CN105026874B - Gas cooler - Google Patents
Gas cooler Download PDFInfo
- Publication number
- CN105026874B CN105026874B CN201480010331.1A CN201480010331A CN105026874B CN 105026874 B CN105026874 B CN 105026874B CN 201480010331 A CN201480010331 A CN 201480010331A CN 105026874 B CN105026874 B CN 105026874B
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- China
- Prior art keywords
- cooling tube
- cooling
- cooling chamber
- moving body
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001816 cooling Methods 0.000 claims abstract description 134
- 239000000428 dust Substances 0.000 claims abstract description 51
- 230000007246 mechanism Effects 0.000 claims abstract description 39
- 238000007789 sealing Methods 0.000 claims abstract description 34
- 239000007789 gas Substances 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000007914 intraventricular administration Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000008093 supporting effect Effects 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 229910021577 Iron(II) chloride Inorganic materials 0.000 description 1
- 241000222712 Kinetoplastida Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/023—Cleaning the external surface
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28G—CLEANING OF INTERNAL OR EXTERNAL SURFACES OF HEAT-EXCHANGE OR HEAT-TRANSFER CONDUITS, e.g. WATER TUBES OR BOILERS
- F28G1/00—Non-rotary, e.g. reciprocated, appliances
- F28G1/08—Non-rotary, e.g. reciprocated, appliances having scrapers, hammers, or cutters, e.g. rigidly mounted
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Cleaning In General (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of gas cooler, can minimize, and can prevent that exhaust from spilling and can stably dedusting to outside.The gas cooler (1) of the present invention has：Many cooling tubes (5), they are configured in cooling chamber (3)；Dust removal component (7), it is arranged on the side face of cooling tube in the way of it can slide；Reciprocating device (9), it makes dust removal component be moved along the axial reciprocating of cooling tube.Reciprocating device possesses：Holding member (17), it, which remains dust removal component, can move back and forth and be stretched out along the direction that the axial direction with cooling tube intersects；Opening portion (19), it is arranged at the side wall (3a) of cooling chamber, holding member can be made to stretch out and be moved back and forth from cooling chamber side；Sealing mechanism (21), it prevents that the gas in cooling chamber from leaking into outside；Moving body (22), it supports the holding member stretched out from opening portion and can moved back and forth；And drive mechanism (24), it moves back and forth moving body.
Description
Technical field
The present invention relates to a kind of for example highly concentrated to manufacture to the siliconising processing by using CVD (chemical vapour deposition technique)
Like that, the exhaust containing dust is cooled down the gas cooler (exhaust cooling device) that the exhaust of the equipment of degree silicon strip is cooled down
Gas cooler.
Background technology
The exhaust for manufacturing the furnace apparatus of high silicon strip contains frerrous chloride (FeCl2, hereinafter referred to as iron chloride), material tool
There are 1024 DEG C of boiling point, the physical property of 670 DEG C of fusing point.
If the exhaust is quenched to fusing point from in-furnace temperature, iron chloride is generated as fine powder in exhaust.
In the case where that will be vented from the temperature further cooling using gas cooler, adhere to chlorination in the thermal conductive surface of gas cooler
Iron (dust).Therefore, dust arrester is needed in gas cooler.If without dust arrester, not only cooling capacity reduction, row
Flow channel also can be because blocking being attached to the iron chloride of thermal conductive surface, and the operating of stove can not continue.
Therefore, the cooling tube for being attached to and constituting thermal conductive surface can be simply removed by being urgently desired to have in gas cooler
The mechanism of the growth of the dust in portion and the attachment being prevented from produced by the dust in cooling tube sections.For example, in patent text
Offer and the gas cooler with the mechanism for removing the dust accompanying by cooling tube is proposed in 1.
Gas cooler disclosed in patent document 1 is disclosed with " dedusting mechanism, the dedusting mechanism is by such as lower component structure
Into：Dedusting plate, it has multiple patchholes that can be slidably inserted into or be loosely inserted into for cooling tube, and with above-mentioned
The mode that each patchhole inserted or be loosely inserted into cooling tube is installed on above-mentioned multiple cooling tubes；And travel mechanism, it makes
The dedusting plate is moved axially relative to the pipe of cooling tube " (with reference to the claim 1 of patent document 1).
As travel mechanism, described in patent document 1 in above-mentioned each dedusting plate via by gland packing and airtight use
Axle sleeve constitute seal and be connected with insertion machine in sliding axle front end, by make the sliding axle its long side direction slide
It is dynamic, each dedusting plate is slid axially along the pipe of cooling tube.More specifically, describe and drive device is used in travel mechanism
(air cylinder device), the multiple sliding axles overhang to machine are linked using web, are connected with the web as driving dress
The bar for the air cylinder device put.
Patent document 1：Japanese Patent Publication 5-27049 publications
As disclosed in Patent Document 1, dedusting plate has multiple patchholes in entire surface, and multiple cooling tubes are loose
Ground runs through the patchhole, and is allowed to move back and forth.
Dedusting plate is configured at the cooling chamber that supplied gas passes through.The actuator configuration of dedusting plate is driven in the outer of cooling chamber
Side.Therefore, drive mechanism needs that sealing will have been carried out so that the drive shaft that gas is not spilt inserts cooling chamber on the outside of machine
It is interior, drive shaft and the guiding that is moved along a straight line are supported, thus makes dedusting plate to reciprocal along the axially direction of cooling tube
It is mobile.In other words, in such a device, it is necessary to maintain sealing and moved linearly.
However, in the composition of patent document 1, due to sliding axle and drive shaft while bearing load and the powder of dedusting plate
The resistance of dirt while moved back and forth, therefore in order to prevent the flexure of sliding axle and drive shaft, it is necessary to improve above-mentioned axle, its
The rigidity of support.If in addition, strengthen the closure of sliding part in order to improve sealing effectiveness, correspondingly resistance to sliding
Uprise, and need further to increase driving force.
Therefore, in the drive mechanism for driving conventional dedusting plate, exist to realize stable driving and device is overall
The problem of maximizing such.
Therefore, it is desirable to develop a kind of can minimize and get both sealing and the gas cooler of stable driving.
In addition, problem as described above is not limited to the pump-down process life in high silicon steel plate manufacture CVD processing equipments
The gas cooler that producing line is set, in the pipe group constituted with the cooling tube by multiple straight pipe types arranged side by side in cooling chamber, and
It is universal problem to be attached to removal in the gas cooler of the function of the dust of these pipe groups.
The content of the invention
The present invention completes to solve above-mentioned problem, it is therefore intended that provide a kind of gas cooler, it can be real
The miniaturization of existing dust arrester, lightness, and prevent that exhaust, to External leakage, cooling is attached to while can stably remove
The dust of pipe.
(1) gas cooler involved in the present invention has：Water cooling tube group, it is configured at the cooling chamber of supplied gas circulation
It is interior；Dust removal component, it can reciprocatingly be arranged on the side face of each cooling tube of water cooling tube group；Reciprocating device, its energy
Enough move axial reciprocating of the dust removal component along above-mentioned cooling tube,
Above-mentioned reciprocating device possesses：
Holding member, above-mentioned dust removal component is remained and can moved along the axial reciprocating of above-mentioned cooling tube by it, and edge
The direction intersected with the axial direction of above-mentioned cooling tube is stretched out；
Opening portion, it is arranged at the side wall of above-mentioned cooling chamber, and above-mentioned holding member can be made to be stretched out from above-mentioned cooling chamber side
And moved along the axial reciprocating of above-mentioned cooling tube；
Sealing mechanism, it is arranged at the opening portion, prevents that the gas in above-mentioned cooling chamber from leaking into outside；
Moving body, it is arranged at the outside of above-mentioned cooling chamber, supports the above-mentioned holding member stretched out from above-mentioned opening portion, and
And can be moved back and forth along the axially in parallel direction with above-mentioned cooling tube；
Drive mechanism, it makes the moving body be moved back and forth along the axially in parallel direction with above-mentioned cooling tube.
(2) in addition, in the device described in above-mentioned (1), there is cell in the outside portion of above-mentioned cooling chamber, cell tool
There is the perisporium that closing space is formed around above-mentioned opening portion, being filled with the cell is used to inside remaining cooling intraventricular pressure
Inert gas above,
Above-mentioned moving body is arranged at above-mentioned small interior.
(3) in addition, in the device described in above-mentioned (1) or (2), above-mentioned sealing mechanism possesses：Sealing plate, it is set
In above-mentioned holding member, above-mentioned opening portion is covered from the inner side of above-mentioned cooling chamber；Force application mechanism, it is pressed to opening portion side all the time
The sealing plate.
(4) in addition, in the device described in any one of above-mentioned (1)~(3), above-mentioned moving body is the row with wheel
Sail car.
(5) in addition, in the device described in any one of above-mentioned (1)~(4), above-mentioned drive mechanism possesses ball-screw
With the motor for driving ball-screw rotation, it is configured to rotate by making above-mentioned ball-screw, moves back and forth above-mentioned moving body.
In the present invention, the reciprocating device for moving axial reciprocating of the dust removal component along above-mentioned cooling tube is configured to tool
It is standby：Holding member, its above-mentioned dust removal component is remained can be moved along the axial reciprocating of above-mentioned cooling tube and along with it is above-mentioned
The direction that the axial direction of cooling tube intersects is stretched out；Opening portion, it is arranged at the side wall of above-mentioned cooling chamber, can make above-mentioned holding member
Stretch out and moved along the axial reciprocating of above-mentioned cooling tube from above-mentioned cooling chamber side；Sealing mechanism, it is arranged at the opening portion, prevented
Gas in above-mentioned cooling chamber leaks into outside；Moving body, it is arranged at the outside of above-mentioned cooling chamber, supports from above-mentioned opening portion
The above-mentioned holding member stretched out, and can be moved back and forth along the axially in parallel direction with above-mentioned cooling tube；And driving machine
Structure, it makes the moving body be moved back and forth along the axially in parallel direction with above-mentioned cooling tube, therefore, it is possible to realize device entirety
Miniaturization, and be prevented from exhaust to External leakage and stable dedusting can be realized.
If stable dedusting can be realized, it can reduce the efficiency reduction estimation caused by the pollution of thermal conductive surface
Well-to-do rate (the allowance relative to heat-conducting area inside；Enough and to spare rate), the overall shape of cooling device can be made small-sized.
Brief description of the drawings
Fig. 1 is the explanation figure illustrated to the major part of the gas cooler involved by embodiments of the present invention.
Embodiment
The gas cooler 1 involved by present embodiment is illustrated based on Fig. 1.
As shown in figure 1, the gas cooler 1 of present embodiment has：Multiple cooling tubes 5, they are configured in supply side by side
In the cooling chamber 3 of body circulation；Dust removal component 7, it is arranged at the side face of cooling tube 5 in the way of it can slide；And reciprocal shifting
Motivation structure 9, it moves axial reciprocating of the dust removal component 7 along cooling tube 5.
Hereinafter, each structure is described in detail.
<Cooling chamber>
Cooling chamber 3 is the logical room of supply and discharge air-flow, and exhaust is as direction of the arrows shown in fig like that to the direction orthogonal with cooling tube 5
(from bottom to up, or from top to bottom) flowing.
The side wall 3a of cooling chamber 3 turns into door structure, can be opened and closed as shown by arrows in FIG..By the way that side wall 3a is set
For that can be opened and closed, the maintenance such as replacing of dust removal component 7, internal check become easy.
<Cooling tube>
Configuration in cooling chamber 3, forms cooling water pipe group to multiple cooling tubes 5 side by side.Cooling water pipe group is provided with multilayer.It is cold
But water is flowed through in the inside of cooling tube 5, and exhaust is cooled down by making the side face of containing exit gases cooling tube 5.
<Dust removal component>
Dust removal component 7 is arranged at the side face along cooling tube 5 in the way of it can slide.
As shown in figure 1, dust removal component 7 is to be made up of section for the angle section of L words.Constitute the one of the L words of dust removal component 7
Individual face is provided with the notch 7a of multiple U-shaped.Constituting another face of L words turns into upside plane of structure 7b.It is provided with notch 7a
Face be longitudinal direction, upside plane of structure 7b is disposed transversely on the top in the face for being provided with notch 7a.In notch 7a to abut or
Close mode inserts cooling tube 5.
Dust removal component 7 be set to it is whole corresponding with the cooling tube 5 from upper strata to lower floor, and along the axial direction of cooling tube 5
It is provided with being separated by predetermined distance multiple.The scope that moves back and forth of dust removal component 7 is configured to total length throughout cooling tube 5, can
Slide at position along along cooling tube 5 accompanying by dust.
The shape of dust removal component 7 is not particularly limited, and can be the otch with semicircle shape and the clamping cooling tube 5 above and below
Shape, may also be only it is bar-shaped.
In addition, in the case of using the angle section of L words as shown in Figure 1 formation dust removal component 7, preferably so as to be configured at
The upside plane of structure 7b of the angle section of lower floor is abutted with the lower surface of the cooling tube 5 on upper strata or close mode is configured, from
And the dedusting of the lower face side of cooling tube can be carried out.
<Reciprocating device>
Reciprocating device 9 is driven in the way of moving axial reciprocating of the dust removal component 7 along cooling tube 5.Back and forth
Travel mechanism 9 possesses：Holding member 17, it keeps dust removal component 7；Opening portion 19, it is arranged at the side wall of cooling chamber 3, for protecting
Part 17 is held to insert；Sealing mechanism 21, it seals opening portion 19；Moving body 22, its support holding member 17, can along with cooling
The axially in parallel direction of pipe 5 is moved back and forth；Drive mechanism 24, it drives moving body 22.
In addition, in the present embodiment, cell 23 is provided with the outside portion of cooling chamber 3, the cell 23, which has to surround, to be opened
Oral area 19 and the perisporium 23a for forming closing space, the main composition key element of reciprocating device 9 is accommodated with the cell 23.
In Fig. 1, the side that cell 23 leans on cooling chamber 3 is illustrate only, but cell 23 is also disposed on the opposite side of cooling chamber 3, in opposite side
Cell be also accommodated with the primary structure of identical reciprocating device 9.
With the purging (purge such as nitrogen；The ジ The Ru of パ mono-) cell 23, and in cell 23 filled with nitrogen etc. so that small
The internal pressure of room 23 is higher than the internal pressure of cooling chamber 3, so as to more reliably prevent that exhaust from leaking to cell from sealing mechanism 21
23。
Hereinafter, each structure of reciprocating device 9 is described in detail.
《Holding member》
Dust removal component 7 is remained and can moved along the axial reciprocating of cooling tube 5 by holding member 17, and along with cooling tube
The orthogonal direction in 5 axial direction is stretched out, and its end is protruded laterally from the side wall 3a of cooling chamber 3.
In addition, the holding member 17 of present embodiment stretches out along the direction orthogonal with the axial direction of cooling tube 5, but without certain
To be orthogonal, as long as being stretched out along the direction that the axial direction with cooling tube 5 intersects and its end is from the side wall 3a protrusions of cooling chamber 3.
As shown in figure 1, holding member 17 in the axial direction of cooling tube 5 by having the plate body of Rack to constitute, cooling tube 5
Axial stiffness be improved.Therefore, even in receiving the resistance of slip when being slided by side face of the dust removal component 7 along cooling tube 5
In the case of stress caused by power, it is also difficult to bend.
《Opening portion》
Opening portion 19 is arranged at the side wall 3a of cooling chamber 3, is formed as the axially extending elongated hole-shape along cooling tube 5.Opening
Portion 19 is set as the width that can be inserted for holding member 17, and the length of opening portion 19 is set as the reciprocal shifting with holding member 17
Dynamic scope identical degree.
《Sealing mechanism》
Sealing mechanism 21 possesses：Sealing plate 25, it is installed on holding member 17, and opening portion is covered from the inner side of cooling chamber 3
19；And force application mechanism, it presses sealing plate 25 to opening portion side all the time.
The sealing surface 25a of the side of opening portion 19 by cooling chamber 3 of sealing plate 25 is carried out Teflon (Teflon) (registrar
Mark) processing, so as to reduce the frictional force with cooling chamber 3 while with corrosion resistance, can successfully it act.
In the side of cooling chamber 3 by sealing plate 25 of holding member 17, with being provided with gap as defined in the air switch of sealing plate 25
Reaction-force plate (reaction force receiving plate) 26, is provided with as all the time to opening in reaction-force plate 26
The spring assembly 28 of the force application mechanism of the side of oral area 19 pressing sealing plate 25.
Due to covering opening portion 19 from the side of cooling chamber 3 using sealing plate 25, and sealing plate 25 is to be pressed against opening portion
The state of 19 sides is jointly mobile with holding member 17, therefore opening portion 19 is sealed all the time, prevents that exhaust from leaking from cooling chamber 3.
In addition, as described later, because holding member 17 is supported by moving body 22, therefore the load of dust removal component 7 is not acted on
In sealing mechanism 21.
《Moving body》
Moving body 22 is arranged in the cell 23 of the outside of cooling chamber 3, supports the holding member 17 stretched out from opening portion 19
End, and can be moved back and forth along the axially in parallel direction with cooling tube 5.
Moving body 22 keeps holding member 17 by loading holding member 17, and it is loaded by being arranged under moving body 22
The wheel 29 in portion is supported.
So, due to supporting holding member 17 using moving body 22, moving body reciprocating action is made, therefore utilize ball-screw
33 rotation carries out the driving required for the reciprocating action of holding member 17 with screw shell 40, so driving torque can be reduced,
Can be by drive device integral miniaturization.
Especially because the moving body 22 of present embodiment be by with the cell 23 with along the axial direction with cooling tube 5
The Travel vehicle of the wheel 29 travelled on the track 27 that the mode of parallel direction extension is set and constitute, therefore, it is possible to make movement
The traveling of body 22 is successfully carried out, and can realize moving back and forth for dust removal component 7 with minimum driving force.
In addition, the moving body 22 of the present invention is not limited to wheel, as long as can be put down along with the axial direction of cooling tube
Capable direction is successfully moved, then can also be other forms, for example, slide with can also carrying out rail-like.
《Drive mechanism》
Drive mechanism 24 makes moving body 22 be moved back and forth along the axially in parallel direction with cooling tube 5, possesses：Motor
35；Ball-screw 33, it is connected to the rotary shaft 37 of motor 35 via shaft coupling 39；And screw shell 40, it is arranged at shifting
Kinetoplast 22, is screwed for ball-screw 33, and ball-screw 33 is rotated by using motor 35, makes moving body 22 along ball-screw
33 axis is moved back and forth.
In addition, as shown in figure 1, motor 35 is arranged at the outside of cell 23, the axle portion of ball-screw 33 is outside cell 23
Side penetrates into inner side.In addition, motor uses servo motor, so as to ensure mobile precision and procedure operation.
As noted previously, as cell 23 is purged with nitrogen etc., so needing to be sealed so that nitrogen etc. is not from supplying ball
The position leakage of the axle portion insertion of leading screw 33, but the axle portion of ball-screw 33 is rotary shaft, the axle portion moved with reciprocating linear
Sealing is compared, and can easily and reliably be sealed.
Action to the gas cooler 1 of present embodiment as constructed as above is illustrated.
Exhaust containing dust is circulated in cooling chamber 3 in the way of the axis direction with cooling tube 5 intersects, and exhaust passes through
Contact the surface of cooling tube 5 and be cooled.
If operating gas cooler 1, dust is attached to the surface of cooling tube 5, therefore driving drive mechanism 24, using past
Multiple travel mechanism 9 makes dust removal component 7, and along the pipe of cooling tube 5, axially (horizontal direction) is moved back and forth.
Because each cooling tube 5 and dust removal component 7 are touched or proximated to, therefore removal is moved back and forth using dust removal component 7
It is attached to the dust on the surface of cooling tube 5.Removed dust is fallen to the dust acceptance division (not shown) of the lower section of cooler,
When having stockpiled the dust of appropriate amount to outside discharge.
As described above, according to present embodiment, dust removal component 7 is kept part 17 and kept, and holding member 17 is by moving body
22 supportings, by the mobile unit being made up of ball-screw 33 and screw shell 40, the rotation of ball-screw 33 is converted to
The axial reciprocating action of cooling tube 5, therefore, it is possible to successfully be carried out with small driving torque, as drive device can be realized
Miniaturization construction.
In addition, the opening portion 19 for being arranged at the side wall 3a of cooling chamber 3 is sealed by sealing mechanism 21, and opening portion 19 is small
Room 23 is surrounded, and filled with purge gas such as nitrogen in the cell 23, therefore exhaust will not leak into outside.
So, the gas cooler of present embodiment can get both dust removal component 7 smooth driving with exhaust sealing.
Description of reference numerals：
1... gas cooler；3... cooling chamber；3a... sides wall；5... cooling tube；7... dust removal component；7a... otch
Portion；Plane of structure on the upside of 7b...；9... reciprocating device；17... holding member；19... opening portion；21... sealing mechanism；
22... moving body；23... cell；23a... perisporiums；24... drive mechanism；25... sealing plate；25a... sealing surfaces；26...
Reaction-force plate；27... track；28... spring assembly；29... wheel；33... ball-screw；35... motor；37... revolve
Rotating shaft；39... shaft coupling；40... screw shell.
Claims (5)
1. a kind of gas cooler, it is characterised in that
Have：
Water cooling tube group, it is configured in the cooling chamber of supplied gas circulation；
Dust removal component, it can reciprocatingly be arranged on the side face of each cooling tube of water cooling tube group；And
Reciprocating device, it moves axial reciprocating of the dust removal component along the cooling tube,
The reciprocating device possesses：
Holding member, the dust removal component is remained and can moved along the axial reciprocating of the cooling tube by it, and along with institute
State the direction stretching that the axial direction of cooling tube intersects；
Opening portion, it is arranged at the side wall of the cooling chamber, and the holding member can be made to be stretched out from the cooling chamber side and edge
The axial reciprocating movement of the cooling tube；
Sealing mechanism, it is arranged at the opening portion, prevents that the gas in the cooling chamber from leaking into outside；
Moving body, it is arranged at the outside of the cooling chamber, supports the holding member stretched out from the opening portion, and energy
Enough axially in parallel directions along with the cooling tube are moved back and forth；And
Drive mechanism, it makes the moving body be moved back and forth along the axially in parallel direction with the cooling tube,
The sealing mechanism possesses：Sealing plate, it is arranged at the holding member, is opened described in the inner side covering from the cooling chamber
Oral area；And force application mechanism, it presses the sealing plate to opening portion side all the time.
2. gas cooler according to claim 1, it is characterised in that
There is cell in the outside portion of the cooling chamber, the cell has the week that closing space is formed around the opening portion
Wall, being filled with the cell is used for the internal inert gas remained more than cooling intraventricular pressure,
The moving body is arranged at the small interior.
3. gas cooler according to claim 1 or 2, it is characterised in that
The moving body is the Travel vehicle with wheel.
4. gas cooler according to claim 1 or 2, it is characterised in that
The drive mechanism possesses ball-screw and drives the motor of ball-screw rotation, is configured to by making the ball wire
Thick stick rotates and moves back and forth the moving body.
5. gas cooler according to claim 3, it is characterised in that
The drive mechanism possesses ball-screw and drives the motor of ball-screw rotation, is configured to by making the ball wire
Thick stick rotates and moves back and forth the moving body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013037108A JP6129582B2 (en) | 2013-02-27 | 2013-02-27 | Gas cooler |
| JP2013-037108 | 2013-02-27 | ||
| PCT/JP2014/000981 WO2014132626A1 (en) | 2013-02-27 | 2014-02-25 | Gas cooler |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105026874A CN105026874A (en) | 2015-11-04 |
| CN105026874B true CN105026874B (en) | 2017-07-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480010331.1A Active CN105026874B (en) | 2013-02-27 | 2014-02-25 | Gas cooler |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6129582B2 (en) |
| KR (1) | KR101786755B1 (en) |
| CN (1) | CN105026874B (en) |
| WO (1) | WO2014132626A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105371693A (en) * | 2015-11-19 | 2016-03-02 | 山东钢铁股份有限公司 | Dust removing method for tube-type heat exchanger and dust removing device for tube-type heat exchanger |
| JP2017156025A (en) * | 2016-03-02 | 2017-09-07 | 東京電力ホールディングス株式会社 | Heat exchange system |
| CN106016245B (en) * | 2016-07-19 | 2017-12-15 | 郑州永邦电气有限公司 | A kind of biological particles heating stove slag-bonding protective device |
| CN106730954A (en) * | 2016-12-06 | 2017-05-31 | 甘肃蓝科石化高新装备股份有限公司 | Antiscaling type Falling Film Evaporator of Horizontal Tube |
| CN110083077B (en) * | 2018-01-25 | 2021-09-24 | 佛山市顺德区美的饮水机制造有限公司 | Soda machine control method, soda machine and computer readable storage medium |
| CN108562187B (en) * | 2018-04-03 | 2019-10-18 | 北京科技大学 | A kind of interior method and device removing accumulation, putting up a bridge of high-temperature solid bulk cargo heat exchanger |
| DE102019124013B3 (en) * | 2019-09-06 | 2020-12-03 | Anatol Reiswich | Cleaning device for pipes, hoses or the like |
| CN112211805B (en) * | 2020-09-10 | 2022-08-26 | 自贡东方通用压缩机有限公司 | Compressor cooling device |
| CN112629315B (en) * | 2020-12-02 | 2022-06-17 | 安徽扬天金塑新能源装备有限公司 | Scale removing device for tube type heat exchanger |
| CN115523773B (en) * | 2022-11-25 | 2023-03-10 | 山东盛宝传热科技有限公司 | Evaporation type air cooler |
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|---|---|---|---|---|
| DE102008001518A1 (en) * | 2008-04-30 | 2009-11-05 | Hans Huber Ag Maschinen- Und Anlagenbau | Effluent heat exchanger |
| CN202452885U (en) * | 2011-12-23 | 2012-09-26 | 郑旭光 | Sealed tube type transducer with pressure differential cleaning mechanism |
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|---|---|---|---|---|
| JPS5465049U (en) * | 1977-10-17 | 1979-05-09 | ||
| JPS6380496U (en) * | 1986-11-12 | 1988-05-27 | ||
| JPS63243603A (en) * | 1987-03-30 | 1988-10-11 | バブコツク日立株式会社 | Shifter among heat transfer tube group |
| JPH0612395Y2 (en) * | 1988-05-30 | 1994-03-30 | トリニティ工業株式会社 | Pretreatment device processing liquid tank |
| JP2500915Y2 (en) * | 1990-09-04 | 1996-06-12 | 栄産業株式会社 | Soot removal device in heat exchanger |
| JPH0849806A (en) * | 1994-08-05 | 1996-02-20 | Mitsubishi Heavy Ind Ltd | Soot removing device for horizontal tube for boiler |
| JP3987958B2 (en) * | 2002-11-19 | 2007-10-10 | 株式会社栗本鐵工所 | Heat transfer tube cleaning device in heat exchanger |
| JP6012395B2 (en) * | 2012-10-23 | 2016-10-25 | 東邦化学工業株式会社 | Damaged hair improving agent and hair cosmetic |
-
2013
- 2013-02-27 JP JP2013037108A patent/JP6129582B2/en active Active
-
2014
- 2014-02-25 WO PCT/JP2014/000981 patent/WO2014132626A1/en active Application Filing
- 2014-02-25 CN CN201480010331.1A patent/CN105026874B/en active Active
- 2014-02-25 KR KR1020157025268A patent/KR101786755B1/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008001518A1 (en) * | 2008-04-30 | 2009-11-05 | Hans Huber Ag Maschinen- Und Anlagenbau | Effluent heat exchanger |
| CN202452885U (en) * | 2011-12-23 | 2012-09-26 | 郑旭光 | Sealed tube type transducer with pressure differential cleaning mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105026874A (en) | 2015-11-04 |
| KR101786755B1 (en) | 2017-10-18 |
| JP6129582B2 (en) | 2017-05-17 |
| KR20150119321A (en) | 2015-10-23 |
| JP2014163631A (en) | 2014-09-08 |
| WO2014132626A1 (en) | 2014-09-04 |
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