CN104576804A - Graphene/indium phosphide solar cell and preparation method thereof - Google Patents

Graphene/indium phosphide solar cell and preparation method thereof Download PDF

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Publication number
CN104576804A
CN104576804A CN201410830593.4A CN201410830593A CN104576804A CN 104576804 A CN104576804 A CN 104576804A CN 201410830593 A CN201410830593 A CN 201410830593A CN 104576804 A CN104576804 A CN 104576804A
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Prior art keywords
graphene
solar cell
indium phosphide
preparation
indium
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CN201410830593.4A
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Inventor
林时胜
王朋
李晓强
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Zhejiang University ZJU
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Zhejiang University ZJU
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Priority to CN201410830593.4A priority Critical patent/CN104576804A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/078Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier including different types of potential barriers provided for in two or more of groups H01L31/062 - H01L31/075
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention relates to a graphene/indium phosphide solar cell and a preparation method thereof. The graphene/indium phosphide solar cell comprises front electrodes, a graphene layer, an indium phosphide substrate and a back electrode sequentially from top to bottom. The preparation method of the graphene/indium phosphide solar cell comprises steps as follows: firstly, the back electrode is produced on one side of the indium phosphide substrate; then surface chemical cleaning is performed; graphene is transferred to the indium phosphide substrate; finally, the front electrodes are produced on the graphene. The high light transmission and the high electrical conductivity of a graphene material are utilized, and the excellent semiconductor property of indium phosphide is combined, so that the prepared solar cell is high in conversion efficiency; besides, the preparation method is simple in technology and lower in cost.

Description

A kind of Graphene/indium phosphide solar cell and preparation method thereof
Technical field
The present invention relates to a kind of solar cell and preparation method thereof, particularly relate to a kind of Graphene/indium phosphide solar cell and preparation method thereof, belong to photovoltaic solar battery power technical field.
Background technology
In recent years, solar cell, as a kind of important regenerative resource, causes the extensive concern of research and industrial circle.Wherein, silica-based solar cell, the particularly share of crystal-silicon solar cell occuping market ~ 90%.But compared with conventional power generation usage, solar cell cost of electricity-generating is still higher, limits ground large-scale application.One of reason that solar cell cost of electricity-generating is higher is that battery preparation cost is higher, and another one reason is that its electricity conversion still has much room for improvement.
Grapheme material to be found and after preparing, more research shows that grapheme material has excellent electricity, optics and engineering properties, as high carrier mobility, high transmission rate, high Young's modulus and pliability etc. for 2004 first.The character of these uniquenesses makes Graphene likely be widely used in field of photovoltaic power generation.At present, the heterojunction that existing researcher utilizes Graphene and silicon materials to be formed makes solar cell, records the highest transformation efficiency 14.5%.This efficiency need to improve compared with the efficiency 18.5% ~ 20.0% of current main flow single crystal silicon solar cell.For solar cell application, silicon materials energy gap is narrower, is indirect forbidden band simultaneously, is not optimal basic material.Indium phosphide is direct band gap material, and its energy gap is closest to the optimal value (1.34ev) of solar spectrum, and in addition, solar cell prepared by indium phosphide more effectively can resist space radiation damage than silicon and GaAs.And traditional indium phosphide solar cell complicated process of preparation, with high costs, be difficult to obtain and promote on a large scale.
Summary of the invention
The object of the present invention is to provide a kind of electricity conversion high and simple Graphene/indium phosphide solar cell of preparation technology and preparation method thereof.
Phosphorization phosphide indium layer, graphene layer and front electrode that Graphene/indium phosphide solar cell of the present invention is adulterated by backplate, N-shaped doping or p-type from bottom to top successively form, and in described graphene layer, Graphene is 1 ~ 10 layer.
The method preparing above-mentioned Graphene/indium phosphide solar cell comprises the steps:
1) backplate is made in the N-shaped doping of cleaning or the one side of p-type doping phosphatization indium sheet;
2) step 1) gained phosphatization indium sheet is soaked 5s ~ 30m in chemical cleaning solution and carry out surface clean, take out and drying;
3) Graphene is transferred to step 2) on the another side of the phosphatization indium sheet of gained;
4) on Graphene, front electrode is made.
In technique scheme, described Graphene is generally 1 ~ 10 layer.
Described backplate can be one or several the combination electrode in gold, palladium, silver, titanium, chromium, nickel and platinum.
Described chemical cleaning solution can be HCl, HNO 3, H 2sO 4, H 2o 2with the aqueous solution or the NH of one or more mixing in HF 3h 2the aqueous solution of one or more mixing in O, KOH and NaOH.
Described front electrode can be one or several the combination electrode in gold, palladium, silver, titanium, chromium, nickel and platinum.
The beneficial effect that the present invention compared with prior art has is:
1, compared with graphene/silicon solar cell, Graphene/indium phosphide solar cell can obtain higher open circuit voltage and transformation efficiency, and its capability of resistance to radiation is stronger;
2, compared with conventional solar cell, Graphene of the present invention/indium phosphide solar cell preparation technology is simple, cost is low.
accompanying drawing illustrates:
Fig. 1 is the structural representation of Graphene/indium phosphide solar cell;
Fig. 2 be Graphene/heterojunction of indium phosphide can be with schematic diagram.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
With reference to Fig. 1, Graphene/indium phosphide solar cell of the present invention has backplate 1, phosphorization phosphide indium layer 2, graphene layer 3 and front electrode 4 from bottom to top successively, and the band structure schematic diagram of Graphene and heterojunction of indium phosphide as shown in Figure 2.
Embodiment 1:
1) electron-beam vapor deposition method deposited gold electrode is utilized in p-type phosphatization indium sheet one side;
2) sample obtained is immersed the NH of mass concentration 10% 3h 2carry out surface clean in the O aqueous solution, take out after 10min and drying;
3) single-layer graphene is transferred on the another side of the phosphatization indium sheet of cleaning;
5) on Graphene, utilize thermal evaporation process depositing silver electrode to obtain Graphene/indium phosphide solar cell.
Embodiment 2:
1) magnetron sputtering deposition chromium electrode is utilized in N-shaped phosphatization indium sheet one side;
2) sample obtained is immersed in the HCl aqueous solution of mass concentration 20% and carry out surface clean, take out after 30min and drying;
3) 10 layer graphenes are transferred on the another side of the phosphatization indium sheet of cleaning;
5) on Graphene, utilize thermal evaporation process nickel deposited electrode to obtain Graphene/indium phosphide solar cell.
Embodiment 3:
1) magnetron sputtering deposition chromium/gold electrode is utilized in N-shaped phosphatization indium sheet one side;
2) sample obtained is immersed the H of mass concentration 5% 2sO 4carry out surface clean in the aqueous solution, take out after 10min and drying;
3) 3 layer graphenes are transferred on the another side of the phosphatization indium sheet of cleaning;
5) on Graphene, silk screen printing silver electrode obtains Graphene/indium phosphide solar cell.
Embodiment 4
1) magnetron sputtering deposition titanium/platinum electrode is utilized in p-type phosphatization indium sheet one side;
2) sample obtained is immersed the H of mass concentration 10% 2sO 4with the H of mass concentration 10% 2o 2to carry out surface clean in the aqueous solution of volume ratio 1:1 mixing, take out after 10min and drying;
3) 6 layer graphenes are transferred on the another side of the phosphatization indium sheet of cleaning;
4) on Graphene, magnetron sputtering titanium/nickel electrode obtains Graphene/indium phosphide solar cell.
Embodiment 5
1) electron-beam evaporation gold/titanium/platinum electrode is utilized in p-type phosphatization indium sheet one side;
2) sample obtained is immersed the HNO that mass concentration is 15% 3, H 2sO 4and H 2o 2to carry out surface clean in the aqueous solution of volume ratio 1:1:1 mixing, take out after 5s and drying;
3) 2 layer graphenes are transferred on the another side of the phosphatization indium sheet of cleaning;
4) on Graphene, magnetron sputtering silver/nickel electrode obtains Graphene/indium phosphide solar cell.
Embodiment 6
1) thermal evaporation deposition silver/chromium/nickel electrode is utilized in N-shaped phosphatization indium sheet one side;
2) sample obtained being immersed mass concentration is the NH of 20% 3h 2o and mass concentration are carry out surface clean in the aqueous solution that mixes with volume ratio 2:1 of KOH of 15%, take out and dry after 15min;
3) 8 layer graphenes are transferred on the another side of the phosphatization indium sheet of cleaning;
4) on Graphene, electron beam evaporation deposited gold/palladium electrode obtains Graphene/indium phosphide solar cell.

Claims (6)

1. Graphene/indium phosphide solar cell, it is characterized in that there is phosphorization phosphide indium layer (2), graphene layer (3) and front electrode (4) composition that backplate (1), N-shaped adulterate or p-type is adulterated from bottom to top successively, in described graphene layer (3), Graphene is 1 ~ 10 layer.
2. prepare the method for Graphene/indium phosphide solar cell according to claim 1, it is characterized in that the method comprises the steps:
1) backplate is made in the N-shaped doping of cleaning or the one side of p-type doping phosphatization indium sheet;
2) step 1) gained phosphatization indium sheet is soaked 5s ~ 30m in chemical cleaning solution and carry out surface clean, take out and drying;
3) Graphene is transferred to step 2) on the another side of the phosphatization indium sheet of gained;
4) on Graphene, front electrode is made.
3. the preparation method of Graphene/indium phosphide solar cell according to claim 2, is characterized in that described Graphene is 1 ~ 10 layer.
4. the preparation method of Graphene/indium phosphide solar cell according to claim 2, is characterized in that described backplate is one or several the combination electrode in gold, palladium, silver, titanium, chromium, nickel and platinum.
5. the preparation method of Graphene/indium phosphide solar cell according to claim 2, is characterized in that described chemical cleaning solution is HCl, HNO 3, H 2sO 4, H 2o 2with the aqueous solution or the NH of one or more mixing in HF 3h 2the aqueous solution of one or more mixing in O, KOH and NaOH.
6. the preparation method of Graphene/indium phosphide solar cell according to claim 2, is characterized in that described front electrode is one or several the combination electrode in gold, palladium, silver, titanium, chromium, nickel and platinum.
CN201410830593.4A 2014-12-29 2014-12-29 Graphene/indium phosphide solar cell and preparation method thereof Pending CN104576804A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109786482A (en) * 2018-12-13 2019-05-21 华南理工大学 A kind of schottky junction solar cell and preparation method thereof comprising electron transfer layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110129675A1 (en) * 2009-12-01 2011-06-02 Samsung Electronics Co., Ltd. Material including graphene and an inorganic material and method of manufacturing the material
CN102263144A (en) * 2011-07-29 2011-11-30 清华大学 Semiconductor heterojunction solar cell based on bionic moth eye and manufacturing method thereof
CN103311323A (en) * 2013-06-21 2013-09-18 杭州格蓝丰纳米科技有限公司 Graphene/silicon solar cell and manufacturing method thereof
CN104241415A (en) * 2014-09-10 2014-12-24 浙江大学 Graphene/gallium arsenide solar cell and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110129675A1 (en) * 2009-12-01 2011-06-02 Samsung Electronics Co., Ltd. Material including graphene and an inorganic material and method of manufacturing the material
CN102263144A (en) * 2011-07-29 2011-11-30 清华大学 Semiconductor heterojunction solar cell based on bionic moth eye and manufacturing method thereof
CN103311323A (en) * 2013-06-21 2013-09-18 杭州格蓝丰纳米科技有限公司 Graphene/silicon solar cell and manufacturing method thereof
CN104241415A (en) * 2014-09-10 2014-12-24 浙江大学 Graphene/gallium arsenide solar cell and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109786482A (en) * 2018-12-13 2019-05-21 华南理工大学 A kind of schottky junction solar cell and preparation method thereof comprising electron transfer layer

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Application publication date: 20150429