CN201417203Y - Multi-parameter interference bi-imaging measurement device of liquid crystal spatial light modulator - Google Patents
Multi-parameter interference bi-imaging measurement device of liquid crystal spatial light modulator Download PDFInfo
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- CN201417203Y CN201417203Y CN2009200998563U CN200920099856U CN201417203Y CN 201417203 Y CN201417203 Y CN 201417203Y CN 2009200998563 U CN2009200998563 U CN 2009200998563U CN 200920099856 U CN200920099856 U CN 200920099856U CN 201417203 Y CN201417203 Y CN 201417203Y
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Abstract
The utility model provides a multi-parameter interference bi-imaging measurement device of a liquid crystal spatial light modulator, relates to the technical field of photo-electricity test, and solves the problem of the prior characteristic parameter measurement device of a liquid crystal spatial light modulator that multi-parameter measurement requirements cannot be met. The interference bi-imaging measurement device integrates double light path interference and common-path interference into one device through inducting a double image-forming system into a Twyman-Green interference light path; input lights irradiate to a first dispersion prism through a beam expander and a polarizer; transmission lights are modulated and reflected through the liquid crystal spatial light modulator; reflected lights are reflected through a reflecting mirror after passing a shutter; two light paths pass through the first dispersion prism and an analyzer, and then enter a second imaging system through asecond dispersion prism; the transmission lights can enter a first imaging system directly through the first dispersion prism, analyzer and the second dispersion prism after being reflected through the liquid crystal spatial light modulator; and multi-parameter measurement is realized by detecting phase positions and intensities by utilizing the double image-forming system. The utility model is suitable for multi-parameter measuring process of the liquid crystal spatial light modulator.
Description
Technical field
The utility model relates to the photoelectricity test technical field.
Background technology
LCD space light modulator can change photodistributed phase place, polarization state, amplitude (or intensity) and even wavelength on the space under electric drive signal control, or incoherent light is to the conversion of coherent light etc.Being modulated at of phase place and amplitude has important effect in the optical information processing, so LCD space light modulator has important use value at aspects such as wavefront correction, atmosphere imaging, optically filtering and beam shapings.The test of LCD space light modulator characterisitic parameter (characterisitic parameter mainly comprises: phase modulation (PM) characteristic, Modulation and Amplitude Modulation characteristic, phase place unevenness and time resolution characteristics etc.) is a key of grasping this device performance, and present measuring method mainly adopts the conventional interference method.Ge Aiming, Sui's exhibition, Xu Ke Shou etc. on Acta Physica Sinica in 2003 disclosed " research of reflection-type LCOS device pure phase position modulating characteristic " have proposed the phase modulation (PM) characteristic with michelson interferometer measurement reflection-type LCOS LCD, and this method is that double light path is interfered.Lasing light emitter 11 is via the beam expanding lens 12 and the polarizer 13, be divided into two-way light by Amici prism 15, one road light is via after LCD 14 modulation and reflecting, join at Amici prism 15 places with another road light that the mirror 17 that is reflected through compensating plate 16 reflects, interfere through behind the analyzer 18, receive interference fringe by ccd detector 19.By analysis, obtain the phase modulation (PM) characteristic to interference fringe.Though this device can once obtain phase modulation (PM) characteristic average on the entire working surface, this device can only satisfy one-parameter to be measured, and can't obtain other characterisitic parameter (as Modulation and Amplitude Modulation characteristic and time resolution characteristics), and the resolution of measuring is lower.Because ambient vibration and airflow disturbance meeting cause the interference fringe shake, and be therefore very high to the stability requirement of measurement environment, less stable.
" a kind of characteristic research of liquid crystal beam deflector and the application " that the Scott Harris of The Air Force Research Laboratory delivered in calendar year 2001 (Characterization and Application of a Liquid CrystalBeam Steering Device.Proceedings of SPIE.2001,4291:109～119) utilizes common-circuit interference method to measure the phase modulation (PM) characteristic of liquid crystal optics phase array.Lasing light emitter 21 is divided into two-way light through the polarizer 22 by Amici prism 23, and wherein transmitted light is reflected via Amici prism 23 and analyzer 26 by liquid crystal optics phase array 25 through lens 24, enters photodiode 27.Photodiode 27 is surveyed intensity variation, by calculating the phase modulation (PM) characteristic.This device utilizes point-to-point receiving light power, though can obtain the amplitude and the phase modulation (PM) characteristic of difference, the resolution of measurement is higher.But this method can't be distinguished the direction of phase modulation (PM), and can't once obtain amplitude average on the entire working surface and phase modulation (PM) characteristic.
The utility model content
The utility model can't satisfy the requirement of measuring multiple parameters in order to solve existing LCD space light modulator characterisitic parameter measurement mechanism, thereby proposes a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator.
A kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator, it comprises beam expanding lens, the polarizer, first Amici prism, catoptron, LCD space light modulator, analyzer, photodiode and ccd detector, but a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator also comprises switch shutter, second Amici prism, first imaging len, pin hole, prototype with displacement resolution, second imaging len, diaphragm and computing machine; The laser beam of system's input is incident to beam expanding lens, after expanding the bundle shaping, beam expanding lens is incident to the polarizer, behind polarizer polarization, be incident to first Amici prism, the light beam of described first Amici prism after with polarization is divided into first transmitted light and first reflected light, described first transmitted light is incident to the light input end of LCD space light modulator, and the light path along first transmitted light after described LCD space light modulator reflection oppositely is incident to first Amici prism; But described first reflected light is incident to catoptron through the switch shutter, after described mirror reflects, oppositely be incident to first Amici prism along the first catoptrical light path, the reflected light of the reflected light of mirror reflects through reflecting with LCD space light modulator after the transmission of first Amici prism converges and is incident to analyzer after the reflection of first Amici prism, and behind the analyzer polarization, be incident to second Amici prism, the light of second Amici prism after with described polarization is divided into second transmitted light and second reflected light, described second transmitted light focuses to pin hole through first imaging len, is incident to the light input end of photodiode through pin hole; Described second reflected light focuses to diaphragm through second imaging len, incides the light input end of ccd detector through described diaphragm, and described ccd detector signal output part is connected with the secondary signal input end of computing machine; The electrical signal of photodiode is connected with first signal input part of computing machine, and photodiode is fixed on the prototype with displacement resolution, and second control signal output ends of computing machine is connected with the signal input end of prototype with displacement resolution; The signal input end of described LCD space light modulator is connected with first control signal output ends of computing machine, and the light transmission shaft of the described polarizer and the light transmission shaft of analyzer are all adjustable.
Beneficial effect: the utility model has been broken through the limitation that conventional interference method one-parameter is measured, and can satisfy the requirement of measuring multiple parameters; And the double light path interference is fused in the device with common path interference, have complementary advantages, evade deficiency, realized under same experimental provision, same test condition, estimating a plurality of characterisitic parameters of device, avoid different test conditions and repeatedly build the extra error that experimental provision brings; The utility model can also utilize two kinds of methods that same parameter is measured, and by analysis and the comparison to measurement result, obtains the characterisitic parameter of liquid crystal device more exactly; The utility model can guarantee higher measuring accuracy, has improved efficiency of measurement again.
Description of drawings
Fig. 1 is the apparatus structure synoptic diagram in the background technology " research of reflection-type LCOS device pure phase position modulating characteristic "; Fig. 2 is an apparatus structure synoptic diagram in the background technology " a kind of characteristic research of liquid crystal beam deflector and application "; Fig. 3 is the structural representation of the utility model system; Fig. 4 is the polarizer, analyzer and the LCD space light modulator structural representation parallel with light transmission shaft of embodiment two; Fig. 5 is the structural representation at the light transmission shaft angle at 45 polarizer, analyzer and LCD space light modulator of embodiment three.
Embodiment
Embodiment one: this embodiment is described in conjunction with Fig. 3, a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator, it comprises beam expanding lens 2, the polarizer 3, first Amici prism 4, catoptron 6, LCD space light modulator 7, analyzer 8, photodiode 12 and ccd detector 16, but a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator also comprises switch shutter 5, second Amici prism 9, first imaging len 10, pin hole 11, prototype with displacement resolution 13, second imaging len 14, diaphragm 15 and computing machine 17; The laser beam of system's input is incident to beam expanding lens 2, after expanding the bundle shaping, beam expanding lens 2 is incident to the polarizer 3, behind the polarizer 3 polarizations, be incident to first Amici prism 4, described first Amici prism 4 is divided into first transmitted light and first reflected light with the light beam behind the polarization, described first transmitted light is incident to the light input end of LCD space light modulator 7, and the light path along first transmitted light after described LCD space light modulator 7 reflections oppositely is incident to first Amici prism 4; But described first reflected light is incident to catoptron 6 through switch shutter 5, after described catoptron 6 reflections, oppositely be incident to first Amici prism 4 along the first catoptrical light path, the reflected light of the reflected light of catoptron 6 reflections through reflecting with LCD space light modulator 7 after the transmission of first Amici prism 4 converges and is incident to analyzer 8 after the reflection of first Amici prism 4, and behind analyzer 8 polarizations, be incident to second Amici prism 9, the light of second Amici prism 9 after with described polarization is divided into second transmitted light and second reflected light, described second transmitted light focuses to pin hole 11 through first imaging len 10, is incident to the light input end of photodiode 12 through pin hole 11; Described second reflected light focuses to diaphragm 15 through second imaging len 14, incides the light input end of ccd detector 16 through described diaphragm 15, and described ccd detector 16 signal output parts are connected with the secondary signal input end of computing machine 17; The electrical signal of photodiode 12 is connected with first signal input part of computing machine 17, and photodiode 12 is fixed on the prototype with displacement resolution 13, and second control signal output ends of computing machine 17 is connected with the signal input end of prototype with displacement resolution 13; The signal input end of described LCD space light modulator 7 is connected with first control signal output ends of computing machine 17, and the light transmission shaft of the light transmission shaft of the described polarizer 3 and analyzer 8 is all adjustable.
The polarizer 3 of present embodiment and the light transmission shaft of analyzer 8 are adjustable, by controlling the polarization angle of the two, realize the switching of LCD space light modulator 7 pure phase position modulation or phase place and two kinds of mode of operations of intensity common modulation, reach and utilize two imaging systems to obtain the purpose of phase information and strength information respectively.
When the polarization direction of the polarizer 3 and analyzer 8 is all parallel with liquid crystal optic axis, LCD space light modulator 7 is operated in pure phase position modulating mode, light modulated and reference light are interfered, obtain interference fringe by ccd detector 15, thereby the phase information of obtaining, yet interference light intensity does not change with control signal;
When the polarization direction of the polarizer 3 and analyzer 8 during all with liquid crystal optic axis angle at 45, LCD space light modulator 7 is operated in phase place and intensity common modulation pattern, the Strength Changes maximum of light modulated, and photodiode 12 can detect strength information.
Utilize phase information and strength information just can obtain a plurality of characterisitic parameters of LCD space light modulator.
Second Amici prism 9 is Primary Components of two imaging systems, by second Amici prism 9 emergent light is divided into two-way, it is the double light path interference imaging system of detector that one road light enters with ccd detector 16, and it is the common path interference imaging system of detector that another road light enters with photodiode 12.
But switch shutter 5 plays the effect of blocking reference light.When obtaining phase information, but open switch shutter 5, allow reference light to pass through, interfere with light modulated; When obtaining strength information, but close switch shutter 5, cover reference light, have only light modulated output in the light path.
Photodiode 12 is fixed on the prototype with displacement resolution 13, and pin hole 11 is placed in the photodiode front.When gathering strength information, the control prototype with displacement resolution moves along the dot matrix of two-dimentional sampled point, gathers the strength information of difference on the LCD space light modulator 7 one by one.
Embodiment two: this embodiment is described in conjunction with Fig. 4, this embodiment and the difference of the interference type double-imaging measurement device of embodiment one described a kind of multi-parameters of liquid crystal spatial light modulator are that the light transmission shaft of the light transmission shaft of the polarizer 3 and analyzer 8 is all parallel with the liquid crystal optic axis direction of LCD space light modulator 7, but switch shutter 5 is set to opening.
The device of present embodiment is in the double light path interference state, regulate the polarizer 3 and analyzer 8, make the light transmission shaft 102 of the light transmission shaft 100 of the polarizer 3 and analyzer 8 all be parallel to liquid crystal optic axis 101 directions of LCD space light modulator 7, behind the system's input beam process polarizer 3 polarizations, the polarization direction of light beam is parallel to liquid crystal optic axis 101,7 pairs of light of LCD space light modulator produce the modulation of pure phase position, obtain light modulated; But open switch shutter 5, allow catoptron 6 that reference light is reflected, light modulated and reference light converge to first Amici prism 4, interfere behind analyzer 8 polarizations, interference light enters two imaging systems, through second Amici prism 9, imaging len 14 and diaphragm 15, imaging on ccd detector 16, obtain interference fringe by ccd detector 16, thus the phase information of obtaining, i.e. the phase modulation (PM) characteristic of LCD space light modulator 7;
Embodiment three: this embodiment is described in conjunction with Fig. 5, this embodiment is that with the difference of the interference type double-imaging measurement device of embodiment one described a kind of multi-parameters of liquid crystal spatial light modulator the light transmission shaft of the polarizer 3 all becomes 45 jiaos with the liquid crystal optic axis direction of LCD space light modulator 7 with the light transmission shaft of analyzer 8, but switch shutter 5 is set to closed condition.
The device of present embodiment is in the common path interference state, regulate the polarizer 3 and analyzer 8, the light transmission shaft 100 that makes the polarizer 3 and the polarization direction of the light transmission shaft 102 of analyzer 8 all with liquid crystal optic axis 101 angles at 45 of LCD space light modulator 7, behind the system's input beam process polarizer 3 polarizations, the polarization direction of light beam and liquid crystal optic axis 101 angles at 45,7 pairs of light of LCD space light modulator produce phase place and intensity common modulation, light modulated is back to first Amici prism 4, behind analyzer 8 polarizations, enter two imaging systems, through second Amici prism 9, first imaging len 10 and pin hole 11, be incident on the photodiode 12, photodiode 12 is surveyed the variation of output light intensity, by calculating the Modulation and Amplitude Modulation characteristic and the time resolution characteristics of final acquisition LCD space light modulator 7.When the difference signal is gathered in pointwise, also can obtain the phase modulation (PM) unevenness of two-dimentional liquid crystal device.
Embodiment four: this embodiment is that with the difference of the interference type double-imaging measurement device of embodiment one, two or three described a kind of multi-parameters of liquid crystal spatial light modulator the laser beam of the input of system is sent by the He-Ne laser instrument.
Claims (4)
1, a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator, it comprises beam expanding lens (2), the polarizer (3), first Amici prism (4), catoptron (6), LCD space light modulator (7), analyzer (8), photodiode (12) and ccd detector (16) is characterized in that: but a kind of interference type double-imaging measurement device of multi-parameters of liquid crystal spatial light modulator also comprises switch shutter (5), second Amici prism (9), first imaging len (10), pin hole (11), prototype with displacement resolution (13), second imaging len (14), diaphragm (15) and computing machine (17); The laser beam of system's input is incident to beam expanding lens (2), after expanding the bundle shaping, beam expanding lens (2) is incident to the polarizer (3), behind the polarizer (3) polarization, be incident to first Amici prism (4), described first Amici prism (4) is divided into first transmitted light and first reflected light with the light beam behind the polarization, described first transmitted light is incident to the light input end of LCD space light modulator (7), and the light path along first transmitted light after described LCD space light modulator (7) reflection oppositely is incident to first Amici prism (4); But described first reflected light is incident to catoptron (6) through switch shutter (5), after described catoptron (6) reflection, oppositely be incident to first Amici prism (4) along the first catoptrical light path, the reflected light of reflected light through reflecting with LCD space light modulator (7) after the transmission of first Amici prism (4) of catoptron (6) reflection converges and is incident to analyzer (8) after the reflection of first Amici prism (4), and behind analyzer (8) polarization, be incident to second Amici prism (9), the light of second Amici prism (9) after with described polarization is divided into second transmitted light and second reflected light, described second transmitted light focuses to pin hole (11) through first imaging len (10), is incident to the light input end of photodiode (12) through pin hole (11); Described second reflected light focuses to diaphragm (15) through second imaging len (14), incides the light input end of ccd detector (16) through described diaphragm (15), and described ccd detector (16) signal output part is connected with the secondary signal input end of computing machine (17); The electrical signal of photodiode (12) is connected with first signal input part of computing machine (17), photodiode (12) is fixed on the prototype with displacement resolution (13), and second control signal output ends of computing machine (17) is connected with the signal input end of prototype with displacement resolution (13); The signal input end of described LCD space light modulator (7) is connected with first control signal output ends of computing machine (17), and the light transmission shaft of the light transmission shaft of the described polarizer (3) and analyzer (8) is all adjustable.
2, according to the interference type double-imaging measurement device of the described a kind of multi-parameters of liquid crystal spatial light modulator of claim 1, the light transmission shaft that it is characterized in that the light transmission shaft of the polarizer (3) and analyzer (8) is all parallel with the liquid crystal optic axis direction of LCD space light modulator (7), but switch shutter (5) is set to opening.
3, the interference type double-imaging measurement device of a kind of multi-parameters of liquid crystal spatial light modulator according to claim 1, the light transmission shaft that it is characterized in that the light transmission shaft of the polarizer (3) and analyzer (8) all with the liquid crystal optic axis direction angle at 45 of LCD space light modulator (7), but switch shutter (5) is set to closed condition.
4,, it is characterized in that the laser beam of the input of system is sent by the He-Ne laser instrument according to the interference type double-imaging measurement device of claim 1,2 or 3 described a kind of multi-parameters of liquid crystal spatial light modulator.
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| CN2009200998563U CN201417203Y (en) | 2009-05-15 | 2009-05-15 | Multi-parameter interference bi-imaging measurement device of liquid crystal spatial light modulator |
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| CN2009200998563U CN201417203Y (en) | 2009-05-15 | 2009-05-15 | Multi-parameter interference bi-imaging measurement device of liquid crystal spatial light modulator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN102243385A (en) * | 2011-07-14 | 2011-11-16 | 武汉全真光电科技有限公司 | Device for measuring photoelectric characteristic curve of liquid crystal on silicon imaging chip |
| CN106950035A (en) * | 2017-02-23 | 2017-07-14 | 西安交通大学 | The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic |
-
2009
- 2009-05-15 CN CN2009200998563U patent/CN201417203Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109414A (en) * | 2010-12-15 | 2011-06-29 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN102109414B (en) * | 2010-12-15 | 2012-05-02 | 深圳大学 | Method and device for calibrating phase modulation of spatial light modulators by utilizing heterodyne interference |
| CN102243385A (en) * | 2011-07-14 | 2011-11-16 | 武汉全真光电科技有限公司 | Device for measuring photoelectric characteristic curve of liquid crystal on silicon imaging chip |
| CN106950035A (en) * | 2017-02-23 | 2017-07-14 | 西安交通大学 | The device and method of liquid crystal grating interferometry phase modulation of spatial light modulators characteristic |
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Granted publication date: 20100303 Termination date: 20110515 |