TW201144751A - Shape measurement device, shape measurement method and glass plate manufacturing method - Google Patents

Shape measurement device, shape measurement method and glass plate manufacturing method Download PDF

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Publication number
TW201144751A
TW201144751A TW100120932A TW100120932A TW201144751A TW 201144751 A TW201144751 A TW 201144751A TW 100120932 A TW100120932 A TW 100120932A TW 100120932 A TW100120932 A TW 100120932A TW 201144751 A TW201144751 A TW 201144751A
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Taiwan
Prior art keywords
flat plate
pattern
transparent flat
reflection
point group
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TW100120932A
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Chinese (zh)
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Kimiaki Ohto
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Asahi Glass Co Ltd
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Publication of TW201144751A publication Critical patent/TW201144751A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00Annealing glass products
    • C03B25/04Annealing glass products in a continuous way
    • C03B25/06Annealing glass products in a continuous way with horizontal displacement of the glass products
    • C03B25/08Annealing glass products in a continuous way with horizontal displacement of the glass products of glass sheets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00Television systems
    • H04N7/18Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

The present invention is able to accurately measure the front shape of a transparent flat plate with a simple structure. The shape measurement device includes: an image capturing part 2 arranged to enable an optical axis to be orthogonal with the extending direction of a straight linear pattern X above a transparent flat plate 3 that is used as an object to be measured, and to generate image including two reflective pictures that are separated on a directional orthogonal with the extending direction by performing image capturing on two reflective dot clusters of the pattern X reflected from the front M1 and back M2 of the transparent flat plate 3; a front reflective dot cluster deduction part using the position relation of the transparent flat plate 3, the pattern X, and the image capturing part 2 to deduce the front reflective dot cluster A of the pattern X on the front M1 of the transparent flat plate 3 according to the image; an inclination angle calculation part using the position relation of the transparent flat plate 3, the pattern X, and the image capturing part 2 to calculate the inclination angle of the front M1 of the transparent flat plate 3 at the position of the deduced front reflective dot cluster A; and a front shape determination part for determining the shape of the front M1 of the transparent flat plate 3 according to the calculated inclination angle.

Description

201144751 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種形狀測定裝置、形狀測定方法及玻璃 板之製造方法。 【先前技術】 先前’作為測定透明平板之正面之微小起伏等正面形狀 之方法之一例’已知有日本專利特開2009428〇98號公報 中所揭示之技術。該測定方法係利用線感測器對配置於透 明平板之上方之圖案由透明平板之正面反射所得之像進行 攝像’並基於所獲得之圖像求出透明平板之正面形狀者。 【發明内容】 [發明所欲解決之問題] 然而’於日本專利特開2009-128098號公報之測定方法 中’為將透明平板之正面反射像與背面反射像分離而獲得 正確之正面形狀,必需包含根據透明平板之板厚而設計之 圖案與複數個線感測器之攝像機構,例如3線式彩色相 機°又’於使用曰本專利特開2009-128098號公報之測定 方法之情形時,雖然可將正面反射像與背面反射像分離, 但難以判定其中哪一個為正面反射像。 本發明係考慮此種情況而完成者,能夠以簡單之構成正 確地測定透明平板之正面形狀。 [解決問題之技術手段] 為解決上述問題,作為本發明之一態樣之形狀測定装置 匕括攝像部,其被配置成光軸與配置在作為測定對象之 156954.doc 201144751 透明平板之上方之直線性圖案之延伸方向成直角,且藉由 對上述透明乎板之正面與背面之上述圓案之2個反射點群 進行攝像而生成包含在與上述延伸方向呈直角之方向上分 離之2個反射像的圖像;正面反射點群推斷部,其利用上 述透明平板、上述圖案及上述攝像部之位置關係,根據上 述圖像推斷上述透明平板之正面上之上述圖案之正面反射 點群;傾斜角度運算部,其利用上述透明平板、上述圖案 及上述攝像部之位置關係,算出所推斷出之上述正面反射 點群之位置上之上述透明平板之正面之傾斜角度;以及正 面形狀決定部,其基於所算出之上述傾斜角度來決定上述 透明平板之正面之形狀。 於上述形狀測定裝置中,亦可為上述傾斜角度運算部基 於自上述圖案朝向上述正面反射點群之位置之入射光之入 射角與自上述正面反射點群之位置朝向上述攝像部之反射 光之反射角相等的條件算出上述傾斜角度。 於上述形狀測定裝置中,亦可為上述圖案係複數個點於 上述延伸方向上呈直線排列而成之圖案。 於上述形狀測定裝置中,亦可為上述透明平板係沿與上 述延伸方向呈直角之方向搬送。 為解決上述問題,作為本發明之一態樣之形狀測定方法 包括如下步驟:藉由被配置成光軸與配置在作為測定對象 之透明平板之上方之直線性圖案之延伸方向成直角之攝像 部,對上述透明平板之正面與背面之上述圖案之2個反射 點群進行攝像而生成包含在與上述延伸方向呈直角之方向 I56954.doc 201144751 上分離之2個反射像的圖像;利用上述透明平板、上述圖 案及上述攝像部之位置關係,根據上述圖像推斷上述透明 平板之正面上之上述圖案之正面反射點群;利用上述透明 平板、上述圖案及上述攝像部之位置關係,算出所推斷出 之上述正面反射點群之位置上之上述透明平板之正面之傾 斜角度;以及基於所算出之上述傾斜角度來決定上述透明 平板之正面之形狀。 於上述形狀測定方法中,亦可為上述算出傾斜角度之步 驟係基於自上述圖案朝向上述正面反射點群之入射光之入 射角與自上述正面反射點群之位置朝向上述攝像部之反射 光之反射角相等的條件而算出上述傾斜角度。 於上述形狀測定方法中,亦可為上述圖案係複數個點於 上述延伸方向上呈直線排列而成之圖案。 於上述形狀測定方法中,亦可為上述透明平板係沿與上 述延伸方向呈直角之方向搬送。 為解決上述問題,作為本發明之一態樣之玻璃板之製造 方法包括:溶融步驟’其將原材料熔融而獲得熔融玻璃; 成形步驟,其使上述熔融玻璃成形為板狀且連續之玻璃 帶,緩冷步驟,其係一面搬送上述玻璃帶一面使其漸漸冷 部並去除應力;測定步驟,其測定上述玻璃帶之正面形 狀,切割步驟,其切割上述玻璃帶;以及控制步驟,其基 於上述測定步驟之測定結果控制上述緩冷步驟中之緩冷條 件’且上述測疋步驟係將上述玻璃帶作為測定對象而使用 上述形狀測定方法進行測定之步驟。 156954.doc 201144751 [發明之效果] 根據本發明’能夠以餘留# w , 列以簡早之構成正確地測定透明平板之 正面形狀。 【實施方式】 (第1實施形態) 乂下參照圖式說明本發明之第i實施形態。 面形狀 圖1係表示本發明n實施形態之透明平板之正 的測定方法之圖。 乍為測疋對象之透明平板3例如為玻璃板(下述圖1〇之玻 璃帶204) ’於圖1中’該透明平板3係藉由未圖示之搬送裝 置而向圖中所示之y方向搬送。 、 於透明平板3之上方(圖中z方向)設置有圖案構件4。於該 圖案構件4之某-個面上設置有點X,、X2、X3、…沿一個 方向以直線排列而成之圖案χ。圖案構件4係成為如下狀態 而配置.各點X!、&、A、…之排列方向與圖中之X方向 (與搬送方向呈直角且與透明平板3之正面平行之方向)平 行,且設置有圖案X之面稍微向透明平板3側傾斜。藉此, 於透明平板3之正面Ml上,以在與搬送方向呈直角之方向 上延伸之形態形成有圖案χ之反射點群A。 又,於透明平板3之上方設置有相機(面掃描攝影機)2。 該相機2係成為如下狀態而配置:其光軸朝向相對於反射 點群A之延伸方向呈直角之方向’且圆案之反射像收納於 攝像圖像内。再者,圖案構件4及相機2之位置與方向固 定0 156954.doc 201144751 於本實施形態中,使用如此而配置之相機2對包含圖案χ 之反射像之圖像進行攝像’並基於所獲得之圖像,測定透 明平板3之正面Ml之形狀。然而,於本實施形態中,透明 平板3正面之高度Η(平均之高度)既知,所謂應測定之正面 形狀,係指存在於透明平板3之正面Ml上之微小之起伏 等。 此處’於圖1中所示之透明平板3、圖案構件4及相機2之 位置關係方面,圖案構件4之圖案χ係由透明平板3之背面 M2中之反射點群b反射並藉由相機2進行攝像。圖2係表示 藉由相機2進行攝像之圖像G之一例之圖。根據圖丨中之相 機2之位置關係,圖丨之7方向與圖2之圖像G之下方向相對 應,圖1之χ方向與圖2之圖像g之左方向相對應。於圖工之 例中,如圖2所示,於相機2中,該反射點群B之反射像1)係 於如下狀態下進行攝像:相對於透明平板3之正面M1中之 反射點群A之反射像&於向7軸正方向(靠近相機2之側)偏移 之位置上分離。其位置偏移量取決於圖案構件4之設置位 置或透明平板3之厚度t,但若構成圖案乂之各點之尺寸足 夠小,則反射點群A之反射像之線與反射點群B之反射像 之線可清楚地分離。 例如’透明平板3、圖案構件4及相機2之位置關係以及 圖案X之各點之尺寸係由圖3中所示之關係而決定。圖3係 表示由相機2對透明平板3進行攝像之情形之光線路徑之 圖,且係自圖1中之橫向(χ方向)進行觀察之圖。於板厚t之 透明平板3之上方配置有相機2與具有圖案χ之圖案構件 156954.doc 201144751 與圖案x之延伸方向正交之方向之各點的長度為p。 以下,說明逆光線追蹤到達至相機2之光線,即作為自 相機2面向透明平板3之視線LX而自相機側追蹤光線路徑 之情形。圖3係相機2之視線(直線LX)以與入射角么相同之 角度由透明平板3之正面Ml反射而向光線路徑LY之方向前 進’從而到達至圓案X之端部之例β此時,於正面Μ1中之 反射點中,相機2之視線LX於以折射角、折射至透明平板 3之内部後藉由背面Μ2反射’且藉由正面M1再次折射而向 光線路徑LZ之方向前進,從而到達至圖案構件4。其表示 相機之視線LX到達至於圖案構件4之表面上隔開距離卩之之 個部位。即’係指若調換為利用相機2對圖案X由透明平板 3之正面與背面反射後之反射像進行攝像之情形,則圖案X 之藉由背面M2之反射之反射像b係生成於相對於藉由正面201144751 VI. Description of the Invention: [Technical Field] The present invention relates to a shape measuring device, a shape measuring method, and a method of manufacturing a glass sheet. [Prior Art] The technique disclosed in Japanese Laid-Open Patent Publication No. 2009-428-98 is known as an example of a method of measuring a front shape such as a slight undulation of a front surface of a transparent flat plate. In the measurement method, the image obtained by reflecting the pattern disposed on the front surface of the transparent flat plate by the line sensor is imaged by the line sensor and the front shape of the transparent flat plate is obtained based on the obtained image. [Problems to be Solved by the Invention] However, in the measurement method of Japanese Laid-Open Patent Publication No. 2009-128098, it is necessary to separate the front reflection image of the transparent plate from the back reflection image to obtain a correct front shape. An image pickup mechanism including a pattern designed according to the thickness of the transparent flat plate and a plurality of line sensors, for example, a 3-line color camera, and when using the measurement method of the Japanese Patent Laid-Open Publication No. 2009-128098, Although the front reflection image can be separated from the back reflection image, it is difficult to determine which one is the front reflection image. The present invention has been completed in consideration of such a situation, and it is possible to accurately measure the front shape of the transparent flat plate with a simple configuration. [Means for Solving the Problems] In order to solve the above problems, a shape measuring device according to an aspect of the present invention includes an imaging unit that is disposed such that an optical axis is disposed above a transparent plate of 156954.doc 201144751 as a measurement target. The extending direction of the linear pattern is at a right angle, and two reflection point groups of the above-described round case on the front and back sides of the transparent plate are imaged to generate two separated in a direction perpendicular to the extending direction. An image of a reflection image; a front reflection point group estimation unit that estimates a front reflection point group of the pattern on a front surface of the transparent flat plate based on a positional relationship between the transparent plate, the pattern, and the imaging unit; The angle calculation unit calculates an inclination angle of a front surface of the transparent flat plate at a position of the estimated front reflection point group by the positional relationship between the transparent plate, the pattern, and the imaging unit, and a front shape determining unit. The shape of the front surface of the transparent flat plate is determined based on the calculated tilt angle. In the above-described shape measuring apparatus, the angle of incidence of the incident light from the position of the front reflection point group from the pattern and the reflected light from the position of the front reflection point group toward the imaging unit may be The above inclination angle is calculated under the condition that the reflection angles are equal. In the shape measuring device described above, the pattern may be a pattern in which a plurality of dots are linearly arranged in the extending direction. In the shape measuring device described above, the transparent flat plate may be conveyed in a direction perpendicular to the extending direction. In order to solve the above problem, the shape measuring method according to an aspect of the present invention includes the step of: arranging an optical axis at an angle to a direction perpendicular to an extending direction of a linear pattern disposed above a transparent flat plate to be measured Imaging the two reflection point groups of the pattern on the front and back sides of the transparent flat plate to generate an image including two reflection images separated in a direction perpendicular to the extending direction I56954.doc 201144751; a positional relationship between the flat plate, the pattern, and the imaging unit, and estimating a front reflection point group of the pattern on the front surface of the transparent flat plate based on the image; and calculating the estimated value by using a positional relationship between the transparent flat plate, the pattern, and the imaging unit An inclination angle of a front surface of the transparent flat plate at a position of the front reflection point group; and a shape of a front surface of the transparent flat plate based on the calculated inclination angle. In the above shape measuring method, the step of calculating the tilt angle may be based on an incident angle of incident light from the pattern toward the front reflection point group and a reflected light from the position of the front reflection point group toward the imaging unit. The above inclination angle is calculated under the condition that the reflection angles are equal. In the above shape measuring method, the pattern may be a pattern in which a plurality of points are linearly arranged in the extending direction. In the above shape measuring method, the transparent flat plate may be conveyed in a direction perpendicular to the extending direction. In order to solve the above problems, a method for producing a glass sheet according to an aspect of the present invention includes a melting step of melting a raw material to obtain molten glass, and a forming step of forming the molten glass into a plate-like and continuous glass ribbon. a slow cooling step of transferring the glass ribbon to gradually cool the portion and removing stress; a measuring step of measuring a front shape of the glass ribbon, a cutting step of cutting the glass ribbon; and a controlling step based on the determining The measurement result of the step is to control the slow cooling condition in the slow cooling step, and the measurement step is a step of measuring the glass ribbon as the measurement target using the shape measurement method. 156954.doc 201144751 [Effects of the Invention] According to the present invention, it is possible to accurately measure the front shape of the transparent flat plate with the composition of the remaining #w. [Embodiment] (First Embodiment) An i-th embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a view showing a method of measuring the positive plate of the transparent plate according to the embodiment of the present invention. The transparent plate 3 to be the object to be measured is, for example, a glass plate (see the glass ribbon 204 in FIG. 1 below). In FIG. 1, the transparent plate 3 is shown in the drawing by a conveying device (not shown). Transport in the y direction. A pattern member 4 is disposed above the transparent plate 3 (in the z direction in the drawing). On a certain surface of the pattern member 4, a pattern χ which is formed by a line X, X2, X3, ... arranged in a line in one direction is provided. The pattern member 4 is disposed in the following state. The arrangement direction of each of the points X!, & A, . . . is parallel to the X direction in the drawing (the direction parallel to the conveyance direction and parallel to the front surface of the transparent flat plate 3), and The surface provided with the pattern X is slightly inclined toward the side of the transparent flat plate 3. Thereby, the reflection point group A of the pattern 形成 is formed on the front surface M1 of the transparent flat plate 3 so as to extend in a direction perpendicular to the conveyance direction. Further, a camera (surface scanning camera) 2 is provided above the transparent flat plate 3. The camera 2 is disposed in such a state that its optical axis is oriented in a direction at right angles to the direction in which the reflection point group A extends, and the reflection image of the circle is stored in the captured image. Further, the position and direction of the pattern member 4 and the camera 2 are fixed. 0 156954.doc 201144751 In the present embodiment, the camera 2 configured as described above images the image including the reflection image of the pattern ' and based on the obtained image The image was measured for the shape of the front surface M1 of the transparent plate 3. However, in the present embodiment, the height Η (the average height) of the front surface of the transparent flat plate 3 is known, and the front shape to be measured means a slight undulation which exists on the front surface M1 of the transparent flat plate 3. Here, in terms of the positional relationship of the transparent plate 3, the pattern member 4, and the camera 2 shown in FIG. 1, the pattern of the pattern member 4 is reflected by the reflection point group b in the back surface M2 of the transparent plate 3 and is used by the camera. 2 Take a picture. Fig. 2 is a view showing an example of an image G imaged by the camera 2. According to the positional relationship of the camera 2 in Fig. 2, the direction of Fig. 7 corresponds to the direction below the image G of Fig. 2, and the direction of Fig. 1 corresponds to the left direction of the image g of Fig. 2. In the example of the drawing, as shown in FIG. 2, in the camera 2, the reflection image 1 of the reflection point group B is imaged in the following state: the reflection point group A in the front surface M1 of the transparent flat plate 3 The reflection image & is separated at a position shifted in the positive direction of the 7-axis (near the side of the camera 2). The positional shift amount depends on the position of the pattern member 4 or the thickness t of the transparent plate 3, but if the size of each point constituting the pattern 足够 is sufficiently small, the line of the reflected image of the reflection point group A and the reflection point group B The line of reflected images can be clearly separated. For example, the positional relationship of the transparent plate 3, the pattern member 4, and the camera 2, and the size of each point of the pattern X are determined by the relationship shown in Fig. 3. Fig. 3 is a view showing a ray path of a case where the transparent plate 3 is imaged by the camera 2, and is a view taken from the lateral direction (χ direction) in Fig. 1. The length of each point of the direction in which the camera 2 and the pattern member having the pattern 156954.doc 201144751 are orthogonal to the direction in which the pattern x extends is disposed above the transparent plate 3 having the thickness t. Hereinafter, the case where the reverse ray tracing reaches the light of the camera 2, that is, the case where the ray path is tracked from the camera side as the line of sight LX from the camera 2 facing the transparent plate 3 will be described. 3 is an example of the line of sight of the camera 2 (straight line LX) being reflected by the front surface M1 of the transparent flat plate 3 at an angle equal to the incident angle and advancing toward the direction of the light path LY to reach the end of the circle X. In the reflection point of the front side ,1, the line of sight LX of the camera 2 is reflected by the back surface Μ2 after being refracted to the inside of the transparent flat plate 3 by the angle of refraction, and is re-refracted by the front surface M1 to advance toward the ray path LZ. Thereby reaching the pattern member 4. It indicates that the line of sight LX of the camera reaches a portion spaced apart from the surface of the pattern member 4 by a distance 卩. That is, if the image of the pattern X is reflected by the front surface and the back surface of the transparent plate 3 by the camera 2 is switched, the reflection image b of the pattern X reflected by the back surface M2 is generated in relation to By the front

Ml之反射之反射像3偏移距離9之位置。再者,距離q係根 據以下式(1)而算出。 Q = 2t.cos為.tan么 〇) 此處,入射角多,與折射角6係將透明平板3之折射率設 為n,而具有以下式(2)之關係。 sin^, = η · sin^2 (2) 於圖2中,將反射點群A、B之反射像a、b分離,即,使 藉由背面M2之反射之反射像]3之各點不與藉由正面mi之反 射之反射像a之各點重合之條件為g>〇e若以圖3之關係對 其進行說明’則以使各點之長度p小於距離Q(p<Q)之方 式,決定透明平板3、圖案構件4及相機2之位置關係以及 156954.doc 201144751 圖案X之各點之尺寸。例如於調整各點之長度p之情形時, 只要以滿足以下式(3)之方式進行設定即可。 P < 2t · cos^j · tan^2 (3) 再者’圖案X並不限定於點,與圖案又之延伸方向正交 之方向之長度P可於滿足上述條件之範圍内進行適當設 定。 圖4係表示反射點群八與透明平板3之正面Μι之形狀之關 係的圖,且表示自橫向(X方向)觀察圖丨中之各構成要素之 位置關係之情況。參照圖2及圖4,說明根據圖像G求出透 明平板3之正面Ml之形狀之方法。 於圖4中’反射點群A存在於透明平板3之正面mi上,其 位置(圖中之左右方向之位置)可根據圖像G(圖2)内之反射 點群A之反射像a的位置(圖2中之y方向之位置)而獲知。 即,於獲得包含反射像a之某一圖像G時,由於透明平板 3之正面Ml上之反射點群A係存在於自相機2面向圖像G内 之反射像a之方向之視線(圖4之直線LA)上,故而該視線 (直線LA)與透明平板3之正面Ml相交之位置為透明平板3 之正面Ml上之反射點群A之位置。若將自某一基準面μ(地 面等)起至透明平板3之正面Ml為止之高度Η設為固定,則 由上述可確定透明平板3之正面Ml上之反射點群Α之位 置。 再者’如圖2所示,於圖像G内存在透明平板3之正面Ml 中之反射點群A之反射像a之線與透明平板3之背面M2中之 反射點群B之反射像b之線,如上所述,根據圖1中所示之 156954.doc 201144751 各構成要素之位置關係’圖像G中之2條線中上側(圖2中之 y軸負方向側)之線為與反射像a相對應之線。 且說’若如上所述般確定透明平板3之正面Ml上之反射 點群A之位置’則根據圖4中之圖案χ、相機2及反射點群a 之各者之位置關係,可以如下方式求出透明平板3之正面 Ml中之反射點群A之部分之形狀。 即,如圖4所示,自圖案構件4之圖案χ發出之光(以直線 LC表示)於透明平板3之正面Ml上由反射點群a之位置反 射,而朝向相機2入射。反射光之光程為直線la ^此處, 若透明平板3之正面Ml上之反射點群A之位置確定則入射 光LC與反射光LA確定,進而,根據向反射點群八之位置入 射之入射光LC之入射角0與自反射點群a之位置反射之反 射光LA之反射角0相等的條件,而反射點群a之位置上之 反射面S1確定。 該反射面S1為反射點群A之位置上之構成透明平板^之 正面Ml之微小平面。換言之,反射點群八之位置上之透明 平板3之局部正面具有與圖4之反射面si相同的傾斜角度。 如此,對於反射點群A之位置,求出透明平板3之正面Ml 之形狀(傾斜角度)。 對於圖2之反射點群A之反射像3中之各點進行相同之處 理’藉此可求出反射點群A上之各點之位置上的透明平板3 之正面Ml之形狀。又,藉由與沿y方向搬送透明平板3一 併連續進行相同之處理,而可求出透明平板3之正面Mig 個面之形狀。 156954.doc -10- 201144751 系表示用以實施上述透明平板之正面形狀之測定方 法之形狀測定裝置之構成的圖。 立於圖5中’形狀測定裝置包括攝像部11與電腦10。攝像 為上述圖1、圖4中所示之相機2。電腦包括圖像取 付4 12、正面反射點群推斷部13、傾斜角度運算部μ、正 =形狀決疋部15及記憶部} 6。再者,除記憶部丄6以外之電 腦 1〇之各部 12〜15係藉由 CPU(Central Processing Unit ,中 處單元)執行6己憶於R〇M(Read Only Memory,唯讀記 憶體)等中之特定之電腦程式,而實現其各功能者。 圖像取得部12自攝像部丨丨中取得圖像G(圖圖像^既 可為1張,亦可使用與透明平板3之搬送一併而連續攝像所 得之複數張圖像G。根據丨張圖像G,並藉由以下說明之各 部之處理’可求出平行於X軸(圖1)之某一剖面中的透明平 板3之正面M1之形狀。又,於使用連續之複數張圖像〇之 匱死"時’可求出透明平板3之正面Ml之某一擴大之範圍内 的正面形狀。 正面反射點群推斷部13根據圖像G檢測圖像G中所包含 之透明平板3之正面Ml之圖案X的反射點群A之反射像a。 具體而言,首先’正面反射點群推斷部13使用圖像識別處 理等眾所周知之圖像處理方法,根據圖像G檢測反射像a與 反射像b(2條線)。如上所述,已知根據透明平板3、圖案構 件4及相機2之位置關係決定該2條線中之哪一條為反射像 a ° s己憶部16中記憶有表示哪一條為反射像a之該既知之資 訊。繼而’正面反射點群推斷部13使用該資訊,自上述已 156954.doc 201144751 檢測之反射像a與反射像b之2條線中檢測反射像a。 傾斜角度運算部14基於根據圖像G所檢測之反射像a,運 算透明平板3之正面Ml上之反射點群A之位置上的透明平 板3之正面Ml之傾斜角度。具體之運算順序如下。 首先,傾斜角度運算部14求出反射像a之圖像G中之縱向 (y方向)位置。繼而,傾斜角度運算部14根據該縱向位置, 求出存在於透明平板3之正面Ml上之反射點群A之位置。 為求出正面Ml上之反射點群A之位置,只要如上所述般運 用幾何學計算圖4之直線LA與透明平板3之正面Ml相交之 位置即可。或者,亦可藉由預先基於相機2與透明平板3之 相對配置將圖像G中之縱向位置與透明平板3之正面Ml上 之位置之對應關係表格化’並使用該表格,而根據圖像G 中之縱向位置求出透明平板3之正面Ml上之位置。上述幾 何學之計算中所必需之與相機2等之配置相關之資訊或上 述表格係記憶於記憶部16中,且傾斜角度運算部14使用該 等進行上述處理。 其次’傾斜角度運算部14求出如上所述而求出之透明平 板3之正面Ml上之反射點群a之位置上的來自圖案X之入射 光LC與向相機2之反射光LA之各光程(參照圖4)。繼而,傾 斜角度運算部14求出將入射光LC反射至反射光LA之方向 之反射面S1(成為入射光LC之入射角0 =反射光LAi反射角 彡之反射面)(參照圖4) ’並算出所求出之反射面s丨之傾斜 角度。該傾斜角度為透明平板3之正面M1上之反射點群A 之位置上的透明平板3之正面M1之傾斜角度,且為傾斜角 156954.doc • 12- 201144751 度運算部14之運算結果。 此處,為分別求出入射光、反射光LA、及反射面 S1,只要利用圖4中所示之各構成要素之位置關係進行幾 何學之計算即可。X ’亦可藉由預先基於相機2、透明平 板3及圖案構件4(圖案χ)三者間之相對配置將透明平板3之 正面Ml上之反射點群人之位置與反射面“之傾斜角度之對 應關係表格化,並使用該表格而求出各者。上述幾何學之 計算中所必需之與相機2等之配置相關之資訊或上述表格 係記憶於記憶部1 6中,且傾斜角度運算部14使用該等進行 上述處理。 傾斜角度運算部14對於反射點群A之各點(例如,與構成 圖案X之所有點相對應之反射點)進行以上各運算順序之處 理。 正面形狀決定部15基於藉由傾斜角度運算部14所求出之 透明平板3之正面Ml之傾斜角度,決定透明平板3之正面 Ml之形狀。於僅使用圖像取得部12中所取得之1張圖像g 之情形時,決定平行於X轴(圖1)之一剖面中之透明平板3之 正面Ml之形狀。又,於使用與透明平板3之搬送一併而連 續攝像所得之複數張圖像G之情形時,決定透明平板3之正 面Μ1之某一擴大之範圍内之形狀。例如,藉由經常連續 地進行該形狀測定’可遍及玻璃帶之長度方向整體而監控 圖10中所示之玻璃帶204之正面之起伏等。 (第2實施形態) 以下’參照圖式說明本發明之第2實施形態。再者,除 156954.doc •13- 201144751 以下說明之方面以外’第2實施形態與第1實施形態相同。 圖0係表示設置於圖案構件4|之圖案及藉由相機2進行攝 像之圖像G’之圖。 圖案構件4'具有多個點於一個方向(圖中左右方向)上以 直線排列而成之3行之圖案χ(1)、χ(2)、χ(3)。若使用此種 圖案構件4’,則圖像G,中出現透明平板3之正面Ml之各圖 案()X(2) X(3)各自之反射點群A的反射像a(l)、 a(2)、a(3)與透明平板3之背面M2i各圖案χ(”、χ(2)、 Χ(3)各自之反射點群8的反射像b〇)、b(2)、b(3)之合計6條 線。藉由適當設定3行之圖案χ(1)、χ(2)、χ(3)之間隔,可 於圖像G’中將各反射像分離。又,與第丨實施形態同樣 地,可根據圖1中所示之各構成要素之位置關係瞭解該等6 條線中之哪一條為特定之圖案(例如圖案之透明平板3 之正面Ml之反射像》 根據本構成,即便例如因灰塵附著於透明平板3之正面 Ml等而導致圖像G’中之某—反射像不清晰,亦可藉由使用 其他清晰之反射像,而測定透明平板3之正面M1之形狀。 (第3實施形態) 以下,參照圖式說明本發明之第3實施形態。再者,除 以下說明之方面以外,第3實施形態與第1施形態相同。 於第1實施形態'中自基準面M起至透明平板3之正面⑷為 止之高度Η既知,但於第3實施形態中,即便透明平板3之 正面Ml之高度Η未知,亦可測定透明平板3之正面μι之形 狀0 156954.doc 201144751 圖7係表示設置於圖案構件4"之圖案及藉由相機2進行攝 像之圖像G"之圖。 圖案構件4"包含多個點於一個方向(圖中左右方向)上以 直線排列而成之圖案X、與配置於構成圖案又之丨個點xs之 附近的標記XM。若使用此種圖案構件4n,則於圖像中 除可取得透明平板3之正面Ml及背面M2各自之圖案X之反 射點群A及反射點群B的反射像a、b以外,亦可取得標記 XM之反射像。 於本實施形態申,利用標記XM與點XS之反射像求出透 明平板3之正面Ml之未知之高度Η。若求出透明平板3之正 面Ml之高度Η,則其後能夠以與第1實施形態相同之方 式’利用圖案X之反射像求出透明平板3之正面M1之形 狀。 以下’參照圖8及圖9說明利用標記xm與點xs之反射像 來求出透明平板3之正面Ml之高度Η之方法。 首先’著眼於點XS。自圖案構件4Μ上之點χι§(參照圖8) 發出之光由透明平板3之正面Ml反射,而形成圖像G,,内之 反射像AS(參照圖7)。此時,由於透明平板3之正面M1之 高度Η未知’故而透明平板3之正面Ml上之真實之反射點 並非唯一地確定(反射點係自相機2進行觀察而位於朝向圖 像G"内之反射像AS之方向的直線以上之某處)。於圖8 中’表示高度Η不同之3個反射點之候補Al(〇、Al(2)、 Αι(3)。將各反射點群a!(1)、A丨(2)、A丨(3)之高度分別設為 、H2、HKWHs)。 156954.doc •15- 201144751 此處,於假定高度H〗之反射點群A】(l)之情形時,該反 射點群AJ1)中之透明平板3之(假定上之)切平面應具有與 使自圖案構件4"上之點xS發出並向反射點群Ai(l)入射之 光沿直線L S向相機2之方向反射之反射面s丨相等之傾斜角 θ 1 (1)。假定反射點群Ai (2)或A〖(3)之情形之該等反射點中 之透明平板3之(假定上之)各切平面亦同樣地,具有與各自 相對應之反射面S2、S3相等之傾斜角9丨(2)、Θ丨(3)。 此時,反射點越高(即,Al(2)高於ΑΚ1),進而Αι(3)高於 Α丨(2))自圖案構件4"上之點xs向各反射面Si、S2、^之入 射角越小,故而0,(1)^,(2)^,(3)之關係成立(此處將傾斜 角設為以圖中所示之χ軸負方向與各反射面之朝向圖中上 側之法線所形成之角度進行定義者)。將該關係於圖9之圖 表中表示為曲線^。如此,傾斜角01(11)成為反射點之高度 Ηη之函數。然而,如上所述,無法唯一地確定真實之反射 點與該曲線C!上之哪一點相對應。 其次,著眼於標記ΧΜ。與點xs同樣地,使自圖案構件 4"上之標記χμ發出之光朝向相機2而反射之透明平板3之 正面Ml上之反射點係自相機2進行觀察而存在於朝向圖像 G··内之反射像AM之方向的直線LM上之某處(並非唯一地 確定)。 且說’其次’著眼於通過上述各反射點之候補Al(i)、 八⑹卜八心)、…之上述(假定上之)各切平面(反射面Si、 S2、S3、…)與直線LM相交之交點群八2(1)、A2(2)、 A2(3)、·"。由於點xs與標記XM為圖案構件4··上之鄰近之 156954.doc -16- 201144751 點,故而各點群A!(η)及與其相對應之點群A2(n)亦為鄰近 之點(n=l、2、…)。 此處,設置透明平板3之正面Ml之形狀之變化充分緩和 之前提。如此一來,於透明平板3之正面Ml上之互相鄰近 之2點中’可將通過該等2點之各者之各切平面看作同一平 面。 因此,若上述反射點之候補中某一點群Ai(k)為透明平 板3之正面Ml上之真實之反射點’則存在於通過該點群 AJk)之透明平板3之切平面(反射面Sk)上之點群A2(k)亦為 透明平板3之正面Μ1上之點。繼而’若將該點群A2(k)作為 反射點而考慮使來自圖案構件4,,上之標記XM之光沿直線 LM向相機2之方向反射之反射面S〆,則可知該反射面(即 點群A^k)中之透明平板3之切平面)與點群A〗(k)中之透明 平板3之切平面(反射面8)〇—致’且其傾斜角02(k)應與傾斜 角0i(k)相等。於圖8中,描繪了點群A〗(2)為透明平板3之 正面Ml上之真實之反射點的狀況。 另一方面,關於並非透明平板3之正面Ml上之真實之反 射點的點群AJj)(其中’ j#k ’於圖8中相當於點群a!(1)與 Αι(3)),存在於通過該點群八丨⑴之(假定上之)透明平板3之 切平面(反射面Sj)上之點群A/j)並非透明平板3之正面M1 上之點’且於該點群Adj)中使來自圖案構件4',上之標記 XM之光沿直線LM向相機2之方向反射之反射面之傾斜角 92(j)與傾斜角θ")不同。 因此’對於通過與點XS相對應之反射點候補、 156954.doc -17- 201144751 A!(2)、A!(3)、…之(假定上之)各切平面(反射面Si、S2、 S3、…)與由標記XM所決定之直線LM之上述各交點群 A2(l)、A2(2)、A2(3)、…,分別求出(假定上之)切平面(反 射面 S,,、S2,、S3,、…)之傾斜角 θ2(1)、θ2(2)、θ2(3)、…, 且若發現如之反射點候補Al(k),則該反射點群 A〗(k)為真實之反射點,從而求出該反射點中之傾斜角 h(k)與高度Hk。 於圖9之圖表中’除表示有上述曲線^以外,亦表示有 表示上述各交點群A2(n)之高度H,n與各交點群A2(n)中之切 平面之傾斜角θ2(η)之關係的曲線c2。於該圖表中,ejn)之 值與θ2(η)之值相等之點群A丨(2)為透明平板3之正面Ml上之 真實之反射點。 如上所述’由於求出透明平板3之正面mi之高度H=Hk, 故而其後能夠以與第1實施形態相同之方式,利用該高度Η 求出透明平板3之正面Ml之形狀。 (第4實施形態) 以下,對玻璃板之生產線上之本發明之應用例進行說 明。圖10係應用圖5中所示之形狀測定裝置的玻璃板之生 產線之概略說明圖。圖10中所示之生產線上之玻璃板之製 造方法包括,其將玻璃原#料熔融而獲得熔融 玻璃;成形步㉟’其使上述溶融玻璃成形為連續之板狀之 玻璃帶;緩冷步驟,其-面使上述玻”移動—面使其漸 漸冷卻;純敎㈣,其敎麵帶之正面形狀;切割 步驟’其切割麵帶;以及㈣㈣,其基於上述測定步 156954.doc •18· 201144751 驟中所獲得之玻璃帶之正面形狀控制上述緩冷步驟中之緩 冷條件。於圖u中表示玻璃板之製造方法之步驟。 具體而言,於玻璃板之製造步驟中,於根據藉由本發明 之形狀測定方法而獲得之玻璃帶之正面形狀之資料,判斷 為玻璃帶之翹曲較大之情形時,考慮其翹曲之大小、部 位’而變更緩冷步驟中之緩冷條件,例如冷卻速度條件、 冷卻溫度條件。藉此,可防止由翹#所導致之形狀不良或 由翹曲所導致之斷裂’且能夠以良好之良率製造玻璃板。 於成形步驟中,有浮式法、輾平法、下拉法、熔融法等 各種方法,本發明可適當使用該等中之任一者、或其他方 法。於圖1G之例中,以使用浮式法之情形為例進行說明。 於熔融步驟(圖丨丨之“)中,將矽砂、石灰石、燒鹼等原 材料與破璃製品之組成相配合而進行調配,並將混合所得 之人技料量投入至熔融爐,根據玻璃之種類加熱至約 1400 C以上之溫度使其熔融而獲得熔融玻璃。例如,將一 人投料量自熔融爐之一端投入至熔融爐内,並使將燃燒重 油而獲得之火焰或使天然氣與空氣混合並燃燒而獲得之火 焰噴附於該一次投料量,且加熱至約1550-C以上之溫度而 使一次投料量熔解,藉此獲得熔融玻璃。又,亦可使用電 熔融爐而獲得熔融玻璃。 ?成开y步驟(圖11之S2)中’將於溶融步驟中所獲得之熔 融玻璃自熔融爐下游部201導入至熔融錫浴2〇3,並使熔融 玻璃浮於熔融錫202上而向圖中之搬送方向行進,藉此製 成連續之板狀之玻璃帶204(相當於透明平板3) ^此時,為 156954.doc -19- 201144751 成形特定之板厚之破璃帶2〇4,而將旋轉之輥(頂輥2〇5)推 壓至玻璃帶204之兩侧面部分,從而將玻璃帶2〇4向寬度方 向(與搬送方向呈直角之方向)外側拉伸。 於緩冷步驟(圖11之S3)中,藉由提昇輥2〇8將上述經成 形之玻璃帶204自熔融錫浴2〇3中拉出,並使用金屬輥2〇9 使該玻璃帶204於緩冷爐210内沿圖中之搬送方向移動,從 而使玻璃帶204之溫度漸漸冷卻,緊接著於自緩冷爐21〇中 移出後至切割步驟之期間進而使其冷卻直至接近於常溫為 止。緩冷爐210於爐内之必要位置包含用以供給燃燒氣體 或由電加熱器控制之熱量而進行緩冷之機構。自緩冷爐 210移出後之階段之玻璃帶2〇4之溫度成為玻璃帶2〇4之玻 璃之應變點以下之溫度,雖然亦取決於玻璃之種類,但通 常係冷卻至150〜25CTC為止。該緩冷步驟係於去除玻璃帶 204内部之殘留應力、及降低玻璃帶2〇4之溫度之目的下實 施。於緩冷步驟中’玻璃帶2〇4通過測定部211 (相當於圖5 之形狀測定裝置),進而其後搬送至玻璃帶切割部2丨2 ^於 玻璃帶切割部212中將進行緩冷直至接近於常溫為止之玻 璃帶204切割(切割步驟)^再者,玻璃帶切割部2丨2中之玻 璃帶之溫度通常為該場所之環境溫度〜5〇它。 測定步驟(圖11之S4)中之玻璃帶204之拍攝位置(即,測 定部211之位置)為破璃帶2〇4之溫度處於該玻璃之應變點 以下之溫度之位置《通常,測定部2丨〗係設置於自緩冷爐 210之玻璃帶出口至搬送方向下游之位置’進而較佳為設 置於玻璃帶204之溫度處於2〇〇°c以下之位置《又,測定部 156954.doc -20- 201144751 211亦可於將要進行切割步驟前 < 哪則進仃s又置,但於使自測定 步驟中所獲得之資料反映至切$ 哄主切割步驟之情形時,雖然亦取 決於玻璃帶2〇4之移動速度,但較佳為於距離切割位置隔 開3〇Cm以上、尤其lm以上之位置設置測定部川。The reflection of Ml reflects a position offset by a distance of three. Further, the distance q is calculated based on the following formula (1). Q = 2t.cos is .tan 〇) Here, the incident angle is large, and the refractive index 6 is such that the refractive index of the transparent flat plate 3 is n, and has the relationship of the following formula (2). Sin^, = η · sin^2 (2) In Fig. 2, the reflection images a and b of the reflection point groups A and B are separated, that is, the reflection images of the reflection by the back surface M2 are not The condition that coincides with each point of the reflection image a reflected by the front side mi is g> 〇e will be described in the relationship of Fig. 3 so that the length p of each point is smaller than the distance Q (p < Q) In a manner, the positional relationship of the transparent plate 3, the pattern member 4, and the camera 2 and the size of each point of the pattern X of 156954.doc 201144751 are determined. For example, when the length p of each point is adjusted, it may be set so as to satisfy the following formula (3). P < 2t · cos^j · tan^2 (3) Further, the pattern X is not limited to a point, and the length P in the direction orthogonal to the direction in which the pattern extends is appropriately set within a range satisfying the above conditions. . Fig. 4 is a view showing the relationship between the reflection point group eight and the shape of the front surface of the transparent flat plate 3, and shows the positional relationship of each constituent element in the figure from the lateral direction (X direction). A method of determining the shape of the front surface M1 of the transparent flat plate 3 based on the image G will be described with reference to Figs. 2 and 4 . In Fig. 4, the 'reflection point group A exists on the front surface mi of the transparent plate 3, and its position (the position in the left-right direction in the figure) can be based on the reflection image a of the reflection point group A in the image G (Fig. 2). The position (the position in the y direction in Fig. 2) is known. That is, when a certain image G including the reflection image a is obtained, since the reflection point group A on the front surface M1 of the transparent flat plate 3 exists in the direction of the reflection image a from the camera 2 facing the image G (Fig. On the straight line LA) of 4, the position where the line of sight (line LA) intersects the front surface M1 of the transparent flat plate 3 is the position of the reflection point group A on the front surface M1 of the transparent flat plate 3. When the height Η from a certain reference surface μ (ground surface, etc.) to the front surface M1 of the transparent flat plate 3 is fixed, the position of the reflection point group 上 on the front surface M1 of the transparent flat plate 3 can be determined. Further, as shown in FIG. 2, the reflection image group b of the reflection point group A of the reflection point group A and the reflection point group B of the back surface M2 of the transparent plate 3 in the front surface M1 of the transparent flat plate 3 in the image G As described above, according to the positional relationship of the constituent elements of the 156954.doc 201144751 shown in Fig. 1, the upper side of the two lines in the image G (the negative side of the y-axis in Fig. 2) is a line. Reflects the line corresponding to a. Further, if the position of the reflection point group A on the front surface M1 of the transparent flat plate 3 is determined as described above, the positional relationship between the pattern χ, the camera 2, and the reflection point group a in FIG. 4 can be obtained as follows. The shape of the portion of the reflection point group A in the front surface M1 of the transparent flat plate 3 is obtained. That is, as shown in Fig. 4, light emitted from the pattern of the pattern member 4 (indicated by a straight line LC) is reflected on the front surface M1 of the transparent flat plate 3 by the position of the reflection point group a, and is incident toward the camera 2. The optical path of the reflected light is a straight line la ^. If the position of the reflection point group A on the front surface M1 of the transparent flat plate 3 is determined, the incident light LC and the reflected light LA are determined, and further, according to the position of the reflection point group eight. The incident angle 0 of the incident light LC is equal to the reflection angle 0 of the reflected light LA reflected from the position of the reflection point group a, and the reflection surface S1 at the position of the reflection point group a is determined. The reflecting surface S1 is a minute plane constituting the front surface M1 of the transparent flat plate at the position of the reflecting point group A. In other words, the partial front surface of the transparent flat plate 3 at the position of the reflection point group 8 has the same inclination angle as the reflection surface si of Fig. 4. In this manner, the shape (inclination angle) of the front surface M1 of the transparent flat plate 3 is obtained for the position of the reflection point group A. The same points are applied to the respective points in the reflection image 3 of the reflection point group A of Fig. 2, whereby the shape of the front surface M1 of the transparent flat plate 3 at the position of each point on the reflection point group A can be obtained. Further, by continuously performing the same processing as the transparent flat plate 3 in the y direction, the shape of the front surface Mig of the transparent flat plate 3 can be obtained. 156954.doc -10- 201144751 is a view showing the configuration of a shape measuring device for performing the measurement method of the front shape of the transparent flat plate. The shape measuring device of Fig. 5 includes an imaging unit 11 and a computer 10. The imaging is the camera 2 shown in Figs. 1 and 4 described above. The computer includes an image acquisition 4 12, a front reflection point group estimation unit 13, a tilt angle calculation unit μ, a positive shape decision unit 15, and a memory unit. Further, each of the computers 12 to 15 other than the memory unit 6 is executed by a CPU (Central Processing Unit) 6 to recall R〇M (Read Only Memory). The specific computer program in which to implement its various functions. The image acquisition unit 12 acquires the image G from the imaging unit ( (the image image ^ may be one sheet, or a plurality of images G that are continuously imaged together with the transport of the transparent flat panel 3 may be used. The image G is imaged, and the shape of the front surface M1 of the transparent flat plate 3 in a certain section parallel to the X-axis (Fig. 1) can be obtained by the processing of each part described below. Further, a continuous plurality of pictures are used. The front side shape in the range in which the front surface M1 of the transparent flat plate 3 is enlarged can be obtained as the case of "defective". The front reflection point group estimating unit 13 detects the transparent flat plate included in the image G based on the image G. Specifically, the front side reflection point group estimation unit 13 first detects a reflection image from the image G using a well-known image processing method such as image recognition processing. a and the reflection image b (two lines). As described above, it is known that which one of the two lines is the reflection image a ° s rest portion 16 according to the positional relationship of the transparent plate 3, the pattern member 4, and the camera 2. The memory has a message indicating which one is known to reflect the image of a. Using the information, the shot group estimation unit 13 detects the reflection image a from the two lines of the reflection image a and the reflection image b detected by the above-mentioned 156954.doc 201144751. The inclination angle calculation unit 14 is based on the reflection detected based on the image G. The angle of inclination of the front surface M1 of the transparent flat plate 3 at the position of the reflection point group A on the front surface M1 of the transparent plate 3 is calculated as a. The specific calculation procedure is as follows. First, the inclination angle calculation unit 14 obtains a map of the reflection image a. The vertical direction (y-direction) position in G. Then, the tilt angle calculation unit 14 obtains the position of the reflection point group A existing on the front surface M1 of the transparent flat plate 3 based on the vertical position. The position of the point group A may be calculated by geometrically calculating the position where the straight line LA of FIG. 4 intersects the front surface M1 of the transparent flat plate 3 as described above, or may be based on the relative arrangement of the camera 2 and the transparent flat plate 3 in advance. The correspondence between the longitudinal position in the image G and the position on the front surface M1 of the transparent flat plate 3 is tabulated' and the table is used, and the position on the front surface M1 of the transparent flat plate 3 is obtained from the longitudinal position in the image G. Above The information relating to the arrangement of the camera 2 or the like necessary for the calculation of the learning or the above-described table is stored in the storage unit 16, and the inclination angle calculation unit 14 performs the above-described processing using the above. Next, the 'tilt angle calculation unit 14 finds the above. The optical path of the incident light LC from the pattern X and the reflected light LA to the camera 2 at the position of the reflection point group a on the front surface M1 of the transparent flat plate 3 obtained as described above (see FIG. 4). The angle calculation unit 14 obtains the reflection surface S1 (the incident angle of the incident light LC = the reflection surface of the reflection angle LAi of the reflected light LC) in which the incident light LC is reflected in the direction of the reflected light LA (see FIG. 4) Find the angle of inclination of the reflecting surface s丨. The inclination angle is the inclination angle of the front surface M1 of the transparent flat plate 3 at the position of the reflection point group A on the front surface M1 of the transparent flat plate 3, and is the calculation result of the inclination angle 156954.doc • 12-201144751 degree calculation unit 14. Here, in order to obtain the incident light, the reflected light LA, and the reflecting surface S1, respectively, the geometrical calculation may be performed using the positional relationship of each constituent element shown in Fig. 4 . X ' may also be based on the relative arrangement between the camera 2, the transparent plate 3 and the pattern member 4 (pattern 预先) in advance, and the position of the reflection point on the front surface M1 of the transparent plate 3 and the reflection surface are inclined. The corresponding relationship is tabulated, and each of the tables is obtained by using the table. The information related to the arrangement of the camera 2 or the like necessary for the calculation of the above geometry or the table is stored in the memory unit 16 and the tilt angle is calculated. The processing unit 14 performs the above-described processing on each point of the reflection point group A (for example, a reflection point corresponding to all points constituting the pattern X). The front shape determination unit performs the above-described processing order. The shape of the front surface M1 of the transparent flat plate 3 is determined based on the inclination angle of the front surface M1 of the transparent flat plate 3 obtained by the tilt angle calculating unit 14. Only one image g obtained by the image obtaining unit 12 is used. In the case of the case, the shape of the front surface M1 of the transparent flat plate 3 in the cross section of one of the X-axis (Fig. 1) is determined. Further, the plurality of images G successively imaged together with the transport of the transparent flat plate 3 are used. situation In the case of determining the shape of a certain extent of the front side Μ1 of the transparent plate 3, for example, the glass ribbon 204 shown in Fig. 10 can be monitored by continuously performing the shape measurement continuously throughout the length direction of the glass ribbon. (Second Embodiment) The second embodiment of the present invention will be described below with reference to the drawings. Further, the second embodiment and the first embodiment are described in addition to the following descriptions. The embodiment is the same. Fig. 0 is a view showing a pattern provided on the pattern member 4| and an image G' imaged by the camera 2. The pattern member 4' has a plurality of dots in one direction (left-right direction in the drawing) Three lines of patterns χ(1), χ(2), χ(3) are arranged in a straight line. If such a pattern member 4' is used, each pattern of the front surface M1 of the transparent flat plate 3 appears in the image G ( X(2) X(3) The reflection images a(l), a(2), a(3) of the reflection point group A and the back surface M2i of the transparent plate 3 are χ(", χ(2), Χ(3) The total reflection images b〇), b(2), and b(3) of the respective reflection point groups 8 are six lines. By appropriately setting the interval of the pattern χ(1), χ(2), and χ(3) of three lines, each reflection image can be separated in the image G'. Further, similarly to the third embodiment, it is possible to know which one of the six lines is a specific pattern based on the positional relationship of each constituent element shown in FIG. 1 (for example, the reflection of the front surface M1 of the transparent plate 3 of the pattern) According to this configuration, even if, for example, dust is attached to the front surface M1 of the transparent flat plate 3 or the like, a certain reflection image in the image G' is not clear, and the transparent flat plate 3 can be measured by using other clear reflection images. (Fourth Embodiment) The third embodiment of the present invention will be described below with reference to the drawings. The third embodiment is the same as the first embodiment except for the following description. In the third embodiment, the height Η from the reference surface M to the front surface (4) of the transparent flat plate 3 is known. However, in the third embodiment, even if the height 正面 of the front surface M1 of the transparent flat plate 3 is unknown, the front surface of the transparent flat plate 3 can be measured. Shape of μι 0 156954.doc 201144751 Figure 7 is a diagram showing the pattern of the pattern member 4" and the image G" imaged by the camera 2. The pattern member 4" contains a plurality of points in one direction (in the figure) In the right direction), the pattern X arranged in a straight line and the mark XM disposed in the vicinity of the point xs constituting the pattern. If such a pattern member 4n is used, the transparent plate 3 can be obtained in the image. In addition to the reflection images a and b of the reflection point group A and the reflection point group B of the front surface M1 and the back surface M2, the reflection image of the mark XM can be obtained. In the present embodiment, the reflection of the mark XM and the point XS is used. The height Η of the front surface M1 of the transparent flat plate 3 is obtained. When the height Η of the front surface M1 of the transparent flat plate 3 is obtained, the reflection image of the pattern X can be obtained in the same manner as in the first embodiment. The shape of the front surface M1 of the transparent flat plate 3. Hereinafter, a method of obtaining the height Η of the front surface M1 of the transparent flat plate 3 by using the reflection image of the mark xm and the point xs will be described with reference to Fig. 8 and Fig. 9. First, attention is paid to the point XS. The light emitted from the pattern member 4 (refer to FIG. 8) is reflected by the front surface M1 of the transparent flat plate 3 to form an image G, and the internal reflection image AS (refer to FIG. 7). At this time, due to the transparent flat plate 3 The height of the front side M1 is unknown. Therefore, the front side of the transparent plate 3 is on the M1. The actual reflection point is not uniquely determined (the reflection point is observed from the camera 2 and is located somewhere above the line in the direction of the reflection image AS in the image G"). In Fig. 8, 'the height is different. The candidate points are Al (〇, Al(2), Αι(3). The heights of each of the reflection point groups a!(1), A丨(2), and A丨(3) are set to H2, HKWHs, respectively. 156954.doc •15- 201144751 Here, in the case of the reflection point group A](l) of the assumed height H, the (supposed) tangent plane of the transparent plate 3 in the reflection point group AJ1) should be The inclination angle θ 1 (1) is equal to the reflection surface s 使 which is emitted from the point xS on the pattern member 4" and is incident on the reflection point group Ai(1) in the direction of the line 2 to the camera 2. It is assumed that the respective tangent planes of the transparent flat plates 3 of the reflection points in the case of the reflection point group Ai (2) or A (3) have the same reflection surfaces S2 and S3 corresponding to the respective ones. Equal inclination angles 9丨(2), Θ丨(3). At this time, the higher the reflection point (ie, Al(2) is higher than ΑΚ1), and then Αι(3) is higher than Α丨(2)) from the point on the pattern member 4" xs to the respective reflection surfaces Si, S2, ^ The smaller the incident angle is, the relationship between 0, (1)^, (2)^, and (3) is established (here, the tilt angle is set to the negative direction of the x-axis and the orientation of each reflective surface as shown in the figure. The angle formed by the normal of the upper middle side is defined). This relationship is represented as a curve ^ in the graph of Fig. 9. Thus, the tilt angle 01 (11) is a function of the height Ηη of the reflection point. However, as described above, it is not possible to uniquely determine which point on the curve C! corresponds to the true reflection point. Second, look at the mark ΧΜ. Similarly to the point xs, the reflection point on the front surface M1 of the transparent flat plate 3 reflected from the mark χμ on the pattern member 4" toward the camera 2 is observed from the camera 2 and exists in the orientation image G·· The reflection inside is somewhere on the line LM in the direction of AM (not uniquely determined). And said 'second' focuses on the above-mentioned (assumed) candidate planes (reflective surfaces Si, S2, S3, ...) and the straight line LM through the candidates of the above-mentioned respective reflection points, Al(i), eight (6), and eight-hearts. Intersection points intersection group 8 2 (1), A2 (2), A2 (3), · ". Since the point xs and the mark XM are 156954.doc -16- 201144751 points adjacent to the pattern member 4··, the point group A!(η) and the corresponding point group A2(n) are also adjacent points. (n=l, 2, ...). Here, the change in the shape of the front surface M1 of the transparent flat plate 3 is sufficiently relaxed. As a result, in the two points adjacent to each other on the front surface M1 of the transparent flat plate 3, the respective cut planes passing through the respective two points can be regarded as the same plane. Therefore, if a certain point group Ai(k) in the candidate of the reflection point is a true reflection point on the front surface M1 of the transparent plate 3, then a tangent plane of the transparent plate 3 passing through the point group AJk (reflection surface Sk) The point group A2(k) above is also the point on the front side of the transparent plate 3. Then, if the point group A2(k) is used as a reflection point and the reflection surface S〆 of the light from the mark member XM on the pattern member 4 is reflected in the direction of the camera 2 in the direction of the camera 2, it is known that the reflection surface ( That is, the tangent plane of the transparent plate 3 in the point group A^k) and the tangent plane (reflection surface 8) of the transparent plate 3 in the point group A (k) are 〇" and the inclination angle 02(k) thereof should be Equal to the tilt angle 0i(k). In Fig. 8, the point group A (2) is the state of the real reflection point on the front surface M1 of the transparent plate 3. On the other hand, regarding the point group AJj) which is not the real reflection point on the front surface M1 of the transparent flat plate 3 (where 'j#k ' corresponds to the point group a! (1) and Αι(3) in Fig. 8), The point group A/j existing on the tangent plane (reflection surface Sj) of the transparent plate 3 passing through the point group (1) (which is assumed to be) is not the point on the front surface M1 of the transparent plate 3 and is at the point group In Adj), the inclination angle 92(j) of the reflection surface which reflects the light from the mark XM on the pattern member 4' toward the camera 2 in the direction of the straight line LM is different from the inclination angle θ"). Therefore, 'for the reflection point candidate corresponding to the point XS, 156954.doc -17- 201144751 A! (2), A! (3), ... (assumed) each of the tangent planes (reflection surface Si, S2 S3, ...) and each of the above-mentioned intersection groups A2(l), A2(2), A2(3), ... of the straight line LM determined by the mark XM, respectively (assuming) the tangent plane (reflection surface S, , S2, S3, ..., the inclination angles θ2 (1), θ2 (2), θ2 (3), ..., and if the reflection point candidate Al (k) is found, then the reflection point group A (k) is the true reflection point, thereby obtaining the inclination angle h(k) and the height Hk in the reflection point. In the graph of Fig. 9, in addition to the above-described curve ^, the inclination angle θ2 (η) indicating the height H, n of each of the intersection groups A2(n) and the tangent plane in each intersection group A2(n) is also indicated. Curve c2 of the relationship). In the graph, the point group A 丨 (2) whose value of ejn) is equal to the value of θ 2 (η) is the true reflection point on the front surface M1 of the transparent plate 3. As described above, since the height H = Hk of the front surface mi of the transparent flat plate 3 is obtained, the shape of the front surface M1 of the transparent flat plate 3 can be obtained by the height Η in the same manner as in the first embodiment. (Fourth Embodiment) Hereinafter, an application example of the present invention on a production line of a glass sheet will be described. Fig. 10 is a schematic explanatory view showing a production line of a glass plate to which the shape measuring device shown in Fig. 5 is applied. The manufacturing method of the glass plate on the production line shown in FIG. 10 includes: melting the glass raw material to obtain molten glass; forming step 35' which forms the molten glass into a continuous plate-shaped glass ribbon; slow cooling step , the surface of the glass is moved to the surface to gradually cool; the pure 敎 (four), the front shape of the 敎 belt; the cutting step 'the cutting surface; and (4) (four), based on the above determination step 156954.doc • 18· The front surface shape of the glass ribbon obtained in the step 201144751 controls the slow cooling condition in the slow cooling step. The step of the method for producing the glass sheet is shown in Fig. u. Specifically, in the manufacturing step of the glass sheet, When the information on the front shape of the glass ribbon obtained by the shape measuring method of the present invention is judged to be large in the case where the warpage of the glass ribbon is large, the slow cooling condition in the slow cooling step is changed in consideration of the size and position of the warpage. For example, the cooling rate condition and the cooling temperature condition can thereby prevent the shape defect caused by the curl # or the breakage caused by the warpage, and the glass sheet can be manufactured with good yield. In the molding step, there are various methods such as a float method, a flattening method, a down-draw method, and a melting method, and any one of these methods or other methods can be suitably used in the present invention. In the example of Fig. 1G, the float is used. The case of the formula method is described as an example. In the melting step (""", the raw materials such as strontium sand, limestone, and caustic soda are blended with the composition of the glazed product, and the resulting materials are mixed. The amount is put into a melting furnace, and is heated to a temperature of about 1400 C or more depending on the type of glass to be melted to obtain molten glass. For example, one person is fed from one end of the melting furnace into the melting furnace, and a flame obtained by burning heavy oil or a gas obtained by mixing and burning natural gas with air is sprayed on the primary charge amount, and heated to about The molten material is obtained by melting the primary charge amount at a temperature of 1550-C or more. Further, molten glass can be obtained by using an electric melting furnace. In the y step (S2 of FIG. 11), the molten glass obtained in the melting step is introduced from the downstream portion 201 of the melting furnace to the molten tin bath 2〇3, and the molten glass is floated on the molten tin 202. In the figure, the conveying direction travels, thereby forming a continuous plate-shaped glass ribbon 204 (corresponding to the transparent flat plate 3). At this time, it is 156954.doc -19- 201144751 Forming a specific thickness of the glass ribbon 2〇4 On the other hand, the rotating roller (top roller 2〇5) is pressed to both side portions of the glass ribbon 204, and the glass ribbon 2〇4 is stretched outward in the width direction (the direction perpendicular to the conveying direction). In the slow cooling step (S3 of Fig. 11), the formed glass ribbon 204 is pulled out from the molten tin bath 2〇3 by the lifting rolls 2〇8, and the glass ribbon 204 is made using the metal roll 2〇9. Moving in the conveying direction of the slow cooling furnace 210 in the drawing direction, the temperature of the glass ribbon 204 is gradually cooled, and then it is cooled after being removed from the slow cooling furnace 21〇 to the cutting step until it is close to the normal temperature. . The slow cooling furnace 210 includes means for supplying the combustion gas or the heat controlled by the electric heater for slow cooling at a necessary position in the furnace. The temperature of the glass ribbon 2〇4 at the stage after the slow cooling furnace 210 is removed becomes the temperature below the strain point of the glass ribbon 2〇4, and although it depends on the type of the glass, it is usually cooled to 150 to 25 CTC. This slow cooling step is carried out for the purpose of removing the residual stress inside the glass ribbon 204 and lowering the temperature of the glass ribbon 2〇4. In the slow cooling step, the glass ribbon 2〇4 passes through the measuring unit 211 (corresponding to the shape measuring device of Fig. 5), and is then conveyed to the glass ribbon cutting unit 2丨2 in the glass ribbon cutting portion 212. The glass ribbon 204 is cut until it is close to normal temperature (cutting step). Further, the temperature of the glass ribbon in the glass ribbon cutting portion 2丨2 is usually the ambient temperature of the place to 5 〇. The photographing position of the glass ribbon 204 in the measuring step (S4 of FIG. 11) (that is, the position of the measuring portion 211) is the position at which the temperature of the frit ribbon 2〇4 is below the strain point of the glass. 2丨 is set at a position from the glass ribbon outlet of the slow cooling furnace 210 to the downstream of the conveying direction. Further, it is preferably disposed at a position where the temperature of the glass ribbon 204 is 2 〇〇 ° or less. Further, the measuring unit 156954.doc -20- 201144751 211 may also be set before the cutting step is to be carried out, but the information obtained from the measuring step is reflected to the case of cutting the main cutting step, although it depends on The moving speed of the glass ribbon is 2〇4, but it is preferable to provide the measuring unit at a position separated by 3 〇 Cm or more from the cutting position, in particular, at a position of lm or more.

於控制步驟(圖11之S5)中,其私A P )τ 基於在測定步驟中所獲得之 玻璃帶204之正面形狀,利用運糞 巧逆异绫冷爐210内之緩冷條件 的控制機構(省略圖示)。藉由兮批 ;楮田》亥控制機構,根據傳送至緩 冷爐210之緩冷條件之指令,變 日7 文更-又置於緩冷爐210内之燃 燒氣體或電加熱器等之條件。蕤舲 r 猎此可進行如下控制:改 變對玻璃帶204部分賦予之能吾、 刀呵丁之此量、或賦予之能量的速度, 從而抑制龜曲等變形。 以上’參照圖式對本發明之實施形態進行了詳細敍述, 但具體之構成並不限定於該實施形態,亦包含不脫離本發 明之主旨之範圍的設計等。 已詳細地且參照特定之實施態樣對本發明進行了說明, 但業者應當明白只要不脫離本發明之精神及範圍則可添加 各種變更·或修正。 本申請案係基於2010年6月15曰申請之曰本專利申請案 (曰本專利特願201〇_13651〇)者,其内容以參照之形式併入 本文中。 【圖式簡單說明】 圖1係表示第1實施形態之透明平板之正面形狀之測定方 法的圖。 圖2係表示第1實施形態之藉由相機2進行攝像之圖像〇之 J 56954.doc •21- 201144751 一例之圖。 圖3係表示自相機2對透明平板3進行攝像之情形之光線 路徑之圖。 圖4係表示第1實施形態之反射點群A與透明平板3之正面 M1之形狀之關係的圖。 圖5係表示第1實施形態之用以實施透明平板之正面形狀 之測定方法的形狀測定裝置之構成之圖。 圖6係表示第2實施形態之設置於圖案構件4,中之圖案及 藉由相機2進行攝像之圖像G,之圖。 圖7係表示第3實施形態之設置於圖案構件4,,中之圖案及 藉由相機2進行攝像之圖像G"之圖。 圖8係表示第3實施形態之求出透明平板3正面之高度η之 方法之圖。 圖9係表示第3實施形態之求出透明平板3正面之高度η之 方法之圖。 圖10係應用形狀測定裝置之玻璃板之生產線之概略說明 圖。 圖11係表示玻璃板之製造方法之步驟之流程圖。 【主要元件符號說明】 2 相機 3 透明平板 4 ' 4, ' 4" 圖案構件 10 電腦 11 攝像部 156954.doc 22 201144751In the control step (S5 of FIG. 11), the private AP) τ is based on the front shape of the glass ribbon 204 obtained in the measuring step, and utilizes the control mechanism of the slow cooling condition in the smelting furnace 210 ( Omit the illustration). According to the instructions of the slow cooling conditions transmitted to the slow cooling furnace 210, the conditions of the combustion gas or the electric heater placed in the slow cooling furnace 210 are also adopted. .蕤舲 r Hunting can be controlled by changing the amount of energy imparted to the glass ribbon 204, or the amount of energy imparted thereto, thereby suppressing deformation such as tortoise. The embodiment of the present invention has been described in detail above with reference to the drawings. However, the specific configuration is not limited to the embodiment, and includes designs and the like that do not depart from the gist of the present invention. The present invention has been described in detail with reference to the specific embodiments thereof, and it is understood that various changes and modifications may be added without departing from the spirit and scope of the invention. The present application is based on a patent application filed on Jun. 15, 2010, the entire disclosure of which is hereby incorporated by reference. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a method of measuring the front shape of a transparent flat plate according to the first embodiment. Fig. 2 is a view showing an example of an image captured by the camera 2 in the first embodiment, J 56954.doc • 21-201144751. Fig. 3 is a view showing a ray path from the case where the camera 2 images the transparent flat plate 3. Fig. 4 is a view showing the relationship between the reflection point group A of the first embodiment and the shape of the front surface M1 of the transparent flat plate 3. Fig. 5 is a view showing the configuration of a shape measuring device for measuring a front shape of a transparent flat plate according to the first embodiment. Fig. 6 is a view showing a pattern provided in the pattern member 4 and an image G imaged by the camera 2 in the second embodiment. Fig. 7 is a view showing an image G" which is provided in the pattern member 4 in the third embodiment and which is imaged by the camera 2. Fig. 8 is a view showing a method of obtaining the height η of the front surface of the transparent flat plate 3 in the third embodiment. Fig. 9 is a view showing a method of obtaining the height η of the front surface of the transparent flat plate 3 in the third embodiment. Fig. 10 is a schematic explanatory view showing a production line of a glass plate to which a shape measuring device is applied. Figure 11 is a flow chart showing the steps of a method of manufacturing a glass sheet. [Main component symbol description] 2 Camera 3 Transparent plate 4 ' 4, ' 4" Pattern member 10 Computer 11 Camera unit 156954.doc 22 201144751

12 13 14 15 16 201 202 203 204 205 208 209 210 211 212 A a(l) 、 a(2) 、 a(3) A,(l)、A】(2)、AK3) A2(l)、A2(2)、A2(3)12 13 14 15 16 201 202 203 204 205 208 209 210 211 212 A a(l) , a(2) , a(3) A, (l), A] (2), AK3) A2(l), A2 (2), A2 (3)

AM、ASAM, AS

B 圖像取得部 正面反射點群推斷部 傾斜角度運算部 正面形狀決定部 記憶部 溶融爐下游部 炫融錫 溶融錫浴 玻璃帶 頂輥 提昇輥 金屬幸昆 緩冷爐 測定部 玻璃帶切割部 透明平板3之正面Ml之圖案X 之反射點群 圖像内之反射點群A之反射像 反射點群A的反射像 反射點群B Image acquisition unit front reflection point group estimation unit inclination angle calculation unit front shape determination unit memory unit melting furnace downstream part smelting tin molten tin bath glass top roll lifting roller metal Xingkun slow cooling furnace measurement section glass strip cutting part transparent The reflection of the reflection point group A in the reflection point group image of the pattern M of the front surface of the flat plate 3 is the reflection image reflection point group of the reflection point group A

反射面S!、S2、S3與直線LM 相交之交點群 反射像The intersection of the reflecting surfaces S!, S2, S3 and the straight line LM

透明平板3之背面M2之圖案X 156954.doc -23- 201144751 之反射點群 b 圖像内之反射點群B之反射像 b(l)、b(2)、b(3) 反射點群B的反射像 c, > C2 曲線 G ' G' ' G" 圖像 Η、H丨、H2、H3、H!,、 高度 、H3丨、Hn LA 反射光 LC 入射光 LM、LS 直線 LX 相機2之視線 LY、LZ 光線路徑 M 基準面 Ml 透明平板3之正面 M2 透明平板3之背面 P 與圖案X之延伸方向正交之方 向之各點的長度 Q 距離 R 相機2之攝像區域 SI、S2、S,、S2、S3、 反射面 S"、S2'、S3' t 透明平板3之厚度 X、X(l)、X(2)、X(3) 圖案 x、y、z 方向 156954.doc -24- 201144751 Χι、x2、x3、xs 點 XM 標記 0,(1) > 0,(2) ^ 0,(3) ^ 傾斜角 θ2(1) 、 θ2(2) 、 θ2(3) Φ\ 入射角 Φ 1 折射角 25- 156954.docThe pattern of the back surface M2 of the transparent plate 3 X 156954.doc -23- 201144751 The reflection point group b The reflection image of the reflection point group B in the image b(l), b(2), b(3) Reflection point group B Reflections like c, > C2 Curve G ' G' ' G" Image Η, H丨, H2, H3, H!, Height, H3丨, Hn LA Reflected light LC Incident light LM, LS Straight line LX Camera 2 Sight line LY, LZ ray path M reference plane Ml Front side of transparent plate 3 M2 Back side of transparent plate 3 Length of each point in the direction orthogonal to the direction in which pattern X extends. Distance R Camera area SI, S2 of camera 2 S, S2, S3, reflective surface S", S2', S3' t thickness of transparent plate 3 X, X (l), X (2), X (3) pattern x, y, z direction 156954.doc - 24- 201144751 Χι,x2,x3,xs point XM mark 0,(1) > 0,(2) ^ 0,(3) ^ tilt angle θ2(1) , θ2(2) , θ2(3) Φ\ Angle of incidence Φ 1 angle of refraction 25-156954.doc

Claims (1)

201144751 七、申請專利範圍: 1. 一種形狀測定裝置,其包括: 攝像部’其被配置成光轴與配置在作為測定對象之透 • 明平板之上方之直線性圖案之延伸方向成直角,且藉由 對上述透明平板之正面與背面之上述圖案之2個反射點 群進行攝像而生成包含在與上述延伸方向呈直角之方向 上分離之2個反射像的圖像; 正面反射點群推斷部,其利用上述透明平板、上述圖 案及上述攝像部之位置關係,根據上述圖像推斷上述透 明平板之正面上之上述圖案之正面反射點群; 傾斜角度運异部,其利用上述透明平板、上述圖案及 上述攝像部之位置關係,算出所推斷出之上述正面反射 點群之位置上之上述透明平板之正面之傾斜角度;以及 正面形狀決定部,其基於所算出之上述傾斜角度來決 定上述透明平板之正面之形狀。 2.如明求項1之形狀測定裝置,其中上述傾斜角度運算部 基於自上述圖案朝向上述正面反射點群之入射光之入射 角與自上述正面反射點群之位置朝向上述攝像部之反射 光<反射角相等的條件算出上述傾斜角度。 • 3.如請求項!或2之形狀载裝置,其中上述圖案係複數個 點於上述延伸方向上呈直線排列而成之圖案。 4.如請求項1至3中任一項之形狀測定裝置,其中上述透明 平板係沿與上述延伸方向呈直角之方向搬送。 5 _ 一種形狀測定方法,其包括如下步驟: 156954.doc 201144751 藉由被配置成光軸與配置在作為測定對象之透明平板 之上方之直線性圖案之延伸方向成直角之攝像部,對上 述透明平板之正面與背面之上述圖案之2個反射點群進 行攝像而生成包含在與上述延伸方向呈直角之方向上分 離之2個反射像的圖像; 利用上述透明平板、上述圖案及上述攝像部之位置關 係’根據上述圖像推斷上述透明平板之正面上之上述圖 案之正面反射點群; 利用上述透明平板、上述圖案及上述攝像部之位置關 係’算出所推斷出之上述正面反射點群之位置上之上述 透明平板之正面之傾斜角度;以及 基於所算出之上述傾斜角度來決定上述透明平板之正 面之形狀。 6. 如請求項5之形狀測定方法,其中上述算出傾斜角度之 步驟係基於自上述圖案朝向上述正面反射點群之入射光 之入射角與自上述正面反射點群之位置朝向上述攝像部 之反射光之反射角相等的條件而算出上述傾斜角度。 7. 如請求項5或6之形狀測定方法,其中上述圖案係複數個 點於上述延伸方向上呈直線排列而成之圖案。 8. 如請求項5至7中任一項之形狀測定方法,其中上述透明 平板係沿與上述延伸方向呈直角之方向搬送。 9. 一種玻璃板之製造方法,其包括: 熔融步驟’其將原材料熔融而獲得熔融玻璃; 成形步驟,其使上述熔融玻璃成形為板狀且連續之玻 156954.doc 201144751 璃帶; 緩冷步驟’其係-面搬送上述玻璃帶一面使其漸漸冷 卻並去除應力; 測定步驟,其測定上述玻璃帶之正面形狀 :以及 驟之洌定結果控制上述 切割步驟,其切割上述玻璃帶 控制步驟,其基於上述測定步 緩冷步驟中之緩冷條件;且 上述測定步驟係將上述玻璃帶作為測 請求項5 5 δ + 弋對象而使用如 至8中任一項之形狀測定方法進行測定之步驟。 156954.doc201144751 VII. Patent application scope: 1. A shape measuring device, comprising: an imaging unit configured to have an optical axis at right angles to an extending direction of a linear pattern disposed above a transparent flat plate as a measuring object, and An image of two reflection images separated in a direction perpendicular to the extending direction is generated by imaging two reflection point groups of the pattern on the front and back sides of the transparent flat plate; and the front reflection point group estimation unit And using the transparent plate, the pattern, and the positional relationship of the imaging unit, estimating a front reflection point group of the pattern on the front surface of the transparent flat plate based on the image; and using the transparent flat plate and the transparent plate a positional relationship between the pattern and the imaging unit, an inclination angle of a front surface of the transparent flat plate at a position of the estimated front reflection point group, and a front shape determination unit that determines the transparency based on the calculated inclination angle The shape of the front of the plate. 2. The shape measuring apparatus according to claim 1, wherein the tilt angle calculating unit is based on an incident angle of incident light from the pattern toward the front reflection point group and a reflected light from the position of the front reflection point group toward the imaging unit. <The angle of reflection is equal to the above angle of inclination. • 3. As requested! Or a shape-carrying device of 2, wherein the pattern is a pattern in which a plurality of dots are linearly arranged in the extending direction. 4. The shape measuring device according to any one of claims 1 to 3, wherein the transparent flat plate is conveyed in a direction perpendicular to the extending direction. 5 _ A shape measuring method comprising the following steps: 156954.doc 201144751 The transparent portion is disposed by an imaging unit disposed at an angle perpendicular to an extending direction of a linear pattern disposed above a transparent flat plate to be measured Imaging the two reflection point groups of the pattern on the front side and the back side of the flat plate to generate an image including two reflection images separated in a direction perpendicular to the extending direction; the transparent flat plate, the pattern, and the imaging unit a positional relationship 'inferring a front reflection point group of the pattern on the front surface of the transparent flat plate based on the image; and calculating the estimated front reflection point group by using the transparent plate, the pattern, and the positional relationship of the imaging unit a tilt angle of a front surface of the transparent flat plate at a position; and determining a shape of a front surface of the transparent flat plate based on the calculated tilt angle. 6. The method according to claim 5, wherein the step of calculating the tilt angle is based on an incident angle of incident light from the pattern toward the front reflection point group and a reflection from the position of the front reflection point group toward the imaging portion. The above inclination angle is calculated under the condition that the reflection angles of the lights are equal. 7. The method according to claim 5, wherein the pattern is a pattern in which a plurality of points are arranged in a straight line in the extending direction. 8. The shape measuring method according to any one of claims 5 to 7, wherein the transparent flat plate is conveyed in a direction at right angles to the extending direction. A method of producing a glass sheet, comprising: a melting step of: melting a raw material to obtain molten glass; and a forming step of forming the molten glass into a plate shape and continuous glass 156954.doc 201144751 glass ribbon; slow cooling step 'The surface-side conveys the glass ribbon to gradually cool and remove stress; the measuring step determines the front shape of the glass ribbon: and the result of the measurement determines the cutting step, which cuts the glass ribbon control step, The step of measuring the slow cooling in the step of the step of cooling is carried out; and the measuring step is a step of measuring the glass ribbon as the object of the measurement request 5 5 δ + 弋 using the shape measuring method according to any one of the above. 156954.doc
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