CN104897049A - 一种磁性微位移平台式平面反射镜激光干涉仪及标定方法和测量方法 - Google Patents
一种磁性微位移平台式平面反射镜激光干涉仪及标定方法和测量方法 Download PDFInfo
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CN105783740B (zh) * | 2016-05-19 | 2019-02-22 | 北方民族大学 | 一种交替增量式测量微位移传感器的测量方法 |
Citations (7)
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---|---|---|---|---|
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
JPH07260584A (ja) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | マイケルソン干渉計 |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物***移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN101590605A (zh) * | 2009-04-21 | 2009-12-02 | 寿震森 | 可微调垂直平台 |
CN102490027A (zh) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | 升降平台 |
CN204705316U (zh) * | 2015-06-29 | 2015-10-14 | 北方民族大学 | 一种磁性微位移平台式平面反射镜激光干涉仪 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
JPH07260584A (ja) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | マイケルソン干渉計 |
CN1280293A (zh) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | 物***移的纳米精度的测量方法 |
EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
CN101590605A (zh) * | 2009-04-21 | 2009-12-02 | 寿震森 | 可微调垂直平台 |
CN102490027A (zh) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | 升降平台 |
CN204705316U (zh) * | 2015-06-29 | 2015-10-14 | 北方民族大学 | 一种磁性微位移平台式平面反射镜激光干涉仪 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105783740B (zh) * | 2016-05-19 | 2019-02-22 | 北方民族大学 | 一种交替增量式测量微位移传感器的测量方法 |
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