CN104344885A - Magnitude-phase absolute calibration device of high-temperature vibration sensor - Google Patents
Magnitude-phase absolute calibration device of high-temperature vibration sensor Download PDFInfo
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- CN104344885A CN104344885A CN201410637628.2A CN201410637628A CN104344885A CN 104344885 A CN104344885 A CN 104344885A CN 201410637628 A CN201410637628 A CN 201410637628A CN 104344885 A CN104344885 A CN 104344885A
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Abstract
The invention provides a magnitude-phase absolute calibration device of a high-temperature vibration sensor. A cylindrical vibration extension rod is fixedly arranged above a standard vibration table, a calibrated sensor is arranged on the top end of the vibration extension rod, and the top of the vibration extension rod and the calibrated sensor are arranged in a high-temperature test chamber; a laser interferometer is arranged outside the high-temperature test chamber; a thermocouple or a platinum resistor is arranged in the high-temperature test chamber which is heated by a heating device; the calibrated sensor is connected with a conditioning amplifier outside the high-temperature test chamber through a high-temperature resistant signal line, and the conditioning amplifier is connected with a data acquisition card; the laser interferometer is connected with a photoelectric converter which is connected with the data acquisition card; the data acquisition card is connected with a computer; the standard vibration table is connected with a power amplifier which is connected with a signal source. According to the magnitude-phase absolute calibration device, the high-temperature test chamber is used for providing high temperature, and the laser interferometer is used as a vibration standard, so as to realize the calibration on sensitivity amplitude and phase of the vibration sensor at high temperature.
Description
Technical field
The invention belongs to vibration measurement technical field, be applied to high-temperature vibrating sensor element, be specifically related to a kind of high-temperature vibrating sensor width phase absolute calibration device.
Background technology
Vibration transducer is widely used in links in the scientific research of defence and military, production and process of the test, is responsible for the function of monitoring and test under various environmental conditions.Find after deliberation, the sensitivity impact of temperature variation on vibration transducer is very large, this is because vibration transducer majority is made up of piezoelectric, according to the characteristic of piezoelectric, when it works beyond reference work temperature (room temperature), its output charge sensitivity will produce great changes.The test error introduced by temperature under high and low temperature environment be can not ignore, and must revise in use procedure to the sensitivity of vibration transducer.This calibrates the temperature response characteristics of vibration transducer with regard to requiring.
The calibration of current vibration transducer is all carry out at normal temperatures, and calibration steps comprises absolute method and relative method two kinds.Vibration absolute calibration is the method characteristic parameter of vibration level and vibration transducer being directly trace the fundamental physical quantity such as length, time, absolute calibration is the minimum method of current vibration calibration uncertainty, and the vibration standard that absolute method uses is laser vibration measurer.Vibration comparison method calibration is by being obtained by a kind of method of school transducer sensitivity by school sensor compared with the reference sensor by absolute calibration, uses the calibration uncertainty of the method large compared with absolute method.
Domestic and international vibration transducer manufacturer can produce the vibration transducer used under high temperature, the calibration of index of generally dispatching from the factory all adopts relative method to complete, and does not also carry out the calibrating installation of the sensor magnitudes sensitivity of absolute method high-temperature vibrating and phase alignment both at home and abroad.
Summary of the invention
The object of the present invention is to provide the device of a kind of high-temperature vibrating sensor width phase absolute calibration, adopt high-temperature test chamber to provide high temperature, adopt laser interferometer as vibration standard, realize vibration transducer Sensitivity magnitude at high temperature and the calibration of phase place.
Realize the technical scheme of the object of the invention: a kind of high-temperature vibrating sensor width phase absolute calibration device, it comprises standard vibration machine, columnar vibration extension rod is fixed with above standard vibration machine, vibration extension rod top is placed by school sensor, vibrates extension rod top and is all placed in high-temperature test chamber by school sensor; On high-temperature test chamber top cover, by position directly over the sensor of school, be provided with heat-protecting glass window, laser interferometer is placed on that high-temperature test chamber is outer, this heat-protecting glass window place; Be provided with thermoelectricity occasionally platinum resistance in high-temperature test chamber, high-temperature test chamber is heated by heating arrangement;
Be connected with the modification amplifier outside high-temperature test chamber by high-temperature resistant signal line by school sensor, modification amplifier is connected with data collecting card; Laser interferometer is connected with photoelectric commutator, and photoelectric commutator is connected with data collecting card; Data collecting card connects computing machine; Standard vibration machine is connected with power amplifier, and power amplifier is connected with signal source, and signal source connects computing machine.
A kind of high-temperature vibrating sensor width phase absolute calibration device as above, the computer control signal source described in it, controls power amplifier by signal source and then control criterion shaking table produces vibration; The vibration of standard vibration machine by vibration extension rod be delivered in high-temperature test chamber by school sensor.
A kind of high-temperature vibrating sensor width phase absolute calibration device as above, the temperature data that occasionally platinum resistance is measured in high-temperature test chamber of the thermoelectricity described in it passes to temperature controller, controls heating arrangement heat by temperature controller.
A kind of high-temperature vibrating sensor width phase absolute calibration device as above, the modification amplifier described in it inputs to data collecting card being become voltage signal by the signal of school sensor, then inputs to computing machine by data collecting card; Described laser interferometer is measured by school sensor sheet surface vibration through heat-protecting glass, then vibration signal is inputed to data collecting card by photoelectric commutator, then inputs to computing machine by data collecting card; Computing machine, resolves by the Sensitivity magnitude of school sensor and phase place for normative reference with the vibration value of laser interferometer.
A kind of high-temperature vibrating sensor width phase absolute calibration device as above, the high temperature described in it is 20 DEG C ~ 800 DEG C.
Effect of the present invention is: the device of high-temperature vibrating sensor width phase of the present invention absolute calibration, high-temperature test chamber is adopted to provide high temperature, adopt laser interferometer as vibration standard, realize vibration transducer Sensitivity magnitude at high temperature and the calibration of phase place.The key technical indexes is:
Operating temperature range: 20 DEG C ~ 800 DEG C;
Operating frequency range: 10Hz ~ 2000Hz;
Amplitude calibration uncertainty: U=0.5% ~ 1.0% (k=2);
Phase alignment uncertainty: U=0.5 ° ~ 1 ° (k=2).
Accompanying drawing explanation
Fig. 1 is a kind of high-temperature vibrating sensor width phase absolute calibration apparatus structure schematic diagram of the present invention.
In figure: 1. high-temperature test chamber; 2. by school sensor; 3. thermal resistance or platinum galvanic couple; 4. standard vibration machine; 5. vibrate extension rod; 6. laser interferometer; 7. power amplifier; 8. signal source; 9. temperature controller; 10. heating arrangement; 11. computing machines; 12. modification amplifiers; 13. data collecting cards; 14. photoelectric commutators.
Embodiment
Below in conjunction with the drawings and specific embodiments, high-temperature vibrating sensor width phase absolute calibration device of the present invention is further described.
As shown in Figure 1, a kind of high-temperature vibrating sensor width phase absolute calibration device of the present invention, described high temperature is 20 DEG C ~ 800 DEG C.It comprises standard vibration machine 4, is fixed with columnar vibration extension rod 5 above standard vibration machine 4, and vibration extension rod 5 top is placed by school sensor 2, vibrates extension rod 5 top and is all placed in high-temperature test chamber 1 by school sensor 2; On high-temperature test chamber 1 top cover, by position directly over school sensor 2, be provided with heat-protecting glass window, laser interferometer 6 is placed on that high-temperature test chamber 1 is outer, this heat-protecting glass window place;
Be provided with thermoelectricity occasionally platinum resistance 3 in high-temperature test chamber 1, high-temperature test chamber 1 is heated by heating arrangement 10.Thermoelectricity occasionally platinum resistance 3 temperature data measured in high-temperature test chamber 1 passes to temperature controller 9, controls heating arrangement 10 heat by temperature controller 9.
Be connected with the modification amplifier 12 outside high-temperature test chamber 1 by high-temperature resistant signal line by school sensor 2, modification amplifier 12 is connected with data collecting card 13; Laser interferometer 6 is connected with photoelectric commutator 14, and photoelectric commutator 14 is connected with data collecting card 13; Data collecting card 13 connects computing machine 11;
Standard vibration machine 4 is connected with power amplifier 7, and power amplifier 7 is connected with signal source 8, and signal source 8 connects computing machine 11.Computing machine 11 control signal source 8, controls power amplifier 7 by signal source 8 and then control criterion shaking table 4 produces vibration; The vibration of standard vibration machine 4 by vibration extension rod 5 be delivered in high-temperature test chamber 1 by school sensor 2.
Modification amplifier 12 inputs to data collecting card 13 being become voltage signal by the signal of school sensor 2, then inputs to computing machine 11 by data collecting card 13; Described laser interferometer 6 is measured by school sensor 2 surface vibration through heat-protecting glass, then vibration signal is inputed to data collecting card 13 by photoelectric commutator 14, then inputs to computing machine 13 by data collecting card 13; Computing machine 11, resolves by the Sensitivity magnitude of school sensor 2 and phase place for normative reference with the vibration value of laser interferometer 6.
The present invention applies sinusoidal vibration signal by standard vibration machine to by school high-temperature vibrating sensor; By vibration extension rod, the sinusoidal signal that standard vibration machine produces is delivered within high-temperature test chamber, provides high-temperature temperature environment by high-temperature test chamber; Normative reference using laser interferometer as vibration value, resolves by the Sensitivity magnitude of school high-temperature vibrating sensor and phase place.
The present invention carries out the absolute calibration of vibration transducer Sensitivity magnitude and phase place under high temperature, and concrete steps are as follows:
A vibration transducer is arranged on the top of vibration extension rod by (), and export sensor to modification amplifier with high-temperature resistant signal line;
B () closes high-temperature test chamber, open heating arrangement, set temperature value also starts to heat;
C () is heated to the temperature value of setting, after constant 30 minutes, open standard vibration machine to suitable vibration level;
D () measures the output signal of laser interferometer and vibration transducer simultaneously, calculate vibration transducer amplitude sensitivity at such a temperature and phase place.
E () repeats above step, obtain the vibration transducer Sensitivity magnitude under different temperatures and phase place, can draw the temperature characteristics of Sensitivity magnitude and phase place.
Claims (5)
1. a high-temperature vibrating sensor width phase absolute calibration device, it is characterized in that: this device comprises standard vibration machine (4), columnar vibration extension rod (5) is fixed with in standard vibration machine (4) top, vibration extension rod (5) top is placed by school sensor (2), vibrates extension rod (5) top and is all placed in high-temperature test chamber (1) by school sensor (2); On high-temperature test chamber (1) top cover, by position directly over school sensor (2), be provided with heat-protecting glass window, laser interferometer (6) be placed on high-temperature test chamber (1) outward, this heat-protecting glass window place;
Be provided with thermoelectricity occasionally platinum resistance (3) in high-temperature test chamber (1), high-temperature test chamber (1) is heated by heating arrangement (10);
Be connected with high-temperature test chamber (1) modification amplifier outward (12) by high-temperature resistant signal line by school sensor (2), modification amplifier (12) is connected with data collecting card (13); Laser interferometer (6) is connected with photoelectric commutator (14), and photoelectric commutator (14) is connected with data collecting card (13); Data collecting card (13) connects computing machine (11);
Standard vibration machine (4) is connected with power amplifier (7), and power amplifier (7) is connected with signal source (8), and signal source (8) connects computing machine (11).
2. a kind of high-temperature vibrating sensor width phase absolute calibration device according to claim 1, it is characterized in that: described computing machine (11) control signal source (8), control power amplifier (7) and then control criterion shaking table (4) generation vibration by signal source (8); The vibration of standard vibration machine (4) by vibration extension rod (5) be delivered in high-temperature test chamber (1) by school sensor (2).
3. a kind of high-temperature vibrating sensor width phase absolute calibration device according to claim 1, it is characterized in that: the described thermoelectricity temperature data that occasionally platinum resistance (3) is measured in high-temperature test chamber (1) passes to temperature controller (9), controls heating arrangement (10) heat by temperature controller (9).
4. a kind of high-temperature vibrating sensor width phase absolute calibration device according to claim 1, it is characterized in that: described modification amplifier (12) inputs to data collecting card (13) being become voltage signal by the signal of school sensor (2), then inputs to computing machine (11) by data collecting card (13); Described laser interferometer (6) is measured by school sensor (2) surface vibration through heat-protecting glass, then vibration signal is inputed to data collecting card (13) by photoelectric commutator (14), then input to computing machine (13) by data collecting card (13); Computing machine (11), resolves by the Sensitivity magnitude of school sensor (2) and phase place for normative reference with the vibration value of laser interferometer (6).
5. a kind of high-temperature vibrating sensor width phase absolute calibration device according to claim 1, is characterized in that: described high temperature is 20 DEG C ~ 800 DEG C.
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| CN201410637628.2A CN104344885A (en) | 2014-11-05 | 2014-11-05 | Magnitude-phase absolute calibration device of high-temperature vibration sensor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549118A (en) * | 2016-01-11 | 2016-05-04 | 吉林大学 | Electromagnetic sensor calibration chamber apparatus and calibration method |
| CN106969826A (en) * | 2017-04-10 | 2017-07-21 | 西安航天动力试验技术研究所 | The calibrating installation and calibration method of a kind of vibrating sensor |
| CN108007559A (en) * | 2017-11-10 | 2018-05-08 | 西安航天动力试验技术研究所 | Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum |
| CN108519499A (en) * | 2018-03-27 | 2018-09-11 | 上海精密计量测试研究所 | The acceleration amplitude on-line calibration system of laser vibrometer system under hot conditions |
| CN110187146A (en) * | 2019-07-12 | 2019-08-30 | 北京航天计量测试技术研究所 | A kind of shock accelerometer calibrating installation and method |
| CN110208577A (en) * | 2019-07-12 | 2019-09-06 | 北京航天计量测试技术研究所 | A kind of structure excited by impact and calibrating installation of shock accelerometer calibrating installation |
| CN110987016A (en) * | 2019-12-18 | 2020-04-10 | 北京振兴计量测试研究所 | Dynamic characteristic calibration system for dynamically tuned gyroscope flexible assembly |
| CN111412974A (en) * | 2020-05-07 | 2020-07-14 | 中国船舶重工集团公司第七一五研究所 | System and method for calibrating co-vibration vector sensor |
| CN112556827A (en) * | 2020-10-22 | 2021-03-26 | 中国计量科学研究院 | High-acceleration vibration calibration method and device based on laser interferometry |
| CN114383712A (en) * | 2022-01-21 | 2022-04-22 | 中国计量科学研究院 | High-temperature calibration method and device for sensitivity of vibration sensor |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105549118A (en) * | 2016-01-11 | 2016-05-04 | 吉林大学 | Electromagnetic sensor calibration chamber apparatus and calibration method |
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| CN108007559A (en) * | 2017-11-10 | 2018-05-08 | 西安航天动力试验技术研究所 | Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum |
| CN108519499A (en) * | 2018-03-27 | 2018-09-11 | 上海精密计量测试研究所 | The acceleration amplitude on-line calibration system of laser vibrometer system under hot conditions |
| CN110208577A (en) * | 2019-07-12 | 2019-09-06 | 北京航天计量测试技术研究所 | A kind of structure excited by impact and calibrating installation of shock accelerometer calibrating installation |
| CN110187146A (en) * | 2019-07-12 | 2019-08-30 | 北京航天计量测试技术研究所 | A kind of shock accelerometer calibrating installation and method |
| CN110187146B (en) * | 2019-07-12 | 2024-06-11 | 北京航天计量测试技术研究所 | Impact accelerometer calibration device and method |
| CN110987016A (en) * | 2019-12-18 | 2020-04-10 | 北京振兴计量测试研究所 | Dynamic characteristic calibration system for dynamically tuned gyroscope flexible assembly |
| CN111412974A (en) * | 2020-05-07 | 2020-07-14 | 中国船舶重工集团公司第七一五研究所 | System and method for calibrating co-vibration vector sensor |
| CN112556827A (en) * | 2020-10-22 | 2021-03-26 | 中国计量科学研究院 | High-acceleration vibration calibration method and device based on laser interferometry |
| CN114383712A (en) * | 2022-01-21 | 2022-04-22 | 中国计量科学研究院 | High-temperature calibration method and device for sensitivity of vibration sensor |
| CN114383712B (en) * | 2022-01-21 | 2023-11-07 | 中国计量科学研究院 | High-temperature calibration method and device for sensitivity of vibration sensor |
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