CN105008854B - Transparent plate body surface inspection camera system - Google Patents
Transparent plate body surface inspection camera system Download PDFInfo
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- CN105008854B CN105008854B CN201480009296.1A CN201480009296A CN105008854B CN 105008854 B CN105008854 B CN 105008854B CN 201480009296 A CN201480009296 A CN 201480009296A CN 105008854 B CN105008854 B CN 105008854B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Textile Engineering (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of transparent plate body surface inspection camera system is provided, in the case that plane existing for the opticpath center of line sensor camera is vertical with transparent plate body and the plane and the carry direction of transparent plate body are both parallel not vertical yet, the phenomenon that being detached depending on plate thickness with the path of the reflected light in the face of back side using the path of the reflected light in the face of table side, and can inhibit for transparent plate body back side be arranged water layer mechanism number increase.Light source (1) configures under the conditions of glass plate (71) is not deformed such on the extending direction reflected from line sensor camera (2) towards the opticpath of the visual field (5) by glass plate (71).The direction of the shadow surface of the candy strip of light source (1) determines in such a way that the shadow surface becomes line segment along the result that the direction of travel of glass plate (71) projects.Moreover, the line of the dark portion on the shadow surface as candy strip is parallel with the carry direction of glass plate (71).
Description
Technical field
The present invention relates to used in the inspection of the surface shape of transparent plate body, acquirement when light source is imaged because of transparent plate
The reflection in body surface face and the opticpath variation that generates is formed by the transparent plate body surface inspection camera system of picture.
Background technology
An example of the method for small deformation as the surface for checking glass plate, it is known to following method：Use line
Road sensor camera (line sensor camera), along the opticpath reflected at the surface of glass plate and pickup light
The candy strip (stripe pattern) in source, the change of glass pane surface is checked based on the image data as obtained from shooting
The presence or absence of shape, the degree of deformation.At this point, as candy strip, what is be commonly used is configured at certain intervals as the line of dark portion
Pattern.It should be noted that the glass plate of check object illuminated candy strip in the state of carrying in a certain direction.It claps
Occurs scar corresponding with the dark portion of candy strip in the image that the result taken the photograph obtains.It should be noted that line sensor phase
The size of each pixel of machine is identical and equally spaced arranges.
Fig. 9 is the definition graph in the path for indicating the general light between light source and line sensor camera.It will be to glass plate
Side present in 71 supporting parts 72 supported is known as back side, its opposite side is known as table side.Solid line shown in Fig. 9 indicates
The path of the light reflected at the face of the table side of glass plate 71.Moreover, dotted line shown in Fig. 9 indicates the back side in glass plate 71
Face at the path of light that reflects.It should be noted that distance P shown in Fig. 9 depends on the plate thickness of glass plate 71.
The configuration of light source and line sensor camera as the segregation phenomenon for generating distance P shown in Fig. 9, can examine
Consider form shown in Fig. 10.Arrow shown in Fig. 10 indicates the carry direction of glass plate 71.At this point, in the carrying with glass plate 71
Include starting point, the line sensor camera 82 of the opticpath extended from line sensor camera 82 in the vertical plane in direction
The visual field 85, along light source 81 rectangle shadow surface length direction the shadow surface center line.
Configuration shown in Fig. 10 corresponds to plane existing for the opticpath center of line sensor camera 82 as a result,
The vertical situation of vertical with glass plate and with glass plate carry direction.
Here, the optical axis of camera refers to vertical line by the centers of the lens of camera and vertical with its lens face.Also, light
Thread path center refers to following opticpath：Include the opticpath consistent with the optical axis of line sensor camera and from this
Opticpath until the pip to light source of the corresponding glass plate of opticpath (it is assumed that not deformed).
Figure 10 shows that in the plane vertical with the carry direction of glass plate 71, light source 81 irradiates bar graph to glass plate 71
Case, line sensor camera 82 carry out the form of photographic light sources 81 via glass plate 71.At this point, in the face of the table side of glass plate and the back of the body
Reflected light is distinguished on the face of side, therefore the scar corresponding to 1 dark portion of candy strip occurs 2 in image.
Figure 11 is the schematic diagram for the example for indicating the image as obtained from camera shooting.In fig. 11, by the face of table side
The reflection at place and the scar that generates is as shown by the solid line, the scar that reflection at the face in back side by generates is schematically as empty
Shown in line.The mutual distance of both scars is denoted as separating distance D.At the position corresponding to both scars, brightness value becomes
It is minimum.By table side face reflection generate scar with by back side face reflection generate scar separating distance D at
For the size of the plate thickness depending on glass plate.
, can it should be noted that for example, if the mutual interval of scar that generates of the reflection at the face for passing through table side is certain
Enough it is judged as that glass plate is not deformed.If moreover, the interval is uneven, it is based on the interval, the deformation of glass plate can be evaluated
Degree.
Moreover, in the case where glass plate is deformed, separating distance D also reduces or becomes larger.Here, working as separating distance D
When reduction, the pixel that brightness value becomes minimum is close, and in image, generation is 2 scars or 1 indefinite portion of scar
Position.Figure 12 be indicate that separating distance D is close and generate be 2 scars or the image at 1 indefinite position of scar example
Schematic diagram.When generating such indefinite position, the measurement accuracy of the deformation of glass plate declines.Especially glass plate
When plate thickness is thinned, the interval of separating distance D (referring to Fig.1 1) itself reduces, therefore in image, easy to produce be 2 scars also
It is 1 indefinite position of scar.Therefore, plate thickness is thinner, the easier decline of measurement accuracy of deformation.
The decline of such measurement accuracy in order to prevent, it is proposed that configure the layer of water (hereinafter, being denoted as in the back side of glass plate
Water layer) technology (for example, referring to patent document 1).Figure 13 is the light indicated the case where the back side of glass plate is configured with water layer
The definition graph in the path of the light between source and line sensor camera.Water layer 73 is arranged between glass plate 71 and supporting part 72.
The refractive index of water layer 73 is roughly the same with the refractive index of glass plate 71, and the light thus reflected at the face of the back side of glass plate 71 is several
It is not present.As a result, occurring the scar generated by the reflection at the face of the table side of glass plate 71 in the picture, lead to
The reflection crossed at the face of back side and the scar generated does not almost occur.Therefore, it is possible to more clearly be identified by table side
The position for the scar that reflection at face generates, the interval based on scar can accurately measure the deformation of glass plate.
Hereinafter, illustrating the image taking of configuration shown in Fig. 10.It should be noted that for convenience of description, right
In the position in the visual field of line sensor camera 82 85 in the back side configuration water layer of glass plate 71 (sketch map should be saved in Fig. 10
Show).Therefore, the case where there's almost no as the reflection at back side illustrates.This point is aftermentioned shown in figure 15
It is also the same in form.
In the state that glass plate 71 is handled upside down, line sensor camera 82 continues photographic light sources 81 via the visual field 85.
Therefore, it is possible to be checked for face with glass plate 71.
From each pixel of line sensor camera 82 by lens towards the visual field 85 opticpath not according to glass plate
The situation occurred of 71 deformation is changed but fixed.But from the visual field 85 to the opticpath of light source 81 according to glass
The situation occurred of the deformation of plate 71 and change.
The shadow surface 81a of light source 81 irradiates candy strip towards 85 direction of the visual field of line sensor camera 82.In this example
In, shadow surface 81a is elongated rectangle, and face existing for shadow surface 81a is intersected with face existing for glass plate 71, shadow surface 81a's
Short side is configured in a manner of parallel with the carry direction of glass plate 71.Also, in shadow surface 81a, each dark portion 81b with photograph
The parallel mode of short side for penetrating face 81a is equally spaced.It should be noted that on shadow surface, by the position other than dark portion
It is denoted as bright portion.
Figure 14 is to indicate that the lens from line sensor camera 82 shown in Fig. 10 reach the light of light source 81 via the visual field 85
The signal of thread path and the result after being projected the shadow surface 81a of light source 81 to the face vertical with the carry direction of glass plate
Figure.It should be noted that strictly speaking, the axis that Figure 14 is showing along the carry direction of glass plate projects to the upstream side from downstream side
Result.In the present specification, about the other attached drawings for indicating projection result, the carry direction along glass plate is also showed that
The result that axis projects to the upstream side from downstream side.
As previously mentioned, by the opticpath in lens towards the visual field 85 not being root from each pixel of line sensor camera 82
It is changed according to the situation occurred of the deformation of glass plate 71 but fixed.In opticpath corresponding to certain pixel from the visual field
The opticpath of 85 to light source 81 reflects into the camera shooting state of shadow surface 81a.That is, corresponding to certain pixel from the visual field 85 to light
If the opticpath in source 81 dark portion on shadow surface 81a, then the output of the pixel indicates black.Moreover, from the visual field 85 to light
If the opticpath in source 81 bright portion on shadow surface 81a, then the output of the pixel indicates white.Therefore, if glass plate 71 does not have
There is deformation, then becomes at equal intervals from the visual field 85 to the scar that the opticpath of light source 81 will not change, therefore occur in image.Separately
On the one hand, in the case where glass plate 71 exists and deforms, corresponding to certain pixel from the visual field 85 to the opticpath of light source 81 from
The dark portion variation of shadow surface 81a is bright portion, or it is dark portion to be changed from bright portion, between the scar thus occurred in image is not as waiting
Every.
By the shadow surface 81a of light source 81 to result such as Figure 14 institutes of the face upslide movie queen vertical with the carry direction of glass plate
It is shown as line segment.As a result, the irradiation from the visual field 85 to the opticpath of light source 81 and as line segment corresponding to each pixel
Face 81a is intersected with a bit, is uniquely determined respectively.
Moreover, other configurations as light source and line sensor camera, it is contemplated that form shown in figure 15.Figure
Arrow shown in 15 indicates the carry direction of glass plate 71.Figure 15 correspond to line sensor camera 82 opticpath in feel
Situation about being in the plane parallel and vertical with glass plate with the carry direction of glass plate 71.
In the state that glass plate 71 is handled upside down, line sensor camera 82 continues photographic light sources 81 via the visual field 85.
Moreover, from each pixel of line sensor camera 82 by lens towards the visual field 85 opticpath not according to glass plate 71
The situation occurred of deformation is changed but fixed.These put same as form shown in Fig. 10.
Moreover, in form shown in figure 15, shadow surface 81a and the glass plate 71 of light source 81 parallelly configure, short side
It is set in parallel with the carry direction of glass plate 71.That is, shadow surface 81a just irradiates candy strip over the ground with glass plate 71.At this
In example, shadow surface 81a is also elongated rectangle.Also, each dark portion 81b is set in a manner of parallel with the short side of shadow surface 81a
It sets.
Figure 16 is the light for indicating the lens from line sensor camera 82 shown in figure 15 via the visual field 85 towards light source 81
Thread path and by the shadow surface 81a of light source 81 to the schematic diagram of the result after vertical with the carry direction of glass plate face projection.
As has been explained above, it is not Yin Bo by the opticpath in lens towards the visual field 85 from each pixel of line sensor camera 82
The situation occurred of the deformation of glass plate 71 is changed but fixed.Also, in the opticpath corresponding to certain pixel from regarding
In open country 85 to the opticpath reflection to the camera shooting state of shadow surface 81a of light source 81.That is, corresponding to certain pixel from the visual field 85 to
If the opticpath of light source 81 dark portion on shadow surface 81a, then the output of the pixel indicates black.Moreover, from the visual field 85 to
If the opticpath of light source 81 bright portion on shadow surface 81a, then the output of the pixel indicates white.Therefore, if in glass plate
71 do not deform, then become at equal intervals from the visual field 85 to the scar that the opticpath of light source 81 does not change, therefore occurs in image.
On the other hand, in the case where glass plate 71 exists and deforms, corresponding to certain pixel from the visual field 85 to the opticpath of light source 81
It is bright portion to be changed from the dark portion of shadow surface 81a, or it is dark portion to be changed from bright portion, and the scar thus occurred in image, which becomes, to be differed
Interval.
In form shown in figure 15, and, by the shadow surface 81a of light source 81 to the face vertical with the carry direction of glass plate
The result of projection becomes line segment as shown in figure 16.Therefore, corresponding to each pixel from the visual field 85 to the opticpath of light source 81 with
Shadow surface 81a as line segment is intersected with a bit, is uniquely determined respectively.
The record of the configuration of light source illustrated by Figure 15 and line sensor camera for example in patent document 2.
It should be noted that assume under form shown in figure 15, it is assumed that for shadow surface 81a and glass plate 71 it is not parallel and
Shadow surface 81a rolls oblique to the carry direction of glass plate 71.I.e., it is assumed that in order to make the shadow surface 81a of light source 81 towards glass plate
The downstream side of 71 carry direction, and the state for rotating light source 81 from the state of shadow surface 81a and 71 face of glass plate.In
Be, from the lens of line sensor camera 82 via the visual field 85 towards the opticpath of light source 81 and by shadow surface 81a to glass
Result after the vertical face projection of the carry direction of glass plate is as shown in figure 17.In this case, the projection result of shadow surface 81a at
For face.Then, when being present in dark portion on shadow surface 81a, generation can not uniquely determine the opticpath corresponding to certain pixel
The case where shooting the where on the line of dark portion.For example, in opticpath 91 shown in Figure 17 from the visual field 85 to the dark of light source 81
There are multiple selections for the opticpath of the line of portion 81b.Therefore, from the pip on the glass plate 71 in opticpath 91 to dark portion
Opticpath until 81b can not be uniquely determined according to shooting image.Therefore, it under configuration shown in figure 15, needs to make
The shadow surface 81a of light source 81 is parallel with glass plate 71.It should be noted that in fig. 17, only 1 dark portion 81b of diagram, but
There are multiple dark portion 81b on shadow surface 81a.
Under configuration shown in figure 15, the reflected light in the face of the table side of glass plate is detached with the reflected light in the face of back side
Direction it is identical with the direction of the dark portion of the candy strip on light source.Therefore, configuration shown in figure 15 is not generate Fig. 9 institutes
The configuration of the segregation phenomenon of the distance P shown.Figure 18 is to indicate in the case where water layer is not arranged, in configuration shown in figure 15
Under form, carried out from the lens of line sensor camera 82 towards the opticpath in the visual field 85 and by the shadow surface 81a of light source 81
The schematic diagram of result after projection.In the case where water layer is not arranged, as shown in the dotted line of Figure 18, also generate in glass plate 71
Back side face at reflection.Also, in the central portion in the visual field of circuit sensor camera, at the face of the table side of glass plate 71
The opticpath reflected and the opticpath reflected at the face of back side are substantially be overlapped, therefore are not dependent on separating distance D
And the scar generated by the reflection in the face of table side is Chong Die with the scar that the reflection in the face by back side generates.As a result, surveying
Determine accuracy decline.Even if in the case where water layer is arranged, do not completely disappeared in the scar that the reflection by the face of back side generates
When, same problem is also will produce, measurement accuracy declines.
Citation
Patent document
Patent document 1：Japanese Laid-Open 2012-21781 bulletins (paragraph 0033,0034)
Patent document 2：Japanese Laid-Open 2009-128098 bulletins (Fig. 1)
Invention content
The subject that the invention solves
Using the glass plate of wide cut as check object, only by one in the state of ensuring to check precision
Line sensor camera can not shoot the entire width of glass plate.As a result, using the glass plate of wide cut as check object the case where
Under, as long as the combination configuration by light source and line sensor camera is multiple.But as shown in Figure 10, line sensor phase
In the case that vertical with the glass plate and carry direction with glass plate of plane existing for the opticpath center of machine is also vertical, in order to
It avoids light source and the group of line sensor camera from interfering each other, needs according to being made of light source and line sensor camera
The visual field of line sensor camera is staggered by group along carry direction.By the visual field of line sensor camera along carry direction
The example for the case where being staggered is as shown in figure 19.Figure 19 shows the state viewed from above of glass plate 71.Moreover, shown in Figure 19
Arrow indicate glass plate 71 carry direction.Also, in each group being made of light source and line sensor camera, line is omitted
The diagram of road sensor camera shows the visual field 85 of light source 81 and line sensor camera.It, will be by the example shown in Figure 19
The group of light source 81 and line sensor camera (diagram is omitted) composition is arranged 6 groups, is that object is clapped with the visual field 85 at 6 positions
It takes the photograph, thus, it is possible to obtain the image of the entire transverse width for checking glass plate 71.
However, when according to the group being made of light source 81 and line sensor camera by 85 edge of the visual field of line sensor camera
When carry direction is staggered, multiple mechanisms for water layer to be arranged in the back side of glass plate are needed to configure.For example, shown in Figure 19
In example, the mechanism (diagram is omitted) for water layer to be arranged needs to configure this 3 positions A, B, C shown in Figure 19.Its result
It is that the manufacturing cost of check device increases.
On the other hand, as shown in figure 15, plane and glass plate existing for the opticpath center of circuit sensor camera
In the case of vertical and parallel with the carry direction of glass plate, the group being made of light source 81 and line sensor camera 82 is each other not
The configuration interfered can be realized as being illustrated Figure 20.However, in this case, and, in the anti-of the face by back side
When the scar penetrated and generated does not completely disappear, measurement accuracy is easy to decline.It should be noted that Figure 20 is vertical view, Tu20Suo
The arrow shown indicates the carry direction of glass plate 71.
Problem described above not only generates in the inspection of glass plate, the inspection of the transparent plate body other than glass plate
In also generate.
Therefore, the purpose of the present invention is to provide a kind of transparent plate body surface inspection camera system, line sensors
Plane existing for the opticpath center of camera is vertical with transparent plate body and the carry direction of the plane and transparent plate body both
In the case of not parallel also out of plumb, the path using the reflected light in the face in the path and back side of the reflected light in the face of table side is depended on
In plate thickness detaches the phenomenon that, and the increasing of the number of mechanism for water layer to be arranged in the back side of transparent plate body can be inhibited
Add.
Solution for solving the problem
The transparent plate body surface inspection camera system of the present invention is characterized in that having：Line sensor camera, from
Inclined direction shoots the transparent plate body being handled upside down, and is configured in such a way that the visual field is orthogonal with the carry direction of transparent plate body；
And light source, under conditions of transparent plate body is not deformed, configuration is sensed from line sensor camera towards the circuit
On the extending direction that the opticpath in the visual field of device camera is reflected by transparent plate body, and the light source irradiates candy strip,
The direction of the shadow surface of the candy strip of light source with by the shadow surface along transparent plate body direction of travel project the result is that
It is determined as the mode of line segment, the carry direction as the line of the dark portion of candy strip and transparent plate body on shadow surface is flat
Row.
Preferably, under conditions of transparent plate body is not deformed, include and line sensor phase assuming
The consistent opticpath of the optical axis of machine and until the pip to light source in transparent plate body corresponding with the opticpath
In the case of the plane of opticpath, which meets and the carry direction of transparent plate body both not parallel or out of plumb item
Part.
Moreover, the transparent plate body surface inspection camera system of the present invention is characterized in that having：Line sensor phase
Machine shoots the transparent plate body being handled upside down, and is configured in such a way that the visual field is orthogonal with the carry direction of transparent plate body；And light
Source, the shadow surface with rectangle, and candy strip is irradiated from the shadow surface, the line sensor camera is configured as follows
And the light source：It is assumed that the visual field of the starting point comprising the opticpath extended from line sensor camera, line sensor camera,
Along the plane of the central shaft of the shadow surface of the length direction of the shadow surface state orthogonal with carry direction, from the state of the hypothesis
It rises, axis makes line sensor camera and light source become the state of mutually opposing rotation, the candy strip of light source centered on the visual field
Shadow surface direction by by the shadow surface along the direction of travel of transparent plate body project the result is that as in a manner of line segment
It determines, the line of the dark portion on shadow surface as candy strip is parallel with the carry direction of transparent plate body.
Can also be to have multiple groups being made of line sensor camera and light source, by line sensor camera and light
The each group of source composition is configured in a manner of the arrangement on straight line of the visual field of each line sensor camera.
Can also be that there is the backside reflection for eliminating the backside reflection of transparent plate body to eliminate unit.
Invention effect
According to the present invention, plane existing for the opticpath center of line sensor camera is vertical with transparent plate body and should
In the case that the carry direction of plane and transparent plate body is both not parallel or out of plumb, the path of the reflected light in the face of table side is utilized
The phenomenon that being detached depending on plate thickness with the path of the reflected light in the face of back side, and can inhibit for the back of the body in transparent plate body
The increase of the number of the mechanism of water layer is arranged in side.
Description of the drawings
Fig. 1 is the stereogram for the example for indicating the transparent plate body surface inspection camera system of the present invention.
Fig. 2 is the opticpath schematically shown from the lens of line sensor camera 2 via the visual field 5 towards light source 1
And the stereogram of the shadow surface of light source 1.
Fig. 3 is to indicate the opticpath and light source shown in Fig. 2 from line sensor camera 2 via the visual field 5 towards light source 1
The schematic diagram for the result that 1 shadow surface 1a is projected to the face vertical with the carry direction of glass plate.
Fig. 4 be indicate result to project from the shadow surface 1a of light source 1 to the face vertical with the carry direction of glass plate at
The schematic diagram of the projection result for the case where determining the posture of light source 1 for the mode in face.
Fig. 5 is to indicate that the knot that the line of the dark portion of candy strip is projected to the face vertical with the carry direction of glass plate will be become
The schematic diagram of fruit.
Fig. 6 is the definition graph for the example for indicating the candy strip of the present invention.
Fig. 7 is the schematic diagram for indicating to assume the projection result of the dark portion situation parallel with the short side of shadow surface 1a.
Fig. 8 is the definition graph for indicating to configure the group being made of multiple situations light source 1 and line sensor camera 2.
Fig. 9 is the definition graph in the path for indicating the general light between light source and line sensor camera.
Figure 10 is the stereogram of an example for the configuration for indicating light source and line sensor camera.
Figure 11 is the schematic diagram for indicating the example by shooting obtained image.
Figure 12 is the schematic diagram for indicating to produce the example of 2 scars or the image at 1 indefinite position of scar.
Figure 13 is indicated between the light source the case where back side of glass plate is configured with water layer and line sensor camera
The definition graph in the path of light.
Figure 14 is to indicate that the lens shown in Fig. 10 from line sensor camera 82 reach the light of light source 81 via the visual field 85
The schematic diagram for the result that the shadow surface 81a of thread path and light source 81 is projected to the face vertical with the carry direction of glass plate.
Figure 15 is the stereogram of the other examples for the configuration for indicating light source and line sensor camera.
Figure 16 is the light for indicating the lens shown in figure 15 from line sensor camera 82 via the visual field 85 towards light source 81
The schematic diagram for the result that the shadow surface 81a of thread path and light source 81 is projected to the face vertical with the carry direction of glass plate.
Figure 17 is to indicate that hypothesis shadow surface 81a rolls showing for the projection result of oblique situation to the carry direction of glass plate 71
It is intended to.
Figure 18 is to indicate in the case where water layer is not arranged, under configuration shown in figure 15, from line sensor phase
Schematic diagram of the lens of machine 82 towards the result of the shadow surface 81a projections of the opticpath and light source 81 in the visual field 85.
Figure 19 be indicate the visual field of line sensor camera being staggered along carry direction and configure light source shown in Fig. 10 and
The definition graph of the configuration example of the case where line sensor camera.
Figure 20 is to indicate that the group shown in figure 15 being made of light source and line sensor camera do not interfered each other matches
Set the vertical view of example.
Specific implementation mode
Hereinafter, with reference to attached drawing, illustrate embodiments of the present invention.In the following description, check object is illustrated
The case where transparent plate body is glass plate, but the present invention can also be applied to the inspection of the transparent plate body other than glass plate.
Fig. 1 is the stereogram for the example for indicating the transparent plate body surface inspection camera system of the present invention.The present invention's
Transparent plate body surface inspection camera system has light source 1 and line sensor camera 2.Light source 1 is to the inspection as deformation
The glass plate 71 of object irradiates candy strip, and line sensor camera 2 is reflected by shooting along on the surface of glass plate 71
Opticpath extension on light source 1 candy strip picture and generate image.
Glass plate 71 is supported and is carried by the supporting part (diagram is omitted in Fig. 1) of glass plate.Arrow shown in FIG. 1 indicates
The carry direction of glass plate 71.Moreover, being equipped on the face of the back side at the position corresponding with the visual field 5 of circuit sensor camera 2
Water layer (diagram is omitted in Fig. 1).It should be noted that in each attached drawing afterwards, supporting part, the water layer of glass plate are also omitted
Diagram.
Line sensor camera 2 and line sensor camera 82 shown in Fig. 10 are same, are successively shot via the visual field 5
Light source 1.Therefore, it is possible to be checked for face with glass plate 71.
But in configuration shown in Fig. 10, plane existing for the opticpath center of line sensor camera 82
It is arranged in a manner of vertical with glass plate 71 and is also vertical with the carry direction of glass plate 71, line sensor camera 82 is via glass
Glass plate 71 and photographic light sources 81.In contrast, in the transparent plate body surface inspection camera system of the present invention, passed in circuit
Plane existing for the opticpath center of sensor camera 2 (referring to Fig.1) it is vertical with glass plate 71 and with the carrying side of glass plate 71
To in the state of being both neither perpendicular to nor parallel to, configured in a manner of photographic light sources 1 via glass plate 71 by line sensor camera 2
Line sensor camera 2.It should be noted that the opticpath center of line sensor camera 2 (with line sensor camera
Pip on 2 optical axis consistent opticpath and glass plate corresponding with the opticpath later opticpath is consistent
Opticpath) existing for the glass plate satisfaction of plane the case where carrying out regulation not to be deformed such condition (in other words, flat
Such condition).But line sensor camera 2 considers the interference with carrying mechanism and configures in the top of glass plate 71.And
And line sensor camera 2 configures in such a way that the visual field of line sensor camera 25 is orthogonal with the carry direction of glass plate 71.
Moreover, in Fig. 1, exemplify the configuration of line sensor camera 2 the position in the downstream side that carry direction is more leaned on than the visual field 5 feelings
Condition, but line sensor camera 2 can also be configured in the position than 5 upstream side of the visual field.
Further illustrate the posture of line sensor camera 2.As described later, light source 1 has the irradiation of elongated rectangle
Face, and irradiate candy strip from the shadow surface.It is same as situation shown in Fig. 10, it is assumed that with the light of line sensor camera 2
Vertical with the glass plate 71 and carry direction with glass plate of plane existing for path center also vertical mode configure the line sensing
The state of device camera 2.In this case, the visual field 5 is orthogonal with the carry direction of glass plate 71.Moreover, in the state assumed
Under, include the starting point of the opticpath extended from line sensor camera 2, the visual field 5 of line sensor camera 2, along light source 1
Shadow surface length direction the shadow surface central shaft and the plane that is formed is orthogonal with the carry direction of glass plate 71.From
The state, which plays the axis centered on the visual field 5, makes 2 postrotational position configure the line sensor camera 2 of line sensor camera.At this time
Line sensor camera 2 posture correspond to line sensor camera 2 shown in FIG. 1 posture.It should be noted that from upper
As long as the state for the hypothesis stated rise centered on the visual field 5 axis make line sensor camera 2 rotate when rotation amount meet consider with
The interference of carrying mechanism and line sensor camera 2 is located at condition as place more closer to the top than the face of the table side of glass plate 71 is
Can, it is not particularly limited.
The posture for determining line sensor camera 2 in this way, thus feels in the opticpath of line sensor camera 2
Plane become with glass plate 71 it is vertical and with the carry direction of glass plate 71 both not parallel or out of plumb state.
Moreover, the visual field 5 under the posture of line sensor camera 2 shown in FIG. 1 and regarding in the state of above-mentioned hypothesis
Open country 5 is identical.
In such manner, it is possible to the visual field 5 be fixed and determined the posture of line sensor camera 2.Moreover, from line sensor camera
2 each pixel is changed by the opticpath in lens towards the visual field 5 not according to the situation occurred of the deformation of glass plate 71
But it is fixed.But changed according to the situation occurred of the deformation of glass plate 71 from the visual field 5 to the opticpath of light source 1.
Light source 1 has the shadow surface of elongated rectangle, irradiates candy strip from the shadow surface.In the example depicted in figure 1,
In light source 1, the face towards 71 side of glass plate is shadow surface.It is set in parallel at certain intervals on the shadow surface of light source 1 dark
Portion.The candy strip of the shadow surface of light source 1 about the present invention, is described below.
Light source 1 does not deform in glass plate 71 under such condition (in other words, the flat such condition of glass plate 71),
Configuration is to be equivalent to the opticpath from lens towards the visual field 5 of line sensor camera 2 anti-by the face of the table side of glass plate 71
Position on the opticpath of situation after penetrating.
Further illustrate the position of light source 1.It is same as situation shown in Fig. 10, it is assumed that with line sensor camera 2
Also vertical mode is configured with line to vertical with the glass plate 71 and carry direction with glass plate of plane existing for opticpath center
The state of road sensor camera 2.The visual field 5 at this time is identical as the visual field 5 shown in FIG. 1.As previously mentioned, in the state of the hypothesis
Under, including the visual field 5 of the starting point of opticpath extended from line sensor camera 2, line sensor camera 2, along light source 1
Shadow surface length direction the shadow surface central shaft plane it is orthogonal with the carry direction of glass plate 71.From the state
It rises, axis makes light source 1 rotate centered on the visual field 5.Also, by the configuration of light source 1 from line sensor camera 2 shown in FIG. 1
The opticpath for the case where each pixel is reflected by the opticpath in lens towards the visual field 5 by the face of the table side of glass plate 71
On.As has been explained above, line sensor camera 2 is also disposed in from the above-mentioned state assumed centered on the visual field 5
The position that axis is rotated.That is, line sensor camera 2 and light source 1 this both sides configure from the above-mentioned shape assumed
State plays the position that axis is rotated centered on the visual field 5.But from the above-mentioned state assumed centered on the visual field 5
The direction of axis rotation is opposite direction in circuit sensor camera 2 and light source 1.Also, from the above-mentioned state assumed
The rotation amount of the line sensor camera 2 risen is preferably equal with the rotation amount of light source 1.
Also, in the allocation position of such light source 1, the irradiation of light source 1 is hung down towards the carry direction with glass plate
It is after straight face projection the result is that as line segment mode determine light source 1 shadow surface direction.As a result, the appearance of light source 1
Gesture determines.In Fig. 1, the posture of the light source 1 is indicated.
The direction of shadow surface about light source 1, illustrates with reference to Fig. 2 and Fig. 3.Fig. 2 is schematically shown from circuit
The lens of sensor camera 2 are via the visual field 5 towards the opticpath of light source 1 and the stereogram of the shadow surface 1a of light source 1.In Fig. 2
In, about light source 1, shadow surface 1a is only illustrated, omits the diagram of the appearance of light source 1.Moreover, about line sensor camera 2,
Omit the diagram of the appearance of line sensor camera 2.The arrow shown in Fig. 2 carry direction for indicating glass plate 71 same as Fig. 1.
Fig. 3 be indicate it is shown in Fig. 2 from camera 2 via the visual field 5 towards the opticpath of light source 1 and by the irradiation of light source 1
Schematic diagrames of the face 1a to the result after the face projection vertical with the carry direction of glass plate.Shadow surface 1a shown in Fig. 2 to
When the vertical face projection of the carry direction of glass plate, become line segment as shown in Figure 3.The posture of light source 1 shown in FIG. 1 meets this
Part.
It should be noted that in the present embodiment, as projection result, it is illustrated that and explanation is along the carrying side of glass plate
To axis projected to the upstream side from downstream side after as a result, can also still use axis along the carry direction of glass plate from upper
Swim the result after lateral downstream lateral projection.No matter what kind of situation it is, it can illustrate the structure of the present invention.
As has been explained above, from each pixel of line sensor camera 2 by lens towards the visual field 5 opticpath not
It is to be changed according to the situation occurred of the deformation of glass plate 71 but fixed.It will be in the opticpath of opposite Mr. Yu's pixel
Reflect into the camera shooting state of shadow surface 1a from the visual field 5 to the opticpath of light source 1.That is, corresponding to certain pixel from the visual field 5 to
If the opticpath of light source 1 dark portion on shadow surface 1a, then the output of the pixel indicates black.Moreover, the opticpath exists
If bright portion on shadow surface 1a, then the output of the pixel indicates white.Therefore, if glass plate 71 does not deform, from the visual field 5 to
The opticpath of light source 1 does not change, therefore the scar occurred in image becomes at equal intervals.On the other hand, exist in glass plate 71
In the case of deformation, becoming to bright portion from the visual field 5 to the opticpath of light source 1 from the dark portion of shadow surface 1a corresponding to certain pixel
It is dynamic, or changed from bright portion to dark portion, the scar thus occurred in image becomes unequal interval.
Assuming that the shadow surface 1a of light source 1 to be become to the result of the face upslide movie queen vertical with the carry direction of glass plate
The mode in face determines the posture of light source 1.Fig. 4 is the schematic diagram for indicating projection result in this case.In Fig. 4, although only
1 dark portion 1b is illustrated, but dark portion 1b is equipped with multiple.Moreover, in Fig. 4, in the face of the projection result as shadow surface 1a,
There are bright portion and dark portion this both sides.Therefore, same as the situation shown in Figure 17, the opticpath corresponding to certain pixel is in shadow surface
When being present in dark portion 1b on 1a, the case where generating the where on the line that can not uniquely determine shooting dark portion 1b.For example, Fig. 4 institutes
There are multiple selections for the opticpath of the dark portion 1b from the visual field 5 to light source 1 in the opticpath 7 shown.Therefore, from opticpath
The opticpath until the pip to dark portion on glass plate 71 in 7 can not be uniquely determined according to photographed images.
Therefore, light source 1 shown in FIG. 1 needs to meet by the shadow surface 1a of light source 1 to vertical with the carry direction of glass plate
Face projection result become line segment as condition.By meeting the condition, line sensor camera 2 can be uniquely determined
Each pixel state.
Next, the candy strip that explanation is arranged on the shadow surface 1a (with reference to Fig. 2) of light source 1.In shadow surface 1a,
As described above under the posture of determining light source 1, the line for becoming dark portion is set in a manner of parallel with the carry direction of glass plate 71
It sets.Also, it is equally spaced as the line of dark portion multiple.It is parallel to each other as each line of dark portion.In candy strip, dark portion
Position in addition is bright portion.
Fig. 5 is after indicating that the line that will become the dark portion of candy strip is projected to the face vertical with the carry direction of glass plate
As a result schematic diagram.As shown in figure 5, in shadow surface 1a in a manner of parallel with the carry direction of glass plate 71 as the line of dark portion
In the case of upper setting dark portion, becoming when the line of dark portion 1b is projected to the face vertical with the carry direction of glass plate becomes point.It will
The dark portion 1b of shadow surface 1a to it is after vertical with the carry direction of glass plate face projection as a result, dark portion 1b as put and between waiting
It is arranged every ground.
The state of determining candy strip in this way being observed from the front is as shown in Figure 6.As shown in fig. 6, in present embodiment
In, the dark portion 1b in candy strip is tilted relative to the short side of shadow surface 1a.
Assuming that on shadow surface 1a, same as situation shown in Fig. 10, dark portion is parallel with the short side of shadow surface 1a.Then,
Under the conditions of glass plate 71 is not deformed such, the configuration of light source 1 is being equivalent to from line sensor camera 2 towards the visual field
The position on extending direction that 5 opticpath is reflected by the face of the table side of glass plate 71, and meeting light source 1
In the case that shadow surface 1a becomes condition as line segment to the result after the face projection vertical with the carry direction of glass plate, make
As candy strip dark portion line to the results are shown in Figure 7 after vertical with the carry direction of glass plate face projection.That is, will
The results are shown in Figure 7 after dark portion 1b is projected to the face vertical with the carry direction of glass plate becomes line segment, and has width.Its
As a result, for example, even if can not uniquely be determined in each dark portion with width if the surface of glass plate 71 is deformed
Where shoots pixel, therefore generates the scar occurred in image as equally spaced situation etc., the inspection accuracy decline of deformation.
Therefore, in the present invention, the short side not instead of with shadow surface 1a is set in parallel dark portion, as being illustrated Fig. 6
Dark portion 1b is set.Strictly speaking, flat as the line of dark portion and the carry direction of glass plate 71 to meet under the posture of light source 1
Dark portion 1b is arranged in the mode of the such condition of row.
Result Fig. 5 as the aforementioned after the dark portion 1b of shadow surface 1a is projected to the face vertical with the carry direction of glass plate
Shown, dark portion 1b is equally spaced arranged as point.Therefore, if not deformed on glass plate 71, the trace occurred in image
Line becomes at equal intervals.If moreover, being deformed, the scar occurred in image generates unevenness, between scar
Every the deformation of glass plate can be evaluated.Also, in projection result, dark portion 1b occurs as point, therefore in the picture, will not
There is the wide situation of the width of 1 scar, can accurately evaluate the deformation of glass plate.
Moreover, in the present invention, plane is vertical with glass plate 71 existing for the opticpath center of line sensor camera 2
And it is not parallel with the carry direction of glass plate 71, therefore can using distance P shown in Fig. 9 segregation phenomenon (face of table side
The phenomenon that path of reflected light is detached with the path of the reflected light in the face of back side depending on plate thickness).In other words, make by carrying on the back
In the case that reflection at the face of side and the scar that generates can not be completely eliminated by water layer, the table side of glass plate 71 will not occur
Face at the opticpath reflected and the Chong Die state (referring to Fig.1 8) of opticpath reflected at the face of back side, can prevent from surveying
Determine the decline of precision.
In addition, in the transparent plate body surface inspection camera system of the present invention, the optical link of line sensor camera 2
Plane existing for diameter center is vertical with glass plate 71 and carry direction out of plumb with glass plate 71.Therefore, it is seen from surface
In the case of examining, light source 1 and line sensor camera 2 is made to prolong respectively with other line sensor cameras and other light source
Long line is not overlapped, can will be by 2 groups of light source 1 and line sensor camera not to the interference in the visual field of line sensor camera
At group configuration it is multiple.Therefore, even if it is the group being made of light source 1 and line sensor camera 2 setting is multiple, and with each group
The visual field 5 of line sensor camera 2 configures each group as linear mode, and interference will not be generated in each group.
Fig. 8 is to indicate that the group being made of light source 1 and line sensor camera 2 is configured multiple situations as described above
Definition graph.Fig. 8 illustrates the situation of each light source and each line sensor camera observed from surface.In fig. 8, by light source
1 and line sensor camera 2 form combination illustrate 4 groups.Moreover, the visual field 5 of the line sensor camera 2 of each group is linear
Arrange to shape.As a result, the deformation of the glass plate 71 of wide cut shown in Fig. 8 can be checked accurately.Also, the line of each group
The visual field 5 of road sensor camera 2 linearly arranges and the non-changing of the relative positions, is accordingly used on the face of the back side of glass plate 71 being arranged
Water layer (diagram omit) if mechanism be arranged 1 at position corresponding with the visual field 5.Therefore, in the present invention, though
Plane existing for the opticpath center of line sensor camera is vertical with glass plate and the carry direction of the plane and glass plate
In the case of not parallel, it can also inhibit the increase of the number of the mechanism for water layer to be arranged in the back side of glass plate.
It should be noted that the reflection (backside reflection) in the face of the back side of glass plate 71 can be eliminated using water layer, therefore
Mechanism for water layer to be arranged in the back side of glass plate is referred to as backside reflection and eliminates unit.
It should be noted that the camera used in the above-described embodiment is if not line sensor camera but region
Sensor camera (area sensor camera), then the line for becoming the dark portion of candy strip can also be with glass handling direction not
It is parallel.
It can be using using area sensor camera as the replacement of multiple line sensor cameras.In this case, become
The line of the dark portion of candy strip needs parallel with glass handling direction.
In detail and illustrate the application with reference to specific embodiment, but do not depart from the spirit and scope of the present invention and
The case where various changes can be applied and corrected, is self-evident to those skilled in the art.
The application based on 2 19th, 2013 Japanese patent applications (Japanese Patent Application 2013-030061) filed an application, and
It is incorporated herein using its content as reference.
Industrial applicibility
Present invention is suitably applied to the generations of the image of the inspection of the surface shape of the transparent plate bodies such as glass plate.
Label declaration
1,81 light source
1a, 81a shadow surface
1b, 81b dark portion
2,82 line sensor camera
5,85 visual field
71 glass plates
Claims (8)
1. a kind of transparent plate body surface inspection camera system, which is characterized in that have：
Line sensor camera shoots the transparent plate body being handled upside down from inclined direction, and with the visual field and the transparent plate body
The orthogonal mode of carry direction configure；And
Light source, under conditions of the transparent plate body is not deformed, configuration is from the line sensor camera direction
On the extending direction that the opticpath in the visual field of the line sensor camera is reflected by the transparent plate body, and the light source
Candy strip is irradiated,
The direction of the shadow surface of the candy strip of the light source is to project the shadow surface along the direction of travel of transparent plate body
The result is that determined as the mode of line segment,
The line of dark portion on the shadow surface as candy strip is parallel with the carry direction of the transparent plate body.
2. transparent plate body surface inspection camera system according to claim 1, wherein
Under conditions of transparent plate body is not deformed, including the opticpath consistent with the optical axis of line sensor camera
With the plane of the opticpath until the pip to light source in the transparent plate body corresponding with the opticpath, meet
With the carry direction of transparent plate body is both not parallel and also out of plumb as condition.
3. transparent plate body surface inspection camera system according to claim 1, wherein
The transparent plate body surface inspection camera system has multiple by the line sensor camera and the light source group
At group, be arranged in the visual field of each line sensor camera by the line sensor camera and each group that the light source forms
Mode on straight line configures.
4. transparent plate body surface inspection camera system according to claim 2, wherein
The transparent plate body surface inspection camera system has multiple by the line sensor camera and the light source group
At group, be arranged in the visual field of each line sensor camera by the line sensor camera and each group that the light source forms
Mode on straight line configures.
5. the transparent plate body surface inspection camera system according to any one of 1~claim 4 of claim,
In,
The transparent plate body surface inspection has the backside reflection for eliminating the backside reflection of transparent plate body with camera system
Eliminate unit.
6. a kind of transparent plate body surface inspection camera system, which is characterized in that have：
Line sensor camera shoots the transparent plate body being handled upside down, and with the carry direction in the visual field and the transparent plate body
Orthogonal mode configures；And
Light source, the shadow surface with rectangle, and candy strip is irradiated from the shadow surface,
The line sensor camera and the light source are configured as follows：From comprising from the line sensor camera extend
The starting point of opticpath, the line sensor camera the visual field, along the shadow surface length direction the irradiation
The plane of the central shaft in the face state orthogonal with the carry direction rises, and axis makes the line sensor centered on the visual field
Camera and the light source become the state of mutually opposing rotation,
The direction of the shadow surface of the candy strip of the light source is to project the shadow surface along the direction of travel of transparent plate body
The result is that determined as the mode of line segment,
The line of dark portion on the shadow surface as candy strip is parallel with the carry direction of the transparent plate body.
7. transparent plate body surface inspection camera system according to claim 6, wherein
The transparent plate body surface inspection camera system has multiple by the line sensor camera and the light source group
At group, be arranged in the visual field of each line sensor camera by the line sensor camera and each group that the light source forms
Mode on straight line configures.
8. the transparent plate body surface inspection camera system according to claim 6 or claim 7, wherein
The transparent plate body surface inspection has the backside reflection for eliminating the backside reflection of transparent plate body with camera system
Eliminate unit.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013030061A JP2016085034A (en) | 2013-02-19 | 2013-02-19 | Image-capturing system for transparent plate-like body surface inspection |
| JP2013-030061 | 2013-02-19 | ||
| PCT/JP2014/053212 WO2014129358A1 (en) | 2013-02-19 | 2014-02-12 | Imaging system for transparent plate surface inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105008854A CN105008854A (en) | 2015-10-28 |
| CN105008854B true CN105008854B (en) | 2018-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480009296.1A Active CN105008854B (en) | 2013-02-19 | 2014-02-12 | Transparent plate body surface inspection camera system |
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| Country | Link |
|---|---|
| JP (1) | JP2016085034A (en) |
| KR (1) | KR102071451B1 (en) |
| CN (1) | CN105008854B (en) |
| TW (1) | TWI637164B (en) |
| WO (1) | WO2014129358A1 (en) |
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| JP6464021B2 (en) * | 2015-04-22 | 2019-02-06 | 新東エスプレシジョン株式会社 | measuring device |
| JP6642223B2 (en) * | 2016-04-13 | 2020-02-05 | Ａｇｃ株式会社 | Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method |
| JP6228695B1 (en) * | 2017-02-27 | 2017-11-08 | 株式会社ヒューテック | Defect inspection equipment |
| CN107607549A (en) * | 2017-09-27 | 2018-01-19 | 深圳精创视觉科技有限公司 | Glass defect detection device |
| CN110455828A (en) * | 2019-09-02 | 2019-11-15 | 蚌埠中光电科技有限公司 | A kind of large scale TFT substrate glass nondestructive micro-waviness detection method |
| CN110849911B (en) * | 2019-11-25 | 2021-10-15 | 厦门大学 | Glass defect image acquisition device, glass defect detection equipment and detection method |
| CN112880600A (en) * | 2021-04-29 | 2021-06-01 | 深圳博升光电科技有限公司 | Imaging device and equipment for detecting glass |
| CN115555290A (en) * | 2022-10-20 | 2023-01-03 | 四川大学 | Glass apron slight defect check out test set based on degree of deep learning |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3816392A1 (en) * | 1988-05-13 | 1989-11-23 | Ver Glaswerke Gmbh | METHOD FOR DETERMINING THE OPTICAL QUALITY OF FLAT GLASS OR FLAT GLASS PRODUCTS |
| DE19643018B4 (en) * | 1996-10-18 | 2010-06-17 | Isra Surface Vision Gmbh | Method and device for measuring the course of reflective surfaces |
| CN1297796C (en) * | 2003-07-02 | 2007-01-31 | 西安交通大学 | Chromatographic scanning three-dimension measuring method and device linear array photoelectric sensor |
| US7471383B2 (en) * | 2006-12-19 | 2008-12-30 | Pilkington North America, Inc. | Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging |
| JP5034891B2 (en) | 2007-11-21 | 2012-09-26 | 旭硝子株式会社 | Apparatus for measuring shape of transparent plate and method for producing plate glass |
| TW201144751A (en) * | 2010-06-15 | 2011-12-16 | Asahi Glass Co Ltd | Shape measurement device, shape measurement method and glass plate manufacturing method |
| JP2012021781A (en) | 2010-07-12 | 2012-02-02 | Asahi Glass Co Ltd | Method and device for evaluating surface shape |
-
2013
- 2013-02-19 JP JP2013030061A patent/JP2016085034A/en active Pending
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2014
- 2014-02-12 KR KR1020157022262A patent/KR102071451B1/en active IP Right Grant
- 2014-02-12 WO PCT/JP2014/053212 patent/WO2014129358A1/en active Application Filing
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| KR102071451B1 (en) | 2020-01-30 |
| TWI637164B (en) | 2018-10-01 |
| WO2014129358A1 (en) | 2014-08-28 |
| KR20150116863A (en) | 2015-10-16 |
| CN105008854A (en) | 2015-10-28 |
| JP2016085034A (en) | 2016-05-19 |
| TW201443424A (en) | 2014-11-16 |
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