CN104681625A - 薄膜晶体管 - Google Patents
薄膜晶体管 Download PDFInfo
- Publication number
- CN104681625A CN104681625A CN201510088765.XA CN201510088765A CN104681625A CN 104681625 A CN104681625 A CN 104681625A CN 201510088765 A CN201510088765 A CN 201510088765A CN 104681625 A CN104681625 A CN 104681625A
- Authority
- CN
- China
- Prior art keywords
- oxide semiconductor
- semiconductor layer
- film
- drain electrode
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 38
- 239000004065 semiconductor Substances 0.000 claims abstract description 385
- 239000010408 film Substances 0.000 claims abstract description 191
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 27
- 229910052718 tin Inorganic materials 0.000 claims description 18
- 229910052725 zinc Inorganic materials 0.000 claims description 18
- 229910052738 indium Inorganic materials 0.000 claims description 14
- 229910052733 gallium Inorganic materials 0.000 claims description 7
- 238000001039 wet etching Methods 0.000 abstract description 73
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 20
- 239000001301 oxygen Substances 0.000 abstract description 20
- 238000002161 passivation Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 397
- 239000011135 tin Substances 0.000 description 43
- 239000011701 zinc Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 40
- 238000005530 etching Methods 0.000 description 38
- 238000004544 sputter deposition Methods 0.000 description 29
- 230000015572 biosynthetic process Effects 0.000 description 25
- 238000005755 formation reaction Methods 0.000 description 25
- 238000012545 processing Methods 0.000 description 25
- 239000000203 mixture Substances 0.000 description 23
- 238000000059 patterning Methods 0.000 description 17
- 229910004298 SiO 2 Inorganic materials 0.000 description 15
- 238000011156 evaluation Methods 0.000 description 14
- 238000005477 sputtering target Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 12
- 238000010276 construction Methods 0.000 description 11
- 230000007547 defect Effects 0.000 description 9
- 238000005286 illumination Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000012212 insulator Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000003595 mist Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000005669 field effect Effects 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 238000005266 casting Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 150000007522 mineralic acids Chemical class 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 235000006408 oxalic acid Nutrition 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000006396 nitration reaction Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910007541 Zn O Inorganic materials 0.000 description 1
- 229910007604 Zn—Sn—O Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
- H01L29/78693—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate the semiconducting oxide being amorphous
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13069—Thin film transistor [TFT]
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012129399 | 2012-06-06 | ||
JP2012-129399 | 2012-06-06 | ||
CN201380029493.5A CN104335355B (zh) | 2012-06-06 | 2013-06-06 | 薄膜晶体管 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380029493.5A Division CN104335355B (zh) | 2012-06-06 | 2013-06-06 | 薄膜晶体管 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104681625A true CN104681625A (zh) | 2015-06-03 |
CN104681625B CN104681625B (zh) | 2017-08-18 |
Family
ID=49712113
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510088765.XA Active CN104681625B (zh) | 2012-06-06 | 2013-06-06 | 薄膜晶体管 |
CN201380029493.5A Expired - Fee Related CN104335355B (zh) | 2012-06-06 | 2013-06-06 | 薄膜晶体管 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380029493.5A Expired - Fee Related CN104335355B (zh) | 2012-06-06 | 2013-06-06 | 薄膜晶体管 |
Country Status (6)
Country | Link |
---|---|
US (2) | US9343586B2 (zh) |
JP (2) | JP6002088B2 (zh) |
KR (2) | KR101648661B1 (zh) |
CN (2) | CN104681625B (zh) |
TW (2) | TWI516832B (zh) |
WO (1) | WO2013183726A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104885229A (zh) * | 2012-12-28 | 2015-09-02 | 株式会社神户制钢所 | 薄膜晶体管及其制造方法 |
CN110010626A (zh) * | 2019-04-11 | 2019-07-12 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
CN114761607A (zh) * | 2019-12-16 | 2022-07-15 | 株式会社神户制钢所 | 氧化物半导体薄膜、薄膜晶体管及溅射靶 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9362313B2 (en) * | 2012-05-09 | 2016-06-07 | Kobe Steel, Ltd. | Thin film transistor and display device |
JP6068232B2 (ja) * | 2012-05-30 | 2017-01-25 | 株式会社神戸製鋼所 | 薄膜トランジスタの半導体層用酸化物、薄膜トランジスタ、表示装置およびスパッタリングターゲット |
TWI545777B (zh) * | 2014-01-15 | 2016-08-11 | Kobe Steel Ltd | Thin film transistor |
CN106104834B (zh) * | 2014-03-17 | 2019-06-25 | 庆熙大学校产学协力团 | 半导体及其方法、薄膜晶体管、薄膜、太阳电池及其方法 |
KR101559246B1 (ko) | 2014-05-02 | 2015-10-14 | 경희대학교 산학협력단 | 갈륨을 포함하는 p형 산화물 반도체를 이용한 태양전지 및 이의 제조 방법 |
JP6120794B2 (ja) * | 2014-03-26 | 2017-04-26 | 三菱電機株式会社 | 薄膜トランジスタ基板およびその製造方法 |
WO2015186354A1 (ja) * | 2014-06-03 | 2015-12-10 | 株式会社Joled | 薄膜トランジスタ及びその製造方法 |
KR101705406B1 (ko) * | 2014-09-11 | 2017-02-10 | 경희대학교 산학협력단 | 갈륨을 포함하는 p형 산화물 반도체를 이용한 유기 발광 다이오드 및 이의 제조 방법 |
TWI578543B (zh) * | 2014-10-20 | 2017-04-11 | 群創光電股份有限公司 | 薄膜電晶體基板及包含其之顯示裝置 |
CN107003572A (zh) * | 2014-11-28 | 2017-08-01 | 夏普株式会社 | 液晶显示装置 |
TWI577032B (zh) * | 2015-04-24 | 2017-04-01 | 群創光電股份有限公司 | 顯示裝置 |
JP6875088B2 (ja) * | 2016-02-26 | 2021-05-19 | 株式会社神戸製鋼所 | 酸化物半導体層を含む薄膜トランジスタ |
DE112017004841T5 (de) * | 2016-09-27 | 2019-06-19 | Sharp Kabushiki Kaisha | Halbleitervorrichtung und Verfahren zu deren Herstellung |
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CN114975635A (zh) | 2017-05-31 | 2022-08-30 | 乐金显示有限公司 | 薄膜晶体管、包括其的栅极驱动器、以及包括该栅极驱动器的显示装置 |
KR102434908B1 (ko) | 2017-10-20 | 2022-08-19 | 엘지디스플레이 주식회사 | 산화물 반도체층을 포함하는 박막 트랜지스터, 그 제조방법 및 이를 포함하는 표시장치 |
CN109148592B (zh) | 2017-06-27 | 2022-03-11 | 乐金显示有限公司 | 包括氧化物半导体层的薄膜晶体管,其制造方法和包括其的显示设备 |
KR102418493B1 (ko) | 2017-10-24 | 2022-07-06 | 엘지디스플레이 주식회사 | 이차원 반도체를 포함하는 박막 트랜지스터 및 이를 포함하는 표시장치 |
CN107808885B (zh) * | 2017-10-25 | 2020-04-28 | 深圳市华星光电半导体显示技术有限公司 | 背沟道蚀刻型氧化物半导体tft基板及其制作方法 |
JP6706638B2 (ja) * | 2018-03-07 | 2020-06-10 | シャープ株式会社 | 半導体装置およびその製造方法 |
JP2019163493A (ja) * | 2018-03-19 | 2019-09-26 | 住友金属鉱山株式会社 | 透明酸化物積層膜、透明酸化物積層膜の製造方法、及び透明樹脂基板 |
JP7063712B2 (ja) * | 2018-05-09 | 2022-05-09 | 株式会社神戸製鋼所 | 酸化物半導体層を含む薄膜トランジスタ |
JP2020167188A (ja) * | 2019-03-28 | 2020-10-08 | 株式会社ジャパンディスプレイ | 表示装置および表示装置の製造方法 |
DE112019007354B4 (de) * | 2019-05-23 | 2023-08-03 | Mitsubishi Electric Corporation | Verfahren zur herstellung eines halbleitersubstrats und verfahren zur herstellung einer halbleitereinheit |
CN111697005A (zh) * | 2020-05-25 | 2020-09-22 | 福建华佳彩有限公司 | 一种阵列基板及其制作方法 |
CN112242406A (zh) * | 2020-10-09 | 2021-01-19 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法、显示装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008072011A (ja) * | 2006-09-15 | 2008-03-27 | Toppan Printing Co Ltd | 薄膜トランジスタの製造方法 |
JP2008243928A (ja) * | 2007-03-26 | 2008-10-09 | Idemitsu Kosan Co Ltd | 非晶質酸化物半導体薄膜、その製造方法、薄膜トランジスタの製造方法、電界効果型トランジスタ、発光装置、表示装置及びスパッタリングターゲット |
US20080296568A1 (en) * | 2007-05-29 | 2008-12-04 | Samsung Electronics Co., Ltd | Thin film transistors and methods of manufacturing the same |
JP2010021333A (ja) * | 2008-07-10 | 2010-01-28 | Fujifilm Corp | 金属酸化物膜とその製造方法、及び半導体装置 |
US20120012840A1 (en) * | 2009-03-31 | 2012-01-19 | Vincent Korthuis | Thin-film Transistor (TFT) With A Bi-layer Channel |
CN102347368A (zh) * | 2010-07-30 | 2012-02-08 | 三星电子株式会社 | 晶体管、制造晶体管的方法及包括晶体管的平板显示器 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4234006B2 (ja) | 2001-07-17 | 2009-03-04 | 出光興産株式会社 | スパッタリングターゲットおよび透明導電膜 |
JP4620046B2 (ja) | 2004-03-12 | 2011-01-26 | 独立行政法人科学技術振興機構 | 薄膜トランジスタ及びその製造方法 |
JP4933756B2 (ja) | 2005-09-01 | 2012-05-16 | 出光興産株式会社 | スパッタリングターゲット |
KR101141868B1 (ko) | 2005-09-01 | 2012-05-11 | 이데미쓰 고산 가부시키가이샤 | 스퍼터링 타겟, 투명 도전막 및 투명 전극 |
JP4981283B2 (ja) * | 2005-09-06 | 2012-07-18 | キヤノン株式会社 | アモルファス酸化物層を用いた薄膜トランジスタ |
JP5006598B2 (ja) * | 2005-09-16 | 2012-08-22 | キヤノン株式会社 | 電界効果型トランジスタ |
KR101080527B1 (ko) | 2005-09-20 | 2011-11-04 | 이데미쓰 고산 가부시키가이샤 | 스퍼터링 타겟, 투명 도전막 및 투명 전극 |
KR101314946B1 (ko) | 2005-09-27 | 2013-10-04 | 이데미쓰 고산 가부시키가이샤 | 스퍼터링 타겟, 투명 도전막 및 터치 패널용 투명 전극 |
JP4614148B2 (ja) * | 2006-05-25 | 2011-01-19 | 富士電機ホールディングス株式会社 | 酸化物半導体及び薄膜トランジスタの製造方法 |
JP5358891B2 (ja) | 2006-08-11 | 2013-12-04 | 日立金属株式会社 | 酸化亜鉛焼結体の製造方法 |
WO2008117739A1 (ja) * | 2007-03-23 | 2008-10-02 | Idemitsu Kosan Co., Ltd. | 半導体デバイス、多結晶半導体薄膜、多結晶半導体薄膜の製造方法、電界効果型トランジスタ、及び、電界効果型トランジスタの製造方法 |
WO2009034953A1 (ja) * | 2007-09-10 | 2009-03-19 | Idemitsu Kosan Co., Ltd. | 薄膜トランジスタ |
JP5213458B2 (ja) | 2008-01-08 | 2013-06-19 | キヤノン株式会社 | アモルファス酸化物及び電界効果型トランジスタ |
KR100963026B1 (ko) | 2008-06-30 | 2010-06-10 | 삼성모바일디스플레이주식회사 | 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를구비하는 평판 표시 장치 |
US8258511B2 (en) * | 2008-07-02 | 2012-09-04 | Applied Materials, Inc. | Thin film transistors using multiple active channel layers |
JP2010040552A (ja) | 2008-07-31 | 2010-02-18 | Idemitsu Kosan Co Ltd | 薄膜トランジスタ及びその製造方法 |
KR101516050B1 (ko) * | 2008-08-27 | 2015-05-04 | 이데미쓰 고산 가부시키가이샤 | 전계 효과형 트랜지스터, 그의 제조 방법 및 스퍼터링 타겟 |
KR101489652B1 (ko) * | 2008-09-02 | 2015-02-06 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
JP5345359B2 (ja) * | 2008-09-18 | 2013-11-20 | 富士フイルム株式会社 | 薄膜電界効果型トランジスタおよびそれを用いた表示装置 |
JP2010118407A (ja) * | 2008-11-11 | 2010-05-27 | Idemitsu Kosan Co Ltd | エッチング耐性を有する薄膜トランジスタ、及びその製造方法 |
KR101361303B1 (ko) | 2009-07-27 | 2014-02-11 | 가부시키가이샤 고베 세이코쇼 | 배선 구조 및 배선 구조를 구비한 표시 장치 |
WO2011013682A1 (ja) | 2009-07-27 | 2011-02-03 | 株式会社神戸製鋼所 | 配線構造およびその製造方法、並びに配線構造を備えた表示装置 |
WO2011013596A1 (en) * | 2009-07-31 | 2011-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2011043206A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2011187506A (ja) | 2010-03-04 | 2011-09-22 | Sony Corp | 薄膜トランジスタおよびその製造方法、並びに表示装置 |
JP2012124446A (ja) | 2010-04-07 | 2012-06-28 | Kobe Steel Ltd | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP2012033854A (ja) | 2010-04-20 | 2012-02-16 | Kobe Steel Ltd | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP5718072B2 (ja) | 2010-07-30 | 2015-05-13 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP2012094853A (ja) | 2010-09-30 | 2012-05-17 | Kobe Steel Ltd | 配線構造 |
JP5780902B2 (ja) * | 2010-10-12 | 2015-09-16 | 出光興産株式会社 | 半導体薄膜、薄膜トランジスタ及びその製造方法 |
JP2012119664A (ja) | 2010-11-12 | 2012-06-21 | Kobe Steel Ltd | 配線構造 |
JP5651095B2 (ja) | 2010-11-16 | 2015-01-07 | 株式会社コベルコ科研 | 酸化物焼結体およびスパッタリングターゲット |
JP2013070010A (ja) * | 2010-11-26 | 2013-04-18 | Kobe Steel Ltd | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP2012164963A (ja) * | 2010-11-26 | 2012-08-30 | Kobe Steel Ltd | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP5723262B2 (ja) | 2010-12-02 | 2015-05-27 | 株式会社神戸製鋼所 | 薄膜トランジスタおよびスパッタリングターゲット |
WO2012091126A1 (ja) | 2010-12-28 | 2012-07-05 | 株式会社神戸製鋼所 | 薄膜トランジスタの半導体層用酸化物およびスパッタリングターゲット、並びに薄膜トランジスタ |
JP5750065B2 (ja) | 2011-02-10 | 2015-07-15 | 株式会社コベルコ科研 | 酸化物焼結体およびスパッタリングターゲット |
JP5750063B2 (ja) | 2011-02-10 | 2015-07-15 | 株式会社コベルコ科研 | 酸化物焼結体およびスパッタリングターゲット |
JP2012180247A (ja) | 2011-03-02 | 2012-09-20 | Kobelco Kaken:Kk | 酸化物焼結体およびスパッタリングターゲット |
JP2012180248A (ja) | 2011-03-02 | 2012-09-20 | Kobelco Kaken:Kk | 酸化物焼結体およびスパッタリングターゲット |
JP2013153118A (ja) | 2011-03-09 | 2013-08-08 | Kobe Steel Ltd | 薄膜トランジスタの半導体層用酸化物、上記酸化物を備えた薄膜トランジスタの半導体層および薄膜トランジスタ |
JP5977569B2 (ja) | 2011-04-22 | 2016-08-24 | 株式会社神戸製鋼所 | 薄膜トランジスタ構造、ならびにその構造を備えた薄膜トランジスタおよび表示装置 |
KR20130111874A (ko) * | 2012-04-02 | 2013-10-11 | 삼성디스플레이 주식회사 | 박막 트랜지스터, 이를 포함하는 박막 트랜지스터 표시판 및 표시 장치, 그리고 박막 트랜지스터의 제조 방법 |
-
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- 2013-06-05 JP JP2013119321A patent/JP6002088B2/ja not_active Expired - Fee Related
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- 2013-08-16 JP JP2013169246A patent/JP6018551B2/ja active Active
-
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- 2015-05-26 US US14/721,779 patent/US9324882B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008072011A (ja) * | 2006-09-15 | 2008-03-27 | Toppan Printing Co Ltd | 薄膜トランジスタの製造方法 |
JP2008243928A (ja) * | 2007-03-26 | 2008-10-09 | Idemitsu Kosan Co Ltd | 非晶質酸化物半導体薄膜、その製造方法、薄膜トランジスタの製造方法、電界効果型トランジスタ、発光装置、表示装置及びスパッタリングターゲット |
US20080296568A1 (en) * | 2007-05-29 | 2008-12-04 | Samsung Electronics Co., Ltd | Thin film transistors and methods of manufacturing the same |
JP2010021333A (ja) * | 2008-07-10 | 2010-01-28 | Fujifilm Corp | 金属酸化物膜とその製造方法、及び半導体装置 |
US20120012840A1 (en) * | 2009-03-31 | 2012-01-19 | Vincent Korthuis | Thin-film Transistor (TFT) With A Bi-layer Channel |
CN102347368A (zh) * | 2010-07-30 | 2012-02-08 | 三星电子株式会社 | 晶体管、制造晶体管的方法及包括晶体管的平板显示器 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104885229A (zh) * | 2012-12-28 | 2015-09-02 | 株式会社神户制钢所 | 薄膜晶体管及其制造方法 |
CN104885229B (zh) * | 2012-12-28 | 2017-08-18 | 株式会社神户制钢所 | 薄膜晶体管及其制造方法 |
CN110010626A (zh) * | 2019-04-11 | 2019-07-12 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
US11283039B2 (en) | 2019-04-11 | 2022-03-22 | Boe Technology Group Co., Ltd. | Display substrate with improved carrier mobility of thin film transistors within GOA region |
CN110010626B (zh) * | 2019-04-11 | 2022-04-29 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
CN114761607A (zh) * | 2019-12-16 | 2022-07-15 | 株式会社神户制钢所 | 氧化物半导体薄膜、薄膜晶体管及溅射靶 |
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US20150123116A1 (en) | 2015-05-07 |
US9324882B2 (en) | 2016-04-26 |
TW201435433A (zh) | 2014-09-16 |
TWI516832B (zh) | 2016-01-11 |
US20150255627A1 (en) | 2015-09-10 |
US9343586B2 (en) | 2016-05-17 |
KR20150029035A (ko) | 2015-03-17 |
CN104335355A (zh) | 2015-02-04 |
JP2014013917A (ja) | 2014-01-23 |
JP2014013891A (ja) | 2014-01-23 |
CN104681625B (zh) | 2017-08-18 |
KR101648661B1 (ko) | 2016-08-16 |
KR20150027164A (ko) | 2015-03-11 |
CN104335355B (zh) | 2017-05-10 |
US20160099357A2 (en) | 2016-04-07 |
WO2013183726A1 (ja) | 2013-12-12 |
JP6018551B2 (ja) | 2016-11-02 |
TWI514588B (zh) | 2015-12-21 |
KR101648684B1 (ko) | 2016-08-17 |
JP6002088B2 (ja) | 2016-10-05 |
TW201405830A (zh) | 2014-02-01 |
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Inventor after: Goto Hiroshi Inventor after: San Muling Inventor after: An Zhimi Inventor after: Extensively rapidsly to grind too Inventor after: Morita Shinya Inventor after: Kugimiya Toshihiro Inventor after: An Bingdou Inventor after: Jin Jianxi Inventor after: Jin Lianhong Inventor before: Goto Hiroshi Inventor before: San Muling Inventor before: An Zhimi Inventor before: Extensively rapidsly to grind too Inventor before: Morita Shinya Inventor before: Kugimiya Toshihiro |
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Effective date of registration: 20151209 Address after: Hyogo Applicant after: Kobe Steel Ltd. Applicant after: Samsung Display Co., Ltd. Address before: Hyogo Applicant before: Kobe Steel Ltd. |
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