, rotate due to advancing of line 801 to avoid power supply terminal 11.In addition, do not need to use the hold-down screw 302 shown in Fig. 3.Therefore, it is possible to reduction hold-down screw 302 damages the risk of the outer surface of power supply terminal.
Figure 16 A-16C illustrates that there is the view of the example of the power supply terminal 11 of mark 1601 side.Figure 16 A is the side view of the power supply terminal 11 having mark 1601, and it is made up of carbide alloy 1001.Figure 16 B is the side view of the power supply terminal 11 having mark 1601, the internal part that the resistance that described power supply terminal 11 comprises such as copper 1002 is low.Figure 16 C is the side view of the power supply terminal 11 having mark 1601, and the inside of described power supply terminal 11 is formed as hollow 1003.
As shown in Figure 16 A-16C, mark 1601 is arranged on the side surface of power supply terminal 11.Therefore, the rotary distance (angle) of power supply terminal 11 can easily be obtained.
In the present embodiment, the example that height adjusting screws 603 is installed to power supply terminal fixed block 301 has been described, as shown in Figure 8.Alternatively, height adjusting screws 603 can be installed to plate 501.In this case, the screw for height adjusting screws 603 is formed in plate 501, and described screw is not formed in power supply terminal fixed block 301.
In this case, height adjusting screws 603 by height adjusting screws 603 and the screw be formed in plate 501 engaged with fastening and contact with power supply terminal fixed block 301 after movement, position on power supply terminal fixed block 301, do not form the screw for height adjusting screws 603.Therefore, by fastening height adjusting screws 603, height adjusting screws 603 presses power supply terminal fixed block 301 to be increased and adjusts the distance between power supply terminal fixed block 301 and plate 501.Even in this case, height adjusting screws 603 is installed to plate 501 in position away from each other, the direction intersected along the direct of travel with line group 7.Therefore, height adjusting screws 603 can adjust installation portion comprises the direction of multiple circles of the line 801 in online group 7 inclination angle relative to be arrangeding in parallel.
As mentioned above, according to the present embodiment, power supply unit 10 for multi-thread electro erosion plant 1 comprises installation portion and adjustment part, installation portion is provided with the power supply terminal 11 contacted with the line group 7 of the multiple circles comprising the line 801 be arranged in parallel in the lump, adjustment part is used for the inclination angle adjusting installation portion along the direction that the direct of travel with line group 7 intersects.Therefore, power supply terminal 11 and the be arrangeding in parallel of line group 7 comprising the multiple wire turns be arranged in parallel can easily be adjusted.As a result, can reduce the change of contact between power supply terminal 11 and line group 7, wherein, power supply terminal 11 contacts with the line group 7 of the multiple circles comprising the line 801 be arranged in parallel in the lump.
In addition, concept of the present invention can be applied to the embodiment of such as system, equipment and method.More specifically, concept of the present invention can be applied to the equipment at least comprising an equipment.
Although describe the present invention with reference to exemplary embodiment, should be appreciated that the present invention is not limited to disclosed exemplary embodiment.The scope of following claims is consistent with the most wide in range explanation, to contain the 26S Proteasome Structure and Function of all this kind of modification and equivalence.

Claims (12)

1. a power supply unit, for multi-thread electro erosion plant, this multi-thread electro erosion plant is configured to utilize the electric discharge produced between online group and machined material to cut machined material, described line group comprises the multiple wire turns be arranged in parallel, and described power supply unit is provided with power supply terminal, described power supply terminal contacts described line group in the lump and provides voltage to described line group, and this power supply unit comprises:
Installation portion, the power supply terminal contacting described line group is in the lump installed to described installation portion; With
Adjustment part, the direction being configured to intersect along the direct of travel with described line group adjusts the inclination angle of described installation portion.
2. power supply unit as claimed in claim 1, wherein, described adjustment part is included in the direction of the multiple wire turns in described line group to adjust the inclination angle of described installation portion along be arrangeding in parallel.
3. power supply unit as claimed in claim 1, wherein, the position away from each other, direction that multiple described adjustment part is intersecting along the direct of travel with described line group is installed to described installation portion.
4. power supply unit as claimed in claim 1, comprises further:
Support portion, is configured to support described installation portion;
Fastening part, be configured to by described installation portion and described support portion secured to one another;
Wherein, described adjustment part adjusts the distance between described installation portion and described support portion in the position away from described fastening part along the direction that the direct of travel of described line group intersects.
5. power supply unit as claimed in claim 1, comprise moving part further, under the state that described moving part is provided in the inclination angle keeping the installation portion adjusted by described adjustment part, described installation portion is moved to along the direction towards described line group the position that the power supply terminal being installed on described installation portion contacts described line group.
6. power supply unit as claimed in claim 5, comprise fixed part further, described fixed part is configured to the position fixed by the described installation portion by described moving part movement after movement.
7. power supply unit as claimed in claim 1, wherein,
Described power supply terminal is cylindric or cylindric; And
Described power supply terminal is installed to described installation portion, makes the outer surface of described power supply terminal contact described line group in the lump.
8. power supply unit as claimed in claim 1, wherein,
Described power supply terminal is cylindric or cylindric;
The part of the described power supply terminal of installation of described installation portion has following shape: the central point of the circular cross-section of cylindric or cylindric power supply terminal is positioned at the inside of described installation portion, and at least half of the outer surface of cylindric or cylindric power supply terminal keeps and described part contact; And
Described power supply unit comprises the first fixed part further, and the first fixed part is configured to press described power supply terminal so that described power supply terminal is fixed to described installation portion to described installation portion.
9. power supply unit as claimed in claim 1, wherein,
Described power supply terminal is cylindric;
Cylindric power supply terminal comprises internal part, and the resistance of described internal part is lower than the resistance of the periphery parts of described power supply terminal;
Described internal part is formed in two axial end portions of cylindric power supply terminal further; And
Described power supply unit comprises the second fixed part further, second fixed part is configured to press at least one end be formed in the two ends of the described internal part of two axial end portions of cylindric power supply terminal, so that described power supply terminal is fixed to described installation portion along the direction towards described installation portion.
10. power supply unit as claimed in claim 1, wherein,
Described power supply terminal is cylindric; And
Described power supply unit comprises further:
Axle, it inserts the inner space of cylindric power supply terminal, and described axle comprises resistance and parts that length than the axial length of described power supply terminal longer lower than the resistance of power supply terminal; With
3rd fixed part, it is configured at least one end of inserting along the direction pressing towards described installation portion in the two ends of the described axle of the inner space of cylindric power supply terminal, so that described power supply terminal is fixed to described installation portion.
11. power supply units as claimed in claim 9, wherein, have more low-resistance described internal part and are made up of the material comprising one of copper and stainless steel.
12. 1 kinds of multi-thread electro erosion plants, comprise power supply unit according to claim 1.
CN201510214275.XA 2014-04-30 2015-04-30 Power supply unit and multi-thread electro erosion plant Active CN105033376B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014094051 2014-04-30
JP2014-094051 2014-04-30
JP2015017627A JP5983791B2 (en) 2014-04-30 2015-01-30 Power supply unit, multi-wire electric discharge machine
JP2015-017627 2015-01-30

Publications (2)

Publication Number Publication Date
CN105033376A true CN105033376A (en) 2015-11-11
CN105033376B CN105033376B (en) 2017-10-10

Family

ID=54354532

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510214275.XA Active CN105033376B (en) 2014-04-30 2015-04-30 Power supply unit and multi-thread electro erosion plant

Country Status (4)

Country Link
US (1) US10086457B2 (en)
JP (1) JP5983791B2 (en)
CN (1) CN105033376B (en)
TW (1) TWI581881B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111408804A (en) * 2020-04-28 2020-07-14 常州工学院 Gap-adjusting type bent hole electrolytic machining device and method

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584451A (en) * 1983-04-22 1986-04-22 Inoue-Japax Research Incorporated Wire EDM with guide member changer
JPH02139025U (en) * 1989-04-20 1990-11-20
JPH04135121A (en) * 1990-09-21 1992-05-08 Hoden Seimitsu Kako Kenkyusho Ltd Current conduction device of wire electric discharge machine
US5319175A (en) * 1992-12-23 1994-06-07 Basix Industries Ltd. Apparatus for transferring electrical current to and from a moving wire
CN1754643A (en) * 2004-09-29 2006-04-05 发那科株式会社 Wire-cut electric discharge machine
JP2010005735A (en) * 2008-06-26 2010-01-14 Mitsubishi Electric Corp Multi-wire electrical discharge machining apparatus
CN103028797A (en) * 2012-11-30 2013-04-10 南昌大学 Device for prolonging service life of wire-electrode cutting conductive block
CN103228387A (en) * 2010-11-24 2013-07-31 三菱电机株式会社 Wire discharge apparatus and semiconductor wafer manufacturing method
JP2013180370A (en) * 2012-03-01 2013-09-12 Canon Marketing Japan Inc Power supply unit, wire electrical discharge machining apparatus, method of power supply and workpiece

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105821A (en) 1990-08-28 1992-04-07 Fanuc Ltd Feeding piece for wire cut electric discharging machine
JPH0819920A (en) 1994-07-06 1996-01-23 Mitsubishi Electric Corp Wire electric discharge machine
JPH09248719A (en) * 1996-03-12 1997-09-22 Shin Etsu Handotai Co Ltd Cutting method and device of semiconductor ingot for epitaxial wafer semiconductor
JP4629393B2 (en) * 2004-09-10 2011-02-09 三菱電機株式会社 Wire electrical discharge machine
US20100187203A1 (en) * 2007-01-25 2010-07-29 University Of Utah Research Foundation Multi-wire electron discharge machine
JP5430771B2 (en) * 2010-10-01 2014-03-05 三菱電機株式会社 Wire electric discharge machining apparatus, wire electric discharge machining method, thin plate manufacturing method, and semiconductor wafer manufacturing method
JP5088975B2 (en) * 2010-10-19 2012-12-05 株式会社ソディック Wire electrical discharge machine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584451A (en) * 1983-04-22 1986-04-22 Inoue-Japax Research Incorporated Wire EDM with guide member changer
JPH02139025U (en) * 1989-04-20 1990-11-20
JPH04135121A (en) * 1990-09-21 1992-05-08 Hoden Seimitsu Kako Kenkyusho Ltd Current conduction device of wire electric discharge machine
US5319175A (en) * 1992-12-23 1994-06-07 Basix Industries Ltd. Apparatus for transferring electrical current to and from a moving wire
CN1754643A (en) * 2004-09-29 2006-04-05 发那科株式会社 Wire-cut electric discharge machine
JP2010005735A (en) * 2008-06-26 2010-01-14 Mitsubishi Electric Corp Multi-wire electrical discharge machining apparatus
CN103228387A (en) * 2010-11-24 2013-07-31 三菱电机株式会社 Wire discharge apparatus and semiconductor wafer manufacturing method
JP2013180370A (en) * 2012-03-01 2013-09-12 Canon Marketing Japan Inc Power supply unit, wire electrical discharge machining apparatus, method of power supply and workpiece
CN103028797A (en) * 2012-11-30 2013-04-10 南昌大学 Device for prolonging service life of wire-electrode cutting conductive block

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111408804A (en) * 2020-04-28 2020-07-14 常州工学院 Gap-adjusting type bent hole electrolytic machining device and method
CN111408804B (en) * 2020-04-28 2020-12-18 常州工学院 Gap-adjusting type bent hole electrolytic machining device and method

Also Published As

Publication number Publication date
JP2015221488A (en) 2015-12-10
TW201600203A (en) 2016-01-01
CN105033376B (en) 2017-10-10
TWI581881B (en) 2017-05-11
US20150314384A1 (en) 2015-11-05
JP5983791B2 (en) 2016-09-06
US10086457B2 (en) 2018-10-02

Similar Documents

Publication Publication Date Title
CN101361408B (en) Charge neutralizer and discharge module
CN104868092A (en) Manufacturing apparatus of coating film product
KR101441532B1 (en) Continuous plating apparatus
MXPA04001545A (en) Segmented counterelectrode for an electrolytic treatment system.
CN105033376A (en) Power supply unit and multi-wire electrical discharge machining apparatus
CN103124611B (en) Wire electric discharge machining apparatus, wire electric discharge machining method, thin board manufacturing method, and semiconductor wafer manufacturing method
KR101878632B1 (en) A processing device of Circuit Breakers terminal block
KR20190045576A (en) Wire stripping apparatus
US6855239B1 (en) Plating method and apparatus using contactless electrode
CN107681565A (en) A kind of automatic wire stripping apparatus
US20130228553A1 (en) Multi-wire electrical discharge machining system, multi-wire electrical discharge machining apparatus, power supply device, multi-wire electrical discharge machining method, semiconductor substrate, solar cell substrate, substrate manufacturing system, and substrate manufacturing method
JP6274254B2 (en) Power supply unit, multi-wire electric discharge machine
CN207303852U (en) Cable peeling device and recovery system
KR20110064758A (en) Lower wire guiding apparatus of wire cut electric dischange machine
WO2008010090A2 (en) A device suitable for electrochemically processing an object as well as a method for manufacturing such a device, a method for electrochemically processing an object, using such a device, as well as an object formed by using such a method
KR20160074643A (en) Method for forming and annealing an insulated conductor
KR101623711B1 (en) Electrode contact device for plating
CN211073806U (en) Cutting device of electrolytic copper foil
US11241749B2 (en) Electrical discharge machining method and electrical discharge machining device
KR20060099038A (en) Electrode contact device of sequent plating apparatus
JP2013180370A (en) Power supply unit, wire electrical discharge machining apparatus, method of power supply and workpiece
KR20140140170A (en) Apparatus for coating of metal plate
JP2015208841A (en) Power supply element, power supply unit, multi-wire discharge machining apparatus
US3377260A (en) Electrochemical machining using a wheel electrode having a slotted periphery
CN203973643U (en) A kind of blank structure for conveying that excises IDC stuck point equipment

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant