CN104344891B - A kind of light intensity automatic regulating device for broad sense ellipsometer and control method thereof - Google Patents
A kind of light intensity automatic regulating device for broad sense ellipsometer and control method thereof Download PDFInfo
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Abstract
The present invention discloses a kind of broad sense ellipsometer light intensity automatic regulating device and control method thereof. Device mainly comprises computer, spectrograph, servomotor controller, DC servo motor, incremental encoder and neutral density filter rotating disk. When broad sense ellipsometer signal wiring completes, whether the curve of spectrum according to spectrograph collection is saturated and whether the overwhelming majority determines whether to be rotated DC servo motor in spectrograph linear response interval, thus drives neutral density filter plate dial rotation to switch neutral density filter plate to change light source irradiation light intensity magnitude out. The present invention can realize dual rotary loop expansion pipe broad sense ellipsometer light intensity automatically being adjusted, and response is fast, simple to operate.
Description
Technical field
The invention belongs to the light path of broad sense ellipsometer debugging field, it is specifically related to a kind of for dual rotary loop expansion pipe broad sense ellipsometer light intensity automatic regulating device and control method thereof.
Background technology
Based on, in the semiconductor nano-structure feature size fields of measurement of optics principle, ellipsometer is a kind of characteristic dimension metering facility the most common. It is a kind of universal optical surveying instrument utilizing polarisation of light characteristic to obtain testing sample information. Its ultimate principle is, by the polarizer, special elliptically polarized light is projected testing sample surface, by measuring the reflected light (or transmitted light) of testing sample, to obtain polarization state change (comprise amplitude ratio and phase differential) of polarized light before and after reflection (or transmission), and then therefrom extract the information of testing sample. People (the R.W.Collinsetal. such as the Ke Linsi of the vertical university of Pennsylvania, America, J.Opt.Soc.Am.A, Vol.16, pp.1997-2006,1999) proposing dual rotary and compensate type broad sense ellipsometer measurement method, the loop expansion pipes that in this kind of ellipsometer structure, employing two rotates realize the modulation and demodulation of the phase place of polarized light. In actual measuring process, it can measure spectrum scope wide, environmental temperature stability is required low, and measuring speed is fast. It can obtain normalized 4 �� 4 rank Muller matrixes totally 15 parameters of tested sample in one-shot measurement simultaneously, and does not need to change measuring system configuration. Thus have a wide range of applications in semiconductor nano-structure feature size is measured.
Compensating in type broad sense ellipsometer system in dual rotary, spectrograph is used to the optics of Measurement and analysis measure sample surface reflection bundle. In spectrograph, the transfer principle of photodetector is: first by photosensitive unit, photon is converted into electric charge, then is that voltage exports by charge conversion, and output voltage size is namely corresponding to measuring light intensity magnitude (usually with counts counting in spectrograph). It take wavelength as X-coordinate that spectrograph software kit can show, taking the light intensity that receives as the Dynamic Two-dimensional figure of ordinate zou, it is possible to the light intensity finding different wavelength points places is different. In some conditions, as broad sense ellipsometer to be applied in the surface measuring low reflectivity sample, so needing the light source adopting light intensity bigger, the light intensity at one or continuous multiple wavelength points place may cause the saturated of photodetector on spectrograph more than a maximum value, and observation and the collection of data can be brought disadvantageous impact by this. Therefore certain mode must be taked to weaken the light intensity of all wave band (i.e. wavelength region 200-1200nm) wavelength as required. The method extensively adopted at present weakens light intensity with a diaphragm.
Summary of the invention
It is an object of the invention to provide a kind of light intensity automatic regulating device for dual rotary loop expansion pipe broad sense ellipsometer and control method thereof, the present invention can realize the light intensity to all wave band wavelength and be weakened to the numerical value meeting requirement, and response is fast, simple to operate.
A kind of light intensity automatic regulating device for broad sense ellipsometer provided by the invention, it is characterised in that, this device comprises computer, spectrograph, servomotor controller, incremental encoder, DC servo motor and neutral density filter rotating disk;
Incremental encoder is arranged in DC servo motor; Neutral density filter rotating disk comprises the light hole neutral density filter different with multi-disc transmittance; Neutral density filter rotating disk is rotatably arranged on DC servo motor end face; DC servo motor is connected with computer by servomotor controller; Incremental encoder is connected with servomotor controller; Spectrograph is connected with computer by USB port;
Computer, for controlling the work of spectrograph, controls the motion of DC servo motor by servomotor controller; Whether the curve of spectrum collected according to spectrograph saturated and whether the curve of spectrum determines whether to be rotated DC servo motor in spectrograph linear response interval, thus drives described neutral density filter plate dial rotation to switch neutral density filter plate to change light source irradiation light intensity magnitude out.
The control method of above-mentioned light intensity automatic regulating device provided by the invention, comprises the steps:
Driving DC servo motor to return logic zero-bit by servomotor controller on 1st step computer, the logic zero position of DC servo motor is that light beam of light source is just passed through from the light hole of neutral density filter rotating disk;
2nd step utilizes spectrograph to carry out spectrum data gathering according to the parameter arranged, and obtains the curve of spectrum, returns to computer by spectrograph;
3rd step computer judges that whether the curve of spectrum is saturated; If the curve of spectrum is unsaturated, proceed to the 5th step; If the curve of spectrum is saturated, then enter the 4th step;
4th step computer by servomotor controller drive DC servo motor turn to next neutral density filter place, even if light beam of light source by this neutral density filter to weaken light intensity, proceed to the 2nd step afterwards;
5th step judges the curve of spectrum, and whether major part is interval in linear response, if it does, enter the 6th step, otherwise, proceed to the 4th step;
6th step does not need to weaken light intensity by neutral density filter, terminates adjustment.
Compare with the existing broad sense self-adjusting device of ellipsometer light intensity, light intensity automatic regulating device provided by the invention is to be automatically controlled to core to DC servo motor, by to the analysis of spectrograph image data determines whether DC servo motor is rotated respective angles to realize the switching of neutral density filter, the light intensity magnitude that can realize spectrograph surface is received is the most reasonable, namely supersaturation also can not can not cross little due to light intensity and cannot analyze, better meet the linear response of spectrograph simultaneously.
The automatic response process speed of this light intensity automatic regulating device is fast, precision height, show excellent measuring repeatability and stability simultaneously, and compact overall structure, working method is simple, it is convenient to realize, and automatically controls and fields of measurement has wide application prospects at broad sense ellipsometer.
Accompanying drawing explanation
Fig. 1 is optical gauge light intensity automatic adjustment system structural representation;
Fig. 2 is neutral density filter turntable structure schematic diagram;
Fig. 3 is that dual rotary compensates type broad sense ellipsometer hardware connection structure schematic diagram;
Fig. 4 is control method schematic flow sheet provided by the invention;
The unsaturation curve of spectrum that Fig. 5 obtains after being spectrograph collection analysis;
The saturated light spectral curve that Fig. 6 obtains after being spectrograph collection analysis;
Fig. 7 is the curve of spectrum of a major part in linear response interval.
Embodiment
Although a diaphragm can be adopted at present to weaken light source intensity, but the effect that generally diaphragm weakens light intensity is only directed to a smaller range of wavelengths, such as independent ultraviolet band, visible waveband or infrared band, and often can not reach requirement for all wave band required by broad sense ellipsometer; And diaphragm is with manually controlling in most cases, control accuracy is not very high, not flexible yet. Utilize the neutral density filter having different transmitance, then it is equipped with the device of control automatically, just can meet requirement well.
General non-adjustable neutral density filter is divided into absorption type and reflection-type (or metal mold), it is possible to be used for Attenuated laser and other optical signals. Absorption type spectral filter can reduce retroreflection, by reducing reflection loss further at spectral filter plated surface anti-reflection film. The optical density (OD) of standard absorption type neutral density filter between 0.1 to 0.6, and the optical density (OD) being coated with anti-reflection film model be one of 0.3,1.0 and two kind of rete scope be 2.0. Reflection-type spectral filter substrate adopts BK7 or UV fused quartz. Ultraviolet-grade fused silica is suitable for ultraviolet spectral range most. Transformational relation between optical density (OD) OD and transmissivity T is such as formula shown in (1).
OD=log10(1/T) or T=10-OD(1)
General spectrograph is 0��65535counts for the responding range of the light intensity received, such as the QE65Pro spectrograph of OceanOptics company used in example, and generally the existing adjustment for light intensity just makes light intensity magnitude be in this interval of 0��65535counts. But, this but have ignored the problem of the linear response of photodetector in spectrograph, and namely photon conversion is become the linear of light intensity (counts) by detector. Because the photodetector of most spectrograph is not whole response interval is all very linear, meet the just middle part required, as QE65Pro spectrograph linear response preferably interval be 5000��40000counts, so we should make light intensity magnitude drop on this interval when adjustment light intensity magnitude automatically as far as possible, instead of 0 general thought��65535counts.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further. It should be noted that at this, the explanation implementing mode for these understands the present invention for helping, but does not form limitation of the invention. In addition, if below in described each enforcement mode of the present invention involved technology feature do not form conflict each other and just can mutually combine.
As shown in Figure 1, the light intensity automatic regulating device that present example provides at least comprises computer 1, spectrograph 2, servomotor controller 3, incremental encoder 4, DC servo motor 5 and neutral density filter rotating disk 6.
Incremental encoder 4 is arranged in DC servo motor 5; As shown in Figure 2; neutral density filter rotating disk 6 comprises a light hole 7 neutral density filter different with three transmittances; namely transmittance be 80% neutral density filter 8, transmittance be 50% neutral density filter 9 and transmittance be 30% neutral density filter 10 (herein for convenience of description; only adopt three neutral density filters, neutral density filter rotating disk 6 is installed any multi-disc neutral density filter also within protection domain of the present invention).
Neutral density filter rotating disk 6 is arranged on DC servo motor 5 end face; DC servo motor 5 is connected with computer 1 by servomotor controller 3; Incremental encoder 4 is connected with servomotor controller 3; Spectrograph 2 is connected with computer 1 by USB port.
Computer 1, for controlling the work of spectrograph 2, controls the motion of DC servo motor 5 by servomotor controller 3; Whether the curve of spectrum collected according to spectrograph 2 saturated and whether the curve of spectrum determines whether to be rotated DC servo motor 5 in spectrograph linear response interval, thus drives neutral density filter plate rotating disk 6 to rotate to switch neutral density filter plate to change light source irradiation light intensity magnitude out.
The concrete function module composition that computer 1 is described of citing below.
DC servo motor control module and spectrograph control module it is provided with in computer 1; Wherein, DC servo motor control module mainly completes the setting of DC servo motor 5 motion parameter and the control of the corresponding operation action of DC servo motor 5, can receive the return message from servomotor controller 3 simultaneously; Spectrograph control module is mainly used in after DC servo motor 5 runs to specific position the control to the basic behavior of the setting of spectrograph 2 parameter and spectrograph 2, receives simultaneously and stores the spectroscopic data that spectrograph 2 gathers.
In computer, the working process of each module is as follows:
(1) DC servo motor control module completes the setting of DC servo motor 5 motion parameter, and operate DC servo motor 5 by servomotor controller 3 and return to zero-bit (light beam of light source just passes through from light hole 7, and namely light beam is without neutral density filter 8,9 or 10).
(2) configuration of the system parameter to spectrograph 2 is completed by spectrograph control module.
(3) DC servo motor 5 and spectrograph 2 is stopped by DC servo motor control module and spectrograph control module respectively.
The detailed operation process of apparatus of the present invention is as follows:
The first step, completes the connection that dual rotary compensates the hardware device of type broad sense ellipsometer light intensity automatic regulating device.
(1.1) completing computer 1 to be connected with spectrograph 2, the normal of servomotor controller 3, wherein spectrograph 2 is connected by standard USB data line with computer 1; After DC servo motor 5 is connected with servomotor controller 3, servomotor controller 3 is also connected with computer 1 by standard network data line.
(1.2) complete (1.1) afterwards dual rotary compensate type broad sense ellipsometer light intensity automatic regulating device hardware device connect complete. Then need to be installed in DC servo motor 5 neutral density filter rotating disk 6.
(1.3) the hardware one-piece construction figure after having connected is as shown in Figure 3. Wherein, incremental encoder 4, owing to being the inside being arranged on DC servo motor 5, does not mark out on figure; The connection that light source 11, spectrograph play inclined arm 12 and analyzing arm 13 belongs to the basic connection of ellipsometer structure, does not elaborate at this.
2nd step, it may also be useful to the dual rotary connected compensates type broad sense ellipsometer light intensity automatic regulating device and starts a spectrum data gathering job, and carries out the adjustment of DC servo motor 5 according to the spectroscopic data collected. The control operating process of computer is as shown in Figure 4.
(2.1) on computer 1 by the correlation parameter of servomotor controller 3 configuring direct current servomotor 5, the velocity of rotation of DC servo motor 5, acceleration, retarded velocity is comprised, the angle (90 ��) every time rotated; Configure the correlation parameter of spectrograph 2 on computer 1, comprise spectrograph integral time and sampling number.
(2.2) computer 1 drives DC servo motor 5 times logic zero-bits by servomotor controller 3, return the positional information of DC servo motor 5 by incremental encoder 4. The logic zero position of DC servo motor 5 is that light beam of light source is just passed through from the light hole 7 of neutral density filter rotating disk 6, and namely light beam is without neutral density filter 8,9 and 10.
(2.3) open spectrograph 2, collect the curve of spectrum according to what the parameter set before carried out spectroscopic data, return to computer 1 and record by spectrograph 2.
(2.4) judge that whether the curve of spectrum is saturated, if the curve of spectrum unsaturated (one the unsaturated curve of spectrum is as shown in Figure 5), enter step (2.5), otherwise proceed to step (2.6);
(2.5) after the curve of spectrum is unsaturated, whether major part is interval in linear response to carry out judging the curve of spectrum, if it does, proceed to step (2.7), otherwise, enter step (2.6);
The concrete operation repeatedly regulated is the same judges whether saturated process. Article one, the curve of spectrum of major part in linear response interval is as shown in Figure 7.
Present example adopt following standard to judge the curve of spectrum major part is interval in linear response, namely minimum light intensity is at more than 5000counts, and the curve of spectrum point peak of 80% is no more than 40000counts.
(2.6) if the curve of spectrum is saturated (one the saturated curve of spectrum as shown in Figure 6, the saturation count of general spectrograph is about 65535, namely light intensity exceed this value will be saturated), then prove that the light intensity of light source has exceeded its measurement threshold value when arriving on spectrograph 2, so computer needs to drive DC servo motor 5 to rotate by servomotor controller 3, light beam of light source needs to weaken light intensity by neutral density filter 8,9 or 10. Specifically it is operating as and drives DC servo motor 5 to turn to next neutral density filter by computer 1 servomotor controller 3, even if light beam of light source is by the neutral density filter 8 that transmissivity T is 80%, make the light intensity decreasing of light source be original 80%. Repeating step (2.3) more afterwards, carry out in (2.4) whether saturated judgement again, if it is still saturated, then continue to drive DC servo motor 5 to turn to next neutral density filter place, even if light beam of light source is by the neutral density filter 9 that transmissivity T is 50%, the light intensity decreasing of light source is made to be original 50%. Repeating step (2.3) more afterwards, carry out in (2.4) whether saturated judgement again, if it is still saturated, then continue to drive DC servo motor 5 to turn to next neutral density filter place, even if light beam of light source is by the neutral density filter 10 that transmissivity T is 30%, the light intensity decreasing of light source is made to be original 30%. Final measurement on spectrograph 2 obtains a unsaturation, the satisfied curve of spectrum required.
(2.7) curve of spectrum major part is interval in linear response, prove that the light intensity of light source does not exceed its measurement threshold value when arriving on spectrograph 2, so computer need not drive DC servo motor 5 to rotate by servomotor controller 3, light beam of light source does not need to weaken light intensity by neutral density filter 8,9 or 10, terminates.
Above-mentioned steps is only for a kind of neutral density filter arranged distribution. For the broad sense ellipsometer of other neutral density filter arranged distribution modes, this light intensity automatic adjusting method and device are applicable equally.
The present invention is not only confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; other multiple embodiment can be adopted to implement the present invention; therefore; the project organization of every employing the present invention and thinking; do the design that some simply change or change, all fall into the scope of protection of the invention.
Claims (2)
1. the control method for the light intensity automatic regulating device of broad sense ellipsometer, it is characterized in that, this light intensity automatic regulating device comprises computer, spectrograph, servomotor controller, incremental encoder, DC servo motor and neutral density filter rotating disk; Incremental encoder is arranged in DC servo motor; Neutral density filter rotating disk comprises the light hole neutral density filter different with multi-disc transmittance; Neutral density filter rotating disk is rotatably arranged on DC servo motor end face; DC servo motor is connected with computer by servomotor controller; Incremental encoder is connected with servomotor controller; Spectrograph is connected with computer by USB port;
Described control method specifically comprises the steps:
Driving DC servo motor to return logic zero-bit by servomotor controller on 1st step computer, the logic zero position of DC servo motor is that light beam of light source is just passed through from the light hole of neutral density filter rotating disk;
2nd step utilizes spectrograph to carry out spectrum data gathering according to the parameter arranged, and obtains the curve of spectrum, returns to computer by spectrograph;
3rd step computer judges that whether the curve of spectrum is saturated; If the curve of spectrum is unsaturated, proceed to the 5th step; If the curve of spectrum is saturated, then enter the 4th step;
4th step computer by servomotor controller drive DC servo motor turn to next neutral density filter place, even if light beam of light source by this neutral density filter to weaken light intensity, proceed to the 2nd step afterwards;
5th step judges the curve of spectrum, and whether major part is interval in linear response, if it does, enter the 6th step, otherwise, proceed to the 4th step;
6th step terminates adjustment.
2. control method according to claim 1, it is characterised in that, in the 5th step, described judge the curve of spectrum major part is interval in linear response, referring to that minimum light intensity is at more than 5000counts, the curve of spectrum point peak of 80% is no more than 40000counts.
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| US5956147A (en) * | 1997-06-13 | 1999-09-21 | Lockheed Martin Energy Research Corporation | Two modulator generalized ellipsometer for complete mueller matrix measurement |
| CN101231238A (en) * | 2007-01-23 | 2008-07-30 | 中国科学院力学研究所 | Method and apparatus for regulating light intensity in bias ellipsoid measurement |
| CN103217988A (en) * | 2013-03-20 | 2013-07-24 | 华中科技大学 | Synchronous control system of generalized ellipsometer |
| CN103471992A (en) * | 2013-09-03 | 2013-12-25 | 华中科技大学 | Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer |
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| KR20130019495A (en) * | 2011-08-17 | 2013-02-27 | 한국표준과학연구원 | Rotating-element ellipsometer and method for measuring properties of the sample using the same |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5956147A (en) * | 1997-06-13 | 1999-09-21 | Lockheed Martin Energy Research Corporation | Two modulator generalized ellipsometer for complete mueller matrix measurement |
| CN101231238A (en) * | 2007-01-23 | 2008-07-30 | 中国科学院力学研究所 | Method and apparatus for regulating light intensity in bias ellipsoid measurement |
| CN103217988A (en) * | 2013-03-20 | 2013-07-24 | 华中科技大学 | Synchronous control system of generalized ellipsometer |
| CN103471992A (en) * | 2013-09-03 | 2013-12-25 | 华中科技大学 | Light intensity smoothing device and method of xenon lamp light sources in spectrum ellipsometer |
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