TWI637164B - Camera system for surface inspection of transparent plates - Google Patents
Camera system for surface inspection of transparent plates Download PDFInfo
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- TWI637164B TWI637164B TW103105529A TW103105529A TWI637164B TW I637164 B TWI637164 B TW I637164B TW 103105529 A TW103105529 A TW 103105529A TW 103105529 A TW103105529 A TW 103105529A TW I637164 B TWI637164 B TW I637164B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
本發明提供一種透明板狀體表面檢查用攝像系統，該透明板狀體表面檢查用攝像系統係於線感測器照相機之光線路徑中心所在之平面垂直於透明板狀體、且使該平面與透明板狀體之搬送方向既不平行亦不垂直之情形時，可一面利用正面側之面之反射光之路徑與背面側之面之反射光之路徑依存於板厚分離之現象，一面抑制用以將水層設置於透明板狀體之背面側之機構之數量增加。 The invention provides a camera system for inspecting the surface of a transparent plate body. The camera system for inspecting a surface of a transparent plate body is arranged on a plane where the center of the light path of the line sensor camera is perpendicular to the transparent plate body, and the plane and the When the transport direction of the transparent plate-shaped body is neither parallel nor perpendicular, the path of the reflected light on the front side and the path of the reflected light on the back side can be used depending on the separation of the thickness of the plate. The number of mechanisms for providing a water layer on the back side of the transparent plate-shaped body has increased.
光源1係基於玻璃板71未產生歪曲之條件，配置於自線感測器照相機2朝向視場5之光線路徑於玻璃板71經反射之延長方向上。光源1之條紋圖案之照射面之朝向係以沿著玻璃板71之行進方向投射該照射面之結果成為線段之方式決定。又，該照射面上成為條紋圖案之暗部之線與玻璃板71之搬送方向平行。 The light source 1 is based on the condition that the glass plate 71 is not distorted, and is arranged in the light path of the line sensor camera 2 toward the field of view 5 in the extended direction of the glass plate 71 after reflection. The direction of the irradiation surface of the stripe pattern of the light source 1 is determined so that the irradiation surface is projected along the traveling direction of the glass plate 71 to become a line segment. Moreover, the line which becomes the dark part of a stripe pattern on this irradiation surface is parallel to the conveyance direction of the glass plate 71.
Description
本發明係關於一種透明板狀體表面檢查用攝像系統，該透明板狀體表面檢查用攝像系統係為了檢查透明板狀體之表面形狀，而在光源攝像時獲得藉由因透明板狀體表面之反射產生之光線路徑變化而形成之圖像。 The present invention relates to a camera system for inspecting the surface of a transparent plate body. The camera system for inspecting a surface of a transparent plate body is used to inspect the surface shape of the transparent plate body, An image formed by a change in the path of light caused by reflection.
作為檢查玻璃板表面之微小歪曲之方法的一例，已知有如下方法，即，使用線感測器照相機(line sensor camera)，沿著於玻璃板之表面上反射之光線路徑，對光源之條紋圖案(stripe pattern)進行攝像，並基於由攝像所得之圖像資料，檢查玻璃板表面之歪曲之有無、及歪曲之程度。此時，大多使用以固定間隔配置有成為暗部之線之圖案作為條紋圖案。再者，檢查對象之玻璃板係於固定方向上搬送之狀態下被照射條紋圖案。於攝像之結果所得之圖像中出現對應於條紋圖案之暗部之紋路。再者，線感測器照相機之各像素係設為大小相同且等間隔地排列者。 As an example of a method for inspecting the slight distortion of the surface of a glass plate, a method is known in which a line sensor camera is used to follow a light path reflected on the surface of a glass plate to streak light sources The stripe pattern is imaged, and the presence or absence of distortion and the degree of distortion of the surface of the glass plate are checked based on the image data obtained from the photography. At this time, a pattern in which lines forming dark portions are arranged at regular intervals is often used as a stripe pattern. Furthermore, the glass plate to be inspected is irradiated with a stripe pattern while being conveyed in a fixed direction. A pattern corresponding to the dark part of the stripe pattern appears in the image obtained as a result of photographing. In addition, the pixels of the line sensor camera are arranged with the same size and arranged at equal intervals.
圖9係表示光源與線感測器照相機之間之普通之光之路徑的說明圖。將支持玻璃板71之支持部72所在之側稱為背面側，將其相反側稱為正面側。圖9所示之實線係表示由玻璃板71之正面側之面反射之光之路徑。又，圖9所示之虛線表示由玻璃板71之背面側之面反射之光之路徑。再者，圖9所示之距離P係依存於玻璃板71之板厚。 FIG. 9 is an explanatory diagram showing a path of ordinary light between a light source and a line sensor camera. The side on which the support portion 72 supporting the glass plate 71 is located is called the back side, and the opposite side is called the front side. The solid line shown in FIG. 9 indicates the path of light reflected from the surface on the front side of the glass plate 71. The dotted line shown in FIG. 9 indicates the path of light reflected from the surface on the back side of the glass plate 71. The distance P shown in FIG. 9 depends on the thickness of the glass plate 71.
作為產生圖9所示之距離P之分離現象之光源及線感測器照相機 之配置態樣，考量圖10所示之態樣。圖10所示之箭頭表示玻璃板71之搬送方向。此時，於與玻璃板71之搬送方向垂直之平面內，包含自線感測器照相機82延伸之光線路徑之起點、線感測器照相機82之視場85、及沿著光源81之矩形照射面之長度方向之該照射面之中心線。 Light source and line sensor camera as the separation phenomenon of distance P shown in Fig. 9 For the configuration, consider the configuration shown in Figure 10. The arrow shown in FIG. 10 indicates the conveyance direction of the glass plate 71. At this time, in a plane perpendicular to the conveying direction of the glass plate 71, the starting point of the light path extending from the line sensor camera 82, the field of view 85 of the line sensor camera 82, and the rectangular illumination along the light source 81 are included. The centerline of the illuminated surface in the length direction of the surface.
因此，圖10所示之配置態樣屬於線感測器照相機82之光線路徑中心所在之平面垂直於玻璃板，且垂直於玻璃板之搬送方向之情形。 Therefore, the configuration shown in FIG. 10 belongs to a case where the plane where the light path center of the line sensor camera 82 is located is perpendicular to the glass plate and perpendicular to the conveying direction of the glass plate.
此處，所謂攝影機之光軸係指通過攝影機之透鏡之中心且垂直於其透鏡面之垂線。而且，所謂光線路徑中心係指將與線感測器照相機之光軸一致之光線路徑、及對應於該光線路徑之玻璃板(假定未產生歪曲者)上之反射點以後至光源為止之光線路徑合併而成之光線路徑。 Here, the optical axis of the camera refers to a perpendicular line passing through the center of the lens of the camera and perpendicular to the lens surface thereof. In addition, the center of the light path refers to the light path from the point of the light path that matches the light axis of the line sensor camera and from the reflection point on the glass plate (assuming no distortion occurs) to the light source. Merged light path.
圖10表示如下態樣，即，於垂直於玻璃板71之搬送方向之平面內，光源81對玻璃板71照射條紋圖案，線感測器照相機82經由玻璃板71拍攝光源81。此時，由於光分別於玻璃板之正面側之面及背面側之面中反射，故而，對應於條紋圖案之1條暗部之紋路於圖像內出現2條。 FIG. 10 shows a state in which the light source 81 irradiates a stripe pattern on the glass plate 71 in a plane perpendicular to the conveying direction of the glass plate 71, and the line sensor camera 82 captures the light source 81 through the glass plate 71. At this time, since light is reflected in the front surface and the back surface of the glass plate, two lines corresponding to one dark portion of the stripe pattern appear in the image.
圖11係表示藉由攝像所得之圖像之例之示意圖。於圖11中，以實線表示因正面側之面上之反射而產生之紋路，且以虛線示意性表示因背面側之面上之反射而產生之紋路。將該2種紋路彼此間之距離記為分離距離D。於屬於該2種紋路之部位，亮度值變得極小。因正面側之面上之反射而產生之紋路與因背面側之面上之反射而產生之紋路間之分離距離D成為依存於玻璃板之板厚之大小。 FIG. 11 is a schematic diagram showing an example of an image obtained by imaging. In FIG. 11, the lines generated by the reflection on the surface on the front side are represented by solid lines, and the lines generated by the reflection on the surface on the back side are schematically represented by dotted lines. The distance between the two kinds of textures is referred to as a separation distance D. At the sites belonging to these two types of textures, the brightness value becomes extremely small. The separation distance D between the texture due to reflection on the front surface and the texture due to reflection on the back surface becomes dependent on the thickness of the glass plate.
再者，例如只要因正面側之面上之反射而產生之紋路彼此之間隔固定，則可判斷於玻璃板中未產生歪曲。又，若該間隔中存在偏差，則可基於該間隔，評估玻璃板之歪曲之程度。 Furthermore, for example, as long as the distance between the lines caused by reflection on the front side surface is fixed, it can be judged that no distortion occurs in the glass plate. If there is a deviation in the interval, the degree of distortion of the glass plate can be evaluated based on the interval.
又，於玻璃板中產生歪曲之情形時，分離距離D亦將變小或變 大。此處，若分離距離D變小，則亮度值變得極小之像素接近，於圖像內產生不明確為2條紋路或1條紋路之部位。圖12係表示產生分離距離D接近導致不明確為2條紋路或1條紋路之部位的圖像之例之示意圖。若產生此種不明確之部位，則玻璃板之歪曲之測定精度降低。尤其，若玻璃板之板厚變薄，則分離距離D(參照圖11)本身之間隔變小，故而於圖像內易產生不明確為2條紋路或1條紋路之部位。因此，板厚越薄，歪曲之測定精度越容易降低。 In addition, when the glass plate is distorted, the separation distance D will also become smaller or smaller. Big. Here, as the separation distance D becomes smaller, pixels having extremely small luminance values become closer, and a portion in the image that is not clearly defined as a two-striped path or a one-striped path is generated. FIG. 12 is a schematic diagram showing an example of an image in which the separation distance D is close to a part where the two-strip path or the one-strip path is not clear. If such an ambiguous portion occurs, the measurement accuracy of the distortion of the glass plate is reduced. In particular, if the thickness of the glass plate becomes thinner, the separation distance D (see FIG. 11) itself becomes smaller, so that it is easy to generate a part in the image that is not a 2-stripe path or a 1-stripe path. Therefore, the thinner the plate thickness, the more easily the measurement accuracy of distortion is reduced.
為了防止此種測定精度之降低，而提出有於玻璃板之背面側配置水之層(以下記為水層)之技術(例如參照專利文獻1)。圖13係表示在玻璃板之背面側配置有水層之情形下，光源與線感測器照相機之間之光之路徑的說明圖。水層73係設置於玻璃板71與支持部72之間。水層73之折射率係與玻璃板71之折射率大致相同，故而，幾乎不存在玻璃板71之背面側之面所反射之光。其結果，於圖像中出現因玻璃板71之正面側之面上之反射而產生之紋路，且幾乎不出現因背面側之面上之反射而產生之紋路。因此，可更明確地識別因正面側之面上之反射而產生之紋路之位置，且可基於紋路之間隔，精度較佳地測定玻璃板之歪曲。 In order to prevent such a decrease in measurement accuracy, a technology has been proposed in which a layer of water (hereinafter referred to as a water layer) is disposed on the back surface side of a glass plate (for example, refer to Patent Document 1). FIG. 13 is an explanatory diagram showing a path of light between a light source and a line sensor camera in a case where a water layer is disposed on the back side of a glass plate. The water layer 73 is provided between the glass plate 71 and the support portion 72. The refractive index of the water layer 73 is substantially the same as the refractive index of the glass plate 71. Therefore, there is almost no light reflected from the surface on the back side of the glass plate 71. As a result, a texture caused by reflection on the front surface side of the glass plate 71 appears in the image, and a texture caused by reflection on the back surface surface is hardly seen. Therefore, the position of the texture caused by the reflection on the surface on the front side can be more clearly identified, and the distortion of the glass plate can be measured with better accuracy based on the interval of the texture.
以下，對圖10所示之配置態樣中之圖像拍攝進行說明。再者，為使說明變簡單，線感測器照相機82之屬於視場85之部位設為在玻璃板71之背面側配置有水層(於圖10中省略圖示)者。因此，以幾乎不存在背面側之反射者進行說明。此方面在下述圖15所示之態樣中亦為相同。 Hereinafter, image capture in the configuration shown in FIG. 10 will be described. In order to simplify the description, a portion of the line sensor camera 82 that belongs to the field of view 85 is a water layer (not shown in FIG. 10) arranged on the back side of the glass plate 71. Therefore, a description will be given with a person having almost no reflection on the back side. This point is also the same in the aspect shown in FIG. 15 below.
於正在搬送玻璃板71之狀態下，線感測器照相機82經由視場85連續地拍攝光源81。因此，可將玻璃板71作為面進行檢查。 While the glass plate 71 is being conveyed, the line sensor camera 82 continuously captures the light source 81 through the field of view 85. Therefore, the glass plate 71 can be inspected as a surface.
自線感測器照相機82之各像素通過透鏡朝向視場85之光線路徑係固定而不因玻璃板71之歪曲之產生狀況變化。但，視場85至光源81 之光線路徑因玻璃板71之歪曲之產生狀況而變化。 The light path of each pixel of the line sensor camera 82 toward the field of view 85 through the lens is fixed without changing the status due to the distortion of the glass plate 71. However, the field of view 85 to the light source 81 The light path varies depending on the state of distortion of the glass plate 71.
光源81之照射面81a係朝向線感測器照相機82之視場85方向地照射條紋圖案。於本例中，照射面81a係細長之矩形，且以照射面81a所在之面與玻璃板71所在之面相交且照射面81a之短邊與玻璃板71之搬送方向平行之方式配置。而且，於照射面81a中，各暗部81b以與照射面81a之短邊平行之方式等間隔地設置。再者，在照射面中，將暗部以外之部位記為明部。 The irradiation surface 81 a of the light source 81 irradiates a stripe pattern toward the field of view 85 of the line sensor camera 82. In this example, the irradiation surface 81a is an elongated rectangle, and the surface where the irradiation surface 81a is located intersects the surface where the glass plate 71 is located, and the short sides of the irradiation surface 81a are parallel to the conveyance direction of the glass plate 71. Further, in the irradiation surface 81a, the dark portions 81b are provided at regular intervals so as to be parallel to the short sides of the irradiation surface 81a. In addition, in the irradiation surface, a part other than a dark part is described as a bright part.
圖14係表示將圖10所示之自線感測器照相機82之透鏡經由視場85到達光源81之光線路徑及光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。再者，嚴格而言，圖14係表示沿著玻璃板之搬送方向之軸自下游側投射至上游側所得之結果。於本說明書中，關於表示投射結果之其他圖式，亦表示沿著玻璃板之搬送方向之軸自下游側投射至上游側所得之結果。 FIG. 14 shows the results obtained by projecting the light path of the lens sensor camera 82 shown in FIG. 10 through the field of view 85 to the light source 81 and the irradiation surface 81a of the light source 81 onto a plane perpendicular to the conveyance direction of the glass plate. The schematic. In addition, strictly speaking, FIG. 14 shows the results obtained by projecting from the downstream side to the upstream side along the axis of the glass plate transport direction. In this specification, other drawings showing the projection results also indicate the results obtained by projecting from the downstream side to the upstream side along the axis of the glass plate's transport direction.
如上所述，自線感測器照相機82之各像素通過透鏡朝向視場85之光線路徑係固定而不因玻璃板71之歪曲之產生狀況變化。對應於某一像素之光線路徑中之視場85至光源81之光線路徑反映於照射面81a之攝像狀態中。即，若對應於某一像素之視場85至光源81之光線路徑於照射面81a中為暗部，則該像素之輸出顯示黑色。又，若自視場85至光源81之光線路徑於照射面81a中為明部，則該像素之輸出顯示白色。因此，若於玻璃板71中不存在歪曲，則視場85至光源81之光線路徑不產生變化，故而圖像中出現之紋路成為等間隔。另一方面，於玻璃板71中存在歪曲之情形時，對應於某一像素之視場85至光源81之光線路徑自照射面81a之暗部變動為明部，或自明部變動為暗部，藉此，圖像中出現之紋路成為非等間隔。 As described above, the light path of each pixel of the line sensor camera 82 toward the field of view 85 through the lens is fixed without changing the status due to the distortion of the glass plate 71. The light path from the field of view 85 to the light source 81 in the light path corresponding to a certain pixel is reflected in the imaging state of the irradiation surface 81a. That is, if the light path from the field of view 85 to the light source 81 corresponding to a certain pixel is a dark part in the irradiation surface 81a, the output of the pixel is displayed in black. In addition, if the light path from the field of view 85 to the light source 81 is a bright part in the irradiation surface 81a, the output of the pixel is white. Therefore, if there is no distortion in the glass plate 71, the light path from the field of view 85 to the light source 81 does not change, so the lines appearing in the image become equally spaced. On the other hand, when the glass plate 71 is distorted, the light path corresponding to the field of view 85 to the light source 81 of a certain pixel changes from the dark part of the irradiation surface 81a to the bright part, or changes from the bright part to the dark part, thereby The lines appearing in the image become non-equidistant.
將光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得之結果係如圖14所示地成為線段。其結果，對應於各像素之視場85至 光源81之光線路徑係與作為線段之照射面81a相交於一點，且分別唯一地確定。 The result obtained by projecting the irradiation surface 81a of the light source 81 onto a surface perpendicular to the conveyance direction of the glass plate is a line segment as shown in FIG. 14. As a result, the field of view corresponding to each pixel is 85 to The light path of the light source 81 intersects with the irradiation surface 81a as a line segment at one point, and is uniquely determined respectively.
又，作為光源與線感測器照相機之另一配置態樣，考量圖15所示之態樣。圖15所示之箭頭係表示玻璃板71之搬送方向。圖15係屬於線感測器照相機82之光線路徑中心存在於與玻璃板71之搬送方向平行且與玻璃板垂直之平面內之情形。 As another configuration of the light source and the line sensor camera, consider the configuration shown in FIG. 15. The arrows shown in FIG. 15 indicate the conveyance direction of the glass plate 71. FIG. 15 shows a case where the center of the light path of the line sensor camera 82 exists in a plane parallel to the conveyance direction of the glass plate 71 and perpendicular to the glass plate.
於正在搬送玻璃板71之狀態下，線感測器照相機82經由視場85連續地拍攝光源81。又，自線感測器照相機82之各像素通過透鏡朝向視場85之光線路徑係固定而不因玻璃板71之歪曲之產生狀況變化。該等方面與圖10所示之態樣相同。 While the glass plate 71 is being conveyed, the line sensor camera 82 continuously captures the light source 81 through the field of view 85. In addition, the light path of each pixel of the line sensor camera 82 through the lens toward the field of view 85 is fixed without changing the status due to the distortion of the glass plate 71. These aspects are the same as those shown in FIG. 10.
又，圖15所示之態樣係將光源81之照射面81a以與玻璃板71平行之方式配置，且以其短邊與玻璃板71之搬送方向平行之方式設置。即，照射面81a正對於玻璃板71地照射條紋圖案。亦於本例中，照射面81a為細長之矩形。而且，各暗部81b係以與照射面81a之短邊平行之方式設置。 In the state shown in FIG. 15, the irradiation surface 81 a of the light source 81 is arranged parallel to the glass plate 71, and the short sides thereof are arranged parallel to the conveying direction of the glass plate 71. That is, the irradiation surface 81 a irradiates a stripe pattern facing the glass plate 71. Also in this example, the irradiation surface 81a is an elongated rectangular shape. Each dark portion 81b is provided so as to be parallel to the short side of the irradiation surface 81a.
圖16係表示將圖15所示之自線感測器照相機82之透鏡經由視場85朝向光源81之光線路徑及光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。如上所述，自線感測器照相機82之各像素通過透鏡朝向視場85之光線路徑固定而不因玻璃板71之歪曲之產生狀況變化。而且，對應於某一像素之光線路徑之視場85至光源81之光線路徑係反映於照射面81a之攝像狀態中。即，若對應於某一像素之視場85至光源81之光線路徑於照射面81a中為暗部，則該像素之輸出顯示黑色。又，若視場85至光源81之光線路徑於照射面81a中為明部，則該像素之輸出顯示白色。因此，若於玻璃板71中不存在歪曲，則視場85至光源81之光線路徑不產生變化，故而圖像中出現之紋路成為等間隔。另一方面，於玻璃板71中存在歪曲之情形時，對應 於某一像素之視場85至光源81之光線路徑自照射面81a之暗部變動為明部，或自明部變動為暗部，藉此，圖像中出現之紋路成為非等間隔。 FIG. 16 shows the results obtained by projecting the lens of the auto-sensor camera 82 shown in FIG. 15 toward the light path of the light source 81 and the irradiation surface 81 a of the light source 81 through the field of view 85 to a plane perpendicular to the conveyance direction of the glass plate. The schematic. As described above, each pixel of the line sensor camera 82 is fixed through the lens toward the field of view 85 without changing the condition due to the distortion of the glass plate 71. Further, the light path from the field of view 85 to the light source 81 corresponding to the light path of a certain pixel is reflected in the imaging state of the irradiation surface 81a. That is, if the light path from the field of view 85 to the light source 81 corresponding to a certain pixel is a dark part in the irradiation surface 81a, the output of the pixel is displayed in black. In addition, if the light path from the field of view 85 to the light source 81 is a bright part in the irradiation surface 81a, the output of the pixel is white. Therefore, if there is no distortion in the glass plate 71, the light path from the field of view 85 to the light source 81 does not change, so the lines appearing in the image become equally spaced. On the other hand, when there is a distortion in the glass plate 71, The light path from the field of view 85 to the light source 81 of a certain pixel changes from a dark part of the illuminated surface 81a to a bright part, or from a bright part to a dark part, whereby the lines appearing in the image become non-equal intervals.
於圖15所示之態樣中，將光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得之結果亦如圖16所示地成為線段。因此，對應於各像素之視場85至光源81之光線路徑係與作為線段之照射面81a相交於一點，且分別唯一地確定。 In the state shown in FIG. 15, the result obtained by projecting the irradiation surface 81 a of the light source 81 onto a surface perpendicular to the conveyance direction of the glass plate is also a line segment as shown in FIG. 16. Therefore, the light path from the field of view 85 to the light source 81 corresponding to each pixel intersects with the irradiation surface 81a as a line segment at one point, and is uniquely determined respectively.
圖15所例示之光源及線感測器照相機之配置態樣係記載於例如專利文獻2。 The arrangement of the light source and the line sensor camera illustrated in FIG. 15 is described in Patent Document 2, for example.
再者，假定於圖15所示之態樣中，不使照射面81a平行於玻璃板71而將照射面81a朝向玻璃板71之搬送方向側傾斜。即，假定為以光源81之照射面81a朝向玻璃板71之搬送方向之下游側之方式，使光源81自照射面81a正對於玻璃板71之狀態旋轉了之狀態。因此，將自線感測器照相機82之透鏡經由視場85朝向光源81之光線路徑及照射面81a投射至與玻璃板之搬送方向垂直之面所得之結果成為如圖17所示。於此情形時，照射面81a之投射結果成為面。如此般，產生於對應於某一像素之光線路徑於照射面81a中存在於暗部時，無法唯一地確定對暗部之線上之何處進行攝像之情形。例如，圖17所示之光線路徑91中可選擇複數個視場85至光源81之暗部81b之線為止之光線路徑。因此，無法自攝影圖像唯一地確定光線路徑91中之玻璃板71上之反射點以後至暗部81b為止之光線路徑。因此，於圖15所示之配置態樣中，必須使光源81之照射面81a與玻璃板71平行。再者，於圖17中，僅圖示了1個暗部81b，但於照射面81a中存在複數個暗部81b。 It is assumed that, in the state shown in FIG. 15, the irradiation surface 81 a is inclined toward the conveyance direction side of the glass plate 71 without making the irradiation surface 81 a parallel to the glass plate 71. That is, it is assumed that the irradiation surface 81 a of the light source 81 faces the downstream side of the glass plate 71 in the conveying direction, and the light source 81 is rotated from the state where the irradiation surface 81 a faces the glass plate 71. Therefore, the result obtained by projecting the lens of the line sensor camera 82 through the light path of the field of view 85 toward the light source 81 and the irradiation surface 81a to a surface perpendicular to the conveyance direction of the glass plate is shown in FIG. 17. In this case, the projection result of the irradiation surface 81a becomes a surface. As such, when a light path corresponding to a certain pixel exists in the dark portion in the irradiation surface 81a, it is impossible to uniquely determine where to image the dark portion. For example, among the light path 91 shown in FIG. 17, a light path from a plurality of fields of view 85 to a line of the dark portion 81 b of the light source 81 may be selected. Therefore, the light path from the reflection point on the glass plate 71 in the light path 91 to the dark portion 81 b cannot be uniquely determined from the photographed image. Therefore, in the arrangement shown in FIG. 15, the irradiation surface 81 a of the light source 81 must be parallel to the glass plate 71. Note that in FIG. 17, only one dark portion 81 b is illustrated, but a plurality of dark portions 81 b are present on the irradiation surface 81 a.
於圖15所示之配置態樣中，玻璃板之正面側之面之反射光與背面側之面之反射光分離之方向與光源上之條紋圖案之暗部之朝向相同。因此，圖15所示之配置態樣係不產生圖9所示之距離P之分離現象 之配置態樣。圖18係表示於不設置水層之情形時，在圖15所示之配置態樣中，投射自線感測器照相機82之透鏡朝向視場85之光線路徑及光源81之照射面81a所得之結果的示意圖。於不設置水層之情形時，如圖18中虛線所示，亦產生玻璃板71之背面側之面上之反射。而且，於線感測器照相機之視場之中央部，於玻璃板71之正面側之面反射之光線路徑與於背面側之面反射之光線路徑幾乎重疊，故而，不依存於分離距離D地產生因正面側之面上之反射而產生之紋路與因背面側之面上之反射而產生之紋路重疊。其結果，測定精度降低。於即便設置水層，亦無法完全消除因背面側之面上之反射而產生之紋路的情況下，將產生同樣之問題，從而測定精度降低。 In the configuration shown in FIG. 15, the direction in which the reflected light on the front side of the glass plate is separated from the reflected light on the back side is the same as the direction of the dark portion of the stripe pattern on the light source. Therefore, the configuration shown in FIG. 15 does not cause the separation phenomenon of the distance P shown in FIG. 9. Configuration mode. FIG. 18 shows the light path projected from the lens of the line sensor camera 82 toward the field of view 85 and the irradiation surface 81a of the light source 81 in the configuration shown in FIG. 15 when no water layer is provided. Schematic representation of the results. When a water layer is not provided, as shown by a dotted line in FIG. 18, reflection on the surface of the back surface side of the glass plate 71 also occurs. Furthermore, at the center of the field of view of the line sensor camera, the light path reflected on the front side of the glass plate 71 and the light path reflected on the back side almost overlap, so it does not depend on the separation distance D. The texture caused by the reflection on the surface on the front side is overlapped with the texture caused by the reflection on the surface on the back side. As a result, measurement accuracy is reduced. In the case where the ripple caused by the reflection on the rear surface cannot be completely eliminated even if the water layer is provided, the same problem occurs, and the measurement accuracy is lowered.
[專利文獻1]日本專利特開2012-21781號公報(段落0033，0034) [Patent Document 1] Japanese Patent Laid-Open No. 2012-21781 (paragraphs 0033, 0034)
[專利文獻2]日本專利特開2009-128098號公報(圖1) [Patent Document 2] Japanese Patent Laid-Open No. 2009-128098 (Figure 1)
於將寬度較寬之玻璃板作為檢查對象之情形時，在保持檢查精度之狀態下僅利用一台線感測器照相機將無法拍攝玻璃板之寬度整體。因此，於將寬度較寬之玻璃板作為檢查對象之情形時，只要配置複數個光源及線感測器照相機之組合即可。但，如圖10所示，於線感測器照相機之光線路徑中心所在之平面垂直於玻璃板且亦垂直於玻璃板之搬送方向之情形時，為了避免在光源及線感測器照相機之組彼此中產生干涉，而必須在光源及線感測器照相機之每組中使線感測器照相機之視場沿著搬送方向錯開。於圖19中表示使線感測器照相機之視場沿著搬送方向錯開之情形之例。圖19係表示自上方觀察玻璃板71所得之狀態。又，圖19所示之箭頭係表示玻璃板71之搬送方向。而且， 於光源及線感測器照相機之各組中，省略了線感測器照相機之圖示，而表示光源81及線感測器照相機之視場85。於圖19所示之例中，將光源81及線感測器照相機(省略圖示)之組設置6組，且以6個部位之視場85為對象進行攝像，藉此，獲得用以檢查玻璃板71之橫寬整體之圖像。 In the case where a wider glass plate is used as an inspection object, the entire width of the glass plate cannot be photographed with only one line sensor camera while maintaining the inspection accuracy. Therefore, when a wide glass plate is used as an inspection object, a combination of a plurality of light sources and a line sensor camera may be provided. However, as shown in FIG. 10, in the case where the plane where the light path center of the line sensor camera is located is perpendicular to the glass plate and also perpendicular to the glass plate's conveying direction, in order to avoid the light source and the line sensor camera group Interference occurs with each other, and the field of view of the line sensor camera must be staggered along the conveyance direction in each group of the light source and the line sensor camera. FIG. 19 shows an example of a case where the field of view of the line sensor camera is shifted along the conveyance direction. FIG. 19 shows a state where the glass plate 71 is viewed from above. The arrows shown in FIG. 19 indicate the conveyance direction of the glass plate 71. and, In each group of the light source and the line sensor camera, the illustration of the line sensor camera is omitted, and the field of view 85 of the light source 81 and the line sensor camera is shown. In the example shown in FIG. 19, six sets of the light source 81 and the line sensor camera (not shown) are set, and the field of view 85 of the six parts is taken as an object to obtain an image for inspection. An image of the entire width and width of the glass plate 71.
然而，若在光源81及線感測器照相機之每組中，將線感測器照相機之視場85沿著搬送方向錯開，則必須配置複數個用以將水層設置於玻璃板之背面側之機構。例如，於圖19所示之例中，必須將用以設置水層之機構(省略圖示)配置於圖19所示之A、B、C之3個部位。其結果，導致檢查裝置之製造成本增加。 However, if the field of view 85 of the line sensor camera is shifted along the conveying direction in each group of the light source 81 and the line sensor camera, it is necessary to arrange a plurality of water layers on the back side of the glass plate. Institution. For example, in the example shown in FIG. 19, it is necessary to arrange a mechanism (not shown) for providing a water layer in three parts A, B, and C shown in FIG. As a result, the manufacturing cost of the inspection device increases.
另一方面，如圖15所示，於線感測器照相機之光線路徑中心所在之平面垂直於玻璃板且平行於玻璃板之搬送方向之情形時，可以圖20所例示之方式，實現於光源81及線感測器照相機82之組彼此不產生干涉之配置。然而，於此情形時，當無法完全消除因背面側之面上之反射而產生之紋路時，測定精度亦變得容易降低。再者，圖20係俯視圖，且圖20所示之箭頭表示玻璃板71之搬送方向。 On the other hand, as shown in FIG. 15, in the case where the plane where the light path center of the line sensor camera is located is perpendicular to the glass plate and parallel to the glass plate conveying direction, the light source can be implemented in the manner illustrated in FIG. 20. The set of 81 and the line sensor camera 82 do not interfere with each other. However, in this case, when the ripples caused by the reflection on the rear surface cannot be completely eliminated, the measurement accuracy also tends to decrease. 20 is a plan view, and an arrow shown in FIG. 20 indicates a conveyance direction of the glass plate 71.
以上所述之問題不僅產生於玻璃板之檢查中，亦產生於玻璃板以外之透明板狀體之檢查中。 The problems described above arise not only in the inspection of glass plates, but also in the inspection of transparent plate-like bodies other than glass plates.
對此，本發明之目的在於提供一種透明板狀體表面檢查用攝像系統，該透明板狀體表面檢查用攝像系統係於線感測器照相機之光線路徑中心所在之平面垂直於透明板狀體且使該平面既不平行亦不垂直於透明板狀體之搬送方向之情形時，可一面利用正面側之面之反射光之路徑與背面側之面之反射光之路徑依存於板厚而分離之現象，一面抑制用以將水層設置於透明板狀體之背面側之機構之數量之增加。 In view of this, an object of the present invention is to provide a camera system for inspecting the surface of a transparent plate-like body. The camera system for inspecting the surface of a transparent plate-like body is located on a plane where the center of the light path of the line sensor camera is perpendicular to the transparent plate-like body. When the plane is neither parallel nor perpendicular to the conveying direction of the transparent plate-like body, the path of the reflected light on the front side and the path of the reflected light on the back side can be separated depending on the thickness of the plate. This phenomenon suppresses an increase in the number of mechanisms for providing a water layer on the back side of the transparent plate-like body.
本發明之透明板狀體表面檢查用攝像系統之特徵在於包含：線 感測器照相機，其係自傾斜方向拍攝所搬送之透明板狀體，且以視場與透明板狀體之搬送方向正交之方式配置；及光源，其係基於透明板狀體未產生歪曲之條件下，配置在自線感測器照相機朝向該線感測器照相機之視場之光線路徑於透明板狀體經反射之延長方向上，且照射條紋圖案；光源之條紋圖案之照射面之朝向係以沿著透明板狀體之行進方向投射該照射面之結果成為線段之方式決定，且於照射面中成為條紋圖案之暗部之線與透明板狀體之搬送方向平行。 The camera system for surface inspection of a transparent plate-shaped body according to the present invention is characterized by including: A sensor camera is a transparent plate-like body that is photographed and conveyed from an oblique direction, and is arranged such that the field of view is orthogonal to the direction of the transparent plate-like body; and the light source is based on the transparent plate-like body without distortion. Under the condition, the light path arranged from the line sensor camera toward the line of sight of the line sensor camera is in the extended direction of the reflection of the transparent plate-shaped body and irradiates the stripe pattern; The direction is determined so that the irradiation surface is projected along the traveling direction of the transparent plate-like body into line segments, and the line that becomes the dark part of the stripe pattern on the irradiation surface is parallel to the transport direction of the transparent plate-like body.
較佳為，在基於透明板狀體中未產生歪曲之條件下，假定包含與線感測器照相機之光軸一致之光線路徑、及對應於該光線路徑之透明板狀體上之反射點以後至光源為止之光線路徑的平面之情形時，滿足該平面既不平行亦不垂直於透明板狀體之搬送方向之條件。 Preferably, based on the condition that no distortion occurs in the transparent plate-like body, it is assumed that a light path corresponding to the optical axis of the line sensor camera and a reflection point on the transparent plate-shaped body corresponding to the light path are included. In the case of the plane of the light path up to the light source, the condition that the plane is neither parallel nor perpendicular to the transport direction of the transparent plate-like body is satisfied.
又，本發明之透明板狀體表面檢查用攝像系統之特徵在於包含：線感測器照相機，其係拍攝所搬送之透明板狀體，且以視場與透明板狀體之搬送方向正交之方式配置；及光源，其具有矩形之照射面，且自該照射面照射條紋圖案；且，假定包含自線感測器照相機延伸之光線路徑之起點、線掃描之視場、及沿著照射面之長度方向之照射面之中心軸的平面與搬送方向正交之狀態，且以自該假定之狀態成為使線感測器照相機及光源以視場為中心軸互為反向地旋轉了之狀態之方式，配置線感測器照相機及光源，光源之條紋圖案之照射面之朝向係以沿著透明板狀體之行進方向投射該照射面之結果成為線段之方式決定，並且照射面中成為條紋圖案之暗部之線與透明板狀體之搬送方向平行。 In addition, the imaging system for a surface inspection of a transparent plate-shaped object according to the present invention includes a line sensor camera, which photographs the transparent plate-shaped object to be transported, and has a field of view orthogonal to the direction in which the transparent plate-shaped object is transported. And a light source having a rectangular irradiation surface and irradiating a stripe pattern from the irradiation surface; and, it is assumed that the starting point of the light path extending from the line sensor camera, the field of view of the line scan, and the irradiation The plane of the central axis of the irradiated surface in the length direction of the plane is orthogonal to the conveying direction, and the line sensor camera and the light source are rotated in the opposite directions with the field of view as the center axis from the assumed state. The method of the state is to arrange a line sensor camera and a light source, and the direction of the irradiation surface of the stripe pattern of the light source is determined in such a way that the irradiation surface is projected along the direction of travel of the transparent plate body into a line segment, and the irradiation surface becomes The line of the dark part of the stripe pattern is parallel to the conveying direction of the transparent plate-like body.
亦可為構成為具有複數個上述線感測器照相機與上述光源之組，且上述線感測器照相機與上述光源之各組以各線感測器照相機之視場於直線上排列之方式配置。 It may be configured as a group having a plurality of the line sensor cameras and the light sources, and each group of the line sensor cameras and the light sources may be arranged such that the field of view of the line sensor cameras is aligned in a straight line.
亦可為具有消除透明板狀體之背面反射之背面反射消除構件之 構成。 It may also be a back reflection eliminating member having a back reflection eliminating the transparent plate-like body. Make up.
根據本發明，於線感測器照相機之光線路徑中心所在之平面垂直於透明板狀體。且使該平面既不平行亦不垂直於透明板狀體之搬送方向之情形時，可一面利用正面側之面之反射光之路徑與背面側之面之反射光之路徑依存於板厚而分離之現象，一面抑制用以將水層設置於透明板狀體之背面側之機構之數量之增加。 According to the present invention, the plane at the center of the light path of the line sensor camera is perpendicular to the transparent plate-like body. When the plane is neither parallel nor perpendicular to the conveying direction of the transparent plate-like body, the path of the reflected light on the front side and the path of the reflected light on the back side can be separated depending on the thickness of the plate. This phenomenon suppresses an increase in the number of mechanisms for providing a water layer on the back side of the transparent plate-like body.
1、81‧‧‧光源 1.81‧‧‧light source
1a、81a‧‧‧照射面 1a, 81a‧‧‧irradiated surface
1b、81b‧‧‧暗部 1b, 81b‧‧‧ Dark
2、82‧‧‧線感測器照相機 2,82‧‧‧line sensor camera
5、85‧‧‧視場 5, 85‧‧‧ field of view
7‧‧‧光線路徑 7‧‧‧ray path
71‧‧‧玻璃板 71‧‧‧ glass plate
72‧‧‧支持部 72‧‧‧ Support Department
73‧‧‧水層 73‧‧‧ water layer
91‧‧‧光線路徑 91‧‧‧ray path
D‧‧‧分離距離 D‧‧‧ separation distance
P‧‧‧距離 P‧‧‧distance
圖1係表示本發明之透明板狀體表面檢查用攝像系統之例之立體圖。 FIG. 1 is a perspective view showing an example of a camera system for inspecting the surface of a transparent plate-like body according to the present invention.
圖2係示意性表示自線感測器照相機2之透鏡經由視場5朝向光源1之光線路徑及光源1之照射面的立體圖。 FIG. 2 is a perspective view schematically showing a light path of the lens of the line sensor camera 2 toward the light source 1 through the field of view 5 and an irradiation surface of the light source 1.
圖3係表示將圖2所示之自線感測器照相機2經由視場5朝向光源1之光線路徑及光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。 FIG. 3 is a schematic diagram showing the results obtained by projecting the line-of-sight sensor camera 2 shown in FIG. 2 toward the light path of the light source 1 and the irradiation surface 1a of the light source 1 through the field of view 5 to a plane perpendicular to the conveyance direction of the glass plate .
圖4係表示以光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得之結果成為面之方式，決定光源1之姿勢的情形時之投射結果之示意圖。 FIG. 4 is a schematic diagram showing a projection result when the posture of the light source 1 is determined in a manner that the result obtained by projecting the irradiation surface 1a of the light source 1 onto a plane perpendicular to the conveyance direction of the glass plate is a surface.
圖5係表示將成為條紋圖案之暗部之線投射至與玻璃板之搬送方向垂直之面所得之結果的示意圖。 FIG. 5 is a schematic diagram showing a result obtained by projecting a line that becomes a dark portion of a stripe pattern onto a surface perpendicular to a conveyance direction of a glass plate.
圖6係表示本發明中之條紋圖案之例之說明圖。 Fig. 6 is an explanatory diagram showing an example of a stripe pattern in the present invention.
圖7係表示假定暗部平行於照射面1a之短邊之情形時之投射結果的示意圖。 FIG. 7 is a schematic diagram showing a projection result when a dark portion is assumed to be parallel to the short side of the irradiation surface 1a.
圖8係表示配置有複數個光源1及線感測器照相機2之組之狀況之說明圖。 FIG. 8 is an explanatory diagram showing a state of a group in which a plurality of light sources 1 and a line sensor camera 2 are arranged.
圖9係表示光源與線感測器照相機之間之一般性之光之路徑的說 明圖。 FIG. 9 is a view showing a general light path between a light source and a line sensor camera Mingtu.
圖10係表示光源與線感測器照相機之配置態樣之一例之立體圖。 FIG. 10 is a perspective view showing an example of a configuration of a light source and a line sensor camera.
圖11係表示藉由攝像而獲得之圖像之例之示意圖。 FIG. 11 is a schematic diagram showing an example of an image obtained by imaging.
圖12係表示產生有不明確為2條紋路或1條紋路之部位之圖像之例的示意圖。 FIG. 12 is a schematic diagram showing an example of generating an image of a portion that is not clearly defined as a 2-striped path or a 1-striped path.
圖13係表示在玻璃板之背面側配置有水層之情形時之光源與線感測器照相機之間之光之路徑的說明圖。 FIG. 13 is an explanatory diagram showing a path of light between a light source and a line sensor camera when a water layer is arranged on the back side of a glass plate.
圖14係表示將圖10所示之自線感測器照相機82之透鏡經由視場85到達光源81之光線路徑及光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。 FIG. 14 shows the results obtained by projecting the light path of the lens sensor camera 82 shown in FIG. 10 through the field of view 85 to the light source 81 and the irradiation surface 81a of the light source 81 onto a plane perpendicular to the conveyance direction of the glass plate. The schematic.
圖15係表示光源與線感測器照相機之配置態樣之另一例之立體圖。 FIG. 15 is a perspective view showing another example of the arrangement of the light source and the line sensor camera.
圖16係表示將圖15所示之自線感測器照相機82之透鏡經由視場85朝向光源81之光線路徑及光源81之照射面81a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。 FIG. 16 shows the results obtained by projecting the lens of the auto-sensor camera 82 shown in FIG. 15 toward the light path of the light source 81 and the irradiation surface 81 a of the light source 81 through the field of view 85 to a plane perpendicular to the conveyance direction of the glass plate. The schematic.
圖17係表示假定使照射面81a傾斜於玻璃板71之搬送方向側之情形時之投射結果的示意圖。 FIG. 17 is a schematic diagram showing a projection result when the irradiation surface 81 a is inclined to the conveyance direction side of the glass plate 71.
圖18係表示於不設置水層之情形時，在圖15所示之配置態樣中投射自線感測器照相機82之透鏡朝向視場85之光線路徑及光源81之照射面81a所得之結果的示意圖。 FIG. 18 shows the results obtained by projecting the light path of the lens of the line sensor camera 82 toward the field of view 85 and the irradiation surface 81a of the light source 81 in the configuration shown in FIG. 15 when no water layer is provided. Schematic.
圖19係表示使線感測器照相機之視場沿著搬送方向錯開地配置圖10所示之光源及線感測器照相機之情形時之配置例的說明圖。 FIG. 19 is an explanatory diagram showing an example of an arrangement when the light source and the line sensor camera shown in FIG. 10 are arranged with the field of view of the line sensor camera staggered along the conveying direction.
圖20係表示在圖15所示之光源及線感測器照相機之組中彼此不產生干涉之配置例的俯視圖。 FIG. 20 is a plan view showing an example of an arrangement in which the light source and the line sensor camera shown in FIG. 15 do not interfere with each other.
以下，參照圖式，對本發明之實施形態進行說明。於以下之說明中，以檢查對象之透明板狀體為玻璃板之情形為例進行說明，但本發明亦可應用於玻璃板以外之透明板狀體之檢查。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the case where the transparent plate-shaped object to be inspected is a glass plate is taken as an example for description, but the present invention can also be applied to the inspection of transparent plate-shaped objects other than glass plates.
圖1係表示本發明之透明板狀體表面檢查用攝像系統之例之立體圖。本發明之透明板狀體表面檢查用攝像系統係包含光源1及線感測器照相機2。光源1係對成為歪曲之檢查對象之玻璃板71照射條紋圖案，線感測器照相機2係藉由對位於沿著於玻璃板71之表面上反射之光線路徑之延長上之光源1中的條紋圖案之圖像進行攝像而產生圖像。 FIG. 1 is a perspective view showing an example of a camera system for inspecting the surface of a transparent plate-like body according to the present invention. The imaging system for surface inspection of a transparent plate-shaped body according to the present invention includes a light source 1 and a line sensor camera 2. The light source 1 irradiates a stripe pattern on the glass plate 71 which is a subject of the distorted inspection, and the line sensor camera 2 is a streak in the light source 1 which is located on an extension of a light path reflected along the surface of the glass plate 71 The image of the pattern is captured to produce an image.
玻璃板71係一面由玻璃板之支持部(於圖1中省略圖示)支持，一面被搬送。圖1所示之箭頭係表示玻璃板71之搬送方向。又，於線感測器照相機2之屬於視場5之部位之背面側之面設置有水層(於圖1中省略圖示)。再者，於以下之各圖式中，亦省略玻璃板之支持部及水層之圖示。 The glass plate 71 is transported while being supported by a supporting portion (not shown in FIG. 1) of the glass plate. The arrows shown in FIG. 1 indicate the conveyance direction of the glass plate 71. A water layer is provided on the surface of the back side of the line sensor camera 2 that belongs to the field of view 5 (not shown in FIG. 1). In addition, in each of the drawings below, illustrations of the supporting portion of the glass plate and the water layer are also omitted.
線感測器照相機2係與圖10所示之線感測器照相機82相同，經由視場5連續地拍攝光源1。因此，可將玻璃板71作為面進行檢查。 The line sensor camera 2 is the same as the line sensor camera 82 shown in FIG. 10, and continuously captures the light source 1 through the field of view 5. Therefore, the glass plate 71 can be inspected as a surface.
但，於圖10所示之配置態樣中，線感測器照相機82之光線路徑中心所在之平面係以垂直於玻璃板71且亦垂直於玻璃板71之搬送方向之方式設置，線感測器照相機82經由玻璃板71拍攝光源81。與此相對，於本發明之透明板狀體表面檢查用攝像系統中，以於線感測器照相機2(參照圖1)之光線路徑中心所在之平面垂直於玻璃板71且既不垂直亦不平行於玻璃板71之搬送方向之狀態下，線感測器照相機2經由玻璃板71拍攝光源1之方式，配置線感測器照相機2。再者，規定線感測器照相機2之光線路徑中心(使與線感測器照相機2之光軸一致之光線路徑與對應於該光線路徑之玻璃板上之反射點以後之光線路徑合併而成之光線路徑)所在之平面時之玻璃板係設為滿足未產生歪曲之條 件(換言之，平坦之條件)者。但，線感測器照相機2考慮到與搬送機構之干涉而配置於玻璃板71之上方。又，線感測器照相機2係以線感測器照相機2之視場5與玻璃板71之搬送方向正交之方式配置。又，圖1係例示線感測器照相機2相較視場5配置於搬送方向之下游側之情形，但線感測器照相機2亦可相較視場5配置於上游側。 However, in the configuration shown in FIG. 10, the plane on which the center of the light path of the line sensor camera 82 is located is perpendicular to the glass plate 71 and also perpendicular to the conveying direction of the glass plate 71. The line sensing The camera 82 captures the light source 81 via the glass plate 71. In contrast, in the imaging system for inspecting the surface of a transparent plate-like body of the present invention, the plane where the center of the light path of the line sensor camera 2 (see FIG. 1) is perpendicular to the glass plate 71 is neither vertical nor In a state parallel to the conveying direction of the glass plate 71, the line sensor camera 2 is arranged in such a manner that the light source 1 is captured by the glass plate 71. Furthermore, the center of the light path of the line sensor camera 2 is defined (the light path that coincides with the optical axis of the line sensor camera 2 and the light path after the reflection point on the glass plate corresponding to the light path are merged (The light path) of the glass plate is set to meet the condition of no distortion (In other words, flat conditions). However, the line sensor camera 2 is disposed above the glass plate 71 in consideration of interference with the conveyance mechanism. The line sensor camera 2 is disposed so that the field of view 5 of the line sensor camera 2 and the conveyance direction of the glass plate 71 are orthogonal to each other. 1 illustrates the case where the line sensor camera 2 is disposed on the downstream side of the field of view 5 in the conveying direction, but the line sensor camera 2 may be disposed on the upstream side of the field of view 5.
對線感測器照相機2之姿勢更具體地進行說明。如下所述，光源1具有細長之矩形之照射面，且自該照射面照射條紋圖案。假定為如下狀態：以與圖10所示之情形同樣地，線感測器照相機2之光線路徑中心所在之平面垂直於玻璃板71，且亦垂直於玻璃板之搬送方向之方式，配置線感測器照相機2。於此狀態下，視場5與玻璃板71之搬送方向正交。又，於該假定之狀態下，包含自線感測器照相機2延伸之光線路徑之起點、線感測器照相機2之視場5、及沿著光源1之照射面之長度方向之該照射面之中心軸的平面與玻璃板71之搬送方向正交。將線感測器照相機2配置於使線感測器照相機2自該狀態以視場5為中心軸旋轉所得之位置。此時之線感測器照相機2之姿勢屬於圖1所示之線感測器照相機2之姿勢。再者，使線感測器照相機2自上述假定之狀態以視場5為中心軸旋轉時之旋轉量，若考慮到與搬送機構之干涉而滿足線感測器照相機2位在較玻璃板71之正面側之面更上方之條件，則無特別限定。 The posture of the line sensor camera 2 will be described more specifically. As described below, the light source 1 has an elongated rectangular irradiation surface, and a stripe pattern is irradiated from the irradiation surface. Assume a state in which, as in the case shown in FIG. 10, the plane where the center of the light path of the line sensor camera 2 is perpendicular to the glass plate 71 and also perpendicular to the conveyance direction of the glass plate is arranged with the line sense测 器 Camera 2. In this state, the field of view 5 is orthogonal to the conveyance direction of the glass plate 71. In this assumed state, the starting point of the light path extending from the line sensor camera 2, the field of view 5 of the line sensor camera 2, and the irradiation surface along the length of the irradiation surface of the light source 1 are included. The plane of the central axis is orthogonal to the conveyance direction of the glass plate 71. The line sensor camera 2 is disposed at a position obtained by rotating the line sensor camera 2 from this state with the field of view 5 as a central axis. The posture of the line sensor camera 2 at this time belongs to the posture of the line sensor camera 2 shown in FIG. 1. In addition, the rotation amount when the line sensor camera 2 is rotated with the field of view 5 as the center axis from the assumed state described above, if the interference with the conveying mechanism is taken into consideration, the line sensor camera 2 is positioned on the glass plate 71. The condition that the surface on the front side is higher is not particularly limited.
由於以此方式決定線感測器照相機2之姿勢，故而線感測器照相機2之光線路徑中心所在之平面成為相對於玻璃板71垂直、且既不平行亦不垂直於玻璃板71之搬送方向之狀態。 Since the posture of the line sensor camera 2 is determined in this way, the plane where the light path center of the line sensor camera 2 is located is perpendicular to the glass plate 71 and is neither parallel nor perpendicular to the glass plate 71's conveying direction. Of the state.
又，圖1所示之線感測器照相機2之姿勢下之視場5與上述經假定之狀態下之視場5相同。 The field of view 5 in the posture of the line sensor camera 2 shown in FIG. 1 is the same as the field of view 5 in the assumed state described above.
以此方式，可將視場5固定而決定線感測器照相機2之姿勢。又，自線感測器照相機2之各像素通過透鏡朝向視場5之光線路徑係固 定而不因玻璃板71之歪曲之產生狀況產生變化。但，視場5至光源1之光線路徑因玻璃板71之歪曲之產生狀況而變化。 In this manner, the field of view 5 can be fixed to determine the posture of the line sensor camera 2. In addition, each pixel of the line sensor camera 2 is fixed by a light path of the lens toward the field of view 5. It is not necessary to change the condition caused by the distortion of the glass plate 71. However, the light path from the field of view 5 to the light source 1 changes due to the occurrence of distortion of the glass plate 71.
光源1具有細長之矩形之照射面，且自該照射面照射條紋圖案。圖1所示之例中，於光源1中，朝向玻璃板71側之面為照射面。於光源1之照射面以固定間隔平行地設置有暗部。關於本發明中之光源1之照射面之條紋圖案隨後進行說明。 The light source 1 has an elongated rectangular irradiation surface, and a stripe pattern is irradiated from the irradiation surface. In the example shown in FIG. 1, in the light source 1, a surface facing the glass plate 71 side is an irradiation surface. Dark portions are provided on the irradiation surface of the light source 1 in parallel at regular intervals. The stripe pattern of the irradiation surface of the light source 1 in the present invention will be described later.
光源1係基於玻璃板71中未產生歪曲之條件(換言之，玻璃板71為平坦之條件)下，配置於自線感測器照相機2之透鏡朝向視場5之光線路徑相當於在玻璃板71之正面側之面反射時之光線路徑上之位置。 The light source 1 is based on the condition that no distortion occurs in the glass plate 71 (in other words, the condition that the glass plate 71 is flat), and the light path of the lens disposed in the line sensor camera 2 toward the field of view 5 is equivalent to the glass plate 71 The position on the light path when the front-side surface reflects.
對光源1之位置更具體地進行說明。假定為如下狀態：與圖10所示之情形同樣地，以線感測器照相機2之光線路徑中心所在之平面垂直於玻璃板71且亦垂直於玻璃板之搬送方向之方式，配置有線感測器照相機2。此時之視場5係與圖1所示之視場5相同。如上所述，於該假定之狀態下，包含自線感測器照相機2延伸之光線路徑之起點、線感測器照相機2之視場5、及沿著光源1之照射面之長度方向之該照射面之中心軸的平面與玻璃板71之搬送方向正交。自該狀態使光源1以視場5為中心軸旋轉。而且，將光源1配置於圖1所示之自線感測器照相機2之各像素通過透鏡朝向視場5之光線路徑於玻璃板71之正面側之面反射時之光線路徑上。如上所述，亦將線感測器照相機2配置於自上述之假定狀態以視場5為中心軸使其旋轉後之位置。即，線感測器照相機2及光源1係兩者均配置於自上述假定之狀態以視場5為中心軸旋轉後之位置。但，自上述假定之狀態以視場5為中心軸旋轉之方向，線感測器照相機2及光源1互為反向。而且，較佳為，自上述假定之狀態起線感測器照相機2之旋轉量與光源1之旋轉量相等。 The position of the light source 1 will be described more specifically. Assume a state in which, as in the case shown in FIG. 10, the wire sensing is arranged such that the plane where the center of the light path of the line sensor camera 2 is perpendicular to the glass plate 71 and also perpendicular to the conveying direction of the glass plate. Device camera 2. The field of view 5 at this time is the same as the field of view 5 shown in FIG. 1. As described above, in this assumed state, the starting point of the light path extending from the line sensor camera 2, the field of view 5 of the line sensor camera 2, and the length along the length direction of the irradiation surface of the light source 1 are included. The plane of the central axis of the irradiation surface is orthogonal to the conveyance direction of the glass plate 71. From this state, the light source 1 is rotated around the field of view 5 as the central axis. Further, the light source 1 is arranged on a light path when each pixel of the self-sensor camera 2 shown in FIG. 1 is reflected by a light path of the lens toward the field of view 5 on the front surface side of the glass plate 71. As described above, the line sensor camera 2 is also disposed at a position where the field of view 5 is the center axis of the line sensor camera 2 from the above-mentioned assumed state. That is, both the line sensor camera 2 and the light source 1 are arranged at positions after the field of view 5 is rotated as the center axis from the assumed state. However, from the above assumed state, the line sensor camera 2 and the light source 1 are reversed from each other in the direction in which the field of view 5 is the center axis. Moreover, it is preferable that the rotation amount of the line sensor camera 2 and the rotation amount of the light source 1 be equal to each other from the assumed state.
而且，於此種光源1之配置位置中，以將光源1之照射面投射至與玻璃板之搬送方向垂直之面之結果成為線段之方式，決定光源1之 照射面之朝向。其結果，光源1之姿勢確定。於圖1中，表示該光源1之姿勢。 In addition, in the arrangement position of such a light source 1, a line segment is determined so that the irradiation surface of the light source 1 is projected onto a surface perpendicular to the conveyance direction of the glass plate, and the light source 1 is determined. The direction of the illuminated surface. As a result, the posture of the light source 1 is determined. The posture of the light source 1 is shown in FIG. 1.
參照圖2及圖3，對光源1之照射面之朝向進行說明。圖2係示意性表示自線感測器照相機2之透鏡經由視場5朝向光源1之光線路徑及光源1之照射面1a的立體圖。於圖2中，對於光源1僅圖示照射面1a，而省略了光源1之外觀之圖示。又，對於線感測器照相機2，亦省略了線感測器照相機2之外觀之圖示。圖2所示之箭頭係與圖1同樣地表示玻璃板71之搬送方向。 The orientation of the irradiation surface of the light source 1 will be described with reference to FIGS. 2 and 3. FIG. 2 is a perspective view schematically showing a light path of the lens of the line sensor camera 2 toward the light source 1 through the field of view 5 and the irradiation surface 1 a of the light source 1. In FIG. 2, only the irradiation surface 1 a is shown for the light source 1, and the appearance of the light source 1 is omitted. For the line sensor camera 2, the appearance of the line sensor camera 2 is also omitted. The arrow shown in FIG. 2 shows the conveyance direction of the glass plate 71 similarly to FIG.
圖3係表示將圖2所示之自攝影機2經由視場5朝向光源1之光線路徑及光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得的結果之示意圖。圖2所示之照射面1a係若投射至與玻璃板之搬送方向垂直之面則成為圖3所示之線段。圖1所示之光源1之姿勢滿足該條件。 FIG. 3 is a schematic diagram showing the results obtained by projecting the light path from the camera 2 to the light source 1 through the field of view 5 and the irradiation surface 1 a of the light source 1 shown in FIG. 2 to a surface perpendicular to the conveyance direction of the glass plate. The irradiation surface 1a shown in FIG. 2 becomes a line segment shown in FIG. 3 when it is projected on a surface perpendicular to the conveyance direction of the glass plate. The posture of the light source 1 shown in FIG. 1 satisfies this condition.
再者，於本實施形態中，將沿著玻璃板之搬送方向之軸自下游側投射至上游側所得之結果作為投射結果圖示地進行說明，但亦可使用沿著玻璃板之搬送方向之軸自上游側投射至下游側所得之結果。任一情形均可說明本發明之構成。 In addition, in this embodiment, the result obtained by projecting from the downstream side to the upstream side along the axis along the conveyance direction of the glass plate is illustrated graphically as a projection result, but it may also be used along the conveyance direction of the glass plate. The result obtained by projecting the shaft from the upstream side to the downstream side. In either case, the constitution of the present invention can be explained.
如上所述，自線感測器照相機2之各像素通過透鏡朝向視場5之光線路徑係固定而不因玻璃板71之歪曲之產生狀況產生變化。對應於某一像素之光線路徑中之視場5至光源1之光線路徑係反映於照射面1a之攝像狀態中。即，若對應於某一像素之視場5至光源1之光線路徑於照射面1a中為暗部，則該像素之輸出顯示黑色。又，若該光線路徑於照射面1a中為明部，則該像素之輸出顯示白色。因此，只要於玻璃板71中不存在歪曲，則視場5至光源1之光線路徑不變化，故而，圖像中出現之紋路成為等間隔。另一方面，於玻璃板71中存在歪曲之情形時，對應於某一像素之視場5至光源1之光線路徑自照射面1a之暗部變動為明部，或自明部變動為暗部，藉此，圖像中出現之紋路成為非等 間隔。 As described above, the light path of each pixel of the line sensor camera 2 through the lens toward the field of view 5 is fixed without changing due to the state of distortion of the glass plate 71. The light path from the field of view 5 to the light source 1 in the light path corresponding to a certain pixel is reflected in the imaging state of the irradiation surface 1a. That is, if the light path from the field of view 5 to the light source 1 corresponding to a certain pixel is a dark part in the irradiation surface 1a, the output of the pixel is displayed in black. In addition, if the light path is a bright part in the irradiation surface 1a, the output of the pixel is white. Therefore, as long as there is no distortion in the glass plate 71, the light path from the field of view 5 to the light source 1 does not change, so the lines appearing in the image are evenly spaced. On the other hand, when the glass plate 71 is distorted, the light path corresponding to a certain pixel from the field of view 5 to the light source 1 changes from a dark part of the irradiation surface 1a to a bright part, or changes from a bright part to a dark part, thereby , The lines appearing in the image become inequalities interval.
假如，設為以光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得之結果成為面之方式決定光源1之姿勢。圖4係表示該情形之投射結果之示意圖。於圖4中，雖僅圖示有1個暗部1b，但暗部1b設置有複數個。又，於圖4中，在成為照射面1a之投射結果之面內存在明部及暗部之兩者。因此，與圖17所示之情形同樣地產生如下情形，即，於對應於某一像素之光線路徑在照射面1a中存在於暗部1b時，無法唯一地確定對暗部1b之線上之何處進行攝像。例如，將選擇圖4所示之光線路徑7中複數個自視場5至光源1之暗部1b為止之光線路徑。因此，無法根據攝像圖像唯一地確定光線路徑7中之玻璃板71上之反射點以後至暗部為止之光線路徑。 It is assumed that the posture of the light source 1 is determined so that the result obtained by projecting the irradiation surface 1a of the light source 1 onto a surface perpendicular to the conveyance direction of the glass plate becomes a surface. FIG. 4 is a schematic diagram showing a projection result in this case. In FIG. 4, although only one dark portion 1 b is shown, a plurality of dark portions 1 b are provided. In addition, in FIG. 4, there are both a bright portion and a dark portion on the surface that is the projection result of the irradiation surface 1 a. Therefore, as in the case shown in FIG. 17, when a light path corresponding to a certain pixel exists in the dark portion 1 b on the irradiation surface 1 a, it is impossible to uniquely determine where to proceed on the line of the dark portion 1 b. Video. For example, a plurality of light paths from the field of view 5 to the dark portion 1 b of the light source 1 in the light path 7 shown in FIG. 4 will be selected. Therefore, the light path from the reflection point on the glass plate 71 in the light path 7 to the dark part cannot be uniquely determined based on the captured image.
因此，圖1所示之光源1必須滿足光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得之結果成為線段之條件。可藉由滿足該條件，而唯一地確定線感測器照相機2之各像素之狀態。 Therefore, the light source 1 shown in FIG. 1 must satisfy the condition that the result obtained by projecting the irradiation surface 1a of the light source 1 onto a surface perpendicular to the conveyance direction of the glass plate becomes a line segment. By satisfying this condition, the state of each pixel of the line sensor camera 2 can be uniquely determined.
其次，對設置於光源1之照射面1a(參照圖2)之條紋圖案進行說明。照射面1a係於以上述方式決定之光源1之姿勢中，以成為暗部之線與玻璃板71之搬送方向平行之方式設置。而且，成為暗部之線係等間隔地設置有複數個。成為暗部之各線彼此平行。於條紋圖案中，除暗部以外之部位為明部。 Next, a stripe pattern provided on the irradiation surface 1a (see FIG. 2) of the light source 1 will be described. The irradiation surface 1a is provided in the attitude | position of the light source 1 determined as mentioned above, and the line which becomes a dark part is parallel to the conveyance direction of the glass plate 71. Further, a plurality of lines forming the dark portion are provided at regular intervals. The lines that become the dark portions are parallel to each other. In the stripe pattern, portions other than the dark portions are the bright portions.
圖5係表示將成為條紋圖案之暗部之線投射至與玻璃板之搬送方向垂直之面所得之結果的示意圖。如圖5所示，於以成為暗部之線與玻璃板71之搬送方向平行之方式，將暗部設置於照射面1a之情形時，成為暗部1b之線若投射至與玻璃板之搬送方向垂直之面則成為點。將照射面1a之暗部1b投射至與玻璃板之搬送方向垂直之面，其結果，暗部1b以點等間隔地排列。 FIG. 5 is a schematic diagram showing a result obtained by projecting a line that becomes a dark portion of a stripe pattern onto a surface perpendicular to a conveyance direction of a glass plate. As shown in FIG. 5, when the dark portion is set on the irradiation surface 1a in such a way that the line that becomes the dark portion is parallel to the conveyance direction of the glass plate 71, if the line that becomes the dark portion 1b is projected to be perpendicular to the conveyance direction of the glass plate Faces become points. The dark portions 1b of the irradiation surface 1a are projected onto a surface perpendicular to the conveyance direction of the glass plate. As a result, the dark portions 1b are arranged at regular intervals of dots.
將自正面觀察以此方式決定之條紋圖案所得之狀態示於圖6。如 圖6所示，於本實施形態中，條紋圖案之暗部1b相對於照射面1a之短邊傾斜。 The state obtained by observing the striped pattern determined in this way from the front is shown in FIG. 6. Such as As shown in FIG. 6, in this embodiment, the dark portion 1b of the stripe pattern is inclined with respect to the short side of the irradiation surface 1a.
假如於照射面1a中，設為與圖10所示之情形同樣地，暗部平行於照射面1a之短邊。如此般，於基於玻璃板71中未產生歪曲之條件下，滿足將光源1配置於自線感測器照相機2朝向視場5之光線路徑屬於在玻璃板71之正面側之面經反射之延長方向上之位置，且將光源1之照射面1a投射至與玻璃板之搬送方向垂直之面所得之結果成為線段之條件的情形下，將成為條紋圖案之暗部之線投射至與玻璃板之搬送方向垂直之面所得之結果成為圖7所示。即，將暗部1b投射至與玻璃板之搬送方向垂直之面所得之結果如圖7所示地成為線段，且具有寬度。其結果，例如即便於玻璃板71之表面產生歪曲，亦無法唯一地確定像素對具有寬度之暗部之何處攝像，故而，產生圖像中出現之紋路成為等間隔之情形等，從而導致歪曲之檢查精度降低。 In the case of the irradiation surface 1a, it is assumed that the dark portion is parallel to the short side of the irradiation surface 1a as in the case shown in FIG. 10. In this way, under the condition that no distortion occurs in the glass plate 71, the light path that satisfies the configuration of the light source 1 at the line sensor camera 2 toward the field of view 5 is an extension of the reflection on the front side of the glass plate 71 In the case where the result obtained by projecting the irradiation surface 1a of the light source 1 onto a surface perpendicular to the conveyance direction of the glass plate becomes a condition of a line segment, a line that becomes a dark part of the stripe pattern is projected onto the conveyance with the glass plate. The result obtained by a plane perpendicular to the direction is shown in FIG. 7. That is, the result obtained by projecting the dark portion 1b on a surface perpendicular to the conveyance direction of the glass plate is a line segment as shown in FIG. 7 and has a width. As a result, for example, even if the surface of the glass plate 71 is distorted, it is impossible to uniquely determine where the pixel captures a dark portion having a width. Therefore, the appearance of the lines in the image becomes evenly spaced, and the distortion is caused. Inspection accuracy is reduced.
因此，於本發明中，並非平行於照射面1a之短邊地設置暗部，而以圖6中例示之方式設置暗部1b。嚴格而言，以於光源1之姿勢中，滿足成為暗部之線與玻璃板71之搬送方向平行之條件之方式設置暗部1b。 Therefore, in the present invention, the dark portion is not provided parallel to the short side of the irradiation surface 1a, but the dark portion 1b is provided in the manner illustrated in FIG. 6. Strictly speaking, in the posture of the light source 1, the dark portion 1b is provided so as to satisfy the condition that the line that becomes the dark portion is parallel to the conveyance direction of the glass plate 71.
將照射面1a之暗部1b投射至與玻璃板之搬送方向垂直之面，其結果，如上述之圖5所示，暗部1b作為點而等間隔地排列。因此，只要於玻璃板71中不存在歪曲，則圖像中出現之紋路成為等間隔。又，若產生歪曲，則圖像中出現之紋路產生偏差，從而可基於紋路彼此之間之間隔，評估玻璃板之歪曲。而且，於投射結果中，暗部1b係以點出現，故而於圖像中，1條紋路之寬度不會變得過寬，從而可高精度地評估玻璃板之歪曲。 The dark portions 1b of the irradiation surface 1a are projected onto a surface perpendicular to the conveyance direction of the glass plate. As a result, as shown in FIG. 5 described above, the dark portions 1b are arranged at equal intervals as dots. Therefore, as long as there is no distortion in the glass plate 71, the lines appearing in the image become equally spaced. In addition, if distortion occurs, deviations in the lines appearing in the image occur, so that the distortion of the glass plate can be evaluated based on the distance between the lines. Moreover, in the projection result, the dark portion 1b appears as a dot, so in the image, the width of the 1-strip path does not become too wide, so that the distortion of the glass plate can be evaluated with high accuracy.
又，於本發明中，線感測器照相機2之存在光線路徑中心之平面係垂直於玻璃板71且不平行於玻璃板71之搬送方向，故而，可利用圖 9所示之距離P之分離現象(正面側之面之反射光之路徑與背面側之面之反射光之路徑依存於板厚而分離之現象)。換言之，即便於無法藉由水層完全消除因背面側之面上之反射而產生之紋路之情形時，亦不會成為於玻璃板71之正面側之面所反射之光線路徑與於背面側之面所反射之光線路徑重疊之狀態(參照圖18)，從而可防止測定精度之降低。 In the present invention, the plane where the line sensor camera 2 exists in the center of the light path is perpendicular to the glass plate 71 and is not parallel to the conveying direction of the glass plate 71. Therefore, a drawing The separation phenomenon of the distance P shown in 9 (a phenomenon in which the path of the reflected light on the front side and the path of the reflected light on the back side are separated depending on the thickness of the board). In other words, even when the texture caused by the reflection on the back side surface cannot be completely eliminated by the water layer, it will not become a light path reflected on the front side surface of the glass plate 71 and a light path on the back side. In a state where the light paths reflected by the surfaces overlap (see FIG. 18), it is possible to prevent a reduction in measurement accuracy.
進而，於本發明之透明板狀體表面檢查用攝像系統中，線感測器照相機2之存在光線路徑中心之平面係垂直於玻璃板71且不垂直於玻璃板71之搬送方向。因此，於自正上方觀察之情形時，可以使光源1及線感測器照相機2不分別重疊於其他線感測器照相機及其他光源之延長線，從而不存在對線感測器照相機之視場之干涉之方式，配置複數個光源1及線感測器照相機2之組。因此，即便設置複數個光源1及線感測器照相機2之組，且以各組之線感測器照相機2之視場5成為直線狀之方式配置各組，於各組中亦不會產生干涉。 Furthermore, in the imaging system for inspecting the surface of a transparent plate-like body of the present invention, the plane where the light path center of the line sensor camera 2 exists is perpendicular to the glass plate 71 and is not perpendicular to the conveyance direction of the glass plate 71. Therefore, when viewed from directly above, the light source 1 and the line sensor camera 2 may not be overlapped with other line sensor cameras and other light source extension lines, respectively, so that there is no view of the line sensor camera. In the field interference method, a group of a plurality of light sources 1 and a line sensor camera 2 is arranged. Therefore, even if a plurality of groups of the light source 1 and the line sensor camera 2 are provided, and the groups are arranged such that the field of view 5 of the line sensor camera 2 of each group becomes linear, it will not occur in each group. put one's oar in.
圖8係表示以上述方式配置有複數個光源1及線感測器照相機2之組之狀況之說明圖。圖8係圖示自正上方觀察各光源及各線感測器照相機所得之狀況。於圖8中，圖示有4組光源1及線感測器照相機2之組合。又，各組之線感測器照相機2之視場5係直線狀排列。其結果，可高精度地檢查圖8所示之寬度較寬之玻璃板71之歪曲。而且，由於各組之線感測器照相機2之視場5係直線狀排列且未錯開，故而，只要於屬於視場5之部位設置1個用以將水層(省略圖示)設置於玻璃板71之背面側之面之機構即可。因此，於本發明中，即便線感測器照相機之存在光線路徑中心之平面垂直於玻璃板且使該平面不平行於玻璃板之搬送方向的情形，亦可抑制用以將水層設置於玻璃板之背面側之機構之數量之增加。 FIG. 8 is an explanatory diagram showing a state where a plurality of light sources 1 and a line sensor camera 2 are arranged in the above-mentioned manner. FIG. 8 is a diagram illustrating a state obtained by observing each light source and each line sensor camera from directly above. In FIG. 8, a combination of four groups of the light source 1 and the line sensor camera 2 is illustrated. The field of view 5 of the line sensor cameras 2 of each group is linearly arranged. As a result, the distortion of the wide glass plate 71 shown in FIG. 8 can be checked with high accuracy. In addition, since the field of view 5 of the line sensor cameras 2 of each group is linearly arranged and not staggered, as long as one portion is provided at a portion belonging to the field of view 5 to set a water layer (not shown) on the glass The mechanism of the surface on the back side of the plate 71 is sufficient. Therefore, in the present invention, even if the plane where the center of the light path of the line sensor camera exists is perpendicular to the glass plate and the plane is not parallel to the conveying direction of the glass plate, it is possible to suppress the arrangement of the water layer on the glass The number of mechanisms on the back side of the board has increased.
再者，由於可藉由水層而消除玻璃板71之背面側之面上之反射 (背面反射)，故而，亦可將用以將水層設置於玻璃板之背面側之機構稱為背面反射消除構件。 Furthermore, the reflection on the surface of the back surface side of the glass plate 71 can be eliminated by the water layer. (Back surface reflection). Therefore, a mechanism for providing a water layer on the back surface side of a glass plate may be referred to as a back surface reflection eliminating member.
再者，若上述實施形態中使用之攝影機係區域掃描攝影機(area sensor camera)而非線感測器照相機，則成為條紋圖案之暗部之線亦可不與玻璃搬送方向平行。 Furthermore, if the camera used in the above embodiment is an area sensor camera rather than a line sensor camera, the lines that become the dark portions of the stripe pattern may not be parallel to the glass conveying direction.
亦可使用區域掃描攝影機代替複數個線感測器照相機。於此情形時，成為條紋圖案之暗部之線必須與玻璃搬送方向平行。 Area scan cameras can also be used instead of multiple line sensor cameras. In this case, the line that becomes the dark part of the stripe pattern must be parallel to the glass transport direction.
參照特定實施態樣詳細地對本申請案進行了說明，但從業者應明白可於不脫離本發明之精神與範圍之情況下施加各種變更或修正。 The present application has been described in detail with reference to specific implementation aspects, but practitioners should understand that various changes or modifications can be applied without departing from the spirit and scope of the present invention.
本申請案係基於2013年2月19日申請之日本專利申請(日本專利特願2013-030061)者，且將其內容作為參照併入本文。 This application is based on a Japanese patent application filed on February 19, 2013 (Japanese Patent Application No. 2013-030061), the contents of which are incorporated herein by reference.
本發明較佳地應用於用以檢查玻璃板等透明板狀體之表面形狀之圖像產生。 The present invention is preferably applied to image generation for inspecting the surface shape of a transparent plate-like body such as a glass plate.
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| JP2013-030061 | 2013-02-19 | ||
| JP2013030061A JP2016085034A (en) | 2013-02-19 | 2013-02-19 | Image-capturing system for transparent plate-like body surface inspection |
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| TW201443424A TW201443424A (en) | 2014-11-16 |
| TWI637164B true TWI637164B (en) | 2018-10-01 |
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| JP6642223B2 (en) * | 2016-04-13 | 2020-02-05 | Ａｇｃ株式会社 | Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method |
| JP6228695B1 (en) * | 2017-02-27 | 2017-11-08 | 株式会社ヒューテック | Defect inspection equipment |
| CN107607549A (en) * | 2017-09-27 | 2018-01-19 | 深圳精创视觉科技有限公司 | Glass defect detection device |
| CN110455828A (en) * | 2019-09-02 | 2019-11-15 | 蚌埠中光电科技有限公司 | A kind of large scale TFT substrate glass nondestructive micro-waviness detection method |
| CN110849911B (en) * | 2019-11-25 | 2021-10-15 | 厦门大学 | Glass defect image acquisition device, glass defect detection equipment and detection method |
| CN112880600A (en) * | 2021-04-29 | 2021-06-01 | 深圳博升光电科技有限公司 | Imaging device and equipment for detecting glass |
| CN115555290A (en) * | 2022-10-20 | 2023-01-03 | 四川大学 | Glass apron slight defect check out test set based on degree of deep learning |
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| US5016099A (en) * | 1988-05-13 | 1991-05-14 | Saint-Gobain Vitrage | Process for determining the optical quality of flat glass or flat glass products |
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| DE19643018B4 (en) * | 1996-10-18 | 2010-06-17 | Isra Surface Vision Gmbh | Method and device for measuring the course of reflective surfaces |
| CN1297796C (en) * | 2003-07-02 | 2007-01-31 | 西安交通大学 | Chromatographic scanning three-dimension measuring method and device linear array photoelectric sensor |
| US7471383B2 (en) * | 2006-12-19 | 2008-12-30 | Pilkington North America, Inc. | Method of automated quantitative analysis of distortion in shaped vehicle glass by reflected optical imaging |
| JP5034891B2 (en) | 2007-11-21 | 2012-09-26 | 旭硝子株式会社 | Apparatus for measuring shape of transparent plate and method for producing plate glass |
| WO2011158869A1 (en) * | 2010-06-15 | 2011-12-22 | 旭硝子株式会社 | Shape measuring device, shape measuring method, and glass plate manufacturing method |
| JP2012021781A (en) | 2010-07-12 | 2012-02-02 | Asahi Glass Co Ltd | Method and device for evaluating surface shape |
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| US5016099A (en) * | 1988-05-13 | 1991-05-14 | Saint-Gobain Vitrage | Process for determining the optical quality of flat glass or flat glass products |
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| TW201443424A (en) | 2014-11-16 |
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