CN104571717A - 一种高导电率低反射率金属网格的模具制备方法及其模具 - Google Patents
一种高导电率低反射率金属网格的模具制备方法及其模具 Download PDFInfo
- Publication number
- CN104571717A CN104571717A CN201510062816.1A CN201510062816A CN104571717A CN 104571717 A CN104571717 A CN 104571717A CN 201510062816 A CN201510062816 A CN 201510062816A CN 104571717 A CN104571717 A CN 104571717A
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- China
- Prior art keywords
- photoresist layer
- mould
- layer
- transparent base
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 98
- 239000002184 metal Substances 0.000 title claims abstract description 98
- 238000002310 reflectometry Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title abstract description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 98
- 238000005530 etching Methods 0.000 claims abstract description 29
- 238000001020 plasma etching Methods 0.000 claims abstract description 8
- 238000002360 preparation method Methods 0.000 claims description 21
- 230000005611 electricity Effects 0.000 claims description 8
- 239000002002 slurry Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 239000012994 photoredox catalyst Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 238000004049 embossing Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- BPYKTIZUTYGOLE-IFADSCNNSA-N Bilirubin Chemical compound N1C(=O)C(C)=C(C=C)\C1=C\C1=C(C)C(CCC(O)=O)=C(CC2=C(C(C)=C(\C=C/3C(=C(C=C)C(=O)N\3)C)N2)CCC(O)=O)N1 BPYKTIZUTYGOLE-IFADSCNNSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- AEMOLEFTQBMNLQ-AQKNRBDQSA-N D-glucopyranuronic acid Chemical compound OC1O[C@H](C(O)=O)[C@@H](O)[C@H](O)[C@H]1O AEMOLEFTQBMNLQ-AQKNRBDQSA-N 0.000 description 1
- IAJILQKETJEXLJ-UHFFFAOYSA-N Galacturonsaeure Natural products O=CC(O)C(O)C(O)C(O)C(O)=O IAJILQKETJEXLJ-UHFFFAOYSA-N 0.000 description 1
- 238000003854 Surface Print Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229940097043 glucuronic acid Drugs 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Laminated Bodies (AREA)
- Floor Finish (AREA)
- Push-Button Switches (AREA)
Abstract
Description
实施例 | 上层光阻层 | 下层光阻层 | (上层光阻层的蚀刻速率-下层光阻层的蚀刻速率)/下层光阻层的蚀刻速率的百分值(%) | 光阻层厚度(微米) | 电浆功率(瓦) | 电浆蚀刻时间(分钟) | 金属网格平均线宽(微米) |
1 | EPG535 | EPI680 | 15 | 40 | 2000~ | 30 | 12 |
2 | EPG590 | EPI612 | 37 | 60 | 3000 | 2 | 7 |
3 | TR303 | TR310 | 43 | 20 | 2700 | 20 | 20 |
4 | EPG535 | EPI680 | 15 | 40 | 3500 | 30 | 42 |
5 | EPG535 | EPI680 | 15 | 40 | 2000 | 45 | 63 |
6 | SMS-PAC | SMS-F9Ca-PAC | 6 | 60 | 3000 | 2 | 14 |
7 | SMS-F9PGA-AN | SMS-F9CaGA-AN | 52 | 60 | 3000 | 2 | >70 |
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510062816.1A CN104571717B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的模具制备方法及其模具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510062816.1A CN104571717B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的模具制备方法及其模具 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104571717A true CN104571717A (zh) | 2015-04-29 |
CN104571717B CN104571717B (zh) | 2018-01-26 |
Family
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Family Applications (1)
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CN201510062816.1A Expired - Fee Related CN104571717B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的模具制备方法及其模具 |
Country Status (1)
Country | Link |
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CN (1) | CN104571717B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456390A (zh) * | 2013-02-05 | 2013-12-18 | 南昌欧菲光科技有限公司 | 导电膜及其制造方法 |
CN103913947A (zh) * | 2014-04-24 | 2014-07-09 | 上海和辉光电有限公司 | 可简化数组制程工序的微影成形方法 |
JP2014150118A (ja) * | 2013-01-31 | 2014-08-21 | Dainippon Printing Co Ltd | 電極フィルム、その製造方法および画像表示装置 |
TW201501920A (zh) * | 2013-03-26 | 2015-01-16 | Kaneka Corp | 導電性薄膜基板、透明導電性薄膜及其製造方法以及觸控面板 |
-
2015
- 2015-02-06 CN CN201510062816.1A patent/CN104571717B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014150118A (ja) * | 2013-01-31 | 2014-08-21 | Dainippon Printing Co Ltd | 電極フィルム、その製造方法および画像表示装置 |
CN103456390A (zh) * | 2013-02-05 | 2013-12-18 | 南昌欧菲光科技有限公司 | 导电膜及其制造方法 |
TW201501920A (zh) * | 2013-03-26 | 2015-01-16 | Kaneka Corp | 導電性薄膜基板、透明導電性薄膜及其製造方法以及觸控面板 |
CN103913947A (zh) * | 2014-04-24 | 2014-07-09 | 上海和辉光电有限公司 | 可简化数组制程工序的微影成形方法 |
Also Published As
Publication number | Publication date |
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CN104571717B (zh) | 2018-01-26 |
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Application publication date: 20150429 Assignee: FUJIAN NORCY NEW MATERIAL TECHNOLOGY Co.,Ltd. Assignor: FUJIAN NORCY SCIENCE PARK DEVELOPMENT CO.,LTD. Contract record no.: X2019980000594 Denomination of invention: Mould fabricating method of high-conductivity and low-reflectivity metal mesh and mould thereof Granted publication date: 20180126 License type: Common License Record date: 20191113 |
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