KR101849829B1 - Light irradiation apparatus and long-arc type discharge lamp - Google Patents

Light irradiation apparatus and long-arc type discharge lamp Download PDF

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Publication number
KR101849829B1
KR101849829B1 KR1020150055347A KR20150055347A KR101849829B1 KR 101849829 B1 KR101849829 B1 KR 101849829B1 KR 1020150055347 A KR1020150055347 A KR 1020150055347A KR 20150055347 A KR20150055347 A KR 20150055347A KR 101849829 B1 KR101849829 B1 KR 101849829B1
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South Korea
Prior art keywords
discharge lamp
light
ceramic particles
long
diameter
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KR1020150055347A
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Korean (ko)
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KR20150122076A (en
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히데아키 야규
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우시오덴키 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel

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  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

A discharge lamp includes a long arc-type discharge lamp disposed in a housing, and a trough-shaped reflection mirror disposed behind the discharge lamp. The discharge lamp is provided with a discharge lamp, Like reflection film is formed over substantially the whole of the light emission length. In the light irradiation apparatus, light reflected by the reflection film toward the processed material under the lamp is increased to increase the illuminance, And to provide a structure that can be used.
[MEANS FOR SOLVING PROBLEMS] A reflective film formed on an arc tube of a long arc type discharge lamp is characterized in that scaly ceramic particles are laminated.

Description

[0001] Description [0002] LIGHT IRRADIATION APPARATUS AND LONG-ARC TYPE DISCHARGE LAMP [0003]

The present invention relates to a light irradiation apparatus having an ultraviolet light source and a long arc discharge lamp used therefor.

Description of the Related Art [0002] Conventionally, in the printing industry and the electronic industry, there has been known an ultraviolet light source of an apparatus for photochemical reaction used for drying ink, paint, and curing resin, or as an exposure apparatus used for exposing a semiconductor substrate or a liquid crystal substrate for liquid crystal display A long arc type discharge lamp such as a metal halide lamp is used.

The structure of the light irradiation device using such a long arc type discharge lamp is known, for example, in Japanese Patent Laid-Open Publication No. 2008-130302 (Patent Document 1), and its structure is shown in Fig.

The light irradiation device 20 is provided with a long arc type discharge lamp 1 in a housing 21 and a trough shaped reflection mirror 22 surrounding the discharge lamp 1, A reflection surface 23 made of a dielectric multilayer film or the like is formed.

The top opening 22a of the reflecting mirror 22 is disposed corresponding to the cooling wind exhaust port 24 formed in the housing 21. In the normal lighting mode in which ultraviolet rays are irradiated to the processed object, the front opening 22b thereof is opened. In the standby lighting mode such as replacement of the processed object, The reflecting mirror 22 is rotated to close the front opening 22b. Further, in the standby lighting mode, the input power to the lamp is lowered from the viewpoint of power saving.

5, the cooling wind flows from below the reflecting mirror 22, passes through the periphery of the lamp 1, is cooled, and flows out from the top opening 22a through the exhaust opening 24. [

A long arc type discharge lamp 1 used in such a light irradiation apparatus 20 is shown in Figs. 6 (A) and 6 (B).

Sealing sections 3 and 3 are formed at both ends of the arc tube 2 of the long arc type discharge lamp 1. A pair of electrodes 4 and 4 are arranged in the arc tube 2. [

When the lamp 1 is inserted into the light irradiating device, the opening 5 is provided at the rear end of the sealing part 3 so that the opening 5 is provided in the lamp holder As shown in FIG.

A reflection film 10 is formed on the upper surface of the light-emitting tube 2 over substantially the entire light-emitting length thereof. The light directed upward in the light-emitting tube 2 is reflected,

As the long arc discharge lamp 1 having the above configuration, for example, a metal halide lamp in which metal such as mercury, iron or thallium is sealed in the arc tube 2 is used in order to radiate ultraviolet rays well.

7, as the reflection film 10 formed on the upper surface of the arc tube 2, ceramic spherical particles made of silica (SiO 2 ) or alumina (Al 2 O 3 ) (11) were used.

However, in this spherical particle shape, as the light entering the particle is diffused and reflected inside the particle as shown in Fig. 7 (B), the reflected light having a larger reflection angle reaches the irradiation surface, that is, However, there has been a problem that a large amount of light is diffused and lost.

Japanese Patent Application Laid-Open No. 2008-130302

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the prior art, and it is an object of the present invention to provide a discharge lamp having a long arc type discharge lamp installed in a housing and a trough-shaped reflection mirror disposed behind the discharge lamp, And a reflection film in the shape of a strip is formed on the outer surface of the arc tube corresponding to the wind exhaust port in a substantially entire region of the light emission length, the reflection light directed to the processed material below the lamp is increased So that it is possible to perform efficient processing by increasing the illuminance.

It is another object of the present invention to provide a structure of a long arc-type discharge lamp used in the above-described light irradiation apparatus, in which reflected light formed on the outer surface thereof can be effectively directed to the downwardly processed material.

In order to solve the above problems, the light irradiation device according to the present invention is characterized in that the reflection film formed on the light emitting tube of the long arc type discharge lamp is formed by laminating scaly ceramic particles.

Further, the scaly ceramic particles forming the reflective film are characterized by being either of silica (SiO 2 ) or alumina (Al 2 O 3 ), or a combination thereof.

Further, the average diameter of the ceramic particles on the scales is larger than the wavelength of the outgoing light of the long arc-type discharge lamp.

Further, in a long arc-type discharge lamp having a light-emitting tube and a strip-shaped reflective film formed over a part of the outer surface of the light-emitting tube over the entire length of the light-emitting tube, the reflecting film is formed by laminating scaly ceramic particles .

The average diameter D (where D = (long diameter + short diameter) / 2) of the ceramic particles on the scales forming the reflection film of the long arc-type discharge lamp has a short diameter and a short diameter, Is larger than the wavelength of the outgoing light of the light source.

According to the light irradiation apparatus of the present invention, since the reflecting film of the long arc type discharge lamp is formed by laminating the ceramic particles on scales, the light reaching the reflecting film from the inside of the lamp emitting tube is rarely diffused, So that the illuminance in the treated product is remarkably increased.

In addition, since the average diameter of the ceramic particles on the scales is larger than the wavelength of the light from the lamp, a reflective film having strong specularity can be obtained.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a sectional view (A) of a main part of a long-arc discharge lamp used in the light irradiation apparatus of the present invention and a schematic view (B) of a ceramic particle on a scaly flame.
2 is an enlarged view of a reflection film.
Figure 3 is a schematic of an experiment demonstrating the effect.
Figure 4 is a graph of experimental results showing the effect.
5 is a schematic view of a light irradiation device.
6 is a cross-sectional view (A) and a cross-sectional view (B) of a conventional long arc type discharge lamp.
7 is a cross-sectional view (A) showing a conventional reflective film and its enlarged view (B).

1 is a cross-sectional view showing a reflective film which is a main part of a short arc type discharge lamp used in the light irradiation device of the present invention. The reflective film 10 is made of ceramic particles 12 such as silica (SiO 2 ) and alumina (Al 2 O 3 ), and the shape thereof is flaky.

An example of the shape of a scaly figure is shown in Fig. 1 (B), and the average diameter D of the planar portion is represented by (long diameter + short diameter) / 2, and preferably D = 0.5 to 10 탆. It is preferable that the thickness T = 0.001 to 0.05 μm and the aspect ratio D / T = 10 or more.

When the thickness T of the particles is in the above range, a dense film is formed. Therefore, when the particle is provided as a reflection film on the outer surface of the arc tube, it becomes a gas barrier layer which suppresses intrusion of gas from the outside. In addition, since the upper part of the arc tube is at a high temperature when the lamp is turned on, moisture adsorbed on the arc tube diffuses into the arc tube and enters the discharge space, resulting in deterioration of the lighting property and melting of the tungsten electrode. The film is adsorbed on the surface of the reflective film so that the immersion of water into the bulb from the outer surface of the arc tube can be suppressed.

If the average diameter D is smaller than the wavelength of the light, incident light exhibits Rayleigh scattering properties that are almost isotropically scattered, so that even when the shape of the particles is flaky, reflection characteristics with strong specular reflection can not be obtained. In order to enhance the specularity, it is preferable that the average diameter D is in the shape of a flake having a longer wavelength than the light. For example, for light having a wavelength of 365 nm, the average diameter D may be 500 nm or more.

It is preferable that the shape of the particles has a ratio (aspect ratio) of the thickness T to the average diameter D of 10: 1 or more.

The thickness of the reflective film 10 made of the flaky ceramic particles 12 is preferably 20 占 퐉 or more. If the thickness of the reflection film is 20 占 퐉 or more and the thickness t of the flaky ceramic particles is 0.001 to 0.05 占 퐉, the reflection film has about 1000 boundary surfaces of the ceramic particles. Since reflection of light occurs at the surface (boundary surface) of each flaky ceramic particle, a sufficient reflectance can be ensured.

As described above, when the thickness of the reflective film is 20 m or more, it is possible to achieve an increase in the illuminance suitable for the present invention. However, if the film thickness becomes too thick, cracks may occur in the film when heat is applied , For example, 200 mu m or less.

Hereinafter, a method for producing a reflection film made of scaly silica particles will be described.

As a method of producing ceramic particles such as silica used as a reflective film, there are a plurality of methods. For example, a method of chemically synthesizing (wet method) is used as a method of controlling the concentration and temperature of a ceramic sol in which nanoparticles of ceramic fine particles are dispersed The ceramic fine particles are agglomerated to form ceramic particles having a large particle size. By changing the conditions at the time of coagulation, the shape of the particles can be controlled, and conventionally used spherical ceramic particles or scarlet ceramic particles of the present invention can be produced according to the purpose.

Similarly, the ceramic fine particles may be bonded to each other to form a ceramic thin film such as a vapor-deposited film by thinning and sintering the silica sol in which nano-level ceramic fine particles are dispersed in a liquid. By crushing this thin film, flaky ceramic particles can be obtained.

When a scaly flame ceramic (for example, scaly silica) thus produced is dispersed in water, a silica slurry is obtained.

A silica slurry is applied to a portion of a light emitting tube requiring reflection by various coating methods such as dipping and spraying and is gradually dried to form a scaly silica film laminated substantially parallel to the light emitting tube surface as shown in Fig. .

As a result, as shown in Fig. 2, the light from the light-emitting tube is not irregularly reflected, and almost all of the light is regularly reflected to form a reflection film 10 having high specular reflection and directed to the irradiated surface (processed product).

Hereinafter, an experiment was conducted to demonstrate the effects of the present invention.

<Lamp Specifications>

Light emitting tube: inner diameter 22 mm, outer diameter 26 mm, emission length (distance between electrodes) 250 mm

Encapsulation: 58 mg of mercury, 2.5 mg of mercuric iodide, 1 kPa of argon

Reflective film: width 10 mm, thickness 50 μm, length 250 mm

Materials: Scaly silica fine particles (present invention), spherical silica fine particles (conventional example)

As a comparative lamp, there was also produced a lamp having no reflecting film.

As shown in Fig. 3, these lamps were illuminated under natural air cooling at 2000 W, and irradiation surfaces (areas) were provided at positions 170 mm from the outer surface of the lamp, opposite to the reflection film 10, (Y axis) were measured. The illuminometer used UIT-250, S365.

The results are shown in FIG. It can be understood that the integrated reflectance (◇) in which the spherical silica fine particles are applied as the reflecting film to the comparative example lamp (이) without the reflecting film has an integrated illuminance of 1.15 times in the irradiated area (86 mm width).

On the other hand, in the inventive reflection film lamp (?) Having scaly silica fine particles coated thereon as a reflecting film, the integrated illuminance in the irradiated area (86 mm width) is 1.21 times. As described above, by using the flaky silica fine particles as the reflecting film, the illuminance of the irradiated area directly under the light-emitting tube is particularly increased as compared with the conventional reflection film lamp, and the reflected light escaping out of the irradiated area is reduced and condensed in the irradiated area .

As described above, in the present invention, since the reflective film on the outer surface of the arc tube of the long arc-type discharge lamp is formed of scaly ceramic particles, the light from the arc tube is not diffused, It is possible to irradiate light.

1: long arc type discharge lamp 2: arc tube
3: sealing part 4: electrode
5: Detachment 10:
11: spherical ceramic particles 12: scaly ceramic particles
20: light irradiation device 22: reflection mirror
22a: Top opening 22b: Front opening
23: Reflecting surface 24: Cooling air exhaust

Claims (5)

And a reflecting mirror disposed in the rear of the discharge lamp, wherein the discharge lamp is provided with a light emitting tube outer surface corresponding to a cooling wind exhaust port formed in the housing, In a light irradiation device in which a strip-shaped reflective film is formed over the entire light emission length,
Wherein the reflection film is formed by laminating scaly ceramic particles and the ceramic particles have a long diameter and a short diameter and the average diameter D of the ceramic particles (D = (long diameter + short diameter) / 2) Is larger than the wavelength of the outgoing light of the discharge lamp. The method according to claim 1,
Wherein the ceramic particles on the scales forming the reflective film are either silica (SiO 2 ) or alumina (Al 2 O 3 ), or a combination thereof. A long arc-type discharge lamp comprising a light-emitting tube and a strip-shaped reflective film formed on a part of an outer surface of the light-emitting tube over a whole light-emitting length,
Wherein the reflection film is formed by laminating scaly ceramic particles and the ceramic particles have a long diameter and a short diameter and the average diameter D of the ceramic particles (D = (long diameter + short diameter) / 2) Is longer than the wavelength of the outgoing light of the discharge lamp. delete delete
KR1020150055347A 2014-04-22 2015-04-20 Light irradiation apparatus and long-arc type discharge lamp KR101849829B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014087885A JP5928848B2 (en) 2014-04-22 2014-04-22 Light irradiation device and long arc type discharge lamp
JPJP-P-2014-087885 2014-04-22

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KR20150122076A KR20150122076A (en) 2015-10-30
KR101849829B1 true KR101849829B1 (en) 2018-04-17

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CN (1) CN105006420A (en)
TW (1) TWI615884B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6548565B2 (en) * 2015-12-14 2019-07-24 浜松ホトニクス株式会社 Scintillator panel and radiation detector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011086377A (en) * 2008-02-08 2011-04-28 Panasonic Corp Light emitting device, plasma display panel, and plasma display device
JP2012198997A (en) * 2011-03-18 2012-10-18 Ushio Inc Long arc metal halide lamp and light irradiation device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008130302A (en) * 2006-11-20 2008-06-05 Ushio Inc Light irradiation device
JP4900011B2 (en) * 2006-11-24 2012-03-21 ウシオ電機株式会社 Discharge lamp
JP4998832B2 (en) * 2008-03-19 2012-08-15 ウシオ電機株式会社 Excimer lamp
JP5266972B2 (en) * 2008-08-29 2013-08-21 ウシオ電機株式会社 Excimer lamp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011086377A (en) * 2008-02-08 2011-04-28 Panasonic Corp Light emitting device, plasma display panel, and plasma display device
JP2012198997A (en) * 2011-03-18 2012-10-18 Ushio Inc Long arc metal halide lamp and light irradiation device

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CN105006420A (en) 2015-10-28
TW201608601A (en) 2016-03-01
JP2015207479A (en) 2015-11-19
TWI615884B (en) 2018-02-21
KR20150122076A (en) 2015-10-30
JP5928848B2 (en) 2016-06-01

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