CN105006420A - Light irradiation apparatus and long-arc type discharge lamp - Google Patents
Light irradiation apparatus and long-arc type discharge lamp Download PDFInfo
- Publication number
- CN105006420A CN105006420A CN201510180914.5A CN201510180914A CN105006420A CN 105006420 A CN105006420 A CN 105006420A CN 201510180914 A CN201510180914 A CN 201510180914A CN 105006420 A CN105006420 A CN 105006420A
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- China
- Prior art keywords
- discharge lamp
- reflectance coating
- light irradiation
- arc discharge
- long arc
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- Vessels And Coating Films For Discharge Lamps (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
The invention provides a light irradiation apparatus, which comprises a long-arc type discharge lamp arranged in a housing, and a water-tank-shaped reflecting mirror arranged on the back side of the discharge lamp. In the discharge lamp, a belt-shaped reflecting film is formed on an approximate whole area, along a light emitting length, of an outer surface of a light emitting tube corresponding to a cooling air outlet of the housing. The light irradiation apparatus can enhance reflected light of a treated object towards the lower part of the lamp in the light reflected from the reflecting film. The illumination is improved, and efficient treatment is realized. The invention is characterized in that the reflecting film formed on the light emitting tube of the long-arc type discharge lamp is manufactured by stacking scale-like ceramic particles.
Description
Technical field
The present invention relates to the long arc discharge lamp that the light irradiation device with ultraviolet light source and this light irradiation device use.
Background technology
In the past, in press and electronics industry, use the long arc discharge lamp such as metal halide lamp as the ultraviolet light source of the photochemical reaction device used in the drying, hardening of resin process of ink and coating, or as the ultraviolet light source of the exposure device of use when exposing the crystal liquid substrate of semiconductor substrate and liquid crystal display.
Use the structure example of the light irradiation device of such long arc discharge lamp as open in Japanese Unexamined Patent Publication 2008-130302 publication (patent documentation 1), its structure as shown in Figure 5.
Light irradiation device 20 is configured with long arc discharge lamp 1 in housing 21, is also provided with the speculum 22 of the tank shape around this discharge lamp 1, is formed with the reflecting surface 23 be made up of dielectric multilayer film etc. at the inner surface of housing 21.
The open top 22a of described speculum 22 is corresponding with the cooling air exhaust outlet 24 being formed at housing 21 to be configured.Further, this speculum 22 is formed as can opening and closing, and when the normal ignition mode to handled thing irradiation ultraviolet radiation, its front surface opening 22b opens wide, and when changing the standby ignition mode of handled thing etc., speculum 22 rotates, and front surface opening 22b closes.In addition, in this standby ignition mode, from the viewpoint of energy-conservation, the input power of lamp is declined.
When normally lighting shown in Fig. 5, cooling air enters from the below of speculum 22, around lamp 1 by and cooled, discharged from open top 22a by exhaust outlet 24.
The long arc discharge lamp 1 used in such light irradiation device 20 is as shown in Fig. 6 (A) (B).
Be formed with sealing 3,3 at the both ends of the luminous tube 2 of long arc discharge lamp 1, in luminous tube 2, be configured with pair of electrodes 4,4.
In addition, be provided with lamp holder 5 in the rear end of described sealing 3, when this lamp 1 is assemblied in light irradiation device, this lamp holder 5 is installed in not shown lamp support component.
And, at the upper surface of luminous tube 2, be formed with reflectance coating 10 in its roughly whole region along length of illumination, the reflection of light upward in luminous tube 2 is irradiated the handled thing of below.
As the long arc discharge lamp 1 of said structure, such as, adopt the metal halide lamp being sealed with the metals such as mercury, iron, thallium in luminous tube 2, to radiate ultraviolet well.
In addition, as the reflectance coating 10 that the upper surface at such luminous tube 2 is formed, adopt as shown in Figure 7 by silicon dioxide (SiO
2), aluminium oxide (Al
2o
3) spherical particle 11 of ceramic-like that forms.
But as shown in Fig. 7 (B), there are the following problems for this spherical grain shape: enter the light of particle in granule interior scattered reflection, the reverberation that therefore angle of reflection increases can not arrive the shadow surface i.e. handled thing of below, and more light spreads and loses.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2008-130302 publication
Summary of the invention
The present invention is in view of the problem of above-mentioned prior art, a kind of light irradiation device is provided, comprise the speculum of the tank shape at the long arc discharge lamp be configured in housing and the back side being configured in this discharge lamp, in described discharge lamp, banded reflectance coating is formed in the roughly whole region along length of illumination of the luminous tube outer surface corresponding with the cooling air exhaust outlet being formed at described housing, described light irradiation device can increase by the reverberation towards the handled thing below lamp in the light of described reflecting film reflects, realize illumination to improve, to process efficiently.
In addition, the invention provides the long arc discharge lamp of following structure: in the long arc discharge lamp that described light irradiation device uses, by the reflectance coating formed at its outer surface, can effectively make reverberation handled thing downward.
In order to solve the problem, the feature of light irradiation device involved in the present invention is, lepidiod ceramic particle carries out stacked and formed by the reflectance coating that the luminous tube of long arc discharge lamp is formed.
In addition, the invention is characterized in, the lepidiod ceramic particle forming described reflectance coating is silicon dioxide (SiO
2) or aluminium oxide (Al
2o
3) in any one or its combination.
In addition, the invention is characterized in, the average diameter of described lepidiod ceramic particle is larger than the wavelength of the emergent light of described long arc discharge lamp.
In addition, the invention provides a kind of long arc discharge lamp, be made up of luminous tube and the reflectance coating of band shape that formed along the roughly whole region of length of illumination in a part for the outer surface of this luminous tube, the feature of described long arc discharge lamp is, lepidiod ceramic particle carries out stacked and formed by described reflectance coating.
In addition, the invention is characterized in, the average diameter forming the lepidiod ceramic particle of the described reflectance coating of described long arc discharge lamp is larger than the wavelength of the emergent light of described discharge lamp.
According to light irradiation device of the present invention, lepidiod ceramic particle carries out stacked and is formed by the reflectance coating of long arc discharge lamp, there is diffuse reflection hardly in the light therefore arriving reflectance coating from lamp luminous tube inside, composition towards shadow surface direction increases, and improves significantly the illumination of handled thing.
In addition, the average diameter of lepidiod ceramic particle is larger than the wavelength from the emergent light of lamp, therefore, it is possible to obtain the stronger reflectance coating of normal reflection.
Accompanying drawing explanation
Fig. 1 is the major part cutaway view (A) of the long arc discharge lamp that light irradiation device of the present invention uses and the schematic diagram (B) of lepidiod ceramic particle.
Fig. 2 is the enlarged drawing of reflectance coating.
Fig. 3 is the synoptic diagram of the experiment of verification the verifying results.
Fig. 4 is the curve chart of the experimental result representing effect.
Fig. 5 is the skeleton diagram of light irradiation device.
Fig. 6 is cutaway view (A) and the sectional elevation (B) thereof of long arc discharge lamp in the past.
Fig. 7 is cutaway view (A) and the enlarged drawing (B) thereof of the reflectance coating represented in the past.
Embodiment
Fig. 1 is the cutaway view of the reflectance coating of the major part representing the long arc discharge lamp used as light irradiation device of the present invention.Reflectance coating 10 is by silicon dioxide (SiO
2), aluminium oxide (Al
2o
3) etc. ceramic particle 12 form, its shape is flakey.
One such as shown in Fig. 1 (B) of lepidiod shape, the average diameter D of planar part represents with (major diameter+minor axis)/2, preferred D=0.5 ~ 10 μm.In addition, preferably its thickness T=0.001 ~ 0.05 μm, and asperratio: more than D/T=10.
The thickness T of particle if in above-mentioned scope, then forms fine and closely woven film, therefore when being arranged at the outer surface of luminous tube as reflectance coating, becomes the gas barrier layer suppressing gas to enter from outside.And, the top of luminous tube is in the state of high temperature when lamp is lighted, therefore when the moisture being adsorbed in luminous tube is in luminous tube diffusion inside and when entering discharge space, the main cause lighting penalty and tungsten electrode melting etc. will be become, but owing to being formed with fine and closely woven film, therefore water adsorption is on the surface of reflectance coating, and moisture can be suppressed to enter bulb from the outer surface of luminous tube.
In addition, when average diameter D is less than the wavelength of light, incident light illustrates and the character of the Rayleigh scattering of roughly isotropically scattering even if therefore the shape of particle is scale shape, also cannot obtain the stronger reflection characteristic of normal reflection.In order to strengthen normal reflection, the scale shape that preferred average diameter D is longer than the wavelength of light.Such as, relative to the light of wavelength 365nm, average diameter D is more than 500nm.
In addition, about the shape of particle, preferred thickness T-phase is more than 10:1 for the ratio (asperratio) of average diameter D.
The thickness of the reflectance coating 10 be made up of such flakey ceramic particle 12 is preferably more than 20 μm.If the thickness of reflectance coating is more than 20 μm and the thickness t of flakey ceramic particle is 0.001 ~ 0.05 μm, then in reflectance coating, there is the boundary face of about 1000 ceramic particles.The surface (boundary face) being reflected in each flakey ceramic particle of light produces, therefore, it is possible to guarantee enough reflectivity.
So, if the thickness of reflectance coating is more than 20 μm, then can realizes being suitable for illumination of the present invention and promote, but when thickness is blocked up, when being applied with heat when lamp is lighted etc., crack at film sometimes, therefore preference is as being less than 200 μm.
Below, the manufacture method of the reflectance coating be made up of lepidiod silica dioxide granule is described.
About the manufacture method of the ceramic particle of the silicon dioxide as reflectance coating etc., there is multiple method for making, for the manufacture method of chemical synthesis (damp process), the concentration of ceramic sol, the temperature that are dispersed with nano level ceramic particle are controlled, and makes ceramic particle condense and form the larger ceramic particle of particle diameter.By changing condition during this cohesion, can grain shape be controlled, can generate according to object the globular ceramic particle and flakey ceramic particle of the present invention that used in the past.
In addition, the silicon dioxide gel making to be dispersed with equally in a liquid nano level ceramic particle comparatively unfertile land extends and sinters, and ceramic particle also can be made to be bonded to each other and to form the ceramic membrane as vapor-deposited film.By by this film crushing, also flakey ceramic particle can be obtained.
If flakey pottery (the such as flakey silicon dioxide) Granular composite made in the above described manner in water, then can be obtained silica slurry.
By the various painting methods based on dipping, injection etc., silica slurry is coated in the luminous tube part needing to carry out reflecting, and dry lentamente, can as Fig. 1 (A) be shown in luminous tube face and form the lepidiod silicon dioxide film be laminated substantially in parallel.
Thus, as shown in Figure 2, can be formed and make the light of Self-luminous tube that diffuse reflection does not occur and almost all by normal reflection and towards the stronger reflectance coating 10 of the normal reflection of shadow surface (handled thing).
Below, the experiment for verifying effect of the present invention has been carried out.
< lamp specification >
Luminous tube: internal diameter 22mm, external diameter 26mm, length of illumination (interelectrode distance) 250mm
Enclosure: mercury 58mg, mercuric iodixde 2.5mg, argon gas 1kPa
Reflectance coating: width 10mm, thickness 50 μm, length 250mm
Material: flakey silicon dioxide microparticle (the present invention), spherical silicon dioxide particulate (conventional example)
In addition, also made and there is no the lamp of reflectance coating as further comparative example lamp.
Under natural air cooled environment, these lamps are lighted with 2000W, as shown in Figure 3, the lower surface in the opposition side with reflectance coating 10 and lamp outer surface arrange shadow surface (region) at a distance of the position of 170mm, and determine the illumination of each point in the direction (Y-axis) orthogonal with lamp axle.Illuminance meter uses UIT-250, S365.
Its result as shown in Figure 4.The known comparative example lamp () relative to not having reflectance coating, being coated with the existing reflectance coating lamp (◇) of spherical silicon dioxide particulate as reflectance coating is 1.15 times at the accumulated illumination of irradiation area (width 86mm).
On the other hand, being coated with of the present invention reflectance coating lamp (△) of flakey silicon dioxide microparticle as reflectance coating is 1.21 times at the accumulated illumination of irradiation area (width 86mm).So, following situation can be confirmed: by using flakey silicon dioxide microparticle as reflectance coating, compared with existing reflectance coating lamp, the illumination of the irradiation area immediately below luminous tube especially increases, the reverberation be leaked to outside irradiation area reduces, and is concentrated on irradiation area.
As mentioned above, in the present invention, due to the reflectance coating utilizing lepidiod ceramic particle to form the luminous tube outer surface of long arc discharge lamp, therefore bring following effect: can make the light of Self-luminous tube diffuse reflection not to occur, and carry out normal reflection and irradiate the light of higher illumination to handled thing.
Label declaration
1 long arc discharge lamp;
2 luminous tubes;
3 sealings;
4 electrodes;
5 lamp holders;
10 reflectance coatings;
11 globular ceramic particles;
12 flakey ceramic particles;
20 light irradiation devices;
22 speculums;
22a open top;
22b front surface opening;
23 reflectings surface;
24 cooling air exhaust outlets.
Claims (5)
1. a light irradiation device, comprise housing, be configured in the long arc discharge lamp in this housing and be configured in the speculum of tank shape at the back side of this discharge lamp, in described discharge lamp, banded reflectance coating is formed in the roughly whole region along length of illumination of the luminous tube outer surface corresponding with the cooling air exhaust outlet being formed at described housing, the feature of described light irradiation device is
Lepidiod ceramic particle carries out stacked and is formed by described reflectance coating.
2. light irradiation device according to claim 1, is characterized in that,
The lepidiod ceramic particle forming described reflectance coating is silicon dioxide (SiO
2) or aluminium oxide (Al
2o
3) in any one or its combination.
3. light irradiation device according to claim 1 and 2, is characterized in that,
The average diameter of described lepidiod ceramic particle is larger than the wavelength of the emergent light of described long arc discharge lamp.
4. a long arc discharge lamp, by luminous tube and the band shape formed along the roughly whole region of length of illumination of a part for the outer surface of this luminous tube reflectance coating and form, the feature of described long arc discharge lamp is,
Lepidiod ceramic particle carries out stacked and is formed by described reflectance coating.
5. described long arc discharge lamp according to claim 4, is characterized in that,
The average diameter forming the lepidiod ceramic particle of described reflectance coating is larger than the wavelength of the emergent light of described discharge lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-087885 | 2014-04-22 | ||
| JP2014087885A JP5928848B2 (en) | 2014-04-22 | 2014-04-22 | Light irradiation device and long arc type discharge lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105006420A true CN105006420A (en) | 2015-10-28 |
Family
ID=54379047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510180914.5A Pending CN105006420A (en) | 2014-04-22 | 2015-04-16 | Light irradiation apparatus and long-arc type discharge lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5928848B2 (en) |
| KR (1) | KR101849829B1 (en) |
| CN (1) | CN105006420A (en) |
| TW (1) | TWI615884B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108369283A (en) * | 2015-12-14 | 2018-08-03 | 浜松光子学株式会社 | Scintillator panel and radiation detector |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008130302A (en) * | 2006-11-20 | 2008-06-05 | Ushio Inc | Light irradiation device |
| US20110043106A1 (en) * | 2008-02-08 | 2011-02-24 | Panasonic Corporation | Light emitting device, plasma display panel, and plasma display device |
| JP2012198997A (en) * | 2011-03-18 | 2012-10-18 | Ushio Inc | Long arc metal halide lamp and light irradiation device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4900011B2 (en) * | 2006-11-24 | 2012-03-21 | ウシオ電機株式会社 | Discharge lamp |
| JP4998832B2 (en) * | 2008-03-19 | 2012-08-15 | ウシオ電機株式会社 | Excimer lamp |
| JP5266972B2 (en) * | 2008-08-29 | 2013-08-21 | ウシオ電機株式会社 | Excimer lamp |
-
2014
- 2014-04-22 JP JP2014087885A patent/JP5928848B2/en not_active Expired - Fee Related
-
2015
- 2015-03-24 TW TW104109373A patent/TWI615884B/en not_active IP Right Cessation
- 2015-04-16 CN CN201510180914.5A patent/CN105006420A/en active Pending
- 2015-04-20 KR KR1020150055347A patent/KR101849829B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008130302A (en) * | 2006-11-20 | 2008-06-05 | Ushio Inc | Light irradiation device |
| US20110043106A1 (en) * | 2008-02-08 | 2011-02-24 | Panasonic Corporation | Light emitting device, plasma display panel, and plasma display device |
| JP2012198997A (en) * | 2011-03-18 | 2012-10-18 | Ushio Inc | Long arc metal halide lamp and light irradiation device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108369283A (en) * | 2015-12-14 | 2018-08-03 | 浜松光子学株式会社 | Scintillator panel and radiation detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015207479A (en) | 2015-11-19 |
| KR101849829B1 (en) | 2018-04-17 |
| KR20150122076A (en) | 2015-10-30 |
| TWI615884B (en) | 2018-02-21 |
| TW201608601A (en) | 2016-03-01 |
| JP5928848B2 (en) | 2016-06-01 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151028 |
|
| RJ01 | Rejection of invention patent application after publication |