CN104562202A - Crystal transformation mechanism for sapphire crystal growth equipment - Google Patents
Crystal transformation mechanism for sapphire crystal growth equipment Download PDFInfo
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- CN104562202A CN104562202A CN201510042939.9A CN201510042939A CN104562202A CN 104562202 A CN104562202 A CN 104562202A CN 201510042939 A CN201510042939 A CN 201510042939A CN 104562202 A CN104562202 A CN 104562202A
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- weighing
- arranges
- water
- cavity volume
- rotation mechanism
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a crystal transformation mechanism for sapphire crystal growth equipment. The crystal transformation mechanism comprises a water cooling system, a bottom sealing piece, a top sealing piece and a weighing system, wherein the water cooling system is connected with a crystal furnace (18) through the bottom sealing piece and is connected with the weighing system by virtue of the top sealing piece; the top sealing piece is provided with a sealing flange (12) and magnetic fluid (9); the sealing flange (12) is provided with a flange plate and a center cylinder; the magnetic fluid (9) is arranged on the flange plate; a weighing chamber (2), a chamber top cover (1), a weighing sensor (3), a seed rod bracket (4) and a seed rod (5) are arranged on the weighing system; the weighing chamber (2) is arranged on a center cylinder of the sealing flange (12) in a sleeving manner; a first bearing (10) and a second bearing (11) are arranged between the center cylinder and the weighing chamber (2); the magnetic fluid (9) is arranged on the weighing chamber (2) in a sleeving manner for performing vacuum sealing; a water cooling sleeve (13) is arranged in the water-cooling system; a water inlet, a water inlet pipe (16), a water outlet and a water outlet pipe (17) are arranged on the water cooling sleeve (13); the water cooling sleeve (13) is arranged on a connecting sleeve (14); and the connecting sleeve (14) is connected with the sealing flange (12) and the bottom sealing piece.
Description
Technical field
This patent relates to kyropoulos sapphire crystal and manufactures field, particularly relates to a kind of brilliant rotation mechanism of sapphire crystallization equipment, is applicable to other similar field simultaneously.
Background technology
Sapphire is also known as white stone, that hardness is only second to adamantine crystalline material in the world, owing to having the high velocity of sound, excellent physics, machinery, chemistry and the infrared light transmission performance such as high temperature resistant, anticorrosive, high rigidity, high light transmittance, fusing point are high (2045 DEG C), the material that the fields such as microelectronics, aerospace, military project are badly in need of, by means of its high intensity, hardness, infrared transmission performance and thermal shock resistance always.This material is all widely used in fields such as optical window, semiconductor lighting, microwave devices, has become a kind of functional crystal material that consumption is only second to silicon single-crystal.Especially optical grade large-size sapphire material, because it has stable performance, the huge market demand, comprehensive utilization ratio and added value of product high, becomes in recent years research and development and industrialization focus both at home and abroad.The growth method of sapphire crystal is a lot, but only has kyropoulos could obtain the sapphire crystal of defect and the few large size high optical quality of stress, and the sapphire material of current 70% is manufactured by kyropoulos.
The general process of kyropoulos sapphire crystal manufacture is the seed crystal and melt contacts of catching a cold one, if the temperature at interface is lower than zero pour, then seed crystal starts growth, constantly grow up to make crystal, just need the temperature reducing melt gradually, simultaneously rotating crystal, to improve the temperature distribution of melt.Also slowly (or stage by stage) can carry crystal, to expand radiating surface.Crystal does not contact with sidewall of crucible in process of growth or at the end of growth, this greatly reduces the stress of crystal.But, when crystal and remaining melt depart from, usually larger thermal shocking can be produced.Pyrosol top-seeded solution growth conventional is at present improvement and the development of this kyropoulos.
In sapphire crystal manufacturing processed, seed rod needs to rotate, and the seed rod structure of general direct water-cooling, rotation is that motor and seed rod top are completed by toothed belt transmission.But have the water-cooling structure of higher weighing precision, adopt this rotation mode, not only water coolant is on impact of having weighed, driven by motor seed rod rotates also can affect weighing precision.
Summary of the invention
(1) technical problem that will solve
This patent devises a kind of brilliant rotation mechanism of sapphire crystallization equipment, adopt magnetic fluid and corrugated tube to carry out vacuum-sealing, water-cooling system and weighing system depart from, non rotating, thus improve the measuring accuracy of weighing system, and the sealing property of water-cooling system is also improved.
(2) technical scheme
For achieving the above object, this patent provides a kind of brilliant rotation mechanism of sapphire crystallization equipment, comprise water-cooling system, lower seals, top seal and weighing system, described water-cooling system is rigidly connected with lift platform 19, and be connected with crystal furnace 18 by described lower seals, be connected with described weighing system by described top seal.
Described lower seals is set to corrugated tube 15, and two of described corrugated tube 15 arranges mounting flange.
Described top seal arranges tongued and grooved flanges 12 and magnetic fluid 9, and described tongued and grooved flanges 12 arranges ring flange and centered cylinder, and described magnetic fluid 9 is arranged on described ring flange.
Described weighing system arranges cavity volume 2 of weighing, the top of described cavity volume 2 of weighing arranges cavity volume top cover 1 and seals, described cavity volume top cover 1 arranges LOAD CELLS 3, and described LOAD CELLS 3 connects seed rod support 4, and described seed rod support 4 connects seed rod 5.
Described cavity volume 2 of weighing is enclosed within the centered cylinder of described tongued and grooved flanges 12, described centered cylinder and weigh between cavity volume 2 and arrange clutch shaft bearing 10 and the second bearing 11, and described magnetic fluid 9 is enclosed within described weighs on cavity volume 2, carries out vacuum-sealing.
Described water-cooling system arranges water cold sleeve 13, described water cold sleeve 13 arranges water-in, described water-in connects water inlet pipe 16, described water cold sleeve sets out the mouth of a river, described water outlet connects rising pipe 17, described water cold sleeve 13 is arranged on sleeved 14, described sleeved 14 top arranges flange and is connected with described tongued and grooved flanges 12, bottom arranges flange and is connected with described lower seals, described lower seals is through the center hole of described lift platform 19, and described sleeved 14 is connected with described lift platform 19.
Described cavity volume 2 of weighing arranges synchromesh gear 6, connects rotating machine 8 by Timing Belt 7.
(3) beneficial effect
As can be seen from technique scheme, this patent has following beneficial effect:
1, water-cooling system and weighing system depart from, and ensure that the Measurement reliability of weighing system.
2, water-cooling system fixes non rotating, and sealing property is improved, to processing request also corresponding reduction.
Accompanying drawing explanation
Fig. 1 is a kind of brilliant rotation mechanism schematic diagram of sapphire crystallization equipment.
Embodiment
Below in conjunction with specific embodiment, this patent is further expanded description, but it is pointed out that this patent structure required for protection is not limited to the concrete structure in embodiment and Figure of description.For other structure formations that those of ordinary skill in the art can know by inference, also belong within the present invention's scope required for protection.
A kind of brilliant rotation mechanism of sapphire crystallization equipment, comprise water-cooling system, lower seals, top seal and weighing system, described water-cooling system is rigidly connected with lift platform 19, and therefore along with the lifting of described lift platform 19, described brilliant rotation mechanism also rises thereupon or declines.
Described water-cooling system is connected with crystal furnace 18 by described lower seals, is connected with described weighing system by described top seal.Described crystal furnace 18 carries out sapphire crystal growth.
Described lower seals is used for carrying out vacuum-sealing, vacuum environment in crystal furnace 18 described in guarantee, be set to corrugated tube 15, two of described corrugated tube 15 arranges mounting flange, can connect, and can stretch up and down, the bottom of described corrugated tube 15 can connect described crystal furnace 18, and top can connect described water-cooling system.
Described top seal arranges tongued and grooved flanges 12 and magnetic fluid 9, and described tongued and grooved flanges 12 arranges ring flange and centered cylinder, and described magnetic fluid 9 is arranged on described ring flange.Described top seal is used for carrying out vacuum-sealing, the vacuum environment in the crystal furnace 18 described in guarantee.
Described weighing system arranges cavity volume 2 of weighing, the top of described cavity volume 2 of weighing arranges cavity volume top cover 1 and seals, described cavity volume top cover 1 arranges LOAD CELLS 3, described LOAD CELLS 3 connects seed rod support 4, described seed rod support 4 connects seed rod 5, described seed rod 5 connects seed chuck, described seed chuck connects seed crystal, described seed crystal carries out sapphire crystal growth, therefore the weight of sapphire crystal is applied in described LOAD CELLS 3 by described seed rod 5, and LOAD CELLS 3 carries out the measurement of crystal weight.
Described cavity volume 2 of weighing is enclosed within the centered cylinder of described tongued and grooved flanges 12, described centered cylinder and weigh between cavity volume 2 and arrange clutch shaft bearing 10 and the second bearing 11, and described magnetic fluid 9 is enclosed within described weighs on cavity volume 2, carries out vacuum-sealing.Described clutch shaft bearing 10 and the second bearing 11 realize described cavity volume 2 of weighing and can rotate around the centered cylinder of described tongued and grooved flanges 12, and described magnetic fluid 9 realizes vacuum-sealing, the vacuum environment in the crystal furnace 18 described in guarantee.
Described water-cooling system arranges water cold sleeve 13, and described water cold sleeve 13 arranges water-in, and described water-in connects water inlet pipe 16, described water cold sleeve sets out the mouth of a river, and described water outlet connects rising pipe 17.Water coolant enters described water cold sleeve 13 from described water inlet pipe 16, and carry heat from described rising pipe 17 out, the seed rod 5 described in guarantee can not be overheated.Described water cold sleeve 13 is arranged on sleeved 14, described sleeved 14 top arranges flange and is connected with described tongued and grooved flanges 12, bottom arranges flange and is connected with described lower seals, described lower seals is through the center hole of described lift platform 19, and described sleeved 14 is connected with described lift platform 19.
Described cavity volume 2 of weighing arranges synchromesh gear 6, connects rotating machine 8 by Timing Belt 7, described rotating machine 8 just can drive described cavity volume 2 of weighing to rotate, and the seed rod 5 described in driving rotates.
In sum, this patent devises a kind of brilliant rotation mechanism of sapphire crystallization equipment, magnetic fluid and corrugated tube is adopted to carry out vacuum-sealing, ensure that the vacuum growing environment of sapphire crystal, and water-cooling system and weighing system depart from, non rotating, improves the measuring accuracy of weighing system on the one hand, also improves the sealing property of water-cooling system simultaneously.
Claims (7)
1. the brilliant rotation mechanism of a sapphire crystallization equipment, it is characterized in that: comprise water-cooling system, lower seals, top seal and weighing system, described water-cooling system is rigidly connected with lift platform (19), and be connected with crystal furnace (18) by described lower seals, be connected with described weighing system by described top seal.
2. the brilliant rotation mechanism of a kind of sapphire crystallization equipment as claimed in claim 1, is characterized in that: described lower seals is set to corrugated tube (15), two of described corrugated tube (15) arranges mounting flange.
3. the brilliant rotation mechanism of a kind of sapphire crystallization equipment as claimed in claim 1, it is characterized in that: described top seal arranges tongued and grooved flanges (12) and magnetic fluid (9), described tongued and grooved flanges (12) arranges ring flange and centered cylinder, and described magnetic fluid (9) is arranged on described ring flange.
4. the brilliant rotation mechanism of a kind of sapphire crystallization equipment as claimed in claim 1, it is characterized in that: described weighing system arranges cavity volume (2) of weighing, the top of described cavity volume of weighing (2) arranges cavity volume top cover (1) and seals, described cavity volume top cover (1) arranges LOAD CELLS (3), described LOAD CELLS (3) connects seed rod support (4), and described seed rod support (4) connects seed rod (5).
5. the brilliant rotation mechanism of a kind of sapphire crystallization equipment as described in claim 3,4, it is characterized in that: described cavity volume of weighing (2) is enclosed within the centered cylinder of described tongued and grooved flanges (12), clutch shaft bearing (10) and the second bearing (11) are set between described centered cylinder and cavity volume of weighing (2), described magnetic fluid (9) is enclosed within described cavity volume of weighing (2), carries out vacuum-sealing.
6. as claim 1, the brilliant rotation mechanism of a kind of sapphire crystallization equipment described in 3, it is characterized in that: described water-cooling system arranges water cold sleeve (13), described water cold sleeve (13) arranges water-in, described water-in connects water inlet pipe (16), described water cold sleeve sets out the mouth of a river, described water outlet connects rising pipe (17), described water cold sleeve (13) is arranged on sleeved (14), described sleeved (14) top arranges flange and is connected with described tongued and grooved flanges (12), bottom arranges flange and is connected with described lower seals, described lower seals is through the center hole of described lift platform (19), described sleeved (14) is connected with described lift platform (19).
7. the brilliant rotation mechanism of a kind of sapphire crystallization equipment as claimed in claim 4, it is characterized in that: described cavity volume of weighing (2) arranges synchromesh gear (6), connect rotating machine (8) by Timing Belt (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510042939.9A CN104562202A (en) | 2015-01-28 | 2015-01-28 | Crystal transformation mechanism for sapphire crystal growth equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510042939.9A CN104562202A (en) | 2015-01-28 | 2015-01-28 | Crystal transformation mechanism for sapphire crystal growth equipment |
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| CN104562202A true CN104562202A (en) | 2015-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510042939.9A Pending CN104562202A (en) | 2015-01-28 | 2015-01-28 | Crystal transformation mechanism for sapphire crystal growth equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104862776A (en) * | 2015-05-22 | 2015-08-26 | 内蒙古晶环电子材料有限公司 | Novel upper shaft cooling rod for sapphires |
| CN104894643A (en) * | 2015-05-20 | 2015-09-09 | 内蒙古晶环电子材料有限公司 | Novel sapphire upper shaft structure |
| CN105926038A (en) * | 2016-05-24 | 2016-09-07 | 上海申骅机电设备制造有限公司 | Sapphire crystal growth lifting device |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| CN202530196U (en) * | 2012-01-21 | 2012-11-14 | 徐州协鑫光电科技有限公司 | Seed rod for growing single crystal and single crystal growing equipment comprising seed rod |
| CN102995113A (en) * | 2012-12-04 | 2013-03-27 | 江苏华盛天龙光电设备股份有限公司 | Weighing device in artificial crystal growth process |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN204491037U (en) * | 2015-01-28 | 2015-07-22 | 杭州晶一智能科技有限公司 | A kind of brilliant rotation mechanism of sapphire crystallization equipment |
-
2015
- 2015-01-28 CN CN201510042939.9A patent/CN104562202A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| CN202530196U (en) * | 2012-01-21 | 2012-11-14 | 徐州协鑫光电科技有限公司 | Seed rod for growing single crystal and single crystal growing equipment comprising seed rod |
| CN102995113A (en) * | 2012-12-04 | 2013-03-27 | 江苏华盛天龙光电设备股份有限公司 | Weighing device in artificial crystal growth process |
| CN203569234U (en) * | 2013-11-18 | 2014-04-30 | 上海森松压力容器有限公司 | Seed crystal rotating lift mechanism for sapphire furnace |
| CN204491037U (en) * | 2015-01-28 | 2015-07-22 | 杭州晶一智能科技有限公司 | A kind of brilliant rotation mechanism of sapphire crystallization equipment |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104894643A (en) * | 2015-05-20 | 2015-09-09 | 内蒙古晶环电子材料有限公司 | Novel sapphire upper shaft structure |
| CN104862776A (en) * | 2015-05-22 | 2015-08-26 | 内蒙古晶环电子材料有限公司 | Novel upper shaft cooling rod for sapphires |
| CN104862776B (en) * | 2015-05-22 | 2017-12-29 | 内蒙古晶环电子材料有限公司 | Axle cooling rod on a kind of new sapphire |
| CN105926038A (en) * | 2016-05-24 | 2016-09-07 | 上海申骅机电设备制造有限公司 | Sapphire crystal growth lifting device |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
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Application publication date: 20150429 |
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