CN102879184A - Screw-in type beam collimation detection unit and method - Google Patents

Screw-in type beam collimation detection unit and method Download PDF

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Publication number
CN102879184A
CN102879184A CN2012103914636A CN201210391463A CN102879184A CN 102879184 A CN102879184 A CN 102879184A CN 2012103914636 A CN2012103914636 A CN 2012103914636A CN 201210391463 A CN201210391463 A CN 201210391463A CN 102879184 A CN102879184 A CN 102879184A
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CN
China
Prior art keywords
screw
light beam
imaging device
catoptron
collimation
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Pending
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CN2012103914636A
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Chinese (zh)
Inventor
吕志伟
刘晓妍
王新
韩兴博
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN2012103914636A priority Critical patent/CN102879184A/en
Publication of CN102879184A publication Critical patent/CN102879184A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a screw-in type beam collimation detection unit and method, belongs to the field of optics and aims to solve the problem that the conventional beam collimation method is complicated in operation process, high in using difficulty and low in practicality. The screw-in type beam collimation detection unit comprises a laser, an iris diaphragm, a cross wire, a screw-in type reflector, a precision turntable and an imaging device, wherein the screw-in type reflector is controlled by the precision turntable to rotate to enter a light path, so that an included angle between the mirror surface of the screw-in type reflector and an output beam optical axis of the laser is equal to an included angle between the optical axes of the screw-in type reflector and the imaging device; a light beam emitted from the laser enters the iris diaphragm; a transmitted light beam enters the cross wire; a cross light beam emitted from the cross wire enters the screw-in type reflector; the light beam reflected from the screw-in type reflector enters the imaging device; and the imaging device converts a light intensity signal into an electric signal and transmits the electric signal to a data processing unit so as to acquire the collimation degree of the current light beam.

Description

But screw-in beam collimation detecting unit and beam collimation degree detection method
Technical field
But the present invention relates to screw-in beam collimation detecting unit and beam collimation degree detection method, belong to optical field.
Background technology
In a lot of situations of scientific experiment and engineering project, carry out again further work after all needing light beam collimated, in this case, people often wish that light beam transmits along specific optical axis, existing beam collimation measuring method can roughly be classified as two classes: a class is to utilize talbot self imaging and folded grid phenomenon, and another kind of is shearing interference method.These two class methods are in the middle of the measurement of beam collimation degree, and the measuring accuracy that can reach is quite high, but its operating process is comparatively complicated, use difficulty high, poor practicability.
Summary of the invention
The present invention seeks to use difficulty high in order to solve comparatively complexity of existing optical beam collimation method operating process, the problem of poor practicability, but a kind of screw-in beam collimation detecting unit and beam collimation degree detection method are provided.
But screw-in beam collimation detecting unit of the present invention, but it comprises laser instrument, iris, crosshair screw-in catoptron, precision rotation platform and imaging device,
But the screw-in catoptron rotates into the position of light path by precision rotation platform control, but but make the angle of the minute surface of screw-in catoptron and Laser Output Beam optical axis equal the screw-in catoptron and the angle imaging device optical axis,
The light beam that laser instrument sends is incident to iris, and the light beam that iris transmits is incident to crosshair, but the cruciform light beam of crosshair outgoing is incident to the screw-in catoptron, but the light beam that the screw-in mirror reflects goes out is incident to imaging device.
Beam collimation degree detection method, the method may further comprise the steps:
The light beam that step 1, laser instrument send outgoing behind iris, crosshair produces the cruciform light beam;
Step 2, adjustment precision rotation platform, but so that the angle of the minute surface of screw-in catoptron and Laser Output Beam optical axis equals imaging device optical axis and minute surface angle;
But step 3, cruciform light beam enter imaging device after the screw-in mirror reflects;
Step 4, imaging device are converted to electric signal transmission to data processing unit with light intensity signal, and data processing unit is analyzed the light spot image that the cross light beam forms, and obtains the collimation of current light beam.
Advantage of the present invention: utilize method of the present invention, can measure fast and accurately the beam collimation degree, and the method is simple, feasible.
Description of drawings
But Fig. 1 is the structural representation of screw-in beam collimation detecting unit of the present invention;
Fig. 2 is the schematic diagram that obtains the beam collimation degree;
Fig. 3 is beam collimation degree detection method process flow diagram.
Embodiment
Embodiment one: below in conjunction with Fig. 1 present embodiment is described, but the described screw-in beam collimation of present embodiment detecting unit, but it comprises laser instrument 1, iris 2, crosshair 3 screw-in catoptrons 4, precision rotation platform 5 and imaging device 6,
But screw-in catoptron 4 rotates into the position of light path by precision rotation platform 5 control, but but make the angle of the minute surface of screw-in catoptron 4 and laser instrument 1 output beam optical axis equal screw-in catoptron 4 and angles imaging device 6 optical axises,
The light beam that laser instrument 1 sends is incident to iris 2, the light beam that iris 2 transmits is incident to crosshair 3, but the cruciform light beam of crosshair 3 outgoing is incident to screw-in catoptron 4, but the light beam that screw-in catoptron 4 reflects is incident to imaging device 6.
The signal input part of the electrical signal connection data processing unit of imaging device 6 links to each other.
As shown in Figure 1, during laser system (laser instrument 1, iris 2 and crosshair 3) work, can screw in catoptron 4 and be positioned at outside the main optical path, work does not exert an influence to laser system, and laser beam can normally enter in the subsequent optical system.During the measuring beam collimation, can screw in catoptron 4 enters in the light path system, laser beam after iris 2 is improved beam quality is reflected mirror and turns back in the imaging device 6, should guarantee that minute surface and laser main optical path systematic optical axis angle equal minute surface and imaging device 6 optical axis included angles, if laser beam is without collimation error, in the image of acquisition, the position of form center of hot spot is positioned at picture centre, have collimation error such as laser beam, position of form center will the slip chart inconocenter, produces relative displacement.
Embodiment two: present embodiment is described further embodiment one, and it also comprises lens 7, and described imaging device 6 is at the focus place of lens 7, but the light beam scioptics 7 that screw-in catoptron 4 reflects are incident to imaging device 6.
The effect of lens 7 is to utilize it that responsive characteristic is pointed in light beam incident, obtains the beam collimation degree by the focal position.
Embodiment three: below in conjunction with Fig. 2 and Fig. 3 present embodiment is described, beam collimation degree detection method, the method may further comprise the steps:
The light beam that step 1, laser instrument 1 send outgoing behind iris 2, crosshair 3 produces the cruciform light beam, is light beam to be measured;
Step 2, adjustment precision rotation platform 5, but so that the angle of the minute surface of screw-in catoptron 4 and laser instrument 1 output beam optical axis equals imaging device 6 optical axises and minute surface angle;
But step 3, cruciform light beam enter imaging device 6 after 4 reflections of screw-in catoptron;
Step 4, imaging device 6 are converted to electric signal transmission to data processing unit with light intensity signal, and data processing unit is analyzed the light spot image that the cross light beam forms, and obtains the collimation of current light beam.
When the step 1 laser system is worked, can screw in catoptron 4 not in light path, light beam is not exerted an influence, the normal operation of assurance system is carried out step 2 again to step 4 during measurement, light beam is imported in the imaging device 6, obtains beam collimation degree information.According to reflection theorem, when guaranteeing that two angles equate, if laser beam without collimation error, in the image of acquisition, the position of form center of hot spot is positioned at picture centre, is conducive to the calculating of later stage collimation degree error.
Among Fig. 2, the beam collimation error can be used θ=(θ x, θ y) expression, the optical system of imaging device 6 (lens 7) focal length is f, obtain that the departure of hot spot position of form center and picture centre is t=(t in the image x, t y), then beam collimation error can be calculated by following formula:
θ x = t x / f θ y = t y / f .

Claims (3)

1. but screw-in beam collimation detecting unit is characterized in that, it comprises laser instrument (1), iris (2), crosshair (3) but screw-in catoptron (4), precision rotation platform (5) and imaging device (6),
But screw-in catoptron (4) is rotated into the position of light path by precision rotation platform (5) control, but make the minute surface of screw-in catoptron (4) and laser instrument (1) but the angle of output beam optical axis equals screw-in catoptron (4) and angle imaging device (6) optical axis
The light beam that laser instrument (1) sends is incident to iris (2), the light beam that iris (2) transmits is incident to crosshair (3), crosshair (3) but the cruciform light beam of outgoing is incident to screw-in catoptron (4), but the light beam that screw-in catoptron (4) reflects is incident to imaging device (6).
2. but screw-in beam collimation detecting unit according to claim 1, it is characterized in that, it also comprises lens (7), and described imaging device (6) is at the focus place of lens (7), but the light beam scioptics (7) that screw-in catoptron (4) reflects are incident to imaging device (6).
3. beam collimation degree detection method is characterized in that, the method may further comprise the steps:
The light beam that step 1, laser instrument (1) send outgoing behind iris (2), crosshair (3) produces the cruciform light beam;
Step 2, adjust precision rotation platform (5), but make the minute surface of screw-in catoptron (4) and laser instrument (1) but the angle of output beam optical axis equals screw-in catoptron (4) and angle imaging device (6) optical axis;
But step 3, cruciform light beam enter imaging device (6) after screw-in catoptron (4) reflection;
Step 4, imaging device (6) are converted to electric signal transmission to data processing unit with light intensity signal, and data processing unit is analyzed the light spot image that the cross light beam forms, and obtains the collimation of current light beam.
CN2012103914636A 2012-10-16 2012-10-16 Screw-in type beam collimation detection unit and method Pending CN102879184A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104075873A (en) * 2013-03-30 2014-10-01 山东华光光电子有限公司 Light spot detecting device and method of high-power semiconductor lasers
CN104792500A (en) * 2015-04-20 2015-07-22 中国科学院上海光学精密机械研究所 Diagnostic method for light beam pointing stability of optical system
CN109141836A (en) * 2018-10-31 2019-01-04 苏州深影光电科技有限公司 Laser alignment light box test fixture and its test method
WO2019075940A1 (en) * 2017-10-19 2019-04-25 深圳光峰科技股份有限公司 Light source spot detection method and detection device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879815A (en) * 1988-10-13 1989-11-14 Adolph Coors Company Alignment apparatus
JP3797704B2 (en) * 1996-04-05 2006-07-19 株式会社ミツトヨ Optical measuring device
CN1971232A (en) * 2006-12-13 2007-05-30 中国科学院光电技术研究所 Hartmann wavefront sensor with active alignment function and detection method thereof
CN101718619A (en) * 2009-12-08 2010-06-02 电子科技大学 Wave-front measuring instrument of collimation deflection beam and measuring method thereof
CN202351020U (en) * 2011-12-14 2012-07-25 山东大学 Device using CCD (charge coupled device) to test divergence angle and uniformity of lighting laser device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879815A (en) * 1988-10-13 1989-11-14 Adolph Coors Company Alignment apparatus
JP3797704B2 (en) * 1996-04-05 2006-07-19 株式会社ミツトヨ Optical measuring device
CN1971232A (en) * 2006-12-13 2007-05-30 中国科学院光电技术研究所 Hartmann wavefront sensor with active alignment function and detection method thereof
CN101718619A (en) * 2009-12-08 2010-06-02 电子科技大学 Wave-front measuring instrument of collimation deflection beam and measuring method thereof
CN202351020U (en) * 2011-12-14 2012-07-25 山东大学 Device using CCD (charge coupled device) to test divergence angle and uniformity of lighting laser device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
孔祥洪: "《大学物理实验教程》", 31 August 2012, 同济大学出版社 *
普洛特尼科夫: "《光学机械仪器设计和计算》", 30 June 1991, 机械工业出版社 *
赵维谦 等: "激光光束特定方向准直方法与技术", 《光电子·激光》 *
黄志高: "《新编大学物理实验》", 31 January 2012, 科学出版社 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104075873A (en) * 2013-03-30 2014-10-01 山东华光光电子有限公司 Light spot detecting device and method of high-power semiconductor lasers
CN104075873B (en) * 2013-03-30 2017-02-08 山东华光光电子股份有限公司 Light spot detecting device and method of high-power semiconductor lasers
CN104792500A (en) * 2015-04-20 2015-07-22 中国科学院上海光学精密机械研究所 Diagnostic method for light beam pointing stability of optical system
WO2019075940A1 (en) * 2017-10-19 2019-04-25 深圳光峰科技股份有限公司 Light source spot detection method and detection device
CN109141836A (en) * 2018-10-31 2019-01-04 苏州深影光电科技有限公司 Laser alignment light box test fixture and its test method

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Application publication date: 20130116