CN104651949B - A kind of polycrystalline silicon texturing additive - Google Patents

A kind of polycrystalline silicon texturing additive Download PDF

Info

Publication number
CN104651949B
CN104651949B CN201510072360.7A CN201510072360A CN104651949B CN 104651949 B CN104651949 B CN 104651949B CN 201510072360 A CN201510072360 A CN 201510072360A CN 104651949 B CN104651949 B CN 104651949B
Authority
CN
China
Prior art keywords
wool
polycrystalline silicon
making herbs
silicon texturing
additive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510072360.7A
Other languages
Chinese (zh)
Other versions
CN104651949A (en
Inventor
陆由东
费婷
倪丽萍
赵海静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Jun He Science And Technology Co Ltd
Original Assignee
Changzhou Jun He Science And Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changzhou Jun He Science And Technology Co Ltd filed Critical Changzhou Jun He Science And Technology Co Ltd
Priority to CN201510072360.7A priority Critical patent/CN104651949B/en
Publication of CN104651949A publication Critical patent/CN104651949A/en
Application granted granted Critical
Publication of CN104651949B publication Critical patent/CN104651949B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a kind of polycrystalline silicon texturing additive, according to mass percent, including following components:Sodium citrate 0.08~0.8%, citric acid 1.0~2.5%, nonionic surfactant 0.03~0.07%, polyethylene glycol 0.08~0.8%, polyvinylpyrrolidone 0.1~1%, surplus is water.The polycrystalline silicon texturing additive prepared by using the present invention to carry out after sour making herbs into wool polysilicon chip, and obtained silicon chip surface is uniform, reflectivity reduction by 3~5%, cell conversion rate lifting 0.1~0.2%.

Description

A kind of polycrystalline silicon texturing additive
Technical field
The present invention relates to polycrystalline silicon texturing technical field, more particularly to a kind of polycrystalline silicon texturing additive.
Background technology
Polysilicon solar cell accounts for 50% or so of global PV product populations, and the market share amount shared by it at present Increase steadily will also be continued, but the universal battery conversion efficiency of polysilicon chip in the market is less than monocrystalline silicon piece battery, its In one main reason is that lacking a kind of inexpensive efficient polysilicon making herbs into wool mode, good polysilicon making herbs into wool can be carried significantly The absorptivity of high sunshine, reduces reflection, improves short circuit current flow, realizes the high conversion efficiency of cell photoelectric.
The general each diversity by alkali lye (KOH or NaOH) of monocrystaline silicon solar cell carries out making herbs into wool and obtains random Pyramid structure, the crystalline phase randomness of polysilicon chip causes this technology to be extremely difficult to same effect on this material.At present The acid etching of isotropy is that implementation is optimal in polycrystalline etching method, and minimum one of cost, is also the most widely used A kind of method.But the sunken photosensitiveness of matte that this sour making herbs into wool is obtained is poor, and reflectivity is higher, about 25% or so, increase pit depth is again Difficulty can be brought to follow-up process.And suitable additive is added in sour Woolen-making liquid, making herbs into wool effect can be greatly improved, is dropped Antiradar reflectivity (D.H.Macdonald, A.Cuevas, M.J.Kerr, et al, Solar Energy, 2004,76,277-283; Y.T.Cheng, J.J.Ho, S.Y.Tsai, et al, Solar Energy, 2011,85,87-94), will have great importance.
The content of the invention
It is an object of the present invention to overcome the above-mentioned technical problems, and to provide a kind of polycrystalline silicon texturing additive, the polycrystalline Silicon wafer wool making additive application makes in the matte of polysilicon chip.The use of this flocking additive brings splendid moistened surface Property, and make the bubble produced during making herbs into wool many and small, substantial amounts of micro-structural successfully is formed in polycrystalline making herbs into wool etch pit, is entered One step improves the sunken photosensitiveness on surface, reduces reflectivity, improves cell photoelectric conversion efficiency.
The technical scheme for solving above-mentioned technical problem is as follows:
A kind of polycrystalline silicon texturing additive, according to mass percent, including following components:
Further, described nonionic surfactant is fluorine carbon surfactant, polysiloxane-based surface-active Agent.It is preferred that fluorine carbon surfactant is nonionic surfactant.
Further, described molecular weight polyethylene glycol is 200~1000, preferably 600 and 1000.
Described water is deionized water.
A kind of Woolen-making liquid for polycrystalline silicon texturing, including polycrystalline silicon texturing additive and making herbs into wool acid solution, polycrystalline The mass ratio of silicon wafer wool making additive and making herbs into wool acid solution is 0.2~0.7:100, making herbs into wool acid solution is the mixed of hydrofluoric acid and nitric acid The mixed aqueous solution of Heshui solution or hydrofluoric acid and chromic acid.
A kind of method of polycrystalline silicon texturing, it is characterised in that surface wool manufacturing is carried out to polysilicon chip using Woolen-making liquid.
A kind of polycrystalline silicon texturing method, it is characterised in that comprise the following steps:
1) preparation of polycrystalline silicon texturing additive:By 0.08~0.8% sodium citrate, 1.0~2.5% lemon Acid, 0.03~0.07% nonionic surfactant, 0.08~0.8% polyethylene glycol, 0.1~1% polyvinyl pyrrole Alkanone is added in the water of surplus, is mixed to and is uniformly produced flocking additive;This flocking additive is added to making herbs into wool acid Solution, its mass ratio is 0.2~0.7:100;
2) polysilicon chip surface wool manufacturing:Polysilicon chip is immersed in the making herbs into wool acid solution containing flocking additive and made Suede, temperature control is at 8~20 DEG C, and the making herbs into wool time is 120~240s.
The addition of polysilicon flocking additive can make to produce more microbubbles during making herbs into wool, in silicon chip surface by gas The position for steeping absorption is small by corrosion impact, and the position of bubble-free is big by corrosion impact, and the presence of micro-bubble realizes even and fine Close concavo-convex making herbs into wool effect.
The invention provides a kind of efficient polysilicon flocking additive, it contains the surfactant of specific function, it Addition can improve the wetability of Woolen-making liquid and silicon chip surface, form substantial amounts of micro-structural in polycrystalline making herbs into wool etch pit, from And the sunken photosensitiveness on surface is further lifted, while it can also improve sour making herbs into wool environment, control reaction rate is reached, reflectivity is reduced Effect, make reaction more uniform, male and fomale(M&F) is finer and closely woven.And process conditions are controlled significantly, requirement of the technique to temperature is reduced, Technique is set more to stablize, efficiency is greatly improved.
The polycrystalline silicon texturing additive prepared by using the present invention to carry out after sour making herbs into wool polysilicon chip, obtains Silicon chip surface is uniform, reflectivity reduction by 3~5%, cell conversion rate lifting 0.1~0.2%.
Embodiment
With reference to embodiment, the present invention is further detailed explanation.
Embodiment 1:
By 0.5g sodium citrate, 2g citric acid, 0.05g fluorocarbon surfactant, 0.4g polyethylene glycol, 0.6g Polyvinylpyrrolidone be added in the water of surplus, mix to and uniformly produce flocking additive.By 100g this making herbs into wool Additive is added in the sour Woolen-making liquids of 19kg, is mixed evenly.
Polysilicon chip is immersed in the above-mentioned sour Woolen-making liquid containing flocking additive and carries out making herbs into wool, temperature control at 10 DEG C, The making herbs into wool time is 200s.
Embodiment 2:
By 0.7g sodium citrate, 2.3g citric acid, 0.06g fluorocarbon surfactant, 0.6g polyethylene glycol, 0.5g polyvinylpyrrolidone is added to the water of surplus, mixes to and uniformly produces flocking additive.By 100g this system Suede additive is added in the sour Woolen-making liquids of 22kg, is mixed evenly.
Polysilicon chip is immersed in the above-mentioned sour Woolen-making liquid containing flocking additive and carries out making herbs into wool, temperature control at 15 DEG C, The making herbs into wool time is 140s.
Embodiment 3:
By 0.8g sodium citrate, 2g citric acid, 0.05g fluorocarbon surfactant, 0.6g polyethylene glycol, 0.8g Polyvinylpyrrolidone be added to the water of surplus, mix to and uniformly produce flocking additive.100g this making herbs into wool is added Plus agent is added in the sour Woolen-making liquids of 15kg, is mixed evenly.
Polysilicon chip is immersed in the above-mentioned sour Woolen-making liquid for having added flocking additive and carries out making herbs into wool, temperature control is at 9 DEG C, system The suede time is 160s.
Embodiment 4:
By 0.08g sodium citrate, 1g citric acid, 0.03g fluorocarbon surfactant, 0.08g polyethylene glycol, 0.1g polyvinylpyrrolidone is added to the water of surplus, mixes to and uniformly produces flocking additive.By 100g this system Suede additive is added in the sour Woolen-making liquids of 15kg, is mixed evenly.
Polysilicon chip is immersed in the above-mentioned sour Woolen-making liquid for having added flocking additive and carries out making herbs into wool, temperature control is at 8 DEG C, system The suede time is 240s.
As a result:The making herbs into wool of polysilicon chip, etching extent about 0.35~0.45, reflectivity are carried out by using this flocking additive Reduction by 3~5%, 50~80mA of current boost, cell conversion rate lifting 0.1~0.2%.
It is described above, be only presently preferred embodiments of the present invention, any formal limitation not done to the present invention, it is every according to According to any simple modification, equivalent variations made in technical spirit of the invention to above example, the guarantor of the present invention is each fallen within Within the scope of shield.

Claims (8)

1. a kind of polycrystalline silicon texturing additive, it is characterised in that according to mass percent, including following components:
2. a kind of polycrystalline silicon texturing additive according to claim 1, it is characterised in that described non-ionic surface is lived Property agent be fluorine carbon surfactant, polysiloxane-based surfactant.
3. a kind of polycrystalline silicon texturing additive according to claim 1, it is characterised in that described peg molecule Measure as 200~1000.
4. a kind of polycrystalline silicon texturing additive according to claim 1, it is characterised in that described water is deionization Water.
5. a kind of Woolen-making liquid for polycrystalline silicon texturing, it is characterised in that including any one institute in such as Claims 1 to 4 The polycrystalline silicon texturing additive and making herbs into wool acid solution stated, described polycrystalline silicon texturing additive and the quality of making herbs into wool acid solution Than for 0.2~0.7:100, described making herbs into wool acid solution is the mixed aqueous solution or hydrofluoric acid and chromic acid of hydrofluoric acid and nitric acid Mixed aqueous solution.
6. a kind of method of polycrystalline silicon texturing, it is characterised in that entered using the Woolen-making liquid described in claim 5 to polysilicon chip Row surface wool manufacturing.
7. the method for polycrystalline silicon texturing according to claim 6, it is characterised in that making herbs into wool temperature is 8~20 DEG C, making herbs into wool Time is 120~240s.
8. polycrystalline silicon texturing method according to claim 6, it is characterised in that comprise the following steps:
1) preparation of polycrystalline silicon texturing additive:By 0.08~0.8% sodium citrate, 1.0~2.5% citric acid, 0.03~0.07% nonionic surfactant, 0.08~0.8% polyethylene glycol, 0.1~1% polyvinylpyrrolidone It is added in the water of surplus, mixes to and uniformly produce flocking additive;This flocking additive is added to making herbs into wool acid solution, Its mass ratio is 0.2~0.7:100;
2) polysilicon chip surface wool manufacturing:Polysilicon chip is immersed in the making herbs into wool acid solution containing flocking additive and carries out making herbs into wool, Temperature control is at 8~20 DEG C, and the making herbs into wool time is 120~240s.
CN201510072360.7A 2015-02-11 2015-02-11 A kind of polycrystalline silicon texturing additive Active CN104651949B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510072360.7A CN104651949B (en) 2015-02-11 2015-02-11 A kind of polycrystalline silicon texturing additive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510072360.7A CN104651949B (en) 2015-02-11 2015-02-11 A kind of polycrystalline silicon texturing additive

Publications (2)

Publication Number Publication Date
CN104651949A CN104651949A (en) 2015-05-27
CN104651949B true CN104651949B (en) 2017-09-29

Family

ID=53243570

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510072360.7A Active CN104651949B (en) 2015-02-11 2015-02-11 A kind of polycrystalline silicon texturing additive

Country Status (1)

Country Link
CN (1) CN104651949B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106024988B (en) * 2016-07-26 2017-12-15 南京科乃迪科环保科技有限公司 The black silicon of one-step method wet method prepares and surface treatment method
CN106119976B (en) * 2016-08-19 2018-08-14 常州时创能源科技有限公司 Additive and its application of the black silicon making herbs into wool of polycrystalline with reaming acid solution
CN106222755A (en) * 2016-09-30 2016-12-14 杭州飞鹿新能源科技有限公司 Additive and application process thereof for polycrystalline silicon texturing
CN106521636A (en) * 2016-12-30 2017-03-22 德清丽晶能源科技有限公司 Single crystal wafer texturing additive
CN106835288A (en) * 2016-12-30 2017-06-13 德清丽晶能源科技有限公司 A kind of etching method of monocrystalline silicon piece
CN106676636A (en) * 2017-01-10 2017-05-17 何秀英 Chemical additive for texture etching of silicon crystal surface
CN107170845A (en) * 2017-05-12 2017-09-15 中国科学院宁波材料技术与工程研究所 A kind of wet method prepares the pyramidal method of corners
CN110644049A (en) * 2018-06-26 2020-01-03 上海硅洋新能源科技有限公司 Diamond wire polycrystalline silicon wafer texturing additive and diamond wire polycrystalline silicon wafer texturing etching liquid
CN109103297A (en) * 2018-08-17 2018-12-28 安徽英发三友新能源科技有限公司 A kind of monocrystalline solar cells piece process for etching
CN110644053A (en) * 2019-10-12 2020-01-03 湖南理工学院 Formula and using method for preparing corn-shaped monocrystalline silicon suede composite texturing additive
CN116004232A (en) * 2022-11-25 2023-04-25 常州君合科技股份有限公司 Monocrystalline silicon polishing alkali etching additive and application thereof
CN115745419B (en) * 2022-11-25 2024-04-12 常州君合科技股份有限公司 Method for synthesizing high-performance photovoltaic glass antireflection film by sectionally hydrolyzing tetraethoxysilane
CN115820256A (en) * 2022-11-25 2023-03-21 嘉兴市小辰光伏科技有限公司 Additive for improving uniformity of texture of solar cell and application process thereof

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101586239A (en) * 2009-06-08 2009-11-25 江苏林洋新能源有限公司 Additive for preparing polysilicon etching chemical suede
CN101937946B (en) * 2010-09-16 2012-05-09 浙江大学 Surface texture method of solar battery silicon slice
CN102330091B (en) * 2011-07-27 2012-07-04 常州时创能源科技有限公司 Additive for polycrystalline silicon wafer acidity texture preparation liquid and use method thereof
CN102330101A (en) * 2011-08-12 2012-01-25 无锡尚品太阳能电力科技有限公司 Cleanout fluid used for cleaning after polysilicon texture preparation and preparation method thereof
CN103290484A (en) * 2012-02-28 2013-09-11 靖江市精益化学品有限公司 Fourth generation alcohol-free additive not additionally added in suede preparation of monocrystalline silicon
CN102586887A (en) * 2012-03-15 2012-07-18 苏州先拓光伏科技有限公司 Suede-making additive for low-reflectivity monocrystalline silicon
CN102586888A (en) * 2012-03-15 2012-07-18 苏州先拓光伏科技有限公司 Non-alcoholic monocrystalline silicon flock making additive
US20130295712A1 (en) * 2012-05-03 2013-11-07 Advanced Technology Materials, Inc. Methods of texturing surfaces for controlled reflection
CN102888657B (en) * 2012-10-22 2015-04-15 江苏荣马新能源有限公司 Additive for fluffing agent of crystalline silicon solar cell
CN103132079B (en) * 2013-02-07 2015-07-08 睿纳能源科技(上海)有限公司 Additive for acid texturing of diamond-wire-cutting polycrystalline silicon slices and application method thereof
CN104342702A (en) * 2013-08-05 2015-02-11 南京科乃迪科环保科技有限公司 Auxiliary chemical composition for monocrystalline silicon or polycrystalline silicon acidic wool making
CN103409808B (en) * 2013-09-04 2015-10-21 常州时创能源科技有限公司 Polycrystalline silicon texturing additive and using method thereof
CN103451739B (en) * 2013-09-04 2016-01-20 常州时创能源科技有限公司 Fine-hair maring using monocrystalline silicon slice additive and using method thereof
CN103668467B (en) * 2013-12-20 2016-08-31 常州时创能源科技有限公司 A kind of polycrystalline silicon texturing additive and application thereof
CN104060325A (en) * 2014-06-20 2014-09-24 润峰电力有限公司 Polycrystalline silicon texturing solution and texturing method thereof
CN104328504A (en) * 2014-11-13 2015-02-04 苏州润阳光伏科技有限公司 Polycrystal texturing auxiliary and application method thereof
CN104294369A (en) * 2014-11-13 2015-01-21 苏州润阳光伏科技有限公司 Acid texturing additive for polysilicon film and use method thereof

Also Published As

Publication number Publication date
CN104651949A (en) 2015-05-27

Similar Documents

Publication Publication Date Title
CN104651949B (en) A kind of polycrystalline silicon texturing additive
CN102703989B (en) Class monocrystalline solar cells leather producing process
CN107245760A (en) The processing method of silicon chip of solar cell
CN102154711A (en) Monocrystal silicon cleaning liquid and precleaning process
CN101634026A (en) Corrosive liquid for preparing monocrystal silicon textured surface and method thereof
CN102312294A (en) Additive used for monocrystalline silicon wafer alkaline flocking and application method thereof
CN103403875A (en) Method for the wet-chemical etching back of a solar cell emitter
CN101818348A (en) Method for preparing texture of monocrystalline-silicon solar cell by one-step process
CN106222755A (en) Additive and application process thereof for polycrystalline silicon texturing
CN102586888A (en) Non-alcoholic monocrystalline silicon flock making additive
CN109554762B (en) Polycrystalline silicon etching solution additive and application thereof
CN102952650A (en) Washing agent and washing process for Solar solar cell silicon wafer washing agent and washing process thereof
CN102181935A (en) Method and corrosive liquid for making texture surface of monocrystalline silicon
CN106098810A (en) A kind of preparation method of crystal silicon solar energy battery suede structure
CN103993360B (en) Polycrystalline silicon texturing adjuvant and application thereof
CN107287597A (en) Wool-making agent of monocrystalline silicon surface processing and preparation method thereof and application method
CN113136144A (en) Polishing agent for rapid alkali polishing of crystal silicon wafer and application method thereof
CN103774239A (en) Cleaning and wool making technology for monocrystal silicon chip
CN104060325A (en) Polycrystalline silicon texturing solution and texturing method thereof
CN103696021A (en) Polycrystalline velvet additive-matched surface treatment technology after felting
CN114292708A (en) Silicon wafer cleaning agent for cleaning solar cell before texturing and use method
CN1983644A (en) Production of monocrystalline silicon solar battery suede
CN103668467B (en) A kind of polycrystalline silicon texturing additive and application thereof
CN103413759B (en) A kind of etching method of polysilicon chip
CN102867880A (en) Method for preparing double acid etching textures on polycrystalline silicon surface

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant